JP2002107401A - Inspecting method for wiring pattern - Google Patents

Inspecting method for wiring pattern

Info

Publication number
JP2002107401A
JP2002107401A JP2000303636A JP2000303636A JP2002107401A JP 2002107401 A JP2002107401 A JP 2002107401A JP 2000303636 A JP2000303636 A JP 2000303636A JP 2000303636 A JP2000303636 A JP 2000303636A JP 2002107401 A JP2002107401 A JP 2002107401A
Authority
JP
Japan
Prior art keywords
wiring pattern
inspection
terminal
piezoelectric element
probe needle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000303636A
Other languages
Japanese (ja)
Other versions
JP3524049B2 (en
Inventor
Shoji Takano
祥司 高野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mektron KK
Original Assignee
Nippon Mektron KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mektron KK filed Critical Nippon Mektron KK
Priority to JP2000303636A priority Critical patent/JP3524049B2/en
Publication of JP2002107401A publication Critical patent/JP2002107401A/en
Application granted granted Critical
Publication of JP3524049B2 publication Critical patent/JP3524049B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an inspecting method for wiring pattern capable of simply and reliably inspecting the presence or absence of the disconnection of wire and a short circuit of wiring pattern on a circuit board. SOLUTION: The presence or absence of a disconnection of wire of each wiring pattern 1 is inspected by applying a voltage to one terminal 3 of the wiring pattern 1 via a probe needle 5, with a piezoelectric element 4 kept in contact with the other terminal 2 of the wiring pattern 1 in common. A short circuit between the wiring patterns is inspected by using the probe needle 5.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、回路基板に於ける
配線パタ−ンの検査方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting a wiring pattern on a circuit board.

【0002】[0002]

【従来の技術及びその問題点】従来、回路基板に形成さ
れた複数の配線パタ−ンの断線・短絡検査を行う方法と
しては、複数の配線パタ−ンの一方の各端子に共通に検
査用電極を接触させ、また、各配線パタ−ンの他方の個
々の端子にプローブ針等を接触させて直流抵抗を検出す
ることにより断線検査を行う一方、隣り合う配線パタ−
ン間の短絡検査は、検査用電極を取り除いてプローブ針
を介して行う手法がある。
2. Description of the Related Art Conventionally, as a method of inspecting a plurality of wiring patterns formed on a circuit board for disconnection / short-circuit, one of the plurality of wiring patterns is commonly used for inspection. While the electrodes are brought into contact with each other and the other individual terminal of each wiring pattern is brought into contact with a probe needle or the like to detect DC resistance, disconnection inspection is performed, while adjacent wiring patterns are performed.
There is a method of performing a short-circuit test between electrodes through a probe needle after removing an inspection electrode.

【0003】この方法によれば、配線パタ−ンの微小な
断線に対しても確実に検出することができるので、信頼
性の高い検査を行うことが可能であるが、断線検査時は
検査用電極を配線パタ−ンの端子に接触させ、また、短
絡検査時にはその検査用電極を取り除く必要があるの
で、検査装置が複雑化し、検査時間等も効率的ではない
という問題がある。
According to this method, even a minute disconnection of a wiring pattern can be reliably detected, so that a highly reliable inspection can be performed. Since it is necessary to bring the electrodes into contact with the terminals of the wiring pattern and to remove the test electrodes during the short-circuit test, the test apparatus becomes complicated and the test time is not efficient.

【0004】このような問題を解消する為、検査用電極
を配線パタ−ンの一方の端子に上記の如く接触させるこ
となく端子から所要の間隔をあけて配置し、他方の個々
の端子にはプローブ針等を接触させて配線パタ−ンと検
査用電極との間の静電容量から断線の検査を行い、ま
た、隣り合う配線パタ−ン間の短絡検査は、検査用電極
をそのまま配置した状態でプローブ針を介して行う方法
もある。
In order to solve such a problem, the inspection electrode is arranged at a required distance from the terminal without contacting one terminal of the wiring pattern as described above, and the other individual terminal is connected to the other terminal. A probe needle or the like is contacted to perform a disconnection inspection based on the capacitance between the wiring pattern and the inspection electrode, and a short-circuit inspection between adjacent wiring patterns is performed by leaving the inspection electrode as it is. There is also a method in which the measurement is performed via a probe needle in the state.

【0005】この方法では、検査用電極を配線パタ−ン
の端子から間隔をあけて配置してあるので、断線・短絡
の検査時に検査用電極の移動が不要となり、装置の単純
化や検査時間等の効率化を図れるが、端子と検査用電極
間の間隔に対し微小な断線がある場合には、静電容量の
変化は微小であって検出が困難な場合がある。
In this method, since the inspection electrodes are arranged at a distance from the terminals of the wiring pattern, there is no need to move the inspection electrodes when inspecting for a disconnection or short circuit, thereby simplifying the apparatus and reducing the inspection time. However, if there is a minute disconnection with respect to the interval between the terminal and the inspection electrode, the change in capacitance may be so small that detection may be difficult.

【0006】そこで、本発明は回路基板に於ける配線パ
タ−ンの断線及び短絡の有無を簡便且つ確実に検査可能
な配線パタ−ンの検査方法を提供するものである。
SUMMARY OF THE INVENTION Accordingly, the present invention provides a method for inspecting a wiring pattern which can easily and surely inspect the presence or absence of disconnection and short circuit of a wiring pattern on a circuit board.

【0007】[0007]

【課題を解決するための手段】その為に本発明による配
線パタ−ンの検査方法では、回路基板に於ける複数の配
線パタ−ンの一方の各端子に共通にピエゾ素子等の圧電
素子を接触させた状態で前記配線パタ−ンの他方の個々
の端子にプローブ針を介して電圧を印加することにより
前記各配線パタ−ンの断線の有無を検査すると共に、隣
り合う前記配線パタ−ン間の短絡検査は前記プローブ針
を用いて行うものである。
Therefore, in the wiring pattern inspection method according to the present invention, a piezoelectric element such as a piezo element is commonly used for one terminal of a plurality of wiring patterns on a circuit board. A voltage is applied to the other individual terminal of the wiring pattern through a probe needle in a state where the wiring pattern is in contact with the wiring pattern, thereby inspecting each of the wiring patterns for disconnection and adjoining the wiring pattern. The inspection of the short circuit is performed using the probe needle.

【0008】[0008]

【発明の実施の形態】以下、図示の実施例を参照しなが
ら本発明を更に詳述する。図1は本発明による配線パタ
−ンの検査方法を説明する図である。図に於いて、1は
回路基板に於ける複数の所要の配線パタ−ンを示し、2
はそれらの配線パタ−ンの一方の端子であってその他方
の端子は符号3で示している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in further detail with reference to the illustrated embodiments. FIG. 1 is a diagram for explaining a wiring pattern inspection method according to the present invention. In the drawing, reference numeral 1 denotes a plurality of required wiring patterns on a circuit board;
Is one terminal of those wiring patterns, and the other terminal is indicated by reference numeral 3.

【0009】そして、4は一方の各端子2に共通に接触
させたピエゾ素子などのセラミック等の絶縁体を用いた
圧電素子であり、また、5はその他方の各端子3に接触
させたプローブ針である。
Reference numeral 4 denotes a piezoelectric element using an insulator such as a ceramic such as a piezo element which is in common contact with one of the terminals 2, and reference numeral 5 denotes a probe which is in contact with each of the other terminals 3. Needle.

【0010】このような装置を用いて配線パタ−ン1の
断線検査を行うには、圧電素子4を一方の各端子2に共
通に接触させた状態で他方の個々の各端子3にプローブ
針5を介して電圧を印加して圧電素子4の変化を検出す
ることにより行うことが可能であり、また、隣り合う配
線パタ−ン1間の短絡検査はプローブ針5を用いて行う
ことができる。
In order to inspect the disconnection of the wiring pattern 1 using such an apparatus, a probe needle is connected to each of the other terminals 3 while the piezoelectric element 4 is in common contact with one of the terminals 2. 5 can be performed by detecting a change in the piezoelectric element 4 by applying a voltage via the wire 5, and a short-circuit test between adjacent wiring patterns 1 can be performed using the probe needle 5. .

【0011】[0011]

【発明の効果】本発明による配線パタ−ンの検査方法に
よれば、圧電素子は直接電圧を印加することにより変化
する為、配線パタ−ンの微小な断線の検出も可能であっ
て、高精度な検査を行える。
According to the wiring pattern inspection method of the present invention, since the piezoelectric element changes by directly applying a voltage, it is possible to detect a minute disconnection of the wiring pattern. Accurate inspection can be performed.

【0012】また、圧電素子としてセラミック等の絶縁
体を用いるので、配線パタ−ン間の短絡検査時でもこの
圧電素子を取り除く必要がない為、検査装置の構造を単
純化できる一方、検査時間の短縮など効率的な検査がで
きる。
Further, since an insulator such as ceramic is used as the piezoelectric element, it is not necessary to remove the piezoelectric element even when inspecting a short circuit between wiring patterns, so that the structure of the inspection apparatus can be simplified, while the inspection time is reduced. Efficient inspection such as shortening is possible.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による配線パタ−ンの検査方法を説明す
る図である。
FIG. 1 is a diagram illustrating a wiring pattern inspection method according to the present invention.

【符号の説明】[Explanation of symbols]

1 配線パタ−ン 2 端子 3 端子 4 圧電素子 5 プローブ針 DESCRIPTION OF SYMBOLS 1 Wiring pattern 2 terminal 3 terminal 4 Piezoelectric element 5 Probe needle

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】回路基板に於ける複数の配線パタ−ンの一
方の各端子に共通に圧電素子を接触させた状態で前記配
線パタ−ンの他方の個々の端子にプローブ針を介して電
圧を印加することにより前記各配線パタ−ンの断線の有
無を検査すると共に、隣り合う前記配線パタ−ン間の短
絡検査は前記プローブ針を用いて行うことを特徴とする
配線パタ−ンの検査方法。
A voltage is applied to the other individual terminal of the wiring pattern via a probe needle in a state where a piezoelectric element is commonly contacted with one terminal of a plurality of wiring patterns on a circuit board. Inspection of the wiring patterns is performed by applying a test pattern, and the inspection of the short circuit between the adjacent wiring patterns is performed by using the probe needle. Method.
【請求項2】前記圧電素子にピエゾ素子を用いる請求項
1の配線パタ−ンの検査方法。
2. The method for inspecting a wiring pattern according to claim 1, wherein a piezoelectric element is used as said piezoelectric element.
JP2000303636A 2000-10-03 2000-10-03 Wiring pattern inspection method Expired - Fee Related JP3524049B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000303636A JP3524049B2 (en) 2000-10-03 2000-10-03 Wiring pattern inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000303636A JP3524049B2 (en) 2000-10-03 2000-10-03 Wiring pattern inspection method

Publications (2)

Publication Number Publication Date
JP2002107401A true JP2002107401A (en) 2002-04-10
JP3524049B2 JP3524049B2 (en) 2004-04-26

Family

ID=18784814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000303636A Expired - Fee Related JP3524049B2 (en) 2000-10-03 2000-10-03 Wiring pattern inspection method

Country Status (1)

Country Link
JP (1) JP3524049B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010038742A (en) * 2008-08-06 2010-02-18 Fujikura Ltd Device for inspecting circuit disconnection
JP2020024162A (en) * 2018-08-08 2020-02-13 日東電工株式会社 Inspection method of wiring circuit board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010038742A (en) * 2008-08-06 2010-02-18 Fujikura Ltd Device for inspecting circuit disconnection
JP2020024162A (en) * 2018-08-08 2020-02-13 日東電工株式会社 Inspection method of wiring circuit board

Also Published As

Publication number Publication date
JP3524049B2 (en) 2004-04-26

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