JP2001004481A - Measuring device for leakage amount and leakage inspecting device - Google Patents
Measuring device for leakage amount and leakage inspecting deviceInfo
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- JP2001004481A JP2001004481A JP11170045A JP17004599A JP2001004481A JP 2001004481 A JP2001004481 A JP 2001004481A JP 11170045 A JP11170045 A JP 11170045A JP 17004599 A JP17004599 A JP 17004599A JP 2001004481 A JP2001004481 A JP 2001004481A
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、基準物側の密閉空
間容積を被検物側の密閉空間容積よりも大きくすること
で等価内容積を小さくして、差圧方式での被検物の漏れ
量の検出能力を向上させることが可能な漏れ量計測装置
および漏れ検査装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a differential pressure system for reducing the equivalent internal volume by making the sealed space volume on the reference object side larger than the sealed space volume on the test object side. The present invention relates to a leak amount measuring device and a leak inspection device capable of improving a leak amount detecting ability.
【０００２】[0002]
【従来の技術】従来より、例えば水晶発振子、リードリ
レーまたは容器に納められたリレー等の電子部品、腕時
計等の密閉容器に漏れが有るか無いかの検査方式として
は、差圧方式が広く採用されている。2. Description of the Related Art Conventionally, a differential pressure method has been widely used as an inspection method for checking whether or not electronic components such as a crystal oscillator, a reed relay or a relay contained in a container, and a sealed container such as a wristwatch have a leak. Has been adopted.
【０００３】例えば特開平６−１１４０８号公報におい
ては、一定圧力の空気圧を発生する空圧源と、漏れの有
無を検査すべき被検物としてのワークを収容したワーク
カプセルと、漏れの無い基準物としてのマスタ容器を収
納したマスタカプセルと、ワークカプセルとマスタカプ
セルとの間の圧力差を検出する差圧検出器と、ワークカ
プセルとマスタカプセルに与えられた圧力をそれぞれ一
定量ずつ変化させる容積可変手段とを備えた漏れ検査装
置（従来の技術）が提案されている。[0003] For example, in Japanese Patent Application Laid-Open No. Hei 6-11408, a pneumatic source for generating a constant air pressure, a work capsule containing a work as a test object to be inspected for leakage, a reference for no leakage. A master capsule containing a master container as an object, a differential pressure detector for detecting a pressure difference between the work capsule and the master capsule, and a volume for changing the pressure applied to the work capsule and the master capsule by a fixed amount, respectively. There has been proposed a leak inspection device (conventional technology) including variable means.
【０００４】[0004]
【発明が解決しようとする課題】ところが、従来の漏れ
検査装置においては、ワークカプセルとマスタカプセル
とに同じ密閉空間容積を用意し、両者の圧力差を測定し
て漏れ量を測定する装置であるが、高精度な計測を行う
ためにはワークの外部を取り囲んでワークより漏れ出て
来る空気による圧力上昇を測定する方が良い。このと
き、ワークやマスタ容器を取り囲んだ密閉空間容積が小
さい方が検出能力が向上するが、どんなに小さくしても
検出能力を向上できない限界があった。However, in the conventional leak inspection apparatus, the same sealed space volume is prepared for the work capsule and the master capsule, and the leak amount is measured by measuring the pressure difference between the two. However, in order to perform high-accuracy measurement, it is better to measure the pressure rise due to air leaking from the work surrounding the work. At this time, the detection capability is improved when the volume of the sealed space surrounding the work and the master container is small, but there is a limit that the detection capability cannot be improved even if the volume is small.
【０００５】[0005]
【発明の目的】本発明の目的は、差圧方式での被検物の
漏れ量の検出能力が等価内容積に反比例することに着目
し、基準物側の密閉空間容積を被検物側の密閉空間容積
よりも大きくして等価内容積を小さくすることで、差圧
方式での被検物の漏れ量の検出能力を向上させることの
できる漏れ量計測装置を提供することにある。また、差
圧方式での被検物の漏れの有無の検査能力を向上させる
ことのできる漏れ検査装置を提供することにある。An object of the present invention is to focus on the fact that the ability to detect the amount of leakage of a test object in a differential pressure system is inversely proportional to the equivalent internal volume, and to reduce the volume of the closed space on the reference object side by the test object side. It is an object of the present invention to provide a leak amount measuring device capable of improving the detection capability of the leak amount of a test object by a differential pressure method by making the equivalent internal volume smaller by making the volume larger than the closed space volume. It is another object of the present invention to provide a leak test apparatus capable of improving the test capability of the differential pressure method for detecting the presence or absence of leakage of a test object.
【０００６】[0006]
【課題を解決するための手段】請求項１ないし請求項３
に記載の発明によれば、差圧方式で被検物の漏れ量を検
出する時に、通常のように基準物側の密閉空間容積と被
検物側の密閉空間容積を等しくするところを、被検物側
の密閉空間容積よりも基準物側の密閉空間容積を大きく
することで等価内容積は通常のものよりも小さくなる。
これにより、被検物側容器と基準物側容器との間の圧力
差に基づいて被検物の漏れ量を検出する検出能力を向上
させることができる。また、被検物の漏れの有無を検査
する検査能力を向上させることできる。Means for Solving the Problems Claims 1 to 3
According to the invention described in (1), when detecting the leak amount of the test object by the differential pressure method, the sealed space volume on the reference object side and the sealed space volume on the test object side are made equal to each other as usual. By making the closed space volume on the reference object side larger than the closed space volume on the inspection object side, the equivalent internal volume becomes smaller than the normal one.
This makes it possible to improve the detection capability of detecting the leak amount of the test object based on the pressure difference between the test object side container and the reference object side container. Further, it is possible to improve the inspection ability for inspecting the presence or absence of leakage of the test object.
【０００７】[0007]
【発明の実施の形態】発明の実施の形態を実施例に基づ
き図面を参照して説明する。 〔第１実施例の構成〕図１は本発明の第１実施例を示し
たもので、図１は漏れ量計測装置・漏れ検査装置の概略
構成を示した図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described based on embodiments with reference to the drawings. [Structure of First Embodiment] FIG. 1 shows a first embodiment of the present invention, and FIG. 1 is a diagram showing a schematic structure of a leak amount measuring device and a leak inspection device.
【０００８】本実施例の漏れ量計測装置・漏れ検査装置
は、差圧方式での被検物１の漏れの有無および被検物１
の漏れ量を計測する装置で、例えばガソリンエンジンへ
燃料を噴射する燃料噴射弁（インジェクタ）のレーザ溶
接部の溶接不良箇所の漏れ量を計測する漏れ量計測装置
であり、しかもそのレーザ溶接部に漏れが有るか無いか
を検査（テスト）する漏れ検査装置である。The leak amount measuring device and the leak inspecting device according to the present embodiment are configured to detect the presence or absence of leakage of the test object 1 by the differential pressure method
Is a device for measuring the amount of leakage of a laser welding part of a fuel injection valve (injector) for injecting fuel into a gasoline engine, for example. This is a leakage inspection device that inspects (tests) whether there is any leakage.
【０００９】漏れ量計測装置・漏れ検査装置は、インジ
ェクタ等の被検物（ワーク）１を密に取り囲む被検物側
容器２と、被検物と同一の容積を持つ基準物（マスタ）
３を密に取り囲む基準物側容器４と、これらの被検物、
基準物１、３内を加圧するテスト圧源５と、これらの被
検物側、基準物側容器２、４間の圧力差を検出する差圧
センサ６と、これらの被検物側、基準物側容器２、４間
の圧力差に基づいて被検物１の漏れ量を計測すると共
に、被検物１の漏れの有無を検査する漏れ量計測・漏れ
検査手段７とを備えている。The leak amount measuring device and the leak inspecting device are a test object side container 2 closely surrounding a test object (work) 1 such as an injector, and a reference object (master) having the same volume as the test object.
Reference object side container 4 closely surrounding 3 and these test objects,
A test pressure source 5 for pressurizing the inside of the reference objects 1 and 3; a differential pressure sensor 6 for detecting a pressure difference between the test object side and the reference object side containers 2 and 4; There is provided a leak amount measurement / leakage inspection means 7 for measuring the leak amount of the test object 1 based on the pressure difference between the object side containers 2 and 4 and for checking whether the test object 1 leaks.
【００１０】被検物１は、例えば燃料噴射弁（インジェ
クタ）等の容器状部品または箱状部品である。被検物側
容器２は、被検物１を収容した際に外部と内部とを確実
に密封することが可能な箱体である。The test object 1 is a container-like component or a box-like component such as a fuel injection valve (injector). The test object side container 2 is a box body capable of securely sealing the outside and the inside when the test object 1 is accommodated.
【００１１】被検物側容器２は、被検物側容器２の内容
積、すなわち、被検物側の密閉空間容積（Ｖｗ）が０．
３ｃｍ3 以上０．８ｃｍ3 以下で、望ましくは、被検物
側の密閉空間容積（Ｖｗ）が０．５ｃｍ3 である。The container 2 on the specimen side has an inner volume of the container 2 on the specimen side, that is, the closed space volume (Vw) on the specimen side is 0.
The volume is 3 cm 3 or more and 0.8 cm 3 or less, and preferably, the closed space volume (Vw) on the test object side is 0.5 cm 3 .
【００１２】基準物３は、漏れの無い被検物１と同一の
部品、被検物１と同じ容積のブロックで、被検物１と同
じ外形形状である必要はない。基準物側容器４は、基準
物３を収容した際に外部と内部とを確実に密封すること
が可能な箱体である。The reference object 3 is a block having the same components and the same volume as the test object 1 without leakage, and does not need to have the same external shape as the test object 1. The reference object side container 4 is a box body that can securely seal the outside and the inside when the reference object 3 is stored.
【００１３】基準物側容器４は、被検物側の密閉空間容
積（Ｖｗ）が０．３ｃｍ3 以上０．８ｃｍ3 以下の場合
に、基準物側容器４の内容積、すなわち、基準物側の密
閉空間容積（Ｖｍ）がＶｗよりも大きい５．０ｃｍ3 以
上１５．０ｃｍ3 以下で、望ましくは、被検物側の密閉
空間容積（Ｖｗ）が０．５ｃｍ3 の場合に、基準物側の
密閉空間容積（Ｖｍ）がＶｗよりも大きい１０．０ｃｍ
3 である。When the closed space volume (Vw) on the test object side is 0.3 cm 3 or more and 0.8 cm 3 or less, the reference object side container 4 has an inner volume of the reference object side container 4, that is, the reference object side container 4. enclosed space volume (Vm) is 15.0 cm 3 or less large 5.0 cm 3 or more than Vw of, preferably, when the enclosed spatial volume of the subject side (Vw) is 0.5 cm 3, the reference object side 10.0 cm larger than Vw in closed space volume (Vm)
3
【００１４】テスト圧源５は、本発明の圧力源に相当す
るもので、被検物１および基準物３を所定のテスト圧
（例えば４気圧）に加圧する空気圧ポンプまたは空気圧
コンプレッサで、被検物側容器２内に空気圧を供給する
被検物側圧力配管１１、および基準物側容器４内に空気
圧を供給する基準物側圧力配管１２が接続している。こ
のテスト圧源５の駆動方法は、内燃機関により駆動して
も、電動モータにより駆動してもどちらでも良い。The test pressure source 5 corresponds to the pressure source of the present invention, and is a pneumatic pump or a pneumatic compressor that pressurizes the test object 1 and the reference object 3 to a predetermined test pressure (for example, 4 atm). A test object side pressure pipe 11 for supplying air pressure to the object side container 2 and a reference object side pressure pipe 12 for supplying air pressure to the reference object side container 4 are connected. The method of driving the test pressure source 5 may be either driving by an internal combustion engine or driving by an electric motor.
【００１５】差圧センサ６は、例えば静電容量形圧力セ
ンサ、差動容量形圧力センサ、静電容量形差圧センサ等
が使用され、圧力に比例した変位または歪みを発生する
１次変換素子としてのダイヤフラム１３、ベローズ、ブ
ルドン管等と、変位または歪みを電気量に変換する２次
変換素子としての歪みゲージ、静電容量センサ１４、差
動変圧器等とを備えている。As the differential pressure sensor 6, for example, a capacitance type pressure sensor, a differential capacitance type pressure sensor, a capacitance type differential pressure sensor or the like is used, and a primary conversion element which generates displacement or distortion proportional to pressure. , A bellows, a Bourdon tube, and the like, and a strain gauge, a capacitance sensor 14, a differential transformer, and the like as a secondary conversion element that converts displacement or strain into an electric quantity.
【００１６】この差圧センサ６は、センサケース１５の
内部空間をダイヤフラム１３により被検物側室（一方側
の圧力室）１６と基準側室（他方側の圧力室）１７とに
区画されている。被検物側室１６は、被検物側圧力配管
１８を介して被検物側容器２に連通している。また、基
準側室１７は、基準物側圧力配管１９を介して基準物側
容器４に連通している。In the differential pressure sensor 6, the internal space of a sensor case 15 is partitioned by a diaphragm 13 into a specimen side chamber (one pressure chamber) 16 and a reference side chamber (the other pressure chamber) 17. The test object side chamber 16 communicates with the test object side container 2 via a test object side pressure pipe 18. The reference side chamber 17 communicates with the reference side container 4 via a reference side pressure pipe 19.
【００１７】漏れ量計測・漏れ検査手段７は、静電容量
センサ１４等の２次変換素子から出力される電気量を増
幅する増幅器８、この増幅器８で増幅された電気量に基
づいて被検物１の漏れの有無の測定および被検物１の漏
れ量を計測する判定器（本発明の漏れ判定手段に相当す
る）９、およびこの判定器９の判定結果が視覚表示また
は聴覚表示するモニター、ランプ、ブザー等の表示部１
０等から構成されている。判定器９は、ＣＰＵ、ＲＯ
Ｍ、ＲＡＭを有するコンピュータ、あるいは比較器を有
する電気回路によって必要な処理を行うと共に、例えば
１分間当たり５ｃｃ以上の漏れ量を計測することができ
る。The leak amount measuring and leak inspecting means 7 includes an amplifier 8 for amplifying the amount of electricity output from the secondary conversion element such as the capacitance sensor 14 and the like, based on the amount of electricity amplified by the amplifier 8. A determiner (corresponding to the leak determination means of the present invention) 9 for measuring the presence or absence of leakage of the object 1 and measuring the amount of leakage of the test object 1, and a monitor for visually or audibly displaying the determination result of the determiner 9. , Lamp, buzzer, etc. display unit 1
0 and so on. Judgment device 9 includes CPU, RO
M and a computer having a RAM or an electric circuit having a comparator can perform necessary processing and measure a leakage amount of, for example, 5 cc or more per minute.
【００１８】〔第１実施例の計測方法〕次に、本実施例
の被検物１の漏れの有無の検査、および被検物１の漏れ
量の計測方法を図１に基づいて簡単に説明する。[Measurement Method of First Embodiment] Next, a method of inspecting the presence or absence of leakage of the test object 1 and a method of measuring the amount of leakage of the test object 1 according to the present embodiment will be briefly described with reference to FIG. I do.
【００１９】被検物側容器２内に被検物１を収容して被
検物側圧力配管１１、被検物側容器２、被検物側圧力配
管１８および差圧センサ６を密封化し、且つ基準物側容
器４内に基準物３を収容して基準物側圧力配管１２、基
準物側容器４、基準物側圧力配管１９および差圧センサ
６を密封化する。The test object 1 is accommodated in the test object side container 2, and the test object side pressure pipe 11, the test object side container 2, the test object side pressure pipe 18, and the differential pressure sensor 6 are sealed. Further, the reference object 3 is accommodated in the reference object side container 4, and the reference object side pressure pipe 12, the reference object side container 4, the reference object side pressure pipe 19, and the differential pressure sensor 6 are sealed.
【００２０】そして、テスト圧源５を作動して、被検物
側容器２内の被検物１および基準物側容器４内の基準物
３を所定のテスト圧（例えば４気圧）で加圧する。この
とき、被検物１に漏れが無ければ、被検物側容器２内の
被検物側密閉空間容積（Ｖｗ）の圧力と基準物側容器４
内の基準物側密閉空間容積（Ｖｍ）の圧力とが同一とな
る。Then, the test pressure source 5 is operated to pressurize the test object 1 in the test object side container 2 and the reference object 3 in the reference object side container 4 at a predetermined test pressure (for example, 4 atm). . At this time, if there is no leak in the test object 1, the pressure of the test object side closed space volume (Vw) in the test object side container 2 and the reference object side container 4
And the pressure of the reference-object-side closed space volume (Vm) is the same.
【００２１】これにより、差圧センサ６内のダイヤフラ
ム１３の両側の被検物側室１６の圧力と基準側室１７の
圧力とが同一となり、ダイヤフラム１３が変位しないの
で、静電容量センサ１４から漏れ無し信号が出力され
る。そして、漏れ無し信号を入力した判定器９は、被検
物１の漏れは無いと判定して、その旨、表示部１０に表
示する。As a result, the pressure in the test object side chamber 16 on both sides of the diaphragm 13 in the differential pressure sensor 6 and the pressure in the reference side chamber 17 become the same, and the diaphragm 13 is not displaced. A signal is output. Then, the determiner 9 that has received the no-leakage signal determines that there is no leakage of the test object 1 and displays that fact on the display unit 10.
【００２２】また、被検物１に漏れが有れば、被検物側
容器２内の被検物側密閉空間容積（Ｖｗ）の圧力が基準
物側容器４内の基準物側密閉空間容積（Ｖｍ）の圧力よ
りも高くなる。これにより、差圧センサ６内の被検物側
室１６の圧力が基準側室１７の圧力よりも高くなるの
で、ダイヤフラム１３が図示右方向に変位する。If there is a leak in the test object 1, the pressure of the test object closed space volume (Vw) in the test object side container 2 becomes equal to the reference object closed space volume in the reference object side container 4. (Vm). As a result, the pressure of the test object side chamber 16 in the differential pressure sensor 6 becomes higher than the pressure of the reference side chamber 17, so that the diaphragm 13 is displaced rightward in the figure.
【００２３】そして、静電容量センサ１４から漏れ有り
信号および漏れ量信号が出力される。そして、漏れ有り
信号および漏れ量信号を入力した判定器９は、被検物１
の漏れ量を測定し、その測定量を表示部１０に表示す
る。The capacitance sensor 14 outputs a leakage signal and a leakage amount signal. Then, the determiner 9 that has received the leak presence signal and the leak amount signal outputs the test object 1
Is measured, and the measured amount is displayed on the display unit 10.
【００２４】このとき、被検物１の漏れ量ＶＬ（ｃｍ3
／ｍｉｎ）と圧力変化をΔＰ（Ｐａ）の関係は、下記の
数１の式のように示される。At this time, the leakage amount VL (cm 3
/ Min) and the pressure change ΔP (Pa) are expressed by the following equation (1).
【数１】ＶＬ＝（６０・ΔＰ・Ｖｅ）／（Ｐ０・ｔ） なお、Ｐ０は大気圧（１０１３２５Ｐａ）で、ｔ（ｓｅ
ｃ）は検出時間である。VL = (60 · ΔP · Ve) / (P0 · t) where P0 is the atmospheric pressure (101325 Pa) and t (se
c) is the detection time.
【００２５】ここで、Ｖｅ（ｃｍ3 ）は等価内容積で下
記の数２の式で定義される。Here, Ve (cm 3 ) is an equivalent internal volume and is defined by the following equation (2).
【数２】Ｖｅ＝Ｖｍ＋Ｋ・（１＋Ｖｗ／Ｖｍ）・Ｐ０## EQU2 ## Ve = Vm + K. (1 + Vw / Vm) .P0
【００２６】なお、Ｖｗは被検物側の密閉空間容積（ｃ
ｍ3 ）で、Ｖｍは基準物側の密閉空間容積（ｃｍ3 ）
で、Ｋは差圧センサ６のセンサ係数（０．００００１ｃ
ｍ3 ／Ｐａ）である。Vw is the volume of the closed space (c
m 3 ), and Vm is the closed space volume (cm 3 ) on the reference object side
Where K is the sensor coefficient of the differential pressure sensor 6 (0.00001c
m 3 / Pa).
【００２７】数１の式から被検物１の漏れ量（ＶＬ）の
検出能力は等価内容積（Ｖｅ）を小さくすればする程高
くなる。しかし、下記の数３の式のように、基準物側の
密閉空間容積（Ｖｍ）と被検物側の密閉空間容積（Ｖ
ｗ）とを一致させると、被検物側の密閉空間容積（Ｖ
ｗ）をどんなに小さくしても、数４の式のようになり、
等価内容積（Ｖｅ）を２ｃｍ3 より小さくすることはで
きない。From the equation (1), the ability to detect the leak amount (VL) of the test object 1 increases as the equivalent internal volume (Ve) decreases. However, as shown in the following equation 3, the closed space volume (Vm) on the reference object side and the closed space volume (Vm) on the test object side are calculated.
w), the closed space volume (V
No matter how small w) is, Equation 4 gives:
The equivalent internal volume (Ve) cannot be less than 2 cm 3 .
【００２８】[0028]
【数３】Ｖｗ＝Ｖｍ## EQU3 ## Vw = Vm
【数４】Ｖｅ＝Ｖｗ＋Ｋ・（１＋Ｖｗ／Ｖｍ）・Ｐ０＝
Ｖｗ＋２ｃｍ3 Ve = Vw + K · (1 + Vw / Vm) · P0 =
Vw + 2cm 3
【００２９】しかるに、本実施例（本発明）では、通常
の場合に数３の式のように（Ｖｗ＝Ｖｍ）とするところ
を、下記の数５の式のようにすることで、等価内容積
（Ｖｅ）が下記の数６の式で示したように小さくして、
被検物１の漏れ量の検出能力をアップさせる。そして、
本実施例では、被検物側の密閉空間容積（Ｖｗ）が微小
な場合に特に効果的である。However, in the present embodiment (the present invention), the condition of (Vw = Vm) as in the equation (3) in the normal case is replaced by the following equation (5) to obtain equivalent contents. The product (Ve) is reduced as shown in the following equation (6),
The ability to detect the leak amount of the test object 1 is improved. And
This embodiment is particularly effective when the closed space volume (Vw) on the test object side is very small.
【００３０】[0030]
【数５】Ｖｗ＜Ｖｍ## EQU5 ## Vw <Vm
【数６】Ｖｅ＝Ｖｗ＋Ｋ・（１＋Ｖｗ／Ｖｍ）・Ｐ０≒
Ｖｗ＋１ｃｍ3 Ve = Vw + K ・ (1 + Vw / Vm) ・ P0 ≒
Vw + 1cm 3
【００３１】〔第１実施例の効果〕以上のように、本実
施例の漏れ量計測装置は、被検物側の密閉空間容積（Ｖ
ｗ）が０．５ｃｍ3 のとき、通常のように、被検物側の
密閉空間容積（Ｖｗ）と同一となるように基準物側の密
閉空間容積（Ｖｍ）を０．５ｃｍ3 とすると、上記の数
２の式から等価内容積（Ｖｅ）は２．５ｃｍ3 となる。[Effects of the First Embodiment] As described above, the leak amount measuring apparatus of the present embodiment uses the closed space volume (V
When w) is 0.5 cm 3 , assuming that the closed space volume (Vm) on the reference object side is 0.5 cm 3 so as to be the same as the closed space volume (Vw) on the test object side as usual, From the above equation (2), the equivalent internal volume (Ve) is 2.5 cm 3 .
【００３２】このような通常のものに対して、被検物側
の密閉空間容積（Ｖｗ）が０．５ｃｍ3 のとき、基準物
側の密閉空間容積（Ｖｍ）を１０ｃｍ3 と被検物側の密
閉空間容積（Ｖｗ）よりも大きくしているので、上記の
数２の式から等価内容積（Ｖｅ）は１．５５ｃｍ3 と小
さくなる。In contrast to such a normal device, when the closed space volume (Vw) on the test object side is 0.5 cm 3 , the closed space volume (Vm) on the reference object side is 10 cm 3 , which is equal to 10 cm 3. Is larger than the closed space volume (Vw), the equivalent internal volume (Ve) is reduced to 1.55 cm 3 from the above equation (2).
【００３３】したがって、基準物側の密閉空間容積（Ｖ
ｍ）を被検物側の密閉空間容積（Ｖｗ）よりも大きくす
ることで、等価内容積（Ｖｅ）を小さくして、差圧方式
での被検物１の漏れ量の検出能力および漏れの有無の検
査能力を、通常のものと比較して６０％程度も向上させ
ることができる。Therefore, the volume of the closed space (V
m) is made larger than the closed space volume (Vw) on the test object side, so that the equivalent internal volume (Ve) is reduced, and the detection capability of the leak amount of the test object 1 in the differential pressure method and the leakage The inspection ability for presence / absence can be improved by about 60% as compared with a normal one.
【００３４】なお、基準物側の密閉空間容積（Ｖｍ）が
被検物側の密閉空間容積（Ｖｗ）よりも大きければ大き
い程、等価内容積が小さくなるので、差圧方式での被検
物１の漏れ量の検出能力および漏れの有無の検査能力を
更に向上することができる。The equivalent internal volume becomes smaller as the sealed space volume (Vm) on the reference object side becomes larger than the sealed space volume (Vw) on the test object side. 1, the ability to detect the amount of leakage and the ability to inspect the presence or absence of leakage can be further improved.
【００３５】〔第２実施例〕図２は本発明の第２実施例
を示したもので、図２は漏れ量計測装置・漏れ検査装置
の概略構成を示した図である。[Second Embodiment] FIG. 2 shows a second embodiment of the present invention, and FIG. 2 is a diagram showing a schematic configuration of a leak amount measuring device and a leak inspection device.
【００３６】本実施例では、第１実施例のように基準物
側容器４内に基準物３を入れず、テスト圧源５によって
被検物側容器２内の被検物１のみを所定のテスト圧（例
えば４気圧）で加圧している。すなわち、基準物側容器
４内は大気圧とされ、被検物側容器２内はテスト圧とさ
れている。In this embodiment, the reference object 3 is not put in the reference object side container 4 as in the first embodiment, and only the test object 1 in the test object side container 2 is subjected to the predetermined pressure by the test pressure source 5. The test pressure (for example, 4 atm) is applied. That is, the inside of the reference object side container 4 is set to the atmospheric pressure, and the inside of the test object side container 2 is set to the test pressure.
【００３７】本実施例では、第１実施例と同様にして、
差圧センサ６にて検出した被検物側、基準物側容器２、
４間の圧力差に基づいて被検物１の漏れの有無を検査す
ると共に、被検物１の漏れ量を計測するようにしてい
る。これにより、第１実施例と同様にして、差圧方式で
の被検物１の漏れ量の検出能力および漏れの有無の検査
能力を更に向上することができる。In this embodiment, as in the first embodiment,
The test object side and reference object side container 2 detected by the differential pressure sensor 6,
The presence or absence of leakage of the test object 1 is inspected based on the pressure difference between the four, and the amount of leakage of the test object 1 is measured. As a result, similarly to the first embodiment, the ability to detect the amount of leakage of the test object 1 and the ability to inspect the presence or absence of leakage in the differential pressure method can be further improved.
【００３８】〔第３実施例〕図３は本発明の第３実施例
を示したもので、図３は漏れ量計測装置・漏れ検査装置
の概略構成を示した図である。[Third Embodiment] FIG. 3 shows a third embodiment of the present invention, and FIG. 3 is a diagram showing a schematic configuration of a leak amount measuring device and a leak inspection device.
【００３９】本実施例では、被検物側容器２内に被検物
１を完全に入れずに、被検物１の一部を被検物側容器２
内に入れて被検物１の検査箇所のみを気密的に囲ってい
る。また、基準物側容器４内に基準物３を完全に入れず
に、基準物３の一部を基準物側容器４内に入れて被検物
１の検査箇所に対応した箇所のみを気密的に囲ってい
る。そして、テスト圧源５は、被検物１内および基準物
３内の両方を所定のテスト圧（例えば４気圧）で加圧し
ている。In this embodiment, a part of the test object 1 is not completely placed in the test object side container 2 but is partially inserted into the test object side container 2.
And hermetically surrounds only the inspection portion of the test object 1. In addition, the reference object 3 is not completely put in the reference object side container 4, and a part of the reference object 3 is put in the reference object side container 4, and only the portion corresponding to the inspection point of the test object 1 is airtight. Surrounded by The test pressure source 5 pressurizes both the inside of the test object 1 and the inside of the reference object 3 with a predetermined test pressure (for example, 4 atm).
【００４０】本実施例では、第１実施例と同様にして、
差圧センサ６にて検出した被検物側、基準物側容器２、
４間の圧力差に基づいて被検物１の漏れの有無を検査す
ると共に、被検物１の漏れ量を計測するようにしてい
る。これにより、第１実施例と同様にして、差圧方式で
の被検物１の漏れ量の検出能力および漏れの有無の検査
能力を更に向上することができる。In this embodiment, as in the first embodiment,
The test object side and reference object side container 2 detected by the differential pressure sensor 6,
The presence or absence of leakage of the test object 1 is inspected based on the pressure difference between the four, and the amount of leakage of the test object 1 is measured. As a result, similarly to the first embodiment, the ability to detect the amount of leakage of the test object 1 and the ability to inspect the presence or absence of leakage in the differential pressure method can be further improved.
【００４１】〔変形例〕本実施例では、圧力源として空
気圧を発生するテスト圧源５を用いたが、圧力源として
水圧等の流体圧を発生する流体圧ポンプを用いても良
い。[Modification] In this embodiment, the test pressure source 5 for generating air pressure is used as the pressure source, but a fluid pressure pump for generating fluid pressure such as water pressure may be used as the pressure source.
【００４２】ここで、被検物側の密閉空間容積（Ｖｗ）
は、被検物側圧力配管１１、被検物側圧力配管１８も被
検物側容器２の一部として考え、基準物側の密閉空間容
積（Ｖｍ）は、基準物側圧力配管１２、基準物側圧力配
管１９も基準物側容器４の一部として考えて、配管を含
めた基準物側の密閉空間容積（Ｖｍ）を配管を含めた被
検物側の密閉空間容積（Ｖｗ）よりも大きくすることで
等価内容積（Ｖｅ）を小さくして被検物１の漏れ量の検
出能力を向上させるようにしても良い。Here, the closed space volume (Vw) on the test object side
In the figure, the test object side pressure pipe 11 and the test object side pressure pipe 18 are also considered as a part of the test object side container 2, and the sealed space volume (Vm) on the reference object side is the reference object side pressure pipe 12, The object side pressure pipe 19 is also considered as a part of the reference object side container 4, and the sealed space volume (Vm) of the reference object including the pipe is larger than the sealed space volume (Vw) of the test object including the pipe. By increasing the value, the equivalent internal volume (Ve) may be reduced to improve the ability to detect the leakage amount of the test object 1.
【図１】漏れ量計測装置・漏れ検査装置の概略構成を示
した構成図である（第１実施例）。FIG. 1 is a configuration diagram showing a schematic configuration of a leakage amount measuring device / leakage inspection device (first embodiment).
【図２】漏れ量計測装置・漏れ検査装置の概略構成を示
した構成図である（第２実施例）。FIG. 2 is a configuration diagram showing a schematic configuration of a leakage amount measuring device / leakage inspection device (second embodiment).
【図３】漏れ量計測装置・漏れ検査装置の概略構成を示
した構成図である（第３実施例）。FIG. 3 is a configuration diagram showing a schematic configuration of a leakage amount measurement device / leakage inspection device (third embodiment).
１ 被検物 ２ 被検物側容器 ３ 基準物 ４ 基準物側容器 ５ テスト圧源（圧力源） ６ 差圧センサ ７ 漏れ量計測・漏れ検査手段 ８ 増幅器 ９ 判定器（漏れ判定手段） １０ 表示部 １３ ダイヤフラム １４ 静電容量センサ DESCRIPTION OF SYMBOLS 1 Test object 2 Test object side container 3 Reference object 4 Reference object side container 5 Test pressure source (pressure source) 6 Differential pressure sensor 7 Leakage amount measurement / leakage inspection means 8 Amplifier 9 Judgment device (leakage determination means) 10 Display Unit 13 Diaphragm 14 Capacitance sensor
Claims (9)
の密閉空間容積を有する被検物側容器と、 （ｂ）内部に基準物が入れられ、前記被検物側の密閉空
間容積よりも大きい基準物側の密閉空間容積を有する基
準物側容器と、 （ｃ）前記被検物内および前記基準物内に流体圧をそれ
ぞれ与える圧力源と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れ量を検出する漏れ量検出手段とを備え
た漏れ量計測装置。1. A test object container having a closed space on the test object side with a test object placed inside (a); and a reference object inside the test object container with a reference object inside the test object side. A reference object side container having a reference object side closed space volume larger than the closed space volume of (c) a pressure source for applying a fluid pressure to the test object and the reference object, respectively; A differential pressure sensor for detecting a pressure difference between the inspection object side container and the reference object side container, and (e) a pressure difference detected by the differential pressure sensor,
A leak amount measuring device comprising: a leak amount detecting means for detecting a leak amount of the test object.
の密閉空間容積を有する被検物側容器と、 （ｂ）内部に基準物が入れられ、前記被検物側の密閉空
間容積よりも大きい基準物側の密閉空間容積を有する基
準物側容器と、 （ｃ）前記被検物内および前記基準物内に流体圧をそれ
ぞれ与える圧力源と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れが有るか無いかを判定する漏れ判定手
段と、 （ｆ）この漏れ判定手段にて前記被検物の漏れが有ると
判定した際に、前記差圧センサにて検出した圧力差に基
づいて、前記被検物の漏れ量を計測する漏れ量計測手段
とを備えた漏れ量計測装置。(A) a test object-side container having a closed space on the side of the test object in which the test object is placed; and (b) a reference substance in the inside of the test object side, A reference object side container having a reference object side closed space volume larger than the closed space volume of (c) a pressure source for applying a fluid pressure to the test object and the reference object, respectively; A differential pressure sensor for detecting a pressure difference between the inspection object side container and the reference object side container, and (e) a pressure difference detected by the differential pressure sensor,
A leak determining means for determining whether there is a leak of the test object; and (f) detecting by the differential pressure sensor when the leak determining means determines that there is a leak of the test object. A leak amount measuring device comprising: a leak amount measuring means for measuring a leak amount of the test object based on a pressure difference.
の密閉空間容積を有する被検物側容器と、 （ｂ）内部に基準物が入れられ、前記被検物側の密閉空
間容積よりも大きい基準物側の密閉空間容積を有する基
準物側容器と、 （ｃ）前記被検物内および前記基準物内に流体圧をそれ
ぞれ与える圧力源と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れの有無を検査する漏れ検査手段とを備
えた漏れ検査装置。(A) a test object-side container having a closed space on the side of the test object in which the test object is placed; and (b) a reference object in the inside of the test object side, A reference object side container having a reference object side closed space volume larger than the closed space volume of (c) a pressure source for applying a fluid pressure to the test object and the reference object, respectively; A differential pressure sensor for detecting a pressure difference between the inspection object side container and the reference object side container, and (e) a pressure difference detected by the differential pressure sensor,
A leak inspection device comprising: a leak inspection unit configured to inspect the presence or absence of leakage of the test object.
の密閉空間容積を有する被検物側容器と、 （ｂ）前記被検物側の密閉空間容積よりも大きい基準物
側の密閉空間容積を有する基準物側容器と、 （ｃ）前記被検物内に流体圧をそれぞれ与える圧力源
と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れ量を検出する漏れ量検出手段とを備え
た漏れ量計測装置。4. A container in which a test object is placed inside and which has a closed space volume on the test object side, and (b) a reference larger than the closed space volume on the test object side. A reference object side container having a closed space volume on the object side; (c) a pressure source for providing a fluid pressure inside the test object; and (d) a pressure source between the test object side container and the reference object side container. And (e) based on the pressure difference detected by the differential pressure sensor,
A leak amount measuring device comprising: a leak amount detecting means for detecting a leak amount of the test object.
の密閉空間容積を有する被検物側容器と、 （ｂ）前記被検物側の密閉空間容積よりも大きい基準物
側の密閉空間容積を有する基準物側容器と、 （ｃ）前記被検物内に流体圧をそれぞれ与える圧力源
と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れが有るか無いかを判定する漏れ判定手
段と、 （ｆ）この漏れ判定手段にて前記被検物の漏れが有ると
判定した際に、前記差圧センサにて検出した圧力差に基
づいて、前記被検物の漏れ量を計測する漏れ量計測手段
とを備えた漏れ量計測装置。5. An object-side container in which an object is placed and having a closed space volume on the side of the object, and (b) a reference larger than the closed space volume on the object side. A reference object side container having a closed space volume on the object side; (c) a pressure source for providing a fluid pressure inside the test object; and (d) a pressure source between the test object side container and the reference object side container. And (e) based on the pressure difference detected by the differential pressure sensor,
A leak determining means for determining whether there is a leak of the test object; and (f) detecting by the differential pressure sensor when the leak determining means determines that there is a leak of the test object. A leak amount measuring device comprising: a leak amount measuring means for measuring a leak amount of the test object based on a pressure difference.
の密閉空間容積を有する被検物側容器と、 （ｂ）前記被検物側の密閉空間容積よりも大きい基準物
側の密閉空間容積を有する基準物側容器と、 （ｃ）前記被検物内に流体圧をそれぞれ与える圧力源
と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れの有無を検査する漏れ検査手段とを備
えた漏れ検査装置。(A) a test object-side container having a test object-side closed space volume on the test object side; and (b) a reference larger than the test object side closed space volume. A reference object side container having a closed space volume on the object side; (c) a pressure source for providing a fluid pressure inside the test object; and (d) a pressure source between the test object side container and the reference object side container. And (e) based on the pressure difference detected by the differential pressure sensor,
A leak inspection device comprising: a leak inspection unit configured to inspect the presence or absence of leakage of the test object.
検物側の密閉空間容積を有する被検物側容器と、 （ｂ）内部に基準物の一部が入れられ、前記被検物側の
密閉空間容積よりも大きい基準物側の密閉空間容積を有
する基準物側容器と、 （ｃ）前記被検物内および前記基準物内に流体圧をそれ
ぞれ与える圧力源と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れ量を検出する漏れ量検出手段とを備え
た漏れ量計測装置。7. A part of the test object is placed inside (a), a test object side container having a closed space volume on the test object side, and (b) a part of a reference substance is put inside. A reference object side container having a sealed space volume on the reference object side larger than the sealed space volume on the test object side; and (c) a pressure source for providing a fluid pressure in the test object and the reference object, respectively. (D) a differential pressure sensor for detecting a pressure difference between the test object side container and the reference object side container, and (e) a pressure difference detected by the differential pressure sensor.
A leak amount measuring device comprising: a leak amount detecting means for detecting a leak amount of the test object.
検物側の密閉空間容積を有する被検物側容器と、 （ｂ）内部に基準物の一部が入れられ、前記被検物側の
密閉空間容積よりも大きい基準物側の密閉空間容積を有
する基準物側容器と、 （ｃ）前記被検物内および前記基準物内に流体圧をそれ
ぞれ与える圧力源と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れが有るか無いかを判定する漏れ判定手
段と、 （ｆ）この漏れ判定手段にて前記被検物の漏れが有ると
判定した際に、前記差圧センサにて検出した圧力差に基
づいて、前記被検物の漏れ量を計測する漏れ量計測手段
とを備えた漏れ量計測装置。8. A part of the test object is placed inside (a), a test object side container having a closed space volume on the test object side, and (b) a part of a reference substance is put inside. A reference object side container having a sealed space volume on the reference object side larger than the sealed space volume on the test object side; and (c) a pressure source for providing a fluid pressure in the test object and the reference object, respectively. (D) a differential pressure sensor for detecting a pressure difference between the test object side container and the reference object side container, and (e) a pressure difference detected by the differential pressure sensor.
A leak determining means for determining whether there is a leak of the test object; and (f) detecting by the differential pressure sensor when the leak determining means determines that there is a leak of the test object. A leak amount measuring device comprising: a leak amount measuring means for measuring a leak amount of the test object based on a pressure difference.
検物側の密閉空間容積を有する被検物側容器と、 （ｂ）内部に基準物の一部が入れられ、前記被検物側の
密閉空間容積よりも大きい基準物側の密閉空間容積を有
する基準物側容器と、 （ｃ）前記被検物内および前記基準物内に流体圧をそれ
ぞれ与える圧力源と、 （ｄ）前記被検物側容器と前記基準物側容器との間の圧
力差を検出する差圧センサと、 （ｅ）この差圧センサにて検出した圧力差に基づいて、
前記被検物の漏れの有無を検査する漏れ検査手段とを備
えた漏れ検査装置。9. A part of a test object is placed inside (a), a test object side container having a closed space volume on the test object side, and (b) a part of a reference object is put inside. A reference object side container having a sealed space volume on the reference object side larger than the sealed space volume on the test object side; and (c) a pressure source for providing a fluid pressure in the test object and the reference object, respectively. (D) a differential pressure sensor for detecting a pressure difference between the test object side container and the reference object side container, and (e) a pressure difference detected by the differential pressure sensor.
A leak inspection device comprising: a leak inspection unit configured to inspect the presence or absence of leakage of the test object.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17004599A JP4061779B2 (en) | 1999-06-16 | 1999-06-16 | Leakage measuring device and leak inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17004599A JP4061779B2 (en) | 1999-06-16 | 1999-06-16 | Leakage measuring device and leak inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001004481A true JP2001004481A (en) | 2001-01-12 |
| JP4061779B2 JP4061779B2 (en) | 2008-03-19 |
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ID=15897603
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17004599A Expired - Lifetime JP4061779B2 (en) | 1999-06-16 | 1999-06-16 | Leakage measuring device and leak inspection device |
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| Country | Link |
|---|---|
| JP (1) | JP4061779B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009281934A (en) * | 2008-05-23 | 2009-12-03 | Cosmo Instruments Co Ltd | External pressure detection type leak inspection device and leak inspection method using the same |
| KR101264595B1 (en) * | 2006-11-13 | 2013-05-23 | 주식회사 한텍테크놀로지 | Leak inspection apparatus using pressure-difference, and controlling method thereof |
| CN104833464A (en) * | 2015-05-26 | 2015-08-12 | 合肥佳智自动化科技有限公司 | Multifunctional airtight detector and detection method thereof |
| CN106017825A (en) * | 2016-06-23 | 2016-10-12 | 苏州艾酷玛赫设备制造有限公司 | Airtightness test device |
| CN114323486A (en) * | 2021-12-08 | 2022-04-12 | 重庆铁马工业集团有限公司 | Method for rapidly detecting high-pressure micro-leakage of accumulator |
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|---|---|---|---|---|
| KR101264595B1 (en) * | 2006-11-13 | 2013-05-23 | 주식회사 한텍테크놀로지 | Leak inspection apparatus using pressure-difference, and controlling method thereof |
| JP2009281934A (en) * | 2008-05-23 | 2009-12-03 | Cosmo Instruments Co Ltd | External pressure detection type leak inspection device and leak inspection method using the same |
| CN104833464A (en) * | 2015-05-26 | 2015-08-12 | 合肥佳智自动化科技有限公司 | Multifunctional airtight detector and detection method thereof |
| CN106017825A (en) * | 2016-06-23 | 2016-10-12 | 苏州艾酷玛赫设备制造有限公司 | Airtightness test device |
| KR20230056087A (en) * | 2021-10-19 | 2023-04-27 | 경일대학교산학협력단 | Hybrid Leak Inspection Device |
| KR102668858B1 (en) * | 2021-10-19 | 2024-05-24 | 경일대학교산학협력단 | Hybrid Leak Inspection Device |
| CN114323486A (en) * | 2021-12-08 | 2022-04-12 | 重庆铁马工业集团有限公司 | Method for rapidly detecting high-pressure micro-leakage of accumulator |
| CN114323486B (en) * | 2021-12-08 | 2023-05-23 | 重庆铁马工业集团有限公司 | Rapid detection method for high-pressure micro-leakage of accumulator |
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