JP2001034998A - Optical head and its manufacture - Google Patents
Optical head and its manufactureInfo
- Publication number
- JP2001034998A JP2001034998A JP11210545A JP21054599A JP2001034998A JP 2001034998 A JP2001034998 A JP 2001034998A JP 11210545 A JP11210545 A JP 11210545A JP 21054599 A JP21054599 A JP 21054599A JP 2001034998 A JP2001034998 A JP 2001034998A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- optical head
- lens barrel
- fixed
- solid immersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光ヘッド及びその
製造方法、特に、高分解能顕微鏡や高密度光メモリ（記
録／再生）に用いられる光ヘッド及びその製造方法に関
する。The present invention relates to an optical head and a method of manufacturing the same, and more particularly, to an optical head used for a high-resolution microscope and a high-density optical memory (recording / reproducing) and a method of manufacturing the same.
【０００２】[0002]
【発明の背景】近年、光学的に情報を記録／再生する光
メモリの分野においては、コンピュータの高速化やマル
チメディアの発達に伴い、より大容量の情報を記録でき
る、即ち、記録密度の著しく向上した光ヘッドが望ま
れ、集光レンズの開口数ＮＡを大きくする対策が検討さ
れている。2. Description of the Related Art In recent years, in the field of optical memories for optically recording / reproducing information, a larger amount of information can be recorded, that is, a recording density is remarkably improved with the speeding up of computers and the development of multimedia. Therefore, measures for increasing the numerical aperture NA of the condenser lens are being studied.
【０００３】その対策の一つとして、Solid Immersion
Lens（固浸レンズ）を用いて光の波長以下のサイズの
微小スポットを形成し、光ヘッドと記録媒体との間隔を
数１０ｎｍまで近づけて記録／読取りを行うことで、光
の回折限界を超えて２００ｎｍ以下の小さなマークを信
号として書き込み、読み取ることが提案されている。As one of the measures, Solid Immersion
Using a lens (solid immersion lens) to form a minute spot with a size smaller than the wavelength of light, recording / reading with the distance between the optical head and the recording medium close to several tens of nanometers, exceeding the diffraction limit of light It is proposed to write and read a small mark of 200 nm or less as a signal.
【０００４】[0004]
【従来の技術と課題】ところで、固浸レンズを用いた従
来の光ヘッドにおいては、図２に示すように、鏡胴１内
に集光レンズ５及び固浸レンズ６をそれぞれ環状の段部
２，３で保持することが考えられていた。この構造で
は、集光レンズ５の取り付け精度はそれほど問題がない
のに対して、固浸レンズ６にあっては、その出射端面６
ａと鏡胴１の段部３への当たり面６ｂとの距離及び平行
度を極めて高精度に加工する必要があり、また、鏡胴１
と固浸レンズ６とにギャップが生じてレンズ６が偏心す
ると大きな収差を生じることから、レンズ６を極めて精
度よく取り付ける必要があり、量産化に大きな障害とな
っていた。2. Description of the Related Art In a conventional optical head using a solid immersion lens, as shown in FIG. 2, a condenser lens 5 and a solid immersion lens 6 are provided in a lens barrel 1 in an annular stepped portion 2 respectively. , 3. With this structure, the mounting accuracy of the condenser lens 5 is not so problematic, whereas the solid immersion lens 6 has its exit end face 6
a and the parallelism between the contact surface 6b of the lens barrel 1 and the stepped portion 3 need to be processed with extremely high precision.
If the lens 6 is decentered due to a gap formed between the lens 6 and the solid immersion lens 6, a large aberration is generated. Therefore, it is necessary to attach the lens 6 with extremely high accuracy, which is a major obstacle to mass production.
【０００５】さらに、集光レンズ５と固浸レンズ６との
間隔は、固浸レンズの半径に応じて最適な値に調整しな
ければならず、固浸レンズ６の半径にはどうしても個体
差が発生するため、個体差に合わせて端面６ａ及び当た
り面６ｂの加工条件を変更しなければならず、加工が煩
雑であった。Further, the distance between the condenser lens 5 and the solid immersion lens 6 must be adjusted to an optimum value according to the radius of the solid immersion lens. Therefore, the processing conditions of the end face 6a and the contact face 6b must be changed according to the individual difference, and the processing is complicated.
【０００６】そこで、本発明の目的は、レンズの鏡胴と
の当たり面の加工を不要とし、偏心することなく鏡胴へ
取り付けることができ、量産化が可能な光ヘッドを提供
することにある。SUMMARY OF THE INVENTION It is an object of the present invention to provide an optical head which can be mounted on a lens barrel without eccentricity without requiring machining of a contact surface of the lens with the lens barrel, and which can be mass-produced. .
【０００７】本発明の他の目的は、前記目的に加えて、
レンズの半径に個体差があっても集光レンズとの間隔が
最適となるように自動的に調整される光ヘッドを提供す
ることにある。Another object of the present invention is to provide, in addition to the above objects,
An object of the present invention is to provide an optical head that is automatically adjusted so that the distance between the lens and the condenser lens is optimal even if there is an individual difference in the radius of the lens.
【０００８】本発明のさらに他の目的は、集光レンズの
焦点位置のずれに対して容易に対応できる光ヘッドの製
造方法を提供することにある。It is still another object of the present invention to provide a method of manufacturing an optical head which can easily cope with a shift in the focal position of a condenser lens.
【０００９】[0009]
【発明の構成、作用及び効果】以上の目的を達成するた
め、本発明に係る光ヘッドは、入射した光束を無収差に
集光する第１のレンズと、この第１のレンズから出射さ
れた光束を球面部で屈折させて端面に集光する超半球形
状の第２のレンズと、前記第１及び第２のレンズを保持
する鏡胴とを備え、この鏡胴は円錐形状の内面を有し、
前記第２のレンズはその球面部が円錐形状をなす内面に
接した状態で固定されている。In order to achieve the above objects, an optical head according to the present invention comprises a first lens for converging an incident light beam without aberration, and a light beam emitted from the first lens. A second lens having a super-hemispherical shape for refracting a light beam by a spherical portion and condensing the light on an end face; and a lens barrel for holding the first and second lenses, the lens barrel having a conical inner surface. And
The second lens is fixed with its spherical portion in contact with the conical inner surface.
【００１０】以上の構成からなる光ヘッドにおいて、超
半球形状の第２のレンズは鏡胴の円錐形状をなす内面で
固定される。従って、第２のレンズにはことさら鏡胴と
の当たり面を形成する必要がなく、偏心も抑えられる。In the optical head having the above-described configuration, the super hemispherical second lens is fixed on the conical inner surface of the lens barrel. Therefore, it is not necessary to form a contact surface with the lens barrel, and the eccentricity can be suppressed.
【００１１】特に、鏡胴の内面は第１のレンズの焦点位
置に頂点を有する円錐面であって、以下の式を満足する
ことが好ましい。In particular, the inner surface of the lens barrel is a conical surface having a vertex at the focal position of the first lens, and preferably satisfies the following expression.
【００１２】ｓｉｎθ＝１／ｎ θ：円錐面と光軸とがなす角度 ｎ：第２のレンズの屈折率Sin θ = 1 / n θ: angle between the conical surface and the optical axis n: refractive index of the second lens
【００１３】前記式を満足することによって、第２のレ
ンズの球面部の半径に個体差が生じていたとしても、第
１及び第２のレンズとの間隔が最適となるように自動的
に調整され、組立て工程を簡略化することができる。By satisfying the above expression, even if there is an individual difference in the radius of the spherical portion of the second lens, the distance between the first and second lenses is automatically adjusted so as to be optimal. Thus, the assembly process can be simplified.
【００１４】また、本発明に係る光ヘッドの製造方法
は、前記第２のレンズをほぼ全球形状の状態で前記鏡胴
の内面に固定し、その出射端面を第２のレンズの集光点
に位置するように加工する。Further, in the method of manufacturing an optical head according to the present invention, the second lens is fixed to the inner surface of the lens barrel in a substantially spherical state, and the light-emitting end face is set to the condensing point of the second lens. Process so that it is located.
【００１５】このような製造方法においては、第２のレ
ンズの出射端面を該レンズを鏡胴に固定／保持した状態
で加工（研削ないし研摩）するため、第１レンズの焦点
位置がずれていても、焦点位置を確認しながら加工すれ
ば、出射端面を最適な位置に設定できる。In such a manufacturing method, since the exit end face of the second lens is processed (ground or polished) with the lens fixed / held on the lens barrel, the focal position of the first lens is shifted. However, if processing is performed while checking the focal position, the emission end face can be set to an optimal position.
【００１６】[0016]
【発明の実施の形態】以下、本発明に係る光ヘッド及び
その製造方法の実施形態について、添付図面を参照して
説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an optical head and a method for manufacturing the same according to the present invention will be described below with reference to the accompanying drawings.
【００１７】図１において、本発明の一実施形態である
光ヘッド１０は、集光レンズ１１と、固浸レンズ１２と
を鏡胴１５の内面１５ａに固定したもので、さらに図示
しないレーザ光源ユニット及び記録媒体との間隔を一定
の微小な間隔に保持する浮上手段を備えている。In FIG. 1, an optical head 10 according to an embodiment of the present invention has a condenser lens 11 and a solid immersion lens 12 fixed to an inner surface 15a of a lens barrel 15, and further includes a laser light source unit (not shown). And a levitation means for maintaining the distance from the recording medium at a fixed minute distance.
【００１８】固浸レンズ１２は、高屈折率物質からなる
周知のもので、光の入射面である超半球形状をなす球面
部１２ａと出射面である端面１２ｂとからなる。鏡胴１
５はその内面１５ａが円錐形状とされ、該内面１５ａに
集光レンズ１１及び固浸レンズ１２が固定されている。
特に、固浸レンズ１２はその球面部１２ａが円錐形状を
なす内面１５ａに接した状態で固定されている。集光レ
ンズ１１は無収差で焦点位置Ｐにレーザ光Ｌを集光させ
る。The solid immersion lens 12 is a well-known one made of a material having a high refractive index, and includes a spherical portion 12a having a super hemispherical shape as a light incidence surface and an end surface 12b as an emission surface. Lens barrel 1
5 has a conical inner surface 15a, and the condenser lens 11 and the solid immersion lens 12 are fixed to the inner surface 15a.
In particular, the solid immersion lens 12 is fixed with its spherical portion 12a in contact with an inner surface 15a having a conical shape. The condenser lens 11 condenses the laser beam L at the focal position P without aberration.
【００１９】即ち、レーザ光源ユニットから放射された
レーザ光Ｌは集光レンズ１１でその焦点位置Ｐに集光す
る状態で固浸レンズ１２に入射する。この入射レーザ光
は球面部１２ａで屈折され、屈折されたレーザ光は端面
１２ｂ上の集光点Ｆに無収差で集光する。そして、この
集光点Ｆから近接場光が浸み出る。近接場領域はレーザ
光Ｌの波長λの１／４以下であり、固浸レンズ１２は記
録媒体に対してこの近接場領域に浮上し、記録／再生を
行う。That is, the laser light L emitted from the laser light source unit is incident on the solid immersion lens 12 while being focused on the focal point P by the condenser lens 11. The incident laser light is refracted by the spherical portion 12a, and the refracted laser light is condensed at the converging point F on the end face 12b without aberration. Then, near-field light oozes out from the converging point F. The near-field region is equal to or less than ４ of the wavelength λ of the laser beam L, and the solid immersion lens 12 floats in the near-field region with respect to the recording medium to perform recording / reproduction.
【００２０】具体的には、固浸レンズ１２の屈折率を
ｎ、半径をｒとすると、無収差の集光レンズ１１の焦点
位置Ｐからｎｒの位置に、球面部１２ａの中心Ｏを配置
すると、球中心Ｏからｒ／ｎ離れた点Ｆにレーザ光が無
収差で集光する。Specifically, assuming that the refractive index of the solid immersion lens 12 is n and the radius is r, the center O of the spherical portion 12a is located nr from the focal point P of the aberration-free condenser lens 11. The laser beam is focused at a point F, which is r / n away from the center O of the sphere, with no aberration.
【００２１】そこで、鏡胴１５の内面１５ａを円錐形状
とし、その円錐の頂点を集光レンズ１１の焦点位置Ｐと
一致させる。このとき、円錐面と光軸Ｃとがなす角度を
θとし、ｓｉｎθ＝１／ｎとなるように設定すると、固
浸レンズ１２の球面部１２ａの半径ｒがｒ’に変化して
も、球中心Ｏから焦点位置Ｐまでの距離は、自動的にｎ
ｒ’となり、ｒ’／ｎの位置にレーザ光が無収差で集光
する。Therefore, the inner surface 15 a of the lens barrel 15 is formed in a conical shape, and the vertex of the cone is made to coincide with the focal position P of the condenser lens 11. At this time, if the angle formed between the conical surface and the optical axis C is set to θ and sin θ = 1 / n is set, even if the radius r of the spherical portion 12a of the solid immersion lens 12 changes to r ′, The distance from the center O to the focal position P is automatically n
r ′, and the laser beam is focused at the position of r ′ / n without aberration.
【００２２】例えば、半径ｒの小さな固浸レンズにあっ
ては、その集光点Ｆを集光レンズ１１から遠ざける必要
があるが、本実施形態では内面１５ａに沿って自動的に
遠ざかった位置に保持される。即ち、半径ｒに個体差が
生じても、球面部１２ａを円錐面１５ａに接した状態で
固定すれば個体差が自動的に調整されることになる。For example, in the case of a solid immersion lens having a small radius r, it is necessary to keep the focal point F away from the condenser lens 11, but in this embodiment, the focal point F is automatically moved away along the inner surface 15a. Will be retained. That is, even if there is an individual difference in the radius r, the individual difference is automatically adjusted by fixing the spherical portion 12a in contact with the conical surface 15a.
【００２３】ここで、超半球形状の固浸レンズ１２にお
いて、光束が集光点Ｆに無収差で集光する理由について
説明する。Here, the reason why the light beam is condensed on the converging point F with no aberration in the super hemispherical solid immersion lens 12 will be described.
【００２４】球中心Ｏからｎｒ離れた点Ｐに入射する光
線Ｌ1と該光線Ｌ1の球面部１２ａへの入射点Ｒでの法線
とがなす角度ψは、The angle ψ formed by a light ray L 1 incident on a point P nr away from the center O of the sphere and a normal line of the light ray L 1 at an incident point R on the spherical portion 12a is
【００２５】ｒ・ｓｉｎψ＝ｎｒ・ｓｉｎθ であり、光線Ｌ1が球面部１２ａで屈折することによ
り、 ｓｉｎψ＝ｎ・ｓｉｎψ’ となる。従って、 ｓｉｎψ’＝ｓｉｎθ であり、ψ’＝θであるので、三角形ＯＦＲと三角形Ｏ
ＲＰは相似形であり、R ・ sinψ = nr ・ sin θ, and the ray L 1 is refracted by the spherical portion 12a, so that sinψ = n ・ sinψ ′. Therefore, sinψ ′ = sin θ and ψ ′ = θ, so that the triangle OFR and the triangle O
RP is similar,
【００２６】ＯＲ／ｒ＝ｒ／ｎｒ となり、焦点位置Ｐへの入射角度θに拘わらず、球中心
Ｏからｎ／ｒ離れた点Ｆに全ての光線が集光することに
なる。OR / r = r / nr, and all rays are converged at a point F n / r away from the center O of the sphere, regardless of the angle of incidence θ on the focal position P.
【００２７】因みに、このとき、 ｒ・ｓｉｎψ’＝（ｒ／ｎ）・ｓｉｎψθ’ であるから、 Incidentally, at this time, since r · sinψ ′ = (r / n) · sinψθ ′,
【００２８】となり、従って、 ｓｉｎθ’＝ｎ・ｓｉｎθ となる。Therefore, sin θ ′ = n · sin θ.
【００２９】ここで、固浸レンズ１２があるときの開口
数をＮＡ’、ないときの開口数をＮＡとすると、Here, assuming that the numerical aperture with the solid immersion lens 12 is NA ′ and the numerical aperture without the solid immersion lens 12 is NA,
【００３０】 となり、開口数はｎ2倍になる。[0030] And the numerical aperture becomes n 2 times.
【００３１】次に、前記光ヘッド１０の製造方法につい
て説明する。前記固浸レンズ１２は端面１２ｂが加工さ
れていない全球状態で鏡胴１５の内面１５ａの先端部に
固定される。固定は適宜接着剤を塗布することで行われ
る。また、鏡胴１５には集光レンズ１１も固定されてい
る。集光レンズ１１の固定方法は任意である。Next, a method for manufacturing the optical head 10 will be described. The solid immersion lens 12 is fixed to the distal end of the inner surface 15a of the lens barrel 15 in a global state in which the end surface 12b is not processed. The fixing is performed by appropriately applying an adhesive. The condenser lens 11 is also fixed to the lens barrel 15. The method of fixing the condenser lens 11 is arbitrary.
【００３２】次に、固浸レンズ１２の突出部分を研削、
研摩して端面１２ｂを形成する。レンズ１２が半球形状
であれば、端面の加工は球中心Ｏに対して行えばよく、
鏡胴とは独立して端面加工を行えばよい。しかし、超半
球形状のレンズにあっては、集光レンズ１１の焦点位置
Ｐによって端面１２ｂの位置が異なってくるため、集光
レンズ１１と固浸レンズ１２を鏡胴１５に対して一体的
に組み立ててから、焦点位置Ｐを確認しつつ端面１２ｂ
を加工する。Next, the protruding portion of the solid immersion lens 12 is ground,
The end face 12b is formed by polishing. If the lens 12 has a hemispherical shape, the end face may be processed with respect to the spherical center O,
The end face may be processed independently of the lens barrel. However, in the case of a super hemispherical lens, since the position of the end face 12b differs depending on the focal position P of the condenser lens 11, the condenser lens 11 and the solid immersion lens 12 are integrated with the lens barrel 15. After assembling, while confirming the focal position P, the end face 12b
To process.
【００３３】このような加工方法によれば、焦点位置Ｐ
が多少ずれていても、出射端面１２ｂを最適な位置に設
定できる。According to such a processing method, the focal position P
Can be set at an optimum position even if the position is slightly shifted.
【００３４】（他の実施形態）なお、本発明に係る光ヘ
ッド及びその製造方法は前記実施形態に限定するもので
はなく、その要旨の範囲内で種々に変更することができ
る。(Other Embodiments) The optical head and the method of manufacturing the same according to the present invention are not limited to the above embodiments, but can be variously modified within the scope of the invention.
【００３５】特に、本発明は、必ずしも近接場光を用い
るシステムのみならず、それ以外の光学システムに使用
することが可能である。In particular, the present invention can be used not only for a system using near-field light but also for other optical systems.
【図１】本発明に係る光ヘッドの一実施形態の要部を示
す断面図。FIG. 1 is a sectional view showing a main part of an embodiment of an optical head according to the present invention.
【図２】従来の光ヘッドの要部を示す断面図。FIG. 2 is a sectional view showing a main part of a conventional optical head.
１０…光ヘッド １１…集光レンズ １２…固浸レンズ １２ａ…球面部 １２ｂ…端面 １５…鏡胴 １５ａ…内面（円錐面） DESCRIPTION OF SYMBOLS 10 ... Optical head 11 ... Condensing lens 12 ... Solid immersion lens 12a ... Spherical part 12b ... End surface 15 ... Lens barrel 15a ... Inner surface (conical surface)
Claims (3)
レンズと、 前記第１のレンズから出射された光束を球面部で屈折さ
せて端面に集光する超半球形状の第２のレンズと、 前記第１及び第２のレンズを保持する鏡胴と、を備え、 前記鏡胴は円錐形状の内面を有し、前記第２のレンズは
その球面部が円錐形状をなす内面に接した状態で固定さ
れていること、 を特徴とする光ヘッド。1. A first lens that converges an incident light beam with no aberration, and a second semi-hemispherical shape that refracts a light beam emitted from the first lens by a spherical portion and condenses it on an end face. A lens, and a lens barrel for holding the first and second lenses, wherein the lens barrel has a conical inner surface, and the second lens is in contact with an inner surface whose spherical portion has a conical shape. An optical head, wherein the optical head is fixed in a state where the optical head is fixed.
点位置に頂点を有する円錐面であって、以下の式を満足
すること、 ｓｉｎθ＝１／ｎ θ：円錐面と光軸とがなす角度 ｎ：第２のレンズの屈折率 を特徴とする請求項１記載の光ヘッド。2. The inner surface of the lens barrel is a conical surface having a vertex at the focal position of the first lens, and satisfies the following expression: sin θ = 1 / n θ: conical surface and optical axis The optical head according to claim 1, wherein an angle formed by n is a refractive index of the second lens.
製造方法であって、 前記第２のレンズをほぼ全球形状の状態で前記鏡胴の内
面に固定し、その出射端面を第２のレンズの集光点に位
置するように加工すること、 を特徴とする光ヘッドの製造方法。3. The method for manufacturing an optical head according to claim 1, wherein the second lens is fixed to an inner surface of the lens barrel in a substantially spherical state, and an emission end face of the second lens is fixed to a second lens. Processing the optical head so as to be located at the focal point of the lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11210545A JP2001034998A (en) | 1999-07-26 | 1999-07-26 | Optical head and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11210545A JP2001034998A (en) | 1999-07-26 | 1999-07-26 | Optical head and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001034998A true JP2001034998A (en) | 2001-02-09 |
Family
ID=16591121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11210545A Pending JP2001034998A (en) | 1999-07-26 | 1999-07-26 | Optical head and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001034998A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003021772A (en) * | 2001-07-06 | 2003-01-24 | Olympus Optical Co Ltd | Machining device and machining method for lens barrel |
| WO2005043210A1 (en) * | 2003-10-31 | 2005-05-12 | Hamamatsu Photonics K.K. | Solid immersion lens holder |
| WO2006077834A1 (en) * | 2005-01-19 | 2006-07-27 | Hamamatsu Photonics K.K. | Objective lens holder |
| US7110172B2 (en) | 2004-02-27 | 2006-09-19 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| US7312921B2 (en) | 2004-02-27 | 2007-12-25 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| US7492529B2 (en) | 2002-01-16 | 2009-02-17 | Dcg Systems, Inc. | Bi-convex solid immersion lens |
| US7639025B2 (en) | 2002-04-10 | 2009-12-29 | Dcg Systems, Inc. | Collection optics integrating an objective and a SIL |
| US10133051B2 (en) | 2014-03-11 | 2018-11-20 | Fei Efa, Inc. | Self correcting floating SIL tip |
-
1999
- 1999-07-26 JP JP11210545A patent/JP2001034998A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003021772A (en) * | 2001-07-06 | 2003-01-24 | Olympus Optical Co Ltd | Machining device and machining method for lens barrel |
| US7492529B2 (en) | 2002-01-16 | 2009-02-17 | Dcg Systems, Inc. | Bi-convex solid immersion lens |
| US7639025B2 (en) | 2002-04-10 | 2009-12-29 | Dcg Systems, Inc. | Collection optics integrating an objective and a SIL |
| WO2005043210A1 (en) * | 2003-10-31 | 2005-05-12 | Hamamatsu Photonics K.K. | Solid immersion lens holder |
| KR101117831B1 (en) | 2003-10-31 | 2012-03-19 | 하마마츠 포토닉스 가부시키가이샤 | Solid immersion lens holder |
| CN100380153C (en) * | 2003-10-31 | 2008-04-09 | 浜松光子学株式会社 | Solid immersion lens holder |
| US7576928B2 (en) | 2003-10-31 | 2009-08-18 | Hamamatsu Photonics K.K. | Solid immersion lens holder |
| US7110172B2 (en) | 2004-02-27 | 2006-09-19 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| US7576910B2 (en) | 2004-02-27 | 2009-08-18 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| US7312921B2 (en) | 2004-02-27 | 2007-12-25 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| US7414800B2 (en) | 2005-01-19 | 2008-08-19 | Hamamatsu Photonics K.K. | Solid immersion lens holder |
| WO2006077834A1 (en) * | 2005-01-19 | 2006-07-27 | Hamamatsu Photonics K.K. | Objective lens holder |
| US10133051B2 (en) | 2014-03-11 | 2018-11-20 | Fei Efa, Inc. | Self correcting floating SIL tip |
| US10718933B2 (en) | 2014-03-11 | 2020-07-21 | Fei Efa, Inc. | Self correcting floating SIL tip |
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