JP2001077384A - Method for manufacturing thin film solar cell and processing device used for the same - Google Patents
Method for manufacturing thin film solar cell and processing device used for the sameInfo
- Publication number
- JP2001077384A JP2001077384A JP24847799A JP24847799A JP2001077384A JP 2001077384 A JP2001077384 A JP 2001077384A JP 24847799 A JP24847799 A JP 24847799A JP 24847799 A JP24847799 A JP 24847799A JP 2001077384 A JP2001077384 A JP 2001077384A
- Authority
- JP
- Japan
- Prior art keywords
- solar cell
- electrode layer
- thin
- film solar
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、薄膜太陽電池の
製造方法と同方法に使用する処理装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a thin film solar cell and a processing apparatus used in the method.
【０００２】[0002]
【従来の技術】現在、環境保護の立場から、クリーンな
エネルギーの研究開発が進められている。中でも、太陽
電池はその資源（太陽光）が無限であること、無公害で
あることから注目を集めている。2. Description of the Related Art At present, research and development of clean energy are being promoted from the standpoint of environmental protection. Above all, solar cells are attracting attention because of their infinite resources (solar rays) and no pollution.
【０００３】薄膜太陽電池は、薄型で軽量、製造コスト
の安さ、大面積化が容易であることなどから、今後の太
陽電池の主流となると考えられる。[0003] Thin-film solar cells are considered to be the mainstream of solar cells in the future because of their thinness, light weight, low manufacturing cost, and easy area enlargement.
【０００４】従来の薄膜太陽電池はガラス基板を用いて
いたが、軽量化、施工性、量産性においてプラスチック
フィルムおよび金属フィルムを用いたフレキシブルタイ
プの太陽電池の研究開発がすすめられている。このフレ
キシブル性を生かし、ロールツーロール方式またはステ
ッピングロール方式の製造方法により大量生産が可能と
なった。Conventional thin-film solar cells use a glass substrate, but research and development of a flexible solar cell using a plastic film and a metal film has been promoted in terms of weight reduction, workability, and mass productivity. Taking advantage of this flexibility, mass production has become possible by a roll-to-roll or stepping roll manufacturing method.
【０００５】両方式共に、複数のロールによる基板搬送
手段を備え、前者は各成膜室内を連続的に移動する基板
上に連続的に成膜する方式であり、後者は各成膜室内で
同時に停止させた基板上に成膜し，成膜の終わった基板
部分を次の成膜室へ送り出す方式を採用している。[0005] Both types are provided with a substrate transport means using a plurality of rolls, and the former is a method in which a film is continuously formed on a substrate moving continuously in each film forming chamber, and the latter is a method in which the film is simultaneously formed in each film forming chamber. A method is adopted in which a film is formed on a stopped substrate, and the substrate portion on which the film has been formed is sent to the next film forming chamber.
【０００６】ステッピングロール方式の成膜装置は、隣
接する成膜室間のガス相互拡散を防止できることから各
薄膜の特性が安定して得られるなどの点で優れており、
その装置の構成は、例えば、特開平6-292349号公報や特
開平8-250431号公報に記載されている。The stepping roll type film forming apparatus is excellent in that the characteristics of each thin film can be stably obtained because gas mutual diffusion between adjacent film forming chambers can be prevented.
The configuration of the device is described in, for example, JP-A-6-292349 and JP-A-8-250431.
【０００７】ところで、上記薄膜太陽電池は、フレキシ
ブルな電気絶縁性フィルム基板上に金属電極層、薄膜半
導体層からなる光電変換層および透明電極層が積層され
てなる光電変換素子（またはセル）が複数形成されてい
る。ある光電変換素子の金属電極と隣接する光電変換素
子の透明電極を電気的に接続することを繰り返すことに
より、最初の光電変換素子の金属電極と最後の光電変換
素子の透明電極とに必要な電圧を出力させることができ
る。例えば、インバータにより交流化し商用電力源とし
て交流１００Ｖを得るためには、薄膜太陽電池の出力電
圧は１００Ｖ以上が望ましく、実際には数１０個以上の
素子が直列接続される。The above-mentioned thin-film solar cell has a plurality of photoelectric conversion elements (or cells) in which a metal electrode layer, a photoelectric conversion layer composed of a thin-film semiconductor layer, and a transparent electrode layer are laminated on a flexible electrically insulating film substrate. Is formed. By repeatedly electrically connecting a metal electrode of a certain photoelectric conversion element and a transparent electrode of an adjacent photoelectric conversion element, a voltage required for the metal electrode of the first photoelectric conversion element and the transparent electrode of the last photoelectric conversion element is obtained. Can be output. For example, in order to obtain an AC of 100 V as a commercial power source by converting into an AC by an inverter, the output voltage of the thin-film solar cell is desirably 100 V or more, and actually several tens or more elements are connected in series.
【０００８】このような光電変換素子とその直列接続
は、電極層と光電変換層の成膜と各層のパターニングお
よびそれらの組み合わせ手順により形成される。上記太
陽電池の構成および製造方法の一例は、例えば特開平１
０−２３３５１７号公報や特願平１１−１９３０６号に
記載されている。[0008] Such a photoelectric conversion element and its serial connection are formed by forming an electrode layer and a photoelectric conversion layer, patterning each layer, and combining them. An example of the configuration and the manufacturing method of the solar cell is disclosed in, for example,
No. 0-233517 and Japanese Patent Application No. 11-19306.
【０００９】前記特願平１１−１９３０６号に記載され
た薄膜太陽電池の構成概念図を、図５に示す。図５は、
プラスチックフィルムを基板とした可撓性薄膜太陽電池
の斜視図を示す。基板６１の表面に形成した単位光電変
換素子６２および基板６１の裏面に形成した接続電極層
６３（後述する第３電極層と第４電極層とを含む層）は
それぞれ複数の単位ユニットに完全に分離され、それぞ
れの分離位置をずらして形成されている。このため、素
子６２のアモルファス半導体部分である光電変換層６５
で発生した電流は、まず透明電極層６６に集められ、次
に該透明電極層領域に形成された集電孔６７を介して背
面の接続電極層６３に通じ、さらに該接続電極層領域で
素子の透明電極層領域の外側に形成された直列接続用の
接続孔６８を介して上記素子と隣り合う素子の透明電極
層領域の外側に延びている下電極層６４に達し、両素子
の直列接続が行われている。FIG. 5 is a conceptual diagram showing the structure of the thin-film solar cell described in Japanese Patent Application No. 11-19306. FIG.
1 shows a perspective view of a flexible thin-film solar cell using a plastic film as a substrate. The unit photoelectric conversion element 62 formed on the surface of the substrate 61 and the connection electrode layer 63 (a layer including a third electrode layer and a fourth electrode layer described later) formed on the back surface of the substrate 61 are completely formed into a plurality of unit units. They are separated and formed with their respective separation positions shifted. Therefore, the photoelectric conversion layer 65, which is an amorphous semiconductor portion of the element 62,
Is generated in the transparent electrode layer 66, then passes through the current collecting hole 67 formed in the transparent electrode layer region to the connection electrode layer 63 on the back surface. And a lower electrode layer 64 extending outside the transparent electrode layer region of an element adjacent to the element through a connection hole 68 for series connection formed outside the transparent electrode layer area of Has been done.
【００１０】上記薄膜太陽電池の簡略化した製造工程の
一例を図６（a）から（g）に示す。プラスチックフィル
ム７１を基板として（工程（a））、これに接続孔７８
を形成し（工程（b））、基板の両面に第１電極層（下
電極）７４および第３電極層（接続電極の一部）７３を
形成（工程（c））した後、接続孔７８と所定の距離離
れた位置に集電孔７７を形成する（工程（d））。上記
工程（c）における第１電極層７４と第３電極層７３の
形成は、後述する成膜装置において、基板７１を反転さ
せて２段階に分けて形成を行い、接続孔７８の部分は、
前記両電極層７４と７３とを成長形成することにより形
成する。これにより、前記両電極層の電気的な接続を得
る。FIGS. 6A to 6G show an example of a simplified manufacturing process of the above-mentioned thin film solar cell. Using the plastic film 71 as a substrate (step (a)), a connection hole 78
Is formed (step (b)), a first electrode layer (lower electrode) 74 and a third electrode layer (part of the connection electrode) 73 are formed on both surfaces of the substrate (step (c)), and then the connection hole 78 is formed. Then, a current collecting hole 77 is formed at a position separated by a predetermined distance (step (d)). The formation of the first electrode layer 74 and the third electrode layer 73 in the step (c) is performed in two stages by inverting the substrate 71 in a film forming apparatus described later.
The two electrode layers 74 and 73 are formed by growing. Thereby, an electrical connection between the two electrode layers is obtained.
【００１１】次に、第１電極層７４の上に、光電変換層
となる半導体層７５および第２電極層である透明電極層
７６を順次形成するとともに（工程（e）および工程
（f））、第３電極層７３の上に第４電極層（接続電極
層の一部）７９を形成する（工程（g））。この後、レ
ーザビームを用いて、基板７１の両側の薄膜を分離加工
して図５に示すような直列接続構造を形成する。Next, a semiconductor layer 75 serving as a photoelectric conversion layer and a transparent electrode layer 76 serving as a second electrode layer are sequentially formed on the first electrode layer 74 (step (e) and step (f)). Then, a fourth electrode layer (part of the connection electrode layer) 79 is formed on the third electrode layer 73 (step (g)). Thereafter, the thin films on both sides of the substrate 71 are separated and processed by using a laser beam to form a series connection structure as shown in FIG.
【００１２】図４は、前記薄膜太陽電池の製造工程の概
略のフローチャートを示し、一部表現を変更して概括的
に示す。FIG. 4 is a schematic flow chart showing a manufacturing process of the thin-film solar cell, which is schematically shown by partially changing its expression.
【００１３】図４に示す工程は、基板孔開け処理（直列
接続孔と集電孔の形成）、第１、第３電極部形成、ａ−
Ｓｉ薄膜および第２、第４電極部形成、薄膜層パターニ
ングによる直列接続形成、セル特性検査などの工程を含
むが、この工程は、図５に示す構造形式の薄膜太陽電池
に対応する工程である。他の形式、例えば基板の片面に
のみに金属電極を形成する形式の薄膜太陽電池の場合に
は、図４における前段の４つの工程が異なり、後段の２
つの工程は同一となる。即ち、基板の片面にのみに金属
電極を形成する形式の薄膜太陽電池の場合の製造方法
は、基板表面に金属電極層，光電変換層，透明電極層の
薄膜を形成する工程と、パターニングにより複数の太陽
電池セルを電気的に直列に接続した太陽電池を形成する
工程と、太陽電池セルの特性検査を行う工程とを含む。The steps shown in FIG. 4 are a substrate drilling process (formation of a series connection hole and a current collecting hole), formation of first and third electrode portions, and a-
The process includes the steps of forming the Si thin film and the second and fourth electrode portions, forming a series connection by patterning the thin film layer, and examining the cell characteristics. This process corresponds to the thin film solar cell having the structure shown in FIG. . In the case of a thin-film solar cell of another type, for example, a type in which a metal electrode is formed only on one surface of a substrate, the four steps in the former stage in FIG.
The two steps are identical. That is, in the case of a thin-film solar cell in which a metal electrode is formed only on one side of a substrate, a manufacturing method includes a step of forming a thin film of a metal electrode layer, a photoelectric conversion layer, and a transparent electrode layer on the surface of the substrate, and a plurality of steps by patterning. Forming a solar cell in which the solar cells are electrically connected in series, and performing a characteristic inspection of the solar cell.
【００１４】[0014]
【発明が解決しようとする課題】ところで、上記従来の
薄膜太陽電池の製造方法においては、検査工程を経て出
荷するまでの時間の短縮化の観点から下記のような問題
があった。However, the above-mentioned conventional method for manufacturing a thin-film solar cell has the following problems from the viewpoint of shortening the time from inspection to shipping.
【００１５】ａ−Ｓｉ太陽電池セルは、一般に光劣化現
象がみられる。実使用状態にあわせ、セル温度４５℃〜
５０℃、光強度０．８〜１．０ｋＷ／ｍ2の標準条件で
光照射すると、通常５００〜１０００時間の光照射によ
り、光劣化はそれ以上は進行せずにセル特性が安定化す
る。この時のセル効率を安定化効率と呼ぶ。従って、セ
ルの特性は最終的には安定化効率で評価しなければなら
ない。また、製品としてはセルを安定化してからでない
と出荷できない。従来のセル特性検査では、セルの初期
特性を評価した後、少数のサンプルを抽出して、その安
定化効率の評価を行っていた。その理由は、評価に大き
な面積と多大な時間が必要となるからである。例えば、
安定化効率が１０％のセルの年産１０ＭＷラインを考え
ると、毎日約２８ｋＷのセルが製造されるが、これらを
標準条件で安定化させるために必要な照射面積は２８０
ｍ2が必要である。このように広い面積と長時間の光照
射が必要となる。また、従来はセルの初期特性を評価し
た後の安定化効率評価に時間がかかるため、特性評価に
基づき製造工程上の不備解消を目的とするフィードバッ
クがかかりにくかった。An a-Si solar battery cell generally shows a photodegradation phenomenon. Cell temperature 45 ° C ~
When light is irradiated under standard conditions of 50 ° C. and a light intensity of 0.8 to 1.0 kW / m 2 , the light irradiation is normally performed for 500 to 1000 hours, so that the photodeterioration does not proceed any more and the cell characteristics are stabilized. The cell efficiency at this time is called stabilization efficiency. Therefore, the characteristics of the cell must ultimately be evaluated based on the stabilization efficiency. In addition, the product cannot be shipped unless the cell is stabilized. In the conventional cell characteristic inspection, after evaluating the initial characteristics of the cell, a small number of samples are extracted and the stabilization efficiency is evaluated. The reason is that the evaluation requires a large area and a large amount of time. For example,
Considering the annual production of 10 MW cells with a stabilization efficiency of 10%, cells of about 28 kW are produced every day. However, the irradiation area required to stabilize these under standard conditions is 280.
m 2 is required. Such a large area and long-time light irradiation are required. Further, conventionally, it takes a long time to evaluate the stabilization efficiency after evaluating the initial characteristics of the cell. Therefore, it is difficult to provide feedback for eliminating defects in the manufacturing process based on the characteristic evaluation.
【００１６】この発明は、上記のような問題点を解消す
るためになされたもので、本発明の課題は、製造した太
陽電池セルの安定化効率のデータを製造工程のオンタイ
ムで比較的簡易に得ることができ、かつセル特性の評価
に基づく製造工程への早期フィードバックを可能とする
薄膜太陽電池の製造方法と同方法に使用する処理装置を
提供することにある。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a method for stabilizing efficiency of a manufactured solar cell in a relatively simple manner in on-time of a manufacturing process. Another object of the present invention is to provide a method of manufacturing a thin-film solar cell and a processing apparatus used in the method, which can provide early feedback to a manufacturing process based on evaluation of cell characteristics.
【００１７】[0017]
【課題を解決するための手段】前述の課題を解決するた
め、この発明は、電気絶縁性可撓性基板の表面に金属電
極層，光電変換層，透明電極層の薄膜を形成する工程
と、パターニングにより複数の太陽電池セルを電気的に
接続して直列接続の太陽電池を形成する工程と、太陽電
池セルの特性検査を行う工程とを含む薄膜太陽電池の製
造方法において、前記特性検査工程の前工程として、太
陽電池の光劣化処理による効率安定化処理工程を含むこ
ととする（請求項１）。In order to solve the above-mentioned problems, the present invention provides a step of forming a thin film of a metal electrode layer, a photoelectric conversion layer, and a transparent electrode layer on a surface of an electrically insulating flexible substrate; A step of electrically connecting a plurality of solar cells by patterning to form a series-connected solar cell, and a step of performing a characteristic inspection of the solar cell, a method of manufacturing a thin-film solar cell, As a pre-process, an efficiency stabilization process by a photo-deterioration process of the solar cell is included (claim 1).
【００１８】さらに、電気絶縁性可撓性基板の裏面に接
続電極層を形成する形式の太陽電池においては、請求項
２の発明のように、電気絶縁性可撓性基板に直列接続孔
を形成する工程と、この基板の表面および裏面に第１電
極層および第３電極層を形成する工程と、基板に集電孔
を形成する工程と、第１電極層の表面上に光電変換層と
透明電極層（第２電極層）を形成し，第３電極層の表面
上に第４電極層を形成する工程と、パターニングにより
複数の太陽電池セルを電気的に接続して直列接続の太陽
電池を形成する工程と、太陽電池セルの特性検査を行う
工程とを含む薄膜太陽電池の製造方法において、前記特
性検査工程の前工程として、太陽電池の光劣化処理によ
る効率安定化処理工程を含むこととする。Further, in a solar cell in which a connection electrode layer is formed on the back surface of the electrically insulating flexible substrate, a series connection hole is formed in the electrically insulating flexible substrate. Forming a first electrode layer and a third electrode layer on the front and back surfaces of the substrate, forming current collecting holes in the substrate, and forming a photoelectric conversion layer and a transparent layer on the surface of the first electrode layer. Forming an electrode layer (second electrode layer) and forming a fourth electrode layer on the surface of the third electrode layer; and electrically connecting a plurality of solar cells by patterning to form a series-connected solar cell. Forming, and in a method of manufacturing a thin-film solar cell including a step of performing a characteristic inspection of a solar cell, including, as a step before the characteristic inspection step, an efficiency stabilization processing step by photodegradation processing of the solar cell; I do.
【００１９】従来のセル特性検査では、セルの初期特性
を評価した後、少数のサンプルを抽出して、その安定化
効率の評価を行っていたが、上記方法により、太陽電池
セルの安定化効率のデータを製造工程のオンタイムで比
較的簡易に得ることができ、かつセル特性の評価に基づ
く製造工程への早期フィードバックが可能となる。In the conventional cell characteristics inspection, after evaluating the initial characteristics of the cell, a small number of samples were extracted and the stabilization efficiency was evaluated. Can be obtained relatively easily at the on-time of the manufacturing process, and early feedback to the manufacturing process based on the evaluation of the cell characteristics becomes possible.
【００２０】また、前記請求項１または２の製造方法に
おいて、太陽電池の光劣化処理による効率安定化処理工
程のタクトタイムと、太陽電池を形成する工程までのタ
クトタイムとが略同一となるように、光照射強度と照射
時間等の光劣化処理条件を選定して光劣化処理を行う
（請求項３）ことにより、前記製造工程のオンタイムで
の安定化効率のデータ取得を可能ならしめ、後述する請
求項５のロール搬送手段共有化に関わる発明のリーズナ
ブルな実現をも可能とする。Further, in the manufacturing method of claim 1 or 2, the tact time of the efficiency stabilization process by photodegradation of the solar cell is substantially the same as the tact time until the process of forming the solar cell. In addition, light deterioration treatment conditions such as light irradiation intensity and irradiation time are selected to perform light deterioration treatment (claim 3), thereby enabling data acquisition of stabilization efficiency during on-time of the manufacturing process, It is also possible to realize a reasonable implementation of the invention relating to sharing of the roll conveying means of claim 5 described later.
【００２１】また、請求項４の発明によれば、請求項１
ないし３のいずれかの製造方法に使用する太陽電池の光
劣化効率安定化処理装置であって、薄膜太陽電池の巻出
し用ロールと、巻取り用ロールと、薄膜太陽電池に所定
の張力をかけるための搬送手段と、光劣化処理用の光照
射手段と、薄膜太陽電池の冷却手段とを備えたものとす
る。上記のように、薄膜太陽電池の他の製造工程と同様
のロール搬送を用いた構成とすることにより、光劣化効
率安定化処理装置が無理なく薄膜太陽電池の量産ライン
に組み込まれて、容易に処理が可能となる。また後述す
るように、薄膜太陽電池を冷却することにより、同一の
光照射強度の場合の安定化に要する時間が少なくてす
み、タクトタイムの短縮が可能となる。According to the invention of claim 4, according to claim 1,
A stabilizing device for photodegradation efficiency of a solar cell used in any one of the above-mentioned manufacturing methods, wherein a predetermined tension is applied to the unwinding roll, the winding roll, and the thin-film solar cell of the thin-film solar cell. , A light irradiating means for light deterioration treatment, and a cooling means for the thin-film solar cell. As described above, by adopting a configuration using the same roll conveyance as the other manufacturing processes of the thin-film solar cell, the light degradation efficiency stabilization processing device is easily incorporated into the mass-production line of the thin-film solar cell, so that it can be easily manufactured. Processing becomes possible. Further, as described later, by cooling the thin-film solar cell, the time required for stabilization at the same light irradiation intensity can be reduced, and the tact time can be reduced.
【００２２】さらに、請求項５の発明によれば、請求項
１ないし３のいずれかの製造方法に使用する処理装置で
あって、請求項４に記載の装置による光劣化効率安定化
処理の後、引き続いて、太陽電池セルの特性検査ができ
るように装置を構成し、かつ薄膜太陽電池の巻出し用ロ
ールと、巻取り用ロールと、薄膜太陽電池に所定の張力
をかけるための搬送手段とを、光劣化効率安定化処理工
程と特性検査工程とで兼用するように構成したものとす
る。光劣化工程の搬送系とこの工程の後工程であるセル
特性検査工程の搬送系とを共通とすることにより、各装
置で独立に搬送系を有するよりも装置コストを低減でき
る。According to a fifth aspect of the present invention, there is provided a processing apparatus used in the manufacturing method according to any one of the first to third aspects, wherein the light degradation efficiency stabilization processing by the apparatus according to the fourth aspect is performed. Subsequently, the apparatus is configured so that the characteristics of the solar cell can be inspected, and a roll for unwinding the thin-film solar cell, a winding roll, and a conveying means for applying a predetermined tension to the thin-film solar cell. Are used for both the light deterioration efficiency stabilization processing step and the characteristic inspection step. By using a common transport system for the photodeterioration process and a transport system for the cell characteristic inspection process which is a process subsequent to this process, the cost of the apparatus can be reduced as compared with the case where each apparatus has a transport system independently.
【００２３】[0023]
【発明の実施の形態】図面に基づき、本発明の実施の形
態について以下に述べる。Embodiments of the present invention will be described below with reference to the drawings.
【００２４】図１は請求項２の発明に関わる実施例の製
造工程のフローチャートである。製造した太陽電池の構
成は、図５に示すものと同一である。基板６１としては
膜厚３０〜５０μｍのポリイミドを用いた。プラスチッ
クフィルム基板としては、アラミド、ＰＥＮ，ＰＥＳ，
ＰＥＴなどを用いてもよい。コアに巻かれたプラスチッ
ク基板６１はロールツーロール方式パンチ装置により複
数の直径０．５〜２ｍｍの直列接続孔６８を形成する。FIG. 1 is a flowchart of a manufacturing process according to an embodiment of the present invention. The configuration of the manufactured solar cell is the same as that shown in FIG. As the substrate 61, a polyimide having a thickness of 30 to 50 μm was used. Aramid, PEN, PES,
PET or the like may be used. The plastic substrate 61 wound around the core forms a plurality of series connection holes 68 having a diameter of 0.5 to 2 mm by a roll-to-roll type punch device.
【００２５】次に、このプラスチック基板をロールツー
ロール方式電極形成装置に装着し、一面に第１電極層６
４およびその反対面に後述する第４電極層とで接続電極
層を構成する第３電極層６３を数百ｎｍ厚で形成する。
電極材料にはＡｇを用いたが、Ａｌなどの金属材料、Ｉ
ＴＯ，ＺｎＯなどの透明導電膜、およびその複合膜など
を用いてもよい。次に、ロールツーロール方式パンチ装
置により直列接続孔６８と所定の距離離れた位置に直径
０．５〜２ｍｍの集電孔６７を形成する。Next, this plastic substrate is mounted on a roll-to-roll type electrode forming apparatus, and the first electrode layer 6 is formed on one surface.
A third electrode layer 63, which forms a connection electrode layer with the fourth electrode layer and a fourth electrode layer described later, is formed to a thickness of several hundred nm on the surface 4 and the opposite surface.
Although Ag was used for the electrode material, a metal material such as Al,
A transparent conductive film such as TO or ZnO, or a composite film thereof may be used. Next, a current collecting hole 67 having a diameter of 0.5 to 2 mm is formed at a position separated from the series connection hole 68 by a predetermined distance by a roll-to-roll type punching device.
【００２６】上記のように、直列接続孔６８、第１電極
層６４および第３電極層６３、集電孔６７が形成された
プラスチック基板をステッピングロール方式薄膜形成装
置に装着し、第１電極層６４の上に、光電変換層６５、
透明電極層６６を順次積層して太陽電池部分を形成す
る。このとき、直列接続孔６８には膜が形成されないよ
うにした。さらに、ステッピングロール方式薄膜形成装
置内にて連続して光電変換層６５、透明電極層６６を順
次積層した面とは反対面の第３電極層上に第４電極層を
最終的に形成した。As described above, the plastic substrate on which the series connection holes 68, the first electrode layer 64, the third electrode layer 63, and the current collecting holes 67 are formed is mounted on a stepping roll type thin film forming apparatus, and the first electrode layer is formed. 64, a photoelectric conversion layer 65,
The solar cell portion is formed by sequentially laminating the transparent electrode layers 66. At this time, no film was formed in the series connection hole 68. Further, a fourth electrode layer was finally formed on the third electrode layer opposite to the surface on which the photoelectric conversion layer 65 and the transparent electrode layer 66 were successively laminated in the stepping roll type thin film forming apparatus.
【００２７】次に、ＹＡＧレーザにより、所定のパター
ンで太陽電池部分およびその反対面の第３，４電極層６
３の分離加工を行う。このとき、太陽電池部分を分離す
る位置と第３，４電極層６３を分離する位置をずらすこ
とにより、集電孔および直列接続孔を介して一面上で互
いに絶縁分離されている単位太陽電池が直列に接続され
る。これにより、所定の位置に所定の大きさ、本実施例
では面積４０cm×８０cmの直列接続構造セルが多数作り
込まれたロールが得られた。Next, the solar cell portion and the third and fourth electrode layers 6 on the opposite surface are formed in a predetermined pattern by a YAG laser.
3 is performed. At this time, by shifting the position where the solar cell portion is separated from the position where the third and fourth electrode layers 63 are separated, the unit solar cells that are insulated and separated from each other on one surface via the current collecting holes and the series connection holes are formed. Connected in series. As a result, a roll was obtained in which a large number of cells of a series connection structure having a predetermined size, in this example, an area of 40 cm × 80 cm were formed at predetermined positions.
【００２８】次に、セル効率の安定化工程に進んだ。用
いた装置の概略構成を図２に示す。巻出しロール３１か
ら巻出されたセル基板３２は水冷または電子冷却機構を
備えた冷却プレート３３まで送られ、そこで複数のキセ
ノンランプ３４の光を用いてセル面を一定時間照射した
後、巻取りロール３５に巻取った。本実施例では冷却プ
レート３３のサイズは６０cm×１００cmとし、セル１枚
毎に処理を行った。キセノンランプ３４は出力５kWのラ
ンプを４個使用し、光学系により集光して用いた。Next, the process proceeded to a step of stabilizing the cell efficiency. FIG. 2 shows a schematic configuration of the used apparatus. The cell substrate 32 unwound from the unwinding roll 31 is sent to a cooling plate 33 equipped with a water-cooling or electronic cooling mechanism, where the cell surface is irradiated with light from a plurality of xenon lamps 34 for a certain time, and then wound. It was wound on a roll 35. In this embodiment, the size of the cooling plate 33 is set to 60 cm × 100 cm, and the processing is performed for each cell. As the xenon lamp 34, four lamps each having an output of 5 kW were used, and were condensed by an optical system.
【００２９】集光した光強度と安定化効率に達する時間
については、図３に示す関係が得られた。標準の温度４
５℃では光照射1時間以内で安定化効率に達するには７
ｋＷ／ｍ2以上の光を照射する必要があった。セルの温
度を２５℃に下げると光照射1時間以内で安定化効率に
達するには光強度４ｋＷ／ｍ2以上の光を用いれば良
い。太陽電池を形成する工程までのタクトタイム１５分
に合わせるためには、光強度は４．５〜５．５ｋＷ／ｍ
2、光照射中のセル温度は２０℃〜３０℃とすればよ
い。この連続光照射工程後に、セル特性検査を行ってセ
ルの安定化効率を評価し、所定の特性以上の良品のみ切
り出してモジュール化を行った。The relationship shown in FIG. 3 was obtained between the intensity of the condensed light and the time to reach the stabilization efficiency. Standard temperature 4
At 5 ° C, 7 hours to reach stabilization efficiency within 1 hour of light irradiation
It was necessary to irradiate light of kW / m 2 or more. When the temperature of the cell is lowered to 25 ° C., light having a light intensity of 4 kW / m 2 or more may be used to reach the stabilization efficiency within one hour of light irradiation. The light intensity is 4.5 to 5.5 kW / m in order to match the tact time of 15 minutes before the step of forming the solar cell.
2. The cell temperature during light irradiation may be set to 20 ° C to 30 ° C. After the continuous light irradiation step, a cell characteristic test was performed to evaluate the stabilization efficiency of the cell, and only non-defective products having predetermined characteristics or more were cut out and modularized.
【００３０】また、光劣化工程の処理時間が太陽電池製
造工程のタクトタイムとほぼ同じに設定できたことか
ら、製造工程のオンタイムでの安定化効率の取得を可能
ならしめ、光劣化工程の搬送系とこの工程の後工程であ
るセル特性検査工程の搬送系とを共通にすることがリー
ズナブルに実現できた。さらに、光劣化処理を２５℃で
行っているため、途中の冷却のためのキャンロールなど
の設備も必要でなく、そのままセル特性検査に移行でき
た。Further, since the processing time of the photo-deterioration process can be set to be substantially the same as the tact time of the solar cell manufacturing process, it is possible to obtain the stabilization efficiency during the on-time of the manufacturing process. The transport system and the transport system for the cell characteristic inspection process, which is a post-process of this process, can be reasonably realized. Further, since the photodegradation treatment is performed at 25 ° C., equipment such as a can roll for cooling in the middle is not required, and the process can be directly shifted to the cell characteristic inspection.
【００３１】[0031]
【発明の効果】この発明によれば前述のように、電気絶
縁性可撓性基板の表面に金属電極層，光電変換層，透明
電極層の薄膜を形成する工程と、パターニングにより複
数の太陽電池セルを電気的に接続して直列接続の太陽電
池を形成する工程と、太陽電池セルの特性検査を行う工
程とを含む薄膜太陽電池の製造方法において、前記特性
検査工程の前工程として、太陽電池の光劣化処理による
効率安定化処理工程を含むこととしたことにより、製造
した太陽電池セルの安定化効率のデータを製造工程のオ
ンタイムで比較的簡易に得ることができ、かつセル特性
の評価に基づく製造工程への早期フィードバックができ
る。According to the present invention, as described above, a plurality of solar cells are formed by forming a thin film of a metal electrode layer, a photoelectric conversion layer, and a transparent electrode layer on the surface of an electrically insulating flexible substrate, and by patterning. In a method of manufacturing a thin-film solar cell including a step of electrically connecting cells to form a solar cell connected in series and a step of inspecting characteristics of the solar cell, a solar cell is provided as a pre-process of the characteristic inspection step. Includes an efficiency stabilization process by photodegradation process, so that data on the stabilization efficiency of manufactured solar cells can be obtained relatively easily during the on-time of the manufacturing process, and the cell characteristics are evaluated. Early feedback to the manufacturing process based on the
【図１】本発明の薄膜太陽電池の製造方法の実施例を示
すフローチャートFIG. 1 is a flowchart showing an embodiment of a method for manufacturing a thin-film solar cell according to the present invention.
【図２】本発明の光劣化処理による効率安定化処理装置
の実施例の概略構成図FIG. 2 is a schematic configuration diagram of an embodiment of an efficiency stabilization processing apparatus by light degradation processing according to the present invention.
【図３】光照射強度と安定化効率に達するまでの光照射
時間との関係図FIG. 3 is a diagram showing a relationship between light irradiation intensity and light irradiation time until the stabilization efficiency is reached.
【図４】従来の薄膜太陽電池の製造方法の一例を示すフ
ローチャートFIG. 4 is a flowchart showing an example of a conventional method for manufacturing a thin-film solar cell.
【図５】薄膜太陽電池の構成の一例を示す斜視図FIG. 5 is a perspective view showing an example of a configuration of a thin-film solar cell.
【図６】薄膜太陽電池の製造工程の一例を示す図FIG. 6 is a diagram showing an example of a manufacturing process of a thin-film solar cell.
３１：巻出しロール、３２：セル基板、３３：冷却プレ
ート、３４：キセノンランプ、３５：巻取りロール。31: unwinding roll, 32: cell substrate, 33: cooling plate, 34: xenon lamp, 35: winding roll.
Claims (5)
層，光電変換層，透明電極層の薄膜を形成する工程と、
パターニングにより複数の太陽電池セルを電気的に接続
して直列接続の太陽電池を形成する工程と、太陽電池セ
ルの特性検査を行う工程とを含む薄膜太陽電池の製造方
法において、前記特性検査工程の前工程として、太陽電
池の光劣化処理による効率安定化処理工程を含むことを
特徴とする薄膜太陽電池の製造方法。Forming a thin film of a metal electrode layer, a photoelectric conversion layer, and a transparent electrode layer on a surface of an electrically insulating flexible substrate;
A step of electrically connecting a plurality of solar cells by patterning to form a series-connected solar cell, and a step of performing a characteristic inspection of the solar cell, a method of manufacturing a thin-film solar cell, A method for manufacturing a thin-film solar cell, comprising a step of stabilizing the efficiency of the solar cell by light degradation processing as a pre-process.
成する工程と、この基板の表面および裏面に第１電極層
および第３電極層を形成する工程と、基板に集電孔を形
成する工程と、第１電極層の表面上に光電変換層と透明
電極層（第２電極層）を形成し，第３電極層の表面上に
第４電極層を形成する工程と、パターニングにより複数
の太陽電池セルを電気的に接続して直列接続の太陽電池
を形成する工程と、太陽電池セルの特性検査を行う工程
とを含む薄膜太陽電池の製造方法において、前記特性検
査工程の前工程として、太陽電池の光劣化処理による効
率安定化処理工程を含むことを特徴とする薄膜太陽電池
の製造方法。2. A step of forming a series connection hole in an electrically insulating flexible substrate, a step of forming a first electrode layer and a third electrode layer on a front surface and a rear surface of the substrate, and forming a current collection hole in the substrate. Forming, forming a photoelectric conversion layer and a transparent electrode layer (second electrode layer) on the surface of the first electrode layer, and forming a fourth electrode layer on the surface of the third electrode layer; A method of electrically connecting a plurality of solar cells to form a series-connected solar cell, and a step of performing a characteristic inspection of the solar cell; A process for stabilizing the efficiency of the solar cell by light degradation treatment.
いて、太陽電池の光劣化処理による効率安定化処理工程
のタクトタイムと、太陽電池を形成する工程までのタク
トタイムとが略同一となるように、光照射強度と照射時
間等の光劣化処理条件を選定して光劣化処理を行うこと
を特徴とする薄膜太陽電池の製造方法。3. The manufacturing method according to claim 1, wherein the tact time of the efficiency stabilization process by photodegradation of the solar cell is substantially the same as the tact time up to the step of forming the solar cell. A method for manufacturing a thin-film solar cell, comprising performing light deterioration treatment by selecting light deterioration treatment conditions such as light irradiation intensity and irradiation time.
に使用する太陽電池の光劣化効率安定化処理装置であっ
て、薄膜太陽電池の巻出し用ロールと、巻取り用ロール
と、薄膜太陽電池に所定の張力をかけるための搬送手段
と、光劣化処理用の光照射手段と、薄膜太陽電池の冷却
手段とを備えたことを特徴とする太陽電池の光劣化効率
安定化処理装置。4. An apparatus for stabilizing light degradation efficiency of a solar cell used in the method according to claim 1, wherein the unwinding roll, the winding roll, and the thin film of the thin-film solar cell are provided. An apparatus for stabilizing light degradation efficiency of a solar cell, comprising: transport means for applying a predetermined tension to the solar cell; light irradiation means for light degradation processing; and cooling means for the thin-film solar cell.
に使用する処理装置であって、請求項４に記載の装置に
よる光劣化効率安定化処理の後、引き続いて、太陽電池
セルの特性検査ができるように装置を構成し、かつ薄膜
太陽電池の巻出し用ロールと、巻取り用ロールと、薄膜
太陽電池に所定の張力をかけるための搬送手段とを、光
劣化効率安定化処理工程と特性検査工程とで兼用するよ
うに構成したことを特徴とする薄膜太陽電池の製造方法
に使用する処理装置。5. A processing apparatus used in the manufacturing method according to any one of claims 1 to 3, wherein after the light degradation efficiency stabilization processing by the apparatus according to claim 4, the characteristics of the solar cell are continuously obtained. The apparatus is configured so that inspection can be performed, and a roll for unwinding the thin-film solar cell, a roll for winding, and a conveying means for applying a predetermined tension to the thin-film solar cell are formed in a light degradation efficiency stabilization process. And a characteristic inspection step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24847799A JP4000501B2 (en) | 1999-09-02 | 1999-09-02 | Thin film solar cell manufacturing method and processing apparatus used in the same method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24847799A JP4000501B2 (en) | 1999-09-02 | 1999-09-02 | Thin film solar cell manufacturing method and processing apparatus used in the same method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001077384A true JP2001077384A (en) | 2001-03-23 |
| JP4000501B2 JP4000501B2 (en) | 2007-10-31 |
Family
ID=17178742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24847799A Expired - Fee Related JP4000501B2 (en) | 1999-09-02 | 1999-09-02 | Thin film solar cell manufacturing method and processing apparatus used in the same method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4000501B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005243962A (en) * | 2004-02-26 | 2005-09-08 | Mitsubishi Heavy Ind Ltd | Characteristic evaluation method for solar cell modules |
| US8479463B2 (en) | 2008-07-09 | 2013-07-09 | Skyfuel, Inc. | Solar collectors having slidably removable reflective panels for use in solar thermal applications |
| KR20140034248A (en) * | 2011-06-28 | 2014-03-19 | 쌩-고벵 글래스 프랑스 | Method for quickly stabilizing the nominal output of a thin-film solar module |
| US8739492B2 (en) | 2008-07-09 | 2014-06-03 | Skyfuel, Inc. | Space frame connector |
| KR101462107B1 (en) | 2013-06-10 | 2014-11-20 | 주식회사 맥사이언스 | Light Soaking Apparatus of Solar Cell Module |
| US8904774B2 (en) | 2008-08-22 | 2014-12-09 | Skyfuel, Inc. | Hydraulic-based rotational system for solar concentrators that resists high wind loads without a mechanical lock |
| CN113594294A (en) * | 2021-07-22 | 2021-11-02 | 中国建材国际工程集团有限公司 | Device for cooling solar thin film cell |
-
1999
- 1999-09-02 JP JP24847799A patent/JP4000501B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005243962A (en) * | 2004-02-26 | 2005-09-08 | Mitsubishi Heavy Ind Ltd | Characteristic evaluation method for solar cell modules |
| US8479463B2 (en) | 2008-07-09 | 2013-07-09 | Skyfuel, Inc. | Solar collectors having slidably removable reflective panels for use in solar thermal applications |
| US8739492B2 (en) | 2008-07-09 | 2014-06-03 | Skyfuel, Inc. | Space frame connector |
| US8850755B2 (en) | 2008-07-09 | 2014-10-07 | Skyfuel, Inc. | Solar collectors having slidably removable reflective panels for use in solar thermal applications |
| US8904774B2 (en) | 2008-08-22 | 2014-12-09 | Skyfuel, Inc. | Hydraulic-based rotational system for solar concentrators that resists high wind loads without a mechanical lock |
| KR20140034248A (en) * | 2011-06-28 | 2014-03-19 | 쌩-고벵 글래스 프랑스 | Method for quickly stabilizing the nominal output of a thin-film solar module |
| KR101581524B1 (en) * | 2011-06-28 | 2015-12-30 | 쌩-고벵 글래스 프랑스 | Method for quickly stabilizing the nominal output of a thin-film solar module |
| KR101462107B1 (en) | 2013-06-10 | 2014-11-20 | 주식회사 맥사이언스 | Light Soaking Apparatus of Solar Cell Module |
| CN113594294A (en) * | 2021-07-22 | 2021-11-02 | 中国建材国际工程集团有限公司 | Device for cooling solar thin film cell |
| CN113594294B (en) * | 2021-07-22 | 2023-12-29 | 中国建材国际工程集团有限公司 | Device for cooling solar thin film battery |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4000501B2 (en) | 2007-10-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6720576B1 (en) | Plasma processing method and photoelectric conversion device | |
| US5281541A (en) | Method for repairing an electrically short-circuited semiconductor device, and process for producing a semiconductor device utilizing said method | |
| US5821597A (en) | Photoelectric conversion device | |
| Bogachuk et al. | Perovskite photovoltaic devices with carbon‐based electrodes withstanding reverse‐bias voltages up to–9 V and surpassing IEC 61215: 2016 international standard | |
| CN102144300B (en) | Fabrication method for a solar cell | |
| JP3618865B2 (en) | Photovoltaic element characteristic inspection apparatus and manufacturing method | |
| JPS63232376A (en) | Manufacture of photovoltaic device | |
| WO2004064167A1 (en) | Transparent thin-film solar cell module and its manufacturing method | |
| EP2184789A1 (en) | Method and apparatus for manufacturing thin film photoelectric conversion module | |
| JP2004111464A (en) | Solar cell string manufacturing apparatus and solar cell module manufacturing method | |
| JP4000501B2 (en) | Thin film solar cell manufacturing method and processing apparatus used in the same method | |
| JP2005197432A (en) | Method for measuring solar cell characteristics | |
| JP2001266654A (en) | Transparent electrode and its patterning method and method of manufacturing semiconductor element using the same | |
| US20150122789A1 (en) | Electrical bias methods and apparatus for photovoltaic device manufacture | |
| US9245810B2 (en) | Electrical and opto-electrical characterization of large-area semiconductor devices | |
| JPH06204529A (en) | Solar cell | |
| EP2807680A2 (en) | Method and apparatus for photovoltaic device manufacture | |
| JP4221479B2 (en) | Method for manufacturing thin film solar cell module | |
| US20130000720A1 (en) | Thin-film photovoltaic cell and method for manufacturing same | |
| JP2001168355A (en) | Defect repair method of thin film photoelectric conversion module and manufacturing method thereof | |
| JP2013229427A (en) | Method for manufacturing thin-film solar cell | |
| JP2000208794A (en) | Method of laser patterning pattern-shaped thin film of thin-film solar cell or the like | |
| JP4727155B2 (en) | Method for evaluating characteristics of solar cell module | |
| JP2001237442A (en) | Solar cell and its manufacturing method | |
| KR20120057127A (en) | Laser apparatus and method for manufacturing a solar cell module including the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040217 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070426 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070618 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070719 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070801 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100824 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100824 Year of fee payment: 3 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100824 Year of fee payment: 3 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110824 Year of fee payment: 4 |
|
| LAPS | Cancellation because of no payment of annual fees |