JP2001272126A - Pulse tube refrigerating machine, and superconductive magnet device using pulse tube refrigerating machine - Google Patents
Pulse tube refrigerating machine, and superconductive magnet device using pulse tube refrigerating machineInfo
- Publication number
- JP2001272126A JP2001272126A JP2000085344A JP2000085344A JP2001272126A JP 2001272126 A JP2001272126 A JP 2001272126A JP 2000085344 A JP2000085344 A JP 2000085344A JP 2000085344 A JP2000085344 A JP 2000085344A JP 2001272126 A JP2001272126 A JP 2001272126A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- pulse tube
- refrigerant gas
- cryogenic
- regenerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003507 refrigerant Substances 0.000 claims abstract description 165
- 238000007710 freezing Methods 0.000 claims abstract 3
- 230000008014 freezing Effects 0.000 claims abstract 3
- 238000005057 refrigeration Methods 0.000 claims description 65
- 238000001816 cooling Methods 0.000 claims description 53
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 238000007599 discharging Methods 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 6
- 238000009434 installation Methods 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1406—Pulse-tube cycles with pulse tube in co-axial or concentric geometrical arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1408—Pulse-tube cycles with pulse tube having U-turn or L-turn type geometrical arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1418—Pulse-tube cycles with valves in gas supply and return lines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1424—Pulse tubes with basic schematic including an orifice and a reservoir
- F25B2309/14241—Pulse tubes with basic schematic including an orifice reservoir multiple inlet pulse tube
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
- F25D19/006—Thermal coupling structure or interface
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、パルス管を複数段
に配置して複数段膨張方式を採用するパルス管冷凍機お
よびパルス管冷凍機を用いた超電導磁石装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse tube refrigerator employing a multistage expansion system in which pulse tubes are arranged in a plurality of stages, and a superconducting magnet apparatus using the pulse tube refrigerator.
【０００２】[0002]
【従来の技術】例えば、超電導磁石装置を極低温に維持
して運転させる蓄冷式の冷凍機には、ギフォード・マク
マホン冷凍機やスターリング冷凍機等数多の形式のもの
が開示されているが、その中でも構成が比較的簡素化さ
れ、かつ極低温部に駆動部がないため低振動運転ができ
るパルス管冷凍機が、最近、注目されている。2. Description of the Related Art For example, various types of regenerative refrigerators, such as Gifford McMahon refrigerators and Stirling refrigerators, which operate a superconducting magnet device while maintaining the superconducting magnet device at a very low temperature, are disclosed. Among them, a pulse tube refrigerator that has a relatively simplified configuration and can perform a low-vibration operation because there is no drive unit in the cryogenic part has recently attracted attention.
【０００３】このパルス管冷凍機は、高圧冷媒ガス供給
運転時、図９に示すように、コンプレッサ１００で生成
された高圧冷媒ガスを、高圧系ＨＰ、ロータリーバルブ
１０１、第１段蓄冷器１０２、第１段冷却ステージ（第
１段コールドヘッド）１０３を介して供給し、第１段冷
却ステージ１０３でその一部を第１段パルス管１０４に
分配・供給するとともに、残りを第２段蓄冷器１０５、
第２段冷却ステージ（第２段コールドヘッド）１０６を
介して別置きの第２段パルス管１０７に供給している。In this pulse tube refrigerator, during a high-pressure refrigerant gas supply operation, as shown in FIG. 9, a high-pressure refrigerant gas generated by a compressor 100 is supplied to a high-pressure system HP, a rotary valve 101, a first-stage regenerator 102, It is supplied through a first cooling stage (first cold head) 103, a part of which is distributed and supplied to the first pulse tube 104 by the first cooling stage 103, and the rest is stored in the second regenerator. 105,
The gas is supplied to a second pulse tube 107 provided separately via a second cooling stage (second cold head) 106.
【０００４】また、パルス管冷凍機は、コンプレッサ１
００からの高圧冷媒ガスを、第１段位相調整系１０８お
よび第２段位相調整系１０９をそれぞれ分配・供給して
いる。[0004] The pulse tube refrigerator has a compressor 1
The high-pressure refrigerant gas from 00 is distributed and supplied to the first-stage phase adjustment system 108 and the second-stage phase adjustment system 109, respectively.
【０００５】第１段位相調整系１０８に分配・供給され
た高圧冷媒ガスは、その一部を第１段バッファタンク１
１０に分配・供給され、残りを第１段パルス管１０４に
分配・供給されている。また、第２段位相調整系１０９
に分配・供給された高圧冷媒ガスは、第１段位相調整系
１０８と同様に、その一部を第２段バッファタンク１１
１に分配・供給され、残りを第２段パルス管１０７に分
配・供給される。A part of the high-pressure refrigerant gas distributed and supplied to the first-stage phase adjusting system 108 is
10 and the rest is distributed and supplied to the first-stage pulse tube 104. Also, the second-stage phase adjustment system 109
The high-pressure refrigerant gas distributed and supplied to the second stage buffer tank 11, as in the first stage phase adjustment system 108,
1 and the rest is distributed and supplied to the second-stage pulse tube 107.
【０００６】一方、冷媒ガス排気運転時、パルス管冷凍
機は、ロータリーバルブ１０１のポート１１２を図示の
破線の位置に回転移動させ、第１段パルス管１０４内の
冷媒ガスを膨張させて温度を低く下げ、その一部を第１
段冷却ステージ１０３を介して第２段蓄冷器１０５から
の冷媒ガスとともに第１段蓄冷器１０２、ロータリーバ
ルブ１０１のポート１１２を経てコンプレッサ１００の
低圧系ＬＰに戻している。On the other hand, during the operation of exhausting the refrigerant gas, the pulse tube refrigerator rotates the port 112 of the rotary valve 101 to a position shown by a broken line in the drawing to expand the refrigerant gas in the first-stage pulse tube 104 to reduce the temperature. Lower it, part of it first
The refrigerant gas is returned to the low-pressure system LP of the compressor 100 via the first-stage regenerator 102 and the port 112 of the rotary valve 101 together with the refrigerant gas from the second-stage regenerator 105 via the stage cooling stage 103.
【０００７】また、パルス管冷凍機は、第１段パルス管
１０４内の膨張後の冷媒ガスの残りを、第１段バッファ
タンク１１０内の冷媒ガスとともに第１段位相調整系１
０８、ロータリーバルブ１０１のポート１１２を経てコ
ンプレッサ１００の低圧系ＬＰに戻している。[0007] The pulse tube refrigerator uses the first stage phase adjustment system 1 with the refrigerant gas in the first stage buffer tank 110 together with the refrigerant gas in the first stage pulse tube 104 after expansion.
08, return to the low-pressure system LP of the compressor 100 via the port 112 of the rotary valve 101.
【０００８】また、パルス管冷凍機は、第２段パルス管
１０７内の膨張後の冷媒ガスを、上述と同様に、第２段
位相調整系１０９、ロータリーバルブ１０１のポート１
１２を経てコンプレッサ１００の低圧系ＬＰに戻してい
る。In the pulse tube refrigerator, the expanded refrigerant gas in the second stage pulse tube 107 is supplied to the second stage phase adjustment system 109 and the port 1 of the rotary valve 101 in the same manner as described above.
After returning to 12, the pressure is returned to the low-pressure system LP of the compressor 100.
【０００９】なお、パルス管冷凍機は、第１段バッファ
タンク１１０、第２段バッファタンク１１１のそれぞれ
に冷媒ガス逃し系１１４，１１３を設け、冷媒ガスの給
排運転中、第１段蓄冷器１０２および第１段パルス管１
０４等に誘起する循環流れを抑制するため、第１段バッ
ファタンク１１０、第２段バッファタンク１１１内の冷
媒ガスを常にコンプレッサ１００の低圧系ＬＰに流して
いる。In the pulse tube refrigerator, the first stage buffer tank 110 and the second stage buffer tank 111 are provided with refrigerant gas release systems 114 and 113, respectively. 102 and first stage pulse tube 1
In order to suppress the circulating flow induced in the buffer tank 04 or the like, the refrigerant gas in the first-stage buffer tank 110 and the second-stage buffer tank 111 is always flowing to the low-pressure system LP of the compressor 100.
【００１０】このように、従来のパルス管冷凍機では、
ロータリーバルブ１０１のポート１１２を高圧系ＨＰ、
低圧系ＬＰに交互に回転移動して冷媒ガスの給排を連続
的に行わせ、その際、冷媒ガスを膨張させ、温度を低く
させて第１段冷却ステージ１０３に伝熱板１１５を介し
て、例えば熱シールド１１７に接続させ、また第２段冷
却ステージ１０６に伝熱板１１６を介して、例えば超電
導コイル１１８を接続させ、熱シールド１１７および超
電導コイル１１８を極低温状態に維持させていた。Thus, in the conventional pulse tube refrigerator,
The port 112 of the rotary valve 101 is connected to a high-pressure system HP,
The low-pressure system LP is rotated and rotated alternately to continuously supply and discharge the refrigerant gas. At this time, the refrigerant gas is expanded and the temperature is lowered to the first cooling stage 103 via the heat transfer plate 115. For example, a superconducting coil 118 is connected to the heat shield 117 via the heat transfer plate 116 to the second cooling stage 106, and the heat shield 117 and the superconducting coil 118 are maintained in a very low temperature state.
【００１１】[0011]
【発明が解決しようとする課題】図９で示した従来のパ
ルス管冷凍機は、第１段冷却ステージ１０３や第２段冷
却ステージ１０６に駆動部がないので、運転が低振動に
なっている優れた面を持つものの、冷媒ガスを膨張させ
る部分と蓄冷させる部分とを一つの容器等で兼用するこ
とができず、このため冷凍能力を同じにした場合、ギフ
ォード・マクマホン冷凍機やスターリング冷凍機に較べ
てシリンダの容積が大きくなり、設置面積を多く必要と
する等の不具合があった。The conventional pulse tube refrigerator shown in FIG. 9 has a low vibration operation because the first cooling stage 103 and the second cooling stage 106 have no drive unit. Although it has excellent surfaces, the part that expands refrigerant gas and the part that accumulates cold cannot be used in one container, etc., so if the refrigerating capacity is the same, Gifford McMahon refrigerator or Stirling refrigerator However, there is a problem in that the volume of the cylinder is larger than that of the cylinder, and a large installation area is required.
【００１２】また、図９で示した従来のパルス管冷凍機
では、冷凍能力を向上させるために、第１段パルス管１
０４と第２段パルス管１０７との複数段膨張部分を備え
ており、第２段パルス管１０７を第１段パルス管１０４
の外側に配置しているため、この第２段パルス管１０７
の設置位置を考慮して第２段冷却ステージ１０６を機械
加工しなければならず、機械加工時間を多く必要とする
不都合があった。Further, in the conventional pulse tube refrigerator shown in FIG. 9, the first stage pulse tube 1
04 and a second-stage pulse tube 107, and the second-stage pulse tube 107 is connected to the first-stage pulse tube 104.
, The second-stage pulse tube 107
The second cooling stage 106 must be machined in consideration of the installation position of the second stage, and there is a disadvantage that much machining time is required.
【００１３】また、最近では、２段式パルス管冷凍機も
提案されているが、各段毎に独立の位相調整部がなく、
このため冷凍能力の増加が僅かであり、比較的容量の大
きい超電導コイル３ｂを極低温状態に維持させて通電運
転をさせることができない等の問題点があった。Although a two-stage pulse tube refrigerator has recently been proposed, there is no independent phase adjuster for each stage.
For this reason, there is a problem that the refrigerating capacity is slightly increased and the relatively large-capacity superconducting coil 3b cannot be maintained at an extremely low temperature for the energizing operation.
【００１４】本発明は、このような事情に基づいてなさ
れたもので、構造簡素な多段膨張式のパルス管にすると
ともに、各パルス管の位相調整を独立に実施でき、より
一層冷凍効率を向上させたパルス管冷凍機およびパルス
管冷凍機を用いた超電導磁石装置を提供することを目的
とする。The present invention has been made in view of such circumstances, and in addition to a multistage inflatable pulse tube having a simple structure, the phase of each pulse tube can be adjusted independently to further improve the refrigeration efficiency. It is an object of the present invention to provide a pulse tube refrigerator and a superconducting magnet device using the pulse tube refrigerator.
【００１５】[0015]
【課題を解決するための手段】本発明に係るパルス管冷
凍機は、上述の目的を達成するために、請求項１に記載
したように、系内に冷媒ガスを給排させる冷媒ガス給排
系と、この冷媒ガス給排系の冷媒ガスの給排により極低
温に維持させる極低温系を第１段極低温冷凍部と第２段
極低温部とに区分けし、区分けした第１段極低温冷凍部
と第２段極低温冷凍部とをまとめて一つにして収容する
シリンダと、上記第１段極低温冷凍部および上記第２段
極低温冷凍部に冷媒ガスを給排させる際、冷媒ガスの圧
力変動と体積流量との位相差を調整する位相調整系とを
備えたものである。In order to achieve the above object, a pulse tube refrigerator according to the present invention has a refrigerant gas supply / discharge system for supplying / discharging a refrigerant gas to / from a system. System and a cryogenic system for maintaining the cryogenic temperature by supplying and discharging the refrigerant gas of the refrigerant gas supply and discharge system into a first-stage cryogenic refrigeration unit and a second-stage cryogenic unit, and the divided first-stage electrode A cylinder for accommodating the low-temperature refrigeration unit and the second-stage cryogenic refrigeration unit together, and supplying and discharging the refrigerant gas to and from the first-stage cryogenic refrigeration unit and the second-stage cryogenic refrigeration unit; A phase adjusting system for adjusting a phase difference between the pressure fluctuation of the refrigerant gas and the volume flow rate.
【００１６】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項２に記載したように、シリ
ンダは、大口径部分と比較的小口径部分として形成して
組み合わせるとともに、頭部側に高温端部を、中間部分
に第１段冷却ステージを、底部側に第２段冷却ステージ
をそれぞれ備える一方、上記大口径部分に第１段極低温
冷凍部を収容させ、上記比較的小口径部分に第２段極低
温冷凍部を収容させたものである。In the pulse tube refrigerator according to the present invention, the cylinder is formed as a large-diameter portion and a relatively small-diameter portion and combined with each other to achieve the above object. A high-temperature end is provided on the head side, a first-stage cooling stage is provided on the middle part, and a second-stage cooling stage is provided on the bottom side. The second-stage cryogenic refrigeration unit is accommodated in a relatively small-diameter portion.
【００１７】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項３に記載したように、第１
段極低温冷凍部は、シリンダの大口径部分の中央に配置
され、高温端部からシリンダの比較的小口径部分の第２
段冷却ステージに向って延びる第２段極低温冷凍部の第
２段パルス管の外側に同心的に配置され、高温端部から
第１段冷却ステージに向って延びる第１段蓄冷器と、こ
の第１段蓄冷器の外側に同心的に配置され、高温端部か
ら第１段冷却ステージに向って延びる第１段パルス管
と、上記第１段蓄冷器と上記第１段パルス管との間の上
記第１段冷却ステージ側に設けたスペーサをとを備えた
ものである。According to a third aspect of the present invention, a pulse tube refrigerator according to the present invention is provided.
The step cryogenic refrigeration unit is disposed at the center of the large-diameter portion of the cylinder, and the second portion of the relatively small-diameter portion of the cylinder is located from the hot end.
A first-stage regenerator disposed concentrically outside the second-stage pulse tube of the second-stage cryogenic refrigerator extending toward the first-stage cooling stage and extending from the high-temperature end toward the first-stage cooling stage; A first-stage pulse tube disposed concentrically outside the first-stage regenerator and extending from the high-temperature end toward the first-stage cooling stage, between the first-stage regenerator and the first-stage pulse tube; And a spacer provided on the first cooling stage side.
【００１８】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項４に記載したように、第２
段極低温冷凍部は、シリンダの大口径部分の中央に配置
され、高温端からシリンダの比較的小口径の第２段冷却
ステージに向って延びる第２段パルス管と、この第２段
パルス管の外側に同心的に配置され、第１段冷却ステー
ジからシリンダの比較的小口径部分の第２段冷却ステー
ジに向って延びる第２段蓄冷器と、この第２段蓄冷器と
上記第２段パルス管との間の上記第２段冷却ステージ側
に設けたスペーサと、このスペーサから上記第２段パル
ス管に流れる冷媒ガスの流れを整流する整流板とを備え
たものである。In order to achieve the above object, the pulse tube refrigerator according to the present invention has the following features.
A second stage pulse tube disposed at the center of the large diameter portion of the cylinder and extending from the high temperature end to a second stage cooling stage having a relatively small diameter of the cylinder; A second stage regenerator arranged concentrically outside the first stage and extending from the first stage cooling stage toward the second stage cooling stage of a relatively small diameter portion of the cylinder; and the second stage regenerator and the second stage regenerator A spacer provided on the side of the second cooling stage between the pulse tube and a rectifying plate for rectifying the flow of the refrigerant gas flowing from the spacer to the second stage pulse tube.
【００１９】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項５に記載したように、位相
調整系は、第１段位相調整系と第２段位相調整系とに区
分けするとともに、各段位相調整系を、冷媒ガス給排系
と極低温系の第１段極低温冷凍部とを互いに接続させる
蓄冷器冷媒ガス往復配管に接続したものである。In order to achieve the above object, the pulse tube refrigerator according to the present invention has a phase adjustment system comprising a first stage phase adjustment system and a second stage phase adjustment system. And each stage phase adjustment system is connected to a regenerator refrigerant gas reciprocating pipe for connecting a refrigerant gas supply / discharge system and a cryogenic first stage cryogenic refrigeration unit to each other.
【００２０】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項６に記載したように、第１
段位相調整系は、第１段極低温部の第１段パルス管に接
続し、中間部分に第１段オリフィスバルブを介装させた
第１段パルス管位相調整配管と、この第１段パルス管位
相調整配管から分岐し、中間部分に第１段ダブルインレ
ットバルブを介装させて冷媒ガス給排系と極低温系の第
１段極低温冷凍部とを互いに接続させる蓄冷器冷媒ガス
往復配管に接続した第１段バイパス配管とを備えたもの
である。In order to achieve the above object, a pulse tube refrigerator according to the present invention has the following features.
The first-stage pulse tube phase adjustment pipe is connected to the first-stage pulse tube of the first-stage cryogenic portion, and a first-stage orifice valve is interposed at an intermediate portion. A regenerator refrigerant gas reciprocating pipe that branches off from the pipe phase adjustment pipe and connects a refrigerant gas supply / discharge system and a cryogenic first-stage cryogenic refrigeration unit to each other with a first-stage double inlet valve interposed in the middle part. And a first-stage bypass pipe connected to the first stage.
【００２１】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項７に記載したように、第２
段位相調整系は、第２段極低温部の第２段パルス管に接
続し、中間部分に第２段オリフィスバルブを介装させた
第２段パルス管位相調整配管と、この第２段パルス管位
相調整配管から分岐し、中間部分に第２段ダブルインレ
ットバルブを介装させて冷媒ガス給排系と極低温系の第
２段極低温冷凍部とを互いに接続させる蓄冷器冷媒ガス
往復配管に接続した第２段バイパス配管とを備えたもの
である。According to a seventh aspect of the present invention, there is provided a pulse tube refrigerator according to the present invention.
The second-stage pulse adjusting system includes a second-stage pulse tube connected to the second-stage cryogenic portion, a second-stage pulse tube having an intermediate portion provided with a second-stage orifice valve, and a second-stage pulse. A regenerator refrigerant gas reciprocating pipe that branches off from a pipe phase adjustment pipe and connects a refrigerant gas supply / discharge system and a cryogenic second-stage cryogenic refrigeration unit to each other with a second-stage double inlet valve interposed in the middle part. And a second-stage bypass pipe connected to the second stage.
【００２２】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項８に記載したように、位相
調整系は、第１段極低温冷凍部の第１段パルス管に接続
する第１段パルス管位相調整配管と、第２段極低温冷凍
部の第２段パルス管に接続する第２段パルス管位相調整
配管とに共用のバッファタンクを設けたものである。In the pulse tube refrigerator according to the present invention, in order to achieve the above object, as described in claim 8, a phase adjustment system is provided in the first stage pulse tube of the first stage cryogenic refrigerator. A common buffer tank is provided for the first-stage pulse tube phase adjusting pipe to be connected and the second-stage pulse tube phase adjusting tube connected to the second-stage pulse tube of the second-stage cryogenic refrigerator.
【００２３】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項９に記載したように、位相
調整系は、第１段極低温冷凍部の第１段パルス管に接続
する第１段パルス管位相調整配管と、第２段極低温冷凍
部の第２段パルス管に接続する第２段パルス管位相調整
配管とに個々に別々のバッファタンクを設けたものであ
る。In the pulse tube refrigerator according to the present invention, in order to achieve the above object, as described in claim 9, a phase adjustment system is provided in the first stage pulse tube of the first stage cryogenic refrigerator. Separate buffer tanks are provided for the first-stage pulse tube phase adjusting pipe to be connected and the second-stage pulse tube phase adjusting tube to be connected to the second-stage pulse tube of the second-stage cryogenic refrigerator. .
【００２４】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項１０に記載したように、位
相調整系は、第２段極低温冷凍部の第２段パルス管に接
続する第２段パルス管位相調整配管にバッファタンクを
設けたものである。In the pulse tube refrigerator according to the present invention, in order to achieve the above object, as described in claim 10, a phase adjustment system is provided in the second stage pulse tube of the second stage cryogenic refrigerator. The buffer tank is provided in the second-stage pulse tube phase adjusting pipe to be connected.
【００２５】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項１１に記載したように、バ
ッファタンクは、冷媒ガス給排系の低圧系に接続させる
冷媒ガス逃し配管を備えたものである。In order to achieve the above object, in the pulse tube refrigerator according to the present invention, the buffer tank has a refrigerant gas release pipe connected to a low pressure system of a refrigerant gas supply / discharge system. It is provided with.
【００２６】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項１２に記載したように、冷
媒逃し配管は、セカンドオリフィスバルブを備えたもの
である。In the pulse tube refrigerator according to the present invention, in order to achieve the above-mentioned object, the refrigerant escape pipe is provided with a second orifice valve.
【００２７】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項１３に記載したように、冷
媒ガス給排系は、コンプレッサで生成された高圧の冷媒
ガスを第１段極低温冷凍部および第２段極低温冷凍部に
供給する高圧系と、第１段極低温冷凍部および第２段極
低温冷凍部からの冷媒ガスを上記コンプレッサに戻す低
圧系をと備えるとともに、上記高圧系と上記低圧系とを
交互に切り替えるロータリーバルブとを備えたものであ
る。In order to achieve the above object, in the pulse tube refrigerator according to the present invention, the refrigerant gas supply / discharge system uses a high-pressure refrigerant gas generated by the compressor as the first refrigerant gas. A high-pressure system for supplying the stage cryogenic refrigeration unit and the second stage cryogenic refrigeration unit; and a low-pressure system for returning the refrigerant gas from the first stage cryogenic refrigeration unit and the second stage cryogenic refrigeration unit to the compressor. And a rotary valve for alternately switching between the high-pressure system and the low-pressure system.
【００２８】本発明に係るパルス管冷凍機は、上述の目
的を達成するために、請求項１４に記載したように、ロ
ータリーバルブは、第１段極低温冷凍部の第１段蓄冷
器、第１段パルス管および第２段極低温部の第２段蓄冷
器、第２段パルス管の個数に対応させて設けたものであ
る。In order to achieve the above object, in the pulse tube refrigerator according to the present invention, as set forth in claim 14, the rotary valve comprises a first stage regenerator of the first stage cryogenic refrigerator, The number of the first-stage pulse tubes, the second-stage regenerators in the second-stage cryogenic section, and the number of the second-stage pulse tubes are provided.
【００２９】また、本発明に係るパルス管冷凍機を用い
た超電導磁石装置は、上述の目的を達成するために、請
求項１５に記載したように、真空容器内に設けた熱シー
ルドに収容する超電導コイルと、この超電導コイルに伝
熱板を介して接続し、極低温系と冷媒ガス給排・位相調
整兼用系とを組み合わせたパルス管冷凍機とを備えたも
のである。In order to achieve the above object, a superconducting magnet device using a pulse tube refrigerator according to the present invention is housed in a heat shield provided in a vacuum vessel. A superconducting coil and a pulse tube refrigerator connected to the superconducting coil via a heat transfer plate and combining a cryogenic system and a refrigerant gas supply / discharge / phase adjustment system are provided.
【００３０】また、本発明に係るパルス管冷凍機を用い
た超電導磁石装置は、上述の目的を達成するために、請
求項１６に記載したように、冷媒ガス給排・位相調整兼
用系は、ケーシング内の中央に区画した第２段パルス管
用ピストン室と、この第２段パルス管用ピストン室の外
側に同心的に区画した第１段蓄冷器用ピストン室と、こ
の第１段蓄冷器用ピストン室の外側に同心的に区画した
第１段パルス管用ピストン室と、上記第２段パルス管用
ピストン室に収容する第２段パルス管用ピストンと、上
記第１段蓄冷器用ピストン室に収容する第１段蓄冷器用
ピストンおよび上記第１段パルス管用ピストン室に収容
する第１段パルス管用ピストンとのそれぞれを進退移動
させるとともに、上記第２段パルス管用ピストン、上記
第１段蓄冷器用ピストンおよび上記第１段パルス管用ピ
ストンのそれぞれの位相角を調整するクランク軸とを備
えたものである。Further, in order to achieve the above object, a superconducting magnet apparatus using a pulse tube refrigerator according to the present invention has a refrigerant gas supply / discharge / phase adjustment system comprising: A second-stage pulse tube piston chamber partitioned in the center of the casing, a first-stage regenerator piston chamber concentrically partitioned outside the second-stage pulse tube piston chamber, and a first-stage regenerator piston chamber. A first-stage pulse tube piston chamber concentrically defined outside, a second-stage pulse tube piston housed in the second-stage pulse tube piston chamber, and a first-stage cold storage housed in the first-stage regenerator piston chamber The piston for the first stage and the piston for the first stage are stored in the piston chamber for the first stage and the first stage. Tons and is obtained by a crank shaft to adjust the respective phase angle of said first stage pulse tube piston.
【００３１】[0031]
【発明の実施の形態】以下、本発明に係るパルス管冷凍
機の実施形態を図面および図面に付した符号を引用して
説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a pulse tube refrigerator according to the present invention will be described with reference to the drawings and reference numerals attached to the drawings.
【００３２】図１は、本発明に係るパルス管冷凍機の第
１実施形態を示す概念図である。FIG. 1 is a conceptual diagram showing a first embodiment of a pulse tube refrigerator according to the present invention.
【００３３】本実施形態に係るパルス管冷凍機は、冷媒
ガス給排系１と、伝熱板２ａ，２ｂに接続し、超電導コ
イル３ｂを包囲する熱シールド３ａと伝熱板２ｂに接続
する超電導コイル３ｂとのそれぞれを極低温状態に維持
させる極低温系４と、この極低温系４の冷凍効率を向上
させる位相調整系５とを備えて構成される。The pulse tube refrigerator according to the present embodiment is connected to the refrigerant gas supply / discharge system 1 and the heat transfer plates 2a and 2b, and is connected to the heat shield 3a surrounding the superconductive coil 3b and the heat transfer plate 2b. A cryogenic system 4 for maintaining each of the coils 3b in a cryogenic state and a phase adjusting system 5 for improving the refrigeration efficiency of the cryogenic system 4 are provided.
【００３４】冷媒ガス給排系１は、コンプレッサ６とロ
ータリーバルブ７とを備え、冷媒ガスを極低温系４に供
給する場合、ロータリーバルブ７を回転させ、ポート８
を蓄冷器冷媒ガス往復配管２４に接続させ（図示の状
態）、コンプレッサ６で生成された高圧の冷媒ガスを高
圧系ＨＰを介して極低温系４に供給する一方、極低温系
４からの冷媒ガスを低圧系ＬＰを介してコンプレッサ６
に返す場合、ロータリーバルブ７のポート８を破線で示
す位置に回転移動させて極低温系４からの冷媒ガスを低
圧系ＬＰに戻しており、冷媒ガスの給排を、例えば１Ｈ
ｚ（０．５秒）毎に繰り返し、極低温系４を極低温状態
に維持させて熱シールド３ａおよび超電導コイル３ｂを
冷却している。The refrigerant gas supply / discharge system 1 includes a compressor 6 and a rotary valve 7. When supplying the refrigerant gas to the cryogenic system 4, the rotary valve 7 is rotated to
Is connected to the regenerator refrigerant gas reciprocating pipe 24 (as shown), and the high-pressure refrigerant gas generated by the compressor 6 is supplied to the cryogenic system 4 via the high-pressure system HP, while the refrigerant from the cryogenic system 4 The gas is supplied to the compressor 6 through the low-pressure system LP.
Is returned to the low pressure system LP by rotating the port 8 of the rotary valve 7 to the position shown by the dashed line, and the supply and discharge of the refrigerant gas is, for example, 1H.
The heat shield 3a and the superconducting coil 3b are cooled by maintaining the cryogenic system 4 at a cryogenic state by repeating the process every z (0.5 seconds).
【００３５】また、極低温系４は、頂部を高温端部９で
塞ぎ、中間部分に第１段冷却ステージ（第１段コールド
ヘッド）１４を備え、底部を第２段冷却ステージ（第２
段コールドヘッド）１０で塞いだシリンダ１１内に、例
えば５０Ｋの極低温に維持させる第１段極低温冷凍部１
２と、例えば４Ｋ〜２０Ｋの極低温に維持させる第２段
極低温冷凍部１３とに区分けして収容する構成になって
いる。Further, the cryogenic system 4 has a first stage cooling stage (first stage cold head) 14 in the middle portion, a top portion closed by a high temperature end portion 9, and a second stage cooling stage (second stage cooling stage) in the bottom portion.
A first stage cryogenic refrigeration unit 1 for maintaining an extremely low temperature of, for example, 50K in a cylinder 11 closed by a stage cold head (10).
2 and a second-stage cryogenic refrigeration unit 13 for maintaining the cryogenic temperature of, for example, 4K to 20K.
【００３６】第１段極低温冷凍部１２は、高温端部９と
第１段冷却ステージ（第１段コールドヘッド）１４との
間に配置した第１段蓄冷器１５と、この第１段蓄冷器１
５の外側を、図２に示すように、同心的に包囲して配置
する第１段パルス管１６とを備えている。なお、第１段
蓄冷器１５には、球径状の磁性蓄冷材が充填されてい
る。また、第１段パルス管１６は、筒状の中空管として
形成されている。The first-stage cryogenic refrigeration section 12 includes a first-stage regenerator 15 disposed between the high-temperature end 9 and a first-stage cooling stage (first-stage cold head) 14, Vessel 1
As shown in FIG. 2, a first-stage pulse tube 16 is disposed concentrically around the outside of the tube 5, as shown in FIG. The first-stage regenerator 15 is filled with a spherical magnetic regenerator material. The first-stage pulse tube 16 is formed as a cylindrical hollow tube.
【００３７】また、第２段極低温冷凍部１３は、第１段
冷却ステージ１４から第２段冷却ステージ１０に向って
延びる第２段蓄冷器１７と、第１段極低温冷凍部１２に
同心的に配置され、高温端部９の中央部から第２段冷却
ステージ１０に向って延びる第２段パルス管１８を備え
ている。なお、第２段蓄冷器１７も、第１段蓄冷器１５
と同様に、磁性蓄冷材を充填している。さらに、第２段
パルス管１８も、第１段パルス管１６と同様に、筒状の
中空になっている。The second stage cryogenic refrigeration unit 13 is concentric with a second stage regenerator 17 extending from the first stage refrigeration stage 14 toward the second stage refrigeration stage 10 and a first stage cryogenic refrigeration unit 12. And a second-stage pulse tube 18 extending from the central portion of the high-temperature end 9 toward the second-stage cooling stage 10. The second-stage regenerator 17 is also the first-stage regenerator 15
Similarly, the magnetic regenerator material is filled. Further, the second stage pulse tube 18 is also hollow like a first stage pulse tube 16.
【００３８】一方、位相調整系５は、第１段位相調整系
１９と第２段位相調整系２０とに区分けされている。On the other hand, the phase adjustment system 5 is divided into a first-stage phase adjustment system 19 and a second-stage phase adjustment system 20.
【００３９】第１段位相調整系１９は、第２段位相調整
系２０と共通にするバッファタンク２１と、第１段オリ
フィスバルブ２２とを備えた第１段パルス管位相調整配
管２３と、この第１段パルス管位相調整配管２３を冷媒
ガス給排系１と極低温系４との間で冷媒ガスを給排させ
る蓄冷器冷媒ガス往復配管２４に接続させ、かつ途中に
第１段ダブルインレットバルブ２５を介装させた第１段
バイパス配管２６とを備え、冷媒ガスの排気時、第１段
パルス管１６内の圧力変動と体積流量との位相差を、例
えば９０°以上に調整して効果的に膨張させるととも
に、冷媒ガスの供給時、コンプレッサ６から第１段蓄冷
器１５に供給する冷媒ガスの流量を比較的少なくさせ、
残りを第１段パルス管１６に供給して冷凍効率を効果的
に増加させるようになっている。The first-stage phase adjusting system 19 includes a buffer tank 21 shared with the second-stage phase adjusting system 20, a first-stage pulse tube phase adjusting pipe 23 having a first-stage orifice valve 22, The first-stage pulse tube phase adjusting pipe 23 is connected to a regenerator refrigerant gas reciprocating pipe 24 for supplying and discharging the refrigerant gas between the refrigerant gas supply / discharge system 1 and the cryogenic system 4, and a first-stage double inlet is provided in the middle. A first-stage bypass pipe 26 having a valve 25 interposed therebetween. When the refrigerant gas is exhausted, the phase difference between the pressure fluctuation in the first-stage pulse tube 16 and the volume flow rate is adjusted to, for example, 90 ° or more. While effectively expanding the refrigerant gas, when supplying the refrigerant gas, the flow rate of the refrigerant gas supplied from the compressor 6 to the first-stage regenerator 15 is relatively reduced,
The remainder is supplied to the first-stage pulse tube 16 to effectively increase the refrigeration efficiency.
【００４０】また第２段位相調整系２０も、第１段位相
調整系１９と同様に、第１段位相調整系１９と共通のバ
ッファタンク２１と、第２段オリフィスバルブ２７を備
えた第２段パルス管位相調整配管２８と、この第２段パ
ルス管位相調整配管２８を冷媒ガス給排系１と極低温系
４との間で冷媒ガスを給排させる蓄冷器冷媒ガス往復配
管２４に接続させ、かつ途中第２段ダブルインレットバ
ルブ２９を介装させた第２段バイパス配管３０とを備
え、冷媒ガスの排気時の効果的な膨張と冷媒ガスの供給
時の適正流量配分を行わせるようになっている。Similarly to the first-stage phase adjustment system 19, the second-stage phase adjustment system 20 includes a buffer tank 21 common to the first-stage phase adjustment system 19 and a second stage orifice valve 27 having a second-stage orifice valve 27. The second-stage pulse tube phase adjusting pipe 28 is connected to the regenerator refrigerant gas reciprocating pipe 24 for supplying and discharging the refrigerant gas between the refrigerant gas supply / discharge system 1 and the cryogenic system 4. And a second-stage bypass pipe 30 interposed with a second-stage double inlet valve 29 on the way, so that effective expansion at the time of exhausting the refrigerant gas and appropriate flow distribution at the time of supplying the refrigerant gas are performed. It has become.
【００４１】また、第１段位相調整系１９および第２段
位相調整系２０は、共通のバッファタンク２１にセカン
ドオリフィスバルブ３１を介装させてコンプレッサ６の
低圧系ＬＰに接続する冷媒ガス逃し配管３２を設け、冷
媒ガス逃し配管３２を介してバッファタンク２１からの
冷媒ガスをコンプレッサ６の低圧系ＬＰに常時供給し、
冷媒ガスの給排運転中、第１段蓄冷器１５、第１段パル
ス管１６等内の冷媒ガスの振動流に加わる定常流に基づ
いて発生する循環流を抑制するようになっている。The first-stage phase adjustment system 19 and the second-stage phase adjustment system 20 are connected to a low-pressure system LP of the compressor 6 by interposing a second orifice valve 31 in a common buffer tank 21. 32, the refrigerant gas from the buffer tank 21 is always supplied to the low-pressure system LP of the compressor 6 through the refrigerant gas escape pipe 32,
During the supply and discharge operation of the refrigerant gas, the circulating flow generated based on the steady flow added to the oscillating flow of the refrigerant gas in the first-stage regenerator 15, the first-stage pulse tube 16, and the like is suppressed.
【００４２】このような構成を備えたパルス管冷凍機に
おいて、冷媒ガス供給運転時、冷媒ガス給排系１のコン
プレッサ６で生成された高圧・高温の冷媒ガスのうち、
高温熱を吸熱器（図示せず）で吸収させた高圧の冷媒ガ
スは、高圧系ＨＰ、ロータリーバルブ７のポート８を介
して蓄冷器冷媒ガス往復配管２４に供給され、ここで第
１段極低温冷凍部１２の第１段蓄冷器１５に、また第１
段バイパス配管２６および第１段パルス管位相調整配管
２３を介して一方を第１段パルス管１６に、他方をバッ
ファタンク２１に、さらに第２段バイパス配管３０およ
び第２段パルス管位相調整配管２８を介して一方を第２
段パルス管１８に、他方をバッファタンク２１にそれぞ
れ適正流量にして分配される。In the pulse tube refrigerator having the above-described structure, during the operation of supplying the refrigerant gas, of the high-pressure and high-temperature refrigerant gas generated by the compressor 6 of the refrigerant gas supply / discharge system 1,
The high-pressure refrigerant gas having the high-temperature heat absorbed by a heat absorber (not shown) is supplied to the regenerator refrigerant gas reciprocating pipe 24 via the high-pressure system HP and the port 8 of the rotary valve 7, where the first stage pole The first stage regenerator 15 of the low temperature refrigeration unit 12
One is connected to the first-stage pulse pipe 16, the other is connected to the buffer tank 21, and the second-stage bypass pipe 30 and the second-stage pulse pipe phase-adjusting pipe are connected via the second-stage bypass pipe 26 and the first-stage pulse pipe phase adjusting pipe 23. One second via 28
The flow is distributed to the step pulse tube 18 and the other to the buffer tank 21 at an appropriate flow rate.
【００４３】第１段蓄冷器１５に分配された冷媒ガス
は、ここで磁性蓄冷材で熱を吸収させ、第１段冷却ステ
ージ１４で極低温にさせ、その一部を第１段パルス管１
６に、また残りを第２段蓄冷器１７のそれぞれに供給さ
せる。なお、第１段蓄冷器１５は、冷媒ガスを第１段パ
ルス管１６に分配させる際、スペーサ３３を設けて通路
を狭くさせ、高流速の下、熱伝達係数を高めて第１段冷
却ステージ１４を効果的に極低温状態に維持させてい
る。The refrigerant gas distributed to the first-stage regenerator 15 absorbs heat by the magnetic regenerator material, makes it extremely low in the first-stage cooling stage 14, and a part of the refrigerant gas is supplied to the first-stage pulse tube 1.
6 and the rest to each of the second stage regenerators 17. When distributing the refrigerant gas to the first-stage pulse tube 16, the first-stage regenerator 15 provides a spacer 33 to narrow the passage, increases the heat transfer coefficient under a high flow rate, and increases the first-stage cooling stage. 14 is effectively maintained in a cryogenic state.
【００４４】また、第２段蓄冷器１７に分配された冷媒
ガスも、上述と同様に磁性蓄冷材で熱を吸収させ、さら
にスペーサ３４で冷媒ガスの熱伝達係数を高め、整流板
３５で冷媒ガスに整流効果を持たせて第２段パルス管１
８に供給される。The refrigerant gas distributed to the second-stage regenerator 17 also absorbs heat by the magnetic regenerator material in the same manner as described above, further increases the heat transfer coefficient of the refrigerant gas by the spacer 34, Second stage pulse tube 1 with gas having rectification effect
8 is supplied.
【００４５】なお、第１段パルス管１６は、第１段蓄冷
器１５のほかに、第１段パルス管位相調整配管２３から
も冷媒ガスが供給されるが、第１段オリフィスバルブ２
２および第１段ダブルインレットバルブ２５の弁開度を
調整し、第１段冷却ステージ１４側の位置で圧力バラン
スさせるようにしている。また、第２段パルス管１８
も、上述と同様に、第２段冷却ステージ１０側の位置で
圧力バランスさせている。The first-stage pulse tube 16 is supplied with the refrigerant gas from the first-stage regenerator 15 and also from the first-stage pulse tube phase adjusting tube 23.
The valve openings of the second and first-stage double inlet valves 25 are adjusted to balance the pressure at the position on the first-stage cooling stage 14 side. Also, the second-stage pulse tube 18
Similarly, the pressure is balanced at the position on the second cooling stage 10 side as described above.
【００４６】一方、冷媒ガス排気運転時、冷媒ガス給排
系１のロータリーバルブ７のポート８を破線で示す位置
に回転移動させると、第１段パルス管１６内の冷媒ガス
は、膨張しながら温度を下げ、その一部が第１段冷却ス
テージ１４、第１段蓄冷器１５を流れる間に周囲の温度
を下げ、伝熱板２ａを介して接続させた熱シールド３ａ
を極低温状態に維持させるとともに、その残りとバッフ
ァタンク２１から第１段パルス管位相調整配管２３、第
１段バイパス配管２６を介して戻される冷媒ガスとが蓄
冷器冷媒ガス往復配管２４で第１段蓄冷器１５からの冷
媒ガスに合流し、その合流冷媒ガスがコンプレッサ６の
低圧系ＬＰに戻される。なお、第２パルス管１８内の冷
媒ガスも、上述と同様にしてコンプレッサ６の低圧系Ｌ
Ｐに戻される。On the other hand, when the port 8 of the rotary valve 7 of the refrigerant gas supply / discharge system 1 is rotated to the position shown by the broken line during the refrigerant gas exhaust operation, the refrigerant gas in the first-stage pulse tube 16 expands. The temperature is lowered, and the surrounding temperature is lowered while a part of the heat shield 3a flows through the first-stage cooling stage 14 and the first-stage regenerator 15, and the heat shield 3a is connected via the heat transfer plate 2a.
Is maintained in an extremely low temperature state, and the remainder and the refrigerant gas returned from the buffer tank 21 via the first-stage pulse tube phase adjustment pipe 23 and the first-stage bypass pipe 26 are passed through the regenerator refrigerant gas reciprocating pipe 24 through the The refrigerant gas from the first-stage regenerator 15 merges with the refrigerant gas, and the merged refrigerant gas is returned to the low-pressure system LP of the compressor 6. The refrigerant gas in the second pulse tube 18 is also supplied to the low pressure system L of the compressor 6 in the same manner as described above.
Returned to P.
【００４７】その際、第１段蓄冷器１５、第１段パルス
管１６あるいは第２段蓄冷器１７、第２段パルス管１８
内のそれぞれの冷媒ガスが循環流れを誘起するので、バ
ッファタンク２１は、冷媒ガスを冷媒ガス逃し配管３２
を介してコンプレッサ６の低圧系ＬＰに戻し、循環流を
抑制している。At this time, the first-stage regenerator 15 and the first-stage pulse tube 16 or the second-stage regenerator 17 and the second-stage pulse tube 18
Since each refrigerant gas in the inside induces a circulating flow, the buffer tank 21 is provided with a refrigerant gas escape pipe 32.
To return to the low-pressure system LP of the compressor 6 to suppress the circulating flow.
【００４８】このように、本実施形態は、極低温系４を
第１段極低温冷凍部１２と第２段極低温冷凍部１３とに
区分けし、区分けした第１段極低温冷凍部１２と第１段
極低温冷凍部１３とを、頂部に高温端部９を、中間部分
に第１段冷却ステージ１４を、底部に第２段冷却ステー
ジ１０をそれぞれ備えたシリンダ１１に収容させる際、
シリンダ１１の中央部に高温端部９から第２段冷却ステ
ージ１０に向って延びる第２段極低温冷凍部１３の第２
段パルス管１８を配置し、この第２段パルス管１８の外
側を同心的に配置し、かつ高温端部９から第１段冷却ス
テージ１４に向って延びる第１段極低温冷凍部１２の第
１段蓄冷器１５を配置するとともに、この第１段蓄冷器
１５の外側を同心的に配置し、かつ高温端部９から第１
段冷却ステージ１４に向って延びる第１段極低温冷凍部
１２の第１段パルス管１６を配置する一方、第２段極低
温冷凍部１３の第２段パルス管１８の外側を同心的に配
置し、かつ第１段冷却ステージ１４から第２段冷却ステ
ージ１０に向って延びる第２段蓄冷器１７を配置したの
で、構造簡素にして設置面積の少ないパルス管冷凍機を
実現することができる。As described above, in the present embodiment, the cryogenic system 4 is divided into the first-stage cryogenic refrigeration unit 12 and the second-stage cryogenic refrigeration unit 13, and the divided first-stage cryogenic refrigeration unit 12 When the first stage cryogenic refrigeration unit 13 is housed in the cylinder 11 provided with the high temperature end 9 at the top, the first stage cooling stage 14 at the middle, and the second stage cooling stage 10 at the bottom,
A second stage cryogenic refrigeration unit 13 extends from the high temperature end 9 toward the second stage cooling stage 10 at the center of the cylinder 11.
A second stage pulse tube 18 is arranged, the second stage pulse tube 18 is arranged concentrically, and the first stage cryogenic refrigeration unit 12 extending from the high temperature end 9 toward the first stage cooling stage 14 is disposed. A first-stage regenerator 15 is arranged, and the outside of the first-stage regenerator 15 is arranged concentrically.
The first stage pulse tube 16 of the first stage cryogenic refrigerator 12 extending toward the stage cooling stage 14 is arranged, and the outside of the second stage pulse tube 18 of the second stage cryogenic refrigerator 13 is arranged concentrically. In addition, since the second-stage regenerator 17 extending from the first-stage cooling stage 14 to the second-stage cooling stage 10 is arranged, a pulse tube refrigerator having a simple structure and a small installation area can be realized.
【００４９】その際、極低温系４に接続する第１段位相
調整系１９と第２段位相調整系２０に共用のバッファタ
ンク２１を設けたので、パルス管冷凍機の構造をより一
層簡素化させることができる。At this time, a common buffer tank 21 is provided for the first-stage phase adjustment system 19 and the second-stage phase adjustment system 20 connected to the cryogenic system 4, so that the structure of the pulse tube refrigerator is further simplified. Can be done.
【００５０】図３は、本発明に係るパルス管冷凍機の第
２実施形態を示す概念図である。FIG. 3 is a conceptual diagram showing a second embodiment of the pulse tube refrigerator according to the present invention.
【００５１】なお、第１実施形態で用いた構成要素と同
一要素には同一符号を付す。The same reference numerals are given to the same components as those used in the first embodiment.
【００５２】本実施形態に係るパルス管冷凍機は、極低
温系４の第１段極低温冷凍部１２および第２段極低温冷
凍部１３のそれぞれに接続する第１段位相調整系１９の
第１段パルス管位相調整配管２３および第２段位相調整
系２０の第２段パルス管位相調整配管２８のそれぞれに
第１段バッファタンク３６および第２段バッファタンク
３７のそれぞれを設けたものである。The pulse tube refrigerator according to the present embodiment includes a first stage phase adjusting system 19 connected to each of the first stage cryogenic refrigerator 12 and the second stage cryogenic refrigerator 13 of the cryogenic system 4. A first-stage buffer tank 36 and a second-stage buffer tank 37 are provided in the first-stage pulse tube phase adjustment pipe 23 and the second-stage pulse tube phase adjustment pipe 28 of the second-stage phase adjustment system 20, respectively. .
【００５３】本実施形態は、第１段極低温冷凍部１２の
第１段パルス管１６および第２段極低温冷凍部１３の第
２段パルス管１８内の冷媒ガスを膨張させる際、圧力変
動と体積流量との位相差を調整すれば、冷凍効率が向上
することに着目したもので、第１段パルス管位相調整配
管２３に第１段バッファタンク３６を、第２段パルス管
位相調整配管２８に第２段バッファタンク３７をそれぞ
れ設け、各パルス管１６，１８内の冷媒ガスの位相差を
別個独立に調整させたものである。In this embodiment, when the refrigerant gas in the first-stage pulse tube 16 of the first-stage cryogenic refrigeration unit 12 and the second-stage pulse tube 18 of the second-stage cryogenic refrigeration unit 13 is expanded, the pressure fluctuation The refrigeration efficiency is improved by adjusting the phase difference between the pressure and the volume flow rate. The first-stage buffer tank 36 is provided in the first-stage pulse tube phase adjustment pipe 23, and the second-stage pulse tube phase adjustment pipe is provided. 28, a second-stage buffer tank 37 is provided, and the phase difference of the refrigerant gas in each of the pulse tubes 16 and 18 is adjusted independently.
【００５４】また、本実施形態は、第１段パルス管位相
調整配管２３に第１段バッファタンク３６を、第２段パ
ルス管位相調整配管２８に第２段バッファタンク３７を
それぞれ設けることに伴って各バッファタンク３６，３
７のそれぞれから冷媒ガス給排系１の低圧系ＬＰに接続
させる第１段セカンドオリフィスバルブ３８を備えた第
１段冷媒ガス逃し配管３９と第２段セカンドオリフィス
バルブ４０を備えた第２段冷媒ガス逃し配管４１とを設
け、各バッファタンク３６，３７内の冷媒ガスを、常
時、冷媒ガス給排系１の低圧系ＬＰに流すことにより、
冷媒ガス給排運転中に第１段蓄冷器１５および第１段パ
ルス管１６等に誘起する循環流を抑制したものである。In this embodiment, a first-stage buffer tank 36 is provided in the first-stage pulse tube phase adjusting pipe 23, and a second-stage buffer tank 37 is provided in the second-stage pulse tube phase adjusting pipe 28. Each buffer tank 36,3
7 is connected to the low-pressure system LP of the refrigerant gas supply / discharge system 1 from a first stage refrigerant gas release pipe 39 provided with a first stage second orifice valve 38 and a second stage refrigerant provided with a second stage second orifice valve 40 A gas escape pipe 41 is provided, and the refrigerant gas in each of the buffer tanks 36 and 37 is always caused to flow through the low-pressure system LP of the refrigerant gas supply / discharge system 1,
The circulating flow induced in the first-stage regenerator 15 and the first-stage pulse tube 16 during the supply and discharge operation of the refrigerant gas is suppressed.
【００５５】このように、本実施形態では、各パルス管
１６，１８内の冷媒ガスの位相差を別個独立に調整する
第１段バッファタンク３６を第１段パルス管位相調整配
管２３に、第２段バッファタンク３７を第２段パルス管
位相調整配管２８にそれぞれ設けるとともに、各バッフ
ァタンク３６，３７内の冷媒ガスを冷媒ガス給排系１の
低圧系ＬＰに流す第１段冷媒ガス逃し配管３９および第
２段冷媒ガス逃し配管４１とをそれぞれ設けたので、冷
媒ガスの圧力変動と体積流量との位相差を別個独立に調
整でき、循環流を抑制でき、より一層冷凍効率を向上さ
せることができ。As described above, in the present embodiment, the first-stage buffer tank 36 for separately and independently adjusting the phase difference of the refrigerant gas in each of the pulse tubes 16 and 18 is provided in the first-stage pulse tube phase adjusting pipe 23. A second-stage buffer tank 37 is provided in the second-stage pulse tube phase adjustment pipe 28, and a first-stage refrigerant gas release pipe for flowing the refrigerant gas in each buffer tank 36, 37 to the low-pressure system LP of the refrigerant gas supply / discharge system 1. Since the refrigerant gas 39 and the second-stage refrigerant gas escape pipe 41 are provided, the phase difference between the pressure fluctuation of the refrigerant gas and the volume flow rate can be adjusted independently, the circulating flow can be suppressed, and the refrigeration efficiency can be further improved. Can.
【００５６】なお、本実施形態は、第１段バッファタン
ク３６を冷媒ガス給排系１の低圧系ＬＰに接続させる第
１段冷媒ガス逃し配管３９と、第２段バッファタンク３
７を冷媒ガス給排系１の低圧系ＬＰに接続させる第２段
冷媒ガス逃し配管４１とをそれぞれ設けたが、この例に
限らず、例えば図４に示すように、第２段バッファタン
ク３７を冷媒ガス給排系１の低圧系ＬＰに接続させる第
２段セカンドオリフィスバルブ４０を備えた第２段冷媒
ガス逃し配管４１だけを設けてもよい。In this embodiment, the first-stage buffer gas release pipe 39 for connecting the first-stage buffer tank 36 to the low-pressure system LP of the refrigerant gas supply / discharge system 1 and the second-stage buffer tank 3
7 are connected to the low-pressure system LP of the refrigerant gas supply / discharge system 1, respectively. However, the present invention is not limited to this example. For example, as shown in FIG. May be provided only with the second-stage refrigerant gas release pipe 41 provided with the second-stage second orifice valve 40 for connecting the refrigerant gas to the low-pressure system LP of the refrigerant gas supply / discharge system 1.
【００５７】図５は、本発明に係るパルス管冷凍機の第
３実施形態を示す概念図である。なお、第１実施形態で
用いた構成要素と同一要素には同一符号を付す。FIG. 5 is a conceptual diagram showing a third embodiment of the pulse tube refrigerator according to the present invention. The same components as those used in the first embodiment are denoted by the same reference numerals.
【００５８】本実施形態に係るパルス管冷凍機は、冷媒
ガス給排系１に第１ロータリーバルブ４２と第２ロータ
リーバルブ４３とを設けたものである。In the pulse tube refrigerator according to the present embodiment, the first rotary valve 42 and the second rotary valve 43 are provided in the refrigerant gas supply / discharge system 1.
【００５９】本実施形態は、冷媒ガス供給運転時、冷媒
ガス給排系１のコンプレッサ６で生成された高圧・高温
の冷媒ガスのうち、高温熱を吸熱器（図示せず）で吸収
させた高圧の冷媒ガスの一部を高圧系ＨＰ、第１ロータ
リーバルブ４２のポートＰ１を介して極低温系４におけ
る第１段極低温冷凍部１２の第１段蓄冷器１５に供給す
るとともに、その残りを第２ロータリーバルブ４３のポ
ートＰ３を介して第１段極低温冷凍部１２の第１段パル
ス管１６および第２段極低温冷凍部１３の第２段パルス
管１８のそれぞれに供給する一方、冷媒ガス排気運転
時、第１ロータリーバルブ４２のポートＰ２を破線で示
す位置に回転移動させ、第１段蓄冷器１５内の冷媒ガス
をコンプレッサ６の低圧系ＬＰに戻すとともに、第２ロ
ータリーバルブ４３のポートＰ４を破線で示す位置に回
転移動させ、第１段パルス管１６および第２段パルス管
１８内の冷媒ガスをコンプレッサ６の低圧系ＬＰに同時
に戻し、冷媒ガス給排運転時の冷媒ガスの流量をより多
量に処理し、冷凍効率を向上させたものである。なお、
第１ロータリーバルブ４２と第２ロータリーバルブ４３
とは、負荷に応じて回転切り替えを変えてもよい。In the present embodiment, during the operation of supplying the refrigerant gas, the high-temperature heat of the high-pressure and high-temperature refrigerant gas generated by the compressor 6 of the refrigerant gas supply / discharge system 1 is absorbed by the heat absorber (not shown). high-voltage HP part of the high-pressure refrigerant gas, with the first through the port P 1 of the rotary valve 42 is supplied to the first stage regenerator 15 of the first stage cryogenic refrigeration unit 12 in the cryogenic system 4, the supplies remaining in each of the second stage pulse tube 18 of the second first stage pulse tube 16 and the second-stage cryogenic refrigeration unit 13 of the first stage cryogenic refrigeration unit 12 via the port P 3 of the rotary valve 43 on the other hand, when the refrigerant gas exhaust operation, together rotate moving the port P 2 of the first rotary valve 42 to the position shown by the broken line, and returns the refrigerant gas in the first stage regenerator 15 to the low pressure system LP compressor 6, the second Rotary valve 4 The port P 4 is rotated moved to the position shown in broken lines, the refrigerant gas in the first stage pulse tube 16 and the second stage pulse tube 18 back simultaneously to a low pressure system LP compressor 6, refrigerant during the refrigerant gas supplying and discharging operation The gas flow rate is increased and the refrigeration efficiency is improved. In addition,
First rotary valve 42 and second rotary valve 43
The rotation switching may be changed according to the load.
【００６０】このように、本実施形態は、冷媒ガス給排
系１に第１ロータリーバルブ４２と第２ロータリーバル
ブ４３とを設けて冷媒ガス給排運転時の冷媒ガスの流量
をより多く処理したので、冷凍効率をより一層向上させ
ることができる。As described above, in the present embodiment, the first rotary valve 42 and the second rotary valve 43 are provided in the refrigerant gas supply / discharge system 1 to process the flow rate of the refrigerant gas during the supply / discharge operation of the refrigerant gas more. Therefore, the refrigeration efficiency can be further improved.
【００６１】なお、本実施形態は、冷媒ガス給排系１に
第１ロータリーバルブ４２と第２ロータリーバルブ４３
とを設け、冷媒ガスの流量を多量に処理したが、この例
に限らず、例えば、図６に示すように、冷媒ガス給排系
１に第１ロータリーバルブ４２、第２ロータリーバルブ
４３のほかに第３ロータリーバルブ４４等のより多数個
のロータリーバルブを設けてもよい。In this embodiment, the first rotary valve 42 and the second rotary valve 43
And a large flow rate of the refrigerant gas was processed. However, the present invention is not limited to this example. For example, as shown in FIG. A larger number of rotary valves such as the third rotary valve 44 may be provided.
【００６２】図７は、本発明に係るパルス管冷凍機を用
いた超電導磁石装置の実施形態を示す概念図である。な
お、第１実施形態で用いた構成要素と同一要素には同一
符号を付す。FIG. 7 is a conceptual diagram showing an embodiment of a superconducting magnet device using a pulse tube refrigerator according to the present invention. The same components as those used in the first embodiment are denoted by the same reference numerals.
【００６３】本実施形態に係る超電導磁石装置は、非磁
性材で作製され、ボックス状に形成した真空容器４４内
に、非磁性材の熱シールド３ａを設けるとともに、この
熱シールド３ａ内に筒状の磁場空間４６を介して超電導
コイル４７を収容する一方、超電導コイル４７に伝熱板
４８、超電導コイル通電用パワーリード４９を介してパ
ルス管冷凍機５０を接続させる構成になっている。な
お、超電導コイル通電用パワーリード４９は、熱シール
ド３ａのアンカ５１を介して外部に電源（図示せず）に
接続している。The superconducting magnet device according to the present embodiment is provided with a heat shield 3a made of a non-magnetic material in a vacuum vessel 44 made of a non-magnetic material and formed in a box shape, and a cylindrical tube inside the heat shield 3a. A superconducting coil 47 is accommodated via a magnetic field space 46 of the above, while a pulse tube refrigerator 50 is connected to the superconducting coil 47 via a heat transfer plate 48 and a power lead 49 for energizing the superconducting coil. The power lead 49 for energizing the superconducting coil is externally connected to a power supply (not shown) via the anchor 51 of the heat shield 3a.
【００６４】パルス管冷凍機５０は、極低温系４と冷媒
ガス給排・位相調整兼用系５２とを組み合せた構成にな
っている。The pulse tube refrigerator 50 has a configuration in which the cryogenic system 4 and the refrigerant gas supply / exhaust / phase adjustment system 52 are combined.
【００６５】この冷媒ガス給排・位相調整兼用系５２
は、図８に示すように、シリンダ５３の中央に区画した
第２段パルス管用ピストン室５４に収容する第２段パル
ス管用ピストン５４ａと、この第２段パルス管用ピスト
ン５４ａの外側に同心的に区画した第１段蓄冷器用ピス
トン室５５に収容する第１段蓄冷器用ピストン５５ａ
と、この第１段蓄冷用ピストン５５ａの外側に同心的に
区画した第１段パルス管用ピストン室５６に収容する第
１段パルス管用ピストン５６ａとをそれぞれ備えて構成
される。This refrigerant gas supply / exhaust / phase adjustment combined system 52
As shown in FIG. 8, a second-stage pulse tube piston 54a housed in a second-stage pulse tube piston chamber 54 defined in the center of the cylinder 53, and a concentrically disposed outside the second-stage pulse tube piston 54a. First-stage regenerator piston 55a housed in partitioned first-stage regenerator piston chamber 55
And a first-stage pulse tube piston 56a housed in a first-stage pulse tube piston chamber 56 concentrically partitioned outside the first-stage cold storage piston 55a.
【００６６】また、冷媒ガス給排・位相調整兼用系５２
は、各ピストン室５４，５５，５６に収容した各ピスト
ン５４ａ，５５ａ，５６ａのそれぞれに、ロッド５７
ａ，５７ｂ，５７ｃのそれぞれを介装させ、かつ各ピス
トン５４ａ，５５ａ，５６ａの位相角を適正に調整した
クランク軸５８に接続させ、モータ５９の駆動力でクラ
ンク軸５８を回転させ、クランク軸５８の回転力で各ピ
ストン５４ａ，５５ａ，５６ａのそれぞれを連続的に進
退移動させるようになっている。なお、冷媒ガス給排・
位相調整兼用系５２に接続する極低温系４は、第１実施
形態の構成と同一なので説明を省略する。The refrigerant gas supply / exhaust / phase adjustment system 52
The rod 57 is attached to each of the pistons 54a, 55a, 56a housed in the piston chambers 54, 55, 56, respectively.
a, 57b, and 57c are interposed, and connected to the crankshaft 58 in which the phase angles of the pistons 54a, 55a, and 56a are appropriately adjusted. The crankshaft 58 is rotated by the driving force of the motor 59, and the crankshaft is rotated. Each of the pistons 54a, 55a, 56a is continuously moved forward and backward by the rotation force 58. In addition, supply and discharge of refrigerant gas
The cryogenic system 4 connected to the phase adjusting / combining system 52 has the same configuration as that of the first embodiment, and a description thereof will be omitted.
【００６７】このような構成を備えたパルス管冷凍機５
０は、冷媒ガス供給運転時、冷媒ガス給排・位相調整兼
用系５２のモータ５９を駆動させ、クランク軸５８を矢
印ＡＲの方向に向って回転させ、第１段蓄冷器用ピスト
ン５５ａを図示の位置に移動させ、冷媒ガスを高圧に圧
縮する。高圧ガスは、高温端部９を介して極低温系４の
第１段蓄冷器１５に供給され、ここで磁性蓄冷材で熱が
吸収されて極低温になり、その一部を第１段冷却ステー
ジ１４、スペーサ３３を介して第１段パルス管１６に、
残りを第２段蓄冷器１５で再び熱が吸収されて極低温に
なった後、スペーサ３４、第２段冷却ステージ１０、整
流板３５を介して第２段パルス管１８のそれぞれに供給
される。The pulse tube refrigerator 5 having such a configuration
0 indicates that during the supply operation of the refrigerant gas, the motor 59 of the refrigerant gas supply / discharge / phase adjustment dual-purpose system 52 is driven to rotate the crankshaft 58 in the direction of the arrow AR, and the first-stage regenerator piston 55a is shown in FIG. To compress the refrigerant gas to a high pressure. The high-pressure gas is supplied to the first-stage regenerator 15 of the cryogenic system 4 through the high-temperature end 9, where the heat is absorbed by the magnetic regenerator material to become extremely low-temperature, and a part thereof is cooled to the first-stage To the first stage pulse tube 16 via the stage 14 and the spacer 33,
The remaining heat is absorbed again by the second-stage regenerator 15 and becomes extremely low temperature, and then supplied to each of the second-stage pulse tubes 18 via the spacer 34, the second-stage cooling stage 10, and the rectifying plate 35. .
【００６８】このとき、パルス管冷凍機５０は、クラン
ク軸５８の位相角の適正な調整の下、冷媒ガス供給運転
とほぼ同時に、冷媒ガス排気運転を行っている。冷媒ガ
ス排気運転時、パルス管冷凍機５０は、冷媒ガス給排・
位相調整兼用系５２のモータ５９の駆動力でクランク軸
５８を図示の位置（下死点）に移動させ、第２段パルス
管用ピストン５４ａ、第１段パルス管用ピストン５６ａ
をそれぞれ移動させ、第２段パルス管１８、第１段パル
ス管１６内の冷媒ガスを膨張させて温度を低くさせ、周
囲の熱を奪いながら第２段冷却ステージ１０、第１段冷
却ステージ１４を極低温に維持させ、さらに第２段蓄冷
器１７、第１段蓄冷器１５の磁性蓄冷材に冷熱を与えて
第１段蓄冷器用ピストン５５に戻される。なお、本実施
形態では、クランク軸５８の適正な位相角調整の下、冷
媒ガス供給運転、冷媒ガス排気運転を連続的に行い、熱
シールド３ａおよび超電導コイル３ｂを極低温に維持さ
せている。At this time, the pulse tube refrigerator 50 performs the refrigerant gas exhaust operation almost simultaneously with the refrigerant gas supply operation under appropriate adjustment of the phase angle of the crankshaft 58. During the refrigerant gas exhaust operation, the pulse tube refrigerator 50 supplies and discharges the refrigerant gas.
The crankshaft 58 is moved to the position shown in the drawing (bottom dead center) by the driving force of the motor 59 of the phase adjusting / combining system 52, and the second stage pulse tube piston 54a and the first stage pulse tube piston 56a are moved.
Are moved, the refrigerant gas in the second-stage pulse tube 18 and the first-stage pulse tube 16 is expanded to lower the temperature, and the second-stage cooling stage 10 and the first-stage cooling stage 14 are removed while removing surrounding heat. Is kept at an extremely low temperature, and the magnetic regenerator material of the second-stage regenerator 17 and the first-stage regenerator 15 is given cold heat and returned to the first-stage regenerator piston 55. In the present embodiment, the refrigerant gas supply operation and the refrigerant gas exhaust operation are continuously performed under appropriate phase angle adjustment of the crankshaft 58, and the heat shield 3a and the superconducting coil 3b are maintained at extremely low temperatures.
【００６９】このように、本実施形態は、パルス管冷凍
機５０を極低温系４と給排・位相調整兼用系５２とを組
み合せたので、構造簡素にして設置面積の少ないコンパ
クトな超電導磁石装置を実現することができる。As described above, in this embodiment, since the pulse tube refrigerator 50 is combined with the cryogenic system 4 and the supply / discharge / phase adjusting / combined system 52, a compact superconducting magnet device having a simple structure and a small installation area is provided. Can be realized.
【００７０】[0070]
【発明の効果】以上の説明のとおり、本発明に係るパル
ス管冷凍機およびパルス管冷凍機を用いた超電導磁石装
置は、極低温系を複数の極低温冷凍部に区分けし、区分
けした複数の極低温冷凍部のうち、複数の蓄冷器と複数
のパルス管とを同心的に配置して一つのシリンダ内に収
容させる構成にしたので、極低温系を構造簡素にして設
置面積の少ないコンパクトにすることができる。As described above, in the pulse tube refrigerator and the superconducting magnet apparatus using the pulse tube refrigerator according to the present invention, the cryogenic system is divided into a plurality of cryogenic refrigeration units, and a plurality of divided cryogenic refrigeration units are divided. In the cryogenic refrigeration unit, a plurality of regenerators and a plurality of pulse tubes are concentrically arranged and housed in one cylinder, so the cryogenic system is simplified in structure and compact with a small installation area. can do.
【００７１】その際、複数の蓄冷器に対応させて複数の
パルス管を設け、冷媒ガスを複数のパルス管で膨張させ
たので、より一層冷凍効率を増加させることができる。At this time, since a plurality of pulse tubes are provided corresponding to the plurality of regenerators and the refrigerant gas is expanded by the plurality of pulse tubes, the refrigeration efficiency can be further increased.
【図１】本発明に係るパルス管冷凍機の第１実施形態を
示す概念図。FIG. 1 is a conceptual diagram showing a first embodiment of a pulse tube refrigerator according to the present invention.
【図２】図１のＡ−Ａ矢視方向から見た切断断面図。FIG. 2 is a cross-sectional view taken along the line AA of FIG. 1;
【図３】本発明に係るパルス管冷凍機の第２実施形態を
示す概念図。FIG. 3 is a conceptual diagram showing a second embodiment of the pulse tube refrigerator according to the present invention.
【図４】本発明に係るパルス管冷凍機の第２実施形態に
おける変形例を示す概念図。FIG. 4 is a conceptual diagram showing a modification of the pulse tube refrigerator according to the second embodiment of the present invention.
【図５】本発明に係るパルス管冷凍機の第３実施形態を
示す概念図。FIG. 5 is a conceptual diagram showing a third embodiment of the pulse tube refrigerator according to the present invention.
【図６】本発明に係るパルス管冷凍機の第３実施形態に
おける変形例を示す概念図。FIG. 6 is a conceptual diagram showing a modified example of the pulse tube refrigerator according to the third embodiment of the present invention.
【図７】本発明に係るパルス管冷凍機を用いた超電導磁
石装置の実施形態を示す概念図。FIG. 7 is a conceptual diagram showing an embodiment of a superconducting magnet device using a pulse tube refrigerator according to the present invention.
【図８】超電導磁石装置に組み込む本発明に係るパルス
管冷凍機の実施形態を示す概念図。FIG. 8 is a conceptual diagram showing an embodiment of a pulse tube refrigerator according to the present invention incorporated in a superconducting magnet device.
【図９】従来のパルス管冷凍機を示す概念図。FIG. 9 is a conceptual diagram showing a conventional pulse tube refrigerator.
１ 冷媒ガス給排系 ２ａ，２ｂ 伝熱板 ３ａ 熱シールド ３ｂ 超電導コイル ４ 極低温系 ５ 位相調整系 ６ コンプレッサ ７ ロータリーバルブ ８ ポート ９ 高温端部 １０ 第２段冷却ステージ １１ シリンダ １２ 第１段極低温冷凍部 １３ 第２段極低温冷凍部 １４ 第１段冷却ステージ １５ 第１段蓄冷器 １６ 第１段パルス管 １７ 第２段蓄冷器 １８ 第２段パルス管 １９ 第１段位相調整系 ２０ 第２段位相調整系 ２１ バッファタンク ２２ 第１段オリフィスバルブ ２３ 第１段パルス管位相調整配管 ２４ 蓄冷器冷媒ガス往復配管 ２５ 第１段ダブルインレット ２６ 第１段バイパス配管 ２７ 第２段オリフィスバルブ ２８ 第２段パルス管位相調整配管 ２９ 第２段ダブルインレット ３０ 第２段バイパス配管 ３１ セカンドオリフィスバルブ ３２ 冷媒ガス逃し配管 ３３，３４ スペーサ ３５ 整流板 ３６ 第１段バッファタンク ３７ 第２段バッファタンク ３８ 第１段セカンドオリフィスバルブ ３９ 第１段冷媒ガス逃し配管 ４０ 第２段セカンドオリフィスバルブ ４１ 第２段冷媒ガス逃し配管 ４２ 第１ロータリーバルブ ４３ 第２ロータリーバルブ ４４ 第３ロータリーバルブ ４５ 真空容器 ４６ 磁場空間 ４７ 超電導コイル ４８ 伝熱板 ４９ 超電導コイル通電用パワーリード ５０ パルス管冷凍機 ５１ アンカ ５２ 冷媒ガス給排・位相調整兼用系 ５３ シリンダ ５４ 第２段パルス管用ピストン室 ５４ａ 第２段パルス管用ピストン ５５ 第１段蓄冷器用ピストン室 ５５ａ 第１段蓄冷器用ピストン ５６ 第１段パルス管用ピストン室 ５６ａ 第１段パルス管用ピストン ５７ａ，５７ｂ，５７ｃ ロッド ５８ クランク軸 ５９ モータ １００ コンプレッサ １０１ ロータリーバルブ １０２ 第１段蓄冷器 １０３ 第１段冷却ステージ １０４ 第１段パルス管 １０５ 第２段蓄冷器 １０６ 第２段冷却ステージ １０７ 第２段パルス管 １０８ 第１段位相調整系 １０９ 第２段位相調整系 １１０ 第１段バッファタンク １１１ 第２段バッファタンク １１２ ポート １１３，１１４ 冷媒ガス逃し系 １１５，１１６ 伝熱板 １１７ 熱シールド １１８ 超電導コイル DESCRIPTION OF SYMBOLS 1 Refrigerant gas supply / discharge system 2a, 2b Heat transfer plate 3a Heat shield 3b Superconducting coil 4 Cryogenic system 5 Phase adjustment system 6 Compressor 7 Rotary valve 8 Port 9 High temperature end 10 Second stage cooling stage 11 Cylinder 12 First stage pole Low-temperature refrigeration unit 13 Second-stage cryogenic refrigeration unit 14 First-stage cooling stage 15 First-stage regenerator 16 First-stage pulse tube 17 Second-stage regenerator 18 Second-stage pulse tube 19 First-stage phase adjustment system 20 First Two-stage phase adjustment system 21 Buffer tank 22 First-stage orifice valve 23 First-stage pulse tube phase adjustment piping 24 Regenerator refrigerant gas reciprocating piping 25 First-stage double inlet 26 First-stage bypass piping 27 Second-stage orifice valve 28 First Two-stage pulse tube phase adjustment piping 29 Second-stage double inlet 30 Second-stage bypass piping 31 Second orifice valve 3 2 Refrigerant gas escape piping 33, 34 Spacer 35 Rectifier plate 36 First stage buffer tank 37 Second stage buffer tank 38 First stage second orifice valve 39 First stage refrigerant gas escape piping 40 Second stage second orifice valve 41 Second stage Refrigerant gas escape pipe 42 First rotary valve 43 Second rotary valve 44 Third rotary valve 45 Vacuum container 46 Magnetic field space 47 Superconducting coil 48 Heat transfer plate 49 Power lead for energizing superconducting coil 50 Pulse tube refrigerator 51 Anchor 52 Refrigerant gas supply Discharge / Phase Adjustment System 53 Cylinder 54 Second Stage Pulse Tube Piston Room 54a Second Stage Pulse Tube Piston 55 First Stage Regenerator Piston Room 55a First Stage Regenerator Piston 56 First Stage Pulse Tube Piston Room 56a First Stage Pulse tube piston 57a, 57 , 57c Rod 58 Crankshaft 59 Motor 100 Compressor 101 Rotary valve 102 First stage regenerator 103 First stage cooling stage 104 First stage pulse tube 105 Second stage regenerator 106 Second stage cooling stage 107 Second stage pulse tube 108 First-stage phase adjustment system 109 Second-stage phase adjustment system 110 First-stage buffer tank 111 Second-stage buffer tank 112 Port 113,114 Refrigerant gas release system 115,116 Heat transfer plate 117 Heat shield 118 Superconducting coil
Claims (16)
排系と、この冷媒ガス給排系の冷媒ガスの給排により極
低温に維持させる極低温系を第１段極低温冷凍部と第２
段極低温部とに区分けし、区分けした第１段極低温冷凍
部と第２段極低温冷凍部とをまとめて一つにして収容す
るシリンダと、上記第１段極低温冷凍部および上記第２
段極低温冷凍部に冷媒ガスを給排させる際、冷媒ガスの
圧力変動と体積流量との位相差を調整する位相調整系と
を備えたことを特徴とするパルス管冷凍機。1. A first stage cryogenic refrigeration unit comprising: a refrigerant gas supply / discharge system for supplying / discharging a refrigerant gas into a system; and a cryogenic system for maintaining a cryogenic temperature by supplying / discharging the refrigerant gas in the refrigerant gas supply / discharge system. And the second
A cylinder which is divided into a stage cryogenic portion, and accommodates the divided first stage cryogenic refrigeration portion and the second stage cryogenic refrigeration portion as one unit; 2
A pulse tube refrigerator comprising: a phase adjusting system that adjusts a phase difference between a pressure change of a refrigerant gas and a volume flow rate when supplying and discharging a refrigerant gas to and from a stage cryogenic refrigerator.
部分として形成して組み合わせるとともに、頭部側に高
温端部を、中間部分に第１段冷却ステージを、底部側に
第２段冷却ステージをそれぞれ備える一方、上記大口径
部分に第１段極低温冷凍部を収容させ、上記比較的小口
径部分に第２段極低温冷凍部を収容させたことを特徴と
する請求項１に記載のパルス管冷凍機。2. The cylinder is formed and combined as a large-diameter portion and a relatively small-diameter portion, a high-temperature end portion at a head side, a first-stage cooling stage at an intermediate portion, and a second-stage cooling stage at a bottom portion. 2. The cryogenic refrigeration unit of the first stage is accommodated in the large-diameter portion, and the cryogenic refrigeration unit of the second stage is accommodated in the relatively small-diameter portion. Pulse tube refrigerator.
径部分の中央に配置され、高温端部からシリンダの比較
的小口径部分の第２段冷却ステージに向って延びる第２
段極低温冷凍部の第２段パルス管の外側に同心的に配置
され、高温端部から第１段冷却ステージに向って延びる
第１段蓄冷器と、この第１段蓄冷器の外側に同心的に配
置され、高温端部から第１段冷却ステージに向って延び
る第１段パルス管と、上記第１段蓄冷器と上記第１段パ
ルス管との間の上記第１段冷却ステージ側に設けたスペ
ーサをとを備えたことを特徴とする請求項２に記載のパ
スル管冷凍機。3. A first stage cryogenic refrigeration unit is disposed at the center of the large diameter portion of the cylinder and extends from the high temperature end to a second stage cooling stage of a relatively small diameter portion of the cylinder.
A first-stage regenerator arranged concentrically outside the second-stage pulse tube of the stage cryogenic refrigeration unit and extending from the high-temperature end toward the first-stage cooling stage; and concentrically outside the first-stage regenerator. And a first-stage pulse tube extending from a high-temperature end toward the first-stage cooling stage; and a first-stage cooling stage side between the first-stage regenerator and the first-stage pulse tube. The pulse tube refrigerator according to claim 2, further comprising a spacer provided.
径部分の中央に配置され、高温端からシリンダの比較的
小口径の第２段冷却ステージに向って延びる第２段パル
ス管と、この第２段パルス管の外側に同心的に配置さ
れ、第１段冷却ステージからシリンダの比較的小口径部
分の第２段冷却ステージに向って延びる第２段蓄冷器
と、この第２段蓄冷器と上記第２段パルス管との間の上
記第２段冷却ステージ側に設けたスペーサと、このスペ
ーサから上記第２段パルス管に流れる冷媒ガスの流れを
整流する整流板とを備えたことを特徴とする請求項２に
記載のパルス管冷凍機。4. A second stage cryogenic refrigeration unit is disposed at the center of the large diameter portion of the cylinder, and has a second stage pulse tube extending from a high temperature end to a relatively small diameter second stage cooling stage of the cylinder. A second-stage regenerator arranged concentrically outside the second-stage pulse tube and extending from the first-stage cooling stage toward the second-stage cooling stage of a relatively small-diameter portion of the cylinder; A spacer provided between the regenerator and the second-stage pulse tube on the side of the second-stage cooling stage; and a rectifying plate for rectifying the flow of the refrigerant gas flowing from the spacer to the second-stage pulse tube. The pulse tube refrigerator according to claim 2, wherein:
段位相調整系とに区分けするとともに、各段位相調整系
を、冷媒ガス給排系と極低温系の第１段極低温冷凍部と
を互いに接続させる蓄冷器冷媒ガス往復配管に接続した
ことを特徴とする請求項１に記載のパルス管冷凍機。5. A phase adjustment system comprising: a first-stage phase adjustment system;
In addition to being divided into a stage phase adjustment system, each stage phase adjustment system is connected to a regenerator refrigerant gas reciprocating pipe that connects a refrigerant gas supply / discharge system and a cryogenic first stage cryogenic refrigeration unit to each other. The pulse tube refrigerator according to claim 1, wherein:
第１段パルス管に接続し、中間部分に第１段オリフィス
バルブを介装させた第１段パルス管位相調整配管と、こ
の第１段パルス管位相調整配管から分岐し、中間部分に
第１段ダブルインレットバルブを介装させて冷媒ガス給
排系と極低温系の第１段極低温冷凍部とを互いに接続さ
せる蓄冷器冷媒ガス往復配管に接続した第１段バイパス
配管とを備えたことを特徴とする請求項５に記載のパル
ス管冷凍機。6. A first-stage pulse tube phase adjusting pipe connected to a first-stage pulse tube of a first-stage cryogenic portion and having a first-stage orifice valve interposed in an intermediate portion. Branching off from the first-stage pulse tube phase adjusting pipe, and connecting the refrigerant gas supply / discharge system and the first-stage cryogenic refrigeration unit of the cryogenic system to each other by interposing a first-stage double inlet valve in the middle part. The pulse tube refrigerator according to claim 5, further comprising: a first stage bypass pipe connected to a regenerator refrigerant gas reciprocating pipe to be operated.
第２段パルス管に接続し、中間部分に第２段オリフィス
バルブを介装させた第２段パルス管位相調整配管と、こ
の第２段パルス管位相調整配管から分岐し、中間部分に
第２段ダブルインレットバルブを介装させて冷媒ガス給
排系と極低温系の第２段極低温冷凍部とを互いに接続さ
せる蓄冷器冷媒ガス往復配管に接続した第２段バイパス
配管とを備えたことを特徴とする請求項５に記載のパル
ス管冷凍機。7. A second-stage pulse tube phase adjusting pipe connected to a second-stage pulse tube of a second-stage cryogenic portion and having a second-stage orifice valve interposed at an intermediate portion. Branch from the second-stage pulse tube phase adjustment pipe, and a second-stage double inlet valve is interposed in the middle part to connect the refrigerant gas supply / discharge system and the cryogenic second-stage cryogenic refrigeration unit to each other. The pulse tube refrigerator according to claim 5, further comprising a second-stage bypass pipe connected to the regenerator refrigerant gas reciprocating pipe.
１段パルス管に接続する第１段パルス管位相調整配管
と、第２段極低温冷凍部の第２段パルス管に接続する第
２段パルス管位相調整配管とに共用のバッファタンクを
設けたことを特徴とする請求項１に記載のパルス管冷凍
機。8. The phase adjustment system includes a first-stage pulse tube phase adjustment pipe connected to the first-stage pulse tube of the first-stage cryogenic refrigeration unit and a second-stage pulse tube of the second-stage cryogenic refrigeration unit. 2. The pulse tube refrigerator according to claim 1, wherein a common buffer tank is provided for a second-stage pulse tube phase adjusting pipe to be connected.
１段パルス管に接続する第１段パルス管位相調整配管
と、第２段極低温冷凍部の第２段パルス管に接続する第
２段パルス管位相調整配管とに個々に別々のバッファタ
ンクを設けたことを特徴とする請求項１に記載のパルス
管冷凍機。9. A phase adjustment system comprising: a first-stage pulse tube phase adjustment pipe connected to the first-stage pulse tube of the first-stage cryogenic refrigeration unit; and a second-stage pulse tube of the second-stage cryogenic refrigeration unit. 2. The pulse tube refrigerator according to claim 1, wherein separate buffer tanks are provided separately from the second-stage pulse tube phase adjustment piping to be connected.
第２段パルス管に接続する第２段パルス管位相調整配管
にバッファタンクを設けたことを特徴とする請求項１に
記載のパルス管冷凍機。10. The phase adjustment system according to claim 1, wherein a buffer tank is provided in the second-stage pulse tube phase adjustment pipe connected to the second-stage pulse tube of the second-stage cryogenic refrigeration unit. Pulse tube refrigerator.
低圧系に接続させる冷媒ガス逃し配管を備えたことを特
徴とする請求項８，９または１０に記載のパルス管冷凍
機。11. The pulse tube refrigerator according to claim 8, 9 or 10, wherein the buffer tank includes a refrigerant gas release pipe connected to a low pressure system of the refrigerant gas supply / discharge system.
バルブを備えたことを特徴とする請求項１１に記載のパ
ルス管冷凍機。12. The pulse tube refrigerator according to claim 11, wherein the refrigerant release pipe has a second orifice valve.
成された高圧の冷媒ガスを第１段極低温冷凍部および第
２段極低温冷凍部に供給する高圧系と、第１段極低温冷
凍部および第２段極低温冷凍部からの冷媒ガスを上記コ
ンプレッサに戻す低圧系をと備えるとともに、上記高圧
系と上記低圧系とを交互に切り替えるロータリーバルブ
とを備えたことを特徴とする請求項１に記載のパルス管
冷凍機。13. A refrigerant gas supply / discharge system comprising: a high pressure system for supplying high pressure refrigerant gas generated by a compressor to a first stage cryogenic refrigeration unit and a second stage cryogenic refrigeration unit; And a rotary valve for alternately switching between the high-pressure system and the low-pressure system, the low-pressure system returning the refrigerant gas from the first and second-stage cryogenic refrigeration units to the compressor. 2. The pulse tube refrigerator according to 1.
凍部の第１段蓄冷器、第１段パルス管および第２段極低
温部の第２段蓄冷器、第２段パルス管の個数に対応させ
て設けたことを特徴とする請求項１３に記載のパルス管
冷凍機。14. The number of the first stage regenerator, the first stage pulse tube, the second stage regenerator of the second stage cryogenic section, and the second stage pulse tube of the first stage cryogenic freezing section. 14. The pulse tube refrigerator according to claim 13, wherein the pulse tube refrigerator is provided correspondingly.
する超電導コイルと、この超電導コイルに伝熱板を介し
て接続し、極低温系と冷媒ガス給排・位相調整兼用系と
を組み合わせたパルス管冷凍機とを備えたことを特徴と
するパルス管冷凍機を用いた超電導磁石装置。15. A superconducting coil housed in a heat shield provided in a vacuum vessel, connected to the superconducting coil via a heat transfer plate, and a cryogenic system and a refrigerant gas supply / discharge / phase adjustment system are combined. A superconducting magnet device using a pulse tube refrigerator, comprising a pulse tube refrigerator.
ーシング内の中央に区画した第２段パルス管用ピストン
室と、この第２段パルス管用ピストン室の外側に同心的
に区画した第１段蓄冷器用ピストン室と、この第１段蓄
冷器用ピストン室の外側に同心的に区画した第１段パル
ス管用ピストン室と、上記第２段パルス管用ピストン室
に収容する第２段パルス管用ピストンと、上記第１段蓄
冷器用ピストン室に収容する第１段蓄冷器用ピストンお
よび上記第１段パルス管用ピストン室に収容する第１段
パルス管用ピストンとのそれぞれを進退移動させるとと
もに、上記第２段パルス管用ピストン、上記第１段蓄冷
器用ピストンおよび上記第１段パルス管用ピストンのそ
れぞれの位相角を調整するクランク軸とを備えたことを
特徴とする請求項１４に記載のパルス管冷凍機を用いた
超電導磁石装置。16. A refrigerant gas supply / discharge / phase adjustment system includes a second-stage pulse tube piston chamber defined in the center of a casing, and a first-stage pulse tube piston chamber concentrically defined outside the second-stage pulse tube piston chamber. A first-stage regenerator piston chamber, a first-stage pulse tube piston chamber concentrically partitioned outside the first-stage regenerator piston chamber, and a second-stage pulse tube piston housed in the second-stage pulse tube piston chamber. The first-stage regenerator piston housed in the first-stage regenerator piston chamber and the first-stage pulse tube piston housed in the first-stage pulse tube piston chamber are moved forward and backward, respectively, and the second-stage pulse is moved. 2. The apparatus according to claim 1, further comprising a crankshaft for adjusting a phase angle of each of the pipe piston, the first stage regenerator piston, and the first stage pulse tube piston. A superconducting magnet device using the pulse tube refrigerator according to 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000085344A JP3936117B2 (en) | 2000-03-24 | 2000-03-24 | Pulse tube refrigerator and superconducting magnet system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000085344A JP3936117B2 (en) | 2000-03-24 | 2000-03-24 | Pulse tube refrigerator and superconducting magnet system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001272126A true JP2001272126A (en) | 2001-10-05 |
| JP3936117B2 JP3936117B2 (en) | 2007-06-27 |
Family
ID=18601698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000085344A Expired - Fee Related JP3936117B2 (en) | 2000-03-24 | 2000-03-24 | Pulse tube refrigerator and superconducting magnet system |
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| Country | Link |
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