JP2002194565A - Sliding coating with low coefficient of friction and machine part having sliding part coated thereby - Google Patents

Sliding coating with low coefficient of friction and machine part having sliding part coated thereby

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Publication number
JP2002194565A
JP2002194565A JP2000397679A JP2000397679A JP2002194565A JP 2002194565 A JP2002194565 A JP 2002194565A JP 2000397679 A JP2000397679 A JP 2000397679A JP 2000397679 A JP2000397679 A JP 2000397679A JP 2002194565 A JP2002194565 A JP 2002194565A
Authority
JP
Japan
Prior art keywords
sliding
film
friction
nickel
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000397679A
Other languages
Japanese (ja)
Inventor
Takeo Kitamura
武男 北村
Hideo Hirano
秀夫 平野
Masafumi Fukushima
雅文 福嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2000397679A priority Critical patent/JP2002194565A/en
Publication of JP2002194565A publication Critical patent/JP2002194565A/en
Withdrawn legal-status Critical Current

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  • Chemically Coating (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

PROBLEM TO BE SOLVED: To realize a sliding coating with low coefficient of friction which has both of a characteristic of diamond like carbon with superior low coefficient of friction, and a load-resistant-power/an abrasion-resistance. SOLUTION: The sliding coating with low coefficient of friction comprises, forming a nickel-phosphorus based plating layer 2 on a base metal 1 as an undercoat, and forming a diamond-like carbon film 3 on the nickel-phosphorus based plating layer 2. Thereby, the coating improves adhesion between the base metal 1 and the diamond-like carbon film 3, prevents decrease of the adhesion due to difference of thermal deformation quantity caused by difference of heat expansion coefficient, and reduces deformed quantity of the diamond-like carbon film 3 by receiving a load onto the sliding member with the nickel- phosphorus plating layer 2.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ニッケル系メッキ
皮膜あるいはアルマイトを下地として、その上にダイヤ
モンド・ライク・カーボン(以下DLCと云う)皮膜を
被覆した低摩擦係数摺動皮膜に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a low friction coefficient sliding film comprising a nickel-based plating film or alumite as a base and a diamond-like carbon (hereinafter referred to as DLC) film coated thereon.

【0002】[0002]

【従来の技術】従来、ニッケル系メッキの皮膜を有する
機械部品に関して、その摺動特性を改良する目的で、ニ
ッケルにリンやホウ素を添加した無電解ニッケルメッキ
を表面処理として用いることが特開平8−158058
号で公開されている。
2. Description of the Related Art Conventionally, electroless nickel plating obtained by adding phosphorus or boron to nickel has been used as a surface treatment for mechanical parts having a nickel-based plating film in order to improve the sliding characteristics. -1558058
Published in the issue.

【0003】また、DLC皮膜は炭素を主体とし、ドラ
イ状態でも低摩擦係数である特徴を有する硬質皮膜であ
り、PVDやCVDなどの製法で生成される。従って、
皮膜の熱膨張係数が金属材料に比べ小さく、また、硬質
のため柔軟性が劣る。そのため、熱膨張や、変形による
追従性を確保する為、薄膜で母材表面を覆い形成してい
た。
A DLC film is a hard film mainly composed of carbon and having a low coefficient of friction even in a dry state, and is produced by a method such as PVD or CVD. Therefore,
The thermal expansion coefficient of the film is smaller than that of the metal material, and the film is inferior in flexibility due to hardness. For this reason, the base material surface is formed to be covered with a thin film in order to secure followability due to thermal expansion and deformation.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記の
ようなニッケル−リン系の皮膜構成では、オイル潤滑下
の摺動においては、摩擦係数は0.1前後であるが、ド
ライ状態においては0.3〜0.4以上になり、荷重が
大きくかかった際には焼き付きが生じることとなる。
However, in the above-described nickel-phosphorus coating structure, the coefficient of friction is about 0.1 in sliding under oil lubrication, but is 0.1 in the dry state. It becomes 3 to 0.4 or more, and seizure occurs when a large load is applied.

【0005】DLC皮膜はドライ状態の高荷重下におい
ても低摩擦係数は0.1以下であり、潤滑油なしでも焼
き付くことなく摺動可能である。但し、母材とDLC皮
膜の熱膨張係数差が大きいとき、例えばアルミニューム
系などの線膨張係数が大きい材料を母材としてそれにD
LC皮膜を施した場合、摺動時の温度変化や雰囲気温度
変化によって皮膜と母材の熱変形量に大きな差を生じ、
皮膜がはがれやすくなる。また、DLC皮膜は薄い皮膜
のため、大きな荷重がかかった際、母材強度が小さいと
き、例えばアルミニューム合金材料にDLC皮膜を施し
た場合、アルミニューム合金材料の弾性によりDLC皮
膜が変形し、許容応力を超えた場合、DLC皮膜が破壊
することが発生する。
[0005] The DLC film has a low friction coefficient of 0.1 or less even under a high load in a dry state, and can slide without lubricating oil without burning. However, when the thermal expansion coefficient difference between the base material and the DLC film is large, for example, a material having a large linear expansion coefficient, such as aluminum, is used as a base material,
When an LC film is applied, a large difference in thermal deformation between the film and the base material occurs due to temperature changes during sliding and ambient temperature changes.
The film is easily peeled. In addition, since the DLC film is thin, when a large load is applied, when the base material strength is small, for example, when the DLC film is applied to an aluminum alloy material, the DLC film is deformed by the elasticity of the aluminum alloy material, If the allowable stress is exceeded, the DLC film may break.

【0006】本発明は上記従来例の課題を解決するもの
で、DLCの優れた低摩擦係数の特徴と、耐荷重性能・
耐摩耗性能とを併せ持つ低摩擦係数摺動皮膜と、その皮
膜で被覆した摺動部分を有する機械部品を提供すること
にある。
[0006] The present invention solves the above-mentioned problems of the prior art.
An object of the present invention is to provide a low friction coefficient sliding film having both wear resistance and a mechanical part having a sliding portion covered with the film.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
に、請求項1記載の発明においては、ニッケル−リン系
メッキを下地として、その上にDLC皮膜を施したこと
を特徴とする低摩擦係数摺動皮膜とした。
In order to solve the above-mentioned problems, the invention according to claim 1 is characterized in that a nickel-phosphorous plating is used as a base and a DLC film is formed thereon. A coefficient sliding film was used.

【0008】また、請求項2記載の発明においては、ア
ルミニューム合金材料を陽極酸化してアルマイト層を設
け、そのアルマイト層の上に、DLC被膜を施したこと
を特徴とする低摩擦係数摺動皮膜とした。
According to the second aspect of the present invention, the aluminum alloy material is anodized to form an alumite layer, and a DLC coating is formed on the alumite layer. It was a film.

【0009】また、請求項3記載の発明においては、摺
動部分を有する機械部品であって、前記摺動部分を請求
項1または2記載の低摩擦係数摺動皮膜で被覆した摺動
部分を有する機械部品とした。
According to a third aspect of the present invention, there is provided a mechanical component having a sliding portion, wherein the sliding portion is covered with the low friction coefficient sliding film according to the first or second aspect. Machine parts.

【0010】また、請求項4記載の発明は、コンプレッ
サーまたは燃料噴射ポンプまたは油圧バルブのいずれか
とした請求項3記載の低摩擦係数摺動皮膜で被覆した摺
動部分を有する機械部品とした。
According to a fourth aspect of the present invention, there is provided a mechanical part having a sliding portion coated with the low friction coefficient sliding film according to the third aspect, which is any one of a compressor, a fuel injection pump, and a hydraulic valve.

【0011】また、請求項5記載の発明は、機械部品が
アルミニューム合金製である請求項3または4記載の低
摩擦摺動皮膜で被覆した摺動部分を有する機械部品とし
た。
According to a fifth aspect of the present invention, there is provided a mechanical component having a sliding portion coated with a low-friction sliding film, wherein the mechanical component is made of an aluminum alloy.

【0012】[0012]

【発明の実施の形態】本発明の目的は、各請求項に記載
した構成を実施の形態とすることにより達成できるの
で、以下には各請求項の記載の構成が奏する作用効果を
記載して、本発明の意義を明確化することとする。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Since the object of the present invention can be achieved by implementing the structures described in the claims as embodiments, the operation and effect of the structures described in the claims will be described below. The significance of the present invention will be clarified.

【0013】請求項1記載の発明によれば、ニッケル−
リン系メッキはDLCと密着性がよいということを活用
し、下地をニッケル−リン系メッキとし、その上にDL
C皮膜を被覆することで、母材とDLCとの密着性を向
上させ、熱膨張係数差による熱変形量の差が密着性の低
下をさせることを防止することができる。また、摺動部
材にかかる荷重による変形についても、弾性係数の小さ
い母材においても、ニッケル−リン系メッキで荷重を受
け、DLCの変形量を低減させ、破壊を防止できる。
According to the first aspect of the invention, nickel-
Utilizing the fact that phosphorus-based plating has good adhesion to DLC, the underlying layer is nickel-phosphorous-based plating, and DL
By coating the C film, it is possible to improve the adhesion between the base material and the DLC, and prevent the difference in the amount of thermal deformation due to the difference in the thermal expansion coefficient from lowering the adhesion. Also, regarding the deformation due to the load applied to the sliding member, even in a base material having a small elastic coefficient, the load can be received by the nickel-phosphorus plating, and the amount of deformation of the DLC can be reduced, and destruction can be prevented.

【0014】また、請求項2記載の発明によれば、下地
をアルマイトとし、その上にDLC皮膜を被覆すること
で、母材とDLCとの密着性を向上させ、熱膨張係数差
による熱変形量の差が密着性の低下をさせることを防止
することができる。また、摺動部材にかかる荷重による
変形についても、弾性係数の小さい母材においても、ア
ルマイト層で荷重を受け、DLCの変形量を低減させ、
破壊を防止できる。
According to the second aspect of the present invention, the base material is made of alumite, and the DLC film is coated thereon, thereby improving the adhesion between the base material and the DLC, and the thermal deformation due to the difference in the coefficient of thermal expansion. It is possible to prevent the difference in the amount from lowering the adhesion. Also, regarding the deformation due to the load applied to the sliding member, even in the base material having a small elastic modulus, the load is received by the alumite layer to reduce the amount of DLC deformation,
Destruction can be prevented.

【0015】また、請求項3ならびに4に記載の発明に
よれば、請求項1または2に記載の発明の摺動表面を有
する機械部品とすることで、摺動部品の摩擦抵抗が低減
され、高面圧やドライの状態でも省動力と摩耗量低減が
可能である。
According to the third and fourth aspects of the invention, the mechanical component having the sliding surface according to the first or second aspect of the present invention reduces the frictional resistance of the sliding part. Power saving and reduction of wear can be achieved even under high surface pressure and dry conditions.

【0016】さらに、請求項5記載の発明によれば、母
材がアルミニューム合金である摺動材料では、DLC皮
膜の密着性の確保や、変形による破壊の防止において顕
著な効果がある。
Further, according to the fifth aspect of the present invention, the sliding material whose base material is an aluminum alloy has a remarkable effect in securing the adhesion of the DLC film and preventing breakage due to deformation.

【0017】[0017]

【実施例】以下本発明の一実施例における低摩擦係数摺
動皮膜について図面とともに説明する。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a sliding film having a low friction coefficient according to an embodiment of the present invention.

【0018】図1は請求項1記載の発明にかかる一実施
例における低摩擦係数摺動皮膜の構成を示す断面図であ
る。図1において、母材1には、ニッケル−リン系メッ
キ層2を介して、DLC皮膜3が施されている。
FIG. 1 is a sectional view showing the structure of a low-friction coefficient sliding film according to an embodiment of the present invention. In FIG. 1, a DLC film 3 is applied to a base material 1 via a nickel-phosphorous plating layer 2.

【0019】図2は請求項2記載の発明にかかる一実施
例における低摩擦係数摺動皮膜の構成を示す断面図であ
る。図2において、母材1には、アルマイト層4を介し
て、DLC皮膜3が施されている。
FIG. 2 is a sectional view showing the structure of the low friction coefficient sliding film in one embodiment according to the second aspect of the present invention. In FIG. 2, a DLC film 3 is applied to a base material 1 via an alumite layer 4.

【0020】図3は請求項3記載の発明にかかる一実施
例における機械部品であるコンプレッサーのベーンの断
面を示し、母材1の表面に、ニッケル−リン系メッキ2
あるいは、アルマイト層4を介してDLC皮膜3が施さ
れている。
FIG. 3 shows a cross section of a vane of a compressor which is a mechanical part in one embodiment according to the third aspect of the present invention.
Alternatively, the DLC film 3 is applied via the alumite layer 4.

【0021】図4は請求項4記載の発明にかかる一実施
例における機械部品であるコンプレッサーの断面を示し
たものである。図4において、シリンダ5とロータ6と
ベーン7で構成され、ロータ6の回転により、シリンダ
5とロータ6とベーン7で仕切られた空間で圧縮作用を
行なう。摺動部品は、シリンダ5とロータ6とベーン7
であり、それらの全て、あるいは選択的に、各摺動部品
の表面に、ニッケル−リン系メッキあるいは、アルマイ
ト層を介してDLC皮膜3が施されている。
FIG. 4 shows a cross section of a compressor which is a mechanical part in one embodiment according to the fourth aspect of the present invention. In FIG. 4, the cylinder 5, the rotor 6 and the vane 7 are configured to perform a compression action in a space partitioned by the cylinder 5, the rotor 6 and the vane 7 by the rotation of the rotor 6. The sliding parts are cylinder 5, rotor 6 and vane 7.
The nickel-phosphorus plating or the DLC film 3 is applied to the surface of each sliding component via an alumite layer.

【0022】図5は請求項5記載の発明にかかる一実施
例における機械部品であるコンプレッサーの断面を示す
ものである。図5において、シリンダ5とロータ6とベ
ーン7で構成され、ロータ6の回転により、シリンダ5
とロータ6とベーン7で仕切られた空間で圧縮作用を行
なう。摺動部品は、シリンダ5とロータ6とベーン7で
あり、それらの全てか、あるいは一部の選択的な母材は
アルミニューム合金製として、その表面に、ニッケル−
リン系メッキあるいはアルマイト層を介してDLC皮膜
が施されている。
FIG. 5 shows a cross section of a compressor which is a mechanical part according to an embodiment of the present invention. In FIG. 5, a cylinder 5, a rotor 6 and a vane 7 are formed.
And a compression action is performed in a space partitioned by the rotor 6 and the vane 7. The sliding parts are a cylinder 5, a rotor 6 and a vane 7, all or some of which are made of an aluminum alloy, and the surface of which is nickel-coated.
A DLC film is applied via a phosphorous plating or an alumite layer.

【0023】[0023]

【発明の効果】上記説明から明らかなように、請求項1
または2に記載の発明は、母材の上に、ニッケル−リン
系メッキあるいはアルマイトを介して、DLC皮膜を形
成することで、密着性を向上させ、熱膨張係数差による
熱変形量の差が密着性の低下をさせることを防止でき
る。また、高荷重下においてもニッケル−リン系メッキ
あるいはアルマイトで荷重を受け、硬質皮膜のDLCが
破壊することなく、低摩擦係数である特徴を有効に発揮
することができる。
As is apparent from the above description, claim 1
In the invention described in or 2, the DLC film is formed on the base material via nickel-phosphorus plating or alumite to improve the adhesion, and the difference in the amount of thermal deformation due to the difference in the coefficient of thermal expansion is reduced. It is possible to prevent a decrease in adhesion. Further, even under a high load, the DLC of the hard film is not broken by receiving a load by nickel-phosphorus plating or alumite, and the characteristic of a low friction coefficient can be effectively exhibited.

【0024】また、請求項3または4記載の発明によれ
ば、請求項1または2記載の発明の摺動表面を有する機
械部品とすることで、摺動部品の摩擦抵抗が低減され、
高面圧やドライの状態でも省動力と摩耗量低減がはかれ
る。
According to the third or fourth aspect of the invention, the mechanical component having the sliding surface according to the first or second aspect of the present invention reduces the frictional resistance of the sliding component.
Power saving and reduction of wear can be achieved even under high surface pressure and dry conditions.

【0025】さらに、請求項5記載の発明によれば、母
材をアルミニューム合金の摺動材料とすることにより、
DLC皮膜の密着性の確保や、変形による破壊の防止に
おいて顕著な効果がある。
According to the fifth aspect of the present invention, the base material is made of an aluminum alloy sliding material,
It has a remarkable effect in securing the adhesion of the DLC film and preventing breakage due to deformation.

【図面の簡単な説明】[Brief description of the drawings]

【図1】請求項1記載の発明の一実施例における皮膜の
構成を示す断面説明図
FIG. 1 is an explanatory cross-sectional view showing a structure of a film according to an embodiment of the present invention.

【図2】請求項2記載の発明の一実施例における皮膜の
構成を示す断面説明図
FIG. 2 is an explanatory sectional view showing the structure of a film according to an embodiment of the invention described in claim 2;

【図3】請求項3記載の発明の一実施例におけるコンプ
レッサーのベーンの断面説明図
FIG. 3 is an explanatory sectional view of a vane of a compressor according to an embodiment of the present invention.

【図4】請求項4記載の発明の一実施例におけるコンプ
レッサーの断面説明図
FIG. 4 is an explanatory sectional view of a compressor according to an embodiment of the invention described in claim 4;

【図5】請求項5記載の発明の一実施例におけるコンプ
レッサーの断面説明図
FIG. 5 is an explanatory sectional view of a compressor according to an embodiment of the invention described in claim 5;

【符号の説明】[Explanation of symbols]

1 母材 2 ニッケル−リン系メッキ層 3 DLC皮膜 4 アルマイト層 5 シリンダ 6 ロータ 7 ベーン DESCRIPTION OF SYMBOLS 1 Base material 2 Nickel-phosphorus plating layer 3 DLC film 4 Alumite layer 5 Cylinder 6 Rotor 7 Vane

───────────────────────────────────────────────────── フロントページの続き (72)発明者 福嶋 雅文 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 4K022 AA02 AA31 AA48 BA14 BA16 DA01 4K044 AA06 AB10 BA06 BA18 BA19 BB03 BC01 BC05 CA15 CA17 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Masafumi Fukushima 1006 Kazuma Kadoma, Kadoma City, Osaka Prefecture F-term within Matsushita Electric Industrial Co., Ltd. 4K022 AA02 AA31 AA48 BA14 BA16 DA01 4K044 AA06 AB10 BA06 BA18 BA19 BB03 BC01 BC05 CA15 CA17

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 ニッケル−リン系メッキを下地として、
その上にダイヤモンド・ライク・カーボン皮膜を施した
ことを特徴とする低摩擦係数摺動皮膜。
A nickel-phosphorous plating is used as a base,
A sliding film with a low coefficient of friction, characterized in that a diamond-like carbon film is applied thereon.
【請求項2】 アルミニューム合金材料を陽極酸化して
アルマイト層を設け、そのアルマイト層の上にダイヤモ
ンド・ライク・カーボン被膜を施したことを特徴とする
低摩擦係数摺動皮膜。
2. A low friction coefficient sliding film comprising: an anodized aluminum alloy material provided with an anodized layer; and a diamond-like carbon film formed on the anodized layer.
【請求項3】 摺動部分を有する機械部品であって、前
記摺動部分を請求項1または2記載の低摩擦係数摺動皮
膜で被覆した摺動部分を有する機械部品。
3. A mechanical component having a sliding portion, wherein the sliding portion is covered with the low friction coefficient sliding film according to claim 1 or 2.
【請求項4】 コンプレッサーまたは燃料噴射ポンプま
たは油圧バルブのいずれかとしたことを特徴とする請求
項3記載の低摩擦係数摺動皮膜で被覆した摺動部分を有
する機械部品。
4. A mechanical part having a sliding portion coated with a low-friction coefficient sliding film according to claim 3, wherein the mechanical part is one of a compressor, a fuel injection pump, and a hydraulic valve.
【請求項5】 機械部品がアルミニューム合金製である
ことを特徴とする請求項3または4記載の低摩擦摺動皮
膜で被覆した摺動部分を有する機械部品。
5. A mechanical part having a sliding portion coated with a low-friction sliding film according to claim 3, wherein the mechanical part is made of an aluminum alloy.
JP2000397679A 2000-12-27 2000-12-27 Sliding coating with low coefficient of friction and machine part having sliding part coated thereby Withdrawn JP2002194565A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006266285A (en) * 2005-03-22 2006-10-05 Kayaba Ind Co Ltd Mechanical seal
JP2010150641A (en) * 2008-12-26 2010-07-08 Hitachi Ltd Sliding member
JP2010169071A (en) * 2008-12-24 2010-08-05 Toyota Industries Corp Sliding member for compressor
US10941758B2 (en) * 2016-05-03 2021-03-09 Lg Electronics Inc. Linear compressor and method for manufacturing a linear compressor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006266285A (en) * 2005-03-22 2006-10-05 Kayaba Ind Co Ltd Mechanical seal
JP2010169071A (en) * 2008-12-24 2010-08-05 Toyota Industries Corp Sliding member for compressor
EP2206920A3 (en) * 2008-12-24 2010-12-29 Kabushiki Kaisha Toyota Jidoshokki Sliding member for compressor
US8277952B2 (en) 2008-12-24 2012-10-02 Kabushiki Kaisha Toyota Jidoshokki Sliding member for compressor
CN101900108B (en) * 2008-12-24 2012-12-26 株式会社丰田自动织机 Sliding member for compressor
JP2010150641A (en) * 2008-12-26 2010-07-08 Hitachi Ltd Sliding member
US10941758B2 (en) * 2016-05-03 2021-03-09 Lg Electronics Inc. Linear compressor and method for manufacturing a linear compressor

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