JP2001085757A - Flexible piezoelectric element and manufacturing method thereof - Google Patents
Flexible piezoelectric element and manufacturing method thereofInfo
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- JP2001085757A JP2001085757A JP26211599A JP26211599A JP2001085757A JP 2001085757 A JP2001085757 A JP 2001085757A JP 26211599 A JP26211599 A JP 26211599A JP 26211599 A JP26211599 A JP 26211599A JP 2001085757 A JP2001085757 A JP 2001085757A
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- Prior art keywords
- electrode
- composite
- piezoelectric sheet
- piezoelectric element
- composite piezoelectric
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、可撓性圧電素子に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flexible piezoelectric element.
【０００２】[0002]
【従来の技術】従来、可撓性圧電素子としては、図６に
示すように高分子母材１と圧電セラミック粉末２とを混
合しシート状に成形後、この複合圧電シート３表面に電
極４を設ける。2. Description of the Related Art Conventionally, as a flexible piezoelectric element, as shown in FIG. 6, a polymer base material 1 and a piezoelectric ceramic powder 2 are mixed and formed into a sheet shape. Is provided.
【０００３】この際に、電極としては分極処理によって
付与された圧電特性や高分子母材１の耐熱性等を考慮し
て一般に銅、アルミニウム、金等の金属蒸着あるいは接
着剤により貼付した金属の箔電極が用いられている。[0003] At this time, in consideration of the piezoelectric characteristics imparted by the polarization treatment and the heat resistance of the polymer base material 1, the electrode is generally made of a metal deposited on copper, aluminum, gold or the like, or a metal adhered by an adhesive. A foil electrode is used.
【０００４】また、特開平５−１０２５４８号公報で
は、複合圧電体シート３に金属を溶射した溶射電極を用
いた可撓性圧電素子が提案されている。Japanese Patent Application Laid-Open No. Hei 5-102548 proposes a flexible piezoelectric element using a sprayed electrode obtained by spraying a metal on the composite piezoelectric sheet 3.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、前記の
可撓性圧電素子は信頼性や感度、及び複雑な製造工程を
有するという課題を有していた。すなわち、蒸着電極で
は一般に設けられる電極の厚みが０．０２〜０．１μm
と程度と非常に薄いため複合圧電体シートが撓んだ場合
に電極内に亀裂が生じてしまい感度が低下あるいは、出
力が得られないという課題があった。However, the above-mentioned flexible piezoelectric element has problems of reliability, sensitivity, and complicated manufacturing steps. That is, the thickness of the electrode generally provided in the deposition electrode is 0.02 to 0.1 μm
When the composite piezoelectric sheet is bent because of its extremely small thickness, cracks are generated in the electrodes, resulting in a problem that the sensitivity is reduced or an output is not obtained.
【０００６】また、金属箔電極は、一般に６〜１００μ
m程度の厚さの金属箔を、ポリエステル系樹脂、ウレタ
ン系樹脂、エポキシ系樹脂等からなる５〜４０μm程度
の接着剤を介して、複合圧電体シート貼付される。しか
し、この金属箔電極は、特に複合圧電体シート両面に設
けた場合、複合圧電体の可撓性という重量な長所を損な
い、感度が低いという課題があった。The metal foil electrode generally has a thickness of 6 to 100 μm.
A metal foil having a thickness of about m is attached to the composite piezoelectric sheet via an adhesive of about 5 to 40 μm made of polyester resin, urethane resin, epoxy resin or the like. However, when this metal foil electrode is provided on both surfaces of the composite piezoelectric sheet, there is a problem in that the flexibility of the composite piezoelectric substance is impaired, and the sensitivity is low.
【０００７】さらに、溶射電極の場合は複合圧電体の耐
熱性のため、容易に溶射成形できるのは低沸点の金属の
みであり、用いられる電極材料が制限されるという課題
があると同時に、溶射時に複合圧電体シートにエアー圧
等の負荷が印加されるため、複合圧電体シートの信頼性
に課題があった。Further, in the case of a sprayed electrode, only a low-boiling point metal can be easily spray-formed due to the heat resistance of the composite piezoelectric material, and there is a problem that the electrode material used is limited. Since a load such as air pressure is sometimes applied to the composite piezoelectric sheet, there has been a problem in the reliability of the composite piezoelectric sheet.
【０００８】[0008]
【課題を解決するための手段】本発明は、上記課題を解
決するために、高分子中母材に圧電セラミック粉末を混
入した複合圧電体シートと、前記複合圧電体シートの両
面に配置された電極とからなり、前記複合圧電体シート
と前記電極との少なくとも一方の面に空気層をもうけた
可撓性圧電素子である。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed in a base material of a polymer, and is disposed on both surfaces of the composite piezoelectric sheet. A flexible piezoelectric element comprising electrodes and having an air layer on at least one surface of the composite piezoelectric sheet and the electrodes.
【０００９】上記発明によれば、前記複合圧電体シート
と前記電極との少なくとも一方の面に空気層を設けた構
成であるので、感度及び信頼性の高い可撓性圧電素子を
提供できるともに、簡単な製造方法で圧電素子を製造で
きる。According to the above invention, since the air layer is provided on at least one surface of the composite piezoelectric sheet and the electrode, a flexible piezoelectric element having high sensitivity and reliability can be provided. A piezoelectric element can be manufactured by a simple manufacturing method.
【００１０】[0010]
【発明の実施の形態】上記課題を解決するために請求項
１の発明は、高分子中母材に圧電セラミック粉末を混入
した複合圧電体シートと、前記複合圧電体シートの両面
に配置された電極とからなり、前記複合圧電体シートと
前記電極との少なくとも一方の面に空気層をもうけた可
撓性圧電素子である。In order to solve the above-mentioned problems, a first aspect of the present invention is to provide a composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed in a matrix of a polymer, and disposed on both surfaces of the composite piezoelectric sheet. A flexible piezoelectric element comprising electrodes and having an air layer on at least one surface of the composite piezoelectric sheet and the electrodes.
【００１１】そして、前記複合圧電体シートと前記電極
との少なくとも一方の面に空気層を設けた構成であるの
で、感度及び信頼性の高い可撓性圧電素子を提供でき
る。Further, since the air layer is provided on at least one surface of the composite piezoelectric sheet and the electrodes, a flexible piezoelectric element having high sensitivity and high reliability can be provided.
【００１２】請求項２記載の発明は、空気層は複合圧電
体シートと電極との接触面積が複合圧電体シートの表面
積よりも小さい可撓性圧電素子である。According to a second aspect of the present invention, the air layer is a flexible piezoelectric element in which the contact area between the composite piezoelectric sheet and the electrode is smaller than the surface area of the composite piezoelectric sheet.
【００１３】そして、複合圧電体シートと電極との接触
面積が複合圧電体シートの表面積よりも小さくすること
で空気層を形成したので、容易に簡単な構成で空気層を
形成でき、感度及び信頼性の高い可撓性圧電素子を提供
できる。Since the air layer is formed by making the contact area between the composite piezoelectric sheet and the electrode smaller than the surface area of the composite piezoelectric sheet, the air layer can be easily formed with a simple structure, and the sensitivity and reliability can be improved. A highly flexible flexible piezoelectric element can be provided.
【００１４】請求項３記載の発明は、高分子母材を塩素
化ポリエチレンで構成した可撓性圧電素子である。According to a third aspect of the present invention, there is provided a flexible piezoelectric element having a polymer base material made of chlorinated polyethylene.
【００１５】そして、塩素化ポリエチレンは優れた耐熱
性と優れた可撓性を有するのでこれらの特性を兼ね備え
た複合圧電体シートが得られる。[0015] Since chlorinated polyethylene has excellent heat resistance and excellent flexibility, a composite piezoelectric sheet having these characteristics can be obtained.
【００１６】請求項４記載の発明は、圧電セラミック粉
末をチタン酸鉛とジルコン酸鉛の固溶体で構成した可撓
性圧電素子である。According to a fourth aspect of the present invention, there is provided a flexible piezoelectric element comprising piezoelectric ceramic powder formed of a solid solution of lead titanate and lead zirconate.
【００１７】そして、粉末をチタン酸鉛とジルコン酸鉛
の固溶体の圧電セラミック粉末は工業的に多量に利用さ
れているので、安価であり、入手も容易であるため、高
感度で安価な可撓性圧電素子が提供できる。The piezoelectric ceramic powder, which is a solid solution of lead titanate and lead zirconate, is inexpensively used because it is industrially used in a large amount, and is easily available. Piezoelectric element can be provided.
【００１８】請求項５記載の発明は、圧電セラミック粉
末をチタン酸鉛で構成した可撓性圧電素子である。According to a fifth aspect of the present invention, there is provided a flexible piezoelectric element comprising piezoelectric ceramic powder made of lead titanate.
【００１９】そして、チタン酸鉛の誘電率は、チタン酸
鉛とジルコン酸鉛の固溶体の誘電率よりも小さいので、
圧電セラミック粉末の誘電率を小さくできるため、分極
処理が容易になり、簡単に高感度な可撓性圧電素子が提
供できる。Since the dielectric constant of lead titanate is smaller than the dielectric constant of a solid solution of lead titanate and lead zirconate,
Since the dielectric constant of the piezoelectric ceramic powder can be reduced, the polarization process is facilitated, and a highly sensitive flexible piezoelectric element can be easily provided.
【００２０】請求項６の発明は、電極を金属箔電極で構
成した可撓性圧電素子である。According to a sixth aspect of the present invention, there is provided a flexible piezoelectric element having an electrode formed of a metal foil electrode.
【００２１】そして、電極を金属箔電極で構成すること
で、可撓性を維持し、信頼性の高い、可撓性圧電素子が
実現できる。By forming the electrodes with metal foil electrodes, it is possible to realize a flexible piezoelectric element that maintains flexibility and has high reliability.
【００２２】請求項７の発明は、電極を電極用高分子と
導電性粒子とからなる複合導電体で構成した可撓性圧電
素子である。A seventh aspect of the present invention is a flexible piezoelectric element in which an electrode is composed of a composite conductor comprising a polymer for an electrode and conductive particles.
【００２３】そして、導電性粒子の接触を通して複合導
電体の導電性が確保される。また、電極用高分子自身の
可撓性を通して複合導電体の可撓性が確保される。ま
た、複合導電体電極の電極用高分子と、複合圧電体シー
トの高分子母材の軟化温度の適切な選択により、容易に
熱プレス等により接着できる。Then, the conductivity of the composite conductor is ensured through the contact of the conductive particles. Further, the flexibility of the composite conductor is ensured through the flexibility of the electrode polymer itself. In addition, by appropriately selecting the softening temperature of the polymer for the electrode of the composite conductor electrode and the polymer base material of the composite piezoelectric sheet, the composite can be easily bonded by hot pressing or the like.
【００２４】請求項８の発明は、電極用高分子と高分子
母材とを同質材料で構成した可撓性圧電素子である。The invention according to claim 8 is a flexible piezoelectric element in which a polymer for an electrode and a polymer base material are made of the same material.
【００２５】そして、電極用高分子と高分子母材とが同
質材料であるので、電極を複合圧電体シートに容易に強
固接着でき、信頼性が向上する。Since the polymer for the electrode and the polymer base material are the same material, the electrode can be easily and firmly bonded to the composite piezoelectric sheet, and the reliability is improved.
【００２６】請求項９の発明は、導電性粒子をカーボン
で構成した可撓性圧電素子である。A ninth aspect of the present invention is a flexible piezoelectric element in which conductive particles are made of carbon.
【００２７】そして、カーボン粒子は工業的に多量に利
用されているので、安価であり、入手も容易である。Since carbon particles are industrially used in large quantities, they are inexpensive and easy to obtain.
【００２８】請求項１０の発明は、高分子中母材に圧電
セラミック粉末を混入した複合圧電体シートと、前記複
合圧電体シートの両面に配置された電極とからなり、前
記複合圧電体シートと前記電極との少なくとも一方の面
を熱溶着により空気層を形成することで、容易に複合圧
電体シートと電極との間に空気層を形成でき、可撓性を
保持したまま、複合圧電体シートと電極が、容易に強固
接着できるとともに、面積の大きな可撓性圧電素子も製
造できる。According to a tenth aspect of the present invention, there is provided a composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed into a base material of a polymer, and electrodes disposed on both sides of the composite piezoelectric sheet. By forming an air layer by heat welding at least one surface with the electrode, an air layer can be easily formed between the composite piezoelectric sheet and the electrode, and the composite piezoelectric sheet is maintained while maintaining flexibility. And the electrode can be easily and firmly bonded, and a flexible piezoelectric element having a large area can be manufactured.
【００２９】請求項１１の発明は、複合圧電体シートと
電極とを凹凸状の金型を用いて熱溶着により空気層を形
成することで、容易に複合圧電体シートと電極との間に
空気層を形成でき、可撓性を保持したまま、複合圧電体
シートと電極が容易に強固接着できる。According to the eleventh aspect of the present invention, an air layer is formed between the composite piezoelectric sheet and the electrodes by heat welding using an uneven mold to easily form an air gap between the composite piezoelectric sheet and the electrodes. A layer can be formed, and the composite piezoelectric sheet and the electrode can be easily and firmly bonded while maintaining flexibility.
【００３０】請求項１２の発明は複合圧電体シートと電
極とを格子状の金型を用いて熱溶着により空気層を形成
することで、可撓性を保持したまま、接着時の複合圧電
体シートへの付加を低減でき、信頼性の高い可撓性圧電
素子が製造できる。According to a twelfth aspect of the present invention, an air layer is formed by heat welding a composite piezoelectric sheet and an electrode using a lattice-shaped mold, so that the composite piezoelectric material can be bonded while maintaining flexibility. The addition to the sheet can be reduced, and a highly reliable flexible piezoelectric element can be manufactured.
【００３１】請求項１３の発明は、高分子中母材に圧電
セラミック粉末を混入した複合圧電体シートと、前記複
合圧電体シートの両面に配置された電極とからなり、前
記複合圧電体シートと前記電極との少なくとも一方の表
面を部分的に溶剤で溶かした後、電極を接着し、複合圧
電体シートと電極との接触面積が複合圧電体シートの表
面積より小さくなるよう形成することで、接着時の熱や
印加圧力を低減できるとともに、強固接着できるので信
頼性が向上する。According to a thirteenth aspect of the present invention, there is provided a composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed into a base material of a polymer, and electrodes arranged on both surfaces of the composite piezoelectric sheet. After partially dissolving at least one surface of the electrode with a solvent, the electrodes are bonded, and the contact area between the composite piezoelectric sheet and the electrodes is formed so as to be smaller than the surface area of the composite piezoelectric sheet. The heat and applied pressure at the time can be reduced, and strong bonding can be performed, so that reliability is improved.
【００３２】請求項１４の発明は、高分子中母材に圧電
セラミック粉末を混入した複合圧電体シートと、前記複
合圧電体シートの両面に配置された電極とからなり、前
記複合圧電体シートと前記電極との少なくとも一方の面
を部分的に接着剤で接着して空気層を形成することで、
接着時の熱や印加圧力を低減できるとともに、強固接着
できるので信頼性が向上する。また、接着剤の厚みを制
御できるため、可撓性を制御できる。According to a fourteenth aspect of the present invention, there is provided a composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed in a base material of a polymer, and electrodes arranged on both sides of the composite piezoelectric sheet. By forming an air layer by partially bonding at least one surface with the electrode with an adhesive,
The heat and applied pressure at the time of bonding can be reduced, and the reliability can be improved because strong bonding can be performed. Further, since the thickness of the adhesive can be controlled, the flexibility can be controlled.
【００３３】[0033]
【実施例】以下、本説明の一実施例について図面を用い
て説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.
【００３４】（実施例１）図１は本発明の実施例１の可
撓性圧電素子の断面図である。この可撓性圧電素子は高
分子母材１中に圧電セラミック粉末２を分散して混入し
た後、厚さ０．３mmのシートとした複合圧電体シート３
と、複合圧電体シート３の両面に電極４を配置した。圧
電特性を付与するために、電極４の間に直流高電圧を印
加して圧電セラミック粉末２を分極した。Embodiment 1 FIG. 1 is a sectional view of a flexible piezoelectric element according to Embodiment 1 of the present invention. This flexible piezoelectric element is obtained by dispersing and mixing a piezoelectric ceramic powder 2 in a polymer matrix 1 and then forming a composite piezoelectric sheet 3 having a thickness of 0.3 mm.
And the electrodes 4 on both surfaces of the composite piezoelectric sheet 3. In order to impart piezoelectric characteristics, a DC high voltage was applied between the electrodes 4 to polarize the piezoelectric ceramic powder 2.
【００３５】本実施例では電極４としてアルミニウム１
５μmの金属泊電極を用い、複合圧電体シート３と電極
４は熱溶着により接着させた。ここで、複合圧電体シー
ト３と電極４の少なくとも一方の面において、複合圧電
体シート３と電極４との接触面積が複合圧電体シート３
の表面積よりも小さくすることで空気層５を形成した。In this embodiment, the electrode 4 is made of aluminum 1
The composite piezoelectric sheet 3 and the electrode 4 were bonded by heat welding using a metal metal electrode of 5 μm. Here, on at least one surface of the composite piezoelectric sheet 3 and the electrode 4, the contact area between the composite piezoelectric sheet 3 and the electrode 4 is smaller than that of the composite piezoelectric sheet 3.
The air layer 5 was formed by making the surface area smaller than the surface area.
【００３６】このため、熱溶着用の金型治具８は図２
（ａ）に示すように、平面状ではなく凹凸状のものを使
用し、複合圧電体シート３及び電極４に部分的に接触す
るようにした。よって、金型治具８が複合圧電体シート
３及び電極４と接触しない部分には空気層５が形成さ
れ、図２（ｂ）のような空気層５を設けた可撓性圧電素
子を得た。電極４と複合圧電体シート３とが部分的に接
着されているため、電極４の引っ張り力が緩和され可撓
性が向上した。また、可撓性圧電素子は外力によって電
荷を発生するが、この電荷発生量Ｑ［＝ＣＶ］は静電容
量Ｃと電圧Ｖの積で表される。この電荷発生量は周波数
や静電容量Ｃに依存しないが、出力電圧Ｖは静電容量Ｃ
に依存する。このため、静電容量Ｃが小さいほど出力電
圧Ｖは大きくなり見かけ上の感度が向上する。このと
き、静電容量Ｃは複合圧電体シート３と電極４との接触
面積つまり空気層５に依存し、空気層５を形成すること
により可撓性圧電素子の静電容量が減少する。この結
果、複合圧電体シート３表面において電極４に対し空気
層５の占める割合が大きいほど静電容量は低下し、感度
が向上することとなる。本発明の可撓性圧力センサは外
力が印加されない状態では図１（ａ）に示すように複合
圧電体シート３と電極４との接触面積は小さいが、外力
が印加されると図１（ｂ）に示すように、印加部に応じ
て電極４が複合圧電体シート３と接触するため印加面積
に応じた出力が得られる。For this reason, the heat welding mold jig 8 is shown in FIG.
As shown in FIG. 3A, an uneven shape was used instead of a flat shape, and the composite piezoelectric sheet 3 and the electrode 4 were partially contacted. Therefore, an air layer 5 is formed in a portion where the mold jig 8 does not contact the composite piezoelectric sheet 3 and the electrode 4, and a flexible piezoelectric element provided with the air layer 5 as shown in FIG. Was. Since the electrode 4 and the composite piezoelectric sheet 3 are partially bonded, the tensile force of the electrode 4 was reduced, and the flexibility was improved. The flexible piezoelectric element generates electric charge by an external force, and the amount of generated electric charge Q [= CV] is represented by the product of the capacitance C and the voltage V. Although this charge generation amount does not depend on the frequency or the capacitance C, the output voltage V is
Depends on. Therefore, the smaller the capacitance C is, the larger the output voltage V is, and the apparent sensitivity is improved. At this time, the capacitance C depends on the contact area between the composite piezoelectric sheet 3 and the electrode 4, that is, the air layer 5. By forming the air layer 5, the capacitance of the flexible piezoelectric element decreases. As a result, as the ratio of the air layer 5 to the electrode 4 on the surface of the composite piezoelectric sheet 3 increases, the capacitance decreases and the sensitivity improves. When the external force is not applied to the flexible pressure sensor of the present invention, the contact area between the composite piezoelectric sheet 3 and the electrode 4 is small as shown in FIG. As shown in ()), the electrode 4 comes into contact with the composite piezoelectric sheet 3 according to the application section, so that an output corresponding to the application area is obtained.
【００３７】本実施例において、空気層５の占める割合
を変化させて、各々の可撓性圧電素子の外力よる出力電
圧を測定した。この結果を図３に示す。この時、外力と
して可撓性圧電素子が１mm歪む圧力を印加し、印加面積
は一定とした。この結果からも空気層５を形成すること
によって感度が向上し、空気層５の占める割合が大きい
ほどその傾向が大きいことが解った。よって本発明の可
撓性圧電素子は電極４として蒸着電極を使用しなくても
感度が高く、信頼性の高い圧電素子を実現することがで
きた。また、複合圧電体シート３と電極４とを熱プレス
法によって接着できるため、簡単な製造工程で空気層５
を形成し、容易に接着可能となる。さらに大面積の可撓
性圧電素子を容易に形成できる。In this example, the output voltage of each flexible piezoelectric element due to the external force was measured while changing the proportion of the air layer 5. The result is shown in FIG. At this time, a pressure for distorting the flexible piezoelectric element by 1 mm was applied as an external force, and the applied area was kept constant. From this result, it was found that the sensitivity was improved by forming the air layer 5, and that the tendency increased as the proportion of the air layer 5 increased. Therefore, the flexible piezoelectric element of the present invention can realize a highly reliable and highly reliable piezoelectric element without using a deposition electrode as the electrode 4. Further, since the composite piezoelectric sheet 3 and the electrode 4 can be bonded by a hot press method, the air layer 5 can be formed by a simple manufacturing process.
And can be easily bonded. Further, a flexible piezoelectric element having a large area can be easily formed.
【００３８】また、圧電セラミック粉末２の材質は、チ
タン酸鉛とジルコン酸鉛の固溶体であることが望まし
い。この組成の圧電セラミックは電子部品用セラミック
として工業的に多量に実用されているので、安価であり
入手も容易である。The material of the piezoelectric ceramic powder 2 is preferably a solid solution of lead titanate and lead zirconate. Piezoelectric ceramics of this composition are industrially used in large quantities as ceramics for electronic components, and are inexpensive and easily available.
【００３９】また、チタン酸鉛とジルコン酸鉛の固溶体
以外にも圧電セラミック粉末２の材質としてチタン酸鉛
も好ましい。チタン酸鉛とジルコン酸鉛の固溶体の比誘
電率はおよそ８００〜３０００程度の大きな値である
が、チタン酸鉛の比誘電率は２００〜３００程度の小さ
な値である。この場合、圧電セラミック粉末２と電極４
の間に高分子母材１に起因する静電容量は圧電セラミッ
ク粉末２に起因する静電容量と同程度にできる。従っ
て、圧電セラミック粉末の分極が容易にできる。In addition to the solid solution of lead titanate and lead zirconate, lead titanate is also preferable as the material of the piezoelectric ceramic powder 2. The relative dielectric constant of the solid solution of lead titanate and lead zirconate is a large value of about 800 to 3000, while the relative dielectric constant of lead titanate is a small value of about 200 to 300. In this case, the piezoelectric ceramic powder 2 and the electrode 4
During this time, the capacitance caused by the polymer base material 1 can be substantially equal to the capacitance caused by the piezoelectric ceramic powder 2. Therefore, the polarization of the piezoelectric ceramic powder can be easily performed.
【００４０】また、高分子母材１としてエポキシ樹脂、
ウレタン樹脂、クロロプレン樹脂、塩素化ポリエチレン
樹脂などが用いられるが、エポキシ樹脂、ウレタン樹脂
の耐熱性は６０〜８０℃程度であるのに対し、塩素化ポ
リエチレンは、１２０℃の高耐熱を有する点で優れてい
る。また、塩素化ポリエチレンは分子量や結晶化度等を
適切に選ぶことにより、加硫無しでも上記高耐熱性を実
現できる点でも好ましい。また、塩素化ポリエチレンは
可撓性に優れるため、外力による電極剥離等が抑制さ
れ、信頼性及び感度が高い。An epoxy resin is used as the polymer base material 1,
Urethane resin, chloroprene resin, chlorinated polyethylene resin, etc. are used. Epoxy resin and urethane resin have heat resistance of about 60 to 80 ° C, whereas chlorinated polyethylene has high heat resistance of 120 ° C. Are better. Chlorinated polyethylene is also preferable in that the above high heat resistance can be realized without vulcanization by appropriately selecting the molecular weight, the crystallinity, and the like. Further, since chlorinated polyethylene is excellent in flexibility, electrode peeling or the like due to external force is suppressed, and reliability and sensitivity are high.
【００４１】また、本実施例において、複合圧電体シー
ト３と電極４とを凹凸状の金型治具８を使用したが格子
状の金型治具を使用することによっても空気層５を容易
に形成可能である。この場合、凸部が無いため複合圧電
体シート３に必要以上の圧力印加が抑制されるととも
に、凹部が生じないため、複合圧電体シート３に亀裂等
が生じることなく電極４を接着することができ、信頼性
が向上する。Further, in this embodiment, the composite piezoelectric sheet 3 and the electrodes 4 are formed by using the mold jig 8 having an uneven shape. However, the air layer 5 can be easily formed by using a mold jig having a lattice shape. Can be formed. In this case, since there is no convex portion, unnecessary pressure application to the composite piezoelectric sheet 3 is suppressed, and since no concave portion is formed, the electrode 4 can be bonded without causing cracks or the like in the composite piezoelectric sheet 3. And reliability is improved.
【００４２】（実施例２）本実施例の断面図を図４に示
す。実施例１と異なる点は、電極４として、金属箔電極
ではなく、複合導電体６を使用した点である。複合導電
体６は電極用高分子６ａと導電性粒子６ｂとから構成さ
れる。このとき、導電性粒子６ｂは電極用高分子６ａ中
に網目状に相互に接触して配列され、これらの接触を通
して複合導電体６の導電性が確保される。また、電極用
高分子６ｂにより、それ自身の可撓性を通して複合導電
体６の可撓性が確保される。(Embodiment 2) FIG. 4 is a sectional view of this embodiment. The difference from the first embodiment is that a composite conductor 6 is used as the electrode 4 instead of a metal foil electrode. The composite conductor 6 is composed of an electrode polymer 6a and conductive particles 6b. At this time, the conductive particles 6b are arranged in a mesh manner in the electrode polymer 6a so as to be in contact with each other, and the conductivity of the composite conductor 6 is ensured through these contacts. In addition, the flexibility of the composite conductor 6 is ensured by the electrode polymer 6b through its own flexibility.
【００４３】このため、金属箔電極４を使用した場合以
上の可撓性が得られる。For this reason, flexibility higher than that when the metal foil electrode 4 is used is obtained.
【００４４】また、電極用高分子６ａとして、高分子母
材１と同様、エポキシ樹脂、ウレタン樹脂、クロロプレ
ン樹脂、塩素化ポリエチレン樹脂などが用いられる。ま
た、導電性粒子６ｂとして、カーボン粒子や銀粒子が用
いられる。銀粒子を用いた場合、複合導電体電極６の比
抵抗は５×１０-3Ω・cm程度の小さな値を示すが、カー
ボン粒子を用いた場合、同比抵抗値は約１桁以上の大き
な値を示す。この圧電素子を人体検知に用いた場合の周
波数範囲は約５Hz程度であるので、この時の複合圧電体
シート３のインピーダンスは約１００kΩ以上であり、
電極４の比抵抗値は１kΩ以下程度で充分であるので、
導電性粒子６ｂとして低価格のカーボン粒子を用いるこ
とが望ましい。As the polymer 6a for the electrode, an epoxy resin, a urethane resin, a chloroprene resin, a chlorinated polyethylene resin or the like is used as in the case of the polymer base material 1. Further, carbon particles or silver particles are used as the conductive particles 6b. When silver particles are used, the specific resistance of the composite conductor electrode 6 shows a small value of about 5 × 10 −3 Ω · cm. However, when carbon particles are used, the specific resistance is about one digit or more. Is shown. Since the frequency range when this piezoelectric element is used for human body detection is about 5 Hz, the impedance of the composite piezoelectric sheet 3 at this time is about 100 kΩ or more,
Since the specific resistance value of the electrode 4 is approximately 1 kΩ or less,
It is desirable to use inexpensive carbon particles as the conductive particles 6b.
【００４５】高分子母材１と電極用高分子６ａは同質材
料で形成することが望ましい。It is desirable that the polymer base material 1 and the electrode polymer 6a are formed of the same material.
【００４６】これは、熱によって接着する場合、同質材
料同志が容易に接着しやすいため、接着強度が高く信頼
性も高い。特に、高分子母材１と電極用高分子６ａに塩
素化ポリエチレンを使用することが望ましい。これは、
複合圧電体シート３の高分子母材１で述べたように、塩
素化ポリエチレンは可撓性に優れるため、空気層５を形
成しやすく、感度も高い。また、耐熱性も優れているた
め、信頼性も高い。In the case of bonding by heat, the same material is easily bonded together, so that the bonding strength is high and the reliability is high. In particular, it is desirable to use chlorinated polyethylene for the polymer base material 1 and the electrode polymer 6a. this is,
As described for the polymer matrix 1 of the composite piezoelectric sheet 3, chlorinated polyethylene is excellent in flexibility, so that the air layer 5 is easily formed and the sensitivity is high. Also, since the heat resistance is excellent, the reliability is high.
【００４７】（実施例３）実施例１及び実施例２と異な
る点は、複合圧電体シート３と電極４との接着を複合圧
電体シートの表面を複合圧電体シート３と電極４との接
触面積が複合圧電体シート３の表面積より小さくなるよ
う部分的に溶剤で溶かした後、電極４を接着して空気層
５を形成した点である。この場合の溶剤としては、複合
圧電体シート３を構成する高分子母材１の良溶媒が好適
に用いられるが、複合圧電体シート３を溶解できなくと
も膨潤できる程度の溶媒能があれば充分である。このよ
うな溶剤の例としては、アセトン、トルエン、キシレ
ン、ケトン系溶剤等が挙げられる。本実施例ではトルエ
ンを使用した。この溶剤を複合圧電体シート３と電極４
との接触面積が複合圧電体シート３の表面積より小さく
なるよう部分的に塗布した後、電極４とを接着して空気
層５を形成した。この結果、大きな圧力や温度を印加し
なくても強固に電極４が接着できるうえ、複合圧電体シ
ート３への負荷が低減でるため、信頼性が向上した。特
に、電極４として複合導電体電極６を使用し、複合圧電
体シート３の高分子母材１と電極用高分子６ａとが同質
材料である場合、高分子同志が溶剤により強固接着でき
より信頼性が向上する。(Embodiment 3) The difference from Embodiments 1 and 2 is that the bonding between the composite piezoelectric sheet 3 and the electrode 4 is performed by contacting the surface of the composite piezoelectric sheet 3 with the electrode 4. The point is that the air layer 5 is formed by bonding the electrode 4 after partially dissolving with a solvent so that the area becomes smaller than the surface area of the composite piezoelectric sheet 3. As a solvent in this case, a good solvent of the polymer base material 1 constituting the composite piezoelectric sheet 3 is preferably used, but it is sufficient that the composite piezoelectric sheet 3 has a solvent ability enough to swell even if it cannot be dissolved. It is. Examples of such solvents include acetone, toluene, xylene, ketone solvents and the like. In this example, toluene was used. This solvent is mixed with the composite piezoelectric sheet 3 and the electrode 4.
After the coating was partially applied so that the contact area with the electrode was smaller than the surface area of the composite piezoelectric body sheet 3, the electrode layer 4 was bonded to form an air layer 5. As a result, the electrode 4 can be firmly bonded without applying a large pressure or temperature, and the load on the composite piezoelectric sheet 3 is reduced, so that the reliability is improved. In particular, when the composite conductor electrode 6 is used as the electrode 4 and the polymer base material 1 and the electrode polymer 6a of the composite piezoelectric sheet 3 are made of the same material, the polymers can be firmly adhered to each other by the solvent and more reliable. The performance is improved.
【００４８】（実施例４）本実施例の断面図を図５に示
す。実施例１〜３と異なる点は、複合圧電体シート３と
電極４との接触面積が複合圧電体シート３の表面積より
小さくなるよう、複合圧電体シート３の少なくとも一方
の面に接着剤８を部分的に塗布した後、電極４とを接着
して空気層５を形成した点である。接着剤８としてポリ
エステル系樹脂、ウレタン系樹脂、エポキシ系樹脂や各
々に導電性粒子を混入した導電性接着剤等が挙げられ
る。本実施例ではエポキシ系樹脂を使用した。また、複
合圧電体シート３と電極４との接触面積が複合圧電体シ
ート３の表面積より小さくなるように塗布するために図
５（ａ）に示すように格子状に塗布しその後、電極４を
接着して空気層５を形成した。このため、容易に複合圧
電体シート３と電極４とを強固接着できる。さらに、接
着剤８の塗布厚を制御することによって可撓性を自由に
調節することもできる。(Embodiment 4) FIG. 5 shows a sectional view of this embodiment. The difference from the first to third embodiments is that the adhesive 8 is applied to at least one surface of the composite piezoelectric sheet 3 so that the contact area between the composite piezoelectric sheet 3 and the electrode 4 is smaller than the surface area of the composite piezoelectric sheet 3. The point is that the air layer 5 was formed by bonding the electrode 4 after the partial application. Examples of the adhesive 8 include a polyester-based resin, a urethane-based resin, an epoxy-based resin, and a conductive adhesive in which conductive particles are mixed. In this embodiment, an epoxy resin was used. In order to apply the composite piezoelectric sheet 3 so that the contact area between the composite piezoelectric sheet 3 and the electrode 4 is smaller than the surface area of the composite piezoelectric sheet 3, the composite piezoelectric sheet 3 is applied in a grid shape as shown in FIG. The air layer 5 was formed by bonding. For this reason, the composite piezoelectric sheet 3 and the electrode 4 can be easily and firmly bonded. Further, the flexibility can be freely adjusted by controlling the applied thickness of the adhesive 8.
【００４９】[0049]
【発明の効果】上記実施例から明らかなように、請求項
１の発明によれば、複合圧電体シートと前記電極との少
なくとも一方の面に空気層を設けた構成であるので、感
度及び信頼性の高い可撓性圧電素子を提供できる。As is apparent from the above embodiment, according to the first aspect of the present invention, since the air layer is provided on at least one surface of the composite piezoelectric sheet and the electrode, sensitivity and reliability are improved. A highly flexible flexible piezoelectric element can be provided.
【００５０】また、請求項２記載の発明によれば、複合
圧電体シートと電極との接触面積が複合圧電体シートの
表面積よりも小さくすることで空気層を形成することに
よって簡単な構成で空気層を形成でき、感度及び信頼性
の高い可撓性圧電素子を提供できる。Further, according to the second aspect of the present invention, the contact area between the composite piezoelectric sheet and the electrode is made smaller than the surface area of the composite piezoelectric sheet to form an air layer, so that the air is formed in a simple configuration. A layer can be formed, and a flexible piezoelectric element having high sensitivity and high reliability can be provided.
【００５１】また、請求項３記載の発明によれば、高分
子母材を塩素化ポリエチレンで構成したので、優れた耐
熱性と優れた可撓性を兼ね備えた複合圧電体シートが得
られる。According to the third aspect of the present invention, since the polymer base material is made of chlorinated polyethylene, a composite piezoelectric sheet having both excellent heat resistance and excellent flexibility can be obtained.
【００５２】また、請求項４記載の発明によれば、圧電
セラミック粉末としてチタン酸鉛とジルコン酸鉛の固溶
体を用いているので、安価であり、入手も容易である。According to the fourth aspect of the present invention, since a solid solution of lead titanate and lead zirconate is used as the piezoelectric ceramic powder, it is inexpensive and easily available.
【００５３】また、請求項５記載の発明によれば、圧電
セラミック粉末としてをチタン酸鉛を用いているので、
圧電セラミック粉末の誘電率を小さくできるため、分極
処理が容易になる。According to the fifth aspect of the present invention, since lead titanate is used as the piezoelectric ceramic powder,
Since the dielectric constant of the piezoelectric ceramic powder can be reduced, the polarization process is facilitated.
【００５４】また、請求項６の発明によれば、電極を金
属箔電極で構成することで、可撓性を維持し、信頼性の
高い、可撓性圧電素子が実現できる。According to the sixth aspect of the present invention, since the electrodes are formed of metal foil electrodes, a flexible piezoelectric element which maintains flexibility and has high reliability can be realized.
【００５５】また、請求項７の発明によれば、電極を電
極用高分子と導電性粒子とからなる複合導電体で構成し
たため、電極用高分子自身の可撓性を通して複合導電体
の可撓性が確保されるとともに、容易に熱プレス等の熱
溶着により接着できる。According to the seventh aspect of the present invention, since the electrodes are composed of the composite conductor made of the polymer for the electrode and the conductive particles, the flexibility of the composite conductor is increased through the flexibility of the polymer for the electrode itself. As a result, it can be easily bonded by heat welding such as hot press.
【００５６】また、請求項８の発明によれば、電極用高
分子と高分子母材とを同質材料で構成したので、電極を
複合圧電体シートに容易に強固接着でき、信頼性が向上
する。According to the eighth aspect of the present invention, since the polymer for the electrode and the polymer matrix are made of the same material, the electrode can be easily and firmly bonded to the composite piezoelectric sheet, and the reliability is improved. .
【００５７】また、請求項９の発明によれば、導電性粒
子をカーボンで構成したので、安価であり、入手も容易
である。According to the ninth aspect of the present invention, since the conductive particles are made of carbon, they are inexpensive and easily available.
【００５８】また、請求項１０の発明によれば、複合圧
電体シートと電極とを熱溶着により空気層を形成するこ
とで、容易に複合圧電体シートと電極との間に空気層を
形成でき、可撓性を保持したまま、複合圧電体シートと
電極が、容易に強固接着できるとともに、面積の大きな
可撓性圧電素子も製造できる。According to the tenth aspect of the present invention, an air layer is easily formed between the composite piezoelectric sheet and the electrode by forming the air layer by heat welding the composite piezoelectric sheet and the electrode. In addition, the composite piezoelectric sheet and the electrodes can be easily and firmly bonded while maintaining flexibility, and a flexible piezoelectric element having a large area can be manufactured.
【００５９】また、請求項１１の発明によれば、複合圧
電体シートと電極とを凹凸状の金型を用いて熱溶着によ
り空気層を形成することで、容易に複合圧電体シートと
電極との間に空気層を形成でき、可撓性を保持したま
ま、複合圧電体シートと電極が容易に強固接着できる。According to the eleventh aspect of the present invention, the composite piezoelectric sheet and the electrode are easily formed by forming an air layer by thermal welding using an uneven mold. An air layer can be formed between them, and the composite piezoelectric sheet and the electrodes can be easily and firmly bonded while maintaining flexibility.
【００６０】また、請求項１２の発明によれば、複合圧
電体シートと電極とを格子状の金型を用いて熱溶着によ
り空気層を形成することで、可撓性を保持したまま、接
着時の複合圧電体シートへの付加を低減でき、信頼性の
高い可撓性圧電素子が製造できる。According to the twelfth aspect of the present invention, the composite piezoelectric sheet and the electrodes are bonded to each other while maintaining flexibility by forming an air layer by heat welding using a lattice-shaped mold. In this case, the amount of addition to the composite piezoelectric sheet at the time can be reduced, and a highly reliable flexible piezoelectric element can be manufactured.
【００６１】また、請求項１３の発明によれば、前記複
合圧電体シートと前記電極との少なくとも一方の表面を
部分的に溶剤で溶かした後、電極を接着し、複合圧電体
シートと電極との接触面積が複合圧電体シートの表面積
より小さくなるよう形成することで、接着時の熱や印加
圧力を低減できるとともに、強固接着できるので信頼性
が向上する。According to the thirteenth aspect of the present invention, at least one surface of the composite piezoelectric sheet and the electrode is partially dissolved with a solvent, and then the electrodes are bonded to each other, so that the composite piezoelectric sheet and the electrode are bonded together. Is formed so that the contact area is smaller than the surface area of the composite piezoelectric sheet, the heat and applied pressure at the time of bonding can be reduced, and the bonding can be performed firmly, thereby improving the reliability.
【００６２】また、請求項１４の発明によれば、前記複
合圧電体シートと前記電極との少なくとも一方の面を部
分的に接着剤で接着して空気層を形成することで、接着
時の熱や印加圧力を低減できるとともに、強固接着でき
るので信頼性が向上する。また、接着剤の厚みを制御で
きるため、可撓性を制御できる。According to the fourteenth aspect of the present invention, at least one surface of the composite piezoelectric sheet and the electrode is partially bonded with an adhesive to form an air layer, so that the heat generated during bonding is reduced. And the applied pressure can be reduced, and strong adhesion can be achieved, so that reliability is improved. Further, since the thickness of the adhesive can be controlled, the flexibility can be controlled.
【図１】（ａ）本発明の実施例１における外力印加前の
可撓性圧電素子の断面図 （ｂ）本発明の実施例１における外力印加時の可撓性圧
電素子の断面図FIG. 1A is a cross-sectional view of a flexible piezoelectric element before an external force is applied in Example 1 of the present invention. FIG. 1B is a cross-sectional view of a flexible piezoelectric element when an external force is applied in Example 1 of the present invention.
【図２】（ａ）本発明の実施例１における空気層成形前
の可撓性圧電素子の断面図 （ｂ）本発明の実施例１における空気層成形後の可撓性
圧電素子の断面図FIG. 2A is a cross-sectional view of a flexible piezoelectric element before forming an air layer according to the first embodiment of the present invention. FIG. 2B is a cross-sectional view of a flexible piezoelectric element after forming an air layer according to the first embodiment of the present invention.
【図３】本発明の実施例１における空気層存在率と出力
電圧との関係を示す特性図FIG. 3 is a characteristic diagram showing a relationship between an air layer abundance ratio and an output voltage in Embodiment 1 of the present invention.
【図４】本発明の実施例２における可撓性圧電素子の断
面図FIG. 4 is a sectional view of a flexible piezoelectric element according to a second embodiment of the present invention.
【図５】（ａ）本発明の実施例３における接着剤塗布形
状を示す図 （ｂ）本発明の実施例３における空気層成形後の可撓性
圧電素子の断面図FIG. 5 (a) is a view showing an adhesive application shape in Embodiment 3 of the present invention. (B) A cross-sectional view of a flexible piezoelectric element after forming an air layer in Embodiment 3 of the present invention.
【図６】従来の可撓性圧電素子の断面図FIG. 6 is a cross-sectional view of a conventional flexible piezoelectric element.
１ 高分子母材 ２ 圧電セラミック粉末 ３ 複合圧電シート ４ 電極 ５ 空気層 ６ 複合導電体電極 ６ａ 電極用高分子 ６ｂ 導電性粒子 ７ 金型治具 ８ 接着剤 DESCRIPTION OF SYMBOLS 1 Polymer base material 2 Piezoelectric ceramic powder 3 Composite piezoelectric sheet 4 Electrode 5 Air layer 6 Composite conductor electrode 6a Electrode polymer 6b Conductive particle 7 Mold jig 8 Adhesive
───────────────────────────────────────────────────── フロントページの続き (72)発明者 福田 祐 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 伊藤 雅彦 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 中谷 直史 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 荻野 弘之 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 吉野 浩二 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yu Fukuda 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. 72) Inventor Naofumi Nakatani, 1006 Kadoma, Kazuma, Osaka Prefecture, Matsushita Electric Industrial Co., Ltd. 1006 Kadoma, Kadoma City Matsushita Electric Industrial Co., Ltd.
Claims (14)
した複合圧電体シートと、前記複合圧電体シートの両面
に配置された電極とからなり、前記複合圧電体シートと
前記電極との少なくとも一方の面に空気層をもうけた可
撓性圧電素子。1. A composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed with a matrix material in a polymer, and electrodes arranged on both sides of the composite piezoelectric sheet, wherein at least one of the composite piezoelectric sheet and the electrodes is provided. A flexible piezoelectric element with an air layer on one side.
合圧電体シートの表面積よりも小さい請求項１記載の可
撓性圧電素子。2. The flexible piezoelectric element according to claim 1, wherein a contact area between the composite piezoelectric sheet and the electrode is smaller than a surface area of the composite piezoelectric sheet.
求項１記載の可撓性圧電素子。3. The flexible piezoelectric element according to claim 1, wherein the polymer base material is chlorinated polyethylene.
ン酸鉛の固溶体である請求項１記載の可撓性圧電素子。4. The flexible piezoelectric element according to claim 1, wherein the piezoelectric ceramic powder is a solid solution of lead titanate and lead zirconate.
求項１記載の可撓性圧電素子。5. The flexible piezoelectric element according to claim 1, wherein the piezoelectric ceramic powder is lead titanate.
撓性圧電素子。6. The flexible piezoelectric element according to claim 1, wherein the electrode is a metal foil electrode.
る複合導電体である請求項１記載の可撓性圧電素子。7. The flexible piezoelectric element according to claim 1, wherein the electrode is a composite conductor comprising a polymer for an electrode and conductive particles.
ある請求項７記載の可撓性圧電素子。8. The flexible piezoelectric element according to claim 7, wherein the polymer for electrode and the polymer base material are the same material.
の可撓性圧電素子。9. The flexible piezoelectric element according to claim 7, wherein the conductive particles are carbon.
入した複合圧電体シートと、前記複合圧電体シートの両
面に配置された電極とからなり、前記複合圧電体シート
と前記電極との少なくとも一方の面とを熱溶着して空気
層を形成する可撓性圧電素子およびその製造方法。10. A composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed in a polymer matrix, and electrodes disposed on both sides of the composite piezoelectric sheet, wherein at least one of the composite piezoelectric sheet and the electrodes is provided. A flexible piezoelectric element for forming an air layer by heat welding to one surface and a method for manufacturing the same.
型を用いて熱溶着により空気層を形成する請求項１０記
載の可撓性圧電素子およびその製造方法。11. The flexible piezoelectric element according to claim 10, wherein the air layer is formed by heat welding the composite piezoelectric sheet and the electrode using a concave and convex mold.
型を用いて熱溶着により空気層を形成する請求項１０記
載の可撓性圧電素子およびその製造方法。12. The flexible piezoelectric element according to claim 10, wherein an air layer is formed by heat welding the composite piezoelectric sheet and the electrodes using a lattice-shaped mold.
入した複合圧電体シートと、前記複合圧電体シートの両
面に配置された電極とからなり、前記複合圧電体シート
と前記電極との少なくとも一方の面において、複合圧電
体シートの表面を部分的に溶剤で溶かした後、電極を接
着して空気層を形成した可撓性圧電素子およびその製造
方法。13. A composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed in a base material of a polymer, and electrodes disposed on both sides of the composite piezoelectric sheet. At least one of the composite piezoelectric sheet and the electrodes A flexible piezoelectric element having an air layer formed on one surface by partially dissolving the surface of a composite piezoelectric sheet with a solvent and then bonding electrodes, and a method of manufacturing the same.
入した複合圧電体シートと、前記複合圧電体シートの両
面に配置された電極とからなり、前記複合圧電体シート
と前記電極とを部分的に接着剤で接着して空気層を形成
する可撓性圧電素子およびその製造方法。14. A composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed with a matrix material in a polymer, and electrodes disposed on both sides of the composite piezoelectric sheet. The composite piezoelectric sheet and the electrodes are partially A flexible piezoelectric element which forms an air layer by being adhered with an adhesive, and a method of manufacturing the same.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26211599A JP2001085757A (en) | 1999-09-16 | 1999-09-16 | Flexible piezoelectric element and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26211599A JP2001085757A (en) | 1999-09-16 | 1999-09-16 | Flexible piezoelectric element and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001085757A true JP2001085757A (en) | 2001-03-30 |
Family
ID=17371263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26211599A Withdrawn JP2001085757A (en) | 1999-09-16 | 1999-09-16 | Flexible piezoelectric element and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001085757A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160032485A (en) * | 2014-09-16 | 2016-03-24 | 국방과학연구소 | Method for manufacturing piezoelectric element |
| WO2020261822A1 (en) * | 2019-06-28 | 2020-12-30 | 富士フイルム株式会社 | Piezoelectric film |
| WO2022209854A1 (en) * | 2021-03-30 | 2022-10-06 | 富士フイルム株式会社 | Piezoelectric film |
-
1999
- 1999-09-16 JP JP26211599A patent/JP2001085757A/en not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160032485A (en) * | 2014-09-16 | 2016-03-24 | 국방과학연구소 | Method for manufacturing piezoelectric element |
| KR101632052B1 (en) | 2014-09-16 | 2016-06-20 | 국방과학연구소 | Method for manufacturing piezoelectric element |
| WO2020261822A1 (en) * | 2019-06-28 | 2020-12-30 | 富士フイルム株式会社 | Piezoelectric film |
| JPWO2020261822A1 (en) * | 2019-06-28 | 2020-12-30 | ||
| JP7355819B2 (en) | 2019-06-28 | 2023-10-03 | 富士フイルム株式会社 | piezoelectric film |
| WO2022209854A1 (en) * | 2021-03-30 | 2022-10-06 | 富士フイルム株式会社 | Piezoelectric film |
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