JP2002122085A - Channel structure in vacuum pump - Google Patents

Channel structure in vacuum pump

Info

Publication number
JP2002122085A
JP2002122085A JP2000314967A JP2000314967A JP2002122085A JP 2002122085 A JP2002122085 A JP 2002122085A JP 2000314967 A JP2000314967 A JP 2000314967A JP 2000314967 A JP2000314967 A JP 2000314967A JP 2002122085 A JP2002122085 A JP 2002122085A
Authority
JP
Japan
Prior art keywords
valve
guide pipe
valve hole
flow path
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000314967A
Other languages
Japanese (ja)
Inventor
Shinya Yamamoto
真也 山本
Tomoji Hashimoto
友次 橋本
Hitoshi Shoji
仁 正路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Priority to JP2000314967A priority Critical patent/JP2002122085A/en
Priority to EP01124518A priority patent/EP1199475A3/en
Publication of JP2002122085A publication Critical patent/JP2002122085A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F04C29/065—Noise dampening volumes, e.g. muffler chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Check Valves (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve assemblability of a reverse-flow preventing means mounted on a gas channel for an exhaust gas. SOLUTION: A muffler 40 is connected to a connection flange 39, and a cylindrical valve hole forming member 48 is removably fitted and connected to the muffler 40. A cylindrical guide pipe 41 is removably fitted and connected to the valve hole forming member 48, and an exhaust pipe 42 is connected to the guide pipe 41. Flanges 401, 481, 411 o the valve hole forming member 48 and the guide pipe 41 are fastened together by a screw 49. A valve element 43 and a return spring 44 are accommodated inside the guide pipe 41. The valve element 43 opens and closes a valve hole 482 formed on the valve hole forming member 48. A snap ring 51 is locked on a guide inner peripheral face 412 of the guide pipe 41.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、回転軸の回転に基
づいてガス移送体を動かし、前記ガス移送体の動作によ
ってガスを移送して吸引作用をもたらし、前記ガス移送
体を収容するポンプ本体に通じるガス流路上に逆流防止
手段を介在した真空ポンプにおける流路構造に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pump body for accommodating a gas transfer body by moving a gas transfer body based on the rotation of a rotating shaft and transferring a gas by the operation of the gas transfer body to provide a suction action. The present invention relates to a flow path structure in a vacuum pump in which a backflow prevention means is interposed on a gas flow path leading to a gas flow path.

【０００２】[0002]

【従来の技術】特開平２−１５７４９０号公報、特開平
８−１４１７２号公報に開示される真空ポンプの一種で
あるルーツポンプでは、隣合って２個で組をなすロータ
が噛合した状態で回転される。噛合しながら回転する２
個のロータの回転動作は、ガスを圧縮しながら移送す
る。ロータの回転軸のうちの一方は、モータから駆動力
を得ており、他方の回転軸はギア機構を介して前記一方
の回転軸から駆動力を得ている。ポンプ本体から吐出さ
れるガスは、ポンプ本体外のガス流路を経由して排ガス
処理装置へ送られる。特開平２−１５７４９０号公報の
装置では、ポンプ本体外のガス流路上に消音器（マフ
ラ）が介在されている。真空ポンプでは、ポンプ本体外
のガス流路内で脈動が発生し、これが大きな騒音の原因
となる。消音器はこのような騒音の発生を抑制するため
のものであり、消音器としては逆止弁が用いられる。逆
止弁を構成する弁体は弁孔を開閉し、ポンプ本体内の真
空度が高くなると弁体が弁孔を閉じる。逆止弁は前記し
た脈動の発生を抑制する。2. Description of the Related Art Roots pumps, which are a kind of vacuum pumps disclosed in Japanese Patent Application Laid-Open Nos. 2-157490 and 8-14172, rotate in a state where two adjacent rotors mesh with each other. Is done. Rotate while meshing 2
The rotation of the rotors transfers the gas while compressing it. One of the rotating shafts of the rotor obtains driving force from a motor, and the other rotating shaft obtains driving force from the one rotating shaft via a gear mechanism. The gas discharged from the pump body is sent to an exhaust gas treatment device via a gas flow path outside the pump body. In the device disclosed in Japanese Patent Application Laid-Open No. 2-157490, a muffler (muffler) is interposed on a gas flow path outside the pump body. In a vacuum pump, pulsation occurs in a gas flow path outside the pump body, and this causes large noise. The silencer is for suppressing the generation of such noise, and a check valve is used as the silencer. The valve element constituting the check valve opens and closes the valve hole, and when the degree of vacuum in the pump body increases, the valve element closes the valve hole. The check valve suppresses the generation of the pulsation described above.

【０００３】[0003]

【発明が解決しようとする課題】排ガスの種類〔例えば
パーフルオロカーボン（ＰＦＣ）等〕によっては、圧力
を高くしたり、あるいは温度が低くなると固化する性質
の排ガスがある。このような排ガスの固化物が弁体とそ
のガイドとの間に噛みこまれると、弁体の開閉動作に障
害が起き、逆止弁が脈動発生抑制の機能を果たさなくな
る。そのため、逆止弁を分解して逆止弁内の固化物を定
期的に除去する必要があるが、逆止弁を分解すると弁体
が内蔵ばねの力によって離脱してしまう。逆止弁を組み
付けるための作業では、弁体が再び離脱しないように注
意して行わねばならず、逆止弁の組み付け作業は非常に
厄介である。Depending on the type of exhaust gas (for example, perfluorocarbon (PFC) or the like), there is an exhaust gas that solidifies when the pressure is increased or the temperature is decreased. If such solidified exhaust gas is caught between the valve body and its guide, the opening / closing operation of the valve body will be hindered, and the check valve will not function to suppress pulsation. For this reason, it is necessary to disassemble the check valve to periodically remove solidified matter in the check valve. However, if the check valve is disassembled, the valve element is detached by the force of the built-in spring. In the operation for assembling the check valve, care must be taken so that the valve body does not come off again, and the operation for assembling the check valve is very troublesome.

【０００４】本発明は、排ガスのガス流路上に介在され
た逆流防止手段の組み付け性を向上することを目的とす
る。[0004] It is an object of the present invention to improve the assemblability of a backflow preventing means interposed on a gas flow path of exhaust gas.

【０００５】[0005]

【課題を解決するための手段】そのために本発明は、回
転軸の回転に基づいてガス移送体を動かし、前記ガス移
送体の動作によってガスを移送して吸引作用をもたら
し、前記ガスのガス流路上に逆流防止手段を介在した真
空ポンプを対象とし、請求項１の発明では、前記ガス流
路の一部を形成するガイド管と、前記ガイド管内で前記
ガイド管の長さ方向に摺動案内される弁体と、前記弁体
によって開閉される弁孔を形成する弁孔形成体と、前記
弁孔を閉じる方向へ前記弁体を付勢する付勢手段とを備
えた前記逆流防止手段を構成し、前記ガイド管と前記弁
孔形成体とを組み付け可能かつ分離可能に別体とし、前
記ガイド管と前記弁孔形成体とが分離状態にあり、かつ
前記弁体が前記付勢手段の付勢作用を受けているとき、
前記弁体が前記ガイド管内から離脱しないようにする離
脱阻止手段を前記ガイド管に組み付けた。In order to achieve the above object, the present invention is to move a gas transfer body based on the rotation of a rotating shaft, and to transfer a gas by the operation of the gas transfer body to bring about a suction action, whereby the gas flow of the gas is controlled. The present invention is directed to a vacuum pump having a backflow prevention means interposed on a road, and in the invention according to claim 1, a guide pipe forming a part of the gas flow path, and a sliding guide in a length direction of the guide pipe in the guide pipe. The backflow prevention means, comprising: a valve body to be formed; a valve hole forming body that forms a valve hole that is opened and closed by the valve body; and a biasing unit that biases the valve body in a direction to close the valve hole. The guide tube and the valve hole forming body are separately assembled and separable from each other, the guide tube and the valve hole forming body are in a separated state, and the valve body is provided with the urging means. When under urging,
A detachment preventing means for preventing the valve body from detaching from the inside of the guide tube is assembled to the guide tube.

【０００６】ガイド管と弁孔形成体とが分離された場合
にも、付勢手段によって弁孔形成体側に付勢されていた
弁体は、離脱阻止手段によってガイド管からの離脱を阻
止される。[0006] Even when the guide pipe and the valve hole forming body are separated from each other, the valve body urged toward the valve hole forming body by the urging means is prevented from being separated from the guide pipe by the separation preventing means. .

【０００７】請求項２の発明では、請求項１において、
前記弁体が前記付勢手段の付勢作用を受けており、かつ
前記ガイド管と前記弁孔形成体とが組み付け状態にある
ときには、前記弁体は、前記離脱阻止手段の離脱阻止作
用を受けない位置にあるようにした。According to a second aspect of the present invention, in the first aspect,
When the valve element is being urged by the urging means and the guide tube and the valve hole forming body are in an assembled state, the valve element is subjected to the detachment preventing action of the detachment preventing means. Not in a position.

【０００８】ガイド管と弁孔形成体とが組み付け状態に
あるとき、弁体が弁孔を閉じる位置にある状態では、弁
体は離脱阻止手段の離脱阻止作用を受けず、弁孔を開閉
する弁体の開閉動作が離脱阻止手段によって阻害される
ことはない。When the guide tube and the valve hole forming body are in the assembled state, and the valve body is in the position where the valve hole is closed, the valve body does not receive the separation preventing action of the separation preventing means and opens and closes the valve hole. The opening / closing operation of the valve body is not hindered by the separation preventing means.

【０００９】請求項３の発明では、請求項１及び請求項
２のいずれか１項において、前記離脱阻止手段は、前記
ガイド管の内周面に係止されるサークリップとした。サ
ークリップは、離脱阻止手段として簡便である。According to a third aspect of the present invention, in any one of the first and second aspects, the detachment preventing means is a circlip engaged with an inner peripheral surface of the guide tube. A circlip is convenient as a detachment preventing means.

【００１０】請求項４の発明では、請求項１乃至請求項
３のいずれか１項において、前記弁体は、前記弁孔を閉
鎖する閉鎖端壁と、環状の周壁と、前記周壁の周方向に
振り分けるように前記周壁に設けられた複数の摺接片と
を備え、前記摺接片は前記ガイド管の内周面に摺接して
案内され、前記離脱阻止手段は、前記複数の摺接片に係
合して前記ガイド管内からの前記弁体の離脱を阻止する
ようにした。According to a fourth aspect of the present invention, in any one of the first to third aspects, the valve body has a closed end wall for closing the valve hole, an annular peripheral wall, and a circumferential direction of the peripheral wall. A plurality of sliding contact pieces provided on the peripheral wall so as to be distributed to the guide wall, wherein the sliding contact pieces are guided in sliding contact with an inner peripheral surface of the guide tube, and the detachment preventing means includes a plurality of sliding contact pieces. To prevent the valve body from coming off from inside the guide tube.

【００１１】複数の摺接部を弁体の移動方向に見た場
合、ガイド管の周方向におけるガイド管と摺接片との摺
接範囲は、ガイド管の全周のうちの一部となる。このよ
うな摺接をもたらす構成は、排ガスの固化物が摺接片と
弁体との間に噛みこまれる事態の発生を抑制する。ガイ
ド管と弁孔形成体とが分離された場合にも、付勢手段に
よって弁孔形成体側に付勢されていた弁体の摺接片が離
脱阻止手段に係合し、弁体がガイド管からの離脱を阻止
される。When the plurality of sliding portions are viewed in the moving direction of the valve body, the sliding range of the guide tube and the sliding piece in the circumferential direction of the guide tube is a part of the entire circumference of the guide tube. . The configuration that provides such sliding contact suppresses the occurrence of a situation in which solidified exhaust gas is caught between the sliding contact piece and the valve element. Even when the guide pipe and the valve hole forming body are separated from each other, the sliding contact piece of the valve body, which has been urged toward the valve hole forming body by the urging means, engages with the disengagement preventing means, and the valve body moves the guide pipe. Is prevented from leaving.

【００１２】[0012]

【発明の実施の形態】以下、本発明をルーツポンプに具
体化した第１の実施の形態を図１〜図４に基づいて説明
する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment in which the present invention is embodied in a roots pump will be described below with reference to FIGS.

【００１３】図１に示すように、多段ルーツポンプ１１
のロータハウジング１２の前端にはフロントハウジング
１３が接合されており、フロントハウジング１３には封
鎖体３６が接合されている。ロータハウジング１２の後
端にはリヤハウジング１４が接合されている。ロータハ
ウジング１２は、シリンダブロック１５と複数の隔壁１
６とからなる。図２（ｂ）に示すように、シリンダブロ
ック１５は、一対のブロック片１７，１８からなり、隔
壁１６は一対の壁片１６１，１６２からなる。図１に示
すように、フロントハウジング１３と隔壁１６との間の
空間、隣合う隔壁１６の間の空間、及びリヤハウジング
１４と隔壁１６との間の空間は、それぞれポンプ室５
４，５５，５６，５７，５８となっている。As shown in FIG. 1, a multi-stage roots pump 11
A front housing 13 is joined to a front end of the rotor housing 12 of the first embodiment, and a closing body 36 is joined to the front housing 13. A rear housing 14 is joined to the rear end of the rotor housing 12. The rotor housing 12 includes a cylinder block 15 and a plurality of partition walls 1.
6 As shown in FIG. 2B, the cylinder block 15 includes a pair of block pieces 17 and 18, and the partition 16 includes a pair of wall pieces 161 and 162. As shown in FIG. 1, the space between the front housing 13 and the partition 16, the space between the adjacent partition 16, and the space between the rear housing 14 and the partition 16 are each a pump chamber 5.
4, 55, 56, 57 and 58.

【００１４】フロントハウジング１３とリヤハウジング
１４とには回転軸１９がラジアルベアリング２１，３７
を介して回転可能に支持されている。フロントハウジン
グ１３とリヤハウジング１４とには回転軸２０が同様に
ラジアルベアリング２２，３８を介して回転可能に支持
されている。両回転軸１９，２０は互いに平行に水平方
向に配置されている。回転軸１９，２０は隔壁１６に通
されている。A rotary shaft 19 is provided between the front housing 13 and the rear housing 14 for radial bearings 21 and 37.
It is rotatably supported through. Similarly, a rotating shaft 20 is rotatably supported by the front housing 13 and the rear housing 14 via radial bearings 22 and 38. Both rotating shafts 19 and 20 are arranged in a horizontal direction parallel to each other. The rotation shafts 19 and 20 are passed through the partition 16.

【００１５】回転軸１９にはガス移送体としての複数の
ロータ２３，２４，２５，２６，２７が一体形成されて
おり、回転軸２０には同数のロータ２８，２９，３０，
３１，３２が一体形成されている。ロータ２３〜３２
は、回転軸１９，２０の軸線１９１，２０１の方向に見
て同形同大の形状をしている。ロータ２３，２４，２
５，２６，２７の厚みはこの順に小さくなってゆくよう
にしてあり、ロータ２８，２９，３０，３１，３２の厚
みも同様にこの順に小さくなってゆくようにしてある。
ロータ２３，２８は僅かの隙間を保って互いに噛合した
状態でポンプ室５４に収容されており、ロータ２４，２
９も同様に互いに噛合した状態でポンプ室５５に収容さ
れている。以下同様にしてロータ２５，３０はポンプ室
５６に、ロータ２６，３１はポンプ室５７に、ロータ２
７，３２はポンプ室５８にそれぞれ収容されている。A plurality of rotors 23, 24, 25, 26, 27 as a gas transfer body are integrally formed on the rotating shaft 19, and the same number of rotors 28, 29, 30, are formed on the rotating shaft 20.
31 and 32 are integrally formed. Rotors 23-32
Have the same shape and the same size when viewed in the direction of the axes 191 and 201 of the rotating shafts 19 and 20. Rotors 23, 24, 2
The thicknesses of the rotors 5, 26, 27 decrease in this order, and the thicknesses of the rotors 28, 29, 30, 31, 32 also decrease in this order.
The rotors 23 and 28 are housed in the pump chamber 54 in a state of being engaged with each other with a slight gap therebetween.
Similarly, the pumps 9 are housed in the pump chamber 55 in a mutually meshed state. Similarly, the rotors 25 and 30 are in the pump chamber 56, the rotors 26 and 31 are in the pump chamber 57,
7, 32 are accommodated in the pump chamber 58, respectively.

【００１６】リヤハウジング１４にはギヤハウジング３
３が組み付けられている。回転軸１９，２０は、リヤハ
ウジング１４を貫通してギヤハウジング３３内に突出し
ており、各回転軸１９，２０の突出端部には歯車３４，
３５が互いに噛合した状態で止着されている。ギヤハウ
ジング３３には電動モータＭが組み付けられている。電
動モータＭの駆動力は、軸継ぎ手１０を介して回転軸１
９に伝えられ、回転軸１９は、電動モータＭによって図
２（ａ），（ｂ）及び図３（ａ），（ｂ）の矢印Ｒ１の
方向に回転される。回転軸２０は、歯車３４，３５を介
して電動モータＭから駆動力を得ており、回転軸２０は
図２（ａ），（ｂ）及び図３（ａ），（ｂ）の矢印Ｒ２
で示すように回転軸１９とは逆方向に回転する。The gear housing 3 is mounted on the rear housing 14.
3 are assembled. The rotating shafts 19 and 20 penetrate through the rear housing 14 and protrude into the gear housing 33.
35 are fastened in a state where they are engaged with each other. An electric motor M is mounted on the gear housing 33. The driving force of the electric motor M is transmitted to the rotating shaft 1 via the shaft joint 10.
9, the rotating shaft 19 is rotated by the electric motor M in the direction of arrow R1 in FIGS. 2 (a) and 2 (b) and FIGS. 3 (a) and 3 (b). The rotating shaft 20 obtains a driving force from the electric motor M via the gears 34 and 35, and the rotating shaft 20 is driven by an arrow R2 in FIGS. 2 (a) and 2 (b) and FIGS.
As shown by, it rotates in the opposite direction to the rotation shaft 19.

【００１７】図１及び図２（ｂ）に示すように、隔壁１
６内には通路１６３が形成されている。図２（ｂ）に示
すように、隔壁１６には通路１６３の入口１６４及び出
口１６５が形成されている。隣合うポンプ室５４，５
５，５６，５７，５８は、通路１６３を介して連通して
いる。As shown in FIG. 1 and FIG.
A passage 163 is formed in 6. As shown in FIG. 2B, an inlet 164 and an outlet 165 of the passage 163 are formed in the partition 16. Adjacent pump chambers 54, 5
5, 56, 57 and 58 communicate with each other via a passage 163.

【００１８】図２（ａ）に示すように、ブロック片１７
には導入口１７１がポンプ室５４に連通するように形成
されている。図３（ｂ）に示すように、ブロック片１８
には排出口１８１がポンプ室５８に連通するように形成
されている。導入口１７１からポンプ室５４に導入され
たガスは、ロータ２３，２８の回転によって隔壁１６の
入口１６４から通路１６３を経由して出口１６５より隣
のポンプ室５５へ移送される。以下、同様にガスは、ポ
ンプ室の容積が小さくなってゆく順、即ちポンプ室５
５，５６，５７，５８の順に移送される。ポンプ室５８
へ移送されたガスは、排出口１８１から外部へ排出され
る。ロータ２３〜３２は、ガスを移送するガス移送体で
ある。As shown in FIG. 2A, the block 17
Is formed such that an inlet 171 communicates with the pump chamber 54. As shown in FIG.
Is formed so that a discharge port 181 communicates with the pump chamber 58. The gas introduced from the inlet 171 into the pump chamber 54 is transferred from the inlet 164 of the partition 16 via the passage 163 to the adjacent pump chamber 55 from the outlet 165 by the rotation of the rotors 23 and 28. Hereinafter, similarly, the gas flows in the order of decreasing volume of the pump chamber, that is, the pump chamber 5.
5, 56, 57 and 58 are transferred in this order. Pump room 58
The gas transferred to the outside is discharged from the outlet 181 to the outside. The rotors 23 to 32 are gas transfer bodies that transfer gas.

【００１９】図３（ｂ）に示すように、排出口１８１に
は接続フランジ３９が接続されている。図４（ａ）に示
すように、接続フランジ３９にはマフラ４０が接続され
ており、マフラ４０には筒状の弁孔形成体４８が着脱可
能に嵌合して接続されている。弁孔形成体４８には円筒
形状のガイド管４１が着脱可能に嵌合して接続されてお
り、ガイド管４１には排出管４２が接続されている。マ
フラ４０、弁孔形成体４８及びガイド管４１にはフラン
ジ４０１，４８１，４１１が形成されている。これらフ
ランジ４０１，４８１，４１１は、ねじ４９によって共
締めされている。排出管４２は、ガイド管４１に溶接し
て固定されている。排出管４２は、図示しない排ガス処
理装置に接続されている。接続フランジ３９、マフラ４
０、ガイド管４１及び排出管４２は、多段ルーツポンプ
１１から吐出される排ガスを前記排ガス処理装置へ送る
ガス流路を構成する。As shown in FIG. 3B, a connection flange 39 is connected to the discharge port 181. As shown in FIG. 4A, a muffler 40 is connected to the connection flange 39, and a cylindrical valve hole forming body 48 is detachably fitted and connected to the muffler 40. A cylindrical guide tube 41 is detachably fitted to and connected to the valve hole forming body 48, and a discharge tube 42 is connected to the guide tube 41. The muffler 40, the valve hole forming body 48, and the guide tube 41 are formed with flanges 401, 481, and 411. These flanges 401, 481, 411 are fastened together by screws 49. The discharge pipe 42 is fixed to the guide pipe 41 by welding. The discharge pipe 42 is connected to an exhaust gas treatment device (not shown). Connection flange 39, muffler 4
0, the guide pipe 41 and the discharge pipe 42 constitute a gas flow path for sending exhaust gas discharged from the multi-stage roots pump 11 to the exhaust gas processing apparatus.

【００２０】ガイド管４１の管内には弁体４３及び復帰
ばね４４が収容されている。弁孔形成体４８にはテーパ
形状の弁孔４８２が形成されており、弁体４３は往復動
によって弁孔４８２を開閉する。弁体４３は、弁孔４８
２を閉鎖する閉鎖端壁４５と、円筒形状の周壁４６と、
周壁４６の外周面に立設された複数の摺接片４７（本実
施の形態では４つ）と、閉鎖端壁４５の外周に取り付け
られたシールリング５０とからなる。弁孔形成体４８、
ガイド管４１、弁体４３及び復帰ばね４４は、逆流防止
手段を構成する。復帰ばね４４は、弁孔４８２を閉じる
方向へ弁体４３を付勢する付勢手段となる。A valve 43 and a return spring 44 are accommodated in the guide tube 41. A tapered valve hole 482 is formed in the valve hole forming body 48, and the valve body 43 opens and closes the valve hole 482 by reciprocating motion. The valve element 43 has a valve hole 48.
2, a closed end wall 45 for closing the cylinder 2, a cylindrical peripheral wall 46,
It comprises a plurality of sliding contact pieces 47 (four in this embodiment) erected on the outer peripheral surface of the peripheral wall 46 and a seal ring 50 attached to the outer periphery of the closed end wall 45. Valve hole forming body 48,
The guide pipe 41, the valve element 43, and the return spring 44 constitute a backflow prevention unit. The return spring 44 serves as urging means for urging the valve body 43 in a direction in which the valve hole 482 is closed.

【００２１】複数の摺接片４７は、等角度間隔で周壁４
６の外周面の周方向に振り分け配置されている。シール
リング５０は弁孔４８２のテーパ面に接離し、シールリ
ング５０が弁孔４８２のテーパ面に接した状態は、弁体
４３が弁孔４８２を閉じた状態である。隣合う摺接片４
７の間の周壁４６の部位には流通孔４６１が貫設されて
いる。摺接片４７は、弁体４３の移動方向に長い板形状
をしている。図４（ｂ）に示すように、摺接片４７の突
端面４７１は、ガイド管４１のガイド内周面４１２に摺
接する。A plurality of sliding contact pieces 47 are formed on the peripheral wall 4 at equal angular intervals.
6 in the circumferential direction of the outer peripheral surface. The seal ring 50 is in contact with or separated from the tapered surface of the valve hole 482, and the state in which the seal ring 50 is in contact with the tapered surface of the valve hole 482 is a state in which the valve body 43 has closed the valve hole 482. Adjacent sliding contact piece 4
A flow hole 461 is formed in a portion of the peripheral wall 46 between the holes 7. The sliding contact piece 47 has a plate shape that is long in the moving direction of the valve element 43. As shown in FIG. 4B, the protruding end surface 471 of the sliding contact piece 47 comes into sliding contact with the guide inner peripheral surface 412 of the guide tube 41.

【００２２】図４（ａ），（ｂ）に示すように、ガイド
管４１のガイド内周面４１２にはサークリップ５１が係
止されている。マフラ４０、弁孔形成体４８及びガイド
管４１をねじ４９の締め付けによって組み付けた状態で
は、弁体４３がサークリップ５１に係合することはな
い。As shown in FIGS. 4A and 4B, a circlip 51 is locked on a guide inner peripheral surface 412 of the guide tube 41. In a state where the muffler 40, the valve hole forming body 48, and the guide tube 41 are assembled by tightening the screw 49, the valve body 43 does not engage with the circlip 51.

【００２３】最小容積のポンプ室５８から排出口１８１
を経由して接続フランジ３９へ吐出された排ガスは、マ
フラ４０を経由して弁孔４８２に至る。マフラ４０内の
圧力によって弁体４３の閉鎖端壁４５に掛かる荷重が、
ガイド管４１内の圧力と復帰ばね４４のばね力とによっ
て閉鎖端壁４５に掛かる荷重を上回る場合には、弁体４
３が弁孔４８２を開く。弁孔４８２を通過した排ガス
は、弁体４３の周壁４６の周囲、及び流通孔４６１を通
って排出管４２側へ流れる。From the pump chamber 58 having the minimum volume to the outlet 181
The exhaust gas discharged to the connection flange 39 via the muffler 40 reaches the valve hole 482 via the muffler 40. The load applied to the closed end wall 45 of the valve body 43 by the pressure in the muffler 40 is:
If the load on the closed end wall 45 is exceeded by the pressure in the guide tube 41 and the spring force of the return spring 44, the valve body 4
3 opens the valve hole 482. The exhaust gas that has passed through the valve hole 482 flows to the periphery of the peripheral wall 46 of the valve element 43 and to the discharge pipe 42 through the flow hole 461.

【００２４】第１の実施の形態では以下の効果が得られ
る。 （１-1）ねじ４９を外してガイド管４１と弁孔形成体４
８とを分離した状態では、図４（ｃ）に示すように、復
帰ばね４４のばね力を受けている弁体４３の摺接片４７
がサークリップ５１に係合する。従って、ガイド管４１
と弁孔形成体４８とが分離状態にあるときにも、弁体４
３はガイド管４１内に保持される。弁体４３をガイド管
４１内に常に内蔵する構成は、逆流防止手段の組み付け
性を向上する。In the first embodiment, the following effects can be obtained. (1-1) Remove the screw 49 and guide tube 41 and valve hole forming body 4
8 is separated from the sliding contact piece 47 of the valve element 43 receiving the spring force of the return spring 44, as shown in FIG.
Engages the circlip 51. Therefore, the guide tube 41
When the valve body 48 and the valve hole forming body 48 are separated, the valve body 4
3 is held in the guide tube 41. The configuration in which the valve body 43 is always built in the guide tube 41 improves the assemblability of the backflow prevention means.

【００２５】（１-2）ガイド管４１と弁孔形成体４８と
が図４（ａ）に示す組み付け状態にあるとき、弁体４３
が弁孔４８２を閉じる位置にある状態では、弁体４３は
サークリップ５１に係合しない。即ち、ガイド管４１と
弁孔形成体４８とが図４（ａ）に示す状態にあるときに
は、弁体４３はサークリップ５１の離脱阻止作用を受け
ず、弁孔４８２を開閉する弁体４３の開閉動作がサーク
リップ５１によって阻害されることはない。(1-2) When the guide tube 41 and the valve hole forming member 48 are in the assembled state shown in FIG.
Is in a position to close the valve hole 482, the valve element 43 does not engage with the circlip 51. That is, when the guide pipe 41 and the valve hole forming member 48 are in the state shown in FIG. 4A, the valve member 43 does not receive the function of preventing the circlip 51 from coming off, and the valve member 43 opens and closes the valve hole 482. The opening / closing operation is not hindered by the circlip 51.

【００２６】（１-3）サークリップ５１は、ガイド管４
１のガイド内周面４１２に容易に取り付け可能であり、
しかもサークリップ５１を取り付けるための余分なスペ
ースも少なくて済む。従って、サークリップ５１は、離
脱阻止手段として簡便である。(1-3) The circlip 51 is connected to the guide tube 4
1 can be easily attached to the inner peripheral surface 412 of the guide.
Moreover, an extra space for attaching the circlip 51 can be reduced. Therefore, the circlip 51 is simple as a detachment preventing means.

【００２７】（１-4）弁体４３の開閉動作は、ガイド管
４１のガイド内周面４１２によって案内されるが、ガイ
ド管４１と弁体４３との摺接は、弁体４３の周壁４６の
外周面の周方向に振り分け配置された複数の摺接片４７
を介して行われる。ガイド内周面４１２に対して摺接す
る摺接片４７は、弁体４３の移動方向に見た状態では、
ガイド管４１のガイド内周面４１２の全周のうちの一部
に対してのみ摺接する。即ち、ガイド管４１の周方向に
おけるガイド管４１と複数の摺接片４７との摺接範囲
は、ガイド管４１の全周のうちの一部のみとなる。弁体
４３に対するガイド管４１の摺接部位がガイド管４１の
全周のうちの一部のみとなるような摺接をもたらす構成
は、排ガスの固化物がガイド内周面４１２と弁体４３と
の間に噛みこまれる事態の発生を防止する。従って、弁
体４３の開閉動作の円滑性が損なわれることはなく、逆
流防止手段の動作障害の発生が抑制される。(1-4) The opening / closing operation of the valve body 43 is guided by the guide inner peripheral surface 412 of the guide tube 41. The sliding contact between the guide tube 41 and the valve body 43 is performed by the peripheral wall 46 of the valve body 43. A plurality of sliding contact pieces 47 distributed in the circumferential direction of the outer peripheral surface of
Done through. The sliding contact piece 47 that is in sliding contact with the guide inner peripheral surface 412 is in a state where it is viewed in the moving direction of the valve body 43.
Only a part of the entire circumference of the guide inner peripheral surface 412 of the guide tube 41 comes into sliding contact. That is, the sliding contact range between the guide tube 41 and the plurality of sliding contact pieces 47 in the circumferential direction of the guide tube 41 is only a part of the entire circumference of the guide tube 41. The configuration in which the sliding portion of the guide pipe 41 with respect to the valve body 43 makes a sliding contact with only a part of the entire circumference of the guide pipe 41 is such that solidified exhaust gas causes the guide inner peripheral surface 412 and the valve body 43 to be in contact with each other. Prevents the occurrence of a situation in which the user is caught between them. Therefore, the smoothness of the opening / closing operation of the valve body 43 is not impaired, and the occurrence of operation failure of the backflow prevention means is suppressed.

【００２８】このような作用効果をもたらす摺接片４７
は、ガイド内周面４１２の近傍にあり、サークリップ５
１の係合対象として好適な位置にある。従って、摺接片
４７は、ガイド管４１と弁孔形成体４８とを分離したと
きのサークリップ５１の係合対象として好適である。The sliding piece 47 having such an effect is provided.
Is located near the guide inner peripheral surface 412 and the circlip 5
It is in a position suitable for the first engagement target. Therefore, the sliding contact piece 47 is suitable as an engagement target of the circlip 51 when the guide pipe 41 and the valve hole forming body 48 are separated.

【００２９】次に、図５の第２の実施の形態を説明す
る。第１の実施の形態と同じ構成部には同じ符号が付し
てある。ガイド管４１のガイド内周面４１２には離脱阻
止手段であるリングねじ５２が螺合されている。ガイド
管４１と弁孔形成体４８とを分離した状態では、復帰ば
ね４４のばね力を受けている弁体４３の摺接片４７がリ
ングねじ５２に係合する。従って、ガイド管４１と弁孔
形成体４８とが分離状態にあるときにも、弁体４３はガ
イド管４１内に保持される。Next, a second embodiment shown in FIG. 5 will be described. The same components as those in the first embodiment are denoted by the same reference numerals. A ring screw 52 serving as a separation preventing means is screwed to the guide inner peripheral surface 412 of the guide tube 41. When the guide tube 41 and the valve hole forming member 48 are separated from each other, the sliding contact piece 47 of the valve member 43 receiving the spring force of the return spring 44 engages with the ring screw 52. Therefore, even when the guide tube 41 and the valve hole forming body 48 are in the separated state, the valve body 43 is held in the guide tube 41.

【００３０】次に、図６の第３の実施の形態を説明す
る。第１の実施の形態と同じ構成部には同じ符号が付し
てある。ガイド管４１には合成樹脂製の離脱阻止リング
５３が嵌合されている。離脱阻止手段である離脱阻止リ
ング５３には複数の掛け止め片５３１が形成されてお
り、掛け止め片５３１の先端のフック部５３２がガイド
内周面４１２の凹部４１３に掛け止められる。ガイド管
４１と弁孔形成体４８とを分離した状態では、復帰ばね
４４のばね力を受けている弁体４３の摺接片４７が掛け
止め片５３１の先端に係合する。従って、ガイド管４１
と弁孔形成体４８とが分離状態にあるときにも、弁体４
３はガイド管４１内に保持される。Next, a third embodiment shown in FIG. 6 will be described. The same components as those in the first embodiment are denoted by the same reference numerals. The guide tube 41 is fitted with a detachment preventing ring 53 made of a synthetic resin. A plurality of retaining pieces 531 are formed on the retaining ring 53 serving as the retaining means, and the hook portion 532 at the tip of the retaining piece 531 is engaged with the concave portion 413 of the guide inner peripheral surface 412. In a state where the guide pipe 41 and the valve hole forming body 48 are separated, the sliding contact piece 47 of the valve body 43 receiving the spring force of the return spring 44 engages with the tip of the latching piece 531. Therefore, the guide tube 41
When the valve body 48 and the valve hole forming body 48 are separated, the valve body 4
3 is held in the guide tube 41.

【００３１】本発明では以下のような実施の形態も可能
である。 （１）ガイド管４１を上側とすると共に、弁孔形成体４
８を下側とするようにガス流路を配設し、弁体４３の自
重を付勢手段とすること。 （２）真空ポンプの本体に繋がる吸入管上に介在された
逆流防止手段に本発明を適用すること。 （３）ルーツポンプ以外の真空ポンプに本発明を適用す
ること。In the present invention, the following embodiments are also possible. (1) The guide tube 41 is set to the upper side, and the valve hole forming body 4
The gas flow path is arranged so that 8 is on the lower side, and the own weight of the valve body 43 is used as the urging means. (2) The present invention is applied to a backflow prevention means interposed on a suction pipe connected to a main body of a vacuum pump. (3) The present invention is applied to a vacuum pump other than a roots pump.

【００３２】前記した実施の形態から把握できる請求項
記載以外の発明について以下に記載する。 （１）請求項１乃至請求項４のいずれか１項において、
前記真空ポンプは、複数の前記回転軸を平行に配置する
と共に、前記各回転軸上にロータを配置し、隣合う回転
軸上のロータを互いに噛み合わせ、互いに噛み合った状
態の複数のロータを１組として収容する複数のポンプ
室、又は単一のポンプ室を備えた真空ポンプである真空
ポンプにおける流路構造。The inventions other than those described in the claims which can be grasped from the above embodiment will be described below. (1) In any one of claims 1 to 4,
The vacuum pump arranges a plurality of the rotating shafts in parallel, arranges a rotor on each of the rotating shafts, meshes rotors on adjacent rotating shafts with each other, and connects a plurality of rotors in a meshed state with each other. A flow path structure in a vacuum pump that is a vacuum pump including a plurality of pump chambers housed as a set or a single pump chamber.

【００３３】[0033]

【発明の効果】以上詳述したように本発明では、ガイド
管と弁孔形成体とを組み付け可能かつ分離可能に別体と
し、前記ガイド管と前記弁孔形成体とが分離状態にあ
り、かつ弁体が付勢手段の付勢作用を受けているとき、
前記弁体が前記ガイド管内から離脱しないようにする離
脱阻止手段を前記ガイド管に組み付けたので、排ガスの
ガス流路上に介在された逆流防止手段の組み付け性を向
上し得るという優れた効果を奏する。As described in detail above, according to the present invention, the guide tube and the valve hole forming body are separated from each other so as to be assembled and separable, and the guide tube and the valve hole forming body are separated from each other. And when the valve element is under the urging action of the urging means,
Since the detachment preventing means for preventing the valve body from being detached from the inside of the guide pipe is assembled to the guide pipe, an excellent effect that the assemblability of the backflow prevention means interposed on the gas flow path of the exhaust gas can be improved. .

【図面の簡単な説明】[Brief description of the drawings]

【図１】第１の実施の形態を示す多段ルーツポンプ１１
全体の平断面図。FIG. 1 shows a multi-stage roots pump 11 according to a first embodiment.
FIG.

【図２】（ａ）は図１のＡ−Ａ線断面図。（ｂ）は図１
のＢ−Ｂ線断面図。FIG. 2A is a sectional view taken along line AA of FIG. (B) is FIG.
BB sectional drawing of FIG.

【図３】（ａ）は図１のＣ−Ｃ線断面図。（ｂ）は図１
のＤ−Ｄ線断面図。FIG. 3A is a sectional view taken along line CC of FIG. 1; (B) is FIG.
FIG.

【図４】（ａ）は要部平断面図。（ｂ）は（ａ）のＥ−
Ｅ線断面図。（ｃ）はガイド管４１と弁孔形成体４８と
を分離した状態を示す要部平断面図。FIG. 4A is a cross-sectional plan view of a main part. (B) is E- of (a).
E sectional drawing. (C) is a sectional plan view of a main part showing a state where the guide pipe 41 and the valve hole forming body 48 are separated.

【図５】第２の実施の形態を示す要部平断面図。FIG. 5 is a plan sectional view of a main part showing a second embodiment.

【図６】第３の実施の形態を示す要部平断面図。FIG. 6 is a plan sectional view of a main part showing a third embodiment.

【符号の説明】[Explanation of symbols]

１１…真空ポンプである多段ルーツポンプ。１９，２０
…回転軸。２３，２４，２５，２６，２７，２８，２
９，３０，３１，３２…ガス移送体であるロータ。３９
…ガス流路を構成する接続フランジ。４０…ガス流路を
構成するマフラ。４１…ガス流路を構成すると共に、逆
流防止手段を構成するガイド管。４１２…ガイド内周
面。４２…ガス流路を構成する排出管。４３…逆流防止
手段を構成する弁体。４４…付勢手段となる復帰ばね。
４５…閉鎖端壁。４６…周壁。４７…摺接片。４８…弁
孔形成体。５１…離脱阻止手段であるサークリップ。11 Multi-stage roots pump which is a vacuum pump. 19, 20
…Axis of rotation. 23, 24, 25, 26, 27, 28, 2
9,30,31,32 ... rotors which are gas transfer bodies. 39
... Connecting flanges that constitute the gas flow path. 40: Muffler constituting a gas flow path. 41 ... A guide tube which constitutes a gas flow path and also constitutes a backflow prevention means. 412: inner circumferential surface of the guide. Reference numeral 42 denotes a discharge pipe constituting a gas flow path. 43 ... Valve constituting backflow prevention means. 44 ... Return spring serving as urging means.
45 ... Closed end wall. 46 ... peripheral wall. 47 ... Sliding piece. 48: A valve hole forming body. Reference numeral 51 denotes a circlip serving as a separation preventing means.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 正路 仁 愛知県刈谷市豊田町２丁目１番地 株式会 社豊田自動織機製作所内 Ｆターム(参考） 3H029 AA06 AA09 AB06 BB32 BB47 CC15 CC25  ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hitoshi Masaji 2-1-1 Toyota-cho, Kariya-shi, Aichi F-term in Toyota Industries Corporation (reference) 3H029 AA06 AA09 AB06 BB32 BB47 CC15 CC25

Claims (4)

【特許請求の範囲】[Claims] 【請求項１】回転軸の回転に基づいてガス移送体を動か
し、前記ガス移送体の動作によってガスを移送して吸引
作用をもたらし、前記ガスのガス流路上に逆流防止手段
を介在した真空ポンプにおいて、 前記ガス流路の一部を形成するガイド管と、 前記ガイド管内で前記ガイド管の長さ方向に摺動案内さ
れる弁体と、 前記弁体によって開閉される弁孔を形成する弁孔形成体
と、 前記弁孔を閉じる方向へ前記弁体を付勢する付勢手段と
を備えた前記逆流防止手段を構成し、 前記ガイド管と前記弁孔形成体とを組み付け可能かつ分
離可能に別体とし、前記ガイド管と前記弁孔形成体とが
分離状態にあり、かつ前記弁体が前記付勢手段の付勢作
用を受けているとき、前記弁体が前記ガイド管内から離
脱しないようにする離脱阻止手段を前記ガイド管に組み
付けた真空ポンプにおける流路構造。A vacuum pump for moving a gas transfer body based on the rotation of a rotating shaft, transferring a gas by the operation of the gas transfer body to bring about a suction effect, and interposing backflow prevention means on a gas flow path of the gas; In the above, a guide pipe forming a part of the gas flow path, a valve body slidably guided in the guide pipe in a length direction of the guide pipe, and a valve forming a valve hole opened and closed by the valve body The backflow prevention means includes a hole forming body and an urging means for urging the valve body in a direction to close the valve hole, and the guide pipe and the valve hole forming body can be assembled and separated. When the guide pipe and the valve hole forming body are separated from each other and the valve body is under the urging action of the urging means, the valve body does not separate from the inside of the guide pipe. The guide means to prevent the detachment Flow path structure in the vacuum pump assembly to. 【請求項２】前記弁体が前記付勢手段の付勢作用を受け
ており、かつ前記ガイド管と前記弁孔形成体とが組み付
け状態にあるときには、前記弁体は、前記離脱阻止手段
の離脱阻止作用を受けない位置にある請求項１に記載の
真空ポンプにおける流路構造。2. When the valve body is under the urging action of the urging means and the guide tube and the valve hole forming body are in an assembled state, the valve body is connected to the detachment preventing means. The flow path structure in the vacuum pump according to claim 1, wherein the flow path structure is located at a position where the flow path is not subjected to the detachment preventing action. 【請求項３】前記離脱阻止手段は、前記ガイド管の内周
面に係止されるサークリップである請求項１及び請求項
２のいずれか１項に記載の真空ポンプにおける流路構
造。3. The flow path structure in a vacuum pump according to claim 1, wherein said detachment preventing means is a circlip locked on an inner peripheral surface of said guide tube. 【請求項４】前記弁体は、前記弁孔を閉鎖する閉鎖端壁
と、環状の周壁と、前記周壁の周方向に振り分けるよう
に前記周壁に設けられた複数の摺接片とを備え、前記摺
接片は前記ガイド管の内周面に摺接して案内され、前記
離脱阻止手段は、前記複数の摺接片に係合して前記ガイ
ド管内からの前記弁体の離脱を阻止する請求項１乃至請
求項３のいずれか１項に記載の真空ポンプにおける流路
構造。4. The valve body includes a closed end wall for closing the valve hole, an annular peripheral wall, and a plurality of sliding contact pieces provided on the peripheral wall so as to be distributed in a circumferential direction of the peripheral wall. The sliding contact piece is guided in sliding contact with an inner peripheral surface of the guide pipe, and the detachment preventing means engages with the plurality of sliding contact pieces to prevent detachment of the valve body from inside the guide pipe. A flow path structure in the vacuum pump according to any one of claims 1 to 3.
JP2000314967A 2000-10-16 2000-10-16 Channel structure in vacuum pump Pending JP2002122085A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000314967A JP2002122085A (en) 2000-10-16 2000-10-16 Channel structure in vacuum pump
EP01124518A EP1199475A3 (en) 2000-10-16 2001-10-12 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000314967A JP2002122085A (en) 2000-10-16 2000-10-16 Channel structure in vacuum pump

Publications (1)

Publication Number Publication Date
JP2002122085A true JP2002122085A (en) 2002-04-26

Family

ID=18794138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000314967A Pending JP2002122085A (en) 2000-10-16 2000-10-16 Channel structure in vacuum pump

Country Status (2)

Country Link
EP (1) EP1199475A3 (en)
JP (1) JP2002122085A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI623688B (en) * 2013-07-04 2018-05-11 艾迪生真空產品公司 Dry roughing vacuum pump

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006096178A1 (en) 2005-03-07 2006-09-14 Carrier Corporation Compressor sound suppression
DE102012003066B3 (en) * 2012-02-17 2013-07-04 Netzsch Pumpen & Systeme Gmbh METHOD AND DEVICE FOR FIXING AND SYNCHRONIZING TURNING PISTONS IN A ROTARY PISTON PUMP

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Publication number Priority date Publication date Assignee Title
FR1188975A (en) * 1957-12-24 1959-09-28 Comp Generale Electricite Variable volume non-return valve
US3958603A (en) * 1973-05-14 1976-05-25 The Nash Engineering Company Insert for movable diaphragm type flow control valve
DE7636915U1 (en) * 1976-11-24 1977-08-18 Bosch-Siemens Hausgeraete Gmbh, 7000 Stuttgart NON-RETURN VALVE FOR WATER-CARRIED DEVICES, IN PARTICULAR DISHWASHERS OR WASHING MACHINES
US4904165A (en) * 1988-08-02 1990-02-27 Carrier Corporation Muffler/check valve assembly for scroll compressor
AT394426B (en) * 1989-12-15 1992-03-25 Vaillant Gmbh OVERFLOW VALVE

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI623688B (en) * 2013-07-04 2018-05-11 艾迪生真空產品公司 Dry roughing vacuum pump

Also Published As

Publication number Publication date
EP1199475A3 (en) 2003-03-05
EP1199475A2 (en) 2002-04-24

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