JP2001027241A - Hydrostatic bearing device and moving body guide device - Google Patents
Hydrostatic bearing device and moving body guide deviceInfo
- Publication number
- JP2001027241A JP2001027241A JP11198109A JP19810999A JP2001027241A JP 2001027241 A JP2001027241 A JP 2001027241A JP 11198109 A JP11198109 A JP 11198109A JP 19810999 A JP19810999 A JP 19810999A JP 2001027241 A JP2001027241 A JP 2001027241A
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- Prior art keywords
- hole
- metal
- bearing
- moving body
- holes
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、軸を圧力流体の
作用によって回転自在に支持する静圧軸受装置、あるい
は移動体を圧力流体の作用によって移動自在に支持する
移動体案内装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrostatic bearing device for rotatably supporting a shaft by the action of a pressure fluid or a moving body guide device for supporting a moving body movably by the action of a pressure fluid. .
【０００２】[0002]
【従来の技術】まず、従来の静圧軸受装置５０ａは、例
えば、図１２（イ）、（ロ）に示すように、環状の軸受
本体５０の内周面に、場合により単数又は複数の供給孔
Ｋが貫通して形成され、軸受本体５０の内側に、回転軸
５３が所定に間隙Ｇを介して設けられている。なお、前
記供給孔Ｋの周辺かつ軸受本体５０の内周面には、流体
の種類に応じて凹部５１が形成されることもある。2. Description of the Related Art First, as shown in FIGS. 12 (a) and 12 (b), for example, a conventional hydrostatic bearing device 50a supplies one or a plurality of A hole K is formed to penetrate, and a rotating shaft 53 is provided inside the bearing main body 50 with a predetermined gap G therebetween. A concave portion 51 may be formed around the supply hole K and on the inner peripheral surface of the bearing body 50 depending on the type of fluid.
【０００３】そして、図１２（イ）に示すように、軸受
本体５０の各供給孔Ｋから加圧流体（液体又は気体）が
前記間隙Ｇ内に供給され、流体の圧力で回転軸５３が回
転自在に支持される。この場合、回転軸５３は流体の圧
力によって支持されるため、軸受本体５０の内周面に直
接接触することがなく、回転軸５３の回転時の摩擦抵抗
は他の形式の軸受に比べて低い。Then, as shown in FIG. 12A, a pressurized fluid (liquid or gas) is supplied from the supply holes K of the bearing body 50 into the gap G, and the rotating shaft 53 is rotated by the pressure of the fluid. Freely supported. In this case, since the rotating shaft 53 is supported by the pressure of the fluid, there is no direct contact with the inner peripheral surface of the bearing body 50, and the frictional resistance of the rotating shaft 53 during rotation is lower than that of other types of bearings. .
【０００４】つぎに、従来の移動体案内装置５４につい
て説明する。この移動体案内装置５４は、例えば図１３
に示すように、移動体５５の下部に単数又は複数の凹部
５６が形成され、各凹部５６の底面に供給孔Ｋが貫通し
て形成され、移動体５５の下面に固定部材５８が所定の
間隙Ｇを介して設けられている。なお、前記凹部５６は
流体の種類に応じて設けない場合もある。Next, a description will be given of a conventional moving body guide device 54. This mobile object guiding device 54 is, for example, a
As shown in FIG. 7, one or more concave portions 56 are formed in the lower portion of the moving body 55, the supply holes K are formed through the bottom surface of each concave portion 56, and the fixed member 58 is provided on the lower surface of the moving body 55 with a predetermined gap. It is provided through G. The recess 56 may not be provided depending on the type of fluid.
【０００５】そして、同図に示すように、供給孔Ｋから
流体が供給され、流体の圧力によって移動体５５が支持
されて、固定部材５８の上面を移動する。この場合、移
動体５５は流体の圧力によって支持されるため、固定部
材５８の上面に直接接触されることがなく、移動体５５
の移動時の摩擦抵抗は小さい。[0005] Then, as shown in the figure, a fluid is supplied from a supply hole K, and the moving body 55 is supported by the pressure of the fluid and moves on the upper surface of the fixed member 58. In this case, since the moving body 55 is supported by the pressure of the fluid, the moving body 55 does not come into direct contact with the upper surface of the fixing member 58, and the moving body 55
Has low frictional resistance when moving.
【０００６】また、前記流体の種類によっては、静圧軸
受装置および移動体案内装置として安定した性能を得よ
うとするには、軸受剛性（すなわち、荷重変動による回
転軸５３および移動体５５の変位のしにくさを表す量）
を高くして、荷重が変動しても回転軸５３および移動体
５５の変位を小さく抑えるため、供給孔Ｋに流体絞り
（図示せず）を設けることもある。Further, depending on the type of the fluid, in order to obtain stable performance as a hydrostatic bearing device and a moving body guide device, the rigidity of the bearing (that is, the displacement of the rotating shaft 53 and the moving body 55 due to load fluctuation) is required. Amount indicating difficulty)
In order to reduce the displacement of the rotary shaft 53 and the moving body 55 even when the load fluctuates, a fluid throttle (not shown) may be provided in the supply hole K.
【０００７】なお、図１２および図１３に示す前記従来
例のいずれの場合も、液体の供給孔Ｋは機械的に穿孔し
て成形するのが一般的である。[0007] In each of the conventional examples shown in FIGS. 12 and 13, the liquid supply hole K is generally formed by mechanically drilling.
【０００８】[0008]
【発明が解決しようとする課題】従来の前記静圧軸受装
置５０ａおよび前記移動体案内装置５４のいずれの場合
も、流体の供給孔Ｋを機械的に穿孔して成形する穿孔工
程が必要になり、製作費が高くなるという問題がある。In both the conventional hydrostatic bearing device 50a and the moving body guide device 54, a drilling step of mechanically drilling and forming a fluid supply hole K is required. However, there is a problem that the production cost is high.
【０００９】また、静圧軸受装置および移動体案内装置
として安定した性能を得ようとするには、供給孔Ｋの数
をできるだけ多くして、回転軸５３と軸受本体５０との
間隙、および移動体５５と固定部材５８との間隙におけ
る圧力分布を均一とするとともに、荷重変動による回転
軸５３および移動体５５の変位を調整する必要がある。
このためには、軸受本体５０および移動体５５に多数の
供給孔Ｋを形成することが考えられるが、前記供給孔Ｋ
は機械的に穿孔して形成されているため、軸受本体５０
および移動体５５に多数の供給孔Ｋを形成するのは困難
であるという問題がある。Further, in order to obtain stable performance as the hydrostatic bearing device and the moving body guide device, the number of supply holes K is increased as much as possible, and the gap between the rotating shaft 53 and the bearing main body 50 and the movement of the bearing body 50 are increased. It is necessary to make the pressure distribution in the gap between the body 55 and the fixed member 58 uniform and to adjust the displacement of the rotating shaft 53 and the moving body 55 due to the load fluctuation.
To this end, it is conceivable to form a large number of supply holes K in the bearing body 50 and the moving body 55.
Is formed by mechanically piercing the bearing body 50.
In addition, it is difficult to form a large number of supply holes K in the moving body 55.
【００１０】また、供給孔Ｋに前記流体絞りを設ける場
合においても、前記流体絞りは機械的に加工して形成さ
れるため、特に、軸受本体５０および移動体５５に多数
の供給孔Ｋを設ける場合には形成が困難であるという問
題がある。In the case where the fluid restrictor is provided in the supply hole K, since the fluid restrictor is formed by mechanical processing, in particular, a large number of supply holes K are provided in the bearing body 50 and the moving body 55. In such a case, there is a problem that formation is difficult.
【００１１】さらに、例えば軸受本体５０の凹部５１お
よび移動体５５の凹部５６に連接して多孔質材料からな
る部材を設置することが考えられるが、前記多孔質材料
においては流体の経過通路が複雑で、回転軸５３と軸受
本体５０との間隙、および移動体５５と固定部材５８と
の間隙における流体の圧力分布が均一とはならず、ま
た、流体通過時にエネルギーの損失が大きいという問題
がある。Further, for example, it is conceivable to install a member made of a porous material so as to be connected to the concave portion 51 of the bearing body 50 and the concave portion 56 of the moving body 55. In the porous material, the passage of the fluid is complicated. Therefore, there is a problem that the pressure distribution of the fluid in the gap between the rotating shaft 53 and the bearing main body 50 and the gap between the moving body 55 and the fixed member 58 are not uniform, and there is a problem that a large energy loss occurs when the fluid passes. .
【００１２】そこで、本発明の目的は、前記の点を鑑
み、多数の貫通孔を容易に、且つ、安価に形成できると
共に、安定性を高め、且つ、エネルギー損失を小さくで
きる静圧軸受および移動体案内装置を提供することであ
る。In view of the foregoing, it is an object of the present invention to provide a hydrostatic bearing which can easily and inexpensively form a large number of through holes, enhances stability, and reduces energy loss. The object is to provide a body guidance device.
【００１３】[0013]
【課題を解決するための手段】前記課題を解決するため
に、請求項１記載の静圧軸受装置Ｊは、供給される圧力
流体の作用によって、軸２を回転自在に支持する軸受本
体１を有する静圧軸受装置Ｊであって、前記軸受本体１
は、溶融状態の金属にガス原子を溶け込ませて凝固して
生成されたポーラス金属からなり、該金属のポアが前記
圧力流体の通路となる貫通孔Ｈを構成し、該貫通孔Ｈ
は、中心線がほぼ直線状に形成されているものである。According to a first aspect of the present invention, there is provided a hydrostatic bearing device which includes a bearing body for rotatably supporting a shaft by the action of a supplied pressure fluid. Hydrostatic bearing device J having the bearing body 1
Is composed of a porous metal formed by dissolving gas atoms in a molten metal and solidifying the gas atoms, and the pores of the metal constitute a through hole H serving as a passage for the pressure fluid.
Has a center line formed substantially linearly.
【００１４】したがって、溶融状態の金属にガス原子を
溶け込ませて凝固して生成されたポーラス金属によって
軸受本体１を形成し、前記金属のポアが圧力流体の通路
となる貫通孔Ｈを構成しているため、従来必要であった
機械による穿孔工程が不用になり、安価になる。さら
に、従来困難であった微小な径の貫通孔Ｈを簡単に、し
かも、多数形成することもできる。Accordingly, the bearing body 1 is formed of a porous metal produced by dissolving gas atoms in a molten metal and solidifying the gas metal, and the pores of the metal constitute a through hole H serving as a passage for a pressure fluid. This eliminates the need for a perforating process using a machine, which has been conventionally required, and reduces the cost. Further, a large number of through holes H having a small diameter, which has been difficult in the past, can be formed easily.
【００１５】さらに、前記貫通孔Ｈは、中心線がほぼ直
線状に形成されているため、流体供給時のエネルギー損
失が小さい静圧軸受装置を得ることができる。Further, since the center line of the through hole H is formed substantially linearly, it is possible to obtain a hydrostatic bearing device in which energy loss during fluid supply is small.
【００１６】また、請求項２記載の静圧軸受Ｊは、前記
軸受本体１が、分割可能に構成されているものである。Further, in the hydrostatic bearing J according to a second aspect, the bearing body 1 is configured to be dividable.
【００１７】したがって、例えば、図７に示すように、
多数の貫通孔Ｈが平行状に形成された複数の軸受本体１
ｄを、前記貫通孔Ｈが軸２の中心に対しておおむね放射
状になるように配置すれば、例えば、軸２の径が大きく
軸受本体１ｄを一体に製造することが経済上その他の理
由で困難な場合でも、前記軸２を回転自在に安定して支
持するのに、より適した軸受本体を得ることができる。Therefore, for example, as shown in FIG.
A plurality of bearing bodies 1 in which a large number of through holes H are formed in parallel
If the through holes H are arranged so that the through holes H are substantially radial with respect to the center of the shaft 2, for example, it is difficult to integrally manufacture the bearing body 1d with a large diameter of the shaft 2 for economic and other reasons. Even in such a case, it is possible to obtain a more suitable bearing body for stably supporting the shaft 2 rotatably.
【００１８】また、例えば、多数の貫通孔Ｈが平行状に
形成された軸受本体を分割し、分割された複数の軸受本
体を、前記貫通孔Ｈが軸２に対しておおむね放射状にな
るように配置すれば、軸２を支持することができる。Further, for example, a bearing body in which a large number of through holes H are formed in parallel is divided, and the divided plurality of bearing bodies are divided so that the through holes H are substantially radial with respect to the shaft 2. If it arrange | positions, the shaft 2 can be supported.
【００１９】また、例えば、図６に示すように、分割さ
れた複数の軸受本体１ａを、同一円周上に配置すれば、
軸１０を支持することができる。For example, as shown in FIG. 6, if a plurality of divided bearing bodies 1a are arranged on the same circumference,
The shaft 10 can be supported.
【００２０】さらに、請求項３記載の静圧軸受装置Ｊ
は、前記貫通孔Ｈが平行状又は放射状に形成されている
ものである。Furthermore, the hydrostatic bearing device J according to claim 3
The through holes H are formed in parallel or radially.
【００２１】したがって、例えば、環状の軸受本体１
に、該本体１の中心に対して放射状（径方向）に貫通孔
Ｈを形成すれば、前記軸受本体１の内側に軸２を回転自
在に安定して支持するのに、より適した軸受本体が得ら
れる。Therefore, for example, the annular bearing body 1
If the through-holes H are formed radially (radially) with respect to the center of the main body 1, a more suitable bearing main body for rotatably and stably supporting the shaft 2 inside the bearing main body 1. Is obtained.
【００２２】さらに、請求項４記載の静圧軸受装置Ｊ
は、前記貫通孔Ｈの径が、開口始端Ｓから開口終端Ｅの
間で相異する部分を有するようにしたものである。Furthermore, the hydrostatic bearing device J according to claim 4
Is such that the diameter of the through hole H has a portion different from the opening start end S to the opening end E.
【００２３】したがって、例えば、開口終端Ｅにおける
前記貫通孔Ｈの径を、開口始端Ｓに比べて細くすれば、
前記圧力流体の通路に流体絞りを与えることができ、所
望の軸受剛性が得られる。すなわち、荷重が変動しても
軸の変位を小さく抑えることができる。Therefore, for example, if the diameter of the through hole H at the end E of the opening is made smaller than that at the start S of the opening,
A fluid restriction can be provided to the passage of the pressure fluid, and a desired bearing rigidity can be obtained. That is, even if the load changes, the displacement of the shaft can be kept small.
【００２４】さらに、請求項５記載の移動体案内装置Ｉ
は、供給される圧力流体の作用によって、移動体２２が
固定部材２０に対し相対移動自在に支持された移動体案
内装置Ｉであって、前記固定部材２０および前記移動体
２２の少なくとも一方が、溶融状態の金属にガス原子を
溶け込ませて凝固して生成されたポーラス金属からな
り、該金属のポアが前記圧力流体の通路となる貫通孔Ｈ
を構成し、該貫通孔Ｈは、中心線がほぼ直線状に形成さ
れているものである。Further, the mobile object guiding device I according to claim 5 is provided.
Is a moving body guide device I in which the moving body 22 is supported so as to be relatively movable with respect to the fixed member 20 by the action of the supplied pressure fluid, and at least one of the fixed member 20 and the moving body 22 is It is made of a porous metal formed by dissolving gas atoms in a molten metal and solidifying the gas atoms, and the pores of the metal are formed as through-holes H serving as passages for the pressure fluid.
The through-hole H has a substantially straight center line.
【００２５】したがって、溶融状態の金属にガス原子を
溶け込ませて凝固して生成されたポーラス金属によっ
て、固定部材２０および移動体２２の少なくとも一方を
形成し、前記金属のポアが圧力流体の通路となる貫通孔
Ｈを構成しているため、従来必要であった機械による穿
孔工程が不用になり、安価になる。さらに、従来困難で
あった微小な径の貫通孔Ｈを簡単に、しかも、多数形成
することもできる。Therefore, at least one of the fixed member 20 and the moving body 22 is formed by the porous metal formed by dissolving gas atoms in the molten metal and solidifying the same, and the pores of the metal are formed in the passage of the pressure fluid. Since the through hole H is formed, a drilling step by a machine which is conventionally required becomes unnecessary, and the cost is reduced. Further, a large number of through holes H having a small diameter, which has been difficult in the past, can be formed easily.
【００２６】また、前記貫通孔Ｈは、中心線がほぼ直線
状に形成されているため、流体供給時のエネルギー損失
が小さい移動体案内装置を得ることができる。Further, since the center line of the through hole H is formed substantially linearly, it is possible to obtain a moving body guiding device with small energy loss at the time of supplying the fluid.
【００２７】さらに、前記貫通孔Ｈを、平行状又は放射
状に形成することもできる。例えば、環状の移動体２２
に、該移動体２２の中心に対して放射状（径方向）に貫
通孔Ｈを形成すれば、前記固定部材２０の周囲に前記移
動体２２を相対移動自在に安定して支持するのに、より
適した移動体案内装置が得られる。Further, the through holes H may be formed in parallel or radially. For example, the annular moving body 22
If the through-hole H is formed radially (radially) with respect to the center of the moving body 22, the moving body 22 can be stably supported around the fixed member 20 so as to be relatively movable. A suitable mobile guidance device is obtained.
【００２８】また、前記貫通孔Ｈの開口始端Ｓと開口終
端Ｅの間で相異する部分を設けることもできる。例え
ば、開口終端Ｅにおける前記貫通孔Ｈの径を、開口始端
Ｓに比べて細くすれば、前記圧力流体の通路に流体絞り
を与えることができる。すなわち、荷重が変動しても移
動体２２の変位を小さく抑えることができる。Further, different portions may be provided between the opening start end S and the opening end E of the through hole H. For example, if the diameter of the through hole H at the end E of the opening is made smaller than that at the start S of the opening, a fluid throttle can be provided to the passage of the pressure fluid. That is, even if the load changes, the displacement of the moving body 22 can be suppressed to a small value.
【００２９】また、例えば、前記移動体２２を、複数に
分割された前記ポーラス金属から構成し、前記各ポーラ
ス金属を、該金属が有する平行した多数の貫通孔Ｈを固
定体２０に対しておおむね放射状になるよう配置すれ
ば、移動体２２を安定した状態で支持できる。Further, for example, the moving body 22 is composed of the porous metal divided into a plurality of parts, and each of the porous metals is formed by forming a large number of parallel through holes H of the metal with respect to the fixed body 20. By arranging them radially, the moving body 22 can be supported in a stable state.
【００３０】[0030]
【発明の実施の形態】つぎに、実施の形態につき図１か
ら図１０を参照して説明する。 ＜第一実施形態＞まず、第一実施形態の静圧軸受装置Ｊ
は、ジャーナル軸受として使用されるもので、図１に示
すように、内部に中心線がほぼ直線状の貫通孔Ｈを無数
に有する筒状の軸受本体１と、該本体１の内周面に設け
られた回転軸２と、前記本体１に取り付けられた筺体３
とからなり、軸受本体１と回転軸２との間には間隙Ｇが
形成される。なお、筺体３には流体供給用ポンプ，制御
器などの装置が接続される（図示しない）。また、前記
軸受本体１，前記回転軸２の形状は図示に限定されるも
のではない。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment will be described with reference to FIGS. First Embodiment First, the hydrostatic bearing device J of the first embodiment
Are used as journal bearings. As shown in FIG. 1, a cylindrical bearing main body 1 having an innumerable through-hole H having a substantially straight center line therein, and an inner peripheral surface of the main body 1 The provided rotating shaft 2 and the housing 3 attached to the main body 1
A gap G is formed between the bearing main body 1 and the rotating shaft 2. In addition, devices such as a fluid supply pump and a controller are connected to the housing 3 (not shown). Further, the shapes of the bearing main body 1 and the rotating shaft 2 are not limited to those illustrated.
【００３１】前記軸受本体１が、例えば、特開平１０−
８８２５４号広報（ポーラス金属の製造方法）に記載の
ように、溶融状態の金属にガス原子を溶け込ませて凝固
して生成されたポーラス金属によって形成されているた
め、前記金属のポア（気孔）が圧力流体の通路となる貫
通孔Ｈを構成することになる。よって、従来必要であっ
た機械による穿孔工程が不用になり、容易に微小な径の
貫通孔Ｈを形成することができる。The bearing body 1 is disclosed in, for example,
As described in Japanese Patent Publication No. 88254 (a method for producing a porous metal), since a porous metal is formed by dissolving gas atoms into a molten metal and solidifying the gas atoms, pores of the metal are formed. Thus, a through hole H serving as a passage for the pressure fluid is formed. Therefore, the perforation process using a machine, which is conventionally required, becomes unnecessary, and the through hole H having a small diameter can be easily formed.
【００３２】前記ポーラス金属の構成金属（母材ｂａｓ
ｅ ｍｅｔａｌ）は、静圧軸受装置Ｊの要求性能に応じ
て、例えばステンレス鋼や銅系合金などを選択すること
ができる。また、前記間隙Ｇの寸法および前記貫通孔Ｈ
の孔径，数，分布などは、目的とする軸受に要求される
性能から決定される。なお、前記本体１の全体を前記ポ
ーラス金属で形成してもよく、前記本体１の一部をポー
ラス金属で形成してもよい。The constituent metal of the porous metal (base metal
e metal) can be selected, for example, from stainless steel or a copper-based alloy according to the required performance of the hydrostatic bearing device J. Further, the size of the gap G and the through hole H
The hole diameter, number, distribution, etc. of are determined by the performance required for the target bearing. In addition, the whole of the main body 1 may be formed of the porous metal, or a part of the main body 1 may be formed of the porous metal.
【００３３】前記回転軸２は、各貫通孔Ｈから供給され
た流体（液体又は気体）の圧力によって回転自在に支持
されている。The rotary shaft 2 is rotatably supported by the pressure of the fluid (liquid or gas) supplied from each through hole H.
【００３４】前記ポーラス金属の製造過程において用い
るガスの種類は、水素，酸素，不活性ガス，又はそれら
の混合ガスのうちから、生成すべき孔の径や分布密度あ
るいは金属の種類に応じて選択して用いる。The type of gas used in the production process of the porous metal is selected from hydrogen, oxygen, inert gas, or a mixed gas thereof in accordance with the diameter and distribution density of pores to be generated or the type of metal. Used.
【００３５】また、ガスの圧力は生成すべき孔の径や分
布密度あるいは金属の種類に応じて選択する。例えば、
軸受本体１の構成金属に銅を、また、加圧ガスに水素Ｈ
2 を用いた場合、ガス圧力０．４ＭＰａでは参考写真１
に示すように、ポアの径は０．３ｍｍ程度であるが、ガ
ス圧力０．８ＭＰａでは参考写真２に示すように、ポア
の径は０．１ｍｍ程度と細かくすることができる。The gas pressure is selected according to the diameter and distribution density of pores to be generated or the type of metal. For example,
Copper is used as a constituent metal of the bearing body 1 and hydrogen H is used as a pressurized gas.
Reference photo 1 at gas pressure 0.4MPa when using 2
As shown in FIG. 2, the diameter of the pore is about 0.3 mm. However, at a gas pressure of 0.8 MPa, as shown in Reference Photo 2, the diameter of the pore can be made as small as about 0.1 mm.
【００３６】さらに、ガスの圧力を高めるなど凝固条件
の設定により、微小な径のポア、例えば、従来困難であ
った数μｍのポアを一様に分布させたりすることも容易
にできる。Further, by setting coagulation conditions such as increasing the gas pressure, it is easy to uniformly distribute pores having a small diameter, for example, pores of several μm, which have been difficult in the past.
【００３７】つぎに、静圧軸受装置Ｊの製造方法につい
て図２を参照して説明する。加圧ガス雰囲気のもとに溶
融した金属を所要の形状寸法の鋳型に注入し、一方向か
ら冷却して凝固させる。この場合、筒状の鋳型を用い、
例えば、鋳型の中心部から冷却し外側へ向かって凝固さ
せると、図２（イ）に示すように、内部にほぼ直線状に
連続したポアＨ’が放射状に形成されたドーナツ型また
は筒型のポーラス金属Ａが得られる。Next, a method of manufacturing the hydrostatic bearing device J will be described with reference to FIG. In a pressurized gas atmosphere, molten metal is poured into a mold having a required shape and size, and cooled and solidified in one direction. In this case, use a cylindrical mold,
For example, when cooled from the center of the mold and solidified outward, as shown in FIG. 2 (a), a donut-shaped or cylindrical-shaped one in which substantially linearly continuous pores H 'are formed radially inside. Porous metal A is obtained.
【００３８】つぎに、図２（ロ）に示すように、円筒形
状のポーラス金属Ａを、例えば、ワイヤカット、その他
材料の塑性変形によりポアＨ’が悪影響を受けない方法
で、環状の金属Ｂに切断し、その後、図２（ハ）に示す
ように、例えば、公知の放電加工あるいは研削加工、そ
の他材料の塑性変形によりポアＨ’が塞がれたり悪影響
を受けない方法で、環状の金属Ｂの外周面および内周面
の一部を除去し、図２（ニ）に示すように、所定の寸法
にするとともに、ポアＨ’を外周面（開口始端Ｓ）から
内周面（開口終端Ｅ）まで貫通させて、貫通孔Ｈを形成
する。Next, as shown in FIG. 2B, a cylindrical porous metal A is formed into a ring-shaped metal B by a method in which the pore H 'is not adversely affected by, for example, wire cutting or other plastic deformation of the material. Then, as shown in FIG. 2 (c), for example, by using a known method such as electric discharge machining or grinding or plastic deformation of the material, the pore H ′ is not closed or adversely affected by the annular metal. 2B, a part of the outer peripheral surface and the inner peripheral surface is removed, and as shown in FIG. E) to form a through hole H.
【００３９】つぎに、図２（ホ）に示すように、加工さ
れた環状の金属Ｃ（軸受本体１）の外側に、流体の供給
孔Ｋを有する筺体３を取り付ける。ここで、金属Ｃと筺
体３の当接面にシールが必要な場合は、公知のシール部
材（図示せず）でシールする。Next, as shown in FIG. 2 (e), a housing 3 having a fluid supply hole K is attached to the outside of the processed annular metal C (bearing main body 1). Here, if a seal is required on the contact surface between the metal C and the housing 3, it is sealed with a known seal member (not shown).
【００４０】なお、前記第一実施形態の場合、本発明の
静圧軸受をジャーナル軸受に適用した例を説明したが、
スラスト軸受にも適用できる。このスラスト軸受の一例
について以下に説明する。例えば、図３に示すスラスト
軸受装置Ｊａは、円板状の軸受本体１ａと、該本体１ａ
に所定の間隙Ｇを介して設けられた回転体５と、前記本
体１ａに取り付けられた筺体３ａとからなる。In the case of the first embodiment, an example in which the hydrostatic bearing of the present invention is applied to a journal bearing has been described.
Also applicable to thrust bearings. An example of this thrust bearing will be described below. For example, a thrust bearing device Ja shown in FIG. 3 includes a disc-shaped bearing main body 1a and the main body 1a.
A rotating body 5 provided with a predetermined gap G therebetween, and a housing 3a attached to the main body 1a.
【００４１】前記軸受本体１ａには、該本体１ａの軸方
向に無数の貫通孔Ｈが形成され、筺体３ａの上面開口部
３ｂの周縁部に前記本体１ａを取り付け、前記本体１ａ
の上面に回転体５を設け、本体１ａの各貫通孔Ｈから供
給された流体の圧力によって回転体５を回転自在に支持
する。The bearing main body 1a has an infinite number of through holes H formed in the axial direction of the main body 1a. The main body 1a is attached to a peripheral portion of the upper opening 3b of the housing 3a.
The rotating body 5 is provided on the upper surface of the main body 1a, and the rotating body 5 is rotatably supported by the pressure of the fluid supplied from each through hole H of the main body 1a.
【００４２】つぎに、前記軸受本体１ａの製造方法につ
いて図４を参照して説明する。前記ポーラス金属の製造
過程において、断面が円形その他の形状をした筒状の鋳
型を用い、例えば底部から冷却し上部へ向かって凝固さ
せると、図４（イ）に示すように、その長手方向に平行
状に配置され連続したポアＨ’をもつ柱状のポーラス金
属Ａができる。Next, a method of manufacturing the bearing body 1a will be described with reference to FIG. In the process of manufacturing the porous metal, when a cylindrical mold having a circular or other cross section is used and cooled from the bottom and solidified toward the top, for example, as shown in FIG. The columnar porous metal A having the continuous pores H ′ arranged in parallel is obtained.
【００４３】そして、図４（ロ）に示すように、柱状の
金属Ａを、例えば、ワイヤカット、研削加工、その他材
料の塑性変形によりポアＨ’が悪影響を受けない方法
で、環状の金属Ｂに切断，加工し、所定の寸法にすると
ともに、ポアＨ’を軸受面（開口始端Ｓ）から筺体側の
面（開口終端Ｅ）まで貫通させて、貫通孔Ｈを形成す
る。その後、環状の金属Ｂの全周面を研削加工など材料
の塑性変形によりポアＨ’が塞がれたり悪影響を受けな
い方法により加工し、所定の寸法にする。Then, as shown in FIG. 4 (b), the columnar metal A is formed into an annular metal B by a method in which the pore H 'is not adversely affected by, for example, wire cutting, grinding, or other plastic deformation of the material. The hole H ′ is formed by cutting the hole H ′ from the bearing surface (opening end S) to the surface on the housing side (opening end E). Thereafter, the entire peripheral surface of the ring-shaped metal B is processed by a method such as grinding to prevent the pores H 'from being blocked or adversely affected by plastic deformation of the material, thereby obtaining predetermined dimensions.
【００４４】つぎに、図４（ハ）に示すように、環状の
金属Ｂの支持面と反対側に，筺体３ａを取り付ける。Next, as shown in FIG. 4C, the housing 3a is mounted on the side opposite to the support surface of the annular metal B.
【００４５】さらに、他のスラスト軸受の例について説
明する。図５（イ），（ロ）に示すスラスト軸受装置Ｊ
ｂは、環状の大径の軸受本体１ｂの軸方向に多数の貫通
孔Ｈを形成し、被支持体１０の軸１１を軸受本体１ｂの
透孔１ｃに遊挿し、被支持体１０を軸受本体１ｂに対向
するように位置させ、前記各貫通孔Ｈから流体を供給
し、被支持体１０および軸１１を回転自在に支持するよ
うにしてもよい。Next, another example of a thrust bearing will be described. Thrust bearing device J shown in FIGS. 5 (a) and 5 (b)
b, a large number of through holes H are formed in the axial direction of the annular large-diameter bearing body 1b, the shaft 11 of the supported body 10 is loosely inserted into the through hole 1c of the bearing body 1b, and the supported body 10 is connected to the bearing body 1b. 1b, the fluid may be supplied from each of the through holes H, and the supported member 10 and the shaft 11 may be rotatably supported.
【００４６】また、図６に示すスラスト軸受装置Ｊｃ
は、複数の円板状の小径の軸受本体１ａを、被支持体１
０の軸１１の軸心を中心とする同一円周上に配設し、被
支持体１０を、各軸受本体１ａに対向するように位置さ
せ、軸受本体１ａの軸方向に形成された無数の貫通孔Ｈ
から流体を供給し、被支持体１０および軸１１を回転自
在に支持している。The thrust bearing device Jc shown in FIG.
A plurality of disc-shaped small-diameter bearing bodies 1a
The bearings 10 are disposed on the same circumference centered on the axis of the 0 shaft 11, and the supported members 10 are positioned so as to face the respective bearing bodies 1a, and countless formed in the axial direction of the bearing bodies 1a. Through hole H
To supply the fluid to support the supported body 10 and the shaft 11 rotatably.
【００４７】前述本発明のジャーナル軸受への適用例に
おいて、軸受本体１は、前記放射状に生成されたポア
Ｈ’をもつポーラス金属を加工して得たが、図７に示す
ように、前記平行状に連続したポアＨ’をもつ柱状のポ
ーラス金属を加工した軸受本体１ｄを軸２のまわりに、
貫通孔Ｈがおおむね放射状となるよう配置してもよい。
なお、３ｄは各軸受本体１ｄを保持する筐体である。In the above-described application example of the present invention to a journal bearing, the bearing body 1 is obtained by processing the porous metal having the pores H ′ generated radially. As shown in FIG. A bearing body 1d formed by processing a columnar porous metal having a continuous pore H 'around the shaft 2 around the shaft 2,
The through holes H may be arranged so as to be substantially radial.
Reference numeral 3d denotes a housing for holding each bearing body 1d.
【００４８】さらに、自在軸受装置の例について説明す
る。図８に示す自在軸受装置Ｊｅは、前記ポーラス金属
からなる中空球形状の自在軸受本体１ｅと、該本体１ｅ
に取り付けられた筐体３ｅと、端部１０１が球形に成形
された軸２ｅとからなる。そして、前記本体１ｅには、
多数の貫通孔Ｈが放射状に形成されており、前記軸２ｅ
の端部１０１が前記自在軸受本体１ｅの中空部１ｆに遊
挿されている。そして、前記筐体３ｅの各供給孔Ｋ，前
記本体１ｅの各貫通孔Ｈから流体を供給し、軸２ｅを任
意の方向に回転自在に支持することができる。Next, an example of the universal bearing device will be described. The universal bearing device Je shown in FIG. 8 includes a hollow spherical universal bearing main body 1e made of the porous metal, and the main body 1e.
And a shaft 2e whose end portion 101 is formed into a spherical shape. And, in the main body 1e,
A large number of through holes H are formed radially, and the shaft 2e
Is loosely inserted into the hollow portion 1f of the universal bearing body 1e. Fluid is supplied from each supply hole K of the housing 3e and each through hole H of the main body 1e, and the shaft 2e can be rotatably supported in any direction.
【００４９】なお、図８に示す例とは逆に、軸２ｅの端
部１０１を、多数の貫通孔Ｈが放射状に形成された前記
ポーラス金属からなる球形状とし、それを中空球形状の
自在軸受本体１ｅに遊挿してもよい。In contrast to the example shown in FIG. 8, the end 101 of the shaft 2e is formed into a spherical shape made of the porous metal in which a large number of through holes H are radially formed. It may be loosely inserted into the bearing body 1e.
【００５０】＜第二実施形態＞つぎに、第二実施形態の
移動体案内装置Ｉは、図９に示すように、例えば、レー
ル等の固定部材２０と、単数又は複数の移動体案内部材
２１と、該移動体案内部材２１が取り付けられた移動体
２２とからなる。なお、固定部材２０，移動体案内部材
２１，移動体２２の形状は、図示に限定されるものでは
ない。<Second Embodiment> Next, as shown in FIG. 9, a moving body guide device I according to a second embodiment includes a fixed member 20 such as a rail and a single or plural moving body guide members 21. And a moving body 22 to which the moving body guide member 21 is attached. The shapes of the fixed member 20, the moving body guide member 21, and the moving body 22 are not limited to those illustrated.
【００５１】前記移動体２２は、基板２２ａと、基板２
２ａの両側に形成された側壁２２ｂとからなり、基板２
２ａおよび側壁２２ｂにそれぞれ凹部２２ｃが形成さ
れ、各凹部２２ｃの内側にそれぞれ移動体案内部材２１
が取り付けられている。そして、移動体案内部材２１に
は、流体を供給する無数の貫通孔Ｈが形成されている。
なお、前記移動体案内部材２１の数および取付け位置
は、必ずしも移動体２２の上部および側部に限るわけで
はなく、移動体案内装置Ｉの要求性能に応じて決定し、
例えば上部だけとしてよい。The moving body 22 includes a substrate 22a and a substrate 2
2a formed on both sides of the substrate 2a.
A concave portion 22c is formed in each of the side walls 22a and the side wall 22b.
Is attached. The moving body guide member 21 has countless through holes H for supplying a fluid.
In addition, the number and the mounting position of the moving body guide member 21 are not necessarily limited to the upper part and the side part of the moving body 22, but are determined according to the required performance of the moving body guide device I,
For example, only the upper part may be used.
【００５２】そして、流体は、各移動体案内部材２１の
凹部２２ｃから貫通孔Ｈを経て、移動体案内部材２１と
固定部材２０との間隙Ｇに供給され、移動体２２が流体
の圧力により支持されて固定部材２０に対し相対移動す
る。The fluid is supplied from the concave portion 22c of each movable body guide member 21 to the gap G between the movable body guide member 21 and the fixed member 20 through the through hole H, and the movable body 22 is supported by the pressure of the fluid. Then, it moves relatively to the fixing member 20.
【００５３】前記移動体案内部材２１は、前記溶融状態
の金属にガス原子を溶け込ませて凝固して生成されたポ
ーラス金属によって形成されているため、前記金属のポ
アにより圧力流体の通路となる貫通孔Ｈを容易に構成す
ることができる。Since the moving body guide member 21 is formed of a porous metal formed by dissolving gas atoms in the molten metal and solidifying the gas atom, the through hole which serves as a passage for a pressure fluid is formed by the pores of the metal. The hole H can be easily formed.
【００５４】つぎに、製造方法については、図４の場合
と同様にして製造し、所定形状に成形したポーラス金属
（移動体案内部材２１）を、図９（ロ）に示すように、
移動体２２の内側に取り付ける。Next, as for the manufacturing method, a porous metal (moving body guide member 21) manufactured in the same manner as in the case of FIG. 4 and formed into a predetermined shape, as shown in FIG.
It is attached inside the moving body 22.
【００５５】つぎに、前記形態２の変形例について、固
定部材２０に移動体案内部材２１を設けた移動体案内装
置Ｉａを以下に説明する。この移動体案内装置Ｉａは、
図１０に示すように、固定部材２０の上面および同側面
に移動体案内部材２１を設け、固定部材２０の内部に流
体の供給路３０を複数形成している。そして、流体は、
各供給路３０から各移動体案内部材２１の貫通孔Ｈを経
て、移動体２２と移動体案内部材２１との間隙Ｇに供給
され、移動体２２が流体の圧力により支持されて固定部
材２０に対し相対移動する。Next, a modification of the second embodiment will be described below with reference to a moving body guiding device Ia in which a moving body guiding member 21 is provided on a fixed member 20. This mobile unit guidance device Ia
As shown in FIG. 10, a movable body guide member 21 is provided on the upper surface and the same side surface of the fixed member 20, and a plurality of fluid supply paths 30 are formed inside the fixed member 20. And the fluid is
Each of the supply paths 30 is supplied to the gap G between the movable body 22 and the movable body guide member 21 through the through hole H of each movable body guide member 21, and the movable body 22 is supported by the fluid pressure and fixed to the fixed member 20. Relative movement.
【００５６】さらに、前記形態２の他の変形例は、図１
に示したジャーナル軸受の例とほぼ同じ構成をもつもの
で、軸２に代えてレール等の固定部材２０が、また、軸
受本体１に代えて移動体２２からなり、前述例と同様
に、貫通孔Ｈから供給される圧力流体の作用により、該
移動体２２は前記固定部材２０に対し移動自在に支持さ
れる。この場合、移動体２２は回転自在であってもよ
い。Further, another modification of the second embodiment is shown in FIG.
The bearing has substantially the same configuration as that of the example of the journal bearing shown in FIG. 1, and includes a fixing member 20 such as a rail in place of the shaft 2 and a moving body 22 in place of the bearing main body 1. The moving body 22 is movably supported by the fixed member 20 by the action of the pressure fluid supplied from the hole H. In this case, the moving body 22 may be rotatable.
【００５７】前記実施の形態１，２のいずれの場合も、
前記貫通孔Ｈの孔径は一定である必要はなく、図１１
（イ）に示すように、異なる孔径の貫通孔、例えば、Ｈ
１〜Ｈ４をランダムに形成することができる。In each of the first and second embodiments,
The diameter of the through hole H does not need to be constant,
As shown in (a), through holes having different hole diameters, for example, H
1 to H4 can be formed at random.
【００５８】また、前記貫通孔Ｈは、開口始端Ｓから開
口終端Ｅにかけて孔径を変化させることができる。例え
ば、図１１（ロ）に示すように、開口始端Ｓの径を大き
く、開口終端Ｅの径を小さく形成することもできる。The diameter of the through hole H can be changed from the opening start end S to the opening end E. For example, as shown in FIG. 11B, the diameter of the opening start end S can be made large and the diameter of the opening end E can be made small.
【００５９】さらに、前記貫通孔Ｈは、例えば、図１１
（ハ）に示すように、開口始端Ｓや開口終端の径に比べ
て開口始端Ｓと開口終端Ｅとの中間部Ｔの径を細く形成
することもできる。Further, the through hole H is formed, for example, as shown in FIG.
As shown in (c), the diameter of the intermediate portion T between the opening start end S and the opening end E can be made smaller than the diameter of the opening start end S and the opening end.
【００６０】前記貫通孔Ｈの孔径を変化させる方法につ
いて以下に説明する。ポーラス金属を鋳型の底部から冷
却し上部へ向かって凝固させる場合、凝固時の圧力を連
続的に低減すると、金属凝固時に形成されるポアの形状
は、鋳型底部においてはノンポーラス状で、上部に向か
うに従って径が大きくなる円錐状のポアが得られる。ま
た、凝固途中で、圧力を上昇させた後、再度低減させる
と鼓形の孔を得ることができる。A method for changing the diameter of the through hole H will be described below. When the porous metal is cooled from the bottom of the mold and solidified toward the top, if the pressure at the time of solidification is continuously reduced, the shape of the pore formed at the time of solidification of the metal is non-porous at the bottom of the mold, and A conical pore whose diameter increases as it goes is obtained. In addition, when the pressure is increased during the coagulation and then reduced again, a drum-shaped hole can be obtained.
【００６１】その後、前述の加工方法により、上記ポー
ラス金属のノンポーラス状の部分を所定の径となるよう
除去しポアを貫通させるとともに、目的の円錐状その他
の形状の貫通孔Ｈを有する部材に成形加工する。Thereafter, the non-porous portion of the porous metal is removed so as to have a predetermined diameter by the above-described processing method so as to penetrate the pore, and at the same time, to a member having a desired conical or other shaped through-hole H. Forming.
【００６２】前記孔径の変化する貫通孔Ｈは、径が一定
のポアをもつポーラス金属から、エッチングの技術によ
り作ることもできる。The through-hole H having a variable hole diameter can be formed from a porous metal having a constant diameter pore by an etching technique.
【００６３】前記貫通孔Ｈの孔径を変化させることによ
り、静圧軸受けの流体供給孔に流体絞りを与えることが
できるため、軸受け剛性を高め、安定した軸受け性能を
得ることができる。なお、前記貫通孔Ｈの形状および大
きさは図示に限るものではなく、軸受け性能から要求さ
れる形状に適宜設定することができる。By changing the diameter of the through hole H, a fluid throttle can be provided to the fluid supply hole of the hydrostatic bearing, so that the bearing rigidity can be increased and stable bearing performance can be obtained. Note that the shape and size of the through hole H are not limited to those shown in the drawings, and can be appropriately set to a shape required from bearing performance.
【００６４】さらに、図１１（ニ）に示すように、軸受
面および案内面に複数の領域、例えば、Ｐ１〜Ｐ３を形
成し、各領域Ｐ１〜Ｐ３に径の異なる貫通孔Ｈ１〜Ｈ３
を形成し、各領域Ｐ１〜Ｐ３ごとに圧力が異なるように
してもよい。Further, as shown in FIG. 11D, a plurality of regions, for example, P1 to P3 are formed on the bearing surface and the guide surface, and the through holes H1 to H3 having different diameters are formed in the regions P1 to P3.
And the pressure may be different for each of the regions P1 to P3.
【００６５】前記ポーラス金属の一部は、圧力条件や冷
却条件などを変えることにより、ある領域をポアの形成
されていない領域（ノンポーラス金属）とすることがで
きる。By changing pressure conditions, cooling conditions, and the like, a part of the porous metal can be made into a region where no pore is formed (non-porous metal).
【００６６】凝固時の鋳型と溶融金属との間の温度勾配
が大きいほどポーラス金属の空隙率が小さくなるので、
鋳型温度の低い部分で凝固した金属はノンポーラス金属
となるために、例えば柱状ポーラス金属の周縁部付近で
はポアの存在しない領域を設けることができる。この領
域の大きさは溶融金属の種類，鋳型の大きさなどに応じ
鋳型の温度を制御して所望する値に設定することができ
る。Since the porosity of the porous metal decreases as the temperature gradient between the mold and the molten metal during solidification increases,
Since the metal solidified in the portion where the mold temperature is low becomes a non-porous metal, for example, a region without pores can be provided near the peripheral portion of the columnar porous metal. The size of this region can be set to a desired value by controlling the temperature of the mold according to the type of the molten metal, the size of the mold, and the like.
【００６７】前記形態１，２に示した静圧軸受および移
動体案内装置の形状，製造方法は、図示に限定されるも
のではない。The shapes and manufacturing methods of the hydrostatic bearing and the moving body guide device shown in the first and second embodiments are not limited to those shown in the drawings.
【００６８】また、貫通孔Ｈの軸の方向は、軸受面ある
いは支持面に対して必ずしも直角である必要はない。The direction of the axis of the through hole H does not necessarily need to be perpendicular to the bearing surface or the support surface.
【００６９】[0069]
【発明の効果】以上のように構成したため、本発明によ
れば、静圧軸受装置の軸受本体を、溶融状態の金属にガ
ス原子を溶け込ませて凝固して生成されたポーラス金属
によって形成したため、前記金属のポアにより圧力流体
の通路となる貫通孔Ｈを容易に構成することができる。
よって、従来のように、機械的な穿孔工程が必要なく、
コストを低減できる。また、前記ポーラス金属をもって
すれば、移動体案内装置の移動体および固定部材の少な
くとも一方に、流体を供給する多数の貫通孔を容易に形
成することもできる。よって、従来のように機械的な穿
孔工程が必要なく、コストを低減できる。As described above, according to the present invention, the bearing body of the hydrostatic bearing device is formed of a porous metal formed by dissolving gas atoms in a molten metal and solidifying the gas atoms. The through hole H serving as a passage for the pressure fluid can be easily formed by the metal pore.
Therefore, unlike the prior art, there is no need for a mechanical perforation process,
Cost can be reduced. Further, if the porous metal is used, a large number of through holes for supplying a fluid can be easily formed in at least one of the moving body and the fixed member of the moving body guide device. Therefore, there is no need for a mechanical perforation step as in the related art, and the cost can be reduced.
【００７０】また、溶融状態下の金属にガス原子を溶け
込ませて凝固してポーラス金属を生成し、貫通孔Ｈを形
成したため、多数の貫通孔を一様に分布させたり、貫通
孔を平行状あるいは放射状に形成したり、貫通孔の孔径
を容易に制御したりすることができる。よって、従来の
ように、機械的な絞りの加工工程が必要なく、コストも
低減できる。Also, gas atoms are melted into a metal in a molten state and solidified to form a porous metal, and the through holes H are formed. Therefore, a large number of through holes are uniformly distributed, and the through holes are formed in parallel. Alternatively, it can be formed radially or the diameter of the through-hole can be easily controlled. Therefore, unlike the related art, a mechanical drawing process is not required, and the cost can be reduced.
【００７１】さらに、従来困難であった微細な孔径の貫
通孔も容易に形成することができる。Further, a through hole having a fine hole diameter, which has been conventionally difficult, can be easily formed.
【００７２】前記貫通孔Ｈは、中心線がほぼ直線状に形
成されているため、流体供給時のエネルギー損失が小さ
い。Since the center line of the through hole H is formed substantially linearly, the energy loss at the time of supplying the fluid is small.
【００７３】前記貫通孔は無数に形成されているため、
前記軸受本体と回転軸との間隙および前記移動体と固定
部材との間隙における圧力分布は、従来の静圧軸受装置
および移動体案内装置にみられるような供給孔単一ある
いは数個の場合の圧力分布に比べ、より均一であり、負
荷荷重を増加させると共に、安定した性能が得られる。Since the through holes are formed innumerably,
The pressure distribution in the gap between the bearing body and the rotating shaft and the gap between the moving body and the fixed member is the same as in the case of a single or several supply holes as seen in conventional hydrostatic bearing devices and moving body guide devices. Compared with the pressure distribution, it is more uniform, increases the applied load, and provides stable performance.
【図１】（イ）は本発明の第一実施の形態の静圧軸受装
置（ジャーナル軸受）の切断平面図、（ロ）は図１
（イ）の軸受本体の一部の切断斜視図である。FIG. 1A is a cut-away plan view of a hydrostatic bearing device (journal bearing) according to a first embodiment of the present invention, and FIG.
It is a cut-away perspective view of a part of the bearing main body of (a).
【図２】（イ）〜（ホ）は図１の静圧軸受本体の製造方
法の説明図である。FIGS. 2A to 2E are explanatory diagrams of a method of manufacturing the hydrostatic bearing main body of FIG.
【図３】本発明の第一実施の形態のスラスト軸受装置を
示した切断図である。FIG. 3 is a cutaway view showing the thrust bearing device according to the first embodiment of the present invention.
【図４】（イ）〜（ハ）は図３の軸受本体の製造方法の
説明図である。4A to 4C are explanatory diagrams of a method for manufacturing the bearing main body in FIG.
【図５】（イ）は図３の他の変形例の斜視図、（ロ）は
図５（イ）の断面図である。5A is a perspective view of another modification of FIG. 3, and FIG. 5B is a cross-sectional view of FIG.
【図６】図３の他の変形例の斜視図である。FIG. 6 is a perspective view of another modification of FIG. 3;
【図７】図１の変形例の断面図である。FIG. 7 is a sectional view of a modification of FIG. 1;
【図８】本発明の第一実施の形態の自在軸受装置の断面
図である。FIG. 8 is a sectional view of the universal bearing device according to the first embodiment of the present invention.
【図９】（イ）は本発明の第二実施の形態の移動体案内
装置の斜視図、（ロ）は図９（イ）の断面図である。9A is a perspective view of a moving object guide device according to a second embodiment of the present invention, and FIG. 9B is a cross-sectional view of FIG. 9A.
【図１０】図９の変形例の断面図である。FIG. 10 is a sectional view of a modification of FIG. 9;
【図１１】（イ）〜（ニ）は貫通孔の変形例および分布
例をそれぞれ示した断面図である。FIGS. 11A to 11D are cross-sectional views showing modified examples and distribution examples of through holes, respectively.
【図１２】（イ）は従来例の静圧軸受装置の断面図、
（ロ）は図１２（イ）の一部の斜視図である。FIG. 12A is a sectional view of a conventional hydrostatic bearing device.
13B is a perspective view of a part of FIG.
【図１３】従来例の移動体案内装置の断面図である。FIG. 13 is a cross-sectional view of a conventional moving object guide device.
１…静圧軸受本体、２…軸、２０…固定部材、２２…移
動体、Ｊ…静圧軸受装置、Ｉ…移動体案内装置、Ｈ…貫
通孔、Ｓ…開口始端、Ｅ…開口終端。DESCRIPTION OF SYMBOLS 1 ... Static pressure bearing main body, 2 ... Shaft, 20 ... Fixed member, 22 ... Moving body, J ... Static pressure bearing device, I ... Moving body guide device, H ... Through-hole, S ... Opening start end, E ... Opening end.
───────────────────────────────────────────────────── フロントページの続き (71)出願人 393009840 大銑産業株式会社 大阪府大阪市西区新町３丁目11番10号 (72)発明者 中嶋 英雄 大阪府高槻市日吉台五番町６番40号 (72)発明者 村山 弘 京都府京都市山科区御陵大岩20番地の24 (72)発明者 丸山 嘉一郎 大阪府大阪市平野区喜連東４丁目１番17号 Ｆターム(参考） 3J102 AA02 BA01 CA15 EA02 EA03 FA01 ──────────────────────────────────────────────────続 き Continuation of the front page (71) Applicant 393009840 3-11-10 Shinmachi, Nishi-ku, Osaka-shi, Osaka (72) Inventor Hideo Nakajima 6-40, Gobancho, Hiyoshidai, Takatsuki-shi, Osaka (72) Inventor Hiroshi Murayama 20-24, Miryo-Oiwa, Yamashina-ku, Kyoto-shi, Kyoto (72) Inventor Kaichiro Maruyama 4-1-1-17, Kitsurehigashi, Hirano-ku, Osaka-shi F-term (reference) 3J102 AA02 BA01 CA15 EA02 EA03 FA01
Claims (5)
（２）を回転自在に支持する軸受本体（１）を有する静
圧軸受装置Ｊであって、前記軸受本体（１）は、溶融状
態の金属にガス原子を溶け込ませて凝固して生成された
ポーラス金属からなり、該金属のポアが前記圧力流体の
通路となる貫通孔Ｈを構成し、該貫通孔Ｈは、中心線が
ほぼ直線状に形成されていることを特徴とする静圧軸受
装置。1. A hydrostatic bearing device J having a bearing body (1) that rotatably supports a shaft (2) by the action of a supplied pressure fluid, wherein the bearing body (1) is in a molten state. Made of a porous metal produced by dissolving gas atoms into a metal and solidifying the same, and the pores of the metal constitute a through hole H serving as a passage for the pressure fluid, and the center line of the through hole H is substantially straight. A hydrostatic bearing device characterized by being formed in a shape.
されていることを特徴とする請求項１に記載の静圧軸受
装置。2. The hydrostatic bearing device according to claim 1, wherein the bearing body (1) is configured to be dividable.
されていることを特徴とする請求項１又は２に記載の静
圧軸受装置。3. The hydrostatic bearing device according to claim 1, wherein the through holes H are formed in a parallel or radial manner.
口終端Ｅの間で相異する部分を有することを特徴とする
請求項１乃至３の何れかに記載の静圧軸受装置。4. The hydrostatic bearing device according to claim 1, wherein the diameter of the through hole H has a portion different from the opening start end S to the opening end E.
動体（２２）が固定部材（２０）に対し相対移動自在に
支持された移動体案内装置Ｉであって、前記固定部材
（２０）および前記移動体（２２）の少なくとも一方
が、溶融状態の金属にガス原子を溶け込ませて凝固して
生成されたポーラス金属からなり、該金属のポアが前記
圧力流体の通路となる貫通孔Ｈを構成し、該貫通孔Ｈ
は、中心線がほぼ直線状に形成されていることを特徴と
する移動体案内装置。5. A movable body guide device I in which a movable body (22) is supported so as to be relatively movable with respect to a fixed member (20) by an action of a supplied pressure fluid, wherein the fixed member (20) At least one of the moving bodies (22) is made of a porous metal formed by dissolving gas atoms into a molten metal and solidifying the metal, and pores of the metal constitute a through hole H serving as a passage for the pressure fluid. And the through hole H
Is a mobile object guiding device characterized in that the center line is formed substantially linearly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11198109A JP2001027241A (en) | 1999-07-12 | 1999-07-12 | Hydrostatic bearing device and moving body guide device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11198109A JP2001027241A (en) | 1999-07-12 | 1999-07-12 | Hydrostatic bearing device and moving body guide device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001027241A true JP2001027241A (en) | 2001-01-30 |
Family
ID=16385637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11198109A Pending JP2001027241A (en) | 1999-07-12 | 1999-07-12 | Hydrostatic bearing device and moving body guide device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001027241A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003094109A (en) * | 2001-09-21 | 2003-04-02 | Hideo Nakajima | Metal wire of metal plate, and thin wire and thin sheet for medical equipment |
| US7871200B2 (en) | 2007-07-02 | 2011-01-18 | Industry-Academic Cooperation Foundation Gyeongsang National University | Aerostatic bearing spindle system using unidirectional porous metal |
| CN103256304A (en) * | 2013-04-10 | 2013-08-21 | 中国计量学院 | Large-load-bearing high-rigidity static-pressure gas bearing |
| CN114251360A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Micro-nano porous throttling static pressure air-float thrust bearing |
-
1999
- 1999-07-12 JP JP11198109A patent/JP2001027241A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003094109A (en) * | 2001-09-21 | 2003-04-02 | Hideo Nakajima | Metal wire of metal plate, and thin wire and thin sheet for medical equipment |
| US7871200B2 (en) | 2007-07-02 | 2011-01-18 | Industry-Academic Cooperation Foundation Gyeongsang National University | Aerostatic bearing spindle system using unidirectional porous metal |
| CN103256304A (en) * | 2013-04-10 | 2013-08-21 | 中国计量学院 | Large-load-bearing high-rigidity static-pressure gas bearing |
| CN103256304B (en) * | 2013-04-10 | 2015-11-25 | 中国计量学院 | The high rigidity hydrostatic gas-lubricated bearing of a kind of large carrying |
| CN114251360A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Micro-nano porous throttling static pressure air-float thrust bearing |
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