JP2001311954A5 - - Google Patents

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JP2001311954A5
JP2001311954A5 JP2000134189A JP2000134189A JP2001311954A5 JP 2001311954 A5 JP2001311954 A5 JP 2001311954A5 JP 2000134189 A JP2000134189 A JP 2000134189A JP 2000134189 A JP2000134189 A JP 2000134189A JP 2001311954 A5 JP2001311954 A5 JP 2001311954A5
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conductive layer
liquid crystal
display device
crystal display
pair
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JP2000134189A
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JP3785900B2 (en
JP2001311954A (en
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Claims (10)

一対の基板と、前記一対の基板に挟持された液晶層とを有する液晶表示装置において、
前記一対の基板の一方に形成される複数の走査信号線と、前記走査信号線とマトリクス状に交差する複数の映像信号線のいずれかが第１の導電層と第２の導電層からなる積層構造を含み、前記第１の導電層はＡｌを主成分とし、前記第２の導電層はＺｒを含有する
Ｍｏを主成分とし、前記Ｚｒの含有量が、２.６ 重量％以上で２３重量％以下であることを特徴とする液晶表示装置。In a liquid crystal display device including a pair of substrates and a liquid crystal layer sandwiched between the pair of substrates,
A plurality of scanning signal lines formed on one of the pair of substrates, and a plurality of video signal lines intersecting the scanning signal lines in a matrix, each including a first conductive layer and a second conductive layer; The first conductive layer is mainly composed of Al, the second conductive layer is mainly composed of Mo containing Zr, and the Zr content is not less than 2.6% by weight and 23% by weight. % Or less. 一対の基板と、前記一対の基板に挟持された液晶層とを有する液晶表示装置において、
前記一対の基板の一方に形成される複数の走査信号線と、前記走査信号線とマトリクス状に交差する複数の映像信号線のいずれかが第１の導電層と第２の導電層からなる積層構造を含み、前記第１の導電層はＡｌを主成分とし、前記第２の導電層はＺｒを含有する
Ｍｏを主成分とし、前記Ｚｒの含有量が、４.０ 重量％以上で１４重量％以下であることを特徴とする液晶表示装置。In a liquid crystal display device including a pair of substrates and a liquid crystal layer sandwiched between the pair of substrates,
A plurality of scanning signal lines formed on one of the pair of substrates, and a plurality of video signal lines intersecting the scanning signal lines in a matrix, each including a first conductive layer and a second conductive layer; Wherein the first conductive layer is mainly composed of Al, the second conductive layer is mainly composed of Mo containing Zr, and the content of Zr is not less than 4.0% by weight and 14% by weight. % Or less. 前記第２の導電層は、ＺｒとＨｆを含有するＭｏを主成分とすることを特徴とする請求項１又は２に記載の液晶表示装置。The liquid crystal display device according to claim 1, wherein the second conductive layer mainly contains Mo containing Zr and Hf. 第１の導電層と第２の導電層からなる積層構造を有するのは、前記走査信号線であることを特徴とする請求項１又は２に記載の液晶表示装置。3. The liquid crystal display device according to claim 1, wherein the scanning signal line has a laminated structure including a first conductive layer and a second conductive layer. 前記液晶表示装置は、前記複数の走査信号線及び映像信号線で囲まれる領域に形成された複数の画素内に、前記一対の基板の一方に形成される少なくとも一対の画素電極と対向電極を有し、該画素電極は、前記走査信号線からの走査信号の供給に基づいて駆動される薄膜トランジスタを介して前記映像信号線からの映像信号が供給され、該対向電極は、前記複数の画素に渡って形成される対向電圧信号線を介して基準電圧が供給され、前記第１の導電層と第２の導電層からなる積層構造を有するのは、前記対向電圧信号線又は前記対向電極であることを特徴とする請求項１記載の液晶表示装置。The liquid crystal display device has at least a pair of pixel electrodes and a counter electrode formed on one of the pair of substrates in a plurality of pixels formed in a region surrounded by the plurality of scanning signal lines and the video signal lines. The pixel electrode is supplied with a video signal from the video signal line via a thin film transistor driven based on the supply of a scanning signal from the scanning signal line, and the counter electrode extends over the plurality of pixels. It is the counter voltage signal line or the counter electrode that is supplied with a reference voltage via a counter voltage signal line formed by the above and has a laminated structure including the first conductive layer and the second conductive layer. The liquid crystal display device according to claim 1, wherein: 前記Ａｌを主成分とする第１の導電層は陽極化成されていることを特徴とする請求項１又は５に記載の液晶表示装置。The liquid crystal display device according to claim 1, wherein the first conductive layer containing Al as a main component is anodized. 一対の基板と、前記一対の基板に挟持された液晶層とを有する液晶表示装置において、
前記一対の基板の一方に形成される複数の走査信号線と、前記走査信号線とマトリクス状に交差する複数の映像信号線のいずれかが第１の導電層と第２の導電層と第３の導電層からなる３層構造を含み、前記第１の導電層はＡｌを主成分とし、前記第２の導電層は
Ｚｒを含有するＭｏを主成分とし、前記第３の導電層はＭｏを主成分とし、前記Ｚｒの含有量が、４.０ 重量％以上で１４重量％以下であることを特徴とする液晶表示装置。In a liquid crystal display device including a pair of substrates and a liquid crystal layer sandwiched between the pair of substrates,
A plurality of scanning signal lines formed on one of the pair of substrates and a plurality of video signal lines intersecting the scanning signal lines in a matrix are formed of a first conductive layer, a second conductive layer, and a third conductive layer. Wherein the first conductive layer is mainly composed of Al, the second conductive layer is mainly composed of Mo containing Zr, and the third conductive layer is composed of Mo. A liquid crystal display device as a main component, wherein the content of Zr is 4.0% by weight or more and 14% by weight or less. 前記第２の導電層は、ＺｒとＨｆを含有するＭｏを主成分とすることを特徴とする請求項７記載の液晶表示装置。The liquid crystal display device according to claim 7, wherein the second conductive layer is mainly composed of Mo containing Zr and Hf. 第１の導電層と第２の導電層からなる積層構造を有するのは、前記走査信号線であることを特徴とする請求項７記載の液晶表示装置。8. The liquid crystal display device according to claim 7, wherein the scanning signal line has a laminated structure including a first conductive layer and a second conductive layer. 前記液晶表示装置は、前記複数の走査信号線及び映像信号線で囲まれる領域に形成された複数の画素内に、前記一対の基板の一方に形成される少なくとも一対の画素電極と対向電極を有し、該画素電極は、前記走査信号線からの走査信号の供給に基づいて駆動される薄膜トランジスタを介して前記映像信号線からの映像信号が供給され、該対向電極は、前記複数の画素に渡って形成される対向電圧信号線を介して基準電圧が供給され、前記第１の導電層と第２の導電層と第３の導電層からなる３層構造を有するのは、前記対向電圧信号線又は前記対向電極であることを特徴とする請求項７記載の液晶表示装置。The liquid crystal display device has at least a pair of pixel electrodes and a counter electrode formed on one of the pair of substrates in a plurality of pixels formed in a region surrounded by the plurality of scanning signal lines and the video signal lines. The pixel electrode is supplied with a video signal from the video signal line via a thin film transistor driven based on the supply of a scanning signal from the scanning signal line, and the counter electrode extends over the plurality of pixels. The reference voltage is supplied through a counter voltage signal line formed by the above-described method, and the reference voltage signal line has a three-layer structure including the first conductive layer, the second conductive layer, and the third conductive layer. 8. The liquid crystal display device according to claim 7, wherein the liquid crystal display device is the counter electrode.
JP2000134189A 2000-04-28 2000-04-28 Liquid crystal display device and manufacturing method thereof Expired - Fee Related JP3785900B2 (en)

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