JP2002216338A

JP2002216338A - Perpendicular magnetic recording media and magnetic storage

Info

Publication number: JP2002216338A
Application number: JP2001013538A
Authority: JP
Inventors: Ichiro Tamai; 一郎玉井; Tomoo Yamamoto; 朋生山本; Yuzuru Hosoe; 譲細江
Original assignee: Hitachi Ltd
Current assignee: Hitachi Ltd
Priority date: 2001-01-22
Filing date: 2001-01-22
Publication date: 2002-08-02
Anticipated expiration: 2021-01-22
Also published as: JP3643536B2

Abstract

PROBLEM TO BE SOLVED: To provide a mass magnetic storage such that the ultra high density recording of 50 G bits/in2 or more can be carried out. SOLUTION: The perpendicular recording layers 44, 44' are formed through the soft magnetic layers 41, 41' and two layers of the intermediate layers on a substrate 40. In two layers of intermediate layers, the crystal structure of the first intermediate layers 42, 42' adjacent to the soft magnetic layer, is a face-centered cubic structure (f.c.c), and that of the second intermediate layers 43, 43' adjacent to a perpendicular recording layer is a hexagonal closest packed structure (h.c.p). And they consist of Co and Cr as the principal components and contain at least one kind of element selected from Ta, V, W, Nb, and Mo.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、１平方インチあた
り５０ギガビット以上の超高密度記録に適した垂直磁気
記録媒体、及びその磁気記録媒体を用いた磁気記憶装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perpendicular magnetic recording medium suitable for ultra-high density recording of 50 gigabits per square inch or more, and a magnetic storage device using the magnetic recording medium.

【０００２】[0002]

【従来の技術】近年、コンピュータが扱う情報量が増大
し、補助記憶装置の大容量化が一段と求められている。
現在実用化されている磁気ディスク装置は面内記録方式
を採用しており、その面記録密度は１０Ｇｂ／ｉｎ²に
到達している。しかし、この方式では媒体に記録した信
号が熱揺らぎの影響によって減衰することがY. Hosoe等
によって報告されている（IEEE Trans. Magn., vol.33,
No. 5, September 1997）。2. Description of the Related Art In recent years, the amount of information handled by computers has increased, and the capacity of auxiliary storage devices has been further required.
Currently practical magnetic disk devices employ an in-plane recording method, and the areal recording density has reached 10 Gb / in ² . However, it has been reported by Y. Hosoe et al. That the signal recorded on the medium is attenuated by the influence of thermal fluctuation in this method (IEEE Trans. Magn., Vol. 33,
No. 5, September 1997).

【０００３】一方、垂直記録方式は、面内記録方式に比
べて高記録密度領域での反磁界が小さいため、面内記録
方式に比べて高密度化に有利であると言われている。し
かし、垂直記録方式であっても、高密度化が進むにつれ
て記録ビットは小さくなり、より高感度な再生ヘッドを
使用するため、媒体ノイズの低減は必須である。また、
それと同時に垂直記録媒体の熱揺らぎの問題も、例えば
IEEE Trans. Magn., Vol.31,pp.2755-2757(1995)に記載
されており、垂直記録方式においても出力の減衰を抑え
る工夫が検討されている。On the other hand, the perpendicular recording method is said to be advantageous in increasing the density as compared with the longitudinal recording method because the demagnetizing field in the high recording density region is smaller than that of the longitudinal recording method. However, even in the perpendicular recording method, the recording bit becomes smaller as the density increases, and a more sensitive reproducing head is used. Therefore, it is essential to reduce the medium noise. Also,
At the same time, the problem of thermal fluctuations in perpendicular recording media, for example,
This is described in IEEE Trans. Magn., Vol. 31, pp. 275-2757 (1995), and a device for suppressing output attenuation even in a perpendicular recording system is being studied.

【０００４】[0004]

【発明が解決しようとする課題】５０Ｇｂ／ｉｎ²以上
の高密度記録が可能な垂直記録媒体には、高密度領域に
おける出力分解能が大きいことと媒体ノイズが小さいこ
とが必要とされる。そのためには、例えば第５回垂直磁
気記録シンポジウム会議資料集（１９９６年１０月２３
日−２５日）９５〜１００頁の「単層垂直磁気ディスク
媒体の高Ｓ／Ｎ化」と題する論文に記載されているよう
に、垂直記録層の膜厚を小さくする、垂直記録層と基板
の間に非磁性のＣｏＣｒ下地を導入する、あるいはＣｏ
合金記録層の添加元素としてＴａ等の非磁性元素を添加
する、磁性結晶粒を小さくすることが有効であることが
知られている。また、軟磁性層を有する二層垂直媒体と
単磁極ヘッドを組み合わせる場合、ヘッド−媒体間相互
作用を増大させるために、軟磁性層と垂直記録層の間に
形成する中間層厚を薄くする必要がある。A perpendicular recording medium capable of high-density recording of 50 Gb / in ² or more needs to have high output resolution in a high-density region and low medium noise. For that purpose, for example, the 5th perpendicular magnetic recording symposium meeting materials (October 23, 1996
As described in a paper entitled “Higher S / N ratio of a single-layer perpendicular magnetic disk medium” on pages 95 to 100, the perpendicular recording layer and the substrate are reduced in thickness. A nonmagnetic CoCr underlayer is introduced between
It is known that it is effective to add a non-magnetic element such as Ta as an additive element of the alloy recording layer and to reduce the magnetic crystal grains. When a two-layer perpendicular medium having a soft magnetic layer is combined with a single pole head, the thickness of the intermediate layer formed between the soft magnetic layer and the perpendicular recording layer must be reduced in order to increase the head-medium interaction. There is.

【０００５】本発明の第一の目的は、軟磁性層と垂直記
録層の間に中間層を形成した二層垂直記録媒体におい
て、記録時のスペーシングロスを低減するために薄膜化
した中間層を用いても垂直記録層を充分に垂直配向さ
せ、媒体ノイズが十分低く、かつ耐熱揺らぎ特性に優れ
た二層垂直記録媒体を提供することにある。本発明の第
二の目的は、この磁気記録媒体の性能を充分に活かし、
１平方インチあたり５０ギガビット以上の面記録密度を
有する磁気記憶装置を提供することにある。A first object of the present invention is to provide a two-layer perpendicular recording medium having an intermediate layer formed between a soft magnetic layer and a perpendicular recording layer, wherein the intermediate layer has a reduced thickness in order to reduce spacing loss during recording. It is an object of the present invention to provide a two-layer perpendicular recording medium in which the perpendicular recording layer is sufficiently perpendicularly oriented even when the medium is used, the medium noise is sufficiently low, and the thermal fluctuation characteristics are excellent. A second object of the present invention is to make full use of the performance of this magnetic recording medium,
An object of the present invention is to provide a magnetic storage device having an areal recording density of 50 gigabits per square inch or more.

【０００６】[0006]

【課題を解決するための手段】上記課題は、垂直磁気記
録媒体を、面心立方（f.c.c.）構造を有する第１の層
と、第１の層上に形成された六方最密（h.c.p.）構造を
有する第２の層と、第２の層上に形成された垂直記録層
とを有する構成とし、第２の層はＣｏとＣｒを主成分と
し、さらにＴａ，Ｖ，Ｗ，Ｎｂ，Ｍｏから選ばれた少な
くとも1種の元素を含むことで達成される。An object of the present invention is to provide a perpendicular magnetic recording medium comprising a first layer having a face-centered cubic (fcc) structure, and a hexagonal close-packed (hcp) structure formed on the first layer. And a perpendicular recording layer formed on the second layer. The second layer contains Co and Cr as main components, and further includes Ta, V, W, Nb, and Mo. This is achieved by including at least one selected element.

【０００７】上記垂直磁気記録媒体は、典型的には、基
板上に軟磁性層と二層の中間層を介して形成された垂直
記録層を有する磁気記録媒体において、軟磁性層に隣接
する第一中間層（第１の層）の結晶構造がf.c.c.構造で
あり、垂直記録層に隣接する第二中間層（第２の層）が
h.c.p.構造でＣｏとＣｒを主成分とし、さらにＴａ，
Ｖ，Ｗ，Ｎｂ，Ｍｏより選ばれた少なくとも１種の元素
を含む。Typically, the perpendicular magnetic recording medium is a magnetic recording medium having a perpendicular recording layer formed on a substrate with a soft magnetic layer and two intermediate layers interposed between the soft magnetic layer and the soft magnetic layer. The crystal structure of one intermediate layer (first layer) is an fcc structure, and the second intermediate layer (second layer) adjacent to the perpendicular recording layer is
In the hcp structure, Co and Cr are the main components, and Ta,
Contains at least one element selected from V, W, Nb, and Mo.

【０００８】上記第二中間層は、少なくとも５０ａｔ．
％以上のＣｏと、Ｃｒを２５ａｔ．％以上、４５ａｔ．
％以下含み、Ｔａ，Ｖ，Ｗ，Ｎｂ，Ｍｏより選ばれた少
なくとも１種の元素を０．５ａｔ．％以上、１５ａｔ．
％以下含むことが、中間層を薄膜化する上で好ましい。
Ｃｒ添加濃度が２５ａｔ．％より少ないと中間層の磁性
が大きくなり、その磁性の影響で記録層のＨｃが低くな
る等の問題がある。また、Ｃｒ添加濃度が４５ａｔ．％
よりも多いと中間層の配向が崩れてしまうため、好まし
くない。なお、Ｔａ，Ｖ，Ｗ，Ｎｂ，Ｍｏより選ばれた
少なくとも１種の元素の含有量を２ａｔ．％以上、１０
ａｔ．％以下とするとより好ましい。The second intermediate layer has at least 50 at.
% Of Co and Cr at 25 at. % Or more, 45 at.
% Of at least one element selected from Ta, V, W, Nb and Mo. % Or more, 15 at.
% Or less is preferable for reducing the thickness of the intermediate layer.
Cr addition concentration is 25 at. %, The magnetic property of the intermediate layer increases, and there is a problem that the Hc of the recording layer decreases due to the influence of the magnetic property. When the Cr concentration is 45 at. %
If it is more than this, the orientation of the intermediate layer is undesirably lost. The content of at least one element selected from Ta, V, W, Nb, and Mo is set to 2 at. % Or more, 10
at. % Is more preferable.

【０００９】図１に、ＣｏＣｒ₃₀中間層にＭｏを添加し
た媒体の静磁気特性の変化を示す。Ｍｏを０．５ａｔ．
％以上、１５ａｔ．％以下添加すると、Ｈｃ（保磁
力），ＳＱが向上する。添加濃度が０．５ａｔ．％より
少ない領域では記録層結晶の垂直配向性改善効果が小さ
く、１５ａｔ．％より多く添加するとh.c.p.構造が崩れ
てＨｃが減少すると考えられる。ＣｏＣｒに第三元素を
添加するとＨｃ，ＳＱが改善される理由として、記録層
と中間層の格子整合性が考えられる。記録層には、保磁
力向上、及びノイズ低減を目的としてＣｏＣｒＰｔ合金
にＴａ，Ｂ，Ｔｉ，Ｎｂ等を添加することが提案されて
おり、そのような合金では格子サイズが変化する。それ
に対してＣｏＣｒ合金では、ＣｏとＣｒの原子半径がほ
ぼ同等であるため、概ね純Ｃｏの結晶格子サイズとな
る。中間層と記録層は同じh.c.p.構造なのでエピタキシ
ャル成長が可能であるが、格子サイズのミスマッチが大
きな場合は、成長段階で結晶性の低い微細な結晶粒が生
成されることが予測される。このような結晶粒はＨｃ，
ＳＱの低下とともに耐熱揺らぎ特性も劣化させるため、
好ましくない。そこで本発明者らは、中間層にＣｏ，Ｃ
ｒよりも原子半径の大きな元素を添加したところ、中間
層と記録層の格子サイズのミスフィットが減少し、微細
な結晶粒、欠陥等の生成が抑止され、Ｈｃ，ＳＱが向上
することを見出した。FIG. 1 shows a change in magnetostatic characteristics of a medium in which Mo is added to a CoCr ₃₀ intermediate layer. Mo at 0.5 at.
% Or more, 15 at. % Or less, Hc (coercive force) and SQ are improved. When the addition concentration is 0.5 at. %, The effect of improving the perpendicular orientation of the recording layer crystal is small in the region less than 15 at. %, It is considered that the hcp structure collapses and Hc decreases. The reason why Hc and SQ are improved by adding a third element to CoCr is considered to be lattice matching between the recording layer and the intermediate layer. It has been proposed to add Ta, B, Ti, Nb or the like to a CoCrPt alloy for the purpose of improving coercive force and reducing noise in the recording layer, and the lattice size changes in such an alloy. On the other hand, in the CoCr alloy, the atomic radii of Co and Cr are substantially the same, so that the crystal lattice size is almost pure Co. Since the intermediate layer and the recording layer have the same hcp structure, epitaxial growth is possible. However, if there is a large mismatch in lattice size, it is expected that fine crystal grains with low crystallinity will be generated at the growth stage. Such crystal grains are Hc,
In order to deteriorate the heat fluctuation characteristics with the decrease of SQ,
Not preferred. Therefore, the present inventors have proposed that Co, C
It has been found that when an element having an atomic radius larger than r is added, misfit between the lattice size of the intermediate layer and the recording layer is reduced, the generation of fine crystal grains, defects, and the like is suppressed, and Hc and SQ are improved. Was.

【００１０】上記第二中間層はf.c.c.構造の第一中間層
上に形成すると、第二中間層の結晶配向性が向上するの
で特に好ましい。面記録密度５０Ｇｂ／ｉｎ²以上を達
成するには、出力分解能を向上する必要があり、中間層
の総厚を１０ｎｍ以下とする必要がある。特開昭６２−
１８３０２４号公報や、特開平８−３０９５１号公報等
に開示されているＣ中間層は、Ｃが隣接する膜内に拡散
するため、Ｃ上に形成する中間層の膜厚を厚くしなけれ
ばならない。図２に第一中間層としてＣとＣｕを形成し
た媒体における静磁気特性の第二中間層膜厚依存をそれ
ぞれ示す。この場合の第二中間層はＣｏ₆₆Ｃｒ₃₀Ｍｏ₄
（数字はａｔ．％、以下同様）とした。Ｃｕを第一中間
層として用いることで、第二中間層を薄膜化しても静磁
気特性の劣化がほとんど見られないことがわかる。一
方、Ｃを第一中間層として用いた場合、第二中間層の膜
厚が１０ｎｍ以下になるとＨｃ、ＳＱが急激に劣化する
ため、中間層の薄膜化が困難である。この場合のＣｕは
室温で形成したものであり、Ｘ線回折によって結晶配向
性を調べたところ、最稠密面である（１１１）が基板面
と平行となるように成長していた。f.c.c.構造の（１１
１）は原子配列がh.c.p.構造の（０００２）と同じであ
り、かつ、Ｃｕの最隣接原子間距離はＣｏのａ軸長と同
等であることから、第二中間層のエピタキシャル成長が
容易になると考えられる。このことから、Ｃｕ中間層と
h.c.p.中間層を積層した本発明の構造の媒体は中間層の
薄膜化に適しており、中間層が薄い領域でも配向性が良
好なことから、出力分解能特性が向上し、さらに耐熱揺
らぎ特性が向上することが予測できる。It is particularly preferable to form the second intermediate layer on the first intermediate layer having the fcc structure, since the crystal orientation of the second intermediate layer is improved. In order to achieve a surface recording density of 50 Gb / in ² or more, it is necessary to improve the output resolution, and the total thickness of the intermediate layer needs to be 10 nm or less. JP-A-62-2
In the C intermediate layer disclosed in 183024 and JP-A-8-30951, since C diffuses into an adjacent film, the thickness of the intermediate layer formed on C must be increased. . FIG. 2 shows the dependence of the magnetostatic property on the medium in which C and Cu are formed as the first intermediate layer, respectively, in the thickness of the second intermediate layer. The second intermediate layer in this case is Co ₆₆ Cr ₃₀ Mo ₄
(The figures are at.%, And the same applies hereinafter.) It can be seen that by using Cu as the first intermediate layer, even if the second intermediate layer is thinned, almost no deterioration in magnetostatic characteristics is observed. On the other hand, when C is used as the first intermediate layer, when the thickness of the second intermediate layer becomes 10 nm or less, Hc and SQ rapidly deteriorate, and it is difficult to reduce the thickness of the intermediate layer. In this case, Cu was formed at room temperature, and the crystal orientation was examined by X-ray diffraction. As a result, it was found that the closest dense plane (111) was grown parallel to the substrate plane. fcc structure (11
In 1), the atomic arrangement is the same as that of (0002) in the hcp structure, and the distance between the nearest atoms of Cu is equal to the a-axis length of Co. Therefore, it is considered that the epitaxial growth of the second intermediate layer becomes easy. Can be From this, the Cu intermediate layer and
The medium having the structure of the present invention, in which the hcp intermediate layer is laminated, is suitable for thinning the intermediate layer, and has good orientation even in a region where the intermediate layer is thin, so that the output resolution characteristic is improved and the heat fluctuation characteristic is further improved Can be predicted.

【００１１】面心立方構造中間層を用いる公知例として
は、例えば特開平６−７６２６０号公報が挙げられる。
しかし、この公知例はf.c.c.構造中間層上に直接、もし
くは体心立方構造あるいはf.c.c.構造の軟磁性層を介し
て記録層を形成するものであり、本発明とは媒体構造が
異なる。すなわち、本発明は、f.c.c.構造中間層上に直
接記録層を形成せずに、h.c.p.構造の第二中間層を介し
て記録層を形成することによりＨｃ，ＳＱの高い媒体を
提供する。また、軟磁性層上に直接記録層を形成する
と、軟磁性層の磁性の影響によって記録層のＨｃは低く
なる問題がある。よって、本発明のh.c.p.中間層とf.c.
c.中間層を積層した構造を有する垂直記録媒体は、従来
よりも優れた特性を有する。A well-known example using a face-centered cubic structure intermediate layer is disclosed, for example, in Japanese Patent Application Laid-Open No. 6-76260.
However, in this known example, the recording layer is formed directly on the intermediate layer of the fcc structure or via the soft magnetic layer having the body-centered cubic structure or the fcc structure, and the medium structure is different from the present invention. That is, the present invention provides a medium having high Hc and SQ by forming the recording layer via the second intermediate layer having the hcp structure without forming the recording layer directly on the intermediate layer having the fcc structure. Further, when the recording layer is formed directly on the soft magnetic layer, there is a problem that Hc of the recording layer is lowered due to the influence of the magnetism of the soft magnetic layer. Therefore, the hcp intermediate layer of the present invention and fc
c. A perpendicular recording medium having a structure in which an intermediate layer is laminated has characteristics superior to those of a conventional recording medium.

【００１２】また、二層の中間層を用いた垂直記録媒体
の公知例として、例えば特開平８−３０９５１号公報が
挙げられる。これは、第一中間層としてＣを用い、第二
中間層にはＰｔ又はＰｄを用いている。Ｐｔ，Ｐｄは面
心立方構造であり、第一中間層もＣであることから、本
発明とは媒体構成が異なる。Ｃ中間層を用いた場合に
は、前述したようにＣの拡散を考慮して第二中間層の膜
厚を１０〜４０ｎｍと厚くする必要があり、このような
媒体ではスペーシングロスが大きいため、急峻な記録磁
界勾配が得られない。また、Ｐｔを中間層として用いた
場合、隣接する膜のＣｏと反応する可能性が非常に高
い。特に軟磁性層の磁区制御のために加熱をした場合、
あるいはスパッタリング粒子のエネルギーによる界面で
のミキシング等が起こった場合、永久磁石材料として知
られているＣｏ−Ｐｔが生成される。これは非常に高保
磁力であり、媒体ノイズの増大につながるため好ましく
ない。よって、積層する中間層の構成が異なるため、本
発明であるh.c.p.中間層とf.c.c.構造中間層を積層した
媒体構造を容易に類推することはできない。A known example of a perpendicular recording medium using two intermediate layers is disclosed in, for example, JP-A-8-30951. This uses C for the first intermediate layer and Pt or Pd for the second intermediate layer. Since Pt and Pd have a face-centered cubic structure and the first intermediate layer is also C, the medium configuration is different from that of the present invention. When the C intermediate layer is used, it is necessary to increase the thickness of the second intermediate layer to 10 to 40 nm in consideration of the diffusion of C as described above, and since such a medium has a large spacing loss, , A steep recording magnetic field gradient cannot be obtained. Further, when Pt is used as the intermediate layer, there is a very high possibility of reacting with Co of the adjacent film. Especially when heating for controlling the magnetic domain of the soft magnetic layer,
Alternatively, when mixing or the like occurs at the interface due to the energy of the sputtered particles, Co-Pt known as a permanent magnet material is generated. This is not preferable because it has a very high coercive force and leads to an increase in medium noise. Therefore, since the configuration of the laminated intermediate layers is different, the medium structure of the present invention in which the hcp intermediate layer and the fcc structure intermediate layer are laminated cannot be easily analogized.

【００１３】また、二層下地層を用いる例を挙げると、
特開２０００−２５１２３７号公報には、基板上に、b.
c.c.構造又はＢ２構造の下部下地層とh.c.p.構造を持つ
Ｃｏ−Ｃｒ−Ｍ合金上部下地層（ＭはＭｏ，Ｔａ等）と
の２層構造下地層を介してＣｏ合金記録層を形成するこ
とが記載されている。しかし、この公知例は面内記録媒
体に関するものである点で本発明とは異なる。また、f.
c.c.構造の第一中間層に関しては記載がなく、公知例の
b.c.c.構造又はＢ２構造の下部下地層の役割は、その上
に形成されるＣｏ−Ｃｒ−Ｍ上部下地層を（１０１０）
配向又は（１１２０）配向させることである。一方、本
発明のf.c.c.構造の第一中間層は、その上に形成される
Ｃｏ−Ｃｒ−Ｍ層を（０００２）配向させることであ
り、その目的が全く異なる。従って、この公知例は本発
明を示唆するものではない。Further, an example using a two-layer underlayer is as follows.
JP-A-2000-251237 discloses that b.
It is possible to form a Co alloy recording layer via a two-layer structure underlayer of a lower underlayer of a cc structure or a B2 structure and an upper underlayer of a Co-Cr-M alloy having an hcp structure (M is Mo, Ta, etc.). Has been described. However, this known example differs from the present invention in that it relates to an in-plane recording medium. Also, f.
There is no description about the first intermediate layer of the cc structure,
The role of the lower underlayer of the bcc structure or the B2 structure is to make the upper underlayer of Co-Cr-M formed thereon (1010).
Orientation or (1120) orientation. On the other hand, the first intermediate layer of the fcc structure of the present invention is to orient the Co-Cr-M layer formed thereon on (0002), and the purpose is completely different. Therefore, this known example does not suggest the present invention.

【００１４】ここまでは二層中間層を有する媒体構造に
ついて述べたが、軟磁性層と第一中間層との間に非晶質
の下地層を挿入すると、さらに垂直配向性が向上するの
でより好ましい。その理由として、記録ヘッドから流入
する磁束が飽和しないように軟磁性層は膜厚を厚くする
必要があり、その表面状態の制御は困難である。このよ
うな表面状態の影響を無くすために非晶質下地層を挿入
すると、その上に形成する第一中間層の配向性が向上す
る。また、軟磁性層には結晶質なものもあり、その場
合、同様に非晶質下地層によって表面状態の影響をなく
すと、第一中間層の配向性が向上するので好ましい。但
し、Ｃのような軽元素は隣接する膜中への拡散の問題が
あるため、第二中間層の薄膜化が困難となり、好ましく
ない。また、この場合も下地層を含めた軟磁性層から記
録層までの距離は１０ｎｍ以下とする必要がある。The medium structure having a two-layer intermediate layer has been described above. However, when an amorphous underlayer is inserted between the soft magnetic layer and the first intermediate layer, the perpendicular orientation is further improved, so that preferable. The reason is that the thickness of the soft magnetic layer needs to be large so that the magnetic flux flowing from the recording head is not saturated, and it is difficult to control the surface state. When an amorphous underlayer is inserted in order to eliminate the influence of such a surface state, the orientation of the first intermediate layer formed thereon is improved. Some soft magnetic layers are crystalline. In such a case, it is preferable to remove the influence of the surface state by using an amorphous underlayer because the orientation of the first intermediate layer is improved. However, since a light element such as C has a problem of diffusion into an adjacent film, it is difficult to reduce the thickness of the second intermediate layer, which is not preferable. Also in this case, the distance from the soft magnetic layer including the underlayer to the recording layer needs to be 10 nm or less.

【００１５】上述した本発明構造の垂直記録媒体は、四
元系記録層と組み合わせると、特にその効果が発揮され
る。媒体ノイズ低減のためにＣｏＣｒＰｔ合金にＢを添
加した記録層では、粒径の微細化及び粒間相互作用の低
減は達成されるが、垂直配向が乱れることが懸念され
る。このような配向が乱れやすい記録層を用いても、h.
c.p.中間層とf.c.c.中間層を積層した中間層を用いるこ
とで、上述したように記録層の良好な垂直配向が得られ
る。また、他にもＴａ，Ｔｉ，Ｎｂ等を添加した記録層
を用いると、ある程度媒体ノイズは低減するが、Ｂ添加
時に比べると若干劣る。しかし、記録層の垂直配向性は
Ｂ添加時よりも良いため、ＳＱがほぼ１．０を示し、出
力分解能特性、耐熱揺らぎ特性が向上することが予測で
きる。The above-described perpendicular recording medium having the structure of the present invention particularly exhibits its effect when combined with a quaternary recording layer. In the recording layer in which B is added to the CoCrPt alloy for reducing the medium noise, the grain size is reduced and the intergranular interaction is reduced, but there is a concern that the vertical orientation is disturbed. Even when using such a recording layer in which the orientation is easily disturbed, h.
By using an intermediate layer in which the cp intermediate layer and the fcc intermediate layer are stacked, good vertical orientation of the recording layer can be obtained as described above. When a recording layer to which Ta, Ti, Nb or the like is added is used, the medium noise is reduced to some extent, but is slightly inferior to that when B is added. However, since the vertical orientation of the recording layer is better than that when B is added, the SQ is almost 1.0, and it can be predicted that the output resolution characteristics and the heat fluctuation characteristics are improved.

【００１６】さらに、磁気記録媒体と、磁気記録媒体を
記録方向に駆動する手段と、記録部と再生部とを備える
磁気ヘッドと、磁気ヘッドを磁気記録媒体に対して相対
的に駆動する手段と、磁気ヘッドに対する入力信号及び
出力信号を波形処理する信号処理手段とを含む磁気記憶
装置において、磁気記録媒体として本発明の垂直磁気記
録媒体を用い、磁気ヘッドの再生部を磁気抵抗効果型の
素子で構成することによって、１平方インチあたり５０
ギガビット以上の記録密度を達成することができる。Furthermore, a magnetic recording medium, means for driving the magnetic recording medium in the recording direction, a magnetic head having a recording unit and a reproducing unit, and means for driving the magnetic head relative to the magnetic recording medium And a signal processing means for performing waveform processing of an input signal and an output signal to the magnetic head, wherein the perpendicular magnetic recording medium of the present invention is used as a magnetic recording medium, and the reproducing section of the magnetic head is a magnetoresistive element. , 50 per square inch
A recording density of gigabit or more can be achieved.

【００１７】[0017]

【発明の実施の形態】以下、図面を参照して本発明の実
施の形態を説明する。〔実施例１〕本発明の一実施例である磁気記録媒体の断
面図を図３に示す。以下に、本実施例の磁気記録媒体の
作製方法を述べる。Embodiments of the present invention will be described below with reference to the drawings. Embodiment 1 FIG. 3 is a sectional view of a magnetic recording medium according to an embodiment of the present invention. Hereinafter, a method for manufacturing the magnetic recording medium of this embodiment will be described.

【００１８】外径６５ｍｍφの強化ガラス基板４０に、
Ａｒガス圧力４．０ｍＴｏｒｒ、投入電力密度０．７Ｗ
／ｃｍ²とする成膜条件で、ＤＣマグネトロンスパッタ
リング法でＣｏ−１０ａｔ．％Ｔａ−２ａｔ．％Ｚｒ軟
磁性層４１，４１′を４００ｎｍ形成し、Ｃｕ第一中間
層４２，４２′を２．５ｎｍ形成し、３５０℃で１５分
間加熱し、同一成膜条件でＣｏ−３０ａｔ．％Ｃｒ−４
ａｔ．％Ｗ第二中間層４３，４３′を２．５ｎｍ形成
し、Ｃｏ−２１ａｔ．％Ｃｒ−１４ａｔ．％Ｐｔ−４ａ
ｔ．％Ｂ記録層４４，４４′を２５ｎｍと順次成膜し
た。最後に、保護層４５，４５′としてＣを５ｎｍ形成
した。ここで、元素の前に付した数字は各元素の原子濃
度を示す。On a tempered glass substrate 40 having an outer diameter of 65 mmφ,
Ar gas pressure 4.0 mTorr, input power density 0.7 W
/ Cm ^{2 under} a film forming condition of DC-10 at. % Ta-2 at. % Zr soft magnetic layers 41 and 41 'are formed to a thickness of 400 nm, and the Cu first intermediate layers 42 and 42' are formed to a thickness of 2.5 nm and heated at 350 DEG C. for 15 minutes. % Cr-4
at. % W second intermediate layers 43 and 43 'are formed to a thickness of 2.5 nm, and Co-21at. % Cr-14 at. % Pt-4a
t. % B recording layers 44 and 44 'were sequentially formed to a thickness of 25 nm. Finally, C was formed to a thickness of 5 nm as protective layers 45 and 45 '. Here, the numbers attached before the elements indicate the atomic concentration of each element.

【００１９】また、比較例１−１として、Ｃｕ第一中間
層４２，４２′の代わりに、Ｃ第一中間層４２，４２′
を形成した媒体と、比較例１−２としてＣｏＣｒＷ第二
中間層４３，４３′の代わりにＣｏ−４０ａｔ．％Ｃｒ
第二中間層４３，４３′を形成した媒体を作製した。本
実施例の媒体にはＣｏＣｒＷ／Ｃｕ中間層を用いたのに
対し、比較例１−１の媒体にはＣｏＣｒＷ／Ｃ中間層
を、比較例１−２の媒体にはＣｏＣｒ／Ｃｕ中間層を用
いたところが相違点である。As Comparative Example 1-1, instead of the Cu first intermediate layers 42 and 42 ', the C first intermediate layers 42 and 42'
And Co-40 at. Instead of the CoCrW second intermediate layers 43 and 43 'as Comparative Example 1-2. % Cr
A medium having the second intermediate layers 43 and 43 'was formed. A CoCrW / Cu intermediate layer was used for the medium of Comparative Example 1-1, and a CoCrW / C intermediate layer was used for the medium of Comparative Example 1-2, while the CoCrW / Cu intermediate layer was used for the medium of this example. The difference is where they were used.

【００２０】表１に、本実施例と比較例の媒体の静磁気
特性及び媒体ノイズを示す。媒体ノイズは４００ｋＦＣ
Ｉの信号を記録したときの値であり、本実施例の媒体の
値を１として比較例の媒体の値は相対値で示した。表１
から分かるように、本実施例の媒体の方がＨｃ，ＳＱが
高く、出力分解能特性、耐熱揺らぎ特性に優れていた。
媒体ノイズは本実施例の方が低かった。さらに、本実施
例媒体は、Ｒ／Ｗ（リード／ライト）測定を行ったとき
に、軟磁性層から発生するスパイクノイズが観察されな
かった。Table 1 shows the magnetostatic characteristics and the medium noise of the media of this embodiment and the comparative example. Medium noise is 400kFC
This is a value when the signal of I is recorded, and the value of the medium of the comparative example is shown as a relative value with the value of the medium of the present example being set to 1. Table 1
As can be seen from the graph, the medium of this example had higher Hc and SQ, and was excellent in output resolution characteristics and heat fluctuation characteristics.
The medium noise was lower in this example. Further, in the medium of this example, when R / W (read / write) measurement was performed, no spike noise generated from the soft magnetic layer was observed.

【００２１】[0021]

【表１】 [Table 1]

【００２２】表２に、Ｘ線回折によって上記媒体の記録
層の（０００２）回折強度を測定した結果を示す。本実
施例の媒体の回折強度を１として他の媒体は相対値で示
した。表２から分かるように、本実施例の媒体の方が記
録層の（０００２）回折強度が強く、Ｃｕ第一中間層と
ＣｏＣｒＷ第二中間層によって良好な垂直配向が得られ
ることがわかる。Table 2 shows the results of measuring the (0002) diffraction intensity of the recording layer of the medium by X-ray diffraction. The diffraction intensity of the medium of this embodiment is set to 1, and the other media are indicated by relative values. As can be seen from Table 2, the medium of this example has a higher (0002) diffraction intensity of the recording layer, and a good vertical orientation can be obtained by the Cu first intermediate layer and the CoCrW second intermediate layer.

【００２３】[0023]

【表２】 [Table 2]

【００２４】上記実施例ではＣｏＣｒＷ第二中間層４
３，４３′を用いたが、Ｗに変えてＴａ，Ｖ，Ｎｂある
いはＭｏを添加しても同様の結果が得られた。また、Ｃ
ｕ第一中間層４２，４２′をＡｌ，Ｐｄ，Ａｕ，Ａｇ等
とした場合でも同様の結果が得られた。In the above embodiment, the CoCrW second intermediate layer 4
3,43 'was used, but the same result was obtained when Ta, V, Nb or Mo was added instead of W. Also, C
Similar results were obtained when the u first intermediate layers 42, 42 'were made of Al, Pd, Au, Ag, or the like.

【００２５】〔実施例２〕本発明の他の実施例である磁
気記録媒体の断面図を図４に示す。以下に、本実施例の
磁気記録媒体の作製方法を述べる。外径６５ｍｍφの強
化ガラス基板５０に、Ａｒガス圧力３．０ｍＴｏｒｒ、
投入電力密度０．７Ｗ／ｃｍ²とする成膜条件で、ＤＣ
マグネトロンスパッタリング法でＦｅ−８ａｔ．％Ｔａ
−１２ａｔ．％Ｃ軟磁性層５１，５１′を４００ｎｍ形
成し、３５０℃で１５分間加熱し、同一成膜条件でＣｏ
−３０ａｔ．％Ｃｒ−８ａｔ．％Ｚｒ下地層５２，５
２′を１ｎｍ形成し、Ｃｕ第一中間層５３，５３′を２
ｎｍ形成し、Ｃｏ−３０ａｔ．％Ｃｒ−４ａｔ．％Ｍｏ
第二中間層５４，５４′を２ｎｍ形成し、Ｃｏ−１８ａ
ｔ．％Ｃｒ−１４ａｔ．％Ｐｔ−３ａｔ．％Ｔａ記録層
５５，５５′を２５ｎｍと順次成膜した。最後に、保護
層５６，５６′としてＣを５ｎｍ形成した。ここで、元
素の前に付した数字は各元素の原子濃度を示す。Embodiment 2 FIG. 4 is a sectional view of a magnetic recording medium according to another embodiment of the present invention. Hereinafter, a method for manufacturing the magnetic recording medium of this embodiment will be described. An Ar gas pressure of 3.0 mTorr was applied to a tempered glass substrate 50 having an outer diameter of 65 mmφ.
Under the film forming conditions of the applied power density of 0.7 W / cm ² , DC
Fe-8 at. % Ta
-12 at. % C soft magnetic layers 51, 51 'are formed to a thickness of 400 nm, and heated at 350 ° C. for 15 minutes to form Co under the same film forming conditions.
-30 at. % Cr-8 at. % Zr underlayers 52, 5
2 ′ is formed to a thickness of 1 nm, and the Cu first intermediate layers 53 and 53 ′ are
nm, and Co-30 at. % Cr-4 at. % Mo
The second intermediate layers 54 and 54 'are formed to a thickness of 2 nm, and Co-18a
t. % Cr-14 at. % Pt-3 at. % Ta recording layers 55 and 55 'were sequentially formed to a thickness of 25 nm. Finally, C was formed to 5 nm as protective layers 56 and 56 '. Here, the numbers attached before the elements indicate the atomic concentration of each element.

【００２６】また、比較例２として、ＣｏＣｒＺｒ下地
層５２，５２′とＣｏＣｒＭｏ第二中間層５４，５４′
を形成しないＣｕ中間層のみを用いた媒体を作製した。
本実施例の媒体では非晶質のＣｏＣｒＺｒ下地層、Ｃｕ
第一中間層、ＣｏＣｒＭｏ第二中間層を積層したのに対
し、比較例２の媒体はＣｕ中間層単層としたところが相
違点である。As Comparative Example 2, a CoCrZr underlayer 52, 52 'and a CoCrMo second intermediate layer 54, 54' were used.
A medium using only the Cu intermediate layer in which no was formed was produced.
In the medium of this embodiment, an amorphous CoCrZr underlayer, Cu
The difference is that the medium of Comparative Example 2 is a single layer of the Cu intermediate layer, while the first intermediate layer and the second intermediate layer of CoCrMo are laminated.

【００２７】表３に、本実施例と比較例２の媒体の静磁
気特性及び規格化ノイズを示す。媒体ノイズは４００ｋ
ＦＣＩの信号を記録したときの値であり、本実施例の値
を１として比較例２の値は相対値で示した。本実施例の
媒体の方がＨｃ，ＳＱが高く、出力分解能特性、耐熱揺
らぎ特性が優れていた。媒体ノイズは本実施例の方が低
かった。Table 3 shows the magnetostatic characteristics and normalized noise of the media of the present embodiment and Comparative Example 2. Medium noise is 400k
This is a value when an FCI signal is recorded, and the value of Comparative Example 2 is shown as a relative value, with the value of this example being set to 1. The medium of this example had higher Hc and SQ, and was excellent in output resolution characteristics and heat fluctuation characteristics. The medium noise was lower in this example.

【００２８】[0028]

【表３】 [Table 3]

【００２９】表４に、Ｘ線回折によって上記媒体の記録
層の（０００２）回折強度を測定した結果を示す。本実
施例の媒体の回折強度を１として比較例の媒体は相対値
で示した。本実施例の媒体の方が記録層の（０００２）
回折強度が強い。Ｃｕを中間層として用いると良好な配
向は得られるが、静磁気特性も考慮すると本実施例構造
の媒体の方が良好な結果が得られた。Table 4 shows the results of measuring the (0002) diffraction intensity of the recording layer of the medium by X-ray diffraction. Assuming that the diffraction intensity of the medium of this example is 1, the medium of the comparative example is shown as a relative value. The medium of the present embodiment has the (0002) of the recording layer.
Strong diffraction intensity. When Cu is used as the intermediate layer, good orientation can be obtained, but in consideration of the magnetostatic characteristics, the medium having the structure of the present embodiment has better results.

【００３０】[0030]

【表４】 [Table 4]

【００３１】上記実施例ではＣｏＣｒＺｒ下地層を用い
たが、他にもＮｉＴａＺｒ，ＮｉＣｒＺｒ，ＣｏＮｂＺ
ｒ等の非晶質下地層を用いても同様の効果が得られた。
また、Ｃｕ第一中間層にＣｒを１０ａｔ．％添加する
と、さらに媒体ノイズが低減した。Ｃｒの代わりにＴ
ａ，Ｖ，Ｗ，Ｍｏ，Ｎｂ，Ｂを添加しても同様の効果が
得られた。In the above embodiment, a CoCrZr underlayer is used. However, NiTaZr, NiCrZr, CoNbZ
The same effect was obtained by using an amorphous underlayer such as r.
In addition, Cr was added to the Cu first intermediate layer at 10 at. %, The media noise was further reduced. T instead of Cr
Similar effects were obtained by adding a, V, W, Mo, Nb, and B.

【００３２】〔実施例３〕本発明の垂直磁気記録媒体
は、磁気記憶装置に組み込むことによって性能を充分に
発揮できる。この磁気記憶装置の一例の上面図を図５
（ａ）に、そのＡＡ′線断面図を図５（ｂ）に略示す
る。[Embodiment 3] The perpendicular magnetic recording medium of the present invention can sufficiently exhibit its performance by being incorporated in a magnetic storage device. FIG. 5 is a top view of an example of the magnetic storage device.
FIG. 5A is a schematic cross-sectional view taken along the line AA ′ of FIG.

【００３３】磁気記録媒体６０として本発明による垂直
磁気記録媒体を用いた。磁気記録媒体６０は、磁気記録
媒体駆動部６１に連結する保持具によって保持され、磁
気記録媒体６０のそれぞれの面に対向して磁気ヘッド６
２が配置される。磁気ヘッド６２は浮上高さ０．０２μ
ｍ以下で安定低浮上させ、さらに０．１５μｍ以下のヘ
ッド位置決め精度で所望のトラックに磁気ヘッド駆動部
６３により駆動される。The perpendicular magnetic recording medium according to the present invention was used as the magnetic recording medium 60. The magnetic recording medium 60 is held by a holder connected to the magnetic recording medium driving section 61, and faces the respective surfaces of the magnetic recording medium 60 so as to face the magnetic head 6.
2 are arranged. The magnetic head 62 has a flying height of 0.02 μm.
The magnetic head driving unit 63 drives the magnetic head to a desired track with a head positioning accuracy of 0.15 μm or less.

【００３４】磁気ヘッド６２によって再生した信号は、
記録再生信号処理系６４によって波形処理される。記録
再生信号処理系６４は増幅器、アナログ等化器、ＡＤコ
ンバータ、ディジタル等化器、最尤復号器等で構成され
ている。磁気抵抗効果を利用したヘッドの再生波形は、
ヘッドの特性により正と負の大きさが非対称となった
り、記録再生系の周波数特性の影響を受けたりして、記
録した信号とは異なった信号に読み誤られることがあ
る。アナログ等化器は再生波形を整えて、これを修復す
る機能を有する。この修復された波形をＡＤコンバータ
を通してディジタル変換し、ディジタル等化器によって
さらに波形を整える。最後にこの修復された信号を最尤
復号器によって、最も確からしいデータに復調する。以
上の構成の再生信号処理系によって、極めて低いエラー
レートで信号の記録再生が行われる。なお、等化器や最
尤復号器は既存のものを用いても構わない。The signal reproduced by the magnetic head 62 is
Waveform processing is performed by the recording / reproducing signal processing system 64. The recording / reproducing signal processing system 64 includes an amplifier, an analog equalizer, an AD converter, a digital equalizer, a maximum likelihood decoder, and the like. The reproduction waveform of the head using the magnetoresistance effect is
Positive and negative magnitudes may be asymmetric depending on the characteristics of the head, or may be affected by the frequency characteristics of the recording / reproducing system, and may be erroneously read as a signal different from the recorded signal. The analog equalizer has a function of adjusting a reproduced waveform and restoring the waveform. The restored waveform is converted into a digital signal through an AD converter, and the waveform is further adjusted by a digital equalizer. Finally, the restored signal is demodulated by a maximum likelihood decoder into the most likely data. With the reproduction signal processing system having the above configuration, recording and reproduction of signals are performed at an extremely low error rate. Note that existing equalizers and maximum likelihood decoders may be used.

【００３５】以上の装置構成にすることによって、１平
方インチあたりの記録密度５０ギガビット以上に対応す
ることができ、従来の磁気記憶装置に比べ３倍以上の記
憶容量を持った高密度磁気記憶装置を実現することがで
きた。また、記録再生信号処理系から最尤復号器を取り
除き、従来の波形弁別回路に変えた場合にも従来に比べ
２倍以上の記憶容量を持った磁気記憶装置を実現するこ
とができた。With the above-described device configuration, it is possible to cope with a recording density of 50 gigabits per square inch or more, and a high-density magnetic storage device having a storage capacity three times or more as compared with the conventional magnetic storage device. Was realized. Further, even when the maximum likelihood decoder is removed from the recording / reproducing signal processing system and replaced with a conventional waveform discrimination circuit, a magnetic storage device having a storage capacity twice or more as compared with the conventional one can be realized.

【００３６】以上の実施例では、ディスク状の磁気記録
媒体とそれを用いた磁気記憶装置について述べてきた
が、本発明は片面のみに記録層を有するテープ状、カー
ド状の磁気記録媒体、及びそれらの磁気記録媒体を用い
た磁気記憶装置にも適用できることは言うまでもない。In the above embodiments, a disk-shaped magnetic recording medium and a magnetic storage device using the same have been described. However, the present invention relates to a tape-shaped or card-shaped magnetic recording medium having a recording layer on only one side, and It goes without saying that the present invention can be applied to a magnetic storage device using such a magnetic recording medium.

【００３７】さらに、磁気記録媒体の作製方法に関して
もＤＣマグネトロンスパッタリング法に限らず、ＥＣＲ
スパッタリング法、イオンビームスパッタリング法、真
空蒸着法、プラズマＣＶＤ法、塗布法、メッキ法等如何
なる手法を用いても構わない。Further, the method of producing the magnetic recording medium is not limited to the DC magnetron sputtering method, but may be ECR.
Any method such as a sputtering method, an ion beam sputtering method, a vacuum evaporation method, a plasma CVD method, a coating method, and a plating method may be used.

【００３８】[0038]

【発明の効果】本発明によると、高保磁力を有しながら
低ノイズであり、かつ熱揺らぎの影響が小さな垂直記録
媒体を実現できる。さらに、この垂直磁気記録媒体と磁
気抵抗効果を利用した再生素子を有する磁気ヘッドとを
組み合わせることによって、１平方インチあたり５０ギ
ガビット以上の記録密度を有する磁気記憶装置が得られ
る。According to the present invention, it is possible to realize a perpendicular recording medium having a high coercive force, low noise, and little influence of thermal fluctuation. Further, by combining this perpendicular magnetic recording medium with a magnetic head having a reproducing element utilizing the magnetoresistance effect, a magnetic storage device having a recording density of 50 gigabits per square inch or more can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図１】ＣｏＣｒ中間層にＭｏを添加した場合の静磁気
特性の変化を示す図。FIG. 1 is a diagram showing a change in magnetostatic characteristics when Mo is added to a CoCr intermediate layer.

【図２】第一中間層を変えた媒体の静磁気特性の第二中
間層膜厚依存性を示す図。FIG. 2 is a diagram showing the dependence of the magnetostatic property of a medium in which a first intermediate layer is changed on the thickness of a second intermediate layer.

【図３】本発明の一実施例である磁気記録媒体の断面模
式図。FIG. 3 is a schematic sectional view of a magnetic recording medium according to an embodiment of the present invention.

【図４】本発明の一実施例である磁気記録媒体の断面模
式図。FIG. 4 is a schematic sectional view of a magnetic recording medium according to an embodiment of the present invention.

【図５】本発明の一実施例である磁気記憶装置の模式
図。FIG. 5 is a schematic diagram of a magnetic storage device according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

４０…基板、４１，４１′…ＣｏＴａＺｒ軟磁性層、４
２，４２′…Ｃｕ第一中間層、４３，４３′…ＣｏＣｒ
Ｗ第二中間層、４４，４４′…ＣｏＣｒＰｔＢ記録層、
４５，４５′…Ｃ保護層５０…基板、５１，５１′…ＦｅＴａＣ軟磁性層、５
２，５２′…ＣｏＣｒＺｒ下地層、５３，５３′…Ｃｕ
第一中間層、５４，５４′…ＣｏＣｒＭｏ第二中間層、
５５，５５′…ＣｏＣｒＰｔＴａ記録層、５６，５６′
…Ｃ保護層６０…磁気記録媒体、６１…磁気記録媒体駆動部、６２
…磁気ヘッド、６３…磁気ヘッド駆動部、６４…記録再
生信号処理系40 ... substrate, 41, 41 '... CoTaZr soft magnetic layer, 4
2,42 '... Cu first intermediate layer, 43,43' ... CoCr
W second intermediate layer, 44, 44 '... CoCrPtB recording layer,
45, 45 '... C protective layer 50 ... substrate, 51,51' ... FeTaC soft magnetic layer, 5
2,52 '... CoCrZr underlayer, 53,53' ... Cu
A first intermediate layer, 54, 54 '... CoCrMo second intermediate layer,
55, 55 'CoCrPtTa recording layer, 56, 56'
... C protective layer 60 ... magnetic recording medium, 61 ... magnetic recording medium drive unit, 62
... Magnetic head, 63 ... Magnetic head drive unit, 64 ... Recording / reproduction signal processing system

───────────────────────────────────────────────────── フロントページの続き (72)発明者細江譲東京都国分寺市東恋ヶ窪一丁目280番地株式会社日立製作所中央研究所内Ｆターム(参考） 5D006 CA03 CA05 CA06 DA08 EA03 FA09 5E049 AA04 AA09 AC05 BA08 BA12 CB02 DB12 ────────────────────────────────────────────────── ─── Continued from the front page (72) Inventor Joe Hosoe 1-280 Higashi Koigakubo, Kokubunji-shi, Tokyo F-term in Central Research Laboratory, Hitachi, Ltd. 5D006 CA03 CA05 CA06 DA08 EA03 FA09 5E049 AA04 AA09 AC05 BA08 BA12 CB02 DB12

Claims

【特許請求の範囲】[Claims]

【請求項１】面心立方構造を有する第１の層と、前記
第１の層上に形成された六方最密構造を有する第２の層
と、前記第２の層上に形成された垂直記録層とを有し、
前記第２の層はＣｏとＣｒを主成分とし、Ｔａ，Ｖ，
Ｗ，Ｎｂ，Ｍｏから選ばれた少なくとも1種の元素を含
むことを特徴とする垂直磁気記録媒体。1. A first layer having a face-centered cubic structure, a second layer having a hexagonal close-packed structure formed on the first layer, and a vertical layer formed on the second layer. And a recording layer,
The second layer contains Co and Cr as main components, and includes Ta, V,
A perpendicular magnetic recording medium comprising at least one element selected from W, Nb, and Mo.

【請求項２】請求項１記載の垂直磁気記録媒体におい
て、前記第２の層は、５０ａｔ．％以上のＣｏと、２５
ａｔ．％以上、４５ａｔ．％以下のＣｒと、Ｔａ，Ｖ，
Ｗ，Ｎｂ，Ｍｏより選ばれた少なくとも１種の元素を
０．５ａｔ．％以上、１５ａｔ．％以下含むことを特徴
とする垂直磁気記録媒体。2. The perpendicular magnetic recording medium according to claim 1, wherein the second layer has a thickness of 50 at. % Or more Co and 25
at. % Or more, 45 at. % Or less of Cr, Ta, V,
At least one element selected from the group consisting of W, Nb, and Mo at 0.5 at. % Or more, 15 at. % Perpendicular magnetic recording medium.

【請求項３】請求項２記載の垂直磁気記録媒体におい
て、前記第１の層はＣｕを主成分とすることを特徴とす
る垂直磁気記録媒体。3. The perpendicular magnetic recording medium according to claim 2, wherein the first layer contains Cu as a main component.

【請求項４】請求項２記載の垂直磁気記録媒体におい
て、前記第１の層はＣｕを主成分とし、更にＣｒ，Ｔ
ａ，Ｍｏ，Ｎｂ，Ｖ，Ｗ，Ｂより選ばれた少なくとも１
種の元素を含むことを特徴とする垂直磁気記録媒体。4. The perpendicular magnetic recording medium according to claim 2, wherein said first layer contains Cu as a main component, and further comprises Cr, T
at least one selected from a, Mo, Nb, V, W, B
A perpendicular magnetic recording medium comprising a kind of element.

【請求項５】請求項２記載の垂直磁気記録媒体におい
て、前記第１の層を非晶質の層の上に形成したことを特
徴とする垂直磁気記録媒体。5. The perpendicular magnetic recording medium according to claim 2, wherein the first layer is formed on an amorphous layer.

【請求項６】磁気記録媒体と、前記磁気記録媒体を記
録方向に駆動する手段と、記録部と再生部とを備える磁
気ヘッドと、前記磁気ヘッドを前記磁気記録媒体に対し
て相対的に駆動する手段と、前記磁気ヘッドに対する入
力信号及び出力信号を波形処理する信号処理手段とを含
む磁気記憶装置において、前記磁気記録媒体として請求
項１〜５のいずれか１項記載の垂直磁気記録媒体を用い
たことを特徴とする磁気記憶装置。6. A magnetic head comprising a magnetic recording medium, means for driving the magnetic recording medium in a recording direction, a recording section and a reproducing section, and driving the magnetic head relatively to the magnetic recording medium. And a signal processing means for performing waveform processing on an input signal and an output signal to the magnetic head, wherein the perpendicular magnetic recording medium according to claim 1 is used as the magnetic recording medium. A magnetic storage device characterized by using: