JP2001019439A - Production of accumulated body of fine particles of glass - Google Patents
Production of accumulated body of fine particles of glassInfo
- Publication number
- JP2001019439A JP2001019439A JP11187560A JP18756099A JP2001019439A JP 2001019439 A JP2001019439 A JP 2001019439A JP 11187560 A JP11187560 A JP 11187560A JP 18756099 A JP18756099 A JP 18756099A JP 2001019439 A JP2001019439 A JP 2001019439A
- Authority
- JP
- Japan
- Prior art keywords
- burner
- glass
- chamber
- support plate
- fine particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01406—Deposition reactors therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光ファイバの原材
料であるガラス微粒子堆積体を製造する際に用いられる
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus used for producing a glass particle deposit as a raw material of an optical fiber.
【０００２】[0002]
【従来の技術】ガラス微粒子堆積体は、例えば気相軸付
け法（ＶＡＤ法）により製造され、筒状のバーナと排気
管とが取り付けられたチャンバ内で、テトラクロロシラ
ン等のガラス原料を筒状バーナの火炎中で加水分解させ
て生成したガラス微粒子を順次堆積させたものである。
副生した水分や塩化水素ガス、堆積できずに浮遊してい
るガラス微粒子は、排気管から排出される。2. Description of the Related Art A glass fine particle deposit is manufactured by, for example, a gas phase method (VAD method), and a glass material such as tetrachlorosilane is placed in a cylindrical chamber in a chamber equipped with a cylindrical burner and an exhaust pipe. Glass particles produced by hydrolysis in a burner flame are sequentially deposited.
The by-produced moisture, hydrogen chloride gas, and glass particles suspended without being deposited are discharged from the exhaust pipe.
【０００３】ポリテトラフルオロエチレン（ＰＴＦＥ）
製等の支持板に各々貫通されたステンレス製等の筒状バ
ーナと排気管とが、このチャンバに設置され、各々の支
持板によりチャンバに固定されている。ガラス微粒子堆
積体を製造する際、チャンバの温度は火炎の輻射熱によ
り約３００℃にも達するため、支持板の変形を生じる。
また、筒状バーナの外表面や支持板にあけられたバーナ
の貫通孔の加工精度に限界があるうえ、筒状バーナと支
持板とは材質が相違し膨張率が異なっているため輻射熱
により、筒状バーナと支持板と間に僅かに隙間を生じて
しまう。チャンバ内は排気管からの排気により負圧にな
っているので、隙間からチャンバ内に外気が吸入され
て、チャンバ内の気流の乱れを生じて火炎が揺らいだり
する。ガラス微粒子堆積体の製造が終了し、チャンバ内
のガラス微粒子を減圧吸引して除去した後、新たにガラ
ス微粒子堆積体を製造する際、ガラス微粒子が塊状とな
ってこの隙間やチャンバの底部に残留していると、それ
が飛散し成長途中のガラス微粒子堆積体に付着してしま
う。塊状ガラス微粒子が付着すると、ガラス微粒子堆積
体の堆積密度の不均一を誘発し、焼結したときに気泡を
生じて、歩留まりを低下させてしまうという問題があっ
た。[0003] Polytetrafluoroethylene (PTFE)
A cylindrical burner made of stainless steel and the like and an exhaust pipe each penetrated through a support plate made of stainless steel and the like are installed in this chamber, and are fixed to the chamber by the respective support plates. When manufacturing the glass particle deposit, the temperature of the chamber reaches about 300 ° C. due to the radiant heat of the flame, so that the support plate is deformed.
In addition, there is a limit to the processing accuracy of the through-hole of the burner drilled in the outer surface of the cylindrical burner and the support plate, and the cylindrical burner and the support plate are made of different materials and have different expansion rates, so radiant heat causes A slight gap is created between the cylindrical burner and the support plate. Since the inside of the chamber is at a negative pressure due to the exhaust from the exhaust pipe, outside air is sucked into the chamber from the gap, causing turbulence in the airflow in the chamber and causing the flame to fluctuate. After the production of the glass particle deposit is completed, the glass particles in the chamber are removed by suction under reduced pressure, and then, when a new glass particle deposit is produced, the glass particles become a lump and remain in these gaps and the bottom of the chamber. If so, it scatters and adheres to the growing glass fine particle deposit. When the lump glass particles adhere, the deposition density of the glass particle deposit is induced to be non-uniform, and bubbles are generated during sintering, resulting in a problem of lowering the yield.
【０００４】[0004]
【発明が解決しようとする課題】本発明は前記の課題を
解決するためなされたもので、外気が吸入されることな
く、安定して高品質なガラス微粒子堆積体を製造する装
置を提供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an apparatus for stably producing a high-quality glass particle deposit without inhaling outside air. With the goal.
【０００５】[0005]
【課題を解決するための手段】前記の目的を達成するた
めになされた本発明のガラス微粒子堆積体製造装置１
は、実施例に対応する図１を参照して説明すると、ガラ
ス微粒子を供給する筒状バーナ７と、排気管１９とが設
置され、その内部でガラス微粒子の堆積体２を製造する
チャンバ５を有し、チャンバ５のフランジ１０に取付け
られたバーナ支持板１２の孔を貫通して筒状バーナ７が
支持され、バーナ支持板１２の外側に取付けられたゴム
弾性板１３に、筒状バーナ７が絞り挿入されてバーナ貫
通孔の隙間を封鎖している。SUMMARY OF THE INVENTION In order to achieve the above object, an apparatus 1 for producing a glass fine particle deposit according to the present invention is provided.
Referring to FIG. 1 corresponding to the embodiment, a cylindrical burner 7 for supplying glass fine particles and an exhaust pipe 19 are installed, and a chamber 5 for manufacturing a glass particle deposit 2 therein is provided therein. The cylindrical burner 7 is supported through a hole of a burner support plate 12 attached to the flange 10 of the chamber 5. A rubber elastic plate 13 attached outside the burner support plate 12 has a cylindrical burner 7. Are squeezed to seal the gap between the burner through holes.
【０００６】ゴム弾性板１３は、筒状バーナ７の径より
やや小さめのバーナ貫通孔の開いた円板であり、この孔
に筒状バーナ７を絞り挿入して、バーナと貫通孔とを密
着させることによりその隙間を封鎖している。ガラス微
粒子堆積体２の製造の際に火炎６により、チャンバ５の
温度が上昇し、バーナ支持板１２と筒状バーナ７との間
に僅かな隙間を生じたときでも、ゴム弾性板１３の弾性
により、ゴム弾性板１３と筒状バーナ７とが常時密着
し、チャンバ５内部と外界とが遮断される。したがっ
て、排気管１９からの排気により、チャンバ５内が負圧
になっても、外気がチャンバ５内に吸入されない。The rubber elastic plate 13 is a circular plate having a burner through hole slightly smaller than the diameter of the cylindrical burner 7, and the cylindrical burner 7 is squeezed and inserted into the hole to closely contact the burner with the through hole. By doing so, the gap is closed. Even when the temperature of the chamber 5 rises due to the flame 6 during the production of the glass particulate deposit body 2 and a slight gap is formed between the burner support plate 12 and the cylindrical burner 7, the elasticity of the rubber elastic plate 13 can be improved. Thereby, the rubber elastic plate 13 and the cylindrical burner 7 are always in close contact with each other, and the inside of the chamber 5 and the outside world are shut off. Therefore, even if the pressure in the chamber 5 becomes negative due to the exhaust from the exhaust pipe 19, the outside air is not sucked into the chamber 5.
【０００７】図２に示すように、ゴム弾性板１３とフラ
ンジ１０との間に、熱遮蔽板２１・２２が配置されてい
ることが好ましい。熱遮蔽板２１・２２は、ゴム弾性板
１３を火炎の輻射熱から保護するためのもので、筒状バ
ーナ７の貫通する孔の開いた円板である。その材質とし
て、ニッケル、不透明石英ガラスが挙げられる。バーナ
支持板１２が、熱遮蔽板２１を介してフランジ１０に取
り付けられている。As shown in FIG. 2, heat shielding plates 21 and 22 are preferably arranged between the rubber elastic plate 13 and the flange 10. The heat shielding plates 21 and 22 are for protecting the rubber elastic plate 13 from the radiant heat of the flame, and are circular plates having a hole through which the cylindrical burner 7 penetrates. Examples of the material include nickel and opaque quartz glass. The burner support plate 12 is attached to the flange 10 via the heat shield plate 21.
【０００８】筒状バーナ７が傾動可能な遊び２３を有し
て、バーナ支持板１２に貫通していてもよい。この遊び
２３を有していると、火炎６とガラス微粒子堆積体２の
成長先端との相対位置がずれたとき、２点波線で示すよ
うに筒状バーナ７を傾動させることにより簡便に修正で
きる。ゴム弾性板１３が弾性を有しているため、傾動さ
せても筒状バーナ７とゴム弾性板１３との間に隙間を生
じることがなく、チャンバ５内は外界と遮断された状態
が維持される。The cylindrical burner 7 may have a play 23 that can be tilted and penetrate the burner support plate 12. When the play 23 is provided, when the relative position between the flame 6 and the growth tip of the glass particulate deposit body 2 is shifted, it can be easily corrected by tilting the cylindrical burner 7 as shown by the two-dot dashed line. . Since the rubber elastic plate 13 has elasticity, a gap does not occur between the cylindrical burner 7 and the rubber elastic plate 13 even when the rubber elastic plate 13 is tilted, and the inside of the chamber 5 is maintained in a state of being isolated from the outside. You.
【０００９】この時、バーナ支持板１２とゴム弾性板１
３との間に、支持板１２の孔より小径の孔のあいた熱遮
蔽板２２が挟まれていると、ゴム弾性板１３の熱遮蔽効
果が一層高くなるためより好ましい。At this time, the burner support plate 12 and the rubber elastic plate 1
It is more preferable that the heat shield plate 22 having a hole smaller in diameter than the hole of the support plate 12 is sandwiched between the rubber elastic plate 13 and the support plate 12 because the heat shield effect of the rubber elastic plate 13 is further enhanced.
【００１０】バーナ支持板１２がポリテトラフルオロエ
チレン製であり、ゴム弾性板１３が耐熱性シリコンゴム
製であることが好ましい。Preferably, the burner support plate 12 is made of polytetrafluoroethylene, and the rubber elastic plate 13 is made of heat-resistant silicon rubber.
【００１１】この製造装置１を用いると、外気が吸入さ
れないため、均質で高品質なガラス微粒子堆積体を製造
することができる。When the manufacturing apparatus 1 is used, since the outside air is not sucked, a uniform and high-quality glass particle deposit can be manufactured.
【００１２】[0012]
【発明の実施の形態】以下、本発明の実施例を詳細に説
明する。図１に、本発明を適用するガラス微粒子堆積体
製造装置１の実施例の概要図を示す。ガラス微粒子堆積
体製造装置１は、ガラス微粒子を供給する筒状バーナ７
と、排気管１９とが挿入されたチャンバ５を有してい
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail. FIG. 1 shows a schematic view of an embodiment of a glass particle deposit manufacturing apparatus 1 to which the present invention is applied. The apparatus 1 for producing a glass fine particle deposit includes a cylindrical burner 7 for supplying glass fine particles.
And an exhaust pipe 19.
【００１３】チャンバ５には、斜め下方に筒状バーナ７
の挿入されるフランジ１０、側方に排気管１９の挿入さ
れるフランジ１６、上方に始発棒３の貫入した蓋４が配
置されている。フランジ１０・１６の表面は平滑になっ
ている。The chamber 5 has a cylindrical burner 7 obliquely downward.
The flange 10 into which the exhaust pipe 19 is inserted is disposed on the side, and the lid 4 through which the starting rod 3 penetrates is disposed above. The surfaces of the flanges 10 and 16 are smooth.
【００１４】図２に示すように、筒状バーナ７は、バー
ナ７の外径よりやや小さな径の孔の開けられた耐熱性シ
リコンゴム製で円板状のゴム弾性板１３に絞り挿入され
て、ゴム弾性板１３と密着している。筒状バーナ７の外
径よりやや大きな径の孔が開いた平滑な円板状のポリテ
トラフルオロエチレン製支持板１２が、平滑な円板状で
あって支持板１２の孔と同径の孔の開いたニッケル製熱
遮蔽板２１と、支持板１２の孔より小径の孔の開いたニ
ッケル製熱遮蔽板２２とに挟まれ、筒状バーナ７の火炎
側へ貫通されている。As shown in FIG. 2, the cylindrical burner 7 is drawn into a disk-shaped rubber elastic plate 13 made of heat-resistant silicon rubber having a hole slightly smaller than the outer diameter of the burner 7 and made of heat-resistant silicon rubber. And the rubber elastic plate 13. A smooth disk-shaped support plate 12 made of polytetrafluoroethylene having a hole slightly larger than the outer diameter of the cylindrical burner 7 is formed into a smooth disk-shaped hole having the same diameter as the hole of the support plate 12. And a nickel heat shielding plate 22 having a hole smaller in diameter than the hole of the support plate 12, and penetrated to the flame side of the cylindrical burner 7.
【００１５】ゴム弾性板１３、熱遮蔽板２１、バーナ支
持板１２、およびフランジ１０はそれぞれ外縁に一定間
隔で設けられた複数のねじ穴を有している。ねじ穴に通
されたボルト１１およびナット９により、ゴム弾性板１
３、熱遮蔽板２１、およびバーナ支持板１２が、フラン
ジ１０に固定されている。熱遮蔽板２１、バーナ支持板
１２、およびフランジ１０は表面が平滑なので密着し、
ゴム弾性板１３がその弾性のために筒状バーナ７と熱遮
蔽板２２とバーナ支持板１２とに密着しているので、チ
ャンバ５は略封鎖されて外界と遮断されている。熱遮蔽
板２２は、バーナの傾動に対応して自在に移動可能であ
る。The rubber elastic plate 13, the heat shielding plate 21, the burner support plate 12, and the flange 10 each have a plurality of screw holes provided at regular intervals on the outer edge. The rubber elastic plate 1 is formed by the bolts 11 and the nuts 9 passed through the screw holes.
3. The heat shield plate 21 and the burner support plate 12 are fixed to the flange 10. The heat shield plate 21, the burner support plate 12, and the flange 10 are in close contact because their surfaces are smooth,
Since the rubber elastic plate 13 is in close contact with the cylindrical burner 7, the heat shield plate 22, and the burner support plate 12 due to its elasticity, the chamber 5 is substantially closed and is isolated from the outside. The heat shield plate 22 is freely movable in accordance with the tilt of the burner.
【００１６】筒状バーナ７は水素ガス、酸素ガスおよ
び、ガラス原料であるテトラクロロシランとテトラクロ
ロゲルマニウムのガス供給源に接続されている。The cylindrical burner 7 is connected to a hydrogen gas, an oxygen gas and a gas supply source of glass raw materials, tetrachlorosilane and tetrachlorogermanium.
【００１７】排気扇（不図示）に繋がった排気管１９
が、排気管１９と同径の孔の開いた排気管支持板１８に
貫通されている。排気管支持板１８と排気管挿入口のフ
ランジ１６とが、それぞれ外縁に有するねじ穴に通され
たボルト１７およびナット１５により固定されている。
始発棒３の上端に、始発棒を回転しつつ上昇させるモー
タ（不図示）が接続されている。An exhaust pipe 19 connected to an exhaust fan (not shown)
Are passed through the exhaust pipe support plate 18 having a hole having the same diameter as the exhaust pipe 19. The exhaust pipe support plate 18 and the flange 16 of the exhaust pipe insertion port are fixed by bolts 17 and nuts 15 respectively passed through screw holes provided on the outer edge.
A motor (not shown) for rotating the starting rod while rotating the starting rod is connected to the upper end of the starting rod 3.
【００１８】なお、筒状バーナは、コアを形成するバー
ナとクラッドを形成するバーナの複数であってもよい。
排気管の支持板が、別なゴム弾性板で覆われていてもよ
い。ボルトとナットに代えてクランプにより固定しても
よい。The cylindrical burner may be a plurality of burners forming a core and a plurality of burners forming a clad.
The support plate of the exhaust pipe may be covered with another rubber elastic plate. It may be fixed by a clamp instead of the bolt and the nut.
【００１９】この製造装置１を用い、ガラス微粒子堆積
体２を製造した例を以下に示す。筒状バーナ７に供給し
た水素ガスおよび酸素ガスの混合ガスに点火して火炎６
を生じさせる。火炎６にガラス原料のガスを供給し、火
炎６中で加水分解させて生じたガラス微粒子を、回転し
つつ上昇している始発棒３の先端に順次堆積させる。同
時に排気扇を駆動させ、チャンバ５内で副生した水分や
塩化水素ガス、浮遊ガラス微粒子を排気管１９から排出
する。チャンバ５内に外気が吸入されることなく、ガラ
ス微粒子堆積体２は成長される。An example in which the glass fine particle deposit 2 is manufactured using the manufacturing apparatus 1 will be described below. The mixed gas of hydrogen gas and oxygen gas supplied to the cylindrical burner 7 is ignited and a flame 6
Cause. A glass raw material gas is supplied to the flame 6, and glass fine particles generated by hydrolysis in the flame 6 are sequentially deposited on the leading end of the starting rod 3 rising while rotating. At the same time, the exhaust fan is driven, and moisture, hydrogen chloride gas, and suspended glass particles generated as by-products in the chamber 5 are exhausted from the exhaust pipe 19. The glass particle deposit 2 is grown without the outside air being sucked into the chamber 5.
【００２０】上記実施例に従って、直径１５０ｍｍ、長
さ１６００ｍｍのガラス微粒子堆積体を試作した。堆積
体を得た後、焼結により脱水および透明ガラス化を施
し、ガラス中に観察される気泡数を計測した。堆積体を
２０本試作したときの平均気泡数は１本あたり２．１個
であった。According to the above-described embodiment, a glass fine particle deposit having a diameter of 150 mm and a length of 1600 mm was experimentally manufactured. After obtaining the deposit, dehydration and transparent vitrification were performed by sintering, and the number of bubbles observed in the glass was measured. The average number of bubbles in a trial production of 20 deposits was 2.1 per one.
【００２１】比較のため、ゴム弾性板で覆わなかったこ
と以外は同様にしてガラス微粒子堆積体を試作したとこ
ろ、平均気泡数は１本あたり６．１個であった。For comparison, a glass microparticle deposit was made in the same manner except that the rubber elastic plate was not used, and the average number of bubbles was 6.1 per cell.
【００２２】[0022]
【発明の効果】以上、詳細に説明したように本発明のガ
ラス微粒子堆積体製造装置は、チャンバが外界と遮断さ
れており、排気扇に駆動によりチャンバ内が負圧となっ
ても外気が吸入されない。そのため、この製造装置を用
いてガラス微粒子堆積体を製造すると、チャンバ内の気
流が安定しており、外気の吸入によるチャンバ内の塊状
ガラス微粒子の飛散がなく、ガラス微粒子が均質な密度
で堆積する。そのため高品質なガラス微粒子堆積体を得
ることができる。また、筒状バーナを傾動することがで
きるので、バーナとガラス微粒子堆積体の成長先端との
相対位置を簡便に修正することができる。As described above in detail, in the apparatus for manufacturing a glass fine particle deposit according to the present invention, the chamber is isolated from the outside world, and the outside air is sucked even if the inside of the chamber becomes negative pressure by driving the exhaust fan. Not done. Therefore, when a glass fine particle deposit is manufactured using this manufacturing apparatus, the air flow in the chamber is stable, and the glass fine particles are deposited at a uniform density without scattering of the lump glass fine particles in the chamber due to inhalation of the outside air. . Therefore, a high-quality glass particle deposit can be obtained. Further, since the cylindrical burner can be tilted, the relative position between the burner and the growth tip of the glass fine particle deposit can be easily corrected.
【図１】本発明を適用するガラス微粒子堆積体製造装置
の実施例を示す概要図である。FIG. 1 is a schematic view showing an embodiment of an apparatus for manufacturing a glass particle deposit body to which the present invention is applied.
【図２】本発明を適用するガラス微粒子堆積体製造装置
の別な実施例を示す要部概要図である。FIG. 2 is a schematic view showing a main part of another embodiment of the apparatus for manufacturing a glass particle deposit body to which the present invention is applied.
１はガラス微粒子堆積体製造装置、２はガラス微粒子堆
積体、３は始発棒、４は蓋、５はチャンバ、６は火炎、
７は筒状バーナ、９はナット、１０はフランジ、１１は
ボルト、１２はバーナ支持板、１３はゴム弾性板、１５
はナット、１６はフランジ、１７はボルト、１８は排気
管支持板、１９は排気管、２１・２２は熱遮蔽板、２３
は遊びである。1 is an apparatus for manufacturing a glass particle deposit, 2 is a glass particle deposit, 3 is a starting rod, 4 is a lid, 5 is a chamber, 6 is a flame,
7 is a cylindrical burner, 9 is a nut, 10 is a flange, 11 is a bolt, 12 is a burner support plate, 13 is a rubber elastic plate, 15
Is a nut, 16 is a flange, 17 is a bolt, 18 is an exhaust pipe support plate, 19 is an exhaust pipe, 21 and 22 are heat shield plates, 23
Is play.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 荻野 剛 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 (72)発明者 井上 大 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 (72)発明者 島田 忠克 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 (72)発明者 平沢 秀夫 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 Ｆターム(参考） 4G014 AH15 4G021 EA01 EB13 EB14 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tsuyoshi Ogino 2-13-1, Isobe, Annaka-shi, Gunma Shin-Etsu Kagaku Kogyo Co., Ltd. Precision Equipment Research Laboratory (72) Inventor Dai Inoue Isobe, Annaka-shi, Gunma 2-13-1 Shin-Etsu Kagaku Kogyo Co., Ltd.Precision Functional Materials Research Laboratories (72) Inventor Tadakatsu Shimada 2-13-1 Isobe, Annaka-shi, Gunma Prefecture Shin-Etsu Kagaku Kogyo Co., Ltd. Precision Functional Materials Research Laboratories (72) Inventor Hideo Hirasawa 2-13-1 Isobe, Annaka-shi, Gunma F-term in Shin-Etsu Kagaku Kogyo Co., Ltd. Precision Functional Materials Laboratory 4G014 AH15 4G021 EA01 EB13 EB14
Claims (3)
と、排気管とが設置され、その内部で該ガラス微粒子の
堆積体を製造するチャンバを有し、該チャンバのフラン
ジに取付けられたバーナ支持板の孔を貫通して該筒状バ
ーナが支持され、該バーナ支持板の外側に取付けられた
ゴム弾性板に、該筒状バーナが絞り挿入されて該バーナ
貫通孔の隙間を封鎖しているガラス微粒子堆積体製造装
置。1. A burner support plate provided with a cylindrical burner for supplying glass fine particles and an exhaust pipe, and having a chamber for producing a stack of the glass fine particles therein, and mounted on a flange of the chamber. The cylindrical burner is supported through the hole, and the cylindrical burner is squeezed and inserted into a rubber elastic plate attached to the outside of the burner support plate to close the gap between the burner through holes. Fine particle deposit manufacturing equipment.
に、熱遮蔽板が配置されていることを特徴とする請求項
１に記載のガラス微粒子堆積体製造装置。2. The apparatus according to claim 1, wherein a heat shield plate is disposed between the rubber elastic plate and the flange.
して、前記バーナ支持板に貫通していることを特徴とす
る請求項１に記載のガラス微粒子堆積体製造装置。3. The apparatus according to claim 1, wherein the cylindrical burner has a play that can be tilted and penetrates through the burner support plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11187560A JP2001019439A (en) | 1999-07-01 | 1999-07-01 | Production of accumulated body of fine particles of glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11187560A JP2001019439A (en) | 1999-07-01 | 1999-07-01 | Production of accumulated body of fine particles of glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001019439A true JP2001019439A (en) | 2001-01-23 |
Family
ID=16208231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11187560A Pending JP2001019439A (en) | 1999-07-01 | 1999-07-01 | Production of accumulated body of fine particles of glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001019439A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006038342A1 (en) * | 2004-09-30 | 2006-04-13 | Shin-Etsu Chemical Co., Ltd. | Method and system for producing optical fiber preform |
| KR100921313B1 (en) * | 2003-04-08 | 2009-10-13 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Upper sealing structure and upper sealing method of optical fiber preform manufacturing apparatus |
| JP2016117616A (en) * | 2014-12-22 | 2016-06-30 | 信越化学工業株式会社 | Apparatus for manufacturing optical fiber preform |
| KR20190111739A (en) * | 2018-03-22 | 2019-10-02 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Apparatus for manufacturing optical fiber preform |
| CN111196674A (en) * | 2018-11-20 | 2020-05-26 | 信越化学工业株式会社 | Apparatus for producing porous glass deposit |
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| JPH0222137A (en) * | 1988-07-11 | 1990-01-25 | Sumitomo Metal Ind Ltd | Production of synthetic quartz preform |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100921313B1 (en) * | 2003-04-08 | 2009-10-13 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Upper sealing structure and upper sealing method of optical fiber preform manufacturing apparatus |
| WO2006038342A1 (en) * | 2004-09-30 | 2006-04-13 | Shin-Etsu Chemical Co., Ltd. | Method and system for producing optical fiber preform |
| KR101164673B1 (en) | 2004-09-30 | 2012-07-11 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Fabrication method of optical fiber preform and apparatus thereof |
| US9028912B2 (en) | 2004-09-30 | 2015-05-12 | Shin-Etsu Chemical Co., Ltd. | Method of manufacturing optical fiber base material and apparatus therefor |
| US10377659B2 (en) | 2014-12-22 | 2019-08-13 | Shin-Etsu Chemical Co., Ltd. | Optical fiber base material manufacturing apparatus |
| US9758422B2 (en) | 2014-12-22 | 2017-09-12 | Shin-Etsu Chemical Co., Ltd. | Optical fiber base material manufacturing apparatus |
| JP2016117616A (en) * | 2014-12-22 | 2016-06-30 | 信越化学工業株式会社 | Apparatus for manufacturing optical fiber preform |
| KR20190111739A (en) * | 2018-03-22 | 2019-10-02 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Apparatus for manufacturing optical fiber preform |
| JP2019167251A (en) * | 2018-03-22 | 2019-10-03 | 信越化学工業株式会社 | Manufacturing device for optical fiber preform |
| US11097975B2 (en) * | 2018-03-22 | 2021-08-24 | Shin-Etsu Chemical Co., Ltd. | Apparatus for manufacturing optical fiber preform |
| KR102514132B1 (en) | 2018-03-22 | 2023-03-23 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Apparatus for manufacturing optical fiber preform |
| CN111196674A (en) * | 2018-11-20 | 2020-05-26 | 信越化学工业株式会社 | Apparatus for producing porous glass deposit |
| CN111196674B (en) * | 2018-11-20 | 2023-03-03 | 信越化学工业株式会社 | Apparatus for producing porous glass deposit |
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