JP2001270111A - Method and apparatus for jetting liquid drop - Google Patents
Method and apparatus for jetting liquid dropInfo
- Publication number
- JP2001270111A JP2001270111A JP2000083790A JP2000083790A JP2001270111A JP 2001270111 A JP2001270111 A JP 2001270111A JP 2000083790 A JP2000083790 A JP 2000083790A JP 2000083790 A JP2000083790 A JP 2000083790A JP 2001270111 A JP2001270111 A JP 2001270111A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- pressure generating
- droplet
- nozzle openings
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
- Coating Apparatus (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【0001】[0001]
【発明が属する技術の分野】本発明は、ノズル開口から
微量な液を液滴として吐出する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for discharging a small amount of liquid as droplets from a nozzle opening.
【0002】[0002]
【従来の技術】例えば、捺染装置やマイクロデスペンサ
等の液滴噴射手段として、微量の液を比較的高い精度で
目的の位置に吐出することができるインクジェット記録
ヘッドが応用されている。2. Description of the Related Art For example, an ink jet recording head capable of discharging a small amount of liquid to a target position with relatively high precision has been applied as a droplet ejecting means such as a printing apparatus or a micro dispenser.
【0003】一方、吐出の効率の向上を図るためにノズ
ル開口数を増加させることが行われているが、、ノズル
開口間で1回の噴射による液の量に最大±10%程度の
ばらつきが生じるため、所定の面積に一定量の液を注入
する等の特別な用途では、同一領域への噴射回数を複数
回にして液量を調整することが必要となり、作業能率が
低下するという問題がある。On the other hand, the number of nozzle openings has been increased in order to improve the efficiency of ejection. However, the amount of liquid by one ejection between nozzle openings varies up to about ± 10%. Therefore, in special applications such as injecting a fixed amount of liquid into a predetermined area, it is necessary to adjust the amount of liquid by making the number of injections into the same area a plurality of times, which lowers the work efficiency. is there.
【0004】[0004]
【発明が解決しようとする課題】このような問題を解消
するため、ノズル開口、圧力発生室、及び圧力発生手段
などの噴射手段を構成する部品をより高い精度で製造す
ることも考えられるが、コストが急激に上昇するという
問題がある。本発明は、このような事情に鑑みてなされ
たものであって、その目的とするところは噴射手段の精
度に関わりなく、複数のノズル開口から一定量の液滴を
吐出することができる液滴噴射方法を提案することであ
る。また本発明の他の目的は、前記方法を実施するのに
適した液滴噴射装置を提供することである。In order to solve such a problem, it is conceivable to manufacture components constituting the injection means such as the nozzle opening, the pressure generation chamber, and the pressure generation means with higher accuracy. There is a problem that the cost rises sharply. The present invention has been made in view of such circumstances, and a purpose thereof is to be able to discharge a fixed amount of droplets from a plurality of nozzle openings, regardless of the accuracy of the ejection unit. It is to propose an injection method. It is another object of the present invention to provide a droplet ejecting apparatus suitable for carrying out the method.
【0005】[0005]
【課題を解決するための手段】このような課題を達成す
るために本発明においては、所定のピッチで複数配列さ
れたノズル開口のそれぞれに連通する圧力発生室と、前
記圧力発生室に外部から被噴射液を供給する共通の液室
と、各圧力発生室の圧力を変化させて液の吸引と前記ノ
ズル開口から液滴を吐出させる圧力発生手段とからなる
液滴噴射ヘツドを用いて液滴を噴射する方法において、
各ノズル開口をそれぞれIDデータにより特定して、前
記各ノズル開口の液滴量を補正データに基づいて前記圧
力発生手段への駆動エネルギを調整しつつ液滴を噴射さ
せるようにした。In order to achieve the above object, according to the present invention, a pressure generating chamber communicating with each of a plurality of nozzle openings arranged at a predetermined pitch, and A droplet is ejected by using a droplet ejecting head comprising a common liquid chamber for supplying the liquid to be ejected, and pressure generating means for changing the pressure of each pressure generating chamber to suck the liquid and discharge the liquid droplet from the nozzle opening. In the method of injecting,
Each nozzle opening is specified by ID data, and the droplet amount is ejected while adjusting the driving energy to the pressure generating means based on the correction data based on the correction data.
【0006】[0006]
【作用】各ノズル開口をIDデータにより特定し、各ノ
ズル開口の吐出液量に応じて駆動信号をきめ細かく設定
して、ノズル開口間での液量のばらつきを高い精度で補
正する。According to the present invention, each nozzle opening is specified by ID data, and a drive signal is finely set in accordance with the amount of liquid discharged from each nozzle opening, so that variation in liquid amount between nozzle openings is corrected with high accuracy.
【0007】[0007]
【発明の実施の態様】そこで以下に本発明の詳細を図示
した実施例に基づいて説明する。図1は、液滴噴射装置
の一実施例を示すものであって、後述する液滴噴射手段
を搭載したキャリッジ1は、フレーム2の機構室3に収
容された図示ない駆動モータにより矢印Aの方向に往復
動可能に構成され、柔軟な液供給チューブ4を介してタ
ンク5の液を噴射手段に供給できるように構成されてい
る。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a first embodiment of the present invention. FIG. 1 shows an embodiment of a droplet ejecting apparatus, in which a carriage 1 equipped with droplet ejecting means described later is driven by a drive motor (not shown) housed in a mechanism chamber 3 of a frame 2 as indicated by an arrow A. The liquid in the tank 5 can be supplied to the injection means via the flexible liquid supply tube 4.
【0008】フレーム2の下方には噴射手段のノズル開
口と対向するように被塗布体Pを支持するステージ6
が、その両側を基台7のガイド部材8にキャリッジ1の
移動方向(図中矢印Bで示す方向)に移動可能に設けら
れている。A stage 6 is provided below the frame 2 for supporting the object P to face the nozzle opening of the injection means.
Are provided on both sides of the guide member 8 of the base 7 so as to be movable in the moving direction of the carriage 1 (the direction indicated by the arrow B in the figure).
【0009】図2(イ)、(ロ)は、それぞれ前述の液
噴射手段の一実施例を示すものであって、流路形成板1
2に形成された凹部や貫通孔を、ノズルプレート10
で、また他方の面を弾性板13に封止して、ノズル開口
11に連通する圧力発生室15、液リザーバ16、及び
圧力発生室15と液リザーバ16とを接続する液供給口
17を形成し、弾性板13に圧電振動子20の伸長変
位、収縮変位を受けるようにホルダ19に収容されてい
る。FIGS. 2A and 2B show one embodiment of the above-mentioned liquid ejecting means.
The recesses and through holes formed in the nozzle plate 10
Then, the other surface is sealed with the elastic plate 13 to form the pressure generating chamber 15, the liquid reservoir 16 communicating with the nozzle opening 11, and the liquid supply port 17 connecting the pressure generating chamber 15 and the liquid reservoir 16. The piezoelectric vibrator 20 is accommodated in the holder 19 so as to receive the extension displacement and the contraction displacement of the piezoelectric vibrator 20 in the elastic plate 13.
【0010】圧電振動子20は、充電状態では収縮し、
また充電状態から放電状態に移る時点で伸長するように
構成され、先端を圧力発生室15に対向するように弾性
板13に当接させた状態で他端を基台21に固定されて
いる。なお、図中符号22は、液供給チューブ4により
リザーバ16に液を供給する導入管を、また符号23は
圧電振動子20に駆動信号を供給するフレキシブルケー
ブルをそれぞれ示す。The piezoelectric vibrator 20 contracts in a charged state,
The other end is fixed to the base 21 in a state where the distal end is in contact with the elastic plate 13 so as to face the pressure generating chamber 15 at the time of transition from the charging state to the discharging state. In the drawing, reference numeral 22 denotes an introduction pipe for supplying a liquid to the reservoir 16 by the liquid supply tube 4, and reference numeral 23 denotes a flexible cable for supplying a drive signal to the piezoelectric vibrator 20.
【0011】図3は、吐出装置の一実施例を示すもので
あって、被吐出体と吐出手段のノズル開口との相対位置
に対応して所定の周期で吐出指令を出力する吐出制御手
段30と、圧力発生手段である圧電振動子20に後述す
る複数種類の駆動信号を出力する駆動信号発生手段31
と、液滴を吐出させるべきノズル開口に関係する圧電振
動子20−1〜20−3に、IDデータ記憶手段32、
補正データ記憶手段33のデータを参照して最適な駆動
信号を印加するために、スイッチング手段34−1〜3
4−3をオンとする信号を出力する駆動信号印加手段3
5とから構成されている。FIG. 3 shows an embodiment of a discharge device. The discharge control means 30 outputs a discharge command at a predetermined period in accordance with the relative position between the discharge target and the nozzle opening of the discharge means. Driving signal generating means 31 for outputting a plurality of types of driving signals to be described later to the piezoelectric vibrator 20 as pressure generating means.
And ID data storage means 32 in the piezoelectric vibrators 20-1 to 20-3 related to the nozzle openings from which droplets are to be ejected.
In order to apply an optimal drive signal by referring to the data in the correction data storage unit 33, the switching units 34-1 to 3-3 are used.
Drive signal applying means 3 for outputting a signal for turning on 4-3
And 5.
【0012】駆動信号発生手段31は、図4に示したよ
うに1吐出周期に圧電振動子20の変位量が異なる複
数、この実施例では3種類の信号S1、S2、S3を一
定の周期で出力するように構成されている。As shown in FIG. 4, the drive signal generating means 31 outputs a plurality of signals, in this embodiment, three types of signals S1, S2, and S3 having different amounts of displacement of the piezoelectric vibrator 20 in one ejection cycle at a constant cycle. It is configured to output.
【0013】そして、駆動信号S2は、1回の吐出で発
生する液滴の液量が基準量、例えば10ピコリットルの
ノズル開口の圧電振動子に、また駆動信号S1は、1滴
の液量が多目、例えば10.5ピコリットルのノズル開
口の圧電振動子に、さらに駆動信号S3は、1滴の液量
が少なめ目、例えば9.5ピコリットルのノズル開口の
圧電振動子に印加される信号で、駆動信号S1、及び駆
動信号S3は基準の駆動信号S2の駆動電圧V2に対し
て異なる電圧V1、V2に設定されている。このため、
圧電振動子に印加される駆動エネルギが調整可能とな
り、ノズル開口等の流路特性や、圧電振動子20の圧電
定数や、変位特性などにばらつきが存在するとしても、
駆動信号S1、S2のいずれかを適宜選択することによ
り、1回の吐出でほぼ基準液量の液滴を吐出させること
が可能となる。The drive signal S2 is a reference amount, for example, a liquid amount of a droplet generated by one ejection is a piezoelectric amount of a nozzle opening of 10 picoliters. The drive signal S1 is a liquid amount of a single droplet. Is applied to a piezoelectric vibrator with a nozzle opening of 10.5 picoliters, and the drive signal S3 is applied to a piezoelectric vibrator with a smaller liquid amount of one drop, for example, a nozzle opening of 9.5 picoliters. The driving signal S1 and the driving signal S3 are set to voltages V1 and V2 different from the driving voltage V2 of the reference driving signal S2. For this reason,
The drive energy applied to the piezoelectric vibrator can be adjusted, and even if there are variations in the flow path characteristics such as the nozzle opening, the piezoelectric constant of the piezoelectric vibrator 20, and the displacement characteristics,
By appropriately selecting any one of the drive signals S1 and S2, it is possible to discharge a droplet having substantially the reference liquid amount in one discharge.
【0014】なお、駆動信号が台形波状、もしくは三角
波状の信号として構成されている場合には、圧電振動子
が液滴を吐出させるエネルギは、駆動信号の電圧だけで
はなく、電圧の変化速度、つまり単位時間当りに増減す
る電圧を変えることにより調整することができる。When the driving signal is configured as a trapezoidal or triangular wave signal, the energy required for the piezoelectric vibrator to eject droplets is not only the voltage of the driving signal but also the rate of change of the voltage, That is, it can be adjusted by changing the voltage that increases or decreases per unit time.
【0015】IDデータ記憶手段32は、噴射手段のノ
ズルプレート10に設けられている複数のノズル開口の
それぞれを特定するためのIDデータを格納して構成さ
れている。The ID data storage means 32 stores ID data for specifying each of a plurality of nozzle openings provided on the nozzle plate 10 of the injection means.
【0016】補正データ記憶手段33は、IDデータに
より特定されるノズル開口から1回に吐出される液滴の
液量が基準値となる駆動信号S1、S2、S3のいずれ
かを選択するデータを格納して構成されている。The correction data storage means 33 stores data for selecting one of the drive signals S1, S2, S3 in which the liquid amount of the liquid droplet ejected at one time from the nozzle opening specified by the ID data becomes a reference value. It is stored and configured.
【0017】この実施例において、基準の駆動信号S1
により圧電振動子20−1、20−2、20−3をそれ
ぞれ駆動し、それぞれの液滴の液量を測定する。その結
果、圧電振動子20−1、20−2、20−3の駆動に
よりノズル開口から吐出される液滴の液量が、それぞれ
10.5ピコリットル、10.0ピコリットル、及び
9.5ピコリットルであることが判明すると、これらの
ノズル開口のIDデータに対応させて補正データ記憶手
段33に、圧電振動子20−1には駆動信号S1、圧電
振動子20−2には駆動信号S2、及び圧電振動子20
−3には駆動信号S3を印加するように指令するデータ
を格納する。In this embodiment, the reference drive signal S1
Drive the piezoelectric vibrators 20-1, 20-2, and 20-3, respectively, and measure the liquid amount of each droplet. As a result, the liquid volumes of the droplets discharged from the nozzle openings by driving the piezoelectric vibrators 20-1, 20-2, and 20-3 are 10.5 picoliter, 10.0 picoliter, and 9.5, respectively. If it is determined that the pressure is picoliter, the correction data storage means 33 stores the drive signal S1 for the piezoelectric vibrator 20-1 and the drive signal S2 for the piezoelectric vibrator 20-2 in correspondence with the ID data of the nozzle openings. And the piezoelectric vibrator 20
-3 stores data instructing to apply the drive signal S3.
【0018】このようにして全てのノズル開口に対する
補正データの格納が終了した段階で、吐出指令が入力す
ると、吐出制御手段30は、駆動信号発生手段31を作
動させて1吐出周期の間に駆動信号S1、S2、S3を
シリアルに出力させる。When the ejection command is input at the stage when the correction data for all the nozzle openings has been stored in this way, the ejection control means 30 activates the drive signal generation means 31 to drive the drive signal during one ejection cycle. The signals S1, S2, and S3 are output serially.
【0019】同時に駆動信号印加手段35を作動させ
て、IDデータ記憶手段32及び補正データ記憶手段3
3のデータに基づいて、駆動信号S1が出力される時点
ではスイッチング手段34−1をオンにし、また駆動信
号S2が出力される時点ではスイッチング手段34−2
をオンにし、さらに駆動信号S3が出力される時点では
スイッチング手段34−3をオンにする。At the same time, the drive signal applying means 35 is operated, and the ID data storing means 32 and the correction data storing means 3 are operated.
3, the switching means 34-1 is turned on when the drive signal S1 is output, and the switching means 34-2 is turned on when the drive signal S2 is output.
Is turned on, and when the drive signal S3 is output, the switching means 34-3 is turned on.
【0020】これにより、圧電振動子20−1は基準値
よりも弱いエネルギを発生して、基準信号S2が印加さ
れた場合の液量10.5ピコリットルよりも少ない1
0.0ピコリットルの液滴を、また圧電振動子20−3
は、基準信号S2が印加された場合の液量9.5ピコリ
ットルよりも多い10.0ピコリットルの液滴を吐出す
るから、すべてのノズル開口から基準量である10.0
ピコリットルの液滴を吐出させることができる。As a result, the piezoelectric vibrator 20-1 generates energy weaker than the reference value, and the liquid amount when the reference signal S2 is applied is less than 10.5 picoliter.
A 0.0 picoliter droplet is applied to the piezoelectric vibrator 20-3.
Discharges a liquid droplet of 10.0 picoliters, which is larger than the liquid amount of 9.5 picoliters when the reference signal S2 is applied.
Picoliter droplets can be ejected.
【0021】このようにして、所定箇所への液の噴射が
終了した時点で、キャリッジ1やステージ6を駆動して
被塗布体Pを移動させると、吐出制御手段30が吐出信
号を出力して上述の工程を繰返す。As described above, when the carriage 1 and the stage 6 are driven to move the object P at the time when the ejection of the liquid to the predetermined location is completed, the ejection control means 30 outputs an ejection signal. The above steps are repeated.
【0022】なお、上述の実施例のおいては、1吐出周
期に1滴の液滴を吐出する場合についてしたが、図5に
示したように相互の駆動信号によるメニスカスが干渉し
ない程度の周期で、駆動信号S1、S2、S3を1セッ
トとして、これを1吐出周期内で複数セット繰返すと、
各ノズル開口からの液量を基準値以外の値に調整するこ
とができるから、1吐出周期内での液量をきめ細かく調
整することができる。In the above embodiment, one droplet is ejected in one ejection cycle. However, as shown in FIG. 5, the period is such that the meniscus does not interfere with each other due to the mutual drive signal. When the drive signals S1, S2, and S3 are set as one set, and this is repeated a plurality of sets within one ejection cycle,
Since the liquid amount from each nozzle opening can be adjusted to a value other than the reference value, the liquid amount within one ejection cycle can be finely adjusted.
【0023】また、上述の実施例においては、各ノズル
開口の液量に応じて圧力発生手段に独立した駆動信号を
印加するようにしているが、図6に示したように1吐出
周期に前述の駆動エネルギの異なる駆動信号A、Bを対
として、これらを複数回A−1、B−1〜A−4、B−
4を、相互の信号によるメニスカスの運動が停止しない
間隔で発生させ、いずれのタイミングで圧電振動子に供
給するかをモード1〜モード5として規定しておくと、
基準量の液滴を吐出するノズル開口の圧電振動子に例を
採ると、36ピコリットルから40ピコリットルまでを
1ピコリットル刻みで調整することができる。In the above-described embodiment, an independent drive signal is applied to the pressure generating means in accordance with the amount of liquid in each nozzle opening. However, as shown in FIG. , And a plurality of driving signals A and B having different driving energies A-1 and B-1 to A-4 and B-
4 is generated at intervals at which the movement of the meniscus due to the mutual signal does not stop, and at which timing it is supplied to the piezoelectric vibrator is defined as mode 1 to mode 5,
Taking an example of a piezoelectric vibrator having a nozzle opening for discharging a reference amount of droplets, it is possible to adjust from 36 picoliters to 40 picoliters in increments of 1 picoliter.
【0024】すなわち、標準量を38ピコリットルとす
ると、36ピコリットルしか吐出出来ないノズル開口の
圧電振動子にはモード5で、また40ピコリットルも吐
出するノズル開口の圧電振動子に対してはモード1で駆
動信号を印加するように補正データ記憶手段33のデー
タを調整しておくことにより、各ノズル開口間での液量
のばらつきを補正することできる。That is, assuming that the standard amount is 38 picoliters, mode 5 is used for a piezoelectric vibrator having a nozzle opening that can discharge only 36 picoliters, and a piezoelectric vibrator having a nozzle opening that can discharge 40 picoliters is used. By adjusting the data of the correction data storage unit 33 so that the drive signal is applied in the mode 1, it is possible to correct the variation in the liquid amount between the nozzle openings.
【0025】さらには、これら複数のモードをダイナミ
ックに選択することにより、ノズル開口間での液量のば
らつきを修正しつつ、1滴の液量を任意の値に調整する
ことができる。Further, by dynamically selecting the plurality of modes, it is possible to adjust the amount of one drop to an arbitrary value while correcting the variation in the amount of liquid between nozzle openings.
【0026】同様に図7に示したように1吐出周期に駆
動エネルギが同一の駆動信号Cを、相互の信号によるメ
ニスカスの運動が停止しない一定周期で複数、この実施
例では4個を発生させ、圧電振動子20に印加するタイ
ミングを選択することにより、液量を調整することがで
きる。Similarly, as shown in FIG. 7, a plurality of drive signals C having the same drive energy in one ejection cycle are generated at a constant cycle in which the movement of the meniscus due to the mutual signal is not stopped, in this embodiment, four drive signals are generated. The liquid amount can be adjusted by selecting the timing of application to the piezoelectric vibrator 20.
【0027】すなわち、モード2のように直前の液滴噴
射によるメニスカスがほぼ平定するまでの時間T0が経
過した時点(t1)で次の駆動信号C2を印加した場合
には、図8(イ)に示したように直前の駆動信号C1に
よる液滴と同等のものが吐出されるが、モード3のよう
に直前の液滴噴射に起因するメニスカスの運動が圧力発
生室側に向かう時点(t2)で次の駆動信号C4を印加
すると、図8(ロ)に示したように液滴噴射後のメニス
カスの運動エネルギを利用することになり、メニスカス
が大きく運動し、結果として噴射される液滴の量が多く
なる。That is, when the next drive signal C2 is applied at the time (t1) when the time T0 until the meniscus by the immediately preceding droplet ejection is substantially flattened as in mode 2, FIG. As shown in (3), a droplet equivalent to the immediately preceding drive signal C1 is ejected. However, as in mode 3, the movement of the meniscus due to the immediately preceding droplet ejection goes to the pressure generating chamber side (t2). When the next driving signal C4 is applied, the kinetic energy of the meniscus after droplet ejection is used as shown in FIG. 8 (b), the meniscus largely moves, and as a result, the The amount increases.
【0028】このような液滴噴射装置は、図9に示した
ように基板40の表面をバンク材41により一定の面積
で区画し、各区画された各領域42に規定量の液状染料
43を注入してから、溶媒を揮散させてフィルタを形成
する目的に最適な手段となる。In such a droplet ejecting apparatus, as shown in FIG. 9, the surface of the substrate 40 is divided by a bank material 41 into a fixed area, and a prescribed amount of a liquid dye 43 is applied to each of the divided areas 42. This is an optimal means for the purpose of forming a filter by evaporating the solvent after injection.
【0029】また、上述の実施例においては、被塗布体
に液滴を供給する場合について説明したが、液としてイ
ンクを使用することにより、印刷媒体に所定の画像や文
字を高い品質で印刷することができる。Further, in the above-described embodiment, a case has been described in which liquid droplets are supplied to the object to be coated. However, by using ink as a liquid, a predetermined image or character can be printed on a print medium with high quality. be able to.
【0030】なお、上述の実施例においては圧力発生室
の容積を圧電振動子により変化させて液滴を吐出させる
ようにしているが、圧力発生室に加熱素子を内蔵して液
を気化させ、気化時の圧力により液を吐出させるものに
適用しても同様の作用を奏する。In the above-described embodiment, droplets are ejected by changing the volume of the pressure generating chamber by the piezoelectric vibrator. However, a heating element is incorporated in the pressure generating chamber to vaporize the liquid. The same effect can be obtained by applying the present invention to a device that discharges a liquid by pressure during vaporization.
【0031】[0031]
【発明の効果】以上説明したように本発明においては、
各ノズル開口をそれぞれIDデータにより特定して、各
ノズル開口の液滴量を補正データに基づいて圧力発生手
段への駆動エネルギを調整しつつ液滴を噴射させるよう
にしたので、各ノズル開口をIDデータにより特定して
各ノズル開口の吐出液量に応じて駆動信号をきめ細かく
設定することでき、ノズル開口間での液量のばらつきを
高い精度で補正しながら、液滴を噴射させることができ
る。As described above, in the present invention,
Each nozzle opening is specified by the ID data, and the droplet amount of each nozzle opening is ejected while adjusting the driving energy to the pressure generating means based on the correction data. The drive signal can be finely set according to the amount of liquid discharged from each nozzle opening specified by ID data, and droplets can be ejected while correcting variations in liquid amount between nozzle openings with high accuracy. .
【図1】本発明の噴射装置の一実施例を示す図である。FIG. 1 is a view showing one embodiment of an injection device of the present invention.
【図2】図(イ)、(ロ)は、それぞれ同上噴射装置に
使用する噴射手段の一実施例を示す組立斜視図と断面図
である。FIGS. 2 (a) and 2 (b) are an assembly perspective view and a sectional view, respectively, showing an embodiment of an injection means used in the above-described injection device.
【図3】本発明の噴射装置の一実施例を示すブロック図
である。FIG. 3 is a block diagram showing an embodiment of the injection device of the present invention.
【図4】駆動信号の一実施例を示す図である。FIG. 4 is a diagram illustrating an example of a drive signal.
【図5】本発明の他の実施例を示す波形図である。FIG. 5 is a waveform chart showing another embodiment of the present invention.
【図6】本発明の他の実施例を示す波形図である。FIG. 6 is a waveform chart showing another embodiment of the present invention.
【図7】本発明の他の実施例を示す波形図である。FIG. 7 is a waveform chart showing another embodiment of the present invention.
【図8】図(イ)、(ロ)は、それぞれ同上実施例にお
ける液滴量の変化を説明するための図である。FIGS. 8A and 8B are diagrams for explaining a change in a droplet amount in the embodiment.
【図9】図(イ)、(ロ)は、それぞれ本発明の液滴噴
射装置が適用される被塗布物の一例を示す斜視図と断面
図である。FIGS. 9A and 9B are a perspective view and a cross-sectional view, respectively, showing an example of an object to which a droplet ejecting apparatus according to the present invention is applied.
1 キャリッジ 2 フレーム 3 液供給チューブ 5 タンク 6 ステージ 10 ノズルプレート 11 ノズル開口 12 流路形成板 13 弾性板 15 圧力発生室 16 液リザーバ 20、20−1〜20−3 圧電振動子 Reference Signs List 1 carriage 2 frame 3 liquid supply tube 5 tank 6 stage 10 nozzle plate 11 nozzle opening 12 flow path forming plate 13 elastic plate 15 pressure generating chamber 16 liquid reservoir 20, 20-1 to 20-3 piezoelectric vibrator
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) // B05C 5/02 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) // B05C 5/02
Claims (7)
口のそれぞれに連通する圧力発生室と、前記圧力発生室
に外部から被噴射液を供給する共通の液室と、各圧力発
生室の圧力を変化させて液の吸引と前記ノズル開口から
液滴を吐出させる圧力発生手段とからなる液滴噴射ヘツ
ドを用いて液滴を噴射する方法において、 各ノズル開口をそれぞれIDデータにより特定して、前
記各ノズル開口の液滴量を補正データに基づいて前記圧
力発生手段への駆動エネルギを調整しつつ液滴を噴射さ
せる液滴噴射方法。1. A pressure generating chamber communicating with each of a plurality of nozzle openings arranged at a predetermined pitch, a common liquid chamber for supplying a liquid to be injected from the outside to the pressure generating chamber, and a pressure of each pressure generating chamber. In the method of ejecting liquid droplets using a liquid droplet ejecting head comprising liquid suction by changing the pressure and a pressure generating means for ejecting liquid droplets from the nozzle openings, each nozzle opening is specified by ID data, A droplet ejecting method for ejecting a droplet while adjusting a driving energy to the pressure generating means based on correction data on a droplet amount of each nozzle opening.
記駆動エネルギを前記圧力発生手段に複数回、印加する
ことができる時間を1吐出周期として設定されている請
求項1に記載の液滴噴射方法。2. The droplet according to claim 1, wherein a period during which the driving energy for discharging the liquid to be ejected as droplets can be applied to the pressure generating means a plurality of times is set as one ejection cycle. Injection method.
複数回印加することにより、前記ノズル開口の液量を所
定値に調整する請求項1に記載の液滴噴射方法。3. The droplet ejecting method according to claim 1, wherein the liquid amount at the nozzle opening is adjusted to a predetermined value by applying the driving energy a plurality of times within the one ejection cycle.
口のそれぞれに連通する圧力発生室と、前記圧力発生室
に外部から被噴射液を供給する共通の液室と、各圧力発
生室の圧力を変化させて液の吸引と前記ノズル開口から
液滴を吐出させる圧力発生手段とからなる液滴噴射ヘツ
ドと、 前記圧力発生手段による前記圧力発生室の加圧力を異な
らしめる駆動信号を1吐出周期内に複数発生する駆動信
号発生手段と、 前記各ノズル開口をそれぞれ特定するIDデータを格納
したIDデータ記憶手段と、前記各ノズル開口の液滴量
を補正する補正データを格納した補正データ記憶手段
と、 液滴噴射指令信号に基づいて液滴を吐出すべきノズル開
口の前記IDデータにより補正データを読出して、所定
量の液体を噴射するように前記圧力発生手段に前記駆動
信号発生手段の駆動信号を選択的に出力する駆動信号印
加手段とからなる液滴噴射装置。4. A pressure generating chamber communicating with each of a plurality of nozzle openings arranged at a predetermined pitch, a common liquid chamber for supplying a liquid to be injected from outside to the pressure generating chamber, and a pressure of each pressure generating chamber. And a driving signal for changing the pressure of the pressure generating chamber by the pressure generating means, the discharging signal comprising one discharge cycle. A plurality of drive signal generation means, ID data storage means for storing ID data for specifying each of the nozzle openings, and correction data storage means for storing correction data for correcting the droplet amount of each of the nozzle openings Reading the correction data based on the ID data of the nozzle opening from which a droplet is to be ejected based on the droplet ejection command signal, and instructing the pressure generating means to eject a predetermined amount of liquid. And a drive signal applying means for selectively outputting a drive signal of the drive signal generating means.
タ、及び補正データに基づいて1吐出周期内に複数の駆
動信号を選択して前記圧力発生手段に出力する請求項4
に記載の液滴噴射装置。5. The drive signal applying means selects a plurality of drive signals within one ejection cycle based on the ID data and the correction data and outputs the selected drive signals to the pressure generating means.
A liquid droplet ejecting apparatus according to claim 1.
を備え、前記壁面を圧電振動子により変位させるように
構成されている請求項4に記載の液滴噴射装置。6. The droplet ejecting apparatus according to claim 4, wherein the pressure generating chamber has an elastically deformable wall surface, and the wall surface is displaced by a piezoelectric vibrator.
いて、前記発熱素子による被噴射液の気化圧力により液
滴を吐出させる請求項4に記載の液滴噴射装置。7. The droplet ejection apparatus according to claim 4, wherein a heating element is stored in the pressure generating chamber, and the droplet is ejected by a vaporization pressure of the liquid to be ejected by the heating element.
Priority Applications (3)
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JP2000083790A JP3596599B2 (en) | 2000-03-24 | 2000-03-24 | Droplet ejecting method and droplet ejecting apparatus |
EP01106460A EP1138489A1 (en) | 2000-03-24 | 2001-03-23 | Liquid jetting method and liquid jetting apparatus using the method |
US09/816,770 US7066565B2 (en) | 2000-03-24 | 2001-03-26 | Liquid jetting method and liquid jetting apparatus using the method |
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JP2000083790A JP3596599B2 (en) | 2000-03-24 | 2000-03-24 | Droplet ejecting method and droplet ejecting apparatus |
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JP2001270111A true JP2001270111A (en) | 2001-10-02 |
JP3596599B2 JP3596599B2 (en) | 2004-12-02 |
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ID=18600366
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Cited By (9)
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---|---|---|---|---|
GB2372738A (en) * | 2000-11-06 | 2002-09-04 | Ngk Insulators Ltd | Droplet ejecting apparatus with feedback control |
EP1295643A1 (en) * | 2001-09-25 | 2003-03-26 | Ngk Insulators, Ltd. | Liquid droplet ejecting method and a liquid droplet ejection apparatus |
US6948791B2 (en) | 2002-06-26 | 2005-09-27 | Seiko Epson Corporation | Liquid ejecting apparatus |
JP2007516877A (en) * | 2003-12-30 | 2007-06-28 | ディマティックス インコーポレイテッド | Droplet ejection assembly |
JP2009166337A (en) * | 2008-01-15 | 2009-07-30 | Seiko Epson Corp | Liquid droplet ejecting device and liquid droplet ejection method |
JP2010221424A (en) * | 2009-03-19 | 2010-10-07 | Seiko Epson Corp | Method of manufacturing liquid ejecting apparatus and liquid ejecting apparatus |
JP2011078190A (en) * | 2009-09-30 | 2011-04-14 | Brother Industries Ltd | Driver for piezoelectric actuator |
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Publication number | Priority date | Publication date | Assignee | Title |
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GB2372738A (en) * | 2000-11-06 | 2002-09-04 | Ngk Insulators Ltd | Droplet ejecting apparatus with feedback control |
US6719211B2 (en) | 2000-11-06 | 2004-04-13 | Ngk Insulators, Ltd. | Droplet ejecting apparatus |
GB2372738B (en) * | 2000-11-06 | 2004-10-06 | Ngk Insulators Ltd | Droplet ejecting apparatus |
EP1295643A1 (en) * | 2001-09-25 | 2003-03-26 | Ngk Insulators, Ltd. | Liquid droplet ejecting method and a liquid droplet ejection apparatus |
US6899283B2 (en) * | 2001-09-25 | 2005-05-31 | Ngk Insulators, Ltd. | Liquid droplet ejecting method and a liquid droplet ejection apparatus |
US6948791B2 (en) | 2002-06-26 | 2005-09-27 | Seiko Epson Corporation | Liquid ejecting apparatus |
JP2007516877A (en) * | 2003-12-30 | 2007-06-28 | ディマティックス インコーポレイテッド | Droplet ejection assembly |
JP4936900B2 (en) * | 2003-12-30 | 2012-05-23 | フジフィルム ディマティックス, インコーポレイテッド | Droplet ejection assembly |
JP2009166337A (en) * | 2008-01-15 | 2009-07-30 | Seiko Epson Corp | Liquid droplet ejecting device and liquid droplet ejection method |
JP2010221424A (en) * | 2009-03-19 | 2010-10-07 | Seiko Epson Corp | Method of manufacturing liquid ejecting apparatus and liquid ejecting apparatus |
JP2011078190A (en) * | 2009-09-30 | 2011-04-14 | Brother Industries Ltd | Driver for piezoelectric actuator |
EP3378572A1 (en) * | 2017-03-20 | 2018-09-26 | F Service Automation S.R.L. | Glueing plotter for paper industry |
JP2021024197A (en) * | 2019-08-05 | 2021-02-22 | 株式会社リコー | Liquid discharge device |
JP7363175B2 (en) | 2019-08-05 | 2023-10-18 | 株式会社リコー | liquid discharge device |
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