JP2001102606A - Washing device of solar cell substrate - Google Patents
Washing device of solar cell substrateInfo
- Publication number
- JP2001102606A JP2001102606A JP28026699A JP28026699A JP2001102606A JP 2001102606 A JP2001102606 A JP 2001102606A JP 28026699 A JP28026699 A JP 28026699A JP 28026699 A JP28026699 A JP 28026699A JP 2001102606 A JP2001102606 A JP 2001102606A
- Authority
- JP
- Japan
- Prior art keywords
- solar cell
- cell substrate
- carry
- cleaning
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は，太陽エネルギー
を直接電気エネルギーに変換する薄膜太陽電池の製造工
程において、レーザスクライブ法によりスクライブライ
ンを形成した太陽電池基板の洗浄装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for cleaning a solar cell substrate in which scribe lines are formed by a laser scribe method in a manufacturing process of a thin-film solar cell that directly converts solar energy into electric energy.
【０００２】[0002]
【従来の技術】ガラス基板に透明電極層，アモルファス
半導体層，裏面電極層を形成した積層型薄膜光電変換装
置としての薄膜太陽電池は，その製造のための原材料が
少なくてすみ，かつ大面積の積層型太陽電池が絶縁基板
上に直接作製可能であることから，低コストの太陽電池
として注目されている。2. Description of the Related Art A thin-film solar cell as a stacked-type thin-film photoelectric conversion device in which a transparent electrode layer, an amorphous semiconductor layer, and a back electrode layer are formed on a glass substrate requires a small amount of raw materials for its manufacture and has a large area. Since a stacked solar cell can be directly manufactured on an insulating substrate, it is attracting attention as a low-cost solar cell.
【０００３】この薄膜太陽電池の製造においては，ＣＶ
Ｄ法やスパッタリング法などによる薄膜の堆積ステップ
とレーザスクライブ法などによるパターニングステップ
の適宜の繰り返しや組合せを含む製造プロセスによっ
て，所望の構造が形成される。通常は，１枚の絶縁基板
上に複数の光電変換セルが電気的に直列接続された積層
型構造が採用され，屋外用途のための電力用太陽電池で
は，例えば９０ｃｍ×４５ｃｍの大面積の基板が用いら
れる。In the production of this thin-film solar cell, CV
A desired structure is formed by a manufacturing process including an appropriate repetition or combination of a thin film deposition step by a D method or a sputtering method and a patterning step by a laser scribe method or the like. Usually, a laminated structure in which a plurality of photoelectric conversion cells are electrically connected in series on a single insulating substrate is adopted. For a power solar cell for outdoor use, for example, a substrate having a large area of 90 cm × 45 cm is used. Is used.
【０００４】図５に示すように、薄膜太陽電池の太陽電
池基板１は、ガラス基板からなる絶縁基板２の片面に酸
化錫（ＳｎＯ２ ），酸化亜鉛（ＺｎＯ），酸化インジ
ウム錫（ＩＴＯ）等の透明電極３が施されている。薄膜
太陽電池の製造工程においては、まず、絶縁基板２の透
明電極３側にレーザスクライブ法によりスクライブライ
ン４を形成して太陽電池基板１とするが、レーザスクラ
イブによって形成されたスクライブライン４の内部及び
周辺に切り滓やバリ等のパーティクルが発生する。この
切り滓やバリ等のパーティクルをそのまま残しておく
と，光電変換セル相互間の短絡が発生し，太陽電池基板
１の出力特性，絶縁特性，及び耐電圧特性が低下させら
れる原因となる。As shown in FIG. 5, a solar cell substrate 1 of a thin-film solar cell has an insulating substrate 2 made of a glass substrate on one surface of which is made of tin oxide (SnO 2 ), zinc oxide (ZnO), indium tin oxide (ITO), or the like. Transparent electrode 3 is provided. In the manufacturing process of the thin-film solar cell, first, a scribe line 4 is formed on the transparent electrode 3 side of the insulating substrate 2 by a laser scribe method to obtain the solar cell substrate 1, but inside the scribe line 4 formed by the laser scribe. Particles such as slag and burrs are generated in the vicinity. If particles such as swarf and burrs are left as they are, a short circuit occurs between the photoelectric conversion cells, which causes the output characteristics, insulation characteristics, and withstand voltage characteristics of the solar cell substrate 1 to deteriorate.
【０００５】そこで，従来においては，レーザスクライ
ブした太陽電池基板１を洗浄装置によって洗浄し、太陽
電池基板１から切り滓やバリ等のパーティクルを除去し
た後に、半導体層を形成する工程に送っている。Therefore, conventionally, the solar cell substrate 1 that has been laser scribed is cleaned by a cleaning device to remove particles such as chips and burrs from the solar cell substrate 1 and then sent to a step of forming a semiconductor layer. .
【０００６】図６は，このような積層型薄膜太陽電池６
の構造の断面図であり，前記絶縁基板２上に第１電極層
としての透明電極３，アモルファスシリコンなどからな
る半導体光電変換層８及び銀（Ａｇ），アルミニウム
（Ａｌ），クロム（Ｃｒ）等の金属膜からなる第２電極
層９が順次積層されており，パターニングによって半導
体光電変換層８に設けられた接続用開口溝１０を介して
互いに左右に隣接し合う光電変換セルが電気的に直列に
接続されている。FIG. 6 shows such a laminated thin-film solar cell 6.
FIG. 2 is a cross-sectional view of the structure of FIG. 1, showing a transparent electrode 3 as a first electrode layer, a semiconductor photoelectric conversion layer 8 made of amorphous silicon or the like, silver (Ag), aluminum (Al), chromium (Cr), etc. A second electrode layer 9 made of a metal film is sequentially laminated, and photoelectric conversion cells adjacent to each other on the left and right sides via a connection opening groove 10 provided in the semiconductor photoelectric conversion layer 8 by patterning are electrically connected in series. It is connected to the.
【０００７】このように構成された積層型薄膜太陽電池
６は，次のような方法で製造される。まず，絶縁基板２
上にＳｎＯ２ ，ＺｎＯ，ＩＴＯ等の透明電極３が堆積
され，この透明電極３を複数の光電変換セルに対応する
複数の領域に分離するために，レーザスクライブ法によ
って下部電極分離溝７が形成される。すなわち，これら
の下部電極分離溝７は，図６の紙面に直交する方向に直
線状に延びている。そして，複数の領域に分離された透
明電極３を覆うように，プラズマＣＶＤ法を用いて，ｐ
ｉｎ接合を含む非晶質シリコンの半導体光電変換層８が
堆積される。この半導体光電変換層８には，左右に隣接
する光電変換セルを電気的に直列接続するための接続用
開口溝１０がレーザスクライブ法によって形成される。
これらの接続用開口溝１０も，図６の紙面に垂直な方向
に直線状に延びている。続いて，これらの接続用開口溝
１０を埋めかつ半導体光電変換層８を覆うように，Ａ
ｇ，Ａｌ，Ｃｒ等の金属膜の単層または複層が第２電極
層９を複数の光電変換セルに対応する複数の領域に分離
するように，上部電極分離溝１０ａがレーザスクライブ
法によって形成される。これらの上部電極分離溝１０ａ
も図６の紙面に直交する方向に直線状に延びており，か
つ好ましくは透明電極３に至る深さを有している。[0007] The laminated thin-film solar cell 6 constructed as described above is manufactured by the following method. First, the insulating substrate 2
A transparent electrode 3 made of SnO 2 , ZnO, ITO, or the like is deposited thereon, and a lower electrode separation groove 7 is formed by a laser scribing method in order to separate the transparent electrode 3 into a plurality of regions corresponding to a plurality of photoelectric conversion cells. Is done. That is, these lower electrode separation grooves 7 extend linearly in a direction orthogonal to the paper surface of FIG. Then, the plasma CVD method is used to cover the transparent electrode 3 separated into a plurality of regions.
An amorphous silicon semiconductor photoelectric conversion layer 8 including an in-junction is deposited. In the semiconductor photoelectric conversion layer 8, a connection opening groove 10 for electrically connecting the left and right adjacent photoelectric conversion cells in series is formed by a laser scribe method.
These connection opening grooves 10 also extend linearly in a direction perpendicular to the paper surface of FIG. Subsequently, A is filled so as to fill these connection opening grooves 10 and cover the semiconductor photoelectric conversion layer 8.
An upper electrode separation groove 10a is formed by a laser scribe method such that a single layer or a plurality of layers of a metal film of g, Al, Cr, or the like separates the second electrode layer 9 into a plurality of regions corresponding to a plurality of photoelectric conversion cells. Is done. These upper electrode separation grooves 10a
6 extends linearly in a direction perpendicular to the plane of FIG. 6 and preferably has a depth reaching the transparent electrode 3.
【０００８】ところで，接続用開口溝１０や上部電極分
離溝１０ａをレーザスクライブ法によって加工すると，
溝の内部及び周辺に切り滓やバリ等のパーティクルが発
生し，この切り滓やバリ等のパーティクルをそのまま残
しておくと，光電変換セル相互間の短絡が発生し，積層
型薄膜太陽電池６の出力特性，絶縁特性，及び耐電圧特
性が低下させられる原因となる。When the connection opening groove 10 and the upper electrode separation groove 10a are processed by a laser scribe method,
Particles such as swarf and burrs are generated inside and around the groove. If the particles such as swarf and burrs are left as they are, a short circuit occurs between the photoelectric conversion cells and the stacked thin-film solar cell 6 Output characteristics, insulation characteristics, and withstand voltage characteristics may be reduced.
【０００９】そこで，従来においては，レーザスクライ
ブした積層型薄膜太陽電池６を洗浄装置によって洗浄
し、切り滓やバリ等のパーティクルを除去して次の工程
に送っている。Therefore, conventionally, the laser scribed lamination type thin-film solar cell 6 is cleaned by a cleaning device to remove particles such as chips and burrs and then sent to the next step.
【００１０】[0010]
【発明が解決しようとする課題】ところで、従来の洗浄
装置は、純水等の洗浄液を収容した洗浄槽に、太陽電池
基板または積層型薄膜太陽電池を洗浄液中に浸漬した状
態で搬送させる搬送ローラを備えた搬送機構が設けら
れ、洗浄槽の内部には搬送中の太陽電池基板、積層型薄
膜太陽電池の上部にスクライブラインに沿って摺擦して
洗浄する回転ブラシが設けられている。By the way, a conventional cleaning apparatus is a transport roller for transporting a solar cell substrate or a laminated thin-film solar cell in a cleaning tank containing a cleaning liquid such as pure water in a state of being immersed in the cleaning liquid. Is provided, and a rotating brush for cleaning by rubbing along the scribe line is provided above the solar cell substrate being conveyed and the stacked thin-film solar cell inside the cleaning tank.
【００１１】そして、搬送機構の洗浄槽への搬入側から
太陽電池基板、積層型薄膜太陽電池を搬入することによ
り、搬送ローラによって太陽電池基板、積層型薄膜太陽
電池が自動的に洗浄槽に搬入される。太陽電池基板、積
層型薄膜太陽電池が回転ブラシの位置に到達すると、回
転ブラシの毛先がスクライブラインに入り込んでいるパ
ーティクル及び表面に付着しているパーティクルが掻き
落とされて洗浄されるようになっている。The solar cell substrate and the laminated thin-film solar cell are automatically carried into the cleaning tank by the transport rollers by carrying the solar cell substrate and the laminated thin-film solar cell from the carrying mechanism into the cleaning tank. Is done. When the solar cell substrate and the laminated thin-film solar cell reach the position of the rotating brush, the particles of the bristle tip of the rotating brush entering the scribe line and the particles adhering to the surface are scraped off and washed. ing.
【００１２】洗浄が完了した太陽電池基板、積層型薄膜
太陽電池は、搬送ローラによって洗浄槽から搬出され、
搬出部においては太陽電池基板、積層型薄膜太陽電池の
上面及び下面から太陽電池基板、積層型薄膜太陽電池に
付着している純水及びパーティクルは水切りエアーナイ
フから噴射する高圧エアーによって吹き飛ばされる。従
って，太陽電池基板、積層型薄膜太陽電池を洗浄槽の純
水中を通過させるだけで連続的に洗浄できる。The washed solar cell substrate and the laminated thin-film solar cell are transported out of the cleaning tank by transport rollers.
In the carry-out section, pure water and particles adhering to the solar cell substrate and the laminated thin-film solar cell from the upper and lower surfaces of the solar cell substrate and the laminated thin-film solar cell are blown off by high-pressure air jetted from a drain air knife. Therefore, the solar cell substrate and the laminated thin-film solar cell can be continuously washed only by passing them through the pure water in the washing tank.
【００１３】しかしながら、洗浄槽から搬出された洗浄
完了後の太陽電池基板、積層型薄膜太陽電池の上面及び
下面に付着している純水を水切りエアーナイフから噴射
する高圧エアーによって吹き飛ばることができたとして
も、太陽電池基板、積層型薄膜太陽電池の４側面を含む
外周縁部の純水まで吹き飛ばすことはできず、外周縁部
に純水が残った状態にあり、水分を完全に取り除くこと
ができない。[0013] However, pure water adhering to the solar cell substrate and the upper and lower surfaces of the stacked solar cell substrate and the stacked thin film solar cell taken out of the cleaning tank after the completion of cleaning can be blown off by high-pressure air jetted from a draining air knife. Even if it is not possible to blow off the pure water on the outer peripheral edge including the four sides of the solar cell substrate and the stacked thin-film solar cell, pure water remains on the outer peripheral edge, and water must be completely removed. Can not.
【００１４】この発明は，前記事情に着目してなされた
もので，その目的とするところは，被洗浄物としての太
陽電池基板、積層型薄膜太陽電池の洗浄が完了して洗浄
槽から搬出されると、その側面を含む外周縁部に付着し
ている水分を高圧エアーによって自動的に吹き飛ばすこ
とができ、水分を完全に取り除くことができる太陽電池
基板の洗浄装置を提供することにある。The present invention has been made in view of the above circumstances. It is an object of the present invention to complete the cleaning of a solar cell substrate and a stacked thin-film solar cell as objects to be cleaned, and to carry out of the cleaning tank. Accordingly, it is an object of the present invention to provide a solar cell substrate cleaning apparatus capable of automatically blowing off moisture adhering to an outer peripheral edge portion including a side surface thereof by high-pressure air and completely removing the moisture.
【００１５】[0015]
【課題を解決するための手段】この発明は，前記目的を
達成するために，請求項１は，一端側に被洗浄物として
の太陽電池基板の搬入口、他端側に洗浄が完了した太陽
電池基板を搬出する搬出口を有し、内部に洗浄液を収容
した洗浄槽と，前記太陽電池基板を前記搬入口から洗浄
槽に搬入し、洗浄液中に浸漬した状態で搬送させるとと
もに、前記搬出口から搬出させる搬送機構と，前記搬出
口側の搬送機構に対向して設けられ洗浄が完了した前記
太陽電池基板の側面を含む外周縁部に残留している水滴
を吹き飛ばして水切りするエアー噴射機構とを具備した
ことを特徴とする太陽電池基板の洗浄装置にある。In order to achieve the above object, the present invention is characterized in that, at one end, a solar cell substrate as an object to be cleaned is carried in, and at the other end, a solar cell having been washed is completed. A cleaning tank having a carry-out port for carrying out the battery substrate and containing a cleaning liquid therein; and a solar cell substrate carried into the cleaning tank from the carry-in port through the carry-in port and transported in a state of being immersed in the cleaning liquid. A transport mechanism for transporting the water from the transport port, and an air ejecting mechanism that is provided to face the transport mechanism on the transport exit side and that blows off water droplets remaining on an outer peripheral edge including a side face of the washed solar cell substrate and drains the water. A solar cell substrate cleaning apparatus characterized by comprising:
【００１６】請求項２は、請求項１の前記太陽電池基板
は、絶縁基板の片面に透明電極を有し、この透明電極側
にレーザスクライブ法によりスクライブラインを形成し
た被洗浄物であることを特徴とする。According to a second aspect, the solar cell substrate according to the first aspect is an object to be cleaned in which a transparent electrode is provided on one surface of an insulating substrate, and a scribe line is formed on the transparent electrode side by a laser scribe method. Features.
【００１７】請求項３は、請求項１の前記太陽電池基板
は、絶縁基板上に順次積層された第１電極層，半導体光
電変換層及び第２電極層を含む積層体を備え，前記積層
体をレーザスクライブ法により光電変換セル集積領域と
周縁領域とに分離し，前記光電変換セル集積領域をレー
ザスクライブ法により複数の光電変換セルに分離し，複
数の光電変換セルの少なくとも一部は電気的に直列に接
続されている被洗浄物であることを特徴とする。According to a third aspect of the present invention, the solar cell substrate according to the first aspect includes a laminate including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate. Is separated into a photoelectric conversion cell integrated region and a peripheral region by a laser scribing method, the photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribing method, and at least a part of the plurality of photoelectric conversion cells is electrically connected. The object to be cleaned is connected in series to the object.
【００１８】請求項４は、請求項１の前記エアー噴射機
構は、太陽電池基板の外周縁部に倣った矩形枠形状で、
内部にエアー通路を形成したノズル本体と、このノズル
本体に設けられ、前記太陽電池基板の側面を含む外周縁
部に向かって高圧エアーを噴射する噴射ノズル孔とから
なることを特徴とする。According to a fourth aspect of the present invention, the air injection mechanism of the first aspect has a rectangular frame shape following the outer peripheral portion of the solar cell substrate,
It is characterized by comprising a nozzle main body having an air passage formed therein, and a jet nozzle hole provided in the nozzle main body and jetting high-pressure air toward an outer peripheral portion including a side surface of the solar cell substrate.
【００１９】請求項５は、請求項１の前記エアー噴射機
構は、太陽電池基板の外周縁部に沿って移動し、太陽電
池基板の側面を含む外周縁部に向かって高圧エアーを噴
射することを特徴とする。According to a fifth aspect of the present invention, the air injection mechanism according to the first aspect moves along an outer peripheral edge of the solar cell substrate and injects high-pressure air toward an outer peripheral edge including a side surface of the solar cell substrate. It is characterized by.
【００２０】前記構成によれば、洗浄が完了した太陽電
池基板が搬送機構によって搬出部に到達すると、エアー
噴射機構の噴射ノズル孔から太陽電池基板に向かって高
圧エアーが噴射される。このとき、ノズル本体は太陽電
池基板の側面を含む外周縁部の形状に倣って矩形枠状に
形成されているため、高圧エアーが太陽電池基板の側面
を含む外周縁部に向かって集中して噴射され、側面を含
む外周縁部に付着している水滴は吹き飛ばされて除去さ
れる。According to the above configuration, when the washed solar cell substrate reaches the carry-out portion by the transfer mechanism, high-pressure air is injected from the injection nozzle hole of the air injection mechanism toward the solar cell substrate. At this time, since the nozzle body is formed in a rectangular frame shape following the shape of the outer peripheral portion including the side surface of the solar cell substrate, the high-pressure air is concentrated toward the outer peripheral portion including the side surface of the solar cell substrate. Water droplets sprayed and adhering to the outer peripheral edge portion including the side surface are blown off and removed.
【００２１】[0021]
【発明の実施の形態】以下，この発明の実施の形態を図
面に基づいて説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００２２】図１〜図３は第１の実施形態を示し，図１
は太陽電池基板の洗浄装置の概略的縦断側面図、図２は
図１のＡ部を拡大して示す縦断側面図、図３はエアー噴
射機構の斜視図である。1 to 3 show a first embodiment, and FIG.
FIG. 2 is a schematic vertical sectional side view of a cleaning device for a solar cell substrate, FIG. 2 is an enlarged vertical sectional side view showing a portion A in FIG. 1, and FIG. 3 is a perspective view of an air injection mechanism.
【００２３】図５に示す太陽電池基板１を洗浄する洗浄
装置について説明すると，図１に示すように、基台１１
の上部には洗浄槽１２を備えている。洗浄槽１２の長手
方向の一端の側壁には太陽電池基板１の搬入口１３が設
けられ，他端の側壁には搬出口１４が設けられている。
洗浄槽１２の内部及び外部の搬入口１３及び搬出口１４
と略同一高さ位置には太陽電池基板１をその透明電極３
を上向きにして水平に搬送する搬送機構としてのローラ
コンベア１５が設けられている。これらローラコンベア
１５を構成するローラ１５ａは回転駆動機構（図示しな
い）によって回転し，この上面に載置された太陽電池基
板１が搬入口１３から洗浄槽１２に搬入され，搬出口１
４から搬出されるようになっている。The cleaning device for cleaning the solar cell substrate 1 shown in FIG. 5 will now be described. As shown in FIG.
The washing tank 12 is provided on the upper part of. A carry-in port 13 for the solar cell substrate 1 is provided on one side wall of the cleaning tank 12 in the longitudinal direction, and a carry-out port 14 is provided on the other side wall.
Carry-in port 13 and carry-out port 14 inside and outside of cleaning tank 12
The solar cell substrate 1 is placed at the same height position as the transparent electrode 3
A roller conveyor 15 is provided as a transport mechanism for transporting horizontally with the sheet facing upward. The rollers 15a constituting these roller conveyors 15 are rotated by a rotary drive mechanism (not shown), and the solar cell substrate 1 mounted on the upper surface is carried into the cleaning tank 12 from the carry-in port 13 and is carried out.
4 to be carried out.
【００２４】洗浄槽１２の搬入口１３側には洗浄しよう
とする太陽電池基板１を搬入する搬入部１６が設けら
れ、搬出口１４側には洗浄が完了した太陽電池基板１を
搬出する搬出部１７が設けられ、前記ローラコンベア１
５は搬入部１６から搬出部１７まで連続して設けられて
いる。A carry-in portion 16 for carrying in the solar cell substrate 1 to be cleaned is provided on the carry-in port 13 side of the cleaning tank 12, and a carry-out portion for carrying out the washed solar cell substrate 1 on the carry-out port 14 side. 17 and the roller conveyor 1
5 is provided continuously from the carry-in part 16 to the carry-out part 17.
【００２５】洗浄槽１２の底部には洗浄液，例えば純水
Ｗを供給する純水供給口１８が設けられ，この純水供給
口１８は純水供給源（図示しない）と接続されている。
さらに，洗浄槽１２の内底部には超音波振動子１９（出
力：０．２〜１．０Ｗ／ｃｍ ２ ）が設けられている。At the bottom of the cleaning tank 12, a cleaning liquid such as pure water
A pure water supply port 18 for supplying W is provided.
The port 18 is connected to a pure water supply source (not shown).
Further, an ultrasonic vibrator 19 (exit) is provided at the inner bottom of the cleaning tank 12.
Force: 0.2-1.0W / cm 2) Is provided.
【００２６】さらに、ローラコンベア１５の上部には複
数の回転ブラシ２０及び高圧エアーノズル２１が設けら
れている。回転ブラシ２０は，回転駆動機構（図示しな
い）によって回転する回転軸２０ａと，この回転軸２０
ａの周囲に植毛したナイロン等のブラシ毛２０ｂとから
なり，ロール状に構成されている。そして，ブラシ毛２
０ｂの先端が太陽電池基板１の表面及びスクライブライ
ン４の内部に摺擦し，スクライブライン４の内部に残っ
ていた切り滓やバリ等のパーティクルは除去するように
なっている。さらに，回転ブラシ２０による摺擦部には
高圧エアーノズル２１から高圧エアーが吹き付けられ，
パーティクルを吹き飛ばすようになっている。Further, a plurality of rotating brushes 20 and a high-pressure air nozzle 21 are provided above the roller conveyor 15. The rotating brush 20 includes a rotating shaft 20a rotated by a rotation driving mechanism (not shown), and a rotating shaft 20a.
It is composed of brush bristles 20b made of nylon or the like planted around the periphery of a, and is configured in a roll shape. And brush hair 2
The tip of Ob rubs against the surface of the solar cell substrate 1 and the inside of the scribe line 4 so that particles such as chips and burrs remaining inside the scribe line 4 are removed. Further, high-pressure air is blown from a high-pressure air nozzle 21 to the rubbing portion by the rotating brush 20,
It is designed to blow off particles.
【００２７】また、洗浄槽１２の搬出口１４には太陽電
池基板１の上面及び下面に付着している純水Ｗ及びパー
ティクルを高圧エアーによって吹き飛ばす水切りエアー
ナイフ２２が設けられている。A draining air knife 22 for blowing off pure water W and particles adhering to the upper and lower surfaces of the solar cell substrate 1 with high-pressure air is provided at the outlet 14 of the cleaning tank 12.
【００２８】なお、前記純水の純度は，純水供給源ある
いは純水製造装置の出口で，比抵抗が１６〜１８ＭΩ・
ｃｍ（２５℃），微粒子数が０．２μｍ以上のもの１０
０〜１５０個／ｍｌ，生菌数が０〜１０個／ｍｌ，有機
物が０．５〜１．０ｐｐｍである。The purity of the pure water is determined at a pure water supply source or at an outlet of the pure water producing apparatus so that the specific resistance is 16 to 18 MΩ.
cm (25 ° C.), the number of fine particles of which is 0.2 μm or more 10
0 to 150 cells / ml, viable cell count is 0 to 10 cells / ml, and organic matter is 0.5 to 1.0 ppm.
【００２９】図２及び図３に示すように、前記洗浄槽１
２の搬出部１７にはローラコンベア１５によって搬送さ
れる太陽電池基板１の外周縁部１ａに向かって高圧エア
ーを吹き付けるエアー噴射機構２３が設けられている。As shown in FIG. 2 and FIG.
The second discharge section 17 is provided with an air injection mechanism 23 for blowing high-pressure air toward the outer peripheral edge 1 a of the solar cell substrate 1 conveyed by the roller conveyor 15.
【００３０】このエアー噴射機構２３は、太陽電池基板
１の外周縁部１ａに倣った矩形枠状で、内部にエアー通
路２４を形成したノズル本体２５を有しており、このノ
ズル本体２５の下面には太陽電池基板１の外周縁部１ａ
に向かって高圧エアーを噴射する多数個の噴射ノズル孔
２６が設けられている。The air injection mechanism 23 has a nozzle body 25 having a rectangular frame shape following the outer peripheral portion 1a of the solar cell substrate 1 and having an air passage 24 formed therein. Has an outer peripheral portion 1a of the solar cell substrate 1.
Are provided with a plurality of injection nozzle holes 26 for injecting high-pressure air toward the nozzle.
【００３１】このエアー噴射機構２３はローラコンベア
１５上の太陽電池基板１の上部に離間して設けられ、エ
アー通路２４はエアー供給パイプ２７を介して高圧エア
ー供給源（図示しない）に接続されている。The air injection mechanism 23 is provided above the solar cell substrate 1 on the roller conveyor 15 at a distance, and the air passage 24 is connected to a high-pressure air supply source (not shown) via an air supply pipe 27. I have.
【００３２】次に，前述のように構成された洗浄装置を
用いて太陽電池基板１を洗浄する方法について説明す
る。純水供給口１８から洗浄槽１２に純水Ｗを供給し，
純水Ｗの水位が搬入口１３及び搬出口１４に達すると，
この搬入口１３及び搬出口１４から溢水する。従って，
純水Ｗの水位は常に一定に保たれる。超音波振動子１９
に通電して超音波振動させると，純水Ｗに超音波振動が
伝播される。Next, a method of cleaning the solar cell substrate 1 by using the cleaning apparatus configured as described above will be described. Pure water W is supplied from the pure water supply port 18 to the cleaning tank 12,
When the water level of the pure water W reaches the carry-in port 13 and the carry-out port 14,
Water overflows from the carry-in port 13 and the carry-out port 14. Therefore,
The water level of the pure water W is always kept constant. Ultrasonic transducer 19
And ultrasonic vibration is propagated to the pure water W.
【００３３】この状態で，太陽電池基板１を搬入部１６
のローラコンベア１５に載置すると，太陽電池基板１は
搬入口１３方向へ搬送される。そして、太陽電池基板１
がローラコンベア１５によって洗浄槽１２の純水Ｗ中に
搬送されると、純水Ｗは超音波振動が伝播されているた
め，太陽電池基板１のスクライブライン４の内部に残っ
ていた切り滓やバリ等のパーティクルは除去され，パー
ティクルは溢水とともに排出または純水Ｗに沈殿し、パ
ーティクルが太陽電池基板１に再び付着することはな
く,また洗浄槽１２の汚染が低減されるという効果があ
る。In this state, the solar cell substrate 1 is
When placed on the roller conveyor 15, the solar cell substrate 1 is conveyed in the direction of the carry-in port 13. And the solar cell substrate 1
Is transported by the roller conveyor 15 into the pure water W of the cleaning tank 12, since the ultrasonic vibration of the pure water W is propagated, the chips remaining inside the scribe line 4 of the solar cell substrate 1 are removed. Particles such as burrs are removed, and the particles are discharged together with the overflow or settled in pure water W, so that the particles do not adhere to the solar cell substrate 1 again, and the contamination of the cleaning tank 12 is reduced.
【００３４】さらに、太陽電池基板１を搬送中に連続的
に洗浄することにより,多数の太陽電池基板１を連続的
に洗浄でき,また，超音波振動子１９上を移動するので,
局所的ではなく,一様に超音波振動を付与できるという
効果がある。Further, by continuously cleaning the solar cell substrate 1 during transportation, a large number of solar cell substrates 1 can be continuously cleaned, and since the solar cell substrate 1 moves on the ultrasonic vibrator 19,
There is an effect that ultrasonic vibration can be applied uniformly, not locally.
【００３５】洗浄が完了した太陽電池基板１は洗浄槽１
２の搬出口１４から搬出部１７に搬出されるとともに，
太陽電池基板１の上面及び下面に付着している純水Ｗ及
びパーティクルは水切りエアーナイフ２２から噴射する
高圧エアーによって吹き飛ばされる。従って，太陽電池
基板１を洗浄槽１２の純水Ｗ中を通過させるだけで連続
的に洗浄できる。The cleaned solar cell substrate 1 is placed in the cleaning tank 1.
2 is carried out from the carry-out port 14 to the carry-out section 17,
Pure water W and particles adhering to the upper and lower surfaces of the solar cell substrate 1 are blown off by high-pressure air jetted from a drain air knife 22. Therefore, the solar cell substrate 1 can be continuously cleaned only by passing the solar cell substrate 1 through the pure water W of the cleaning tank 12.
【００３６】洗浄が完了した太陽電池基板１がローラコ
ンベア１５によって搬出部１７に到達すると、エアー噴
射機構２３の噴射ノズル孔２６から太陽電池基板１に向
かって高圧エアーが噴射される。このとき、ノズル本体
２５は太陽電池基板１の外周縁部の形状に倣って矩形枠
状に形成されているため、高圧エアーが太陽電池基板１
の外周縁部１ａに向かって集中して噴射され、４側面を
含む外周縁部１ａに付着している水滴は吹き飛ばされて
除去される。When the washed solar cell substrate 1 reaches the carry-out portion 17 by the roller conveyor 15, high-pressure air is injected from the injection nozzle hole 26 of the air injection mechanism 23 toward the solar cell substrate 1. At this time, since the nozzle body 25 is formed in a rectangular frame shape following the shape of the outer peripheral edge of the solar cell substrate 1, high-pressure air is applied to the solar cell substrate 1.
Are sprayed in a concentrated manner toward the outer peripheral edge 1a of the rim, and water droplets attached to the outer peripheral edge 1a including the four side surfaces are blown off and removed.
【００３７】なお、太陽電池基板１の４側面を含む外周
縁部１ａに向かって高圧エアーを吹き付ける際、太陽電
池基板１をローラコンベア１５によって搬送中でも行う
ことができるが、太陽電池基板１がエアー噴射機構２３
に対向したとき、ローラコンベア１５を停止ゾーンＢに
おいて停止することにより、太陽電池基板１の４側面を
含む外周縁部１ａに集中して高圧エアーを吹き付けるこ
とができる。また、エアー噴射機構２３とローラコンベ
ア１５をある一定時間同期させ高圧エアーを吹き付けて
も良い。When the high-pressure air is blown toward the outer peripheral portion 1a including the four side surfaces of the solar cell substrate 1, the high-pressure air can be blown while the solar cell substrate 1 is being conveyed by the roller conveyer 15. Injection mechanism 23
When the roller conveyor 15 is stopped in the stop zone B, high-pressure air can be blown to the outer peripheral portion 1a including the four side surfaces of the solar cell substrate 1 in a concentrated manner. Further, the air injection mechanism 23 and the roller conveyor 15 may be synchronized with each other for a certain period of time, and high-pressure air may be blown.
【００３８】図４は第２の実施形態を示し、エアー噴射
機構２８の概略的斜視図である。洗浄槽１２の搬出部１
７には太陽電池基板１の第１の隅部２９ａと第２の隅部
２９ｂ及び第３の隅部２９ｃに対向して上段プーリ３０
ａ，３０ｂ，３０ｃが設けられ、これら上段プーリ３０
ａ，３０ｂ，３０ｃには上段エンドレスベルト３１が掛
け渡されている。さらに、第１の隅部２９ａと第４の隅
部２９ｄ及び第３の隅部２９ｃに対向して下段プーリ３
２ａ，３２ｂ，３２ｃが設けられ、これら下段プーリ３
２ａ，３２ｂ，３２ｃには下段エンドレスベルト３３が
掛け渡されている。FIG. 4 shows the second embodiment, and is a schematic perspective view of the air injection mechanism 28. Unloading section 1 of cleaning tank 12
7, an upper pulley 30 facing the first corner 29a, the second corner 29b, and the third corner 29c of the solar cell substrate 1.
a, 30b and 30c are provided.
The upper endless belt 31 is stretched around a, 30b and 30c. Further, the lower pulley 3 faces the first corner 29a, the fourth corner 29d, and the third corner 29c.
2a, 32b and 32c are provided.
A lower endless belt 33 is stretched over 2a, 32b, and 32c.
【００３９】第１の隅部２９ａ及び第３の隅部２９ｃに
設けられた上段プーリ３０ａと下段プーリ３２ａ及び３
０ｃと３２ｃは同軸に支持され、第１の隅部２９ａの上
段プーリ３０ａと下段プーリ３２ａの軸にはモータ３４
が設けられている。さらに、上段エンドレスベルト３１
及び下段エンドレスベルト３３の一部にはエアー噴射ノ
ズル３５ａ，３５ｂが取付けられ、これらエアー噴射ノ
ズル３５ａ，３５ｂは高圧エアー供給源に接続されてい
る。An upper pulley 30a and lower pulleys 32a and 32 provided at the first corner 29a and the third corner 29c, respectively.
0c and 32c are coaxially supported, and a motor 34 is mounted on the shaft of the upper pulley 30a and the lower pulley 32a of the first corner 29a.
Is provided. Furthermore, the upper endless belt 31
Air injection nozzles 35a and 35b are attached to a part of the lower endless belt 33, and these air injection nozzles 35a and 35b are connected to a high-pressure air supply source.
【００４０】このように構成されたエアー噴射機構２８
によれば、モータ３４の回転によって上段プーリ３０ａ
と下段プーリ３２ａが回転駆動し、上段エンドレスベル
ト３１及び下段エンドレスベルト３３がそれぞれ矢印方
向に走行する。従って、エアー噴射ノズル３５ａは太陽
電池基板１の第２の隅部２９ｂを挟んで隣合う２辺に沿
って走行し、エアー噴射ノズル３５ｂは太陽電池基板１
の第４の隅部２９ｄを挟んで隣合う２辺に沿って走行す
る。この状態で、エアー噴射ノズル３５ａ，３５ｂから
高圧エアーを噴射すると、高圧エアーが太陽電池基板１
の４側面を含む外周縁部１ａに向かって集中して噴射さ
れ、４側面を含む外周縁部１ａに付着している水滴は吹
き飛ばされて除去される。The air injection mechanism 28 constructed as described above
According to the above, the upper pulley 30a
And the lower pulley 32a are driven to rotate, and the upper endless belt 31 and the lower endless belt 33 run in the directions of the arrows, respectively. Therefore, the air injection nozzle 35a travels along two sides adjacent to each other across the second corner 29b of the solar cell substrate 1, and the air injection nozzle 35b
The vehicle travels along two sides adjacent to each other across the fourth corner 29d. In this state, when high-pressure air is injected from the air injection nozzles 35a and 35b, the high-pressure air is
The water droplets are intensively sprayed toward the outer peripheral edge 1a including the four side surfaces, and the water droplets adhering to the outer peripheral edge 1a including the four side surfaces are blown off and removed.
【００４１】なお、太陽電池基板１の４側面を含む外周
縁部１ａに向かって高圧エアーを吹き付ける際、太陽電
池基板１をローラコンベア１５によって搬送中でも行う
ことができるが、太陽電池基板１がエアー噴射機構２３
に対向したとき、ローラコンベア１５を停止ゾーンＢに
おいて停止することにより、太陽電池基板１の４側面を
含む外周縁部１ａに集中して高圧エアーを吹き付けるこ
とができる。また、エアー噴射機構２３とローラコンベ
ア１５をある一定時間同期させ高圧エアーを吹き付けて
も良い。When the high-pressure air is blown toward the outer peripheral edge 1a including the four side surfaces of the solar cell substrate 1, the high-pressure air can be blown while the solar cell substrate 1 is being conveyed by the roller conveyor 15, but the solar cell substrate 1 is air-conveyed. Injection mechanism 23
When the roller conveyor 15 is stopped in the stop zone B, high-pressure air can be blown to the outer peripheral portion 1a including the four side surfaces of the solar cell substrate 1 in a concentrated manner. Further, the air injection mechanism 23 and the roller conveyor 15 may be synchronized with each other for a certain period of time, and high-pressure air may be blown.
【００４２】なお、前記実施形態においては、プーリと
エンドレスベルトによってエアー噴射ノズル３５ａ，３
５ｂを太陽電池基板１の４側面を含む外周縁部１ａに沿
って移動するようにしたが、エアー噴射ノズル３５ａ，
３５ｂを移動する機構としては、ボールねじ機構、リニ
アモータ等を採用してもよく、駆動機構は限定されるも
のではない。In the above embodiment, the air injection nozzles 35a, 35
5b is moved along the outer peripheral edge 1a including the four side surfaces of the solar cell substrate 1, but the air injection nozzles 35a,
As a mechanism for moving the 35b, a ball screw mechanism, a linear motor, or the like may be adopted, and the drive mechanism is not limited.
【００４３】なお，本実施形態においては，太陽電池基
板１を搬送する手段としてローラコンベア１５を採用し
たが，例えばメッシュ状または梯子状で，通水性を有す
るエンドレスベルトによって搬送するようにしてもよ
く，洗浄液は純水Ｗに限定されず，水道水あるいは化学
洗浄液でもよい。ここで,化学洗浄液とは,洗剤を含んだ
水やアセトン，メタノール,エタノール，トリクレン,フ
レオン等の有機溶剤を含む。In this embodiment, the roller conveyor 15 is employed as a means for transporting the solar cell substrate 1. However, the solar cell substrate 1 may be transported by, for example, a mesh-like or ladder-like endless belt having water permeability. The cleaning liquid is not limited to pure water W, but may be tap water or a chemical cleaning liquid. Here, the chemical cleaning liquid includes water containing detergent and organic solvents such as acetone, methanol, ethanol, trichlene, and freon.
【００４４】なお、前記第１及び第２の実施の形態にお
いては、被洗浄物として、絶縁基板の片面に透明電極を
有し、この透明電極側にレーザスクライブ法によりスク
ライブラインを形成した太陽電池基板について説明した
が、これに限定されるものではない。すなわち、絶縁基
板上に順次積層された第１電極層，半導体光電変換層及
び第２電極層を含む積層体を備え，前記積層体をレーザ
スクライブ法により光電変換セル集積領域と周縁領域と
に分離し，前記光電変換セル集積領域をレーザスクライ
ブ法により複数の光電変換セルに分離した積層型薄膜太
陽電池の洗浄装置にも適用できる。In the first and second embodiments, as an object to be cleaned, a solar cell having a transparent electrode on one surface of an insulating substrate and forming a scribe line on the transparent electrode side by a laser scribing method. Although the substrate has been described, the present invention is not limited to this. That is, a laminate including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate is provided, and the laminate is separated into a photoelectric conversion cell integrated region and a peripheral region by a laser scribing method. However, the present invention is also applicable to a cleaning device for a stacked thin-film solar cell in which the photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribe method.
【００４５】[0045]
【発明の効果】以上説明したように，この発明によれ
ば，被洗浄物としての太陽電池基板、積層型薄膜太陽電
池の洗浄が完了して洗浄槽から搬出されると、その側面
を含む外周縁部に付着している水分を高圧エアーによっ
て自動的に吹き飛ばすことができ、水分を完全に取り除
くことができ、太陽電池基板及び積層型薄膜太陽電池の
洗浄の自動化が可能となり、生産性の向上とコストダウ
ンを図ることができるという効果がある。As described above, according to the present invention, when the cleaning of the solar cell substrate and the laminated thin-film solar cell as the object to be cleaned is completed and the cell is taken out of the cleaning tank, the outside including the side surface thereof is removed. Moisture adhering to the periphery can be automatically blown off by high-pressure air, and water can be completely removed, which makes it possible to automate the cleaning of solar cell substrates and stacked thin-film solar cells, improving productivity. This has the effect that cost can be reduced.
【図１】この発明の第１の実施形態を示す洗浄装置の縦
断側面図。FIG. 1 is a vertical sectional side view of a cleaning apparatus according to a first embodiment of the present invention.
【図２】同実施形態を示し、図１のＡ部を拡大した縦断
側面図。FIG. 2 is a longitudinal sectional side view showing the same embodiment and enlarging a portion A in FIG. 1;
【図３】同実施形態のエアー噴射機構の概略的斜視図。FIG. 3 is a schematic perspective view of the air injection mechanism of the embodiment.
【図４】この発明の第２の実施形態を示すエアー噴射機
構の概略的斜視図。FIG. 4 is a schematic perspective view of an air injection mechanism showing a second embodiment of the present invention.
【図５】太陽電池基板の平面図。FIG. 5 is a plan view of a solar cell substrate.
【図６】積層型薄膜太陽電池の断面図。FIG. 6 is a cross-sectional view of a stacked thin-film solar cell.
１…太陽電池基板 １ａ…外周縁部 １２…洗浄槽 １３…搬入口 １４…搬出口 １５…ローラコンベア １７…搬出部 ２３…エアー噴射機構 DESCRIPTION OF SYMBOLS 1 ... Solar cell board 1a ... Peripheral edge 12 ... Cleaning tank 13 ... Carry-in port 14 ... Carry-out port 15 ... Roller conveyor 17 ... Carry-out part 23 ... Air injection mechanism
Claims (5)
の搬入口、他端側に洗浄が完了した太陽電池基板を搬出
する搬出口を有し、内部に洗浄液を収容した洗浄槽と，
前記太陽電池基板を前記搬入口から洗浄槽に搬入し、洗
浄液中に浸漬した状態で搬送させるとともに、前記搬出
口から搬出させる搬送機構と，前記搬出口側の搬送機構
に対向して設けられ洗浄が完了した前記太陽電池基板の
側面を含む外周縁部に残留している水滴を吹き飛ばして
水切りするエアー噴射機構とを具備したことを特徴とす
る太陽電池基板の洗浄装置。1. A cleaning tank having a carry-in port on one end side for carrying a solar cell substrate as an object to be cleaned and a carry-out port for carrying out a washed solar cell substrate on the other end side, and containing a cleaning liquid therein;
A transport mechanism for carrying the solar cell substrate into the cleaning tank from the carry-in port, transporting the solar cell substrate in a state of being immersed in the cleaning liquid, and carrying the solar cell substrate out of the carry-out port, and a cleaning mechanism provided opposite the transport mechanism on the carry-out port side. An air jet mechanism for blowing off and removing water droplets remaining on the outer peripheral edge including the side surface of the solar cell substrate, the cleaning of which has been completed.
透明電極を有し、この透明電極側にレーザスクライブ法
によりスクライブラインを形成した被洗浄物であること
を特徴とする請求項１記載の太陽電池基板の洗浄装置。2. The cleaning object according to claim 1, wherein the solar cell substrate has a transparent electrode on one surface of an insulating substrate, and a scribe line formed on the transparent electrode side by a laser scribe method. Solar cell substrate cleaning equipment.
積層された第１電極層，半導体光電変換層及び第２電極
層を含む積層体を備え，前記積層体をレーザスクライブ
法により光電変換セル集積領域と周縁領域とに分離し，
前記光電変換セル集積領域をレーザスクライブ法により
複数の光電変換セルに分離し，複数の光電変換セルの少
なくとも一部は電気的に直列に接続されている被洗浄物
であることを特徴とする請求項１記載の太陽電池基板の
洗浄装置。3. The solar cell substrate includes a laminated body including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate, and the laminated body is subjected to photoelectric conversion by a laser scribing method. Separated into a cell integration area and a peripheral area,
The photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribing method, and at least a part of the plurality of photoelectric conversion cells is an object to be cleaned which is electrically connected in series. Item 3. The cleaning device for a solar cell substrate according to Item 1.
外周縁部に倣った矩形枠形状で、内部にエアー通路を形
成したノズル本体と、このノズル本体に設けられ、前記
太陽電池基板の側面を含む外周縁部に向かって高圧エア
ーを噴射する噴射ノズル孔とからなることを特徴とする
請求項１記載の太陽電池基板の洗浄装置。4. A nozzle body having a rectangular frame shape following an outer peripheral edge of a solar cell substrate and having an air passage formed therein, and a side surface of the solar cell substrate provided in the nozzle body. The cleaning device for a solar cell substrate according to claim 1, further comprising an injection nozzle hole that injects high-pressure air toward an outer peripheral portion including:
外周縁部に沿って移動し、太陽電池基板の側面を含む外
周縁部に向かって高圧エアーを噴射することを特徴とす
る請求項１記載の太陽電池基板の洗浄装置。5. The air injection mechanism moves along an outer peripheral edge of the solar cell substrate and injects high-pressure air toward an outer peripheral edge including a side surface of the solar cell substrate. A solar cell substrate cleaning apparatus according to the above.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28026699A JP2001102606A (en) | 1999-09-30 | 1999-09-30 | Washing device of solar cell substrate |
| DE60044762T DE60044762D1 (en) | 1999-05-20 | 2000-03-16 | Method and device for producing a semiconductor component |
| EP00105316A EP1054457B1 (en) | 1999-05-20 | 2000-03-16 | Method and apparatus for manufacturing a semiconductor device |
| AT00105316T ATE476754T1 (en) | 1999-05-20 | 2000-03-16 | METHOD AND DEVICE FOR PRODUCING A SEMICONDUCTOR COMPONENT |
| AU22338/00A AU775032B2 (en) | 1999-05-20 | 2000-03-17 | Method and apparatus for manufacturing a semiconductor device |
| US09/531,549 US6271149B1 (en) | 1999-05-20 | 2000-03-20 | Method of forming a thin film on a substrate of a semiconductor device |
| US09/837,004 US20010014542A1 (en) | 1999-05-20 | 2001-04-17 | Method and apparatus for manufacturing a semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28026699A JP2001102606A (en) | 1999-09-30 | 1999-09-30 | Washing device of solar cell substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001102606A true JP2001102606A (en) | 2001-04-13 |
Family
ID=17622611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28026699A Pending JP2001102606A (en) | 1999-05-20 | 1999-09-30 | Washing device of solar cell substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001102606A (en) |
-
1999
- 1999-09-30 JP JP28026699A patent/JP2001102606A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6506260B1 (en) | Method for cleaning photovoltaic module and cleaning apparatus | |
| JP5377037B2 (en) | High-pressure liquid jet cleaning equipment for thin-film solar panels | |
| KR101616765B1 (en) | Wafer separating apparatus, wafer separating/transferring apparatus, wafer separating method, wafer separating/transferring method and solar cell wafer separating/transferring, method | |
| US6271149B1 (en) | Method of forming a thin film on a substrate of a semiconductor device | |
| CN102403400B (en) | The manufacturing installation of thin film solar cell and manufacture method | |
| KR920003879B1 (en) | Surface treatment method of semiconductor substrate | |
| CN102185119A (en) | Organic light emitting diode (OLED) glass substrate cleaning equipment and cleaning method | |
| CN202067842U (en) | Equipment for cleaning OLED (organic light emitting diode) glass substrate | |
| JP2001044466A (en) | Method and system for cleaning integrated thin film solar cell | |
| JP2001102606A (en) | Washing device of solar cell substrate | |
| CN104148306A (en) | Solar cell dust-cleaning device | |
| JP2001102611A (en) | Washing device of solar cell substrate | |
| JP2002318545A (en) | Manufacturing method and manufacturing apparatus for display panel | |
| JPH07328573A (en) | Washing method and apparatus | |
| JP2001044467A (en) | System for cleaning integrated thin film solar cell | |
| JP2002126659A (en) | Method and device for forming thin film pattern | |
| JP5296978B2 (en) | Solar cell panel manufacturing system and solar cell panel manufacturing method | |
| CN217616196U (en) | 3D apron brush and spray belt cleaning device that block through brattice | |
| KR20010070778A (en) | Multi functional cleaning module of manufacturing apparatus for liquid crystal display device and Cleaning apparatus using the same | |
| JP2001177136A (en) | Method of manufacturing thin-film solar battery, and equipment of processing through hole and equipment of patterning the same by powder jetting method for thin-film substrate | |
| JP2001156308A (en) | Method and apparatus for drying solar cell substrate | |
| KR101533244B1 (en) | Method and apparatus for manufacturing of thin film type solar cell | |
| EP1016738A2 (en) | Electroplaner | |
| JP2001053309A (en) | Method for manufacturing thin-film solar cell panel and device for draining off rinsing water of thin-film solar cell panel | |
| JPH11300300A (en) | Method and device for treatment of substrate |