JP2001356012A - Z-axis assembly of measuring instrument - Google Patents
Z-axis assembly of measuring instrumentInfo
- Publication number
- JP2001356012A JP2001356012A JP2000176289A JP2000176289A JP2001356012A JP 2001356012 A JP2001356012 A JP 2001356012A JP 2000176289 A JP2000176289 A JP 2000176289A JP 2000176289 A JP2000176289 A JP 2000176289A JP 2001356012 A JP2001356012 A JP 2001356012A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- spindle
- bracket
- assembly
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は被測定物の寸法及び
粗さ、うねり、輪郭、真円度、3次元形状などの表面性
状を測定する表面性状測定機に関し、特に、Z軸スピン
ドルを備えるZ軸組立体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface texture measuring device for measuring the surface texture such as the size and roughness, waviness, contour, roundness and three-dimensional shape of an object to be measured, and more particularly to a surface texture measuring machine provided with a Z-axis spindle. The present invention relates to a Z-axis assembly.
【0002】[0002]
【従来の技術】周知のように、例えば図1に示すような
門型3次元測定機においては、測定子をZ軸方向(一般
的には垂直方向)に送るため、図5に示すようなZ軸組
立体が取り付けられる。即ち、図5の符号”A”は水平
な面内でX軸方向に延長するX軸ガイドであり、Z軸組
立体は同X軸ガイドAに跨座状態におかれてX軸ガイド
Aの長さ方向に送られるスライダブロックBを備えてお
り、同スライダブロックBの一側には垂直方向のZ軸ス
ピンドルCをZ軸方向に案内する案内パッドDを付設し
たZ軸ブラケットEが固定される。2. Description of the Related Art As is well known, in a portal type three-dimensional measuring machine as shown in FIG. 1, for example, a probe is sent in a Z-axis direction (generally in a vertical direction). A Z-axis assembly is mounted. That is, the symbol “A” in FIG. 5 is an X-axis guide extending in the X-axis direction in a horizontal plane, and the Z-axis assembly is placed on the X-axis guide A and A slider block B which is fed in the length direction is provided. A Z-axis bracket E provided with a guide pad D for guiding a vertical Z-axis spindle C in the Z-axis direction is fixed to one side of the slider block B. You.
【0003】そして、前記スライダブロックBの上面に
はバランサブラケットFが固定され、同バランサブラケ
ットFに固定した垂直なバランサラケットGの上部には
プーリブラケットHが支持され、前記Z軸スピンドルC
の上端部に一端を固定した懸架ワイヤIの中間部が同プ
ーリブラケットHに支持する中継プーリJに掛けられ
る。また、前記懸架ワイヤIの他端は前記バランサラケ
ットGと平行な垂直向きのガイドバーKで案内されるバ
ランスウエイトLに結合され、下端部にタッチプローブ
Mなどの検出子を固定するZ軸スピンドルCの重量が同
バランスウエイトLの重量で平衡される。そして、前述
した組立体の部品は、スライダブロックBをZ軸組立体
に組み付けた後、前カバーN及び後カバーOで覆われて
完成される。A balancer bracket F is fixed on the upper surface of the slider block B, and a pulley bracket H is supported on a vertical balance bracket G fixed to the balancer bracket F.
An intermediate portion of the suspension wire I, one end of which is fixed to the upper end portion, is hooked on a relay pulley J supported by the pulley bracket H. The other end of the suspension wire I is coupled to a balance weight L guided by a vertically oriented guide bar K parallel to the balun sacket G, and a Z-axis spindle for fixing a detector such as a touch probe M at the lower end. The weight of C is balanced by the weight of the balance weight L. Then, the components of the above-described assembly are completed by assembling the slider block B to the Z-axis assembly and then covering with the front cover N and the rear cover O.
【0004】[0004]
【発明が解決しようとする課題】このように従来のZ軸
組立体は、スライダブロックB、Z軸ブラケットE、バ
ランサブラケットF、バランサラケットG、プーリブラ
ケットH、ガイドバーK、中継プーリJ、バランスウエ
イトLといった多数の部品からなるため、それらの部品
の製作費が割高で、3次元測定機の製造工程がやっかい
となる。つまり、Z軸組立体の組立に際しては、バラン
サラケットG、プーリブラケットH、ガイドバーK、中
継プーリJ、バランスウエイトLを組み付けたバランサ
ブラケットFをスライダブロックBに組み立て、同スラ
イダブロックBにZ軸ブラケットE及びZ軸スピンドル
Cを取り付け、X軸ガイドAに対してZ軸組立体を組み
付け、最後に前カバーN及び後カバーOで組立体全体を
覆う工程となる。As described above, the conventional Z-axis assembly includes a slider block B, a Z-axis bracket E, a balancer bracket F, a balance bracket G, a pulley bracket H, a guide bar K, a relay pulley J, and a balance. Since it is composed of a large number of parts such as the weight L, the production cost of those parts is relatively high, and the manufacturing process of the three-dimensional measuring machine is troublesome. In other words, when assembling the Z-axis assembly, the balancer bracket F, which is assembled with the balance bracket G, the pulley bracket H, the guide bar K, the relay pulley J, and the balance weight L, is assembled into the slider block B, and the Z-axis is attached to the slider block B. Attach the bracket E and the Z-axis spindle C, attach the Z-axis assembly to the X-axis guide A, and finally cover the entire assembly with the front cover N and the rear cover O.
【0005】本発明の目的は、以上に述べたような従来
の測定機のZ軸組立体の問題に鑑み、構成部品が少な
く、組立工程が簡単で、しかも外観も良い測定機のZ軸
組立体を得るにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a Z-axis assembly of a measuring machine which has a small number of components, has a simple assembly process, and has a good appearance in view of the above-mentioned problems of the Z-axis assembly of the conventional measuring machine. To get a three-dimensional.
【0006】[0006]
【課題を解決するための手段】この目的を達成するた
め、本発明は、被測定物の表面を測定する検出子を一端
部に取り付けられZ軸方向に移動可能なZ軸スピンドル
を備えたZ軸組立体において、長さ方向に対して直角な
面内で内部をスピンドル収容室とウエイト収容室に仕切
った垂直な角筒状の剛性Z軸ブラケットを備え、前記ス
ピンドル収容室中には懸架ワイヤの一端に固定された前
記Z軸スピンドルが案内手段によりその長さ方向に移動
可能な状態で位置され、前記ウエイト収容室に臨んだZ
軸ブラケットの内面には前記懸架ワイヤの他端に懸垂さ
れてZ軸スピンドルの重量を平衡させるバランスウエイ
トを案内するウエイトガイドが突起された測定機のZ軸
組立体を提案するものである。In order to achieve this object, the present invention relates to a Z-axis having a Z-axis spindle which is attached to one end of a detector for measuring the surface of an object to be measured and is movable in the Z-axis direction. The shaft assembly further includes a vertical rectangular cylindrical rigid Z-axis bracket having an interior partitioned into a spindle housing chamber and a weight housing chamber in a plane perpendicular to the longitudinal direction, and a suspension wire is provided in the spindle housing chamber. The Z-axis spindle fixed to one end of the Z is positioned so as to be movable in its length direction by a guide means, and the Z-axis spindle faces the weight accommodating chamber.
The present invention proposes a Z-axis assembly of a measuring machine having a weight guide projecting from the other end of the suspension wire to a balance weight for balancing the weight of the Z-axis spindle on an inner surface of the shaft bracket.
【0007】後述する本発明の好ましい実施例の説明に
おいては、 1)前記Z軸ブラケットの隔壁上端面には前記懸架ワイヤ
の中間部を案内する中継プーリを支持したプーリブラケ
ットが固定される構造、 2)前記スピンドル収容室を取り囲むZ軸ブラケットの内
壁には前記案内手段を構成するエアパッドが支持され、
前記Z軸ブラケットの外壁に取り付けられる前記エアパ
ッドの給気部は目隠し板で被覆されることにより、前記
Z軸ブラケットの外面が外観パネルとされる構造、 3)前記測定機は、略水平な面内で直交するX,Y軸方向
に前記Z軸組立体を精密移動させ、前記Z軸スピンドル
をZ軸方向に送って、測定機ベール上に置かれた被測定
物の3次元的な寸法を含む表面性状を測定する3次元測
定機である構造、 4)前記Z軸ブラケットは、アルミニューム押出材により
形成されている構造が3次元測定機を例にとって説明さ
れる。In the following description of a preferred embodiment of the present invention, 1) a structure in which a pulley bracket supporting a relay pulley for guiding an intermediate portion of the suspension wire is fixed to an upper end surface of a partition wall of the Z-axis bracket; 2) On the inner wall of the Z-axis bracket surrounding the spindle accommodating chamber, an air pad constituting the guide means is supported,
The air supply part of the air pad attached to the outer wall of the Z-axis bracket is covered with a blind plate, so that the outer surface of the Z-axis bracket is an external panel. 3) The measuring device has a substantially horizontal surface. The Z-axis assembly is precisely moved in the X and Y-axis directions orthogonal to each other, and the Z-axis spindle is sent in the Z-axis direction to measure the three-dimensional size of the object placed on the measuring machine veil. 4) The structure of the Z-axis bracket, which is formed of an extruded aluminum material, will be described by taking a three-dimensional measuring machine as an example.
【0008】[0008]
【発明の実施の形態】以下、図1から図4について本発
明の実施例の詳細を説明する。図1は本発明による門型
3次元測定機を示し、測定機ベース1の上部には石定盤
2が位置され、この石定盤2の水平な定面には被測定物
を取り付けることができる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to FIGS. FIG. 1 shows a portal type three-dimensional measuring machine according to the present invention. it can.
【0009】そして、前記石定盤2上には同石定盤2に
沿って水平面内でのY軸方向に移動できる門型移動体3
が位置され、図示を省略する駆動手段でY軸方向に精密
に移動される同門型移動体3上には、Y軸方向に対して
直角なX軸方向に延長したX軸ガイド4が設けられる。
また、前記X軸ガイド4に対しては、詳細を図2から図
4に示す本発明のZ軸組立体5が跨座状態で支持され、
同Z軸組立体5に支持されるZ軸スピンドル6の下端に
固定するタッチプローブ7の検出子が被測定物の表面に
接触される。このZ軸組立体5は図示を省略する周知の
送り手段でX軸ガイド4の長さ方向(X軸方向)に精密
に移動される。On the stone surface plate 2, a portal-type moving body 3 movable along the stone surface surface 2 in the Y-axis direction in a horizontal plane.
Is provided, and an X-axis guide 4 extending in the X-axis direction perpendicular to the Y-axis direction is provided on the same-type moving body 3 that is precisely moved in the Y-axis direction by a driving unit (not shown). .
Further, a Z-axis assembly 5 of the present invention shown in detail in FIGS. 2 to 4 is supported in a straddled state with respect to the X-axis guide 4,
The detector of the touch probe 7 fixed to the lower end of the Z-axis spindle 6 supported by the Z-axis assembly 5 is brought into contact with the surface of the object to be measured. The Z-axis assembly 5 is precisely moved in the length direction (X-axis direction) of the X-axis guide 4 by well-known feeding means (not shown).
【0010】図2及び図3に示すように、本発明による
Z軸組立体5は例えばアルミニューム押出材で作ること
ができる上下方向に伸びた角筒状のZ軸ブラケット8を
備え、このZ軸ブラケット8の内部は隔壁8aにより測
定機ベース1の前後方向(Y軸方向)に隣り合ったスピ
ンドル収容室10とウエイト収容室20とに仕切ってあ
る。そして、同Z軸ブラケット8の後背下部は”L”字
状に切欠いてあり、このL字状切欠き11には剛性のあ
る前記X軸ガイド4を包囲するスライドブロック12が
固定してあり、同スライドブロック12が図示を省略す
る送り手段でX軸方向に送られる。As shown in FIGS. 2 and 3, a Z-axis assembly 5 according to the present invention includes a vertically extending rectangular cylindrical Z-axis bracket 8 made of, for example, an aluminum extruded material. The inside of the shaft bracket 8 is partitioned by a partition wall 8a into a spindle accommodating chamber 10 and a weight accommodating chamber 20 which are adjacent to each other in the front-rear direction (Y-axis direction) of the measuring instrument base 1. The lower rear portion of the Z-axis bracket 8 is notched in an “L” shape, and a slide block 12 surrounding the rigid X-axis guide 4 is fixed to the L-shaped notch 11. The slide block 12 is fed in the X-axis direction by feeding means (not shown).
【0011】また、前記スピンドル収容室10の内部に
は下端部を外部に突出させた状態の矩形断面のZ軸スピ
ンドル6が収容されるが、このZ軸スピンドル6はスピ
ンドル収容室10中に設ける周知の案内手段で垂直方向
(Z軸方向)に案内される。図示実施例の場合、この案
内手段はZ軸スピンドル6を取り囲む4方壁内側に支持
する4個のエアパッド14A,14B,14C,14D
で構成され、図3から理解されるように、これらの各エ
アパッド14A,14B,14C,14Dの給気部14
aはZ軸ブラケット8の隔壁8a、前壁8b、左、右壁
8c,8dを貫通した状態とされ、固定ナット15で対
応壁にそれぞれ締結される。そして、Z軸ブラケット8
の外部に位置する3個の固定ナット15は前壁8b、
左、右壁8c,8dに形成する取付溝16A,16B,
16C中に位置され、同取付溝16A,16B,16C
を塞ぐ目隠し板17A,17B,17Cで外部から遮蔽
される。A Z-axis spindle 6 having a rectangular cross section with a lower end protruding outside is accommodated in the spindle accommodating chamber 10. The Z-axis spindle 6 is provided in the spindle accommodating chamber 10. It is guided in a vertical direction (Z-axis direction) by well-known guide means. In the case of the illustrated embodiment, this guide means comprises four air pads 14A, 14B, 14C, 14D supported inside the four walls surrounding the Z-axis spindle 6.
As can be understood from FIG. 3, the air supply portions 14 of the air pads 14A, 14B, 14C, and 14D are provided.
a penetrates the partition wall 8a, the front wall 8b, the left and right walls 8c, 8d of the Z-axis bracket 8, and is fastened to the corresponding walls by the fixing nuts 15, respectively. And Z-axis bracket 8
The three fixing nuts 15 located outside the front wall 8b,
Mounting grooves 16A, 16B formed in the left and right walls 8c, 8d,
16C, the mounting grooves 16A, 16B, 16C
Are shielded from the outside by blind plates 17A, 17B, 17C that block the space.
【0012】前記Z軸スピンドル6の長さ方向中間部に
は、図3に示すように、図示を省略する駆動ギヤに噛合
できるZ軸方向のラック歯車18及び回折格子スケール
19が固定され、同回折格子スケール19には取付ブラ
ケット21に支持されるホログラム検出素子22が臨ま
され、同ホログラム検出素子22でZ軸スピンドル6の
Z軸方向の送り量が測定される。さらに、前記Z軸スピ
ンドル6の下端部にはZ軸スピンドル6の内部に位置し
たニップル23が固定され、このニップル23に一端を
固定した懸架ワイヤ24はZ軸スピンドル6の上端に形
成する透孔25からスピンドル収容室10中に導出され
る。As shown in FIG. 3, a Z-axis rack gear 18 and a diffraction grating scale 19 that can mesh with a drive gear (not shown) are fixed to the Z-axis spindle 6 in the longitudinal direction middle portion. A hologram detection element 22 supported by a mounting bracket 21 faces the diffraction grating scale 19, and the hologram detection element 22 measures the feed amount of the Z-axis spindle 6 in the Z-axis direction. Further, a nipple 23 located inside the Z-axis spindle 6 is fixed to a lower end of the Z-axis spindle 6. A suspension wire 24 having one end fixed to the nipple 23 has a through hole formed at the upper end of the Z-axis spindle 6. From 25, it is led out into the spindle accommodating chamber 10.
【0013】一方、図3に示すように、前記Z軸ブラケ
ット8のウエイト収容室20中にはZ軸ブラケット8の
内面に一体成形される一対のリブ状ウエイトガイド26
A,26Bが相対向状態で突出され、これらのウエイト
ガイド26A,26Bは重量のあるバランスウエイト2
7の対応する両側面溝28に摺動可能に嵌められ、Z軸
スピンドル6の移動時のバランスウエイト27の振れが
防止される。そして、前述した懸架ワイヤ24の他端は
案内手段を経由してバランスウエイト27のフック27
aに固定され、このバランスウエイト27の重量により
Z軸スピンドル6の重量が平衡される。On the other hand, as shown in FIG. 3, a pair of rib-shaped weight guides 26 integrally formed on the inner surface of the Z-axis bracket 8 are provided in the weight accommodating chamber 20 of the Z-axis bracket 8.
A and 26B are projected in a state of facing each other, and these weight guides 26A and 26B
7 are slidably fitted in the corresponding side grooves 28 to prevent the balance weight 27 from swinging when the Z-axis spindle 6 moves. The other end of the above-described suspension wire 24 is connected to the hook 27 of the balance weight 27 via the guide means.
a, and the weight of the Z-axis spindle 6 is balanced by the weight of the balance weight 27.
【0014】図4は懸架ワイヤ24の案内に用いるプー
リブラケット33を示し、このプーリブラケット33は
Z軸ブラケット8の隔壁8aにねじ固定できる2つの取
付孔29を取付部33aに備え、これらの取付部33a
から直角に曲げた支持部33bには2つの中継プーリ3
1A,31Bが中心軸32でそれぞれ回転可能に支持し
てある。なお、図2の符号”34”は角筒状Z軸ブラケ
ット8の上端部を塞ぐエンドキャップであり、同エンド
キャップ34によりZ軸ブラケット8の内部への異物の
侵入が防止される。FIG. 4 shows a pulley bracket 33 used to guide the suspension wire 24. The pulley bracket 33 has two mounting holes 29 which can be screwed to the partition 8a of the Z-axis bracket 8 in the mounting portion 33a. Part 33a
Two relay pulleys 3 are provided on the support portion 33b bent at a right angle from
1A and 31B are rotatably supported on the central axis 32, respectively. Reference numeral 34 in FIG. 2 denotes an end cap for closing the upper end of the rectangular tubular Z-axis bracket 8, and the end cap 34 prevents foreign matter from entering the inside of the Z-axis bracket 8.
【0015】図示実施例による3次元測定機のZ軸組立
体は、以上のような構造であるから、下後背部にスライ
ドブロック12を固定する中空のZ軸ブラケット8中に
Z軸スピンドル6及びバランスウエイト27を組み込む
だけで完成されるから、部品点数が少なく、製造工程が
簡素化される利点がある。そして、懸架ワイヤ24を誘
導する中継プーリ31A,31Bを取り付けたプーリブ
ラケット33をZ軸ブラケット8の隔壁8aに固定する
だけで、簡単に中継プーリ31A,31Bの取付けを行
うことができ、中空に成形されるZ軸ブラケット8自体
が曲げ荷重に安定した断面係数の大きな部材となるばか
りでなく、同Z軸ブラケット8の壁部に組み付けるエア
パッド14A,14B,14C,14Dの給気部14a
を局部的に目隠し板17A,17B,17Cで覆うだ
け、Z軸ブラケット8を外観部材として利用できる。Since the Z-axis assembly of the three-dimensional measuring machine according to the illustrated embodiment has the above-described structure, the Z-axis spindle 6 and the Z-axis spindle 6 are mounted in a hollow Z-axis bracket 8 for fixing the slide block 12 to the lower back. Since it is completed only by incorporating the balance weight 27, there is an advantage that the number of parts is small and the manufacturing process is simplified. Then, the relay pulleys 31A and 31B can be easily mounted simply by fixing the pulley bracket 33 to which the relay pulleys 31A and 31B for guiding the suspension wire 24 are attached to the partition wall 8a of the Z-axis bracket 8, and the relay pulleys 31A and 31B can be hollowed. The molded Z-axis bracket 8 itself is not only a member having a large sectional modulus that is stable against bending load, but also the air supply portion 14a of the air pads 14A, 14B, 14C, and 14D to be assembled to the wall of the Z-axis bracket 8.
Is only partially covered with the blind plates 17A, 17B, 17C, the Z-axis bracket 8 can be used as an external member.
【0016】本発明は以上の実施の形態に限定されるも
のではない。すなわち、Z軸スピンドルの一端に取り付
けられる検出子はタッチプローブに限らず、非接触型距
離センサや粗さ検出センサあるいは内径測定センサや画
像センサなどでもよい。また、中継プーリ31A,31
Bはエンドキャップ34に取り付けた構造とすることも
できる。このようにすれば、プーリブラケット33を省
略することができる。The present invention is not limited to the above embodiment. That is, the detector attached to one end of the Z-axis spindle is not limited to the touch probe, but may be a non-contact type distance sensor, a roughness detection sensor, an inner diameter measurement sensor, an image sensor, or the like. Also, the relay pulleys 31A, 31
B may have a structure attached to the end cap 34. By doing so, the pulley bracket 33 can be omitted.
【0017】更に、案内手段は、実施例の気体軸受に限
らず、気体の代わりに油を使用して剛性を向上させた油
体軸受や磁気軸受などを使用して案内性能を更に向上さ
せてもよい。また、ウエイトガイド26A,26Bは、
一対(2箇所)のリブ状に限らず、3箇所以上に向けて
もよく、ガイド形状の凸状とし、バランスウエイト27
側にアリ溝状の被ガイド部を設けてもよい。Further, the guide means is not limited to the gas bearing of the embodiment, but may be an oil body bearing or a magnetic bearing whose rigidity is improved by using oil instead of gas to further improve the guiding performance. Is also good. In addition, the weight guides 26A and 26B
It is not limited to a pair (two places) of ribs, but may be directed to three or more places.
A dovetail-shaped guided portion may be provided on the side.
【0018】更に、バランスウエイト27の被ガイド部
(両側面溝28)に耐摩耗性と潤滑性の高い部材(例え
ばターカイト)を設けたり、ウエイトガイド26A,2
6Bのガイド面に給油機構を設けるなどの方法によっ
て、バランスウエイト27の摺動性能を改善することが
できる。また、本発明は3次元測定機のZ軸組立体に限
らず、1次元測長器、粗さ測定機、形状測定機、真円度
測定機などの寸法や表面性状を測定する測定機のZ軸組
立体として用いることができる。Further, a member (for example, turquite) having high wear resistance and lubricity may be provided in the guided portion (both side grooves 28) of the balance weight 27, or the weight guides 26A, 2
The sliding performance of the balance weight 27 can be improved by a method such as providing an oiling mechanism on the guide surface of the balance weight 6B. In addition, the present invention is not limited to a Z-axis assembly of a three-dimensional measuring machine, but is also applicable to a measuring machine for measuring dimensions and surface properties such as a one-dimensional measuring device, a roughness measuring device, a shape measuring device, and a roundness measuring device. It can be used as a Z-axis assembly.
【0019】[0019]
【発明の効果】以上の説明から明らかなように、本発明
によれば、それ自体剛性の高い角筒状のZ軸ブラケット
の内部に、Z軸ブラケット及びバランスウエイトを組み
付けるだけで、簡単にZ軸組立体を完成できるから、部
品点数の削減と組立工程の簡素化を図ることができる。
また、請求項2及び請求項3の発明では、中継プーリの
取付けを非常に簡単に行うことができ、従来の前後カバ
ーの廃止による合理化を行い得る。As is apparent from the above description, according to the present invention, the Z-axis bracket and the balance weight can be easily assembled by simply assembling the Z-axis bracket and the balance weight inside the rigid rectangular Z-axis bracket. Since the shaft assembly can be completed, the number of parts can be reduced and the assembly process can be simplified.
Further, according to the second and third aspects of the present invention, the relay pulley can be attached very easily, and the conventional front and rear covers can be eliminated to rationalize.
【図1】一部を切欠いて示す本発明を施した門型3次元
測定機の全体斜視図である。FIG. 1 is an overall perspective view of a portal type three-dimensional measuring machine to which the present invention is applied, which is partially cut away.
【図2】同3次元測定機に用いる本発明のZ軸組立体の
断面図である。FIG. 2 is a cross-sectional view of the Z-axis assembly of the present invention used for the three-dimensional measuring machine.
【図3】図2の3−3線に沿った拡大断面図である。FIG. 3 is an enlarged sectional view taken along line 3-3 in FIG. 2;
【図4】一部を切欠いて示すプーリブラケットの側面図
である。FIG. 4 is a side view of the pulley bracket partially cut away.
【図5】3次元測定機に用いる従来のZ軸組立体の断面
図である。FIG. 5 is a sectional view of a conventional Z-axis assembly used for a three-dimensional measuring machine.
1 測定機ベース 3 門型移動体 4 X軸ガイド 5 Z軸組立体 6 Z軸スピンドル 7 タッチプローブ(検出子) 8 Z軸ブラケット 8a 隔壁 10 スピンドル収容室 14A〜14D エアパッド 24 懸架ワイヤ 27 バランスウエイト 31A,31B 中継プーリ DESCRIPTION OF SYMBOLS 1 Measuring machine base 3 Portal type moving body 4 X-axis guide 5 Z-axis assembly 6 Z-axis spindle 7 Touch probe (detector) 8 Z-axis bracket 8a Partition wall 10 Spindle accommodating chambers 14A to 14D Air pad 24 Suspension wire 27 Balance weight 31A , 31B Relay pulley
───────────────────────────────────────────────────── フロントページの続き (72)発明者 松本 正和 栃木県宇都宮市下栗町2200番地 株式会社 ミツトヨ内 Fターム(参考) 2F069 AA04 AA52 AA56 AA57 AA66 DD26 GG01 GG07 GG62 HH01 HH09 JJ08 LL02 LL06 MM04 MM13 RR01 RR03 2F078 CA06 CA08 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Masakazu Matsumoto 2200 Shimoguri-cho, Utsunomiya-shi, Tochigi F-term (reference) 2F069 AA04 AA52 AA56 AA57 AA66 DD26 GG01 GG07 GG62 HH01 HH09 JJ08 LL02 LL06 MM03 RR01 2F078 CA06 CA08
Claims (5)
部に取り付けられZ軸方向に移動可能なZ軸スピンドル
を備えたZ軸組立体において、長さ方向に対して直角な
面内で内部をスピンドル収容室とウエイト収容室に仕切
った垂直な角筒状の剛性Z軸ブラケットを備え、前記ス
ピンドル収容室中には懸架ワイヤの一端に固定された前
記Z軸スピンドルが案内手段によりその長さ方向に移動
可能な状態で位置され、前記ウエイト収容室に臨んだZ
軸ブラケットの内面には前記懸架ワイヤの他端に懸垂さ
れてZ軸スピンドルの重量を平衡させるバランスウエイ
トを案内するウエイトガイドが突起されたことを特徴と
する測定機のZ軸組立体。1. A Z-axis assembly having a Z-axis spindle which is attached at one end to a detector for measuring the surface of an object to be measured and is movable in the Z-axis direction. A vertical rectangular cylindrical rigid Z-axis bracket having an interior partitioned into a spindle housing chamber and a weight housing chamber, and the Z-axis spindle fixed to one end of a suspension wire is provided in the spindle housing chamber by guide means. Z which is positioned so as to be movable in the length direction and faces the weight accommodation chamber
A Z-axis assembly for a measuring machine, wherein a weight guide for projecting a balance weight for suspending the weight of the Z-axis spindle, which is suspended from the other end of the suspension wire, protrudes from an inner surface of the shaft bracket.
記懸架ワイヤの中間部を案内する中継プーリを支持した
プーリブラケットが固定されることを特徴とする請求項
1記載の測定機のZ軸組立体。2. The Z-axis of the measuring machine according to claim 1, wherein a pulley bracket supporting a relay pulley for guiding an intermediate portion of the suspension wire is fixed to an upper end surface of the partition wall of the Z-axis bracket. Assembly.
ラケットの内壁には前記案内手段を構成するエアパッド
が支持され、前記Z軸ブラケットの外壁に取り付けられ
る前記エアパッドの給気部は目隠し板で被覆されること
により、前記Z軸ブラケットの外面が外観パネルとされ
ることを特徴とする請求項1または請求項2記載の測定
機のZ軸組立体。3. An air pad constituting the guide means is supported on an inner wall of the Z-axis bracket surrounding the spindle accommodating chamber, and an air supply portion of the air pad attached to an outer wall of the Z-axis bracket is covered with a blind plate. The Z-axis assembly according to claim 1 or 2, wherein the outer surface of the Z-axis bracket is an external panel.
X,Y軸方向に前記Z軸組立体を精密移動させ、前記Z
軸スピンドルをZ軸方向に送って、測定機ベール上に置
かれた被測定物の3次元的な寸法を含む表面性状を測定
する3次元測定機であることを特徴とする請求項1から
請求項3に記載の測定機のZ軸組立体。4. The measuring device precisely moves the Z-axis assembly in X and Y-axis directions orthogonal to each other in a substantially horizontal plane, and
3. A three-dimensional measuring machine which sends a shaft spindle in the Z-axis direction and measures a surface property including three-dimensional dimensions of an object to be measured placed on a measuring machine veil. Item 3. A Z-axis assembly of the measuring machine according to Item 3.
押出材により形成されていることを特徴とする請求項1
から請求項4に記載の測定機のZ軸組立体。5. The Z-axis bracket according to claim 1, wherein the Z-axis bracket is formed of an extruded aluminum material.
A Z-axis assembly for a measuring machine according to claim 4.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000176289A JP3696481B2 (en) | 2000-06-13 | 2000-06-13 | Z-axis assembly of measuring machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000176289A JP3696481B2 (en) | 2000-06-13 | 2000-06-13 | Z-axis assembly of measuring machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2001356012A true JP2001356012A (en) | 2001-12-26 |
JP3696481B2 JP3696481B2 (en) | 2005-09-21 |
Family
ID=18678026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000176289A Expired - Fee Related JP3696481B2 (en) | 2000-06-13 | 2000-06-13 | Z-axis assembly of measuring machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3696481B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009023025A (en) * | 2007-07-18 | 2009-02-05 | Mitsutoyo Corp | Vertical linear moving device |
DE102016216194A1 (en) | 2015-08-31 | 2017-03-02 | Mitutoyo Corporation | gauge |
GB2604069A (en) * | 2019-07-17 | 2022-08-24 | Tokyo Seimitsu Co Ltd | Measurement apparatus |
-
2000
- 2000-06-13 JP JP2000176289A patent/JP3696481B2/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009023025A (en) * | 2007-07-18 | 2009-02-05 | Mitsutoyo Corp | Vertical linear moving device |
DE102016216194A1 (en) | 2015-08-31 | 2017-03-02 | Mitutoyo Corporation | gauge |
JP2017049022A (en) * | 2015-08-31 | 2017-03-09 | 株式会社ミツトヨ | Measuring apparatus |
CN106643487A (en) * | 2015-08-31 | 2017-05-10 | 株式会社三丰 | Measuring apparatus |
US10197374B2 (en) | 2015-08-31 | 2019-02-05 | Mitutoyo Corporation | Measuring apparatus |
GB2604069A (en) * | 2019-07-17 | 2022-08-24 | Tokyo Seimitsu Co Ltd | Measurement apparatus |
DE112020003427B4 (en) | 2019-07-17 | 2023-01-12 | Tokyo Seimitsu Co., Ltd. | Measuring device with drive body for moving a detector in vertical direction |
GB2604069B (en) * | 2019-07-17 | 2023-05-24 | Tokyo Seimitsu Co Ltd | Measurement apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP3696481B2 (en) | 2005-09-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7373807B2 (en) | Drive unit | |
EP1715288A1 (en) | Surface roughness and/ or contour shape measuring apparatus | |
US7239050B2 (en) | Uniaxial drive unit and surface shape measuring apparatus using the same | |
US11054300B2 (en) | Weighing device with a movable mounting unit | |
JP6743151B2 (en) | Windshield for weighing instrument | |
CN106370348B (en) | Measuring unit and measuring assembly for measuring an unbalance force | |
JP2006194909A (en) | Apparatus for measuring surface properties | |
JP2001356012A (en) | Z-axis assembly of measuring instrument | |
JP3988860B2 (en) | Friction drive device and measuring machine using the same | |
JP5437620B2 (en) | measuring device | |
US4939941A (en) | Combined distance and diameter measuring apparatus for wheel balancing machine | |
JP2009083069A (en) | Driver, working machine and measurement machine using the same | |
JPH0236683Y2 (en) | ||
JP7165417B2 (en) | Portable Machine Health Checkup System | |
CN211373528U (en) | Adjustable laser profile sensor | |
JP3220197B2 (en) | Air slide for straightness measuring instrument | |
JP2012032319A (en) | Three-dimensional measuring machine | |
JPH0525789Y2 (en) | ||
JP3497126B2 (en) | Measuring instrument spindle support structure | |
RU2009117235A (en) | MOBILE MACHINE GROUP CONTAINING MOVING SUPPORT, SPINDLE ASSEMBLY AND SPINDLE COMPLETED WITH THE POSSIBILITY OF DETECTING HEAT DEFORMATION OF THE SPINDLE ASSEMBLY | |
KR100828918B1 (en) | Concentricity measurement method and measurement jig for gear casing | |
JP3434885B2 (en) | Length measuring device | |
JP7309340B2 (en) | Movement mechanism and measuring machine | |
KR20030088299A (en) | Device for monitoring dynamic balancing | |
JP2623896B2 (en) | Acceleration measuring device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040329 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050617 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20050628 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20050629 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 3696481 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080708 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110708 Year of fee payment: 6 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140708 Year of fee payment: 9 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |