JP2001108553A - Sensor for measuring pressure - Google Patents
Sensor for measuring pressureInfo
- Publication number
- JP2001108553A JP2001108553A JP28701799A JP28701799A JP2001108553A JP 2001108553 A JP2001108553 A JP 2001108553A JP 28701799 A JP28701799 A JP 28701799A JP 28701799 A JP28701799 A JP 28701799A JP 2001108553 A JP2001108553 A JP 2001108553A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- pressure receiving
- case
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、歪み検出素子を用
い、受圧素子に加わる圧力とその歪みとの関係から上記
圧力を測定する圧力測定用センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure measuring sensor that uses a strain detecting element and measures the pressure from the relationship between the pressure applied to the pressure receiving element and the strain.
【０００２】[0002]
【関連する背景技術】従来，この種のセンサでは、受圧
素子であるダイアフラムに歪みゲージ等によって構成さ
れる歪み検出素子を貼り付けた構造からなるものがあ
る。上記センサでは、この貼り付けの作業性を高めるた
め、ダイアフラムとケースを別々に作成し、ダイアフラ
ムに歪み検出素子を固定した後に上記ダイアフラムをケ
ースに固定していた。この固定方法としては、例えば溶
接による場合と、ボルトによる場合が考えられるが、上
記溶接による場合には、溶接時の熱の影響で上記ダイア
フラムに固定された歪み検出素子が壊れてしまうため、
ボルトによってダイアフラムをケースに固定する方法が
一般的であった。2. Related Background Art Conventionally, this type of sensor has a structure in which a strain detecting element constituted by a strain gauge or the like is attached to a diaphragm which is a pressure receiving element. In the above-mentioned sensor, in order to enhance the workability of the attachment, a diaphragm and a case are separately formed, and after the strain detecting element is fixed to the diaphragm, the diaphragm is fixed to the case. As the fixing method, for example, a case using welding and a case using bolts can be considered, but in the case of the above welding, the strain detection element fixed to the diaphragm is broken by the influence of heat at the time of welding,
A method of fixing the diaphragm to the case with bolts has been common.
【０００３】このボルトで固定する場合、上記センサ
は、ダイアフラム上に歪み検出素子を貼り付けた後に、
ボルトによって上記ダイアフラムを台座の部分でケース
と固定する構造になっていた。[0003] In the case of fixing with these bolts, the above-mentioned sensor attaches a strain detecting element to a diaphragm,
The structure was such that the diaphragm was fixed to the case at the pedestal portion by bolts.
【０００４】[0004]
【発明が解決しようとする課題】ところが、上記センサ
では、ボルトの固定状態、すなわちダイアフラムの台座
とケースのボルトによる締め付け状態によって、ダイア
フラムが変形して検出される歪みの特性が大幅に異なる
という問題点があった。また、上記センサでは、振動や
衝撃等が加わりボルトに緩みが生じると、同じ圧力が加
わってもダイアフラムの歪みが変化してしまい、圧力測
定値に大きな誤差が生じるという問題点があった。However, in the above-mentioned sensor, the characteristics of the distortion detected by the deformation of the diaphragm greatly differ depending on the fixed state of the bolt, that is, the tightening state of the diaphragm base and the case by the bolt. There was a point. Further, in the above-mentioned sensor, when vibration or impact is applied and the bolt is loosened, there is a problem that even if the same pressure is applied, the distortion of the diaphragm changes and a large error occurs in the measured pressure value.
【０００５】本発明は，上記問題点に鑑みなされたもの
で、ボルトの締め付け状態、または振動等によって台座
の取り付け状態が変化しても、受圧素子の変形を防いで
信頼性の高い圧力測定を可能とする圧力測定用センサを
提供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and prevents a pressure receiving element from being deformed even if the mounting state of a pedestal is changed due to a tightened state of a bolt or vibration or the like. It is an object of the present invention to provide a sensor for pressure measurement that can be used.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本発明では、受圧素子に歪み検出素子を固定し、該
受圧素子の歪みを検出することにより、該受圧素子に加
わる圧力を測定する圧力測定用センサにて、前記受圧素
子と台座とを一体に形成し、かつ前記台座の外縁に固定
用のつば部を設け、前記つば部を収納部に固定する圧力
測定用センサが提供される。In order to achieve the above object, according to the present invention, a strain detecting element is fixed to a pressure receiving element, and the pressure applied to the pressure receiving element is measured by detecting the distortion of the pressure receiving element. In a pressure measuring sensor, a pressure measuring sensor is provided in which the pressure receiving element and a pedestal are integrally formed, and a fixing flange is provided on an outer edge of the pedestal, and the flange is fixed to a storage portion. .
【０００７】すなわち、受圧素子であるダイアフラムと
台座とつば部を一体に形成させて、このつば部をボルト
で収納部であるケースに直接固定することで、ボルト固
定によってダイアフラムに歪みが発生するのを防ぐ。That is, the diaphragm as the pressure receiving element, the pedestal, and the flange are integrally formed, and the flange is directly fixed to the case as the storage portion with bolts, so that the diaphragm is distorted due to the bolt fixing. prevent.
【０００８】[0008]
【発明の実施の形態】本発明に係る圧力測定用センサの
実施例を図１乃至図４の図面に基づいて説明する。図１
は、圧力測定用センサの構成の第１実施例を示す断面図
である。図において、本実施例の圧力測定用センサは、
本発明の受圧部１０と、本発明の収納部を構成するケー
ス１１と、上部金具１２と、本発明の歪み検出素子を有
する光ケーブル１３とからなる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a pressure measuring sensor according to the present invention will be described with reference to FIGS. FIG.
FIG. 2 is a sectional view showing a first embodiment of the configuration of the pressure measurement sensor. In the figure, the pressure measurement sensor of the present embodiment
It comprises a pressure receiving part 10 of the present invention, a case 11 constituting a storage part of the present invention, an upper fitting 12, and an optical cable 13 having a strain detecting element of the present invention.
【０００９】受圧部１０は、本発明の受圧素子を構成す
るダイアフラム１０ａと、台座１０ｂと、本発明のつば
部を構成するフランジ１０ｃとから構成されている。ダ
イアフラム１０ａと台座１０ｂは、例えば１枚のステン
レス板で一体に形成されており、平面が円筒形で、また
その断面がＨ型形状に構成されている。また、台座１０
ｂ下部の外縁上には、フランジ１０ｃが一体に形成され
ている。The pressure receiving portion 10 includes a diaphragm 10a constituting a pressure receiving element of the present invention, a pedestal 10b, and a flange 10c constituting a flange of the present invention. The diaphragm 10a and the pedestal 10b are integrally formed of, for example, a single stainless steel plate, have a cylindrical plane, and have an H-shaped cross section. The pedestal 10
The flange 10c is formed integrally on the outer edge of the lower part b.
【００１０】ケース１１は、中空の円筒形状に構成され
ている。このケース１１の下部には、受圧部１０のフラ
ンジ１０ｃがボルト１４で固定されており、受圧部１０
のダイアフラム１０ａと台座１０ｂはケース１１内に嵌
め込まれる。ところで、台座１０ｂを直接ケース１１に
固定しなかった理由は、台座１０ｂを直接ボルト固定す
ると、台座１０ｂの中央に設けられたダイアフラム１０
ａにボルトの締め付け状態による歪みが発生するので、
この歪みの発生を防止するためである。また、受圧部１
０とケース１１間は、台座１０ｂ側面のＯリング１６で
シールされている。なお、本発明では、フランジ１０ｃ
にボルト１４を通す穴をあけ、かつケース１１には、ボ
ルト用のタップをきれば、受圧部１０での歪みの発生を
さらに低減することが可能となる。The case 11 is formed in a hollow cylindrical shape. A flange 10c of the pressure receiving portion 10 is fixed to a lower portion of the case 11 with a bolt 14, and the pressure receiving portion 10
The diaphragm 10a and the pedestal 10b are fitted in the case 11. The reason that the pedestal 10b is not directly fixed to the case 11 is that when the pedestal 10b is directly bolted, the diaphragm 10 provided at the center of the pedestal 10b is not fixed.
a is distorted due to the tightened condition of the bolts.
This is to prevent the occurrence of this distortion. In addition, pressure receiving section 1
0 and the case 11 are sealed by an O-ring 16 on the side surface of the pedestal 10b. In the present invention, the flange 10c
If a hole for passing the bolt 14 is formed in the hole 11 and a tap for the bolt is formed in the case 11, the occurrence of distortion in the pressure receiving portion 10 can be further reduced.
【００１１】また、ケース１１の上部には、上部金具１
２がボルト１７で固定されており、上部金具１３の中央
部には光ケーブル１３が貫入されている。また、ケース
１１と上部金具１３間は、上部金具１３側面のＯリング
１８でシールされている。光ケーブル１３内には、光フ
ァイバ１５が設けられており、光ファイバ１５は、上部
金具１２からケース１１内部に挿入されている。光ファ
イバ１５には、光の伝搬方向の一部にファイバブラッグ
グレーティング（以下、「ＦＢＧ」という）１５ａ，Ｆ
ＢＧ１５ｂとがそれぞれ形成されており、ＦＢＧ１５
ａ，１５ｂは、図示しない光源から伝搬してきた光のう
ちブラッグ波長と呼ばれるある特定の波長領域の光を反
射させ、その他の波長領域の光を透過させる機能を持っ
ている。ＦＢＧ１５ａは、本発明の歪み検出素子を構成
して圧力を検出するための圧力検出用ＦＢＧで、例えば
圧力によってたわむダイアフラム１０ａ上の中央部に接
着剤で貼り付けられている。また、ＦＢＧ１５ｂは、温
度を検出して温度補償するための温度検出用ＦＢＧで、
機械的な外力を受けないように、例えばケース１１内下
部で、かつ円周方向に接着剤で貼り付けられている。な
お、光ファイバ１５は、余長部分がケース１１内に納め
られている。また、本発明の歪み検出素子としては、例
えばダイアフラムの歪みを機械的に検出する歪みゲージ
を用いても良い。An upper fitting 1 is provided on the upper part of the case 11.
2 is fixed by bolts 17, and an optical cable 13 penetrates into the center of the upper bracket 13. The space between the case 11 and the upper fitting 13 is sealed by an O-ring 18 on the side surface of the upper fitting 13. An optical fiber 15 is provided in the optical cable 13, and the optical fiber 15 is inserted into the case 11 from the upper metal fitting 12. The optical fiber 15 includes fiber Bragg gratings (hereinafter, referred to as “FBGs”) 15 a and F
BG15b are respectively formed, and FBG15
Reference numerals a and 15b have a function of reflecting light in a specific wavelength region called a Bragg wavelength among light transmitted from a light source (not shown) and transmitting light in other wavelength regions. The FBG 15a is a pressure detecting FBG for detecting a pressure by constituting the strain detecting element of the present invention, and is attached with, for example, an adhesive to a central portion of the diaphragm 10a which is bent by pressure. The FBG 15b is a temperature detecting FBG for detecting temperature and compensating for temperature.
In order not to receive a mechanical external force, for example, it is stuck with an adhesive in the lower part inside the case 11 and in the circumferential direction. The extra length of the optical fiber 15 is housed in the case 11. Further, as the strain detecting element of the present invention, for example, a strain gauge for mechanically detecting the strain of the diaphragm may be used.
【００１２】次に、ダイアフラム１０ａとケース１１を
固定するボルトのトルクを変えて圧力とダイアフラムの
歪みの関係を図２に示す。なお、この実験では、本発明
に係る受圧部のダイアフラムの中央に、歪み検出素子と
して歪みゲージを貼り付けて上記測定を行った。図２に
おいて、この実験例では、ボルトをトルク２０ｋｍ・ｃ
ｍで締め付けた時、そこから１／４回転弛めた時、２／
４回転弛めた時、３／４回転弛めた時のダイアフラムの
歪みを測定した。この結果、本実施例では、台座外縁に
フランジを設け、上記フランジでケースと固定するた
め、ボルトの締め付け状態に影響を受けることがなくな
り、いずれの締め付け状態でも、ダイアフラムに加わる
圧力に対してほぼ同一の歪みの状態を、本発明に係る圧
力測定用センサで測定できることが確認された。Next, FIG. 2 shows the relationship between the pressure and the distortion of the diaphragm by changing the torque of the bolt for fixing the diaphragm 10a and the case 11. In this experiment, a strain gauge as a strain detecting element was attached to the center of the diaphragm of the pressure receiving section according to the present invention, and the above measurement was performed. In FIG. 2, in this experimental example, the bolt was torqued to 20 km · c.
m, when loosened 1/4 turn from there, 2 /
The strain of the diaphragm when loosened 4 times and when it was loosened 3/4 times was measured. As a result, in the present embodiment, a flange is provided on the outer edge of the pedestal, and the flange is fixed to the case. It was confirmed that the same strain state can be measured by the pressure measurement sensor according to the present invention.
【００１３】図３は、図１に示した第１実施例の場合の
振動前後の圧力特性を測定したものである。振動試験
は、温度が２０℃一定の環境条件において加速度４Ｇ
で、周波数３３Ｈｚの振動を２時間加えた。図３におい
て、横軸はダイアフラムに加わる圧力、縦軸はＦＢＧの
反射波長をとり、圧力測定用センサの圧力とＦＢＧ波長
特性の関係を示したものである。FIG. 3 shows the measured pressure characteristics before and after the vibration in the case of the first embodiment shown in FIG. The vibration test was performed at an acceleration of 4G under environmental conditions with a constant temperature of 20 ° C.
Then, a vibration having a frequency of 33 Hz was applied for 2 hours. In FIG. 3, the horizontal axis indicates the pressure applied to the diaphragm, and the vertical axis indicates the reflection wavelength of the FBG, showing the relationship between the pressure of the pressure measurement sensor and the FBG wavelength characteristics.
【００１４】第１実施例では、外部から加わる圧力によ
り、ダイアフラム１０ａが歪み，ダイアフラム１０ａ上
に貼り付けられたＦＢＧ１５ａに上記歪みが加わると、
伸び縮みがＦＢＧ１５ａに発生し、ＦＢＧ１５ａの反射
特性が変化する。ＦＢＧ１５ａは、この反射特性に基づ
いたブラッグ波長の光を光ファイバ１５に反射してお
り、この光の反射波長を測定することにより、上記加わ
った圧力を求めることができる。In the first embodiment, when the pressure applied from the outside causes the diaphragm 10a to be distorted and the FBG 15a attached to the diaphragm 10a is distorted,
Expansion and contraction occur in the FBG 15a, and the reflection characteristics of the FBG 15a change. The FBG 15a reflects light having a Bragg wavelength based on the reflection characteristics to the optical fiber 15, and by measuring the reflection wavelength of the light, the applied pressure can be obtained.
【００１５】この結果、本実施例では、振動前後の圧力
対ＦＢＧの反射波長の特性はほとんど変化なく、圧力０
〜９．８×１０4ＰａでＦＢＧの反射波長は、１５４
７．８７〜１５４８．３３ｎｍ変化する。波長変化量
は、９．８×１０4Ｐａあたり０．４６ｎｍ変化してお
り、測定誤差の少ない測定が可能となった。このような
結果が生じるのは、ボルト締めに起因した歪みを生じる
力がフランジ１０ｃと台座１０ｂに吸収され、ダイアフ
ラム１０ａに加わらなくなり、ＦＢＧの反射波長の特性
が変化しないためと考えられる。As a result, in this embodiment, the characteristics of the pressure versus the reflection wavelength of the FBG before and after the vibration hardly change,
The reflection wavelength of FBG at 〜9.8 × 10 4 Pa is 154
7.87 to 1548.33 nm. The wavelength change amount changed by 0.46 nm per 9.8 × 10 4 Pa, which enabled measurement with a small measurement error. It is considered that such a result occurs because the force causing the distortion due to the bolting is absorbed by the flange 10c and the pedestal 10b, is not applied to the diaphragm 10a, and the characteristic of the reflection wavelength of the FBG does not change.
【００１６】このように、本実施例では、ダイアフラム
と一体形成された台座外縁にボトル固定用のつば部を設
け、つば部とケースをボルトで固定することで、上記ダ
イアフラムをケースに取り付けるので、ボルトの締め付
け状態、または振動等によって台座の取り付け状態が変
化しても、ダイアフラムの変形を防いで信頼性の高い圧
力測定を可能とする。As described above, in the present embodiment, the diaphragm is attached to the case by providing the bottle fixing flange at the outer edge of the pedestal integrally formed with the diaphragm, and fixing the flange to the case with the bolt. Even if the mounting state of the pedestal changes due to the tightening state of the bolts or the vibration, etc., deformation of the diaphragm is prevented, and highly reliable pressure measurement is enabled.
【００１７】また、本実施例では、ダイアフラムを台座
の中間部に一体形成させてくぼみをもたせたので、セン
サを組み立てる際に、ダイアフラムやＦＢＧに他の構成
部品などがあたることがなくなり、上記ダイアフラムや
ＦＢＧの損傷が低減できる。図４は、本発明に係る圧力
測定用センサの構成の第２実施例を示す断面図である。
なお、図４において第１実施例と同様の構成部分に関し
ては、説明の都合上、同一符号を付記する。In this embodiment, since the diaphragm is formed integrally with the middle portion of the pedestal and has a recess, when assembling the sensor, the diaphragm and the FBG do not come into contact with other components. And FBG damage can be reduced. FIG. 4 is a sectional view showing a second embodiment of the configuration of the pressure measuring sensor according to the present invention.
In FIG. 4, the same components as those in the first embodiment are denoted by the same reference numerals for convenience of explanation.
【００１８】図において、本実施例と第１実施例との異
なる点は、ダイアフラム１０ａを台座１０ｂの最上部に
一体形成させた点である。このように、本実施例では、
ダイアフラムが台座の最上部に設けられるため、上記ダ
イアフラム表面と台座の最上部が構成する平面（ケース
底の平面）が広くなり、このため光ファイバの曲げが緩
和でき、また組立の作業性も向上できる。In the figure, the difference between this embodiment and the first embodiment is that the diaphragm 10a is integrally formed on the uppermost portion of the pedestal 10b. Thus, in this embodiment,
Since the diaphragm is provided at the top of the pedestal, the plane defined by the surface of the diaphragm and the top of the pedestal (the plane at the bottom of the case) is widened, so that the bending of the optical fiber can be eased and the workability of assembly is improved. it can.
【００１９】本発明は、これら実施例に限定されるもの
ではなく、本発明の要旨を逸脱しない範囲で種々の変形
実施が可能である。例えば、つば部とケースとの間に緩
衝用のラバーやワッシャーを用いることで、ボルト締め
に起因した歪みを生じる力や振動等によって台座の取り
付け状態が変化しても、さらにダイアフラムの変形を防
ぐことができる。The present invention is not limited to these embodiments, and various modifications can be made without departing from the gist of the present invention. For example, by using a rubber or washer for cushioning between the flange portion and the case, even if the mounting state of the pedestal changes due to a force or vibration that causes distortion due to bolt tightening, further deformation of the diaphragm is prevented. be able to.
【００２０】[0020]
【発明の効果】以上説明したように、本発明では、受圧
素子に歪み検出素子を固定し、該受圧素子の歪みを検出
することにより、該受圧素子に加わる圧力を測定する圧
力測定用センサにて、前記受圧素子と台座とが一体に形
成され、かつ前記台座の縁部に設けられたつば部を有す
る受圧部と、前記受圧部と歪み検出素子を収納する収納
部とからなり、前記受圧部は前記つば部を介して前記収
納部に固定されるので、ボルトの締め付け状態、または
振動等によって台座の取り付け状態が変化しても、受圧
素子の変形を防いで信頼性の高い圧力測定を可能とす
る。As described above, according to the present invention, a pressure measuring sensor for measuring a pressure applied to a pressure receiving element by fixing a distortion detecting element to the pressure receiving element and detecting a distortion of the pressure receiving element. The pressure receiving element and the pedestal are integrally formed, and the pressure receiving element comprises a pressure receiving portion having a flange provided at an edge of the pedestal; and a storage portion for storing the pressure receiving portion and the strain detection element. Since the portion is fixed to the storage portion via the collar portion, even if the mounting state of the pedestal changes due to the tightening state of the bolt or the vibration or the like, the pressure receiving element is prevented from being deformed and highly reliable pressure measurement is performed. Make it possible.
【図１】本発明に係る圧力測定用センサの構成の第１実
施例を示す断面図である。FIG. 1 is a sectional view showing a first embodiment of the configuration of a pressure measuring sensor according to the present invention.
【図２】本発明の歪み検出素子に歪みゲージを用いた場
合の圧力とダイアフラムの歪みの関係を示す図である。FIG. 2 is a diagram showing a relationship between pressure and strain of a diaphragm when a strain gauge is used for a strain detecting element of the present invention.
【図３】図１の圧力測定用センサにおける圧力とＦＢＧ
波長特性の関係を示す図である。FIG. 3 shows the pressure and FBG in the pressure measuring sensor of FIG. 1;
FIG. 3 is a diagram illustrating a relationship between wavelength characteristics.
【図４】本発明に係る圧力測定用センサの構成の第２実
施例を示す断面図である。FIG. 4 is a sectional view showing a second embodiment of the configuration of the pressure measuring sensor according to the present invention.
１０ 受圧部 １０ａ ダイアフラム １０ｂ 台座 １０ｃ フランジ １１ ケース １２ 上部金具 １３ 光ケーブル １４，１７ ボルト １５ 光ファイバ １５ａ，１５ｂ ＦＢＧ １６，１８ Ｏリング DESCRIPTION OF SYMBOLS 10 Pressure receiving part 10a Diaphragm 10b Base 10c Flange 11 Case 12 Upper bracket 13 Optical cable 14, 17 bolt 15 Optical fiber 15a, 15b FBG 16, 18 O-ring
フロントページの続き (72)発明者 松田 美一 東京都千代田区丸の内２丁目６番１号 古 河電気工業株式会社内 (72)発明者 坂本 俊貴 東京都千代田区丸の内２丁目６番１号 古 河電気工業株式会社内 (72)発明者 生駒 雅一 東京都品川区大崎１丁目11番２号 富士電 機株式会社内 (72)発明者 田辺 欣也 東京都日野市富士町１番地 富士電機株式 会社東京工場内 (72)発明者 斉藤 博 東京都千代田区大手町２丁目６番２号 東 京都下水道サービス株式会社内 (72)発明者 原田 敏郎 東京都千代田区大手町２丁目６番２号 東 京都下水道サービス株式会社内 Ｆターム(参考） 2F055 AA40 BB20 CC02 DD20 EE11 EE31 FF11 FF23 GG12 GG25 HH03 Continued on the front page (72) Inventor Miichi Matsuda 2-6-1 Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Co., Ltd. (72) Inventor Toshiki Sakamoto 2-6-1 Marunouchi, Chiyoda-ku, Tokyo Furukawa Inside Electric Industries Co., Ltd. (72) Inventor Masakazu Ikoma 1-11-2, Osaki, Shinagawa-ku, Tokyo Inside Fuji Electric Machinery Co., Ltd. (72) Kinya Tanabe 1 Fujimachi, Hino City, Tokyo Fuji Electric Co., Ltd. Tokyo Inside the factory (72) Inventor Hiroshi Saito 2-6-1, Otemachi, Chiyoda-ku, Tokyo Inside Tokyo Sewerage Service Co., Ltd. (72) Toshio Harada 2-5-2, Otemachi, Chiyoda-ku, Tokyo Sewerage, Tokyo Service Co., Ltd. F term (reference) 2F055 AA40 BB20 CC02 DD20 EE11 EE31 FF11 FF23 GG12 GG25 HH03
Claims (1)
圧素子の歪みを検出することにより、該受圧素子に加わ
る圧力を測定する圧力測定用センサにて、 前記受圧素子と台座とが一体に形成され、かつ前記台座
の外縁に設けられたつば部を有する受圧部と、 前記受圧部と歪み検出素子を収納する収納部とを備え、
前記受圧部は前記つば部を介して前記収納部に固定され
ることを特徴とする圧力測定用センサ。1. A pressure measuring sensor for measuring a pressure applied to a pressure receiving element by fixing a distortion detecting element to the pressure receiving element and detecting distortion of the pressure receiving element, wherein the pressure receiving element and the base are integrated. And a pressure receiving portion having a flange portion provided on an outer edge of the pedestal, and a storage portion for storing the pressure receiving portion and the strain detection element,
The pressure receiving sensor is fixed to the storage portion via the collar portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28701799A JP4615076B2 (en) | 1999-10-07 | 1999-10-07 | Pressure measuring sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28701799A JP4615076B2 (en) | 1999-10-07 | 1999-10-07 | Pressure measuring sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001108553A true JP2001108553A (en) | 2001-04-20 |
| JP4615076B2 JP4615076B2 (en) | 2011-01-19 |
Family
ID=17711966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28701799A Expired - Lifetime JP4615076B2 (en) | 1999-10-07 | 1999-10-07 | Pressure measuring sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4615076B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101799345A (en) * | 2010-03-02 | 2010-08-11 | 厦门大学 | Laser pressure sensor |
| WO2010114465A1 (en) * | 2009-03-30 | 2010-10-07 | Ge Healthcare Bio-Sciences Ab | Pressure sensor |
| KR101979291B1 (en) * | 2018-11-28 | 2019-05-16 | 라온구조안전기술(주) | Pressure Measuring Apparatus using Fiber Bragg Grating Sensor |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01299432A (en) * | 1988-05-27 | 1989-12-04 | Komatsu Ltd | Thin-film pressure sensor |
| JPH02272337A (en) * | 1989-03-07 | 1990-11-07 | Pfister Gmbh | Pressure sensor and method for manufacturing the same |
| JPH0637739U (en) * | 1992-10-27 | 1994-05-20 | エヌオーケー株式会社 | Pressure sensor |
| JPH0712937U (en) * | 1993-07-28 | 1995-03-03 | エヌオーケー株式会社 | Structure of pressure sensor |
| JPH0821775A (en) * | 1994-07-08 | 1996-01-23 | Fuji Koki Seisakusho:Kk | Pressure sensor |
| JPH11153469A (en) * | 1997-11-20 | 1999-06-08 | Hitachi Ltd | Immersion type water gauge |
| JPH11218458A (en) * | 1997-11-11 | 1999-08-10 | Furukawa Electric Co Ltd:The | Pressure sensor and pressure measuring apparatus |
-
1999
- 1999-10-07 JP JP28701799A patent/JP4615076B2/en not_active Expired - Lifetime
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01299432A (en) * | 1988-05-27 | 1989-12-04 | Komatsu Ltd | Thin-film pressure sensor |
| JPH02272337A (en) * | 1989-03-07 | 1990-11-07 | Pfister Gmbh | Pressure sensor and method for manufacturing the same |
| JPH0637739U (en) * | 1992-10-27 | 1994-05-20 | エヌオーケー株式会社 | Pressure sensor |
| JPH0712937U (en) * | 1993-07-28 | 1995-03-03 | エヌオーケー株式会社 | Structure of pressure sensor |
| JPH0821775A (en) * | 1994-07-08 | 1996-01-23 | Fuji Koki Seisakusho:Kk | Pressure sensor |
| JPH11218458A (en) * | 1997-11-11 | 1999-08-10 | Furukawa Electric Co Ltd:The | Pressure sensor and pressure measuring apparatus |
| JPH11153469A (en) * | 1997-11-20 | 1999-06-08 | Hitachi Ltd | Immersion type water gauge |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010114465A1 (en) * | 2009-03-30 | 2010-10-07 | Ge Healthcare Bio-Sciences Ab | Pressure sensor |
| US8915141B2 (en) | 2009-03-30 | 2014-12-23 | Ge Healthcare Bio-Sciences Ab | Pressure sensor having a connection housing and a sensor housing |
| CN101799345A (en) * | 2010-03-02 | 2010-08-11 | 厦门大学 | Laser pressure sensor |
| KR101979291B1 (en) * | 2018-11-28 | 2019-05-16 | 라온구조안전기술(주) | Pressure Measuring Apparatus using Fiber Bragg Grating Sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4615076B2 (en) | 2011-01-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7677105B2 (en) | Double-ended tuning fork type piezoelectric resonator and pressure sensor | |
| JP4320593B2 (en) | Pressure monitor used with SAW device | |
| US4807479A (en) | Transducer for detecting pressure changes in pipes | |
| JP3718063B2 (en) | Acceleration compensated pressure transducer and adjustment method thereof | |
| US20090323075A1 (en) | Flexural disc fiber optic sensor | |
| US5097172A (en) | Mounting system for transducer | |
| US5936235A (en) | Cylinder pressure sensor | |
| EP0855583B1 (en) | Device for measuring a pressure | |
| US9316551B2 (en) | Torque insensitive header assembly | |
| JP2001108553A (en) | Sensor for measuring pressure | |
| JP3598297B2 (en) | Temperature compensation structure in FBG converter | |
| US20070144269A1 (en) | Vibrating beam force transducer | |
| US5703296A (en) | Pressure sensor having reduced hysteresis and enhanced electrical performance at low pressures | |
| CN111220262A (en) | Wavelength-adjustable acceleration sensor based on fiber laser | |
| US20060157133A1 (en) | Combustion transducer apparatus employing pressure restriction means | |
| GB2050624A (en) | Strain transducers | |
| JP3234417B2 (en) | Load sensor | |
| JP2929155B2 (en) | Strain gauge used for diaphragm type transducer | |
| CN108759701B (en) | Surface-mounted sensor with optical fiber vibrating wire combination and adjustable initial value | |
| US20080168843A1 (en) | Pressure Sensor with Active and Passive Acceleration Compensation | |
| CN117928416B (en) | MEMS optical fiber surface type strain gauge | |
| JP2523910Y2 (en) | Cover for sealing the strain transducer of the load transducer | |
| RU2530467C1 (en) | Strain-gauge sensor | |
| CN211401409U (en) | Wavelength-adjustable acceleration sensor based on fiber laser | |
| JP2001091389A (en) | Sensor for measuring pressure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061005 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090114 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090121 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090323 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20090414 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20090414 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100106 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100405 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100421 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20100520 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100811 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100906 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100929 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20101020 |
|
| R151 | Written notification of patent or utility model registration |
Ref document number: 4615076 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131029 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131029 Year of fee payment: 3 |
|
| R154 | Certificate of patent or utility model (reissue) |
Free format text: JAPANESE INTERMEDIATE CODE: R154 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131029 Year of fee payment: 3 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |