JP2002032130A - Pressure reducing valve - Google Patents
Pressure reducing valveInfo
- Publication number
- JP2002032130A JP2002032130A JP2000215280A JP2000215280A JP2002032130A JP 2002032130 A JP2002032130 A JP 2002032130A JP 2000215280 A JP2000215280 A JP 2000215280A JP 2000215280 A JP2000215280 A JP 2000215280A JP 2002032130 A JP2002032130 A JP 2002032130A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- pressure
- pressure reducing
- diaphragm
- nut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Safety Valves (AREA)
- Mechanically-Actuated Valves (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、特に戸別給水用の
減圧弁に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure reducing valve for water supply from door to door.
【０００２】[0002]
【従来の技術】従来、この種の減圧弁は、集合住宅の配
管に取り付けられ、施工後に配管全体の漏水試験を行
う。この場合、配管全体に所定圧力をかけて各部の水漏
れ状態を確認する。この漏水試験時において、配管中に
減圧弁があると、２次側の圧力が低く成る。従って、こ
の配管中において、減圧弁の２次側に上記試験圧力がか
かると、減圧弁が故障する恐れがあるので、通常は減圧
弁を一旦取り外して、ここに通水だけを目的とした代替
管を取り付けて漏水試験を行い、漏水試験後、代替管を
減圧弁に交換していた。2. Description of the Related Art Conventionally, a pressure reducing valve of this type is attached to a pipe of an apartment house, and after construction, a water leak test is performed on the entire pipe. In this case, a predetermined pressure is applied to the entire pipe to check the state of water leakage at each part. At the time of this water leak test, if there is a pressure reducing valve in the piping, the pressure on the secondary side will be low. Therefore, if the above-mentioned test pressure is applied to the secondary side of the pressure reducing valve in this pipe, the pressure reducing valve may break down. A leak test was performed by attaching a pipe, and after the leak test, the alternative pipe was replaced with a pressure reducing valve.
【０００３】[0003]
【発明が解決しようとする課題】ところが、上記の様な
漏水試験前後の作業は、減圧弁と代替管の交換作業に手
間、時間を要し、かかる作業が甚だ面倒であった。本発
明は、上記の様な場合に減圧弁の減圧機能が作用しない
様にして、代替管と交換する手間を省いて、減圧機能を
無効にする操作を容易化すること、並びに、減圧機能の
無効状態において、減圧弁における減圧機構部の構成部
材に負荷を生じさせないことを目的としている。However, the work before and after the water leakage test as described above requires labor and time for replacing the pressure reducing valve and the substitute pipe, and such work is extremely troublesome. The present invention prevents the pressure reducing function of the pressure reducing valve from operating in the above-described case, simplifies the operation of disabling the pressure reducing function, and saves the trouble of replacing with a substitute pipe. It is an object of the present invention to prevent a load from being applied to components of the pressure reducing mechanism in the pressure reducing valve in the invalid state.
【０００４】[0004]
【課題を解決するための手段】本発明は、上記課題に鑑
み、２次側圧力室の圧力変動に応じて弁体の開度を制御
する減圧機構部において、弁体に連接体を介して連結さ
れると共に、２次側圧力の変動で変位する圧力−変位変
換要素を、弁体の開弁方向に強制的に外部より押圧する
強制開弁手段を設け、該強制開弁手段にて、弁体を強制
的に開弁させることにより、減圧機能を作用させること
なく、１次側圧力室と２次側圧力室を連通させる様にし
て、上記課題を解決する。SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention provides a pressure reducing mechanism for controlling an opening degree of a valve body in accordance with a pressure change of a secondary side pressure chamber. A pressure-displacement conversion element, which is connected and displaced by the fluctuation of the secondary pressure, is provided with forced valve-opening means for forcibly pressing the valve body in the valve-opening direction from the outside. By forcibly opening the valve body, the above-mentioned problem is solved by making the primary side pressure chamber and the secondary side pressure chamber communicate with each other without operating the pressure reducing function.
【０００５】又、強制開弁手段は、圧力−変位変換要素
の中心部に連接体の連結用ねじ部を貫通してフクロナッ
トで締結し、該フクロナットの頂部に、弁体の開弁方向
に押圧自在な押圧体を設けることにより、強制開弁時に
おける押圧体によるフクロナットを介した圧力−変位変
換要素の押圧状態で、該圧力−変位変換要素が２次側圧
力室の圧力を閉弁方向に受圧しても、連結用ねじ部に負
荷を生じさせない。即ち、図３に示す様に、連結用ねじ
部ａを六角ナットｂで締結した構成では、強制開弁時に
おいて、押圧体ｃは連結用ねじ部ａの上端部a1を開弁方
向Ｘに押圧することに成り、一方、圧力−変位変換要素
ｄには、上記と同様に２次側圧力室の圧力が閉弁方向Ｙ
に作用するため、六角ナットｂには連結用ねじ部ａとは
逆方向Ｙの力が作用することとなり、その結果、連結用
ねじ部ａと六角ナットｂのねじ面に負荷を生じ、ねじが
破断したり、緩みを生ずたりする不具合を招来すること
を、上記の様にフクロナットで連結用ねじ部を締結する
ことにより、解消できる。The forcible valve opening means penetrates the connecting portion of the connecting member to the center of the pressure-displacement conversion element and fastens the connecting member with a nut, and presses the top of the nut in the valve opening direction of the valve. By providing a flexible pressing body, the pressure-displacement converting element presses the pressure of the secondary-side pressure chamber in the valve-closing direction in a state where the pressure-displacement converting element is pressed by the pressing body via the helmet nut at the time of forcibly opening the valve. Even if pressure is received, no load is generated on the connecting screw portion. That is, as shown in FIG. 3, in the configuration in which the connecting screw portion a is fastened with the hexagon nut b, the pressing body c presses the upper end portion a1 of the connecting screw portion a in the valve opening direction X at the time of forcibly opening the valve. On the other hand, the pressure of the secondary pressure chamber is applied to the pressure-displacement conversion element d in the valve closing direction Y in the same manner as described above.
, A force is applied to the hexagon nut b in the direction Y opposite to that of the connection screw portion a. As a result, a load is generated on the screw surfaces of the connection screw portion a and the hexagon nut b, and The inconvenience of breaking or loosening can be solved by fastening the connecting screw portion with the fukuro nut as described above.
【０００６】[0006]
【発明の実施の形態】以下本発明の一実施例を図面に基
づいて説明する。図１は本発明に係る減圧弁の縦断面図
であり、図２は図１のＡーＡ断面図である。この減圧弁
１は、１次側圧力室２と２次側圧力室３を設けた弁箱４
と、該弁箱４に組み込まれ、２次側圧力室３の圧力変動
に応じて弁体５の開度を制御する減圧機構部６と、該減
圧機構部６において、弁体５に連接体７を介して連結さ
れると共に、２次側圧力の変動で変位する圧力−変位変
換要素（ダイヤフラム）８を、減圧弁１外部より弁体５
の開弁方向（図において下方）に強制的に押圧する強制
開弁手段９とから主に構成されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view of a pressure reducing valve according to the present invention, and FIG. 2 is a sectional view taken along line AA of FIG. This pressure reducing valve 1 is a valve box 4 provided with a primary pressure chamber 2 and a secondary pressure chamber 3.
A pressure reducing mechanism 6 incorporated in the valve box 4 and controlling the opening degree of the valve element 5 in accordance with the pressure fluctuation of the secondary pressure chamber 3. 7 and a pressure-displacement conversion element (diaphragm) 8 that is displaced by fluctuations in the secondary pressure,
And a forced valve opening means 9 forcibly pressing in the valve opening direction (downward in the figure).
【０００７】弁箱４は、その左右側方に流入口10及び流
出口11の夫々を開設すると共に、内部に流入口10及び流
出口11に通ずる１次側圧力室２と２次側圧力室３を夫々
設けている。１次側圧力室２は、流入口10より弁箱４の
中央へパイプ状に突入した隔壁12により２次側圧力室３
と区画され、隔壁12の先端下部（弁箱４の中心線上に相
当）に弁口13を開設して両圧力室２、３を連通してい
る。The valve box 4 has an inlet 10 and an outlet 11 on the left and right sides thereof, and has a primary pressure chamber 2 and a secondary pressure chamber 2 communicating with the inlet 10 and the outlet 11 therein. 3 are provided respectively. The primary-side pressure chamber 2 is formed by a partition wall 12 that protrudes from the inflow port 10 into the center of the valve box 4 in a pipe shape.
A valve port 13 is opened at the lower end of the partition wall 12 (corresponding to the center line of the valve box 4) to communicate the two pressure chambers 2, 3.
【０００８】減圧機構部６は、弁箱４の上方開口部14の
周壁15と、ハット型のボンネット16とをダイヤフラム８
を挟んで接合固定して、２次側圧力室３（弁箱４）の上
方開口部14をダイヤフラム８で閉塞し、該ダイヤフラム
８で区画した上方空間（ボンネット16内部）に調節ばね
17を配設している。調節ばね17は、ダイヤフラム８上面
に接合したダイヤフラム押さえ18上部のばね受け19と、
ボンネット16の上端に螺着したばね受け兼用の調節ねじ
20間に圧縮介装している。そして、調節ねじ20を上下移
動することにより、調節ばね17の弾性力を調整し、その
下部のダイヤフラム８の変位を調整している。尚、図１
中、21は、ボンネット16の適所に設けた外部との連通孔
である。The pressure reducing mechanism 6 connects the peripheral wall 15 of the upper opening 14 of the valve box 4 and the hat-shaped bonnet 16 to the diaphragm 8.
The upper opening 14 of the secondary side pressure chamber 3 (valve box 4) is closed by the diaphragm 8, and an adjusting spring is provided in the upper space (the inside of the bonnet 16) defined by the diaphragm 8.
17 are arranged. The adjustment spring 17 includes a spring holder 19 on the upper part of the diaphragm holder 18 joined to the upper surface of the diaphragm 8,
An adjusting screw that is screwed onto the upper end of the bonnet 16 and also serves as a spring receiver
Between 20 compressions. By moving the adjusting screw 20 up and down, the elastic force of the adjusting spring 17 is adjusted, and the displacement of the diaphragm 8 below the adjusting spring 17 is adjusted. FIG.
Reference numeral 21 denotes a communication hole with the outside provided at an appropriate position of the hood 16.
【０００９】ダイヤフラム８の中心には、その下部よ
り、ダイヤフラム８、ダイヤフラム押さえ18及びばね受
け19を貫通した連接体７の連結用ねじ部22が上方突出
し、該連結用ねじ部22にフクロナット23を締結して、連
接体７にダイヤフラム８を固定している。連接体７は、
連結用ねじ部22を突設したダイヤフラム押さえ24でダイ
ヤフラム８の下面を当接支持すると共に、ダイヤフラム
押さえ24の（図２において）左右端より一対の弁棒25を
垂下形成し、該弁棒25の下端に弁体装着用のリング26を
設けている。そして、弁棒25の間には、図２に示す様
に、隔壁12が配置されることと成り、連接体７は隔壁12
に衝突することなく上下動できる様に成している。At the center of the diaphragm 8, a connecting screw portion 22 of the connecting member 7 which penetrates through the diaphragm 8, the diaphragm retainer 18 and the spring receiver 19 projects upward from a lower portion thereof, and a connecting nut 22 is attached to the connecting screw portion 22. By fastening, the diaphragm 8 is fixed to the connecting body 7. The connecting body 7 is
The lower surface of the diaphragm 8 is abutted and supported by a diaphragm retainer 24 having a connecting screw portion 22 protruding therefrom, and a pair of valve stems 25 is formed by hanging from the left and right ends (in FIG. 2) of the diaphragm retainer 24. A ring 26 for mounting a valve body is provided at the lower end of the valve. As shown in FIG. 2, the partition 12 is arranged between the valve stems 25, and the connecting body 7 is
It can move up and down without colliding with.
【００１０】弁体５は、略円筒状に形成すると共に、１
次側圧力を開弁方向に受ける様に、弁口13の周囲に設け
た弁座27に着離自在に設けて成り、弁体５の上部周縁に
連接体７のリング26を螺着することにより、連接体７を
介して弁体５とダイヤフラム８を連結し、該ダイヤフラ
ム８の変位により、開度が制御される様に成している。
又、弁体５は、弁箱４の下部中心に設けた円形凹状の弁
体ガイド28に摺動自在に挿通支持されると共に、弁体５
と弁体ガイド28の上下間に弁バネ29を介装し、弁体５を
閉弁方向に付勢している。The valve element 5 is formed in a substantially cylindrical shape, and
A valve seat 27 provided around the valve port 13 is provided so as to be detachable so as to receive the secondary pressure in the valve opening direction, and the ring 26 of the connecting body 7 is screwed onto the upper peripheral edge of the valve body 5. Thus, the valve body 5 and the diaphragm 8 are connected via the connecting body 7, and the opening degree is controlled by the displacement of the diaphragm 8.
The valve element 5 is slidably inserted into and supported by a circular concave valve element guide 28 provided at the center of the lower portion of the valve box 4.
A valve spring 29 is interposed between the upper and lower portions of the valve body guide 28 to urge the valve body 5 in the valve closing direction.
【００１１】強制開弁手段９は、フクロナット23の頂部
に、弁体５の開弁方向に押圧（押圧及びその解除）自在
な押圧体30を設けている。この押圧体30は、調節ねじ20
の中心に外部より螺入したボルトであり、押圧体30を螺
入して、その下端がフクロナット23の頂部を押圧し、ダ
イヤフラム８を下方へ強制的に変位させることにより、
連接体７を介して弁体５を弁座27より離脱させ、１次側
圧力室２と２次側圧力室３とを弁口13を介して連通させ
る様に成し、又押圧体30を螺退させフクロナット23に対
する押圧を解除することにより、弁体５の強制開弁を解
除する様に成している。尚、本実施例では、ボルトから
成る押圧体30を示したが、これに限定されることなく、
押圧体30は、フクロナット23の頂部を押圧自在と成した
構造であれば良い。The forcible valve opening means 9 is provided at the top of the nut 23 with a pressing member 30 which can be pressed (pressed and released) in the valve opening direction of the valve element 5. The pressing body 30 is
Is screwed from the outside into the center of the bolt, and the pressing body 30 is screwed in, the lower end of the bolt presses the top of the owl nut 23, and the diaphragm 8 is forcibly displaced downward.
The valve body 5 is detached from the valve seat 27 through the connecting body 7 so that the primary side pressure chamber 2 and the secondary side pressure chamber 3 communicate with each other through the valve port 13. The forced opening of the valve element 5 is released by releasing the pressing on the helmet nut 23 by screwing it back. In the present embodiment, the pressing body 30 made of a bolt is shown, but the present invention is not limited thereto.
The pressing body 30 may have a structure in which the top of the owl nut 23 can be pressed freely.
【００１２】次に減圧弁の動作について説明する。先
ず、漏水試験時では、強制開弁手段９の押圧体30でフク
ロナット23の頂部を押圧することにより、ダイヤフラム
８を下方変位させて強制的に開弁させ、弁口13を介して
１次側圧力室２と２次側圧力室３を連通させる。この
時、当然ながら減圧機構部６は機能せず、弁体５の全開
状態が維持されるため、１次側圧力室２から２次側圧力
室３への通水状態が保持され、弁箱４が通水管として機
能する。又、押圧体30は、連結用ねじ部22をその軸線方
向に直接押圧するのではなく、フクロナット23を介して
ダイヤフラム８を押圧しているため、ダイヤフラム８が
２次側圧力室３の圧力を閉弁方向に受圧しても、連結用
ねじ部22に負荷が生じない。Next, the operation of the pressure reducing valve will be described. First, at the time of the water leakage test, the top of the helmet nut 23 is pressed by the pressing body 30 of the forcible valve opening means 9 so that the diaphragm 8 is displaced downward to forcibly open the valve, and the primary side is opened via the valve port 13. The pressure chamber 2 communicates with the secondary pressure chamber 3. At this time, of course, the pressure reducing mechanism 6 does not function, and the valve body 5 is kept fully open, so that the state of water flow from the primary-side pressure chamber 2 to the secondary-side pressure chamber 3 is maintained. 4 functions as a water pipe. Further, since the pressing body 30 does not directly press the connecting screw portion 22 in the axial direction but presses the diaphragm 8 via the helical nut 23, the diaphragm 8 reduces the pressure of the secondary side pressure chamber 3. Even if pressure is received in the valve closing direction, no load is applied to the connection screw portion 22.
【００１３】又、漏水試験後、押圧体30によるフクロナ
ット23の押圧を解除することにより、弁体５の強制開弁
を解除する。これにより、通常の減圧弁として減圧機構
部６が機能する。即ち、２次側圧力室３の２次側圧力に
よるダイヤフラム８への上向き（閉弁方向）の力及び弁
バネ29の上向きの力と、調節ばね17による下向き（開弁
方向）の力がバランスすることにより、弁体５の開度が
制御され、２次側圧力が１次側圧力より低いある一定の
圧力に保持する。After the water leakage test, the forcible opening of the valve body 5 is released by releasing the pressing of the helmet nut 23 by the pressing body 30. Thus, the pressure reducing mechanism 6 functions as a normal pressure reducing valve. That is, the upward (valve closing direction) force of the diaphragm 8 and the upward force of the valve spring 29 due to the secondary pressure of the secondary pressure chamber 3 and the downward (valve opening direction) force of the adjusting spring 17 are balanced. By doing so, the opening degree of the valve element 5 is controlled, and the secondary pressure is maintained at a certain pressure lower than the primary pressure.
【００１４】[0014]
【発明の効果】要するに本発明は、強制開弁手段９によ
り減圧機構部６におけるダイヤフラム８を弁体５の開弁
方向へ減圧弁１外部より強制的に押圧する様に成したの
で、強制開弁手段９の操作にて減圧機構部６を機能させ
ず、１次側圧力室２と２次側圧力室３を連通させて通水
させることが簡単に行え、漏水試験時において、従来の
様な減圧弁と代替管を交換する手間を省くことが出来、
よって従来の様な配管への減圧弁と代替管の交換によ
り、配管が歪む様な不具合をも解消できる。又、上記漏
水試験後、強制開弁手段９によるダイヤフラム８への押
圧を解除することにより、減圧機構部６を機能させら
れ、減圧弁本来の役割を果たすことができる。以上の様
に、本発明によれば、減圧弁１の外部より、減圧機構部
６の機能を有効又は無効とする切換操作を容易に行うこ
とができる。According to the present invention, the diaphragm 8 in the pressure reducing mechanism 6 is forcibly pressed from the outside of the pressure reducing valve 1 in the valve opening direction of the valve body 5 by the forced valve opening means 9. The primary pressure chamber 2 and the secondary pressure chamber 3 can easily communicate with each other without causing the decompression mechanism 6 to function by operating the valve means 9, and water can be easily passed through. The trouble of replacing a decompressing valve and a substitute pipe can be saved,
Therefore, by replacing the pressure reducing valve and the substitute pipe with the conventional pipe, a problem that the pipe is distorted can be solved. Further, after the water leakage test, the pressure reducing mechanism 6 is made to function by releasing the pressure on the diaphragm 8 by the forced valve opening means 9, so that the pressure reducing valve can play its original role. As described above, according to the present invention, a switching operation for enabling or disabling the function of the pressure reducing mechanism 6 can be easily performed from outside the pressure reducing valve 1.
【００１５】又、強制開弁手段９は、ダイヤフラム８を
貫通した連接体７の連結用ねじ部22に締結したフクロナ
ット23の頂部に、弁体５の開弁方向に押圧自在な押圧体
30を設けたので、強制開弁時において、押圧体30は、連
結用ねじ部22を直接押圧することなく、フクロナット23
を介してダイヤフラム８を押圧しているため、ダイヤフ
ラム８が２次側圧力室３の圧力を閉弁方向に受圧して
も、連結用ねじ部22に負荷を生じさせることがなく、例
えば、図３に示す様に、連結用ねじ部ａを六角ナットｂ
で締結した構成では、強制開弁時において、連結用ねじ
部ａと六角ナットｂのねじ面に負荷を生じ、ねじが破断
したり、緩みを生ずたりする不具合を、本発明では解消
している。又、上記強制開弁手段９は、構造が簡単で部
品点数も少ないので、減圧弁１の製造コストを安価にで
きるのである。A forcible valve opening means 9 is provided on a top of a helical nut 23 fastened to a connecting screw portion 22 of the connecting member 7 penetrating the diaphragm 8 and a pressing member which can be pressed in the valve opening direction of the valve body 5.
Since the valve 30 is provided, at the time of forcible valve opening, the pressing body 30 does not directly press the
Presses the diaphragm 8 through the opening, so that even if the diaphragm 8 receives the pressure of the secondary pressure chamber 3 in the valve closing direction, no load is generated on the connecting screw portion 22. As shown in FIG. 3, the connecting screw portion a is replaced with a hexagon nut b.
In the present invention, when the valve is forcibly opened, a load is generated on the screw surfaces of the connection screw portion a and the hexagon nut b, and the screw is broken or loosened. I have. Further, since the forced valve opening means 9 has a simple structure and a small number of parts, the manufacturing cost of the pressure reducing valve 1 can be reduced.
【図１】強制開弁状態の減圧弁の縦断面図である。FIG. 1 is a longitudinal sectional view of a pressure reducing valve in a forced valve opening state.
【図２】図１のＡーＡ断面図である。FIG. 2 is a sectional view taken along line AA of FIG.
【図３】連結用ねじ部を六角ナットで締結した場合の要
部拡大断面図である。FIG. 3 is an enlarged cross-sectional view of a main part when a connecting screw portion is fastened with a hexagon nut.
３ ２次側圧力室 ５ 弁体 ６ 減圧機構部 ７ 連接体 ８ 圧力−変位変換要素 ９ 強制開弁手段 22 連結用ねじ部 23 フクロナット 30 押圧体 3 Secondary-side pressure chamber 5 Valve body 6 Pressure reducing mechanism 7 Connecting body 8 Pressure-displacement conversion element 9 Forced valve opening means 22 Connection screw part 23 Float nut 30 Pressing body
Claims (2)
開度を制御する減圧機構部において、弁体に連接体を介
して連結されると共に、２次側圧力の変動で変位する圧
力−変位変換要素を、弁体の開弁方向に強制的に外部よ
り押圧する強制開弁手段を設けたことを特徴とする減圧
弁。A pressure reducing mechanism for controlling an opening degree of a valve body in accordance with a pressure change of a secondary pressure chamber, wherein the pressure reducing mechanism is connected to the valve body via a connecting body and is displaced by a change in the secondary pressure. A pressure-displacement conversion element which is forcibly opened from the outside in a valve-opening direction of the valve body.
連接体の連結用ねじ部を貫通してフクロナットで締結
し、該フクロナットの頂部に、弁体の開弁方向に押圧自
在な押圧体を設けたことを特徴とする請求項１記載の減
圧弁。2. The forcible valve-opening means includes a pressure-displacement conversion element, which penetrates a connecting screw portion of a connecting body and is fastened with a helmet nut. The pressure reducing valve according to claim 1, further comprising a body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000215280A JP2002032130A (en) | 2000-07-17 | 2000-07-17 | Pressure reducing valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000215280A JP2002032130A (en) | 2000-07-17 | 2000-07-17 | Pressure reducing valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002032130A true JP2002032130A (en) | 2002-01-31 |
Family
ID=18710722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000215280A Pending JP2002032130A (en) | 2000-07-17 | 2000-07-17 | Pressure reducing valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002032130A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102466066A (en) * | 2010-11-15 | 2012-05-23 | 烟台龙源电力技术股份有限公司 | Film reducing valve |
| WO2016035558A1 (en) * | 2014-09-01 | 2016-03-10 | 日立金属株式会社 | Mass flow controller |
-
2000
- 2000-07-17 JP JP2000215280A patent/JP2002032130A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102466066A (en) * | 2010-11-15 | 2012-05-23 | 烟台龙源电力技术股份有限公司 | Film reducing valve |
| WO2016035558A1 (en) * | 2014-09-01 | 2016-03-10 | 日立金属株式会社 | Mass flow controller |
| CN106662883A (en) * | 2014-09-01 | 2017-05-10 | 日立金属株式会社 | Mass flow controller |
| KR20170052562A (en) * | 2014-09-01 | 2017-05-12 | 히타치 긴조쿠 가부시키가이샤 | Mass flow controller |
| JPWO2016035558A1 (en) * | 2014-09-01 | 2017-07-06 | 日立金属株式会社 | Mass flow controller |
| US10509422B2 (en) | 2014-09-01 | 2019-12-17 | Hitachi Metals, Ltd. | Mass flow controller |
| KR102389112B1 (en) * | 2014-09-01 | 2022-04-21 | 히타치 긴조쿠 가부시키가이샤 | Mass flow controller |
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