JP2001027664A - Magnetic sensor - Google Patents
Magnetic sensorInfo
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- JP2001027664A JP2001027664A JP11200981A JP20098199A JP2001027664A JP 2001027664 A JP2001027664 A JP 2001027664A JP 11200981 A JP11200981 A JP 11200981A JP 20098199 A JP20098199 A JP 20098199A JP 2001027664 A JP2001027664 A JP 2001027664A
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、地磁気レベル以上
の高感度高精度検出用の磁気センサの小型化と、特性の
安定化の手段に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to means for miniaturizing a magnetic sensor for high-sensitivity and high-accuracy detection at a level equal to or higher than a terrestrial magnetism and stabilizing characteristics.
【０００２】[0002]
【従来の技術】一般に磁性膜は、以下の（イ）及び
（ロ）の性質を持っている。2. Description of the Related Art Generally, a magnetic film has the following properties (a) and (b).
【０００３】（イ）１ＭＨｚ以上の高周波での電流の表
皮深さが数ミクロン程度になる。そのため、数ミクロン
程度の磁性体薄膜のインピーダンスは電流の表皮深さの
影響を大きく受ける。(A) The skin depth of a current at a high frequency of 1 MHz or more becomes about several microns. Therefore, the impedance of the magnetic thin film of about several microns is greatly affected by the skin depth of the current.
【０００４】（ロ）１軸異方性を持たせた磁性体薄膜の
磁化容易軸の透磁率は、磁化困難軸への印加磁場により
急峻に変化する。表皮深さδは、下記数１式に示される
ように、抵抗率ρ、角周波数ω、透磁率μにより決定さ
れる。(B) The magnetic permeability of the axis of easy magnetization of a magnetic thin film having uniaxial anisotropy changes sharply by a magnetic field applied to the axis of hard magnetization. The skin depth δ is determined by the resistivity ρ, the angular frequency ω, and the magnetic permeability μ, as shown in Expression 1 below.
【０００５】[0005]
【数１】 (Equation 1)
【０００６】そのため、上記（ロ）の性質により、表皮
深さは磁化困難軸方向の磁場により急峻に変動し、上記
（イ）の性質により磁化困難軸方向のインピーダンスは
磁化困難軸方向の磁場により急峻に変化する。Therefore, due to the property (b), the skin depth fluctuates sharply due to the magnetic field in the direction of the hard axis, and the impedance in the direction of the hard axis depends on the magnetic field in the direction of the hard axis due to the property (a). Changes sharply.
【０００７】以上の性質に着目し、磁性膜を磁化困難軸
に細長い形状に形成した磁気検出コアを用いた磁気セン
サの試みがなされてきた。In view of the above properties, attempts have been made for a magnetic sensor using a magnetic detection core in which a magnetic film is formed in an elongated shape along a hard magnetization axis.
【０００８】ここで、磁性体のインピーダンス変動を利
用した磁気センサとしての応用の試みは、特開昭５９−
２２０４号公報により始まる。Here, an attempt to apply a magnetic sensor utilizing the fluctuation of the impedance of a magnetic material is disclosed in
It starts with 2204 publication.
【０００９】さらに、１９８９年に第１３回日本応用磁
気学会において加茂芳邦氏、島田寛氏により、磁性体を
薄膜と、ワイヤに形成し、それそれの高周波電気抵抗の
外部磁場による変化についての研究が発表された。Further, at the 13th Japan Society of Applied Magnetics in 1989, a study was conducted by Yoshikuni Kamo and Hiroshi Shimada on the formation of a magnetic material in a thin film and a wire, and the change in the high-frequency electrical resistance of each by an external magnetic field. Was announced.
【００１０】その後、１９９２年に電気学会マグネティ
ックス研究会にて、毛利佳年雄氏らによって、ワイヤ形
状での開発が提案され、従来のＭＲ素子の１０倍のイン
ピーダンス変化率を持つ素子として、開発が始められ
た。[0010] Thereafter, at the IEEJ Magnetics Research Group in 1992, Yoshinori Mohri et al. Proposed a wire-shaped development, and as an element having an impedance change rate 10 times that of a conventional MR element, Development has begun.
【００１１】一方、薄膜形状での開発も行われており、
特開平８−７５８３５号公報においては、磁性膜により
固定磁気バイアスを加え、被検出磁界の変動によるイン
ピーダンス変動を線形的に検出することに成功してい
る。On the other hand, development in the form of a thin film is also being carried out.
In Japanese Patent Application Laid-Open No. 8-75835, a fixed magnetic bias is applied by a magnetic film, and a change in impedance due to a change in a magnetic field to be detected is successfully detected linearly.
【００１２】また、高透磁率磁性体の外部磁場によるイ
ンピーダンス変動は、１ＭＨｚ以上の高周波ドライブ電
流で検出されるため、前記効果を利用した磁気センサ
は、高周波キャリア型磁気センサとも呼ばれている。In addition, since a change in impedance of the high-permeability magnetic material due to an external magnetic field is detected by a high-frequency drive current of 1 MHz or more, a magnetic sensor utilizing the above effect is also called a high-frequency carrier type magnetic sensor.
【００１３】特開平１０−２７０７７４号公報において
は、高周波キャリア型磁気センサ素子１００は、基板上
に、磁気検出コアを２辺組み入れた図１５に示すような
磁気検出コア１０１，１０２と抵抗辺１０３，１０４と
を接続点１０５，１０６，１０７，１０８で接続し、接
続点１０５に交流電源を接続し、接続点１０６，１０８
に電圧計１１０を接続して、ブリッジ回路を取り込み、
このブリッジ回路のインピーダンスをほぼ等しくした構
成が提案されている。In Japanese Patent Application Laid-Open No. Hei 10-270774, a high-frequency carrier-type magnetic sensor element 100 includes a magnetic detection core 101, 102 and a resistance side 103 as shown in FIG. , 104 at connection points 105, 106, 107, 108, an AC power supply is connected to connection point 105, and connection points 106, 108 are connected.
To connect a voltmeter 110, take in the bridge circuit,
A configuration in which the impedance of the bridge circuit is substantially equal has been proposed.
【００１４】このようにすることで、磁気検出コア１０
１、１０２のインピーダンス変動を電圧変動として電圧
計１１０で検出し、磁気検出感度の向上と、オフセット
削減の機能を持たせることに成功している。By doing so, the magnetic detection core 10
The voltmeter 110 detects impedance fluctuations of the impedances 1 and 102 as voltage fluctuations, and succeeds in providing a function of improving the magnetic detection sensitivity and reducing the offset.
【００１５】[0015]
【発明が解決しようとする課題】上述の磁気センサ１０
０において、抵抗辺１０３，１０４を非磁性体にしたこ
とで、ブリッジ回路のオフセットのばらつきが大きくな
る問題点が発生した。The above-described magnetic sensor 10
0, the resistance sides 103 and 104 are made of a non-magnetic material, causing a problem that the offset variation of the bridge circuit becomes large.
【００１６】また、磁気検出コア１０１，１０２と抵抗
辺１０３，１０４の材質が異なることから、温度による
出力オフセットの変動を補償する必要があつた。Further, since the materials of the magnetic detection cores 101 and 102 and the resistance sides 103 and 104 are different, it is necessary to compensate for the fluctuation of the output offset due to the temperature.
【００１７】そこで、本発明の技術的課題は、小型で、
温度特性が改善され、且つ省電力の磁気センサを提供す
ることにある。Therefore, a technical problem of the present invention is to reduce the size,
An object of the present invention is to provide a power-saving magnetic sensor having improved temperature characteristics.
【００１８】[0018]
【課題を解決するための手段】本発明によれば、外部磁
場の強さに応じて高周波帯域のインピーダンスが変化す
ることを利用した磁気センサにおいて、磁性膜を細長い
形状に形成してなる２個の磁気インピーダンス特性を示
す第１の磁気検出コアの一対を導体で接続し、両端に高
周波電圧を印加し、互いに逆方向の磁気バイアスを印加
することで、前記外部磁場によって前記一対の第１の磁
気検出コアのインピーダンスが、各々相対的な差を生
じ、前記一対の第１の磁気検出コアの接続部分の電圧振
幅が変化することによって磁気検出を行うことを特徴と
する磁気センサが得られる。According to the present invention, there is provided a magnetic sensor utilizing the fact that the impedance in a high frequency band changes according to the strength of an external magnetic field. By connecting a pair of first magnetic detection cores having magnetic impedance characteristics by conductors, applying a high-frequency voltage to both ends and applying magnetic biases in opposite directions to each other, the pair of first magnetic detection cores is applied by the external magnetic field. A magnetic sensor is obtained in which the impedance of the magnetic detection core causes a relative difference, and the magnetic detection is performed by changing the voltage amplitude of the connection portion between the pair of first magnetic detection cores.
【００１９】また、本発明によれば、前記磁気センサに
おいて、前記一対の第１の磁気検出コアをほぼ一直線上
に形成し、前記一対の第１の磁気検出コア間を導体で結
合して第１の結合部を形成し、前記第１の結合部と前記
第１の磁気検出コアの両端に第１の電極を形成し、前記
結合部を中心としてスパイラルコイルを形成し、前記第
１の磁気検出コアと前記スパイラルコイル間に絶縁膜を
形成して絶縁したことを特徴とする磁気センサが得られ
る。Further, according to the present invention, in the magnetic sensor, the pair of first magnetic detection cores are formed substantially in a straight line, and the pair of first magnetic detection cores are connected to each other by a conductor. 1, a first electrode is formed at both ends of the first coupling portion and the first magnetic detection core, a spiral coil is formed around the coupling portion, and the first magnetic field is formed. A magnetic sensor is characterized in that an insulating film is formed between the detection core and the spiral coil for insulation.
【００２０】また、本発明によれば、前記磁気センサに
おいて、前記スパイラルコイルの上層に、前記第１の磁
気検出コアと前記第１の結合部を被覆するように第１の
絶縁膜を形成した後、前記第１の絶縁膜上に一対の第２
の磁気検出コアを前記第１の磁気検出コアに隣接し且つ
前記第１の磁気検出コアの一対を結ぶ直線に略平行にな
るように形成し、前記一対の第２の磁気検出コア間を導
体で結合して第２の結合部を形成し、前記第２の結合部
に第２の電極を形成し、前記一対の第２の磁気検出コア
の両端を下層の第１の電極と接続したことを特徴とする
磁気センサが得られる。According to the present invention, in the magnetic sensor, a first insulating film is formed on the spiral coil so as to cover the first magnetic detecting core and the first coupling portion. Then, a pair of second insulating films is formed on the first insulating film.
Is formed so as to be adjacent to the first magnetic detection core and substantially parallel to a straight line connecting a pair of the first magnetic detection cores, and a conductor is provided between the pair of second magnetic detection cores. Forming a second coupling portion, forming a second electrode at the second coupling portion, and connecting both ends of the pair of second magnetic sensing cores to a lower first electrode. A magnetic sensor characterized by the following is obtained.
【００２１】また、本発明によれば、前記磁気センサに
おいて、互いに略直交するＸ軸、Ｙ軸があり、Ｘ軸上、
Ｙ軸上の原点より正側、負側に第１及び第２の磁気検出
コアをそれぞれ一対ずつ形成し、それぞれ原点部分で導
体により結合して第１及び第２の結合部を形成し、Ｘ
軸、Ｙ軸方向の交差点においてそれぞれ第１の絶縁膜に
より絶縁され、Ｘ軸、Ｙ軸方向の片端が互いに接続さ
れ、電極と接続されており、該電極は接地され、もう片
端も互いに導体により結合し電極に結合し、該電極に一
定振幅の高周波駆動電圧を印加する回路を備え、Ｘ軸、
Ｙ軸原点を中心として、スパイラルコイルを形成し、Ｘ
軸上、Ｙ軸上の第１及び第２の磁気検出コアとスパイラ
ルコイル間に第２の絶縁膜を形成して絶縁したことを特
徴とする磁気センサが得られる。According to the present invention, the magnetic sensor has an X axis and a Y axis which are substantially orthogonal to each other.
A pair of first and second magnetic detection cores are respectively formed on the positive side and the negative side from the origin on the Y-axis, and the first and second magnetic detection cores are respectively connected by conductors at the origin portions to form first and second joints.
The first and second insulating films are insulated by the first insulating film at the intersections in the axis and the Y-axis directions, one ends in the X-axis and the Y-axis directions are connected to each other, and are connected to the electrodes. A circuit for coupling and coupling to the electrode, and applying a high-frequency drive voltage having a constant amplitude to the electrode;
A spiral coil is formed around the origin of the Y axis, and X
A magnetic sensor is obtained in which a second insulating film is formed between the first and second magnetic detection cores on the axis and the Y axis and the spiral coil to provide insulation.
【００２２】また、本発明によれは、前記磁気センサに
おいて、互いにほぼ直交するＸ軸、Ｙ軸があり、Ｘ軸
上、Ｙ軸上の原点より正側、負側に第１及び第２の磁気
検出コアをそれぞれ一対ずつ形成し、それぞれ原点部分
で導体により結合し、Ｘ軸、Ｙ軸方向の交差点において
それぞれ第１の絶縁膜により絶縁され、Ｘ軸方向の片端
が電極と接続されており、該電極に一定振幅の高周波駆
動電圧を印加する回路を備え、Ｙ軸方向の片端が電極と
接続されており、該電極は接地され、Ｘ軸方向、Ｙ軸方
向のもう片端は導体により結合し、Ｘ軸、Ｙ軸原点を中
心として、スパイラルコイルを形成し、Ｘ軸上、Ｙ軸上
の前記第１及び第２の磁気検出コアとスパイラルコイル
間に第２の絶縁膜を形成して絶縁したことを特徴とする
磁気センサが得られる。According to the present invention, the magnetic sensor has an X axis and a Y axis which are substantially orthogonal to each other, and the first and second axes are located on the positive and negative sides of the origin on the X axis and the Y axis. A pair of magnetic detection cores are formed, each is connected by a conductor at the origin, each is insulated by a first insulating film at an intersection in the X-axis and Y-axis directions, and one end in the X-axis direction is connected to an electrode. A circuit for applying a high-frequency drive voltage having a constant amplitude to the electrode, one end in the Y-axis direction is connected to the electrode, the electrode is grounded, and the other end in the X-axis direction and the Y-axis direction are connected by a conductor. Forming a spiral coil around the origin of the X-axis and the Y-axis, and forming a second insulating film between the spiral coil and the first and second magnetic detection cores on the X-axis and the Y-axis; A magnetic sensor characterized by being insulated can be obtained. .
【００２３】また、本発明によれば、前記いずれかの磁
気センサにおいて、前記スパイラルコイルが、導線を巻
回したボビン巻きコイルであることを特徴とする磁気セ
ンサが得られる。Further, according to the present invention, there is provided a magnetic sensor according to any one of the above magnetic sensors, wherein the spiral coil is a bobbin coil wound around a conductive wire.
【００２４】また、本発明によれば、前記いずれかの磁
気センサにおいて、前記第１の磁気検出コアの幅方向に
磁化容易軸を熱処理によって形成したことを特徴とする
磁気センサが得られる。According to the present invention, there is provided a magnetic sensor according to any one of the magnetic sensors, wherein an axis of easy magnetization is formed by heat treatment in a width direction of the first magnetic detection core.
【００２５】また、本発明によれば、前記いずれかの磁
気センサにおいて、前記第１及び第２の磁気検出コアの
幅方向に磁化容易軸を熱処理によって形成したことを特
徴とする磁気センサが得られる。Further, according to the present invention, in any one of the above magnetic sensors, an easy axis of magnetization is formed in the width direction of the first and second magnetic detection cores by heat treatment. Can be
【００２６】また、本発明によれば、前記いずれかの磁
気センサにおいて、前記第１の磁気検出コアの幅方向に
磁化容易軸を静磁場中スパッタによって形成したことを
特徴とする磁気センサが得られる。According to the present invention, there is provided a magnetic sensor according to any one of the above magnetic sensors, wherein an axis of easy magnetization is formed in a width direction of the first magnetic detection core by sputtering in a static magnetic field. Can be
【００２７】さらに、本発明によれば、前記いずれかの
磁気センサにおいて、前記第１及び第２の磁気検出コア
の幅方向に磁化容易軸を静磁場中スパッタによって形成
したことを特徴とする磁気センサが得られる。Further, according to the present invention, in any one of the magnetic sensors, an axis of easy magnetization is formed in a width direction of the first and second magnetic detection cores by sputtering in a static magnetic field. A sensor is obtained.
【００２８】[0028]
【発明の実施の形態】以下、本発明の実施の形態につい
て図面を参照しながら説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００２９】図１は本発明の磁気センサの基本構成の概
略の一例を示す断面図である。図２は磁気センサの磁気
インピーダンス特性の説明に供せられる図である。FIG. 1 is a sectional view showing an example of a schematic configuration of a magnetic sensor according to the present invention. FIG. 2 is a diagram provided for explaining the magnetic impedance characteristics of the magnetic sensor.
【００３０】図１を参照すると、磁気センサ１０は、基
板１１上に２個の磁気検出コア１、２が導体により接続
されている素子の接続導体部５より互いに逆方向で、絶
対値の等しい磁気バイアスを印加するため、スパイラル
コイル９，９を用いている。Referring to FIG. 1, the magnetic sensor 10 has the same absolute value in a direction opposite to that of the connection conductor portion 5 of an element in which two magnetic detection cores 1 and 2 are connected by a conductor on a substrate 11. In order to apply a magnetic bias, spiral coils 9 are used.
【００３１】スパイラルコイル９，９により、電流で作
り出される磁場の方向は、磁気検出コア１，２の中央よ
り逆向きに発生する。ここで、図２に示すように、磁気
検出コア１，２は、印加磁場によりインピーダンスが変
化し、外部磁場零で、図２中Ａのポイントに磁気バイア
スされているとする。さらに、直列に接続された磁気検
出コア１，２の一方を接地し、もう一方から一定振幅の
高周波駆動電圧が印加されているとする。The direction of the magnetic field generated by the current by the spiral coils 9, 9 is generated in the opposite direction from the center of the magnetic detection cores 1, 2. Here, as shown in FIG. 2, it is assumed that the impedance of the magnetic detection cores 1 and 2 is changed by the applied magnetic field, the external magnetic field is zero, and the magnetic detection cores 1 and 2 are magnetically biased at a point A in FIG. 2. Further, it is assumed that one of the magnetic detection cores 1 and 2 connected in series is grounded, and a high-frequency drive voltage having a constant amplitude is applied from the other.
【００３２】被検出磁場Ｈｅｘｔが印加された場合、片
方の磁気検出コア２ではスパイラルバイアスコイルによ
るバイアス磁場Ｈｂｉａｓと同方向で、磁場の絶対値は
Ｈｅｘｔが増大するにつれて増大する。When the detected magnetic field Hext is applied, the absolute value of the magnetic field increases in one magnetic detection core 2 in the same direction as the bias magnetic field Hbias by the spiral bias coil as the Hext increases.
【００３３】そのため、インピーダンスＺａが増大す
る。もう片方の磁気検出コア１のインピーダンスは、ス
パイラルバイアスコイルによるバイアス磁場Ｈｂｉａｓ
と逆方向のため、磁場の絶対値はＨｅｘｔが増大するに
つれて減少する。そのため、インピーダンスＺｂが減少
する。Therefore, the impedance Za increases. The impedance of the other magnetic detection core 1 is the bias magnetic field Hbias by the spiral bias coil.
, The absolute value of the magnetic field decreases as Hext increases. Therefore, the impedance Zb decreases.
【００３４】後者の磁気検出コア１が接地されていたと
すると、２個の磁気検出コア１，２の導体接続部５の電
圧振幅Ｗは、両端に印加される高周波駆動電圧の振幅を
Ｖｄとおくと、次の数２式のように表される。Assuming that the latter magnetic detecting core 1 is grounded, the voltage amplitude W of the conductor connecting portion 5 of the two magnetic detecting cores 1 and 2 is set such that the amplitude of the high-frequency driving voltage applied to both ends is Vd. And the following equation (2).
【００３５】[0035]
【数２】 (Equation 2)
【００３６】Ｚａの増大量、Ｚｂの減少量は、上記数２
式によりセンサ出力に反映される。外部磁場が零の場合
には、上記数２式のＺａ＝Ｚｂとなり、Ｖ0 ＝Ｖｄ／２
となるため、高周波駆動電圧の振幅Ｖｄが一定であれ
ば、導体接続部５の電圧振幅は温度、膜への張力、圧縮
力、その他環境によるインピーダンス特性の変化、等の
要因により変動しない。The amount of increase of Za and the amount of decrease of Zb are given by
The expression is reflected in the sensor output. When the external magnetic field is zero, Za = Zb in the above equation (2), and V 0 = Vd / 2
Therefore, if the amplitude Vd of the high-frequency drive voltage is constant, the voltage amplitude of the conductor connecting portion 5 does not change due to factors such as temperature, tension on the film, compression force, and changes in impedance characteristics due to the environment.
【００３７】次に、本発明の実施の形態による磁気セン
サについて更に具体的に説明する。Next, the magnetic sensor according to the embodiment of the present invention will be described more specifically.
【００３８】（第１の実施の形態）まず、図３は本発明
の第１の実施の形態による磁気センサを示す図である。
図４は図３の磁気センサの構造を示す分解組立斜視図で
ある。図５は磁気検出センサの駆動検出回路を示すブロ
ック図である。(First Embodiment) First, FIG. 3 is a diagram showing a magnetic sensor according to a first embodiment of the present invention.
FIG. 4 is an exploded perspective view showing the structure of the magnetic sensor of FIG. FIG. 5 is a block diagram showing a drive detection circuit of the magnetic detection sensor.
【００３９】図３を参照すると、磁気センサ１０は、２
個の磁気検出コア１，２上に接地電極３、駆動電圧印加
電極４、導体接続部５、出力電極６を形成し、接地電極
３、駆動電圧印加電極４、出力電極６以外の領域に絶縁
膜１２を形成し、電極正バイアス電極７、接地バイアス
電極８、スパイラルコイル９を形成した構成になってい
る。Referring to FIG. 3, the magnetic sensor 10 includes
A ground electrode 3, a drive voltage application electrode 4, a conductor connection part 5, and an output electrode 6 are formed on the magnetic detection cores 1 and 2, and are insulated in regions other than the ground electrode 3, the drive voltage application electrode 4, and the output electrode 6. The film 12 is formed, and the electrode positive bias electrode 7, the ground bias electrode 8, and the spiral coil 9 are formed.
【００４０】図４を参照すると、磁気検出コア１，２を
誘電体基板上１１に形成し、接地電極３及び駆動電圧印
加電極４と、導体接続部５を導体膜を形成し、導体接続
部５及び接地電極３と駆動電圧印加電極４以外の部分に
絶縁するように、孔部１２ａ，１２ｂ，１２ｃを備えた
絶縁膜１２を形成する。さらに、スパイラルコイル９と
その両端部の電極正バイアス電極７及び接地バイアス電
極８を形成する構成になっている。Referring to FIG. 4, the magnetic detection cores 1 and 2 are formed on a dielectric substrate 11, and the ground electrode 3, the drive voltage applying electrode 4, and the conductor connection part 5 are formed of a conductor film. An insulating film 12 having holes 12a, 12b, and 12c is formed so as to be insulated from portions other than the electrode 5 and the ground electrode 3 and the drive voltage applying electrode 4. Further, the spiral coil 9 and the electrode positive bias electrode 7 and the ground bias electrode 8 at both ends thereof are formed.
【００４１】ここで、誘電体基板１１としては酸化珪
素、珪素、そのほかガラス材、導体膜としてはＴｉの薄
い下地膜の上にＣｕを形成したもの、あるいはＣｒを用
い、そのほか導電性を持ち、基板への密着度が強い物質
であれば実用に耐える。Here, the dielectric substrate 11 is made of silicon oxide, silicon, or another glass material, and the conductor film is made of a thin film of Ti on which Cu is formed on a thin underlying film, or Cr. If the substance has a strong adhesion to the substrate, it can be used practically.
【００４２】また、絶縁膜１２は酸化珪素に代表される
絶縁性の基板１１への密着度か強い物質を膜形成すれば
よい。The insulating film 12 may be formed of a material having a high degree of adhesion to the insulating substrate 11 typified by silicon oxide.
【００４３】磁気検出コア１、２に対してネガのパター
ンでフオトレジストをマスキングし、アモルフアス軟磁
性膜を形成し、フオトレジストの洗浄を行う。Photoresist is masked with a negative pattern on the magnetic detection cores 1 and 2 to form an amorphous soft magnetic film, and the photoresist is washed.
【００４４】さらに、回転磁場中熱処理を行って磁歪を
除去し、その後、静磁場を幅方向に印加して熱処理を行
うことで磁化容易軸を形成することで磁気検出コア１，
２が形成される。保磁力は０．１Ｏｅ（エルステッド）
以下が望ましいが、１Ｏｅ以下であっても実用に耐え
る。磁化容易軸方向に磁石などで、５Ｏｅ以上、望まし
くは１００Ｏｅ以上の静磁場を印可した状態でアモルフ
アス軟磁性膜を形成すると、熱処理工程を省くことが出
来る。Further, a magnetostriction is removed by performing a heat treatment in a rotating magnetic field, and thereafter, a static magnetic field is applied in the width direction to perform a heat treatment, thereby forming an easy axis of magnetization.
2 are formed. Coercive force is 0.1 Oe (Oersted)
The following is desirable, but even if it is 1 Oe or less, it can be practically used. If the amorphous soft magnetic film is formed in a state where a static magnetic field of 5 Oe or more, desirably 100 Oe or more is applied by a magnet or the like in the direction of the easy axis, the heat treatment step can be omitted.
【００４５】図５を参照すると、１番端子５１には出力
電極６が接続されている。また、２番端子５２には抵抗
バイアス等により定電圧を印加して平滑化回路６２は取
り除いても良い。３番端子５３には接続導体部５、４番
端子５４には、接地電極３及び接地バイアス電極８、５
番端子には駆動電圧印加電極４がワイヤーボンディング
等の接続手段で接続することで磁気センサーとして使用
できる。Referring to FIG. 5, the output electrode 6 is connected to the first terminal 51. Alternatively, the smoothing circuit 62 may be removed by applying a constant voltage to the second terminal 52 by a resistance bias or the like. The third terminal 53 has a connection conductor 5, and the fourth terminal 54 has a ground electrode 3 and a ground bias electrode 8, 5.
The drive voltage application electrode 4 is connected to the terminal No. 2 by a connection means such as wire bonding, so that it can be used as a magnetic sensor.
【００４６】ここで，図３及び４の磁気センサ１０にお
いて、磁気検出コア１の内部磁場をＨｍ、もう一方の磁
気検出コア２からの反磁場をＨｎとおくと、Ｈｎ／Ｈｍ
が十分小さければ磁気検出コア同士の影響は少ないもの
と見なせる。Here, in the magnetic sensor 10 of FIGS. 3 and 4, if the internal magnetic field of the magnetic detection core 1 is Hm and the demagnetizing field from the other magnetic detection core 2 is Hn, Hn / Hm
Is small enough, it can be considered that the influence between the magnetic detection cores is small.
【００４７】磁気検出コア１，２の長手方向の比透磁率
をμｉ、膜厚をｔ、幅をｗ、長さをｌ、導体接続部の磁
気検出コアの間隔をｄ、スパイラルコイルの巻き数を
Ｎ、印加される電流をＩとおくと、スパイラルコイル９
により磁気検出コア１，２に印加される磁場Ｈｍ、発生
する磁束Ｂｍは、次の数３式、数４式で表される。The relative magnetic permeability in the longitudinal direction of the magnetic detection cores 1 and 2 is μi, the film thickness is t, the width is w, the length is 1, the interval between the magnetic detection cores at the conductor connection portion is d, and the number of turns of the spiral coil is Is N, and the applied current is I, the spiral coil 9
Accordingly, the magnetic field Hm applied to the magnetic detection cores 1 and 2 and the generated magnetic flux Bm are expressed by the following equations (3) and (4).
【００４８】[0048]
【数３】 (Equation 3)
【００４９】[0049]
【数４】 (Equation 4)
【００５０】磁気検出コア１の端面での磁束は前記Ｂｍ
となり、もう一方の磁気検出コア２の端面へ印加される
磁束Ｂｎ、磁場Ｈｎは、磁気検出コア１，２の断面積が
十分小さい（１０ｄ＞ｔ，ｗ）として、次の数５式、数
６式ように表される。The magnetic flux at the end face of the magnetic detection core 1 is Bm
The magnetic flux Bn and the magnetic field Hn applied to the end face of the other magnetic detection core 2 are given by the following equation (5) assuming that the sectional area of the magnetic detection cores 1 and 2 is sufficiently small (10d> t, w). It is expressed as Equation 6.
【００５１】[0051]
【数５】 (Equation 5)
【００５２】[0052]
【数６】 (Equation 6)
【００５３】このことから、下記数７式は、１０ｄ＞
ｔ，ｗの条件下で、ほぼ成立する。From the above, the following equation (7) is expressed as follows:
It is almost satisfied under the conditions of t and w.
【００５４】[0054]
【数７】 (Equation 7)
【００５５】長手方向の比透磁率１０００、長さ１ｍ
ｍ、幅２０ミクロン、膜厚３ミクロンのアモルフアス磁
気検出コア１，２の、周波数１０ＭＨｚにおける磁気イ
ンピーダンス特性を、一例として前述の図２に示してい
る。The relative magnetic permeability in the longitudinal direction is 1000, and the length is 1 m.
FIG. 2 shows an example of the magnetic impedance characteristics at a frequency of 10 MHz of the amorphous magnetic detection cores 1 and 2 of m, 20 μm and 3 μm in thickness.
【００５６】巻き数５０のスパイラルコイル９を形成
し、磁気検出コア１，２の間隔を１ｍｍおいた場合の最
適の磁気バイアス電流を求める場合、外部磁場１Ｏｅを
印可した状態でのスパイラルコイルへの通電電流を変化
させた場合の、スパイラル磁気センサ出力の測定を行
う。When the spiral coil 9 having 50 turns is formed and the optimum magnetic bias current is obtained when the distance between the magnetic detection cores 1 and 2 is 1 mm, the spiral coil 9 with the external magnetic field 10 Oe applied to the spiral coil 9 The output of the spiral magnetic sensor is measured when the current is changed.
【００５７】図６は、その磁気センサ出力の測定結果を
示す図である。図６に示すように、スパイラルコイルへ
の通電電流に比例して磁気検出コアに磁気バイアスが印
加され、外部磁場１Ｏｅが印加された場合の出力が入力
電圧振幅１Ｖｐ−ｐの半分の５００ｍＶｐ−ｐからの偏
差により表され、５００ｍＶｐ−ｐからの偏差の大きい
図６中Ｂ点あるいはＣ点に磁気バイアスを固定すれば、
外部磁場による出力変動を最も大きく取り出すことが出
来る。FIG. 6 is a diagram showing the measurement results of the output of the magnetic sensor. As shown in FIG. 6, when the magnetic bias is applied to the magnetic detection core in proportion to the current flowing through the spiral coil, and the external magnetic field 1 Oe is applied, the output is 500 mVp-p, which is half of the input voltage amplitude 1 Vp-p. If the magnetic bias is fixed at the point B or C in FIG. 6 where the deviation from 500 mVp-p is large,
The largest output fluctuation due to the external magnetic field can be obtained.
【００５８】図７は、図６中Ｂ点及びＣ点に磁気バイア
スを固定し、外部磁場と中間接続部の電圧振幅を測定し
た結果である。FIG. 7 shows the result of measurement of the external magnetic field and the voltage amplitude of the intermediate connection part with the magnetic bias fixed at points B and C in FIG.
【００５９】磁気バイアスポイントが異なった場合で
も、零磁場では駆動電圧振幅の半分の５００ｍＶを出力
する点では変わらず、磁気感度が異なるのみである。Even when the magnetic bias points are different, there is no difference in that 500 mV, which is half the amplitude of the driving voltage, is output at zero magnetic field, and only the magnetic sensitivity is different.
【００６０】上記数２式でも示されているように、温度
変化などで磁気検出コアのインピーダンスが変化した場
合でも、零磁場での出力は一定に保たれる。As shown in the above equation (2), even when the impedance of the magnetic detection core changes due to a temperature change or the like, the output at zero magnetic field is kept constant.
【００６１】磁気検出コアの間隔ｄを狭めていった場合
の、極大点Ｂ、極小点Ｃのバイアスコイル電流値と、上
記数７式より計算したＨｎ／Ｈｍを併せて図８に示す。
Ｈｎ／Ｈｍが１以下で特性は、ほとんど変化せず、磁気
検出コア１，２同士の影響が無くなつている。FIG. 8 shows the bias coil current values at the maximum point B and the minimum point C when the distance d between the magnetic detection cores is reduced, and Hn / Hm calculated from the above equation (7).
When Hn / Hm is 1 or less, the characteristics hardly change, and the influence of the magnetic detection cores 1 and 2 is eliminated.
【００６２】このため、スパイラル磁気センサの設計の
際には、Ｈｎ／Ｈｍを１以下にする必要がある。Therefore, when designing a spiral magnetic sensor, it is necessary to set Hn / Hm to 1 or less.
【００６３】（第２の実施の形態）図９は第２の実施の
形態による磁気センサの構成を示す分解組立斜視図であ
る。図９を参照して、上記第１の実施の形態の磁気セン
サ１０の構造上に電極をフォトレジストなどでマスキン
グして絶縁膜１３を形成し、上記第１の実施の形態と同
様の方法で２個の磁気検出コア１´，２´、接続導体部
５´、電極パッドからなる出力電極６´、下層電極との
接続導体部１４，１５を夫々形成することで磁気センサ
３０が得られる。(Second Embodiment) FIG. 9 is an exploded perspective view showing the structure of a magnetic sensor according to a second embodiment. Referring to FIG. 9, electrodes are masked with a photoresist or the like on the structure of magnetic sensor 10 of the first embodiment to form insulating film 13, and a method similar to that of the first embodiment is used. The magnetic sensor 30 can be obtained by forming the two magnetic detection cores 1 ′ and 2 ′, the connection conductor 5 ′, the output electrode 6 ′ composed of an electrode pad, and the connection conductors 14 and 15 with the lower electrode.
【００６４】本第２の実施の形態では、上記第１の実施
の形態の構成の磁気センサを並列に並べた構成になって
おり、磁気検出コア１と１´、２と２´では、互いに逆
方向のバイアス磁場がスパイラルコイルにより印加され
るため、電極正バイアス電極７と、出力電極６´の振幅
電圧は、片方が外部磁場に対し増大すれば、もう片方が
減少するため、出力の差動増幅を行うことで、上記第１
の実施の形態の２倍の磁気感度が得られる。In the second embodiment, the magnetic sensors of the first embodiment are arranged in parallel, and the magnetic detection cores 1, 1 ', 2 and 2' Since the reverse bias magnetic field is applied by the spiral coil, the amplitude voltage of the electrode positive bias electrode 7 and the output electrode 6 ′ becomes larger when one of them increases with respect to the external magnetic field. By performing dynamic amplification, the first
Magnetic sensitivity twice as high as that of the embodiment can be obtained.
【００６５】また、スパイラルコイル９の上層と下層の
磁気検出コア１，１´及び２，２´を近接して形成する
ことで、スパイラルコイルによる発生磁場の反磁場をお
さえることができ、磁気検出コア１，１´，２，２´の
導体接合部の間隔は、上記第１の実施の形態よりも狭め
ることが出来る。By forming the upper and lower magnetic detection cores 1, 1 ′ and 2, 2 ′ of the spiral coil 9 close to each other, the demagnetizing field of the magnetic field generated by the spiral coil can be suppressed. The distance between the conductor bonding portions of the cores 1, 1 ', 2, 2' can be made narrower than in the first embodiment.
【００６６】膜付着面の平滑性を良くするため、磁気検
出コア１，１´と２，２´は、重ねないようにし、絶縁
膜１３は出来るだけ厚く形成する。In order to improve the smoothness of the film attachment surface, the magnetic detection cores 1, 1 'and 2, 2' are not overlapped, and the insulating film 13 is formed as thick as possible.
【００６７】（第３の実施の形態）図１０及び図１１は
本発明の第３の実施の形態による磁気センサを示す平面
図及び分解組立斜視図である。図１０及び図１１を参照
すると、磁気センサ４０は紙面横方向に１００Ｏｅ以上
の静磁場を印加した状態で形成したＹ方向の磁気検出コ
ア１，２上に、接地電極３、駆動電圧印加電極４、接続
導体５、出力電極６を形成し、接地電極３、駆動電圧印
加電極４、出力電極６以外の領域を絶縁するように孔部
１９ａ，１９ｂ，１９ｃを有する絶縁膜１８を形成し、
紙面縦方向に１００Ｏｅ以上の静磁場を印加した状態で
形成したＸ方向磁気検出コア１´´，２´´上に接続導
体２４、出力電極２３、接地電極２２、及び駆動電圧印
加電極２１を形成し、駆動電圧印加電極２１、接地電極
２２、及び出力電極６，２３以外の領域を覆うように孔
部３２ａ，３２ｂ，３２ｃ，３２ｄを備えた絶縁膜３４
を形成し、電極正バイアス電極３１、接地バイアス電極
２９、及びスパイラルコイル２８を形成した構成になっ
ている。(Third Embodiment) FIGS. 10 and 11 are a plan view and an exploded perspective view showing a magnetic sensor according to a third embodiment of the present invention. Referring to FIGS. 10 and 11, the magnetic sensor 40 includes a ground electrode 3 and a drive voltage application electrode 4 on Y-direction magnetic detection cores 1 and 2 formed in a state where a static magnetic field of 100 Oe or more is applied in the horizontal direction of the paper. Forming an insulating film 18 having holes 19a, 19b, and 19c so as to insulate regions other than the ground electrode 3, the drive voltage applying electrode 4, and the output electrode 6;
The connection conductor 24, the output electrode 23, the ground electrode 22, and the drive voltage application electrode 21 are formed on the X-direction magnetic detection cores 1 '' and 2 '' formed in a state where a static magnetic field of 100 Oe or more is applied in the longitudinal direction of the paper. An insulating film 34 having holes 32a, 32b, 32c, and 32d so as to cover areas other than the drive voltage applying electrode 21, the ground electrode 22, and the output electrodes 6 and 23.
And a positive bias electrode 31, a ground bias electrode 29, and a spiral coil 28 are formed.
【００６８】この第３の実施の形態による磁気センサ
は、図５の検出回路２０と同様な第１及び第２の検出回
路を２回路用意し、第１の検出回路の１番端子５１に出
力電極６、２番端子５２には抵抗バイアス等により定電
圧を印加して平滑化回路６２は取り除いても良い、３番
端子５３には接地バイアス電極２９、４番端子５４には
駆動電圧印加電極２１、電極正バイアス電極３１、５番
端子５５には接地電極２２がワイヤーボンディング等の
接続手段で接続することでＹ方向の磁場の出力が得られ
る。In the magnetic sensor according to the third embodiment, two first and second detection circuits similar to the detection circuit 20 shown in FIG. 5 are prepared and output to the first terminal 51 of the first detection circuit. The smoothing circuit 62 may be removed by applying a constant voltage to the electrodes 6 and the second terminal 52 by a resistance bias or the like. The third terminal 53 is a ground bias electrode 29 and the fourth terminal 54 is a driving voltage application electrode. 21, the electrode positive bias electrode 31, and the fifth terminal 55, the ground electrode 22 is connected by connection means such as wire bonding to obtain an output of a magnetic field in the Y direction.
【００６９】また、第２の検出回路の１番端子５１に出
力電極２３、２番端子５２には平滑化回路６２を除いて
定電圧を印加し、３，４，５番端子５３，５４，５５
と、発振回路６４、定電流源６３は第１の回路と共用す
ることでＸ方向の磁場の出力が得られる。The output electrode 23 is applied to the first terminal 51 of the second detection circuit, and a constant voltage is applied to the second terminal 52 except for the smoothing circuit 62. The third, fourth and fifth terminals 53, 54, 55
By using the oscillation circuit 64 and the constant current source 63 together with the first circuit, an output of a magnetic field in the X direction can be obtained.
【００７０】以上のような構成の本発明の第３の実施の
形態の磁気センサによって、２軸の磁気方位の検出が可
能な素子を提供できる。With the magnetic sensor according to the third embodiment of the present invention having the above-described configuration, it is possible to provide an element capable of detecting two-axis magnetic azimuth.
【００７１】（第４の実施の形態）図１２及び図１３は
本発明の第４の実施の形態による磁気センサの構成を示
す平面図及び分解組立斜視図である。図１２及び図１３
を参照すると、磁気センサ５０は、紙面横方向に１００
Ｏｅ以上の静磁場を印加した状態で基板１１上に形成し
たＹ方向の磁気検出コア１，２上に接地電極３、駆動電
圧印加電極４、接続導体部５、出力電極６を形成し、接
地電極３、駆動電圧印加電極４、及び出力電極６以外の
領域を絶縁するように孔部１９ａ，１９ｂ，１９ｃを設
けた絶縁膜１８を形成し、更に、絶縁膜１８上に紙面縦
方向に１００Ｏｅ以上の静磁場を印加した状態で形成し
たＸ方向の磁気検出コア１´´，２´´上に接続導体部
２４、出力電極２３、接地電極２２、及び駆動電圧印加
電極３５を形成し、接地電極２２、駆動電圧印加電極
４，３５、出力電極６，２３以外の領域を絶縁するよう
に、孔部３６ａ，３６ｂ，３６ｃ，３６ｄを備えた絶縁
膜３４を形成し、電極正バイアス電極３１、接地バイア
ス電極２９、スパイラルコイル２６を形成した構成にな
っている。(Fourth Embodiment) FIGS. 12 and 13 are a plan view and an exploded perspective view showing a configuration of a magnetic sensor according to a fourth embodiment of the present invention. 12 and 13
Referring to FIG. 2, the magnetic sensor 50 has a width of 100
A ground electrode 3, a drive voltage application electrode 4, a connection conductor 5, and an output electrode 6 are formed on the Y-direction magnetic detection cores 1 and 2 formed on the substrate 11 in a state where a static magnetic field of Oe or more is applied, and grounded. An insulating film 18 provided with holes 19a, 19b, and 19c is formed so as to insulate regions other than the electrode 3, the drive voltage applying electrode 4, and the output electrode 6, and is further formed on the insulating film 18 by 100 Oe in the vertical direction of the drawing. The connection conductor 24, the output electrode 23, the ground electrode 22, and the drive voltage application electrode 35 are formed on the X-direction magnetic detection cores 1 '' and 2 '' formed in a state where the above-described static magnetic field is applied, and are grounded. An insulating film 34 having holes 36a, 36b, 36c and 36d is formed so as to insulate regions other than the electrode 22, the drive voltage applying electrodes 4 and 35, and the output electrodes 6 and 23. Ground bias electrode 29, spiral It has a configuration forming the coil 26.
【００７２】図５の検出回路２０と同様な第１及び第２
の検出回路を２回路用意し、第１の検出回路の１番端子
５１に出力電極６、２番端子５２には抵抗バイアス等に
より定電圧を印加して平滑化回路６１，６２は取り除い
ても良い、３番端子５３には電極２９、４番端子５４に
は接地電極３５、電極正バイアス電極３１、５番端子５
５には駆動電圧印加電極４がワイヤーボンディング等の
接続手段で接続することでＹ方向の磁場の出力か得られ
る。The first and second signals are similar to those of the detection circuit 20 shown in FIG.
Of the first detection circuit, the output electrode 6 is applied to the first terminal 51 of the first detection circuit, and a constant voltage is applied to the second terminal 52 by a resistance bias or the like, and the smoothing circuits 61 and 62 are removed. The third terminal 53 has the electrode 29, the fourth terminal 54 has the ground electrode 35, the electrode positive bias electrode 31, and the fifth terminal 5
An output of a magnetic field in the Y direction can be obtained by connecting the driving voltage application electrode 4 to 5 by connection means such as wire bonding.
【００７３】また、第２の検出回路の１番端子５１に出
力電極２３、２番端子５２は平滑化回路６２を除いて定
電圧を印加し、３，４，５番端子５３，５４，５５と、
発振回路６４、定電流源６３は第１の検出回路と共用す
ることでＸ方向の磁場の出力が得られる。The output electrode 23 is applied to the first terminal 51 of the second detection circuit, the second terminal 52 is applied with a constant voltage except for the smoothing circuit 62, and the third, fourth and fifth terminals 53, 54 and 55 are applied. When,
By using the oscillation circuit 64 and the constant current source 63 in common with the first detection circuit, an output of a magnetic field in the X direction can be obtained.
【００７４】第４の実施の形態は上記第３の実施の形態
の磁気検出コア１，１´，２，２´を直列にした構成で
あるため、図１０中の発振回路からの出力インピーダン
スは上記第３の実施の形態の４倍と改善され、省電力化
が図れる。同様にして上記第２の実施の形態の構成も直
列化することができる。Since the fourth embodiment has a configuration in which the magnetic detection cores 1, 1 ', 2, 2' of the third embodiment are connected in series, the output impedance from the oscillation circuit in FIG. This is improved to four times that of the third embodiment, and power saving can be achieved. Similarly, the configuration of the second embodiment can be serialized.
【００７５】（第５の実施の形態）図１４は本発明の第
５の実施の形態による磁気センサを示す斜視図である。
図１４を参照すると、磁気検出コア１及び２、接続導体
部５、駆動電圧印加電極４、接地電極３、出力電極６を
上記第１の実施の形態と同様に形成し、基板１１の表あ
るいは裏に、導線４３を巻回した巻回コイル４４を、導
線の周回方向を素子膜面内にし、中心が接続導体に向か
い、巻回コイル４４の最外部が２つの磁気検出コアの外
端を超えないような位置に配置する。磁気バイアスの大
きな材質、形状の磁気検出コア等も、前記の構成にする
ことで、容易に適正なバイアスポイントに磁気バイアス
を印加できる。(Fifth Embodiment) FIG. 14 is a perspective view showing a magnetic sensor according to a fifth embodiment of the present invention.
Referring to FIG. 14, the magnetic detection cores 1 and 2, the connection conductor 5, the drive voltage application electrode 4, the ground electrode 3, and the output electrode 6 are formed in the same manner as in the first embodiment, and On the back side, a wound coil 44 wound with a conductive wire 43 is set so that the winding direction of the conductive wire is in the element film surface, the center faces the connection conductor, and the outermost of the wound coil 44 is the outer ends of the two magnetic detection cores. Place it so that it does not exceed it. With the above-described configuration, a magnetic bias can be easily applied to an appropriate bias point even for a magnetic detection core having a material and a shape having a large magnetic bias.
【００７６】尚、上記第２の実施の形態から４中のスパ
イラルコイルはこの第５の実施の形態の巻回コイル４４
により代用可能である。The spiral coil in the second to fourth embodiments is the same as the spiral coil of the fifth embodiment.
Can be substituted by
【００７７】[0077]
【発明の効果】以上説明したように、本発明により、小
型で、温度特性が改善され、且つ省電力の磁気センサ素
子を提供することができる。As described above, according to the present invention, it is possible to provide a magnetic sensor element which is small in size, has improved temperature characteristics, and saves power.
【図１】本発明の磁気センサの基本構成の一例を示す概
略断面図である。FIG. 1 is a schematic sectional view showing an example of a basic configuration of a magnetic sensor of the present invention.
【図２】磁気センサの磁気インピーダンス特性の説明に
供せられる図である。FIG. 2 is a diagram provided for explaining a magnetic impedance characteristic of a magnetic sensor;
【図３】本発明の第１の実施の形態による磁気センサの
構成を示す図である。FIG. 3 is a diagram showing a configuration of a magnetic sensor according to the first embodiment of the present invention.
【図４】図３の磁気センサの分解組立斜視図である。FIG. 4 is an exploded perspective view of the magnetic sensor of FIG. 3;
【図５】本発明の磁気センサに接続される駆動検出回路
の一例のブロック図である。FIG. 5 is a block diagram of an example of a drive detection circuit connected to the magnetic sensor of the present invention.
【図６】本発明の第１の実施の形態による磁気センサの
出力特性の測定結果を示す図である。FIG. 6 is a diagram showing measurement results of output characteristics of the magnetic sensor according to the first embodiment of the present invention.
【図７】図６中Ｂ点及びＣ点に磁気バイアスを固定し、
外部磁場と中間接続部の電圧振幅を測定した結果を示す
図である。FIG. 7 shows a magnetic bias fixed at points B and C in FIG.
It is a figure showing the result of having measured the external magnetic field and the voltage amplitude of the intermediate connection part.
【図８】軟磁性コア中央離間幅と磁気バイアス効率との
関係を示す概略図である。FIG. 8 is a schematic diagram illustrating a relationship between a center separation width of a soft magnetic core and a magnetic bias efficiency.
【図９】本発明の第２の実施の形態による磁気センサの
構成を示す図である。FIG. 9 is a diagram showing a configuration of a magnetic sensor according to a second embodiment of the present invention.
【図１０】本発明の第３の実施の形態による磁気センサ
を示す概略平面図である。FIG. 10 is a schematic plan view showing a magnetic sensor according to a third embodiment of the present invention.
【図１１】図１０の磁気センサの分解組立斜視図であ
る。FIG. 11 is an exploded perspective view of the magnetic sensor of FIG. 10;
【図１２】本発明の第４の実施の形態による磁気センサ
の構成を示す概略平面図である。FIG. 12 is a schematic plan view showing a configuration of a magnetic sensor according to a fourth embodiment of the present invention.
【図１３】図１２の磁気センサの分解組立斜視図であ
る。FIG. 13 is an exploded perspective view of the magnetic sensor of FIG. 12;
【図１４】本発明の第５の実施の形態による磁気センサ
を示す分解組立斜視図である。FIG. 14 is an exploded perspective view showing a magnetic sensor according to a fifth embodiment of the present invention.
【図１５】従来技術による磁気センサを示す回路図であ
る。FIG. 15 is a circuit diagram showing a magnetic sensor according to the related art.
１，１´，１´´，２，２´，２´´ 磁気検出コア ３，２２ 接地電極 ４，２１，３５ 駆動電圧印加電極 ５，５´，１４，１５，２４ 導体（接続導体部） ６，６´，２３ 出力電極（電極パッド） ７，３１ 電極正バイアス電極 ８，２９ 接地バイアス電極 ９，２８ スパイラルコイル １０，３０，４０，５０ 磁気センサ １１ 基板 １２，１３，１８，３４ 絶縁膜 １２ａ，１２ｂ，１２ｃ，１９ａ，１９ｂ，１９ｃ，３
２ａ，３２ｂ，３２ｃ，３２ｄ，３６ａ，３６ｂ，３６
ｃ，３６ｄ 孔部 ４３ 導線 ４４ 巻回コイル ５１ １番端子 ５２ ２番端子 ５３ ３番端子 ５４ ４番端子 ５５ ５番端子 ６１，６２ 平滑化回路 １００ 磁気センサ １０１，１０２ 磁気検出コア １０３，１０４ 抵抗辺 １０５，１０６，１０７，１０８ 接続点 １０９ 交流電源 １１０ 電圧計1, 1 ', 1 ", 2, 2', 2" Magnetic detection core 3, 22 Ground electrode 4, 21, 35 Drive voltage application electrode 5, 5 ', 14, 15, 24 Conductor (connection conductor part) 6, 6 ', 23 Output electrode (electrode pad) 7, 31 Electrode positive bias electrode 8, 29 Ground bias electrode 9, 28 Spiral coil 10, 30, 40, 50 Magnetic sensor 11 Substrate 12, 13, 18, 34 Insulating film 12a, 12b, 12c, 19a, 19b, 19c, 3
2a, 32b, 32c, 32d, 36a, 36b, 36
c, 36d Hole 43 Conductor 44 Winding coil 51 1st terminal 52 2nd terminal 53 3rd terminal 54 4th terminal 55 5th terminal 61, 62 Smoothing circuit 100 Magnetic sensor 101, 102 Magnetic detection core 103, 104 Resistance Side 105,106,107,108 Connection point 109 AC power supply 110 Voltmeter
Claims (10)
ンピーダンスが変化することを利用した磁気センサにお
いて、磁性膜を細長い形状に形成してなる２個の磁気イ
ンピーダンス特性を示す第１の磁気検出コアの一対を導
体で接続し、両端に高周波電圧を印加し、互いに逆方向
の磁気バイアスを印加することで、前記外部磁場によっ
て前記一対の第１の磁気検出コアのインピーダンスが、
各々相対的な差を生じ、前記一対の第１の磁気検出コア
の接続部分の電圧振幅が変化することによって磁気検出
を行うことを特徴とする磁気センサ。In a magnetic sensor utilizing the fact that the impedance in a high frequency band changes according to the strength of an external magnetic field, a first magnetic field having two magnetic impedance characteristics formed by forming a magnetic film into an elongated shape. By connecting a pair of detection cores with a conductor, applying a high-frequency voltage to both ends, and applying magnetic biases in opposite directions, the impedance of the pair of first magnetic detection cores is increased by the external magnetic field.
A magnetic sensor wherein a relative difference is generated between each pair, and a magnetic detection is performed by changing a voltage amplitude of a connection portion of the pair of first magnetic detection cores.
記一対の第１の磁気検出コアをほぼ一直線上に形成し、
前記一対の第１の磁気検出コア間を導体で結合して第１
の結合部を形成し、前記第１の結合部と前記第１の磁気
検出コアの両端に第１の電極を形成し、前記結合部を中
心としてスパイラルコイルを形成し、前記第１の磁気検
出コアと前記スパイラルコイル間に絶縁膜を形成して絶
縁したことを特徴とする磁気センサ。2. The magnetic sensor according to claim 1, wherein said pair of first magnetic detection cores are formed substantially in a straight line,
The pair of first magnetic detection cores are connected by a conductor to form a first magnetic detection core.
A first electrode is formed at both ends of the first coupling portion and the first magnetic detection core, a spiral coil is formed around the coupling portion, and the first magnetic detection is performed. A magnetic sensor characterized in that an insulating film is formed between a core and the spiral coil for insulation.
記スパイラルコイルの上層に、前記第１の磁気検出コア
と前記第１の結合部を被覆するように第１の絶縁膜を形
成した後、前記第１の絶縁膜上に一対の第２の磁気検出
コアを前記第１の磁気検出コアに隣接し且つ前記第１の
磁気検出コアの一対を結ぶ直線に略平行になるように形
成し、前記一対の第２の磁気検出コア間を導体で結合し
て第２の結合部を形成し、前記第２の結合部に第２の電
極を形成し、前記一対の第２の磁気検出コアの両端を下
層の第１の電極と接続したことを特徴とする磁気セン
サ。3. The magnetic sensor according to claim 2, wherein a first insulating film is formed on the spiral coil so as to cover the first magnetic detection core and the first coupling portion. Forming a pair of second magnetic detection cores on the first insulating film so as to be adjacent to the first magnetic detection core and substantially parallel to a straight line connecting the pair of first magnetic detection cores; The pair of second magnetic detection cores are coupled by a conductor to form a second coupling portion, and the second coupling portion is formed with a second electrode. A magnetic sensor having both ends connected to a lower first electrode.
いに略直交するＸ軸、Ｙ軸があり、Ｘ軸上、Ｙ軸上の原
点より正側、負側に第１及び第２の磁気検出コアをそれ
ぞれ一対ずつ形成し、それぞれ原点部分で導体により結
合して第１及び第２の結合部を形成し、Ｘ軸、Ｙ軸方向
の交差点においてそれぞれ第１の絶縁膜により絶縁さ
れ、Ｘ軸、Ｙ軸方向の片端が互いに接続され、電極と接
続されており、該電極は接地され、もう片端も互いに導
体により結合し電極に結合し、該電極に一定振幅の高周
波駆動電圧を印加する回路を備え、Ｘ軸、Ｙ軸原点を中
心として、スパイラルコイルを形成し、Ｘ軸上、Ｙ軸上
の第１及び第２の磁気検出コアとスパイラルコイル間に
第２の絶縁膜を形成して絶縁したことを特徴とする磁気
センサ。4. The magnetic sensor according to claim 1, wherein there are an X axis and a Y axis that are substantially orthogonal to each other, and the first and second magnetic detections are on the X axis and the Y axis on the positive side and the negative side from the origin. A pair of cores are formed, respectively, and connected by conductors at the origin portions to form first and second joints. The cores are insulated by a first insulating film at intersections in the X-axis and Y-axis directions, respectively. , One end in the Y-axis direction is connected to each other and connected to an electrode, the electrode is grounded, the other end is also connected to each other by a conductor, and is connected to the electrode, and a high-frequency driving voltage having a constant amplitude is applied to the electrode. A spiral coil is formed around the origin of the X-axis and the Y-axis, and a second insulating film is formed between the spiral coil and the first and second magnetic detection cores on the X-axis and the Y-axis. A magnetic sensor characterized by being insulated.
いにほぼ直交するＸ軸、Ｙ軸があり、Ｘ軸上、Ｙ軸上の
原点より正側、負側に第１及び第２の磁気検出コアをそ
れぞれ一対ずつ形成し、それぞれ原点部分で導体により
結合し、Ｘ軸、Ｙ軸方向の交差点においてそれぞれ第１
の絶縁膜により絶縁され、Ｘ軸方向の片端が電極と接続
されており、該電極に一定振幅の高周波駆動電圧を印加
する回路を備え、Ｙ軸方向の片端が電極と接続されてお
り、該電極は接地され、Ｘ軸方向、Ｙ軸方向のもう片端
は導体により結合し、Ｘ軸、Ｙ軸原点を中心として、ス
パイラルコイルを形成し、Ｘ軸上、Ｙ軸上の前記第１及
び第２の磁気検出コアとスパイラルコイル間に第２の絶
縁膜を形成して絶縁したことを特徴とする磁気センサ。5. The magnetic sensor according to claim 1, wherein there are an X axis and a Y axis that are substantially orthogonal to each other, and the first and second magnetic detections are on the X axis and the positive side and the negative side from the origin on the Y axis. A pair of cores are formed and connected by a conductor at the origin, respectively, and at the intersections in the X-axis and Y-axis directions,
The one end in the X-axis direction is connected to the electrode, a circuit for applying a high-frequency driving voltage of a constant amplitude to the electrode is provided, and the other end in the Y-axis direction is connected to the electrode. The electrodes are grounded, and the other ends in the X-axis direction and the Y-axis direction are connected by conductors to form a spiral coil centered on the X-axis and Y-axis origins. A magnetic sensor, wherein a second insulating film is formed between the magnetic detection core and the spiral coil to insulate the magnetic sensor.
かに記載の磁気センサにおいて、前記スパイラルコイル
が、導線を巻回したボビン巻きコイルであることを特徴
とする磁気センサ。6. The magnetic sensor according to claim 1, wherein the spiral coil is a bobbin coil wound around a conductive wire.
て、前記第１の磁気検出コアの幅方向に磁化容易軸を熱
処理によって形成したことを特徴とする磁気センサ。7. The magnetic sensor according to claim 1, wherein an axis of easy magnetization is formed in the width direction of the first magnetic detection core by heat treatment.
磁気センサにおいて、前記第１及び第２の磁気検出コア
の幅方向に磁化容易軸を熱処理によって形成したことを
特徴とする磁気センサ。8. The magnetic sensor according to claim 3, wherein an axis of easy magnetization is formed by heat treatment in a width direction of the first and second magnetic detection cores. Sensor.
て、前記第１の磁気検出コアの幅方向に磁化容易軸を静
磁場中スパッタによって形成したことを特徴とする磁気
センサ。9. The magnetic sensor according to claim 1, wherein an axis of easy magnetization is formed in a width direction of the first magnetic detection core by sputtering in a static magnetic field.
の磁気センサにおいて、前記第１及び第２の磁気検出コ
アの幅方向に磁化容易軸を静磁場中スパッタによって形
成したことを特徴とする磁気センサ。10. The magnetic sensor according to claim 3, wherein an axis of easy magnetization is formed in a width direction of the first and second magnetic detection cores by sputtering in a static magnetic field. Magnetic sensor.
Priority Applications (1)
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|---|---|---|---|
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11200981A JP2001027664A (en) | 1999-07-14 | 1999-07-14 | Magnetic sensor |
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| Publication Number | Publication Date |
|---|---|
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Family
ID=16433540
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2003163391A (en) * | 2001-09-17 | 2003-06-06 | Canon Electronics Inc | Magnetic detecting element and its manufacturing method, and portable equipment using the element |
| JP2004103780A (en) * | 2002-09-09 | 2004-04-02 | Nec Tokin Corp | Magnetic impedance element |
| WO2010110456A1 (en) * | 2009-03-26 | 2010-09-30 | 愛知製鋼株式会社 | Magnetic detection device |
| CN103492895A (en) * | 2011-03-07 | 2014-01-01 | 国立大学法人名古屋大学 | Magnetic detection device |
| JP2018031724A (en) * | 2016-08-26 | 2018-03-01 | 学校法人東北学院 | Magnetic field sensor and bias method |
| JP2018081057A (en) * | 2016-11-18 | 2018-05-24 | 矢崎総業株式会社 | Magnetic-field detection sensor |
-
1999
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| JP4695325B2 (en) * | 2001-09-17 | 2011-06-08 | キヤノン電子株式会社 | Magnetic detection element, method of manufacturing the same, and portable device using the element |
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