JP2002133982A - Fluid pressure driving apparatus for circuit breaker - Google Patents
Fluid pressure driving apparatus for circuit breakerInfo
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- JP2002133982A JP2002133982A JP2000333525A JP2000333525A JP2002133982A JP 2002133982 A JP2002133982 A JP 2002133982A JP 2000333525 A JP2000333525 A JP 2000333525A JP 2000333525 A JP2000333525 A JP 2000333525A JP 2002133982 A JP2002133982 A JP 2002133982A
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- Prior art keywords
- pressure
- opening
- fluid pressure
- cylinder
- fluid
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は電力用遮断器の接触
子を開閉操作する流体圧駆動装置の構成に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a configuration of a fluid pressure driving device for opening and closing contacts of a power circuit breaker.
【０００２】[0002]
【従来の技術】電力用遮断器は、落雷等の非常時に電力
供給系統を保護するために設けられる安全装置であるた
め極めて高速の動作が要求される。このため、開路動作
や閉路動作の終端で流体圧シリンダのピストンを衝突す
ることなく円滑に停止させるための工夫が為されてい
る。従来の遮断器の流体圧駆動装置では、例えば特開平
8−287789号公報に記載されているように、流体圧シリ
ンダのピストンにシリンダ端部に設けた開口部と嵌合す
る突出部を設け、開路動作の終端付近では突出部が開口
部に嵌合して絞りを形成しシリンダ操作室の一部を閉じ
込む構成としており、この閉じ込まれた部屋の圧力をピ
ストンの運動によって上昇させて制動力を得る構成が採
られていた。2. Description of the Related Art A power circuit breaker is a safety device provided for protecting a power supply system in an emergency such as a lightning strike, and therefore requires an extremely high-speed operation. For this reason, a device has been devised to smoothly stop the piston of the fluid pressure cylinder without colliding at the end of the opening operation or the closing operation. In a conventional hydraulic drive device for a circuit breaker, for example,
As described in Japanese Patent Application Laid-Open No. 8-287789, a protrusion is provided on a piston of a fluid pressure cylinder so as to fit with an opening provided at the end of the cylinder, and the protrusion fits into the opening near the end of the opening operation. In this configuration, a part of the cylinder operation chamber is closed by forming a throttle, and the pressure in the closed chamber is increased by the movement of the piston to obtain a braking force.
【０００３】[0003]
【発明が解決しようとする課題】上記従来技術では、開
路動作または閉路動作の終端で突出部が開口部に嵌合し
てシリンダ操作室の一部が閉じ込まれると、閉じた空間
が慣性力によって圧縮されるので、突出部と開口部の間
に形成された絞りの流動抵抗によって急激に圧力が上昇
し、供給圧を大幅に超えるような極めて高い圧力が発生
する。この圧力が高い程大きな制動力を得ることができ
るが、過大な圧力が生ずるために、流体圧シリンダの部
品や部品を結合するボルトが破損する、ピストンのパッ
キンが損傷する、あるいは、制動力が過大になりピスト
ンが停止したり、逆戻りしたりするなどの問題が生ずる
ことがあった。In the above prior art, when the protrusion is fitted into the opening at the end of the opening operation or the closing operation and a part of the cylinder operating chamber is closed, the closed space becomes inertial force. Therefore, the pressure rapidly rises due to the flow resistance of the throttle formed between the projection and the opening, and an extremely high pressure that greatly exceeds the supply pressure is generated. The higher the pressure, the greater the braking force can be obtained.However, excessive pressure will cause the hydraulic cylinder parts and bolts connecting the parts to break, the piston packing to be damaged, or the braking force to increase. Problems such as excessive stop of the piston or reversal may occur.
【０００４】本発明の目的は、上記のような従来技術に
おける問題点を解消し、高い信頼性と適正な変位特性を
有する遮断器の流体圧駆動装置を提供することにある。An object of the present invention is to solve the above-mentioned problems in the prior art and to provide a fluid pressure drive device for a circuit breaker having high reliability and proper displacement characteristics.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するた
め、本発明では、流体圧シリンダの開路動作または閉路
動作の少なくとも一方のシリンダ操作室に、一方がシリ
ンダ操作室の終端付近に接続し、他方が流体圧源からの
供給口に接続するとともに、シリンダ操作室から供給口
へ向かう流れだけを許容し逆方向の流れを阻止する逆止
弁を設ける。これにより、開路動作や閉路動作の終端で
突出部が開口部に嵌合してシリンダ操作室の一部が閉じ
込まれ、突出部と開口部の間に形成された絞りの流動抵
抗によって急激に圧力が上昇しても、所定の圧力以上に
なると逆止弁が開口して作動流体を供給口側へ逃がすの
で、供給圧を大幅に超えるような過大な圧力の発生を防
止でき、過大な圧力による部品の損傷や制動過多による
ピストンの逆戻りを解消することができる。In order to achieve the above object, according to the present invention, at least one of the opening and closing operations of the hydraulic cylinder is connected to a cylinder operation chamber, and one of the cylinder operation chambers is connected near the end of the cylinder operation chamber; The other is connected to the supply port from the fluid pressure source, and a check valve is provided to allow only the flow from the cylinder operation chamber to the supply port and prevent the flow in the reverse direction. As a result, at the end of the opening operation or the closing operation, the protrusion is fitted into the opening, a part of the cylinder operating chamber is closed, and the flow resistance of the throttle formed between the protrusion and the opening sharply increases the flow resistance. Even if the pressure rises, when the pressure exceeds a certain level, the check valve opens to allow the working fluid to escape to the supply port side, preventing the occurrence of excessive pressure that greatly exceeds the supply pressure, and preventing excessive pressure. Thus, it is possible to eliminate the damage of parts due to the above and the return of the piston due to excessive braking.
【０００６】さらに、逆止弁を供給口に接続する位置を
開閉制御弁の供給口よりもアキュムレータ及び流体圧源
に近い位置とする。これにより、逆止弁から供給側へ作
動流体が急激に流出しても、アキュムレータや、逆止弁
から接続位置までの管路、流体圧源から開閉制御弁まで
の管路等で圧力変化が減衰するので、開閉制御弁や流体
圧シリンダの供給圧の変動を抑えることができ、ピスト
ンの運動特性の変動を防止することができる。Further, the position at which the check valve is connected to the supply port is located closer to the accumulator and the fluid pressure source than the supply port of the on-off control valve. As a result, even if the working fluid suddenly flows from the check valve to the supply side, the pressure changes in the accumulator, the pipeline from the check valve to the connection position, the pipeline from the fluid pressure source to the on-off control valve, etc. Since the pressure is attenuated, fluctuations in the supply pressure of the open / close control valve and the fluid pressure cylinder can be suppressed, and fluctuations in the motion characteristics of the piston can be prevented.
【０００７】従って、高い信頼性と適正な変位特性を有
する遮断器の流体圧駆動装置を実現することができる。Therefore, a fluid pressure drive device for a circuit breaker having high reliability and proper displacement characteristics can be realized.
【０００８】[0008]
【発明の実施の形態】以下、本発明の遮断器の流体圧駆
動装置の一実施例を図１ないし図３を用いて説明する。
図１は閉路保持状態すなわち通電中の状態を示し、図２
は閉路状態から開路動作すなわち電流を遮断する際の運
動の終端付近の状態を示す。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the fluid pressure driving device for a circuit breaker according to the present invention will be described below with reference to FIGS.
FIG. 1 shows a closed circuit holding state, that is, a state during energization.
Indicates a state near the end of the movement when the circuit is opened from the closed state, that is, when the current is cut off.
【０００９】固定接触子１と可動接触子２から成る接点
を開閉する遮断器の流体圧駆動装置３は、ピストン５で
可動接触子２を駆動する流体圧シリンダ４を備え、流体
圧シリンダ４の第一のシリンダ操作室６を成す小受圧面
積側には、流体圧源８を成すポンプから吐出されアキュ
ムレータ９に蓄圧された作動流体の供給圧が常に作用
し、第二のシリンダ操作室７を成す大受圧面積側は、開
路用パイロット弁１０と閉路用パイロット弁１１によっ
て駆動される開閉制御弁１２によって、リザーバ１３に
つながる低圧の戻り側または高圧の供給圧側に選択的に
接続される。開路用パイロット弁１０，閉路用パイロッ
ト弁１１，開閉制御弁１２、及び、流体圧シリンダ４か
ら排出される作動流体は戻り管路１４を介してリザーバ
１３へ戻り、流体圧源８の吐出側と戻り管路１４の間に
は圧力制御弁１５を成すリリーフ弁が設けてある。A fluid pressure driving device 3 for a circuit breaker for opening and closing a contact composed of a fixed contact 1 and a movable contact 2 includes a fluid pressure cylinder 4 for driving the movable contact 2 with a piston 5. The supply pressure of the working fluid discharged from the pump forming the fluid pressure source 8 and accumulated in the accumulator 9 always acts on the small pressure receiving area side forming the first cylinder operation chamber 6, and the second cylinder operation chamber 7 The large pressure receiving area formed is selectively connected to a low pressure return side or a high pressure supply pressure side connected to the reservoir 13 by an open / close control valve 12 driven by an open circuit pilot valve 10 and a close circuit pilot valve 11. The working fluid discharged from the open-circuit pilot valve 10, the close-circuit pilot valve 11, the on-off control valve 12, and the hydraulic cylinder 4 returns to the reservoir 13 via the return line 14, and is connected to the discharge side of the fluid pressure source 8 A relief valve constituting a pressure control valve 15 is provided between the return lines 14.
【００１０】第一のシリンダ操作室６には開口部１６
が、ピストン５の突出部１７と嵌合するように設けてあ
り、第二のシリンダ操作室７には開口部１８が、ピスト
ン５の突出部１９と嵌合するように設けてある。An opening 16 is provided in the first cylinder operation chamber 6.
However, an opening 18 is provided in the second cylinder operating chamber 7 so as to fit with the projection 19 of the piston 5.
【００１１】さらに、第一のシリンダ操作室６の端部付
近において、開口部１６と突出部１７が嵌合する際に閉
じ込まれる部分には、この部屋から供給側への流れだけ
を許容する第一の逆止弁２０が設けてある。一方、第二
のシリンダ操作室７の端部付近において、開口部１８と
突出部１９が嵌合する際に閉じ込まれる部分には、この
部屋から供給側への流れだけを許容する第一の逆止弁２
１が設けてある。逆止弁２０，２１から流出した流体は
管路２２を介して供給側へ流出し、管路２２は開閉制御
弁１２への供給口よりもアキュムレータ９及び流体圧源
８に近い位置に接続してある。Further, in the vicinity of the end of the first cylinder operation chamber 6, the portion closed when the opening 16 and the projection 17 are fitted to each other allows only the flow from this chamber to the supply side. A first check valve 20 is provided. On the other hand, in the vicinity of the end of the second cylinder operation chamber 7, a portion which is closed when the opening 18 and the projection 19 are fitted to each other has a first flow that allows only the flow from this chamber to the supply side. Check valve 2
1 is provided. The fluid that has flowed out of the check valves 20 and 21 flows out to the supply side via the pipe 22, and the pipe 22 is connected to a position closer to the accumulator 9 and the fluid pressure source 8 than the supply port to the on-off control valve 12. It is.
【００１２】次に、本実施例の作用を説明する。Next, the operation of this embodiment will be described.
【００１３】第一のシリンダ操作室６は常に高圧の供給
圧が作用しているが、第二のシリンダ操作室７の方がピ
ストン５のロッドがない分だけ受圧面積が大きいので、
開閉制御弁１２によって第二のシリンダ操作室７を高圧
にすれば、ピストン５が左方に押されて図１の閉路保持
状態になり、逆に低圧にすれば、図２のように、ピスト
ン５が右方へ動いて開路動作する。Although the first cylinder operation chamber 6 is always subjected to a high supply pressure, the second cylinder operation chamber 7 has a larger pressure receiving area by the absence of the rod of the piston 5.
If the second cylinder operating chamber 7 is set to a high pressure by the opening / closing control valve 12, the piston 5 is pushed to the left to be in the closed circuit holding state of FIG. 1. Conversely, if the pressure is set to a low pressure, as shown in FIG. 5 moves rightward to open the circuit.
【００１４】図２と図３を用いて開路動作について説明
する。図３は開路動作における第二のシリンダ操作室７
の開口部１８よりも外径側に形成される制動室の圧力変
化を示す。The opening operation will be described with reference to FIGS. FIG. 3 shows the second cylinder operating chamber 7 in the opening operation.
5 shows a pressure change in the brake chamber formed on the outer diameter side of the opening 18 of FIG.
【００１５】開閉制御弁１２が第二のシリンダ操作室７
を低圧に切換えるとピストン５が右方へ動き出し、図３
の曲線３０のように変位していく。開路動作し始めてか
ら制動し始めるまでの間は第二のシリンダ操作室７が低
圧で管路２２側が供給圧なので逆止弁２１は閉じてい
る。そして、開路動作の終端付近に至ると、開口部１８
に突出部１９が嵌合して両者の間に絞りを形成し、第二
のシリンダ操作室７の開口部１８よりも外径側の部分を
閉じ込んで制動室２３を形成する。すると、図３に示す
ように、ピストン５に作用する慣性力によって閉じ込ま
れた空間が圧縮されて作動流体は制動室から流出しよう
とするが、突出部と開口部の間に形成された絞りの流動
抵抗が大きいために圧力が急激に上昇し、ピストン５を
左方へ押し戻す力が増して制動力を発生する。このと
き、前述の従来技術のように逆止弁２１がない場合に
は、曲線３１のように制動室２３の圧力は供給圧を大幅
に超える極めて高い圧力にまで上昇するが、本実施例の
ように逆止弁２１を設ければ、逆止弁の開口圧力３２を
超えると逆止弁２１が開いて管路２２を介して流体を供
給側へ逃がすので、曲線３３のように制動室２３の圧力
を逆止弁２１の開口圧力３２付近の圧力までに制限する
ことができる。The opening / closing control valve 12 is connected to the second cylinder operating chamber 7.
When the pressure is switched to low pressure, the piston 5 starts to move to the right, and FIG.
Is displaced like the curve 30 of FIG. During the period from the start of the opening operation to the start of braking, the check valve 21 is closed because the pressure in the second cylinder operation chamber 7 is low and the supply pressure is on the pipe 22 side. When reaching the vicinity of the end of the opening operation, the opening 18
The projection 19 is fitted to the second cylinder operation chamber to form a throttle therebetween, and the portion of the second cylinder operation chamber 7 closer to the outer diameter than the opening 18 is closed to form the braking chamber 23. Then, as shown in FIG. 3, the closed space is compressed by the inertial force acting on the piston 5 and the working fluid tends to flow out of the brake chamber, but the throttle formed between the protrusion and the opening is formed. Due to the large flow resistance, the pressure rises sharply and the force pushing the piston 5 back to the left increases to generate a braking force. At this time, when the check valve 21 is not provided as in the above-described prior art, the pressure in the brake chamber 23 rises to an extremely high pressure that greatly exceeds the supply pressure as shown by a curve 31. When the check valve 21 is provided as described above, when the opening pressure 32 of the check valve is exceeded, the check valve 21 opens to allow the fluid to escape to the supply side via the pipe line 22. Can be limited to a pressure near the opening pressure 32 of the check valve 21.
【００１６】一方、閉路動作の終端付近においても、開
口部１６と突出部１７が嵌合して絞りを形成し、第一の
シリンダ操作室６の開口部１６よりも外径側に制動室を
形成するが、ここに逆止弁２０を設けてあるので、開路
動作のときと同様に制動室の圧力を所定の圧力に制限す
ることができる。On the other hand, even near the end of the closing operation, the opening 16 and the protruding portion 17 are fitted to form a throttle, and a braking chamber is provided on the outer diameter side of the opening 16 of the first cylinder operation chamber 6. However, since the check valve 20 is provided here, the pressure in the brake chamber can be limited to a predetermined pressure as in the case of the opening operation.
【００１７】従って、本実施例によれば、制動室に過大
な圧力が発生して部品が損傷したり、制動過多に陥って
ピストンが停止したり逆戻りしたりする不具合を防止す
ることができる。特に、曲線３１の急激な圧力変化の最
大値は、作動流体の圧縮性，体積，粘度や、管路の寸法
形状、部品の弾性変形等々が複雑に絡み合って決まるの
で、高度な解析技術を用いても設計段階で事前に精度よ
く把握することが難しい。このため、本実施例のよう
に、逆止弁の開口圧力によって圧力上昇の上限値を制限
すれば、部品に作用する応力や力をより精度良く予測で
きるようになり、機械的な寿命の設計や開閉特性の予測
をより正確に行えるようになる結果、製品の信頼性や性
能安定性も向上する。Therefore, according to the present embodiment, it is possible to prevent the components from being damaged due to the generation of excessive pressure in the brake chamber and the piston from stopping or returning due to excessive braking. In particular, the maximum value of the rapid pressure change of the curve 31 is determined by the complicated intertwining of the compressibility, volume and viscosity of the working fluid, the dimensions and shape of the pipeline, the elastic deformation of the parts, and the like. Even at the design stage, it is difficult to accurately grasp in advance. Therefore, if the upper limit of the pressure rise is limited by the opening pressure of the check valve as in the present embodiment, the stress and force acting on the parts can be predicted more accurately, and the design of the mechanical life can be improved. As a result, the reliability and performance stability of products can be improved.
【００１８】さらに、本実施例では管路２２を開閉制御
弁１２への供給口よりもアキュムレータ９及び流体圧源
８に近い位置に接続してあるので、逆止弁２１から接続
位置までの管路２２や、流体圧源８から開閉制御弁１２
までの管路等で圧力変化が減衰する上、アキュムレータ
９が圧力変化を吸収する。また、これらで吸収できなか
った分は圧力制御弁１５から流出する。従って、開閉制
御弁や流体圧シリンダの供給圧の変動を抑えることがで
き、ピストンの運動特性の変動を防止することができ
る。Further, in this embodiment, since the pipe 22 is connected to a position closer to the accumulator 9 and the fluid pressure source 8 than the supply port to the on-off control valve 12, the pipe from the check valve 21 to the connection position is connected. Opening / closing control valve 12 from passage 22 or fluid pressure source 8
The pressure change is attenuated in the pipe line and the like, and the accumulator 9 absorbs the pressure change. In addition, the components that cannot be absorbed by these flow out of the pressure control valve 15. Therefore, fluctuations in the supply pressure of the opening / closing control valve and the fluid pressure cylinder can be suppressed, and fluctuations in the movement characteristics of the piston can be prevented.
【００１９】尚、本実施例では開路動作側と閉路動作側
の両方に逆止弁２０，２１を設けたが、閉路動作は開路
動作に比して速度が遅く制動室の圧力上昇が小さいの
で、逆止弁２０を廃して逆止弁２１のみとしてもよい。
動作の速い開路動作側の方が制動室の圧力が過大に上昇
しやすく、上記のような問題点が発生しやすいので、こ
の構成としても十分な効果を得ることができる。In this embodiment, the check valves 20 and 21 are provided on both the opening operation side and the closing operation side. However, the closing operation is slower than the opening operation and the pressure rise in the brake chamber is small. Alternatively, the check valve 20 may be omitted and only the check valve 21 may be used.
Since the pressure in the brake chamber tends to increase excessively on the open circuit operation side where the operation is faster, and the above-described problem is likely to occur, a sufficient effect can be obtained even with this configuration.
【００２０】[0020]
【発明の効果】以上のように、本発明によれば、制動室
の圧力が過大に上昇するのを防止できるので、部品の損
傷を防止できる、機械的な寿命が延びる等の効果が得ら
れ、高い信頼性を実現することができる。また、接点を
有する遮断部の要求性能に適した開閉特性を安定して得
ることができるので遮断器の遮断性能が向上する等の効
果も得ることができ、電力供給系統の信頼性を高めるこ
とができる。As described above, according to the present invention, it is possible to prevent the pressure in the braking chamber from excessively increasing, thereby obtaining effects such as prevention of damage to parts and extension of mechanical life. , High reliability can be realized. In addition, the switching characteristics suitable for the required performance of the breaking part having the contacts can be stably obtained, so that the breaking performance of the breaker can be improved, and the reliability of the power supply system can be improved. Can be.
【図１】本発明の一実施例における閉路保持状態を示す
構成図。FIG. 1 is a configuration diagram showing a closed circuit holding state according to an embodiment of the present invention.
【図２】開路動作を示す動作説明図。FIG. 2 is an operation explanatory view showing an opening operation.
【図３】開路動作時のシリンダ操作室の圧力変化を示す
特性図。FIG. 3 is a characteristic diagram showing a pressure change in a cylinder operation chamber during an opening operation.
４…流体圧シリンダ、５…ピストン、６，７…シリンダ
操作室、８…流体圧源、９…アキュムレータ、１２…開
閉制御弁、１６，１８…開口部、１７，１９…突出部、
２０，２１…逆止弁、２２…管路、２３…制動室。4 ... hydraulic cylinder, 5 ... piston, 6,7 ... cylinder operation chamber, 8 ... fluid pressure source, 9 ... accumulator, 12 ... open / close control valve, 16,18 ... opening, 17,19 ... projection,
20, 21: check valve, 22: pipeline, 23: brake chamber.
Claims (1)
流体圧シリンダと、開路指令または閉路指令を受けて前
記流体圧シリンダのシリンダ操作室の圧力を変化させて
前記ピストンと前記接触子を開路動作または閉路動作さ
せる開閉制御弁と、作動流体を加圧供給する流体圧源
と、加圧供給された作動流体を蓄圧するアキュムレータ
と、作動流体の供給圧力の上限値を設定する圧力制御弁
と、排出された作動流体を回収し貯蔵するリザーバとを
備え、前記流体圧シリンダは、開路動作または閉路動作
の少なくとも一方の運動の終端付近で前記シリンダ操作
室の圧力が上昇して前記ピストンの運動を制動する機能
を有する遮断器の流体圧駆動装置において、一方が前記
シリンダ操作室の終端付近に接続し、他方が前記流体圧
源からの供給口に接続するとともに、該シリンダ操作室
から該供給口へ向かう流れだけを許容し逆方向の流れを
阻止する逆止弁を設けたことを特徴とする遮断器の流体
圧駆動装置。1. A fluid pressure cylinder for opening and closing a contact by movement of a piston, and opening and closing operation of the piston and the contact by changing a pressure in a cylinder operation chamber of the fluid pressure cylinder in response to an opening command or a closing command. Or an opening and closing control valve for performing a closed circuit operation, a fluid pressure source for pressurizing and supplying the working fluid, an accumulator for accumulating the pressurized and supplied working fluid, and a pressure control valve for setting an upper limit of the supply pressure of the working fluid, A reservoir for collecting and storing the discharged working fluid, wherein the fluid pressure cylinder increases the pressure in the cylinder operation chamber near the end of at least one of the open circuit operation and the closed circuit operation, thereby reducing the movement of the piston. In a fluid pressure drive device for a circuit breaker having a braking function, one is connected near the end of the cylinder operation chamber, and the other is connected to a supply port from the fluid pressure source. To together, breaker fluid pressure driving apparatus characterized in that a check valve for preventing reverse flow allows only flows toward the said supply port from said cylinder operation chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000333525A JP2002133982A (en) | 2000-10-27 | 2000-10-27 | Fluid pressure driving apparatus for circuit breaker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000333525A JP2002133982A (en) | 2000-10-27 | 2000-10-27 | Fluid pressure driving apparatus for circuit breaker |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002133982A true JP2002133982A (en) | 2002-05-10 |
Family
ID=18809597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000333525A Pending JP2002133982A (en) | 2000-10-27 | 2000-10-27 | Fluid pressure driving apparatus for circuit breaker |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002133982A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011109210B3 (en) * | 2011-08-03 | 2012-10-11 | Abb Technology Ag | Differential cylinder for a hydro-mechanical drive for electric circuit breakers |
| DE102011109227B3 (en) * | 2011-08-03 | 2012-11-29 | Abb Technology Ag | Differential cylinder for a hydro-mechanical drive for electric circuit breakers |
| DE102012011498A1 (en) * | 2012-06-08 | 2013-12-12 | Abb Technology Ag | Differential cylinder arrangement for a hydromechanical drive for electric circuit breakers |
| KR20130138660A (en) * | 2012-06-11 | 2013-12-19 | 신포니아 테크놀로지 가부시끼가이샤 | Purge nozzle unit, purge apparatus, load port |
-
2000
- 2000-10-27 JP JP2000333525A patent/JP2002133982A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011109210B3 (en) * | 2011-08-03 | 2012-10-11 | Abb Technology Ag | Differential cylinder for a hydro-mechanical drive for electric circuit breakers |
| DE102011109227B3 (en) * | 2011-08-03 | 2012-11-29 | Abb Technology Ag | Differential cylinder for a hydro-mechanical drive for electric circuit breakers |
| DE102012011498A1 (en) * | 2012-06-08 | 2013-12-12 | Abb Technology Ag | Differential cylinder arrangement for a hydromechanical drive for electric circuit breakers |
| WO2013182318A1 (en) * | 2012-06-08 | 2013-12-12 | Abb Technology Ag | Differential cylinder arrangement for a hydro-mechanical drive for an electrical circuit breaker |
| KR20130138660A (en) * | 2012-06-11 | 2013-12-19 | 신포니아 테크놀로지 가부시끼가이샤 | Purge nozzle unit, purge apparatus, load port |
| KR102098970B1 (en) | 2012-06-11 | 2020-04-08 | 신포니아 테크놀로지 가부시끼가이샤 | Purge nozzle unit, mounting table, load port and stocker |
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