JP2002062267A - Device for inspecting defect - Google Patents
Device for inspecting defectInfo
- Publication number
- JP2002062267A JP2002062267A JP2000249772A JP2000249772A JP2002062267A JP 2002062267 A JP2002062267 A JP 2002062267A JP 2000249772 A JP2000249772 A JP 2000249772A JP 2000249772 A JP2000249772 A JP 2000249772A JP 2002062267 A JP2002062267 A JP 2002062267A
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- JP
- Japan
- Prior art keywords
- prism
- defect
- glass plate
- face
- inspection apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液晶パネルに適用
されるガラス板のチッピング、ハマ欠け等の傷及び未面
取り等の欠点を検出する欠点検査装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a defect inspection apparatus for detecting defects such as chipping and chipping of a glass plate applied to a liquid crystal panel and defects such as unchamfered surfaces.
【０００２】[0002]
【従来の技術】液晶パネルに適用されるガラス板は、所
定の厚み（例えばｔ≒０．７ｍｍ）に製造された板ガラ
スを、製品に対応した大きさに切断し、これを面取り加
工することにより製品化される。製品化されたガラス板
は、出荷前において、その端面に発生しているチッピン
グやハマ欠け等の傷及び未面取り等の欠点の有無が目視
により、または画像処理装置によって検査される。2. Description of the Related Art A glass plate applied to a liquid crystal panel is obtained by cutting a glass plate manufactured to a predetermined thickness (for example, t ≒ 0.7 mm) into a size corresponding to a product and chamfering the cut glass. Be commercialized. Prior to shipment, the commercialized glass plate is inspected visually or by an image processing apparatus for the presence or absence of a defect such as chipping or chipping generated on the end face thereof or unchamfered.
【０００３】ここで、前記欠点について図４を参照して
説明すると、チッピング１は、ガラス板２のエッジ部２
Ａに発生する極小の欠けであり、また、ハマ欠け３は、
平坦部２Ｂから端面部２Ｃにかけて発生する比較的大き
い欠けである。更に、端面部２Ｃには、面取り砥石の磨
耗等が原因で未面取り部４が生じる場合があり、これも
また欠点として判断されている。これらの欠点は、その
大きさで所定の閾値が設定され、閾値を超えた場合に、
そのガラス板が不良品として処理される。Here, the above-mentioned disadvantage will be described with reference to FIG.
The smallest chip that occurs in A, and the third chip is
This is a relatively large chip generated from the flat part 2B to the end face part 2C. Furthermore, the end face 2C may have an unchamfered portion 4 due to wear of the chamfering grindstone, etc., which is also judged as a defect. These drawbacks are that a predetermined threshold is set by the size, and when the threshold is exceeded,
The glass sheet is treated as a defective product.
【０００４】従来の欠点検査装置は、ガラス板２の端面
部２Ｃを撮像する１台のカメラと、ガラス板２の平坦部
２Ｂ（上面、下面）を撮像する２台のカメラとから構成
され、これら３台のカメラで撮像された画像情報を基
に、いわゆる暗視野での輝点検出法により欠点を検出す
るとともに、その欠点で得られた散乱光の総光量と閾値
の光量とを比較し、これを超えた場合に不良品として判
別していた。The conventional defect inspection apparatus is composed of one camera for imaging the end face 2C of the glass plate 2, and two cameras for imaging the flat portion 2B (upper surface, lower surface) of the glass plate 2. Based on the image information captured by these three cameras, a defect is detected by a so-called dark-field bright spot detection method, and the total amount of scattered light obtained by the defect is compared with the threshold light amount. If it exceeds this, it was determined to be defective.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、前記従
来の欠点検査装置は、３台のカメラを使用しているた
め、装置構造が複雑で大型化するとともに設備コストが
高いという欠点があった。また、欠点検査装置は、ガラ
ス板の同一箇所を３台のカメラで撮像する必要があるの
で、３台のカメラの位置調整に手間がかかるという欠点
もあった。However, since the conventional defect inspection apparatus uses three cameras, there are disadvantages in that the apparatus structure is complicated and large, and the equipment cost is high. Further, the defect inspection apparatus needs to take an image of the same portion of the glass plate with three cameras, so that there is also a disadvantage that the position adjustment of the three cameras is troublesome.
【０００６】本発明はこのような事情に鑑みて成された
もので、小型で簡単な構造の欠点検査装置を提供するこ
とを目的とする。The present invention has been made in view of such circumstances, and has as its object to provide a defect inspection apparatus having a small size and a simple structure.
【０００７】[0007]
【課題を解決するための手段】本発明は、前記目的を達
成するために、板状の被検査体に存在する傷、未面取り
等の欠点を検出する欠点検査装置において、被検査体の
一方面に対向配置された第１プリズムと、被検査体の他
方面に対向配置された第２プリズムと、被検査体の端面
に対向配置され該端面を撮像するとともに、前記第１プ
リズムを介して被検査体の一方面と第２プリズムを介し
て被検査体の他方面とを撮像する撮像手段と、該撮像手
段で撮像された画像に基づいて被検査体の一方面、他方
面、及び端面に存在する欠点を検出する検出手段と、を
備えたことを特徴としている。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a defect inspection apparatus for detecting a defect such as a flaw or a chamfer present on a plate-like inspection object. A first prism disposed opposite to the surface, a second prism disposed opposite to the other surface of the object to be inspected, and an image of the end surface disposed opposite to the end surface of the object to be inspected, and via the first prism Imaging means for imaging one surface of the test object and the other surface of the test object via the second prism; one surface, the other surface, and an end surface of the test object based on an image taken by the image pickup device And a detecting means for detecting a defect existing in the apparatus.
【０００８】本発明によれば、１台の撮像手段によって
被検査体の端面を直接撮像し、そして、被検査体の一方
面を第１プリズムを介して撮像するとともに被検査体の
他方面を第２プリズムを介して撮像する。そして、撮像
手段で撮像された画像に基づいて被検査体の端面、一方
面、及び他方面に存在する欠点を検出手段によって検出
する。このように第１、第２プリズムを適用すれば、撮
像手段が１台で済むので装置構造が簡素化して小型化で
き、また、プリズムの位置調整は一度調整すれば、大き
な板厚変更のない限り再度の調整は不用となる。According to the present invention, the end face of the object to be inspected is directly imaged by one imaging means, and one surface of the object to be inspected is imaged through the first prism, and the other surface of the object to be inspected is imaged. An image is taken via the second prism. Then, based on the image captured by the imaging unit, the detection unit detects a defect existing on the end surface, one surface, and the other surface of the inspection object. If the first and second prisms are applied as described above, only one imaging unit is required, so that the device structure can be simplified and the size can be reduced. Further, once the position of the prism is adjusted, there is no significant change in the plate thickness. Re-adjustment is unnecessary as far as possible.
【０００９】欠点検査装置による検査時において、欠点
は照明手段からの照明で乱反射し、その乱反射光を撮像
手段が撮像する。そして、検出手段は、乱反射した反射
光の光量に基づいて被検査体の欠点の有無を検出すると
ともに欠点の大きさを推定して良不良を判別する。At the time of inspection by the defect inspection device, the defect is irregularly reflected by illumination from the illumination means, and the irregularly reflected light is imaged by the imaging means. Then, the detecting means detects the presence or absence of a defect on the inspection object based on the amount of the irregularly reflected light, and estimates the size of the defect to determine good or bad.
【００１０】[0010]
【発明の実施の形態】以下添付図面に従って本発明に係
る欠点検査装置の好ましい実施の形態を詳説する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a defect inspection apparatus according to the present invention will be described below in detail with reference to the accompanying drawings.
【００１１】図１に示す欠点検査装置１０は、液晶パネ
ルに適用されるガラス板１２の端面１２Ａ及びその近傍
に発生する欠点（図４参照）を検査する装置であり、ガ
ラス板１２を搬送する不図示の搬送装置に近接して設け
られている。A defect inspection apparatus 10 shown in FIG. 1 is an apparatus for inspecting a defect (see FIG. 4) generated at an end face 12A of a glass plate 12 applied to a liquid crystal panel and its vicinity (see FIG. 4). It is provided in the vicinity of a transport device (not shown).
【００１２】この欠点検査装置１０は、図１の如く第１
プリズム１４、第２プリズム１６、カメラ（撮像手段に
相当）１８、及び輝点検出装置（検出手段に相当）２０
を主な構成としており、第１プリズム１４は、ガラス板
１２の上面（一方面に相当）１２Ｂに対向配置され、第
２プリズム１６は、ガラス板１２の下面（他方面に相
当）１２Ｃに対向配置されている。なお、第１プリズム
１４をガラス板１２の下面側に配置し、第２プリズム１
６をガラス板１２の上面側に配置してもよい。また、ガ
ラス板１２の前記上面及び下面は、ガラス板１２の端面
１２Ａを含む端面１２Ａ近傍の面である。This defect inspection apparatus 10 has a first
Prism 14, second prism 16, camera (corresponding to imaging means) 18, and bright spot detecting device (corresponding to detecting means) 20
The first prism 14 is arranged opposite to the upper surface (corresponding to one surface) 12B of the glass plate 12, and the second prism 16 is opposed to the lower surface (corresponding to the other surface) 12C of the glass plate 12. Are located. In addition, the first prism 14 is arranged on the lower surface side of the glass plate 12 and the second prism 1
6 may be arranged on the upper surface side of the glass plate 12. The upper surface and the lower surface of the glass plate 12 are surfaces near the end surface 12A including the end surface 12A of the glass plate 12.
【００１３】第１、第２プリズム１４、１６は、入射面
１４Ａ、１６Ａ、反射面１４Ｂ、１６Ｂ、及び出射面１
４Ｃ、１６Ｃが形成された同一形状の偏角プリズムであ
る。第１、第２プリズム１４、１６によれば、入射面１
４Ａ、１６Ａから入射した光線束は、反射面１４Ｂ、１
６Ｂで全反射されて９０°方向変換され、出射面１４
Ｃ、１６Ｃから外部に出射される。また、第１、第２プ
リズム１４、１６は、各々の入射面１４Ａ、１６Ａがガ
ラス板１２を挟んで対向するように配置されるととも
に、出射面１４Ｂ、１６Ｂが同一平面上に位置するよう
に配置されている。The first and second prisms 14 and 16 include an entrance surface 14A, 16A, a reflection surface 14B, 16B, and an exit surface 1
Deflection prisms of the same shape on which 4C and 16C are formed. According to the first and second prisms 14 and 16, the incident surface 1
The light beams incident from 4A and 16A are reflected on reflection surfaces 14B and 1B.
6B, the light is totally reflected, and the direction of the light is changed by 90 °.
C and 16C are emitted to the outside. The first and second prisms 14 and 16 are arranged such that the respective incident surfaces 14A and 16A are opposed to each other with the glass plate 12 interposed therebetween, and the emission surfaces 14B and 16B are positioned on the same plane. Are located.
【００１４】カメラ１８は、第１、第２プリズム１４、
１６に近接して配置されるとともに、第１プリズム１４
と第２プリズム１６とで挟まれたガラス板１２の検査部
１３の端面１２Ａを直接撮像するように、端面１２Ａに
対向して配置されている。また、カメラ１８は、第１プ
リズム１４の出射面１４Ｃから出射された光線束を撮像
する位置に配置されるとともに、第２プリズム１６の出
射面１６Ｃから出射された光線束を撮像する位置に配置
されている。これにより、カメラ１８は、検査部１３の
端面１２Ａ、上面１２Ｂ、及び下面１２Ｃを同時に撮像
することができる。The camera 18 includes first and second prisms 14,
16 and the first prism 14
The glass plate 12 is disposed opposite to the end surface 12A so as to directly capture an image of the end surface 12A of the inspection section 13 of the glass plate 12 sandwiched between the first prism 16 and the second prism 16. Further, the camera 18 is arranged at a position where the light beam emitted from the emission surface 14C of the first prism 14 is imaged and at a position where the light beam emitted from the emission surface 16C of the second prism 16 is imaged. Have been. Thereby, the camera 18 can simultaneously image the end surface 12A, the upper surface 12B, and the lower surface 12C of the inspection unit 13.
【００１５】欠点検査装置１０では、端面１２Ａ、上面
１２Ｂ、及び下面１２Ｃをそれぞれピントが合った状態
で撮像するために、即ち、焦点位置を端面１２Ａ、上面
１２Ｂ、及び下面１２Ｃで合わせるために、図２に示す
第１プリズム１４の光学距離ｘ、ｙ、ｄが下記の如く設
定されている。ｘは、反射面１４Ｂ上におけるＡ点から
出射面１４Ｃまでの距離、ｙは、入射面１４ＡからＡ点
までの距離、ｄは、入射面１４Ａからガラス板１２の上
面１２Ｂまでの距離である。なお、第２プリズム１６の
光学距離は、第１プリズム１４の光学距離と等しいの
で、ここでは第１プリズム１４の光学距離ｘ、ｙ、ｄに
ついて説明する。In the defect inspection apparatus 10, in order to image the end face 12A, the upper face 12B, and the lower face 12C in a focused state, that is, to adjust the focal position between the end face 12A, the upper face 12B, and the lower face 12C, The optical distances x, y, and d of the first prism 14 shown in FIG. 2 are set as follows. x is the distance from the point A on the reflecting surface 14B to the emitting surface 14C, y is the distance from the incident surface 14A to the point A, and d is the distance from the incident surface 14A to the upper surface 12B of the glass plate 12. Since the optical distance of the second prism 16 is equal to the optical distance of the first prism 14, the optical distances x, y, and d of the first prism 14 will be described here.
【００１６】光学距離ｘ、ｙ、ｄは、（ｘ−ｄ）・ｎ＝
ｘ＋ｙの関係が成立するように設定される。ここで、ｎ
はプリズムの屈折率である。一例として、ｙ＝１５．０
ｍｍ、ｄ＝５．０ｍｍに設定し、ｎ＝１．５２のプリズ
ムを使用した場合には、上記式により、ｘ＝４３．４６
ｍｍとなる。よって、上記数値に光学距離ｘ、ｙ、ｄを
設定すれば、一つの撮像レンズ系で端面１２Ａ、上面１
２Ｂ、及び下面１２Ｃを図３の如くピントが合った状態
で撮像することができる。The optical distances x, y, d are (x−d) · n =
It is set so that the relationship of x + y is established. Where n
Is the refractive index of the prism. As an example, y = 15.0
mm, d = 5.0 mm, and when using a prism with n = 1.52, x = 43.46 by the above equation.
mm. Therefore, if the optical distances x, y, and d are set to the above values, the end surface 12A and the upper surface 1
2B and the lower surface 12C can be imaged in a focused state as shown in FIG.
【００１７】一方、図１に示すガラス板１２の周囲に
は、検査部１３を照明すべく不図示の蛍光灯等の照明手
段が設置されている。これにより、検査部１３に欠点が
存在している場合には、蛍光灯からの照明光が欠点で乱
反射し、この乱反射光がカメラ１８で撮像される。On the other hand, around the glass plate 12 shown in FIG. 1, illuminating means such as a fluorescent lamp (not shown) is provided to illuminate the inspection section 13. Thus, when a defect exists in the inspection unit 13, the illumination light from the fluorescent lamp is irregularly reflected by the defect, and the irregularly reflected light is imaged by the camera 18.
【００１８】カメラ１８は、撮影レンズ２２及びカメラ
本体２４から構成される。カメラ本体２４内には、光電
変換素子である不図示のＣＣＤエリアセンサ（ＣＣＤラ
インセンサでもよい）が配置され、このＣＣＤエリアセ
ンサの受光面は、撮影レンズ２２の結像位置に設置され
ている。ＣＣＤエリアセンサから出力される映像信号
は、図１の輝点検出装置２０に出力される。The camera 18 comprises a taking lens 22 and a camera body 24. In the camera body 24, a CCD area sensor (not shown), which is a photoelectric conversion element, may be arranged (a CCD line sensor may be used), and a light receiving surface of the CCD area sensor is installed at an image forming position of the photographing lens 22. . The video signal output from the CCD area sensor is output to the bright spot detection device 20 in FIG.
【００１９】輝点検出装置２０は、いわゆる暗視野での
輝点検出法により欠点を検出する装置であり、ＣＣＤエ
リアセンサから出力される映像信号から、輝点領域面積
や欠点部位の総光量を取得する。そして、輝点検出装置
２０は、その総光量と、メモリ２１に記憶されているそ
れぞれの閾値とを比較して、明部面積または総光量が閾
値明部面積を超えた場合に自動判別装置２６を制御し
て、そのガラス板１２を不良品として区別させる。な
お、前記映像信号のレベルが所定の閾値を超えた時に、
欠点が存在したと判断してもよい。The bright spot detecting device 20 is a device for detecting a defect by a so-called dark field bright spot detecting method. get. Then, the bright spot detecting device 20 compares the total light amount with the respective threshold values stored in the memory 21 and, when the bright portion area or the total light amount exceeds the threshold bright portion area, the automatic determination device 26. Is controlled so that the glass plate 12 is distinguished as a defective product. When the level of the video signal exceeds a predetermined threshold,
It may be determined that a defect exists.
【００２０】次に、前記の如く構成された欠点検査装置
１０の作用について説明する。Next, the operation of the defect inspection apparatus 10 configured as described above will be described.
【００２１】図１の状態で欠点検査装置１０を作動させ
るとともに、不図示の蛍光灯を点灯させてガラス板１２
の検査部１３を照明する。そして、ガラス板１２を不図
示の搬送装置によって所定の速度で図１上矢印方向に搬
送し、ガラス板１２の欠点検査を開始する。In the state shown in FIG. 1, the defect inspection apparatus 10 is operated, and a fluorescent lamp (not shown) is turned on to turn on the glass plate 12.
Is illuminated. Then, the glass plate 12 is conveyed in a direction indicated by an arrow in FIG. 1 at a predetermined speed by a conveying device (not shown), and the defect inspection of the glass plate 12 is started.
【００２２】欠点検査時において、カメラ１８は、ガラ
ス板１２の端面１２Ａを直接撮像し、そして、ガラス板
１２の上面１２Ｂを第１プリズム１４を介して撮像する
とともに、ガラス板１２の下面１２Ｃを第２プリズム１
６を介して撮像している。At the time of defect inspection, the camera 18 directly captures an image of the end surface 12A of the glass plate 12, captures the upper surface 12B of the glass plate 12 via the first prism 14, and also captures the lower surface 12C of the glass plate 12. Second prism 1
6 is taken.
【００２３】そして、カメラ１８のＣＣＤエリアセンサ
から出力される映像信号が輝点検出装置２０に出力され
ると、輝点検出装置２０は、その映像信号から明部面積
及び散乱光の総光量を取得する。そして、輝点検出装置
２０は、総光量と、メモリ２１に記憶されているそれぞ
れの閾値とを比較する。そして、明部面積及び総光量の
どちらかまたは両方が閾値を超えた場合に、自動判別装
置２６を制御して、そのガラス板１２を不良品として区
別させる。When the video signal output from the CCD area sensor of the camera 18 is output to the bright spot detector 20, the bright spot detector 20 calculates the bright area and the total amount of scattered light from the video signal. get. Then, the luminescent spot detection device 20 compares the total light amount with each threshold stored in the memory 21. Then, when one or both of the bright part area and the total light amount exceed the threshold value, the automatic discrimination device 26 is controlled to distinguish the glass plate 12 as a defective product.
【００２４】このように、欠点検査装置１０では、第
１、第２プリズム１４、１６をカメラに代えて使用する
ことにより、１台のカメラ１８での端面１２Ａ、上面１
２Ｂ、及び下面１２Ｃに存在する欠点の検出が可能にな
るので、装置構造が簡素化して小型化でき、また、第
１、第２プリズム１４、１６の位置調整はカメラと比較
して簡単なのでセッティングも容易になる。As described above, in the defect inspection apparatus 10, by using the first and second prisms 14 and 16 instead of the cameras, the end face 12A and the upper face 1
2B and the lower surface 12C can be detected, so that the device structure can be simplified and downsized, and the position adjustment of the first and second prisms 14 and 16 is simpler than that of a camera, so that the setting is easy. Will also be easier.
【００２５】なお、本実施の形態では、第１、第２プリ
ズム１４、１６を使用した例について説明したが、被写
界深度の長い撮影レンズを用いることが可能な場合に
は、第１、第２プリズム１４、１６に変えて反射鏡を用
いても端面１２Ａ、上面１２Ｂ、及び下面１２Ｃをピン
トが合った状態で撮像することができる。In this embodiment, an example in which the first and second prisms 14 and 16 are used has been described. However, if a photographing lens having a long depth of field can be used, the first and second prisms 14 and 16 are used. Even if a reflecting mirror is used instead of the second prisms 14 and 16, the end face 12A, the upper face 12B, and the lower face 12C can be imaged in a focused state.
【００２６】[0026]
【発明の効果】以上説明したように本発明に係る欠点検
査装置によれば、第１プリズムを被検査体の一方面に対
向配置し、第２プリズムを被検査体の他方面に配置する
ことによって、１台の撮像手段による被検査体の端面、
一方面、及び他方面の撮像が可能になるので、装置構造
が簡素化するとともに小型化でき、また、装置のセッテ
ィングも容易になる。As described above, according to the defect inspection apparatus of the present invention, the first prism is arranged to face one surface of the object to be inspected, and the second prism is arranged to the other surface of the object to be inspected. The end face of the object to be inspected by one imaging means,
Since imaging on one side and the other side becomes possible, the structure of the device can be simplified and downsized, and the setting of the device becomes easy.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明の実施の形態に係る欠点検査装置の拡大
斜視図FIG. 1 is an enlarged perspective view of a defect inspection apparatus according to an embodiment of the present invention.
【図２】図１に示した欠点検査装置の光学系の説明図FIG. 2 is an explanatory diagram of an optical system of the defect inspection apparatus shown in FIG.
【図３】図１に示した欠点検査装置のカメラで撮像され
た映像を示す説明図FIG. 3 is an explanatory diagram showing an image captured by a camera of the defect inspection apparatus shown in FIG. 1;
【図４】ガラス板に生じる欠点を説明するための模式図FIG. 4 is a schematic view for explaining a defect occurring in a glass plate.
１０…欠点検査装置、１２…ガラス板、１４…第１プリ
ズム、１６…第２プリズム、１８…カメラ（撮像手段に
相当）、２０…輝点検出装置（検出手段に相当）、２１
…メモリ、２２…撮影レンズ、２４…カメラ本体、２６
…自動判別装置DESCRIPTION OF SYMBOLS 10 ... Defect inspection apparatus, 12 ... Glass plate, 14 ... First prism, 16 ... Second prism, 18 ... Camera (corresponding to imaging means), 20 ... Bright spot detection apparatus (corresponding to detection means), 21
... memory, 22 ... taking lens, 24 ... camera body, 26
… Automatic identification device
Claims (2)
存在する傷、欠け等の欠点を検出する欠点検査装置にお
いて、 被検査体の一方面に配置された第１プリズムと、 被検査体の他方面に配置された第２プリズムと、 被検査体の端面に対向配置され該端面を撮像するととも
に、前記第１プリズムを介して被検査体の一方面と第２
プリズムを介して被検査体の他方面とを撮像する撮像手
段と、 該撮像手段で撮像された画像に基づいて被検査体の一方
面、他方面、及び端面に存在する欠点を検出する検出手
段と、 を備えたことを特徴とする欠点検査装置。1. A defect inspection apparatus for detecting a defect such as a scratch or a chip near an end surface of a plate-shaped inspection object and an end surface thereof, comprising: a first prism disposed on one surface of the inspection object; A second prism disposed on the other surface of the test object; an opposite surface disposed to face the end surface of the test object, imaging the end surface; and a second prism connected to one surface of the test object via the first prism.
Imaging means for imaging the other surface of the object to be inspected via the prism; detecting means for detecting a defect present on one surface, the other surface, and the end surface of the object to be inspected based on the image imaged by the imaging means A defect inspection apparatus comprising:
射光の光量に基づいて被検査体の欠点を検出することを
特徴とする請求項１に記載の欠点検査装置。2. The defect inspection apparatus according to claim 1, wherein the detection unit detects a defect of the inspection object based on an amount of reflected light from the inspection object.
Priority Applications (1)
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|---|---|---|---|
| JP2000249772A JP2002062267A (en) | 2000-08-21 | 2000-08-21 | Device for inspecting defect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000249772A JP2002062267A (en) | 2000-08-21 | 2000-08-21 | Device for inspecting defect |
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|---|---|
| JP2002062267A true JP2002062267A (en) | 2002-02-28 |
Family
ID=18739460
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000249772A Withdrawn JP2002062267A (en) | 2000-08-21 | 2000-08-21 | Device for inspecting defect |
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| Country | Link |
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