JP2001221345A5 - - Google Patents
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- Publication number
- JP2001221345A5 JP2001221345A5 JP2000050132A JP2000050132A JP2001221345A5 JP 2001221345 A5 JP2001221345 A5 JP 2001221345A5 JP 2000050132 A JP2000050132 A JP 2000050132A JP 2000050132 A JP2000050132 A JP 2000050132A JP 2001221345 A5 JP2001221345 A5 JP 2001221345A5
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- gas bearing
- elastic member
- gas
- axial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000050132A JP4069435B2 (en) | 1999-11-30 | 2000-02-25 | Spindle seal device |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11-340814 | 1999-11-30 | ||
JP34081499 | 1999-11-30 | ||
JP2000050132A JP4069435B2 (en) | 1999-11-30 | 2000-02-25 | Spindle seal device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006296691A Division JP2007113786A (en) | 1999-11-30 | 2006-10-31 | Spindle sealing device |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001221345A JP2001221345A (en) | 2001-08-17 |
JP2001221345A5 true JP2001221345A5 (en) | 2005-08-11 |
JP4069435B2 JP4069435B2 (en) | 2008-04-02 |
Family
ID=26576803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000050132A Expired - Fee Related JP4069435B2 (en) | 1999-11-30 | 2000-02-25 | Spindle seal device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4069435B2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4831809B2 (en) * | 2005-11-16 | 2011-12-07 | 三菱重工業株式会社 | Shaft seal structure of rotating device for muddy water |
KR100705118B1 (en) * | 2005-12-07 | 2007-04-09 | 현대자동차주식회사 | Apparatus for sealing machining oil of gear box |
JP5402002B2 (en) * | 2009-01-13 | 2014-01-29 | 株式会社ジェイテクト | Rotating shaft sealing device and sealing method |
JP5796645B2 (en) * | 2013-11-20 | 2015-10-21 | 日本精工株式会社 | Rotating mechanism, machine tool and semiconductor manufacturing equipment |
US10788076B2 (en) | 2014-01-14 | 2020-09-29 | Nsk Ltd. | Rotation mechanism, machine tool, and semiconductor manufacturing device |
-
2000
- 2000-02-25 JP JP2000050132A patent/JP4069435B2/en not_active Expired - Fee Related
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