JP2002120104A - Cutting tool made of surface coated cemented carbide alloy having chipping resistance - Google Patents
Cutting tool made of surface coated cemented carbide alloy having chipping resistanceInfo
- Publication number
- JP2002120104A JP2002120104A JP2000313689A JP2000313689A JP2002120104A JP 2002120104 A JP2002120104 A JP 2002120104A JP 2000313689 A JP2000313689 A JP 2000313689A JP 2000313689 A JP2000313689 A JP 2000313689A JP 2002120104 A JP2002120104 A JP 2002120104A
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- JP
- Japan
- Prior art keywords
- layer
- cemented carbide
- outermost
- thickness
- hard coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Drilling Tools (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、特に各種の鋼や
鋳鉄などの高速切削加工に用いた場合に、硬質被覆層が
すぐれた耐チッピング性を発揮する表面被覆超硬合金製
切削工具（以下、被覆超硬工具という）に関するもので
ある。The present invention relates to a surface-coated cemented carbide cutting tool (hereinafter referred to as a cutting tool) in which a hard coating layer exhibits excellent chipping resistance, particularly when used for high-speed cutting of various steels and cast irons. , Coated carbide tools).
【０００２】[0002]
【従来の技術】一般に、切削工具には、各種の鋼や鋳鉄
などの被削材の旋削加工や平削り加工にバイトの先端部
に着脱自在に取り付けて用いられるスローアウエイチッ
プ、前記被削材の穴あけ切削加工などに用いられるドリ
ルやミニチュアドリル、さらに前記被削材の面削加工や
溝加工、肩加工などに用いられるソリッドタイプのエン
ドミルなどがあり、また前記スローアウエイチップを着
脱自在に取り付けて前記ソリッドタイプのエンドミルと
同様に切削加工を行うスローアウエイエンドミル工具な
どが知られている。2. Description of the Related Art Generally, cutting tools include a throw-away tip which is detachably attached to a tip of a cutting tool for turning or planing of various materials such as steel and cast iron. Drills and miniature drills used for drilling and cutting of solids, and solid type end mills used for face milling and grooving of the work material, shoulder machining, and the like, and the detachable tip is detachably attached. In addition, a throw-away end mill tool or the like that performs cutting in the same manner as the solid type end mill is known.
【０００３】また、一般に、例えば図１に概略説明図で
示される物理蒸着装置の１種であるアークイオンプレー
ティング装置を用い、ヒータで装置内を、例えば雰囲気
を２０ｍｔｏｒｒの真空として、５００℃の温度に加熱
した状態で、アノード電極と所定組成を有するＴｉ−Ａ
ｌ合金がセットされたカソード電極（蒸発源）との間
に、例えば電圧：３５Ｖ、電流：９０Ａの条件でアーク
放電を発生させ、同時に装置内に反応ガスとして窒素ガ
ス、または窒素ガスとメタンガスを導入し、一方炭化タ
ングステン（以下、ＷＣで示す）基超硬合金または炭窒
化チタン（以下、ＴｉＣＮで示す）基サーメットからな
る基体（以下、これらを総称して超硬基体と云う）に
は、例えばー２００Ｖのバイアス電圧を印加した条件
で、前記超硬合金基体の表面に、例えば特開昭６２−５
６５６５号公報に記載されるように、組成式：（Ｔｉ
1-XＡｌX）Ｎおよび同（Ｔｉ1-XＡｌX）Ｃ1-YＮY（ただ
し、原子比で、Ｘは０．１〜０．７、Ｙは０．５〜０．
９９を示す）を有するＴｉとＡｌの複合窒化物［以下、
（Ｔｉ，Ａｌ）Ｎで示す］および複合炭窒化物［以下、
（Ｔｉ，Ａｌ）ＣＮで示す］のうちのいずれか、あるい
は両方で構成された単層または複層の硬質被覆層を１〜
１０μｍの平均層厚で蒸着することにより被覆超硬工具
を製造することが知られている。In general, for example, an arc ion plating apparatus which is a kind of physical vapor deposition apparatus schematically shown in FIG. 1 is used, and the inside of the apparatus is heated to 500 ° C. by, for example, reducing the atmosphere to a vacuum of 20 mtorr. While heated to a temperature, an anode electrode and Ti-A having a predetermined composition
An arc discharge is generated between the cathode electrode (evaporation source) on which the alloy is set, for example, under the conditions of a voltage: 35 V and a current: 90 A, and at the same time, nitrogen gas or nitrogen gas and methane gas as a reaction gas in the apparatus. On the other hand, a substrate made of a tungsten carbide (hereinafter, referred to as WC) -based cemented carbide or a cermet based on titanium carbonitride (hereinafter, referred to as TiCN) (hereinafter, these are collectively referred to as a super-hard substrate) include: For example, under the condition that a bias voltage of -200 V is applied, the surface of the cemented carbide substrate is
No. 6565, the composition formula: (Ti
1-X Al X ) N and (Ti 1-X Al X ) C 1 -Y N Y (where X is 0.1 to 0.7 and Y is 0.5 to 0.
99)), and a composite nitride of Ti and Al having
(Ti, Al) N] and composite carbonitride [hereinafter, referred to as
(Ti, Al) CN], or a single or multilayer hard coating layer composed of one or both of them.
It is known to produce coated carbide tools by vapor deposition with an average layer thickness of 10 μm.
【０００４】また、上記の従来被覆超硬工具において、
工具の使用前と使用後の識別を容易にするために、黄金
色の色調を有する窒化チタン（以下、ＴｉＮで示す）層
を上記（Ｔｉ，Ａｌ）Ｎ層および／または（Ｔｉ，Ａ
ｌ）ＣＮ層からなる硬質被覆層の表面に、最表面層とし
て０．０５〜２μｍの平均層厚で化学蒸着または物理蒸
着することが行われている。In the above-mentioned conventional coated carbide tool,
In order to facilitate the discrimination between before and after use of the tool, a titanium nitride (hereinafter referred to as TiN) layer having a golden color tone is replaced with the (Ti, Al) N layer and / or the (Ti, A) layer.
1) Chemical vapor deposition or physical vapor deposition is performed on the surface of a hard coating layer composed of a CN layer with an average layer thickness of 0.05 to 2 μm as an outermost surface layer.
【０００５】[0005]
【発明が解決しようとする課題】一方、近年の切削加工
に対する省力化および省エネ化の要求は強く、これに伴
い、切削加工は高速化の傾向にあるが、上記の従来被覆
超硬工具において、特にこれの硬質被覆層の表面に、最
表面層として使用前後の識別目的でＴｉＮ層が蒸着形成
されている場合、このＴｉＮ層は被削材である各種鋼に
対する付着性の強いものであるため、特に高い発熱を伴
う高速切削加工では、切粉が高温加熱されることと相ま
って前記ＴｉＮ層に強力に付着し、前記ＴｉＮ層を硬質
被覆層から局部的に剥がし取るように作用するが、この
場合前記ＴｉＮ層は硬質被覆層である（Ｔｉ，Ａｌ）Ｎ
層および（Ｔｉ，Ａｌ）ＣＮ層に対しても密着性のすぐ
れたものであることから、前記硬質被覆層も前記ＴｉＮ
層と一緒に局部的に剥がし取られ、この結果刃先にチッ
ピング（微小欠け）が発生し、比較的短時間で使用寿命
に至るのが現状である。On the other hand, in recent years, there has been a strong demand for labor saving and energy saving for cutting work, and with this, cutting work tends to be accelerated. In particular, when a TiN layer is deposited on the surface of the hard coating layer as the outermost surface layer for the purpose of identification before and after use, the TiN layer has a strong adhesiveness to various steels as work materials. In high-speed cutting with particularly high heat generation, the chips are strongly adhered to the TiN layer in combination with the high temperature heating, and act to locally peel the TiN layer from the hard coating layer. In this case, the TiN layer is a hard coating layer (Ti, Al) N
Layer and the (Ti, Al) CN layer, the hard coating layer is also made of the TiN
At present, the chip is locally peeled off together with the layer, and as a result, chipping (small chipping) occurs at the cutting edge, which results in a relatively short service life.
【０００６】[0006]
【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、上記の硬質被覆層の表面に最表
面層として識別目的でＴｉＮ層が形成された従来被覆超
硬工具に着目し、特にこれの高速切削加工条件下での耐
チッピング性の向上を図るべく研究を行った結果、上記
の従来被覆超硬工具の表面に、まず、最表面下地層とし
て、反応ガス組成を、体積％で、ＴｉＣｌ4：０．２〜
１０％、ＣＯ2：０．１〜１０％、Ａｒ：５〜６０％、
Ｈ2：残り、とし、かつ、 反応雰囲気温度：８００〜１１００℃、 反応雰囲気圧力：４〜７０ｋＰａ（３０〜５２５ｔｏｒ
ｒ）、 とした条件で、０．１〜３μｍの平均層厚を有し、か
つ、オージェ分光分析装置で測定して、Ｔｉに対する酸
素の割合が原子比で１．２５〜１．９０、即ち、 組成式：ＴｉＯW、 で表わした場合、 Ｗ：Ｔｉに対する原子比で１．２５〜１．９０、 を満足するＴｉ酸化物層を形成し、このＴｉ酸化物層の
上に、最表面層として、通常の条件、即ち、反応ガス組
成を、体積％で、ＴｉＣｌ4：０．２〜１０％、Ｎ2：４
〜６０％、Ｈ2：残り、とし、かつ、 反応雰囲気温度：８００〜１１００℃、 反応雰囲気圧力：４〜９０ｋＰａ（３０〜６７５ｔｏｒ
ｒ）、 とした条件で、０．０５〜２μｍの平均層厚を有するＴ
ｉＮ層を形成すると、この最表面層形成時に上記最表面
下地層を構成するＴｉ酸化物層の酸素が拡散してきてＴ
ｉ窒酸化物層が形成されるようになり、この場合前記Ｔ
ｉ窒酸化物層形成後の最表面下地層は、厚さ方向中央部
をオージェ分光分析装置で測定して、酸素の割合がＴｉ
に対する原子比で１．２〜１．７、即ち、 組成式：ＴｉＯV 、 で表わした場合、 Ｖ：Ｔｉに対する原子比で１．２〜１．７、 を満足するＴｉ酸化物層となり、一方前記最表面層は、
同じく厚さ方向中央部をオージェ分光分析装置で測定し
て、拡散酸素の割合がＴｉに対する原子比で０．０１〜
０．４、即ち、 組成式：ＴｉＮ1-Z（Ｏ）Z、 で表わした場合（ただし、（Ｏ）は上記最表面下地層か
らの拡散酸素を示す）、 Ｚ：Ｔｉに対する原子比で０．０１〜０．４、 を満足するＴｉ窒酸化物層となり、この結果の上記Ｔｉ
窒酸化物層およびＴｉ酸化物層が上記硬質被覆層の表面
に最表面層および最表面下地層として化学蒸着および／
または物理蒸着された被覆超硬工具においては、特に前
記最表面層としてのＴｉ窒酸化物層が、上記ＴｉＮ層と
同等の黄金色の表面色調を具備するため、工具の使用前
後の識別を可能とし、かつ被削材である各種鋼に対する
付着性のきわめて低いものであるため、高熱発生を伴う
高速切削加工にも高温加熱された切粉が付着することが
なくなることから、切刃のチッピング発生が著しく抑制
され、長期に亘ってすぐれた切削性能を発揮するように
なるという研究結果が得られたのである。Means for Solving the Problems Accordingly, the present inventors have
In view of the above, attention has been paid to a conventional coated carbide tool in which a TiN layer is formed as the outermost surface layer on the surface of the hard coating layer for the purpose of identification, and in particular, the chipping resistance under high-speed cutting conditions. As a result of conducting research to improve the surface roughness, the surface of the above-mentioned conventional coated carbide tool was firstly provided with a reactive gas composition in the form of TiCl 4 : 0.2 to
10%, CO 2: 0.1~10% , Ar: 5~60%,
H 2 : remaining, reaction atmosphere temperature: 800 to 1100 ° C., reaction atmosphere pressure: 4 to 70 kPa (30 to 525 torr)
r) under the following conditions, an average layer thickness of 0.1 to 3 μm, and the ratio of oxygen to Ti is 1.25 to 1.90 in atomic ratio, as measured by an Auger spectrometer, that is, In the case of the composition formula: TiO W , a Ti oxide layer satisfying an atomic ratio of W: Ti to 1.25 to 1.90 is formed, and a top surface layer is formed on the Ti oxide layer. Under normal conditions, that is, when the reaction gas composition is TiCl 4 : 0.2 to 10% by volume, N 2 : 4
６０60%, H 2 : remaining, and reaction atmosphere temperature: 800 to 1100 ° C., reaction atmosphere pressure: 4 to 90 kPa (30 to 675 torr)
r) T having an average layer thickness of 0.05 to 2 μm under the following conditions:
When the iN layer is formed, oxygen of the Ti oxide layer constituting the outermost surface underlayer diffuses when the outermost surface layer is formed, and T
An i-nitride oxide layer is formed.
The outermost surface underlayer after the formation of the i-nitrogen oxide layer was measured by an Auger spectrometer at the center in the thickness direction, and the oxygen content was
When the atomic ratio with respect to V is 1.2 to 1.7, that is, when represented by the composition formula: TiO V , the Ti oxide layer satisfies the following: 1.2 to 1.7 with V: Ti. The outermost layer,
Similarly, the central part in the thickness direction is measured by an Auger spectrometer, and the ratio of the diffused oxygen is 0.01 to
0.4, that is, when represented by the composition formula: TiN 1-Z (O) Z , (where (O) indicates oxygen diffused from the outermost underlayer), the atomic ratio of Z to Ti is 0. .01 to 0.4, and a Ti nitride oxide layer satisfying
A nitrided oxide layer and a Ti oxide layer are formed on the surface of the hard coating layer by chemical vapor deposition and / or as an outermost surface layer and an outermost surface underlayer.
Or, in the case of a coated carbide tool subjected to physical vapor deposition, the Ti nitride oxide layer as the outermost surface layer has a golden surface tone equivalent to that of the TiN layer, so that it is possible to identify before and after use of the tool. And extremely low adhesion to various types of steel, which is the work material, so that high-temperature heated chips do not adhere to high-speed cutting with high heat generation. Have been remarkably suppressed, and a study result has been obtained that exhibits excellent cutting performance over a long period of time.
【０００７】この発明は、上記の研究結果に基づいてな
されたものであって、超硬基体の表面に、組成式：（Ｔ
ｉ1-XＡｌX）Ｎおよび同（Ｔｉ1-XＡｌX）Ｃ1-YＮY（た
だし、原子比で、Ｘは０．１〜０．７、Ｙは０．５〜
０．９９を示す）を有する（Ｔｉ，Ａｌ）Ｎおよび（Ｔ
ｉ，Ａｌ）ＣＮのうちのいずれか、あるいは両方で構成
された単層または複層の硬質被覆層を１〜１０μｍの平
均層厚で物理蒸着してなる被覆超硬工具において、上記
硬質被覆層の表面に、最表面下地層として、０．１〜３
μｍの平均層厚を有し、かつ、 組成式：ＴｉＯV 、 で表わした場合、厚さ方向中央部をオージェ分光分析装
置で測定して、 Ｖ：Ｔｉに対する原子比で１．２〜１．７、 を満足するＴｉ酸化物層、最表面層として、０．０５〜
２μｍの平均層厚を有し、かつ、 組成式：ＴｉＮ1-Z（Ｏ）Z、 で表わした場合（ただし、（Ｏ）は上記最表面下地層か
らの拡散酸素を示す）、同じく厚さ方向中央部をオージ
ェ分光分析装置で測定して、 Ｚ：Ｔｉに対する原子比で０．０１〜０．４、 を満足するＴｉ窒酸化物層、を化学蒸着および／または
物理蒸着してなる、耐チッピング性のすぐれた被覆超硬
工具に特徴を有するものである。The present invention has been made on the basis of the above research results, and has a composition represented by the following formula: (T
i 1-X Al X ) N and (Ti 1-X Al X ) C 1-Y N Y (where X is 0.1 to 0.7 and Y is 0.5 to
(Indicating 0.99) (Ti, Al) N and (T
(i, Al) CN, in a coated cemented carbide tool obtained by physical vapor deposition of a single-layer or multiple-layer hard coating layer composed of one or both of them, with an average layer thickness of 1 to 10 μm. 0.1 to 3 as the outermost surface underlayer
When it has an average layer thickness of μm and is represented by the composition formula: TiO V , the center in the thickness direction is measured by an Auger spectroscopic analyzer, and the atomic ratio to V: Ti is 1.2 to 1. 7, a Ti oxide layer that satisfies
When it has an average layer thickness of 2 μm and is represented by the composition formula: TiN 1-Z (O) Z , (where (O) indicates oxygen diffused from the outermost underlayer), the same thickness The central part in the direction is measured by an Auger spectroscopic analyzer, and a Ti nitride oxide layer satisfying the following: 0.01 to 0.4 in atomic ratio with respect to Z: Ti is formed by chemical vapor deposition and / or physical vapor deposition. It is characterized by a coated carbide tool having excellent chipping properties.
【０００８】この発明の被覆超硬工具において、最表面
層を構成するＴｉ窒酸物層の拡散酸素の割合（Ｚ値）を
Ｔｉに対する原子比で０．０１〜０．４０としたのは、
その値が０．０１未満では切粉に対する付着性抑制に所
望の効果を確保することができず、一方その値が０．４
０を越えると、層中に気孔が形成され易くなり、健全な
最表面層の安定的形成が難しくなるという理由によるも
のである。In the coated carbide tool of the present invention, the ratio (Z value) of the diffusion oxygen of the Ti nitride layer constituting the outermost surface layer is set to 0.01 to 0.40 in atomic ratio to Ti.
If the value is less than 0.01, the desired effect cannot be ensured in suppressing the adhesion to chips, while the value is 0.4
If it exceeds 0, pores are easily formed in the layer, and it is difficult to stably form a sound outermost surface layer.
【０００９】また、同じく最表面層を構成するＴｉ窒酸
化物層は、上記の通り、まず、最表面下地層として、酸
素の割合をＴｉに対する原子比で１．２５〜１．９０
（Ｗ値）としたＴｉ酸化物層を形成し、ついで前記最表
面下地層の上に通常の条件でＴｉＮ層を蒸着することに
より形成されるものであり、したがって前記ＴｉＮ層形
成時における前記最表面下地層からの酸素の拡散が不可
欠となるが、前記最表面下地層を構成するＴｉ酸化物層
のＷ値が１．２５未満であると、前記ＴｉＮ層への酸素
の拡散反応が急激に低下し、最表面層における拡散酸素
の割合（Ｚ値）をＴｉに対する原子比で０．０１以上に
することができず、一方同Ｗ値が１．９０を越えると、
前記最表面層における拡散酸素の割合がＴｉに対する原
子比で０．４０を越えて多くなってしまうことから、Ｗ
値を１．２５〜１．９０と定めたものであり、この場合
最表面層形成後の最表面下地層における酸素の割合（Ｖ
値）はＴｉに対する原子比で１．２〜１．７の範囲内の
値をとるようになる、言い換えれば最表面層形成後の最
表面下地層のＶ値が１．２〜１．７を満足する場合に、
前記最表面層のＺ値は０．０１〜０．４０を満足するも
のとなるのである。Further, as described above, the Ti nitride oxide layer also constituting the outermost surface layer first serves as an outermost surface underlayer so that the oxygen ratio is 1.25 to 1.90 in atomic ratio to Ti.
(W value) is formed by forming a Ti oxide layer and then depositing a TiN layer on the outermost surface underlayer under ordinary conditions. Diffusion of oxygen from the surface underlayer is indispensable, but if the W value of the Ti oxide layer constituting the outermost surface underlayer is less than 1.25, the diffusion reaction of oxygen into the TiN layer rapidly increases. When the W value exceeds 1.90, the ratio (Z value) of the diffused oxygen in the outermost surface layer cannot be made 0.01 or more in atomic ratio with respect to Ti.
Since the atomic ratio of diffused oxygen in the outermost surface layer exceeds 0.40 in atomic ratio to Ti, W
The value is set to 1.25 to 1.90. In this case, the ratio of oxygen (V
Value) takes on a value in the range of 1.2 to 1.7 in atomic ratio with respect to Ti. In other words, the V value of the outermost underlayer after the outermost layer is formed is 1.2 to 1.7. If you are satisfied,
The Z value of the outermost surface layer satisfies 0.01 to 0.40.
【００１０】さらに、同じく最表面層および最表面下地
層の平均層厚を、それぞれ０．０５〜２μｍおよび０．
１〜３μｍとしたのは、その平均層厚が０．０５μｍ未
満および０．１μｍ未満では、前者にあっては所望の表
面色調（黄金色）を確保することができず、また後者に
あっては最表面層への酸素供給が不十分になり、一方前
者の色調付与作用は２μｍ、後者の酸素供給作用は３μ
ｍの平均層厚で十分満足に行うことができるという理由
にもとづくものである。また、硬質被覆層の平均層厚を
１〜１０μｍとしたのは、その層厚が１μｍでは所望の
すぐれた耐摩耗性を確保することができず、一方その層
厚が１０μｍを越えると、切刃に欠けやチッピングが発
生し易くなるという理由によるものである。Further, the average layer thickness of the outermost surface layer and the outermost surface underlayer is 0.05 to 2 μm and 0.1 μm, respectively.
If the average layer thickness is less than 0.05 μm or less than 0.1 μm, the desired surface color (golden color) cannot be secured in the former case, and Means that the oxygen supply to the outermost surface layer is insufficient, whereas the former provides a color tone of 2 μm and the latter provides an oxygen supply of 3 μm.
This is based on the reason that an average layer thickness of m can be performed sufficiently satisfactorily. Further, the reason why the average layer thickness of the hard coating layer is set to 1 to 10 μm is that if the layer thickness is 1 μm, the desired excellent wear resistance cannot be secured, while if the layer thickness exceeds 10 μm, the cut-off occurs. This is because chipping and chipping easily occur in the blade.
【００１１】さらに、また上記の最表面下地層のＴｉ酸
化物層は、これを（Ｔｉ，Ａｌ）Ｎ層および／または
（Ｔｉ，Ａｌ）ＣＮ層からなる硬質被覆層の表面に、こ
れのＷ値が１．２５〜１．９０の範囲内の低い側、例え
ば１．２５〜１．５０の範囲内にある条件や、その平均
層厚が０．１〜３μｍの範囲内の薄い側、例えば０．１
〜１μｍの範囲内にある条件で形成した場合には、前記
硬質被覆層との間に十分な層間密着性が得られない場合
がある（勿論、上記Ｔｉ酸化物層の形成条件によって
は、この場合でも十分な層間密着性が得られるものであ
る）ので、この場合には上記Ｔｉ酸化物層形成後に、下
記の雰囲気、即ち、雰囲気ガス組成を、ＴｉＣｌ4：
０．０５〜１０体積％、不活性ガス：残り、とし、か
つ、 雰囲気温度：８００〜１１００℃、 雰囲気圧力：４〜９０ｋＰａ（３０〜６７５Ｔｏｒ
ｒ）、 とした雰囲気中に所定時間、例えば５分〜５時間程度保
持して、上記Ｔｉ酸化物層と硬質被覆層との界面部に、
望ましくは０．０５〜２μｍの平均層厚で相互拡散層を
形成し、これによって層間密着性の向上を図るのがよ
く、さらにこのＴｉ酸化物層と硬質被覆層との層間密着
性向上処理は、上記Ｔｉ酸化物層のＷ値および平均層厚
が上記の低い側および薄い側の値以外の値である場合に
も、層間密着性のより一層の向上を図る目的で行っても
よい。Further, the Ti oxide layer of the outermost surface underlayer is formed on the surface of the hard coating layer composed of the (Ti, Al) N layer and / or the (Ti, Al) CN layer, The condition where the value is on the low side in the range of 1.25 to 1.90, for example, in the range of 1.25 to 1.50, or the thin side in which the average layer thickness is in the range of 0.1 to 3 μm, for example, 0.1
When the film is formed under conditions within the range of 1 to 1 μm, sufficient interlayer adhesion with the hard coating layer may not be obtained (of course, depending on the formation conditions of the Ti oxide layer, In such a case, sufficient interlayer adhesion can be obtained). In this case, after forming the Ti oxide layer, the following atmosphere, that is, the atmosphere gas composition is changed to TiCl 4 :
0.05 to 10% by volume, inert gas: remaining, ambient temperature: 800 to 1100 ° C., atmospheric pressure: 4 to 90 kPa (30 to 675 Torr)
r) for a predetermined period of time, for example, about 5 minutes to 5 hours, in the atmosphere described above, and at the interface between the Ti oxide layer and the hard coating layer,
Desirably, an interdiffusion layer is formed with an average layer thickness of 0.05 to 2 μm so as to improve interlayer adhesion. Further, the treatment for improving the interlayer adhesion between the Ti oxide layer and the hard coating layer is performed as follows. Even when the W value and the average layer thickness of the Ti oxide layer are values other than the values on the low side and the thin side, it may be performed for the purpose of further improving interlayer adhesion.
【００１２】なお、この発明の被覆超硬工具において、
硬質被覆層を構成する（Ｔｉ，Ａｌ）Ｎおよび（Ｔｉ，
Ａｌ）ＣＮにおけるＡｌはＴｉＣＮに対して硬さを高
め、もって耐摩耗性を向上させるために固溶するもので
あり、したがって組成式：（Ｔｉ1-XＡｌX）Ｎおよび同
（Ｔｉ1-XＡｌX）Ｃ1-YＮYのＸ値が０．１未満では所望
の耐摩耗性を確保することができず、一方その値が０．
７を越えると、切刃に欠けやチッピングが発生し易くな
ると云う理由によりＸ値を０．１〜０．７（原子比）と
定めたものであり、また、（Ｔｉ，Ａｌ）ＣＮ層におけ
るＣ成分には、硬さを向上させる作用があるので、（Ｔ
ｉ，Ａｌ）ＣＮ層は上記（Ｔｉ，Ａｌ）Ｎ層に比して相
対的に高い硬さをもつが、この場合Ｃ成分の割合が０．
０１未満、すなわちＹ値が０．９９を越えると所定の硬
さ向上効果が得られず、一方Ｃ成分の割合が０．５を越
える、すなわちＹ値が０．５未満になると靭性が急激に
低下するようになることから、Ｙ値を０．５〜０．９
９、望ましくは０．５５〜０．９と定めたのである。[0012] In the coated carbide tool of the present invention,
(Ti, Al) N and (Ti,
Al in Al) CN increases the hardness with respect to TiCN and thus forms a solid solution in order to improve the wear resistance. Therefore, the composition formulas: (Ti 1-x Al x ) N and (Ti 1- If the X value of X Al X ) C 1-Y NY is less than 0.1, the desired abrasion resistance cannot be ensured, while the value is not more than 0.1.
When the value exceeds 7, the X value is determined to be 0.1 to 0.7 (atomic ratio) because chipping or chipping is likely to occur in the cutting edge, and the (Ti, Al) CN layer Since the C component has an effect of improving hardness, (T
The (i, Al) CN layer has a relatively high hardness as compared with the above (Ti, Al) N layer.
When the value is less than 01, that is, when the Y value exceeds 0.99, the predetermined hardness improving effect cannot be obtained. On the other hand, when the ratio of the C component exceeds 0.5, that is, when the Y value is less than 0.5, the toughness sharply increases. Since the value decreases, the Y value is set to 0.5 to 0.9.
9, preferably 0.55 to 0.9.
【００１３】[0013]
【発明の実施の形態】つぎに、この発明の被覆超硬工具
を実施例により具体的に説明する。 （実施例１）原料粉末として、いずれも１〜３μｍの平
均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、Ｖ
Ｃ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3 Ｃ2 粉末、Ｔ
ｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これ
ら原料粉末を、表１に示される配合組成に配合し、ボー
ルミルで７２時間湿式混合し、乾燥した後、１００ＭＰ
ａ の圧力で圧粉体にプレス成形し、この圧粉体を６Ｐ
ａの真空中、温度：１４００℃に１時間保持の条件で焼
結し、焼結後、切刃部分にＲ：０．０５のホーニング加
工を施してＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ
形状をもったＷＣ基超硬合金製の超硬基体Ａ１〜Ａ１０
を形成した。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the coated carbide tool of the present invention will be specifically described with reference to examples. (Example 1) As raw material powders, WC powder, TiC powder, ZrC powder, V
C powder, TaC powder, NbC powder, Cr 3 C 2 powder, T
An iN powder, a TaN powder, and a Co powder were prepared, and these raw material powders were blended in the blending composition shown in Table 1, wet-mixed in a ball mill for 72 hours, dried, and then dried.
a into a green compact at a pressure of
a. Sintering is performed in a vacuum at a temperature of 1400 ° C. for 1 hour, and after sintering, the cutting edge is subjected to a honing process of R: 0.05 to obtain a WC having a chip shape of ISO standard CNMG120408. Substrates A1 to A10 made of base cemented carbide
Was formed.
【００１４】また、原料粉末として、いずれも０．５〜
２μｍの平均粒径を有するＴｉＣＮ（重量比でＴｉＣ／
ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉
末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、お
よびＮｉ粉末を用意し、これら原料粉末を、表２に示さ
れる配合組成に配合し、ボールミルで２４時間湿式混合
し、乾燥した後、１００ＭＰａの圧力で圧粉体にプレス
成形し、この圧粉体を２ｋＰａの窒素雰囲気中、温度：
１５００℃に１時間保持の条件で焼結し、焼結後、切刃
部分にＲ：０．０３のホーニング加工を施してＩＳＯ規
格・ＣＮＭＧ１２０４０８のチップ形状をもったＴｉＣ
Ｎ系サーメット製の超硬基体Ｂ１〜Ｂ６を形成した。Further, as raw material powders,
TiCN having an average particle size of 2 μm (by weight ratio TiC /
(TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder, and Ni powder were prepared, and these raw material powders were blended into the composition shown in Table 2. After wet-mixing with a ball mill for 24 hours and drying, the mixture is pressed into a green compact at a pressure of 100 MPa, and the green compact is heated in a nitrogen atmosphere of 2 kPa at a temperature of:
Sintered under the condition of holding at 1500 ° C. for 1 hour, and after sintering, the cutting edge portion is subjected to a honing process of R: 0.03 to form a TiC having a chip shape of ISO standard CNMG120408.
Carbide substrates B1 to B6 made of N-based cermet were formed.
【００１５】ついで、これら超硬基体Ａ１〜Ａ１０およ
びＢ１〜Ｂ６を、アセトン中で超音波洗浄し、乾燥した
状態で、それぞれ図１に例示される通常のアークイオン
プレーティング装置に装入し、一方カソード電極（蒸発
源）として種々の成分組成をもったＴｉ−Ａｌ合金を装
着し、装置内を排気して０．５Ｐａの真空に保持しなが
ら、ヒーターで装置内を５００℃に加熱した後、Ａｒガ
スを装置内に導入して１０ＰａのＡｒ雰囲気とし、この
状態で超硬基体に−８００ｖのバイアス電圧を印加して
超硬基体表面をＡｒガスボンバート洗浄し、ついで装置
内に反応ガスとして窒素ガス、または窒素ガスとメタン
ガスを導入して６Ｐａの反応雰囲気とすると共に、前記
超硬基体に印加するバイアス電圧を−２００ｖに下げ
て、前記カソード電極とアノード電極との間にアーク放
電を発生させ、もって前記超硬基体Ａ１〜Ａ１０および
Ｂ１〜Ｂ６のそれぞれの表面に、表３、４に示される目
標組成および目標層厚の硬質被覆層を蒸着形成し、さら
に引き続いて通常の化学蒸着装置にて、前記硬質被覆層
の表面に、反応ガス組成を、体積％で、ＴｉＣｌ４：
４．２％、Ｎ２：３５％、Ｈ２：残り、とし、 反応雰囲気温度：１０４０℃、 反応雰囲気圧力：３０ｋＰａ、 とした条件で最表面層としてのＴｉＮ層を同じく表３、
４に示される目標層厚で形成することにより、図２
（ａ）に概略斜視図で、同（ｂ）に概略縦断面図で示さ
れる形状を有する従来被覆超硬工具としての従来表面被
覆超硬合金製スローアウエイチップ（以下、従来被覆超
硬チップと云う）１〜２４をそれぞれ製造した。Then, these super-hard substrates A1 to A10 and B1 to B6 are ultrasonically cleaned in acetone, dried, and charged into a usual arc ion plating apparatus illustrated in FIG. 1, respectively. On the other hand, after mounting the Ti-Al alloys having various component compositions as a cathode electrode (evaporation source), and evacuating the inside of the apparatus to maintain a vacuum of 0.5 Pa, the inside of the apparatus was heated to 500 ° C. by a heater. Ar gas was introduced into the apparatus to form an Ar atmosphere of 10 Pa. In this state, a bias voltage of -800 V was applied to the super-hard substrate to clean the surface of the super-hard substrate with Ar gas bombardment. Nitrogen gas or nitrogen gas and methane gas were introduced to make a reaction atmosphere of 6 Pa, and the bias voltage applied to the superhard substrate was reduced to -200 V, and the cathode voltage was lowered. Arc discharge is generated between the substrate and the anode electrode, and a hard coating layer having a target composition and a target layer thickness shown in Tables 3 and 4 is deposited on the surfaces of the super-hard substrates A1 to A10 and B1 to B6. Then, using a conventional chemical vapor deposition apparatus, the surface of the hard coating layer is coated with a reaction gas composition in TiCl 4:
4.2%, N2: 35%, H2: remaining, reaction atmosphere temperature: 1040 ° C., reaction atmosphere pressure: 30 kPa.
By forming with the target layer thickness shown in FIG.
(A) is a schematic perspective view, and (b) is a conventional coated cemented carbide throwaway tip as a conventionally coated cemented carbide tool having a shape shown in a schematic longitudinal sectional view (hereinafter referred to as a conventionally coated cemented carbide tip). ) Were prepared respectively.
【００１６】また、表５に示される通り、上記の従来被
覆超硬チップ１〜２４において、最表面層としてのＴｉ
Ｎ層の形成を行わない状態で、（Ｔｉ，Ａｌ）Ｎ層およ
び／または（Ｔｉ，Ａｌ）ＣＮ層からなる硬質被覆層の
表面に、通常の化学蒸着装置にて、表６に示される条件
で同じく表６に示される目標組成および表５に示される
目標層厚のＴｉ酸化物層からなる最表面下地層を形成
し、引き続いて上記の従来被覆超硬チップ１〜２４にお
ける最表面層としてのＴｉＮ層の形成と同じ条件でＴｉ
Ｎ（Ｏ）層からなる最表面層を同じく表５に示される目
標層厚で形成することにより同じく図２に示される形状
をもった本発明被覆超硬工具としての本発明表面被覆超
硬合金製スローアウエイチップ（以下、本発明被覆超硬
チップと云う）１〜２４をそれぞれ製造した。Further, as shown in Table 5, in the conventional coated carbide tips 1 to 24, Ti
In the state where the N layer was not formed, the conditions shown in Table 6 were applied to the surface of the hard coating layer composed of the (Ti, Al) N layer and / or the (Ti, Al) CN layer using a normal chemical vapor deposition apparatus. To form an outermost surface underlayer comprising a Ti oxide layer having a target composition also shown in Table 6 and a target layer thickness shown in Table 5, and subsequently as the outermost surface layer in the conventional coated carbide tips 1 to 24 described above. Under the same conditions as the formation of the TiN layer
The surface-coated cemented carbide of the present invention as the coated cemented carbide tool of the present invention also having the shape shown in FIG. 2 by forming the outermost surface layer composed of the N (O) layer with the target layer thickness also shown in Table 5. Slow-away tips (hereinafter referred to as coated carbide tips) 1 to 24 were manufactured.
【００１７】また、上記の本発明被覆超硬チップ１〜２
４のうちの本発明被覆超硬チップ６および本発明被覆超
硬チップ１９については、Ｔｉ酸化物層からなる最表面
下地層の形成直後に、前者では、雰囲気ガス組成をＴｉ
Ｃｌ4：１体積％、Ａｒ：残りとし、雰囲気温度を１０
２０℃、雰囲気圧力を７ｋＰａ（５０Ｔｏｒｒ）とした
雰囲気中に１時間保持の条件で、また後者では、雰囲気
ガス組成をＴｉＣｌ4：０．２体積％、Ａｒ：残りと
し、雰囲気温度を１０００℃、雰囲気圧力を２０ｋＰａ
（１５０Ｔｏｒｒ）とした雰囲気中に２時間保持の条件
で、（Ｔｉ，Ａｌ）Ｎ層および／または（Ｔｉ，Ａｌ）
ＣＮ層からなる硬質被覆層とＴｉ酸化物層からなる最表
面下地層の界面部に相互拡散層を形成する層間密着性向
上処理を施した。この結果走査型電子顕微鏡およびオー
ジェ分光分析装置による断面測定で、上記硬質被覆層と
最表面下地層の界面部に、本発明被覆超硬チップ３では
平均層厚（５点平均）で０．６μｍ、本発明被覆超硬チ
ップ７では同じく平均層厚（５点平均）で０．８μｍの
相互拡散層の形成が観察された。Also, the above-mentioned coated carbide tips 1-2 of the present invention
4, the coated super hard tip 6 of the present invention and the coated super hard tip 19 of the present invention were prepared immediately after the formation of the outermost surface underlayer composed of the Ti oxide layer.
Cl 4 : 1% by volume, Ar: Remaining, ambient temperature is 10
At 20 ° C., an atmosphere pressure of 7 kPa (50 Torr) was maintained for 1 hour in an atmosphere. In the latter, the atmosphere gas composition was TiCl 4 : 0.2 vol%, Ar: the balance, and the atmosphere temperature was 1000 ° C. Atmospheric pressure is 20 kPa
(Ti, Al) N layer and / or (Ti, Al) under the condition of holding for 2 hours in an atmosphere of (150 Torr).
An interlayer adhesion improving treatment for forming an interdiffusion layer was performed on the interface between the hard coating layer composed of the CN layer and the outermost surface underlayer composed of the Ti oxide layer. As a result, according to a cross-sectional measurement using a scanning electron microscope and an Auger spectroscopic analyzer, the average layer thickness (average of five points) of the coated superhard chip 3 of the present invention was 0.6 μm at the interface between the hard coating layer and the outermost underlayer. On the other hand, in the coated super-hard tip 7 of the present invention, formation of an interdiffusion layer having an average layer thickness (average of 5 points) of 0.8 μm was observed.
【００１８】さらに、この結果得られた本発明被覆超硬
チップ１〜２４において、硬質被覆層の表面に形成され
た最表面層および最表面下地層について、その厚さ方向
中央部の酸素含有割合（Ｚ値およびＶ値）をオージェ分
光分析装置を用いて測定したところ、表７、８に示され
る値を示した。また、上記の本発明被覆超硬チップ１〜
２４および従来被覆超硬チップ１〜２４について、硬質
被覆層の組成については、オージェ分光分析装置を用
い、また硬質被覆層、最表面下地層、および最表面層の
層厚については、走査型電子顕微鏡を用いて断面測定し
たところ、それぞれ目標組成および目標層厚と実質的に
同じ値（層厚については５点平均の平均層厚と比較）を
示した。この目標組成および目標層厚と実測値の関係は
以下の実施例２、３でも同じ結果を示した。Further, in the coated superhard chips 1 to 24 of the present invention obtained as described above, the oxygen content ratio at the center in the thickness direction of the outermost surface layer and the outermost surface underlayer formed on the surface of the hard coating layer When (Z value and V value) were measured using an Auger spectrometer, the values shown in Tables 7 and 8 were shown. In addition, the above-mentioned coated carbide tips 1 of the present invention
24 and the conventional coated carbide tips 1 to 24, the composition of the hard coating layer was measured using an Auger spectrometer, and the thicknesses of the hard coating layer, the outermost underlayer, and the outermost layer were determined by scanning electron beam. When the cross section was measured using a microscope, the values were substantially the same as the target composition and the target layer thickness, respectively (the layer thickness was compared with the average layer thickness of the five-point average). The relationship between the target composition, the target layer thickness, and the measured value showed the same results in Examples 2 and 3 below.
【００１９】つぎに、上記本発明被覆超硬チップ１〜２
４および従来被覆超硬チップ１〜２４について、これを
工具鋼製バイトの先端部に固定治具にてネジ止めした状
態で、 被削材：ＪＩＳ・ＳＣＭ４４０の丸棒、 切削速度：２５０ｍ／ｍｉｎ．、 切り込み：２．０ｍｍ、 送り：０．３ｍｍ／ｒｅｖ．、 切削時間：１０分、 の条件での合金鋼の乾式高速連続旋削加工試験、並び
に、 被削材：ＪＩＳ・ＳＮＣＭ４３９の長さ方向等間隔４本
縦溝入り丸棒、 切削速度：２００ｍ／ｍｉｎ．、 切り込み：２．０ｍｍ、 送り：０．２５ｍｍ／ｒｅｖ．、 切削時間：５分、 の条件での合金鋼の乾式高速断続旋削加工試験を行い、
いずれの旋削加工試験でも切刃の逃げ面摩耗幅を測定し
た。この測定結果を表７、８に示した。Next, the coated carbide tips 1-2 of the present invention will be described.
4 and the conventional coated carbide tips 1 to 24 were screwed to the tip of a tool steel tool with a fixing jig. Work material: JIS SCM440 round bar, Cutting speed: 250 m / min . Infeed: 2.0 mm Feed: 0.3 mm / rev. , Cutting time: 10 minutes, Dry high-speed continuous turning test of alloy steel under the following conditions: Work material: JIS SNCM439 Longitudinal four equally-rounded round bars, Cutting speed: 200 m / min . Infeed: 2.0 mm Feed: 0.25 mm / rev. , Cutting time: 5 minutes, Dry high-speed intermittent turning test of alloy steel under the conditions of
In each turning test, the flank wear width of the cutting edge was measured. The measurement results are shown in Tables 7 and 8.
【００２０】[0020]
【表１】 [Table 1]
【００２１】[0021]
【表２】 [Table 2]
【００２２】[0022]
【表３】 [Table 3]
【００２３】[0023]
【表４】 [Table 4]
【００２４】[0024]
【表５】 [Table 5]
【００２５】[0025]
【表６】 [Table 6]
【００２６】[0026]
【表７】 [Table 7]
【００２７】[0027]
【表８】 [Table 8]
【００２８】（実施例２）原料粉末として、平均粒径：
５．５μｍを有する中粗粒ＷＣ粉末、同０．８μｍの微
粒ＷＣ粉末、同１．３μｍのＴａＣ粉末、同１．２μｍ
のＮｂＣ粉末、同１．２μｍのＺｒＣ粉末、同２．３μ
ｍのＣｒ3Ｃ2粉末、同１．５μｍのＶＣ粉末、同１．０
μｍの（Ｔｉ，Ｗ）Ｃ粉末、同１．８μｍのＣｏ粉末、
および同１．２μｍの炭素（Ｃ）粉末を用意し、これら
原料粉末をそれぞれ表９に示される配合組成に配合し、
さらにワックスを加えてアセトン中で２４時間ボールミ
ル混合し、減圧乾燥した後、１００ＭＰａの圧力で所定
形状の各種の圧粉体にプレス成形し、これらの圧粉体
を、６Ｐａの真空雰囲気中、７℃／分の昇温速度で１３
７０〜１４７０℃の範囲内の所定の温度に昇温し、この
温度に１時間保持後、炉冷の条件で焼結して、直径が８
ｍｍ、１３ｍｍ、および２６ｍｍの３種の超硬基体形成
用丸棒焼結体を形成し、さらに前記の３種の丸棒焼結体
から、研削加工にて、表９に示される組合せで、切刃部
の直径×長さがそれぞれ６ｍｍ×１３ｍｍ、１０ｍｍ×
２２ｍｍ、および２０ｍｍ×４５ｍｍの寸法をもった超
硬基体（エンドミル）ａ〜ｈをそれぞれ製造した。(Example 2) As raw material powder, average particle size:
Medium coarse WC powder having 5.5 μm, fine WC powder of 0.8 μm, TaC powder of 1.3 μm, 1.2 μm
NbC powder, 1.2 μm ZrC powder, 2.3 μm
m Cr 3 C 2 powder, 1.5 μm VC powder, 1.0 μm
μm (Ti, W) C powder, 1.8 μm Co powder,
And 1.2 μm carbon (C) powder were prepared, and these raw material powders were respectively blended into the blending composition shown in Table 9;
Further, the wax was added, and the mixture was ball-milled in acetone for 24 hours, dried under reduced pressure, and press-molded into various compacts having a predetermined shape at a pressure of 100 MPa. 13 ° C / min.
The temperature was raised to a predetermined temperature in the range of 70 to 1470 ° C., maintained at this temperature for 1 hour, and then sintered under furnace cooling conditions to obtain a diameter of 8 mm.
mm, 13 mm, and 26 mm to form three types of round bar sintered bodies for forming a cemented carbide substrate, and from the three types of round bar sintered bodies, by grinding, in a combination shown in Table 9, The diameter x length of the cutting edge is 6mm x 13mm, 10mm x
Carbide substrates (end mills) a to h having dimensions of 22 mm and 20 mm × 45 mm were produced, respectively.
【００２９】ついで、これらの超硬基体（エンドミル）
ａ〜ｈの表面に、ホーニングを施し、アセトン中で超音
波洗浄し、乾燥した状態で、同じく図１に例示される通
常のアークイオンプレーティング装置に装入し、上記実
施例１と同一の条件で、表１０に示される目標組成およ
び目標層厚をもった硬質被覆層を蒸着形成し、さらに引
き続いて通常の化学蒸着装置にて、上記実施例１におけ
ると同一の条件で、表１０に示される目標層厚をもった
最表面層としてのＴｉＮ層を蒸着形成することにより、
図３（ａ）に概略正面図で、同（ｂ）に概略横断面図で
示される形状を有する従来被覆超硬工具としての従来表
面被覆超硬合金製エンドミル（以下、従来被覆超硬エン
ドミルと云う）１〜８をそれぞれ製造した。Next, these carbide substrates (end mills)
Honing was performed on the surfaces of a to h, ultrasonic cleaning was performed in acetone, and the dried state was charged into a normal arc ion plating apparatus also illustrated in FIG. Under the conditions, a hard coating layer having a target composition and a target layer thickness shown in Table 10 was formed by vapor deposition, and subsequently, using a general chemical vapor deposition apparatus, the same conditions as in Example 1 were used. By vapor-depositing a TiN layer as the outermost layer having the target layer thickness shown,
FIG. 3 (a) is a schematic front view, and FIG. 3 (b) is a conventional surface-coated cemented carbide end mill (hereinafter, referred to as a conventional coated carbide end mill) as a conventional coated carbide tool having a shape shown in a schematic cross-sectional view. 1 to 8 were manufactured respectively.
【００３０】また、表１１に示される通り、上記の従来
被覆超硬エンドミル１〜８において、最表面層としての
ＴｉＮ層の形成を行わない状態で、（Ｔｉ，Ａｌ）Ｎ層
および／または（Ｔｉ，Ａｌ）ＣＮ層からなる硬質被覆
層の表面に、通常の化学蒸着装置にて、表６に示される
条件で同じく表６に示される目標組成および表１１に示
される目標層厚のＴｉ酸化物層からなる最表面下地層を
形成し、引き続いて上記実施例１の従来被覆超硬チップ
１〜２４における最表面層としてのＴｉＮ層の形成と同
じ条件でＴｉＮ（Ｏ）層からなる最表面層を同じく表１
１に示される目標層厚で形成することにより同じく図３
に示される形状をもった本発明被覆超硬工具としての本
発明表面被覆超硬合金製エンドミル（以下、本発明被覆
超硬エンドミルと云う）１〜８をそれぞれ製造した。Also, as shown in Table 11, in the conventional coated carbide end mills 1 to 8 described above, the (Ti, Al) N layer and / or the (Ti, Al) N layer was formed without forming the TiN layer as the outermost surface layer. On the surface of the hard coating layer composed of the (Ti, Al) CN layer, the Ti oxide having the target composition shown in Table 6 and the target layer thickness shown in Table 11 was also formed under the conditions shown in Table 6 by using a conventional chemical vapor deposition apparatus. The outermost surface layer made of a TiN (O) layer is formed under the same conditions as the formation of the TiN layer as the outermost layer in the conventional coated carbide tips 1 to 24 of Example 1 above. Table 1
3 by forming with the target layer thickness shown in FIG.
The surface-coated cemented carbide end mills (hereinafter, referred to as the present invention coated carbide end mills) 1 to 8 as the inventive coated cemented carbide tools having the shapes shown in FIG.
【００３１】つぎに、この結果得られた本発明被覆超硬
エンドミル１〜８において、硬質被覆層の表面に形成さ
れた最表面層および最表面下地層について、その厚さ方
向中央部の酸素含有割合（Ｚ値およびＶ値）をオージェ
分光分析装置を用いて測定したところ、表１１に示され
る値を示した。つぎに、上記本発明被覆超硬エンドミル
１〜８および従来被覆超硬エンドミル１〜８のうち、本
発明被覆超硬エンドミル１〜３および従来被覆超硬エン
ドミル１〜３については、 被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５
０ｍｍのＪＩＳ・ＳＣＭ４４０の板材、 切削速度：８０ｍ／ｍｉｎ．、 溝深さ（切り込み）：３ｍｍ、 テーブル送り：５００ｍｍ／分、 の条件での合金鋼の乾式高速溝切削加工試験、本発明被
覆超硬エンドミル４〜６および従来被覆超硬エンドミル
４〜６については、 被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５
０ｍｍのＪＩＳ・ＳＣＭ４４０の板材、 切削速度：９０ｍ／ｍｉｎ．、 溝深さ（切り込み）：６ｍｍ、 テーブル送り：５００ｍｍ／分、 の条件での合金鋼の乾式高速溝切削加工試験、本発明被
覆超硬エンドミル７，８および従来被覆超硬エンドミル
７，８については、 被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５
０ｍｍのＪＩＳ・ＳＣＭ４１５の板材、 切削速度：９０ｍ／ｍｉｎ．、 溝深さ（切り込み）：１５ｍｍ、 テーブル送り：５００ｍｍ／分、 の条件での合金鋼の乾式高速溝切削加工試験、をそれぞ
れ行い、いずれの溝切削加工試験でも切刃部先端面の直
径が使用寿命の目安とされる０．２ｍｍ減少するまでの
切削溝長を測定した。この測定結果を表１０、１１にそ
れぞれ示した。Next, in the coated superhard end mills 1 to 8 of the present invention obtained as described above, the outermost surface layer and the outermost underlayer formed on the surface of the hard coating layer have the oxygen content at the center in the thickness direction. When the ratios (Z value and V value) were measured using an Auger spectrometer, the values shown in Table 11 were shown. Next, of the coated carbide end mills 1 to 8 of the present invention and the coated carbide end mills 1 to 8 of the present invention, the coated carbide end mills 1 to 3 of the present invention and the conventionally coated carbide end mills 1 to 3 are: Plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM440 plate, Cutting speed: 80 m / min. , Groove depth (cut): 3 mm, Table feed: 500 mm / min, Dry high-speed grooving test of alloy steel, coated carbide end mills 4 to 6 of the present invention and conventional coated carbide end mills 4 to 6 , Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM440 plate, Cutting speed: 90 m / min. , Groove depth (cut): 6 mm, Table feed: 500 mm / min, Dry high-speed grooving test of alloy steel, coated carbide end mills 7 and 8 of the present invention and conventional coated carbide end mills 7 and 8 , Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM415 plate, Cutting speed: 90 m / min. , Groove depth (cut): 15 mm, table feed: 500 mm / min, dry high-speed grooving test of alloy steel under the following conditions. The length of the cutting groove up to a reduction of 0.2 mm, which is a measure of the service life, was measured. The measurement results are shown in Tables 10 and 11, respectively.
【００３２】[0032]
【表９】 [Table 9]
【００３３】[0033]
【表１０】 [Table 10]
【００３４】[0034]
【表１１】 [Table 11]
【００３５】（実施例３）上記の実施例２で製造した直
径が８ｍｍ（超硬基体ａ〜ｃ形成用）、１３ｍｍ（超硬
基体ｄ〜ｆ形成用）、および２６ｍｍ（超硬基体ｇ、ｈ
形成用）の３種の丸棒焼結体を用い、この３種の丸棒焼
結体から、研削加工にて、溝形成部の直径×長さがそれ
ぞれ４ｍｍ×１３ｍｍ（超硬基体ａ‘〜ｃ’）、８ｍｍ
×２２ｍｍ（超硬基体ｄ‘〜ｆ’）、および１６ｍｍ×
４５ｍｍ（超硬基体ｇ‘、ｈ’）の寸法をもった超硬基
体（ドリル）ａ‘〜ｈ’をそれぞれ製造した。(Example 3) The diameters of 8 mm (for forming the super-hard substrates a to c), 13 mm (for forming the super-hard substrates d to f), and 26 mm (for the super-hard substrate g) produced in Example 2 described above. h
(For forming), the diameter x length of the groove forming portion was 4 mm x 13 mm (the carbide substrate a ') by grinding from the three types of round rod sintered bodies. ~ C '), 8mm
× 22 mm (carbide substrate d ′ to f ′) and 16 mm ×
Carbide substrates (drills) a 'to h' each having a size of 45 mm (carbide substrates g 'and h') were manufactured.
【００３６】ついで、これらの超硬基体（ドリル）ａ
‘〜ｈ’の表面に、ホーニングを施し、アセトン中で超
音波洗浄し、乾燥した状態で、同じく図１に例示される
通常のアークイオンプレーティング装置に装入し、上記
実施例１におけると同一の条件で、表１２に示される目
標組成および目標層厚をもった硬質被覆層を蒸着形成
し、さらに引き続いて通常の化学蒸着装置にて、上記実
施例１におけると同一の条件で、同じく表１２に示され
る目標層厚をもった最表面層としてのＴｉＮ層を蒸着形
成することにより、図４（ａ）に概略正面図で、同
（ｂ）に概略横断面図で示される形状を有する従来被覆
超硬工具としての従来表面被覆超硬合金製ドリル（以
下、従来被覆超硬ドリルと云う）１〜８をそれぞれ製造
した。Next, these carbide substrates (drills) a
The surface of '~ h' was honed, ultrasonically cleaned in acetone, dried and charged in a usual arc ion plating apparatus also illustrated in FIG. Under the same conditions, a hard coating layer having a target composition and a target layer thickness shown in Table 12 was formed by vapor deposition, and subsequently, using a conventional chemical vapor deposition apparatus, under the same conditions as in Example 1 above. By evaporating and forming a TiN layer as the outermost layer having the target layer thickness shown in Table 12, the shape shown in the schematic front view in FIG. Drills made of conventional surface-coated cemented carbide (hereinafter referred to as conventional coated carbide drills) 1 to 8 as conventional coated cemented carbide tools were manufactured.
【００３７】また、表１３に示される通り、上記の従来
被覆超硬ドリル１〜８において、最表面層としてのＴｉ
Ｎ層の形成を行わない状態で、（Ｔｉ，Ａｌ）Ｎ層およ
び／または（Ｔｉ，Ａｌ）ＣＮ層からなる硬質被覆層の
表面に、通常の化学蒸着装置にて、表６に示される条件
で同じく表６に示される目標組成および表１３に示され
る目標層厚のＴｉ酸化物層からなる最表面下地層を形成
し、引き続いて上記実施例１の従来被覆超硬チップ１〜
２４における最表面層としてのＴｉＮ層の形成と同じ条
件でＴｉＮ（Ｏ）層からなる最表面層を同じく表１３に
示される目標層厚で形成することにより同じく図４に示
される形状をもった本発明被覆超硬工具としての本発明
表面被覆超硬合金製ドリル（以下、本発明被覆超硬ドリ
ルと云う）１〜８をそれぞれ製造した。Further, as shown in Table 13, in the conventional coated carbide drills 1 to 8 described above, Ti
In the state where the N layer was not formed, the conditions shown in Table 6 were applied to the surface of the hard coating layer composed of the (Ti, Al) N layer and / or the (Ti, Al) CN layer using a normal chemical vapor deposition apparatus. In the same manner, the outermost surface underlayer composed of the Ti oxide layer having the target composition shown in Table 6 and the target layer thickness shown in Table 13 was formed.
Under the same conditions as in the formation of the TiN layer as the outermost layer in 24, the outermost layer made of the TiN (O) layer was also formed with the target layer thickness shown in Table 13 to have the shape shown in FIG. Drills made of the surface-coated cemented carbide of the present invention (hereinafter referred to as the coated carbide drills of the present invention) 1 to 8 as the coated carbide tools of the present invention were manufactured.
【００３８】この結果得られた本発明被覆超硬ドリル１
〜８において、硬質被覆層の表面に形成された最表面層
および最表面下地層について、その厚さ方向中央部の酸
素含有割合（Ｚ値およびＶ値）をオージェ分光分析装置
を用いて測定したところ、表１３に示される値を示し
た。つぎに、上記本発明被覆超硬ドリル１〜８および従
来被覆超硬ドリル１〜８のうち、本発明被覆超硬ドリル
１〜３および従来被覆超硬ドリル１〜３については、 被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５
０ｍｍのＪＩＳ・ＳＣＭ４４０の板材、 切削速度：５０ｍ／ｍｉｎ．、 送り：０．２ｍｍ／分、 の条件での合金鋼の湿式高速穴あけ切削加工試験、本発
明被覆超硬ドリル４〜６および従来被覆超硬ドリル４〜
６については、 被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５
０ｍｍのＪＩＳ・ＳＣＭ４４０の板材、 切削速度：６０ｍ／ｍｉｎ．、 送り：０．２ｍｍ／分、 の条件での合金鋼の湿式高速穴あけ切削加工試験、本発
明被覆超硬ドリル７，８および従来被覆超硬ドリル７，
８については、 被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５
０ｍｍのＪＩＳ・ＳＣＭ４１５の板材、 切削速度：７５ｍ／ｍｉｎ．、 送り：０．３５ｍｍ／分、 の条件での合金鋼の湿式高速穴あけ切削加工試験、をそ
れぞれ行い、いずれの湿式（水溶性切削油使用）高速穴
あけ切削加工試験でも先端切刃面の逃げ面摩耗幅が０．
３ｍｍに至るまでの穴あけ加工数を測定した。この測定
結果を表１３にそれぞれ示した。The coated carbide drill 1 of the present invention obtained as a result
In Nos. To 8, the oxygen content ratio (Z value and V value) of the center portion in the thickness direction of the outermost surface layer and the outermost surface underlayer formed on the surface of the hard coating layer was measured using an Auger spectroscopic analyzer. However, the values shown in Table 13 were shown. Next, among the above coated carbide drills 1 to 8 of the present invention and conventional coated carbide drills 1 to 8, the coated carbide drills 1 to 3 of the present invention and the conventionally coated carbide drills 1 to 3 are as follows. Plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM440 plate, Cutting speed: 50 m / min. , Feed: 0.2 mm / min, Wet high-speed drilling test of alloy steel under the following conditions: coated carbide drills 4 to 6 of the present invention and conventional coated carbide drills 4 to
About 6, work material: plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM440 plate, Cutting speed: 60 m / min. , Feed: 0.2 mm / min, wet high-speed drilling test of alloy steel under the following conditions: coated carbide drills 7 and 8 of the present invention and coated carbide drills 7 of the prior art.
For No. 8, Work material: Plane dimensions: 100 mm × 250 mm, thickness: 5
0 mm JIS SCM415 plate, Cutting speed: 75 m / min. , Feed: 0.35 mm / min, Wet cutting high-speed drilling test of alloy steel under the following conditions, and the flank of the cutting edge at the tip of any wet type (using water-soluble cutting oil) high-speed drilling cutting test. Wear width is 0.
The number of drilling processes up to 3 mm was measured. Table 13 shows the measurement results.
【００３９】[0039]
【表１２】 [Table 12]
【００４０】[0040]
【表１３】 [Table 13]
【００４１】[0041]
【発明の効果】表３〜１３に示される結果から、硬質被
覆層の最表面層がＴｉＮ層の形成時に最表面下地層から
拡散してきた酸素と反応して形成されたＴｉ窒酸化物層
で構成された本発明被覆超硬工具は、いずれも高い発熱
を伴う鋼の高速切削加工でも、前記Ｔｉ窒酸化物層が高
温加熱の切粉との親和性がきわめて低く、切粉が前記Ｔ
ｉ窒酸化物層に付着することがないことから、切刃にチ
ッピングの発生なく、すぐれた耐摩耗性を発揮するのに
対して、硬質被覆層の最表面層がＴｉＮ層で構成された
従来被覆超硬工具においては、いずれも切粉が前記Ｔｉ
Ｎ層に付着し易く、前記ＴｉＮ層が他の構成層とともに
前記切粉によって剥がし取られることから、切刃にチッ
ピングの発生し易く、これが原因で比較的短時間で使用
寿命に至ることが明らかである。上述のように、この発
明の被覆超硬工具は、使用前後の識別工具の特に各種鋼
や鋳鉄などの高速切削加工での実用を可能とするもので
あり、かつ実用に際しては切刃にチッピングの発生な
く、すぐれた耐摩耗性を長期に亘って発揮するものであ
る。From the results shown in Tables 3 to 13, it can be seen that the outermost surface layer of the hard coating layer is formed of a Ti oxynitride layer formed by reacting with oxygen diffused from the outermost underlayer at the time of forming the TiN layer. The coated carbide tool according to the present invention is characterized in that the Ti nitride oxide layer has an extremely low affinity for high-temperature heated chips even in high-speed cutting of steel with high heat generation.
Since it does not adhere to the i-nitride oxide layer, it exhibits excellent wear resistance without chipping on the cutting edge, whereas the outermost layer of the hard coating layer is made of a TiN layer. In the case of coated carbide tools, the chips
Since the TiN layer easily adheres to the N layer and the TiN layer is peeled off together with the other constituent layers by the cutting powder, chipping easily occurs in the cutting blade, and it is apparent that this causes a service life in a relatively short time. It is. As described above, the coated cemented carbide tool of the present invention enables the practical use of the identification tool before and after use, particularly in high-speed cutting of various steels and cast irons. No wear is exhibited, and excellent wear resistance is exhibited over a long period of time.
【図１】アークイオンプレーティング装置の概略説明図
である。FIG. 1 is a schematic explanatory view of an arc ion plating apparatus.
【図２】（ａ）は被覆超硬チップの概略斜視図、（ｂ）
は被覆超硬チップの概略縦断面図である。FIG. 2A is a schematic perspective view of a coated carbide tip, and FIG.
1 is a schematic longitudinal sectional view of a coated carbide tip.
【図３】（ａ）は被覆超硬エンドミル概略正面図、
（ｂ）は同切刃部の概略横断面図である。FIG. 3A is a schematic front view of a coated carbide end mill,
(B) is a schematic cross-sectional view of the cutting blade portion.
【図４】（ａ）は被覆超硬ドリルの概略正面図、（ｂ）
は同溝形成部の概略横断面図である。FIG. 4A is a schematic front view of a coated carbide drill, and FIG.
FIG. 3 is a schematic cross-sectional view of the groove forming portion.
フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｃ２３Ｃ 16/30 Ｃ２３Ｃ 16/30 16/40 16/40 (72)発明者 大鹿 高歳 埼玉県大宮市北袋町１−297 三菱マテリ アル株式会社総合研究所内 Ｆターム(参考） 3C037 CC02 CC04 CC09 CC11 3C046 FF03 FF05 FF10 FF13 FF16 FF19 FF22 FF25 4K029 AA04 BA54 BA58 BA60 BD05 CA03 DD06 EA01 4K030 AA03 AA17 AA18 BA18 BA35 BA38 BA46 BB12 CA03 FA10 HA04 JA01 JA06 LA22 Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (Reference) C23C 16/30 C23C 16/30 16/40 16/40 (72) Inventor Takashi Oga 1-Kitabukurocho, Omiya City, Saitama Prefecture 297 Mitsubishi Materials Co., Ltd. Research Laboratory F-term (reference) JA06 LA22
Claims (1)
炭窒化チタン系サーメット基体の表面に、組成式：（Ｔ
ｉ1-XＡｌX）Ｎおよび同（Ｔｉ1-XＡｌX）Ｃ 1-YＮY（た
だし、原子比で、Ｘは０．１〜０．７、Ｙは０．５〜
０．９９を示す）を有するＴｉとＡｌの複合窒化物およ
びＴｉとＡｌの複合炭窒化物のうちのいずれかで構成さ
れた単層または両方で構成された複層からなる硬質被覆
層を１〜１０μｍの平均層厚で物理蒸着してなる表面被
覆超硬合金製切削工具において、上記硬質被覆層の表面
に、最表面下地層として、０．１〜３μｍの平均層厚を
有し、かつ、 組成式：ＴｉＯV 、 で表わした場合、厚さ方向中央部をオージェ分光分析装
置で測定して、 Ｖ：Ｔｉに対する原子比で１．２〜１．７、 を満足するＴｉ酸化物層、 最表面層として、０．０５〜２μｍの平均層厚を有し、
かつ、 組成式：ＴｉＮ1-Z（Ｏ）Z、 で表わした場合（ただし、（Ｏ）は上記最表面下地層か
らの拡散酸素を示す）、同じく厚さ方向中央部をオージ
ェ分光分析装置で測定して、 Ｚ：Ｔｉに対する原子比で０．０１〜０．４、 を満足するＴｉ窒酸化物層、を化学蒸着および／または
物理蒸着してなる、耐チッピング性のすぐれた表面被覆
超硬合金製切削工具。1. A tungsten carbide based cemented carbide substrate or
On the surface of the titanium carbonitride-based cermet substrate, the composition formula: (T
i1-XAlX) N and (Ti)1-XAlX) C 1-YNY(T
However, X is 0.1 to 0.7 and Y is 0.5 to
0.99) and a composite nitride of Ti and Al having
And one of the composite carbonitrides of Ti and Al
Hard coating consisting of a single layer or multiple layers composed of both
The surface coating formed by physical vapor deposition of the layer with an average layer thickness of 1 to 10 μm
In the case of coated hard metal cutting tools, the surface of the hard coating layer
In addition, an average layer thickness of 0.1 to 3 μm is used as the outermost underlayer.
Having the composition formula: TiOV When represented by,, the center in the thickness direction is
A Ti oxide layer that satisfies the following: V: Ti in an atomic ratio of 1.2 to 1.7, and has an average layer thickness of 0.05 to 2 μm as a top surface layer,
And a composition formula: TiN1-Z(O)Z(Where (O) is the outermost underlayer)
The diffused oxygen is shown).
A Ti oxynitride layer that satisfies the following formula: an atomic ratio to Z: Ti of 0.01 to 0.4, as measured by a spectroscopic analyzer, by chemical vapor deposition and / or
Excellent chipping resistant surface coating by physical vapor deposition
Cemented carbide cutting tool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000313689A JP2002120104A (en) | 2000-10-13 | 2000-10-13 | Cutting tool made of surface coated cemented carbide alloy having chipping resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000313689A JP2002120104A (en) | 2000-10-13 | 2000-10-13 | Cutting tool made of surface coated cemented carbide alloy having chipping resistance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002120104A true JP2002120104A (en) | 2002-04-23 |
Family
ID=18793066
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000313689A Withdrawn JP2002120104A (en) | 2000-10-13 | 2000-10-13 | Cutting tool made of surface coated cemented carbide alloy having chipping resistance |
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| Country | Link |
|---|---|
| JP (1) | JP2002120104A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017070993A1 (en) * | 2015-10-29 | 2017-05-04 | 西迪技术股份有限公司 | Alloy drill and manufacturing method thereof |
-
2000
- 2000-10-13 JP JP2000313689A patent/JP2002120104A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017070993A1 (en) * | 2015-10-29 | 2017-05-04 | 西迪技术股份有限公司 | Alloy drill and manufacturing method thereof |
| US10697048B2 (en) | 2015-10-29 | 2020-06-30 | Seed Technologies Corp., Ltd. | Alloy drill and manufacturing method thereof |
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