JP2001221345A5 - - Google Patents

Claims (20)

ハウジングと、転がり軸受と、当該転がり軸受を介して前記ハウジングに相対回転可能に支持された回転軸と、を備えたスピンドル装置をシールするスピンドルシール装置において、前記軸受の外界側に気体軸受が形成されてなるスピンドルシール装置。 In a spindle seal device that seals a spindle device comprising a housing, a rolling bearing, and a rotating shaft that is rotatably supported by the housing via the rolling bearing, a gas bearing is formed on the outside of the bearing A spindle seal device. 前記気体軸受は、弾性部材を介して前記気体軸受に対向する軸受押え又は前記ハウジングに支持されてなる請求項１記載の装置。The apparatus according to claim 1, wherein the gas bearing is supported by a bearing retainer or the housing facing the gas bearing via an elastic member. 前記弾性部材は、前記気体軸受の部材よりも剛性が低い部材で構成されてなる請求項２記載の装置。The apparatus according to claim 2, wherein the elastic member is formed of a member having rigidity lower than that of the gas bearing member. 前記気体軸受が静圧軸受である請求項１記載の装置。The apparatus of claim 1, wherein the gas bearing is a hydrostatic bearing. 前記気体軸受が動圧軸受けである請求項１記載の装置。The apparatus of claim 1, wherein the gas bearing is a dynamic pressure bearing. 前記回転軸の軸方向の一端部が前記気体軸受によりシールされてなる請求項１記載の装置。The apparatus according to claim 1, wherein one end of the rotating shaft in the axial direction is sealed by the gas bearing. 前記回転軸の軸方向の両端部が前記気体軸受によってシールされてなる請求項１記載の装置。The apparatus according to claim 1, wherein both ends of the rotary shaft in the axial direction are sealed by the gas bearing. 前記気体軸受の軸方向の一端にある当該気体軸受のカバーと、他端にある前記気体軸受の押えと、のそれぞれが前記気体軸受と成す隙間に気体が供給されてなる請求項２記載の装置。The apparatus according to claim 2, wherein gas is supplied to a gap formed between the gas bearing cover at one end in the axial direction of the gas bearing and the presser of the gas bearing at the other end. . 前記弾性部材はＯリングからなる請求項２記載の装置。The apparatus according to claim 2, wherein the elastic member is an O-ring. 前記弾性部材は前記気体軸受の外周に設けられた環状溝に嵌装されてなる請求項２記載の装置。The apparatus according to claim 2, wherein the elastic member is fitted into an annular groove provided on an outer periphery of the gas bearing. 前記気体軸受の外周の径は、前記軸受押えの内周面の径より、前記弾性部材による調芯作用を得る程度に小さく設定されてなる請求項２記載の装置。The diameter of the outer periphery of the said gas bearing is an apparatus of Claim 2 set small so that the alignment effect | action by the said elastic member may be obtained from the diameter of the internal peripheral surface of the said bearing holder. 前記気体軸受は多孔質体から構成されてなる請求項１記載の装置。The apparatus according to claim 1, wherein the gas bearing is made of a porous body. 前記弾性部材は、前記気体軸受に供給される気体が当該気体軸受外に漏れるのをシールするものである請求項２記載の装置。The apparatus according to claim 2, wherein the elastic member seals a gas supplied to the gas bearing from leaking out of the gas bearing. 前記弾性部材は、Ｖパッキン又はゴムから構成されてなる請求項２記載の装置。The apparatus according to claim 2, wherein the elastic member is made of V packing or rubber. 前記気体軸受の外周面における軸方向の両端部に前記弾性部材が設けられてなる請求項２記載の装置。The apparatus according to claim 2, wherein the elastic member is provided at both axial ends of the outer peripheral surface of the gas bearing. 前記気体軸受が軸方向のアキシアル軸受から構成されてなる請求項１記載の装置。The apparatus of claim 1, wherein the gas bearing comprises an axial axial bearing. 前記弾性部材が前記気体軸受の外周面と軸方向の端面に配置されてなる請求項２記載の装置。The apparatus according to claim 2, wherein the elastic member is disposed on an outer peripheral surface and an axial end surface of the gas bearing. 前記弾性部材が前記外周面の一箇所及び前記端面の一箇所にそれぞれ配置されてなる請求項１７記載の装置。The apparatus according to claim 17, wherein the elastic member is disposed at one place on the outer peripheral surface and one place on the end face. 前記軸方向に加え、ラジアル方向も前記気体軸受が形成されてなる請求項１記載の装置。The apparatus according to claim 1, wherein the gas bearing is formed in a radial direction in addition to the axial direction. 前記気体静圧軸受は絞り、多孔質絞り、自成絞り等どのような絞りにも対応するように構成されてなる請求項４記載の装置。5. The apparatus according to claim 4, wherein the hydrostatic bearing is configured to accommodate any restriction such as a restriction, a porous restriction, and a self-contained restriction.