JP2002090389A5 - - Google Patents
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- Publication number
- JP2002090389A5 JP2002090389A5 JP2000279266A JP2000279266A JP2002090389A5 JP 2002090389 A5 JP2002090389 A5 JP 2002090389A5 JP 2000279266 A JP2000279266 A JP 2000279266A JP 2000279266 A JP2000279266 A JP 2000279266A JP 2002090389 A5 JP2002090389 A5 JP 2002090389A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000279266A JP4047529B2 (ja) | 2000-09-14 | 2000-09-14 | メンブレン型プローブ装置及びそれに用いる高純度タングステンマイクロボールの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000279266A JP4047529B2 (ja) | 2000-09-14 | 2000-09-14 | メンブレン型プローブ装置及びそれに用いる高純度タングステンマイクロボールの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002090389A JP2002090389A (ja) | 2002-03-27 |
| JP2002090389A5 true JP2002090389A5 (xx) | 2005-09-22 |
| JP4047529B2 JP4047529B2 (ja) | 2008-02-13 |
Family
ID=18764292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000279266A Expired - Fee Related JP4047529B2 (ja) | 2000-09-14 | 2000-09-14 | メンブレン型プローブ装置及びそれに用いる高純度タングステンマイクロボールの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4047529B2 (xx) |
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2000
- 2000-09-14 JP JP2000279266A patent/JP4047529B2/ja not_active Expired - Fee Related