JP2000320701A - Check valve - Google Patents
Check valveInfo
- Publication number
- JP2000320701A JP2000320701A JP11127468A JP12746899A JP2000320701A JP 2000320701 A JP2000320701 A JP 2000320701A JP 11127468 A JP11127468 A JP 11127468A JP 12746899 A JP12746899 A JP 12746899A JP 2000320701 A JP2000320701 A JP 2000320701A
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- valve body
- valve
- pressing member
- gas
- check valve
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、特に、半導体製造
装置における高純度ガス供給系の集積化ガス制御装置に
組み込み、若しくはガス配管の途中に接続するなどによ
り使用するのに適する逆止弁に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a check valve particularly suitable for use in an integrated gas control system of a high-purity gas supply system in a semiconductor manufacturing apparatus, or connected to a gas pipe halfway. .
【０００２】[0002]
【従来の技術】従来、半導体製造装置における高純度ガ
ス供給系で使用されている一般的な逆止弁について図７
を参照しながら概略説明すると、以下のように構成され
ている。本体１０１の一側と他側にガス流入通路１０２
とガス流出通路１０３が形成され、本体１０１の中間部
にガス流入通路１０２とガス流出通路１０３とに連通す
る空所１０４が形成され、この空所１０４におけるガス
流入通路１０３の出口側周縁部にゴム製の弁座１０５が
設けられ、空所１０４に弁体（ポペット）１０６が軸方
向に移動可能に設けられ、空所１０４に弁体１０６を弁
座１０５に押圧する圧縮ばね１０７が設けられている。2. Description of the Related Art A general check valve conventionally used in a high-purity gas supply system in a semiconductor manufacturing apparatus is shown in FIG.
This will be briefly described with reference to FIG. A gas inflow passage 102 is provided on one side and the other side of the main body 101.
And a gas outflow passage 103 are formed, and a space 104 communicating with the gas inflow passage 102 and the gas outflow passage 103 is formed in an intermediate portion of the main body 101. A rubber valve seat 105 is provided, a valve body (poppet) 106 is provided in the space 104 so as to be movable in the axial direction, and a compression spring 107 for pressing the valve body 106 against the valve seat 105 is provided in the space 104. ing.
【０００３】そして、ガス流入通路１０２に流入した高
純度ガスは、弁体１０６を圧縮ばね１０７の弾性に抗し
て弁座１０５から離隔させ、空所１０４を通り、ガス流
出通路１０３から流出する。何らかのトラブルでガスが
ガス流出通路１０３に逆流すると、このガスは弁体１０
６を圧縮ばね１０７の反撥力と共に弁座１０５に加圧し
てガス流入通路１０２を閉じ、ガス流入通路１０２側へ
流入するのを阻止される。The high-purity gas flowing into the gas inflow passage 102 separates the valve body 106 from the valve seat 105 against the elasticity of the compression spring 107, passes through the space 104, and flows out of the gas outflow passage 103. . If the gas flows back into the gas outflow passage 103 due to some trouble, this gas is discharged to the valve body 10.
6 is pressed against the valve seat 105 together with the repulsive force of the compression spring 107 to close the gas inflow passage 102 and prevent the gas from flowing into the gas inflow passage 102.
【０００４】しかしながら、前記従来例の構成では、弁
体１０６の開閉時に弁体１０６と圧縮ばね１０７とがこ
すれ、パーティクルが発生し、高純度ガスに混入してそ
の純度を低下させる。また、弁体１０６はそのガス受圧
面積が小さく、ガス流量の影響を受けやすいため、ガス
の低流量時に弁体がに円滑に開閉作動せず、チャタリン
グが発生し、この弁体１０６の振動によりパーティクル
が発生して高純度ガスの純度を低下させるばかりでな
く、圧力変動によりガス供給流量が不安定となる。However, in the configuration of the above-mentioned conventional example, when the valve body 106 is opened and closed, the valve body 106 and the compression spring 107 are rubbed, and particles are generated and mixed into high-purity gas to lower the purity. Further, since the valve body 106 has a small gas receiving pressure area and is easily affected by the gas flow rate, the valve body does not smoothly open and close when the gas flow rate is low, and chattering occurs. Not only particles are generated to lower the purity of the high-purity gas, but also the gas supply flow rate becomes unstable due to pressure fluctuation.
【０００５】そこで、前記従来例の問題を解消すべく、
従来の他の逆止弁として、ダイヤフラムを用いて無摺動
化した構成が提案されている（特許第２６６８１６７号
公報、特開平６−２３５４６９号公報、特開平６−２６
５０３５号公報、特開平７−４５４２号公報参照）。Therefore, in order to solve the problem of the conventional example,
As another conventional non-return valve, a configuration in which a non-sliding member is provided by using a diaphragm has been proposed (Japanese Patent No. 2668167, Japanese Patent Application Laid-Open No. 6-235469, Japanese Patent Application Laid-Open No. 6-26).
No. 5035, JP-A-7-4542).
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、前記の
ような無摺動化逆止弁の構成では、ガスの供給、逆流時
の圧力をダイヤフラムが直接受けて撓むため、長時間の
使用によりダイヤフラムがへたる。したがって、信頼性
および耐久性に難点がある。However, in the structure of the non-sliding check valve as described above, since the diaphragm is directly subjected to the gas supply and the pressure at the time of backflow and is bent, the diaphragm is used for a long time. Sloppy. Therefore, there is a problem in reliability and durability.
【０００７】本発明の目的は、長期間に亘って確実に弁
体を開閉することができ、したがって、信頼性および耐
久性を向上させることができ、また、弁体の開閉時のパ
ーティクルの発生を抑制することができ、したがって、
供給ガスの純度低下を防止することができるようにした
逆止弁を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to reliably open and close a valve over a long period of time, thereby improving reliability and durability, and generating particles when the valve is opened and closed. And therefore,
An object of the present invention is to provide a check valve capable of preventing a decrease in purity of a supplied gas.
【０００８】本発明の他の目的は、低流量時におけるチ
ャタリングの発生を防止することができてパーティクル
の発生を抑制することができるとともに、圧力変動を防
止することができ、したがって、更に一層、供給ガスの
高純度低下を防止することができるとともに、ガス供給
系の流量を安定させることができるようにした逆止弁を
提供するにある。Another object of the present invention is to prevent the occurrence of chattering at the time of a low flow rate and the generation of particles, and also to prevent the fluctuation of pressure. It is an object of the present invention to provide a check valve capable of preventing a decrease in high purity of a supply gas and stabilizing a flow rate of a gas supply system.
【０００９】[0009]
【課題を解決するための手段】上記課題を解決するため
に本発明の逆止弁は、ガス流入通路およびガス流出通路
を有するとともに、これらガス流入通路、ガス流出通路
間に空所を有する弁本体と、前記空所における前記ガス
流入通路の出口側周縁部に設けられた弁座と、前記空所
に前記弁座と対向するように設けられた弁体と、前記弁
本体と前記弁体との間に設けられ、前記弁体を片持ち式
で前記弁座に押圧して前記ガス流入通路を開放可能に閉
塞する板ばね材から成る押圧部材とを備えたものであ
る。In order to solve the above-mentioned problems, a check valve according to the present invention has a gas inflow passage and a gas outflow passage, and has a space between the gas inflow passage and the gas outflow passage. A main body, a valve seat provided in an outer peripheral portion of the gas inflow passage in the space, a valve body provided in the space so as to face the valve seat, the valve body and the valve body And a pressing member made of a leaf spring material that presses the valve body against the valve seat in a cantilever manner and closes the gas inflow passage so as to be openable.
【００１０】上記課題を解決するために本発明の他の逆
止弁は、前記構成において、弁体が円盤状に形成され、
ガス流入通路の出口側が大径に形成されて前記弁体の流
入ガスによる受圧面積が大きくなるように構成されたも
のである。In order to solve the above-mentioned problems, another check valve according to the present invention, in the above structure, has a valve body formed in a disk shape,
The outlet side of the gas inflow passage is formed to have a large diameter so that the pressure receiving area of the valve body due to the inflow gas is increased.
【００１１】前記各構成において、押圧部材が、弁体と
の固定部から離隔するに従い、次第に弁体から離隔する
ように緩やかに傾斜する緩傾斜部と、この緩傾斜部から
離隔するに従い、前記緩傾斜部よりも少し急な角度で次
第に前記弁体から離隔するように傾斜する急傾斜部とを
有し、前記急傾斜部を弁本体の傾斜面に当接させ、前記
緩傾斜部を前記弁本体の傾斜面の角部が支点となって撓
み得るように構成することができ、この場合、押圧部材
をコバルト合金によりその板厚が約０．０８ｍｍとなる
ように形成するとともに、前記緩傾斜部の前記弁体に対
する傾斜角度を約１０度に設定するのが好ましい。In each of the above configurations, as the pressing member is separated from the fixed portion with the valve body, the pressing member is gradually inclined so as to be gradually separated from the valve body. A steeply inclined portion that is gradually inclined at a slightly steeper angle than the gentlely inclined portion so as to be separated from the valve body, the steeply inclined portion is brought into contact with an inclined surface of a valve body, and the gentlely inclined portion is The valve body may be configured such that the corners of the inclined surface of the valve body can be bent as a fulcrum. In this case, the pressing member is formed of a cobalt alloy so as to have a thickness of about 0.08 mm, and It is preferable that the inclination angle of the inclined portion with respect to the valve body is set to about 10 degrees.
【００１２】前記各構成において、押圧部材の先端部を
その穴により弁体の背面側の筒状突出部に嵌合し、前記
筒状突出部に押さえリングを嵌合して前記押圧部材の先
端部を前記弁体に対して押さえ、前記筒状突出部の先端
部を前記押さえリングにかしめて前記押さえリングを前
記筒状突出部に対して抜止めし、前記押圧部材の先端部
を前記弁体に固定することができる。In each of the above constructions, the distal end of the pressing member is fitted into the cylindrical projection on the back side of the valve body through the hole, and a pressing ring is fitted to the cylindrical projection to thereby form the distal end of the pressing member. Part is pressed against the valve body, the tip of the cylindrical projection is caulked to the holding ring to prevent the holding ring from being pulled out from the cylindrical projection, and the tip of the pressing member is placed in the valve. Can be fixed to the body.
【００１３】前記各構成において、押圧部材の基部を溶
接により弁本体に固定し、または押圧部材の基部を弁本
体に挟持させて固定し、または押圧部材の基部を弁本体
の押さえ部材により押さえた状態で、この押さえ部材と
共に前記弁本体にねじ止めにより固定することができ
る。In each of the above structures, the base of the pressing member is fixed to the valve body by welding, or the base of the pressing member is fixed by being sandwiched between the valve bodies, or the base of the pressing member is pressed by the pressing member of the valve body. In this state, it can be fixed to the valve body together with the pressing member by screwing.
【００１４】前記のように構成された本発明によれば、
弁体を片持ち式に支持し、弁体の開閉に用いる押圧部材
を板ばねにより形成し、しかも、この押圧部材は弁体を
開く際に撓み、弁体を閉じる際に弾性復元するだけであ
り、圧力を直接受けることがないので、圧力を直接受け
る従来例のダイヤフラムのように部分的に無理な力が加
わらないようにし、長期間に亘って確実に弁体を開閉す
ることができる。また、板ばねから成る押圧部材により
弁体を片持ち式に支持して弁体を全体としてスイング式
に回動させてガス流入通路を開閉するようにしているの
で、弁体開閉時のこすれを抑制してパーティクルの発生
を抑制することができる。According to the present invention configured as described above,
The valve element is supported in a cantilever manner, and a pressing member used for opening and closing the valve element is formed by a leaf spring, and the pressing member bends when the valve element is opened and elastically restores when the valve element is closed. Since the pressure is not directly received, the valve body can be reliably opened and closed for a long period of time by preventing partial excessive force from being applied, unlike a conventional diaphragm that directly receives pressure. Further, since the valve element is supported in a cantilever manner by a pressing member formed of a leaf spring and the valve element is rotated in a swing manner as a whole to open and close the gas inflow passage, rubbing when opening and closing the valve element is prevented. The generation of particles can be suppressed by suppressing the generation.
【００１５】また、弁体を円盤状に形成し、ガス流入通
路の出口側を大径に形成して弁体の流入ガスによる受圧
面積を大きくなるように構成することにより、ガスの低
流量時においても弁体を安定状態で確実に開閉すること
ができるので、チャタリングの発生を防止することがで
きてパーティクルの発生を抑制することができるととも
に、圧力変動を防止することができる。Further, the valve body is formed in a disk shape, and the outlet side of the gas inflow passage is formed to have a large diameter so as to increase the pressure receiving area of the valve body due to the inflow gas, so that the gas flow rate can be reduced when the gas flow rate is low. In this case as well, the valve element can be reliably opened and closed in a stable state, so that chattering can be prevented, particles can be prevented from being generated, and pressure fluctuation can be prevented.
【００１６】[0016]
【発明の実施の形態】以下、本発明の実施形態について
図面を参照しながら説明する。まず、本発明の第１の実
施形態について説明する。図１は本発明の第１の実施形
態に係る逆止弁を示し、弁体を弁座に当接させてガス流
入通路を閉じた状態の縦断面図である。Embodiments of the present invention will be described below with reference to the drawings. First, a first embodiment of the present invention will be described. FIG. 1 is a longitudinal sectional view showing a check valve according to a first embodiment of the present invention, in a state where a valve body is in contact with a valve seat and a gas inflow passage is closed.
【００１７】図１に示すように、弁本体１はステンレス
等から成るガス流入側本体２、ステンレス等から成るガ
ス流出側本体３、ステンレス等から成る締付具４等から
構成されている。ガス流入側本体２は一側部に小径部５
が形成され、中間部に中間径部６が形成され、他側部に
大径部７が形成されている。小径部５の外周にはねじ８
が形成され、中間径部６の外面には位置合わせ用溝９が
形成され、大径部７の外周にはねじ１０が形成されてい
る。小径部５の端面から大径部７に至るガス流入通路１
１が軸心に沿うように形成され、このガス流入通路８が
大径部側において大径１２に拡開されている。大径部７
の内側はガス流入通路８の大径部１２が開放される更に
大径の凹入部１３が形成されている。As shown in FIG. 1, the valve body 1 comprises a gas inflow side body 2 made of stainless steel or the like, a gas outflow side body 3 made of stainless steel or the like, a fastener 4 made of stainless steel or the like. The gas inlet side main body 2 has a small diameter portion 5 on one side.
Are formed, an intermediate diameter portion 6 is formed in the intermediate portion, and a large diameter portion 7 is formed in the other side portion. Screw 8 on the outer circumference of small diameter part 5
Are formed, an alignment groove 9 is formed on the outer surface of the intermediate diameter portion 6, and a screw 10 is formed on the outer periphery of the large diameter portion 7. Gas inflow passage 1 from the end face of small diameter section 5 to large diameter section 7
1 is formed along the axis, and this gas inflow passage 8 is expanded to a large diameter 12 on the large diameter portion side. Large diameter part 7
Inside, a larger diameter recessed portion 13 is formed in which the large diameter portion 12 of the gas inflow passage 8 is opened.
【００１８】ガス流出側本体３は一側部に小径部１４が
形成され、中間部に中間径部１５が形成され、他側部に
大径部１６が形成されている。小径部１４の外周にはね
じ１７が形成され、中間径部１５の外面には位置合わせ
用溝１８が形成され、大径部１６の外周には環状の係止
部１９が突設されている。ガス流出側本体３の内側には
ガス流出通路２０が形成されている。このガス流出通路
２０は大径部１６および中間径部１５においては大径部
１６の端面外周部から小径部１４側の軸心部に至る間で
傾斜され、小径部１４の内側で軸心に沿うように形成さ
れている。大径部１６の端面においてガス流出通路２０
の開放側とは反対側に突出部２１が形成され、突出部２
１における外周側は外縁側に至るに従い、次第に中間径
部１５側に後退する傾斜面２１ａに形成されている。The gas outlet side main body 3 has a small diameter portion 14 formed on one side, an intermediate diameter portion 15 formed on an intermediate portion, and a large diameter portion 16 formed on the other side. A screw 17 is formed on the outer periphery of the small-diameter portion 14, a positioning groove 18 is formed on the outer surface of the intermediate-diameter portion 15, and an annular locking portion 19 protrudes from the outer periphery of the large-diameter portion 16. . A gas outflow passage 20 is formed inside the gas outflow side main body 3. The gas outflow passage 20 is inclined at the large diameter portion 16 and the intermediate diameter portion 15 from the outer peripheral portion of the end face of the large diameter portion 16 to the axis portion on the small diameter portion 14 side, and is axially inside the small diameter portion 14. It is formed so as to follow. At the end face of the large diameter portion 16, the gas outflow passage 20
A projection 21 is formed on the side opposite to the open side of the
The outer peripheral side of 1 is formed on an inclined surface 21a which gradually recedes toward the intermediate diameter portion 15 as it reaches the outer edge side.
【００１９】締付具４は環状に形成され、一側内周にね
じ２２が形成され、他側端部内周には小径となる環状の
係止部２３が形成されている。ガス流入側本体２の大径
部７における凹入部１３の開放側にはガス流出側本体２
の大径部１６における端部側が挿入され、大径部７の端
面と係止部１９との間にステンレス等から成るガスケッ
ト２４が介在されている。ガス流入側本体２の大径部７
とガス流出側本体３の大径部１６との外周において、締
付具４の係止部２３がガス流出側本体３の係止部１９に
係止された状態で締付具４のねじ２２がガス流入側本体
２のねじ１０に螺合されて締付けられ、ガス流入側本体
２とガス流出側本体３とがガスケット２４を介してシー
ル状態に接続されている。The fastener 4 is formed in an annular shape, a screw 22 is formed on the inner circumference on one side, and an annular locking portion 23 having a small diameter is formed on the inner circumference on the other end. On the open side of the concave portion 13 in the large diameter portion 7 of the gas inflow side main body 2, the gas outflow side main body 2 is provided.
Of the large diameter portion 16 is inserted, and a gasket 24 made of stainless steel or the like is interposed between the end face of the large diameter portion 7 and the locking portion 19. Large diameter portion 7 of gas inlet side main body 2
At the outer periphery of the large diameter portion 16 of the gas outlet side body 3, the screw 22 of the fastener 4 is held in a state where the locking portion 23 of the fastener 4 is locked to the locking portion 19 of the gas outlet side body 3. Is screwed into the screw 10 of the gas inflow side main body 2 and tightened, and the gas inflow side main body 2 and the gas outflow side main body 3 are connected in a sealed state via a gasket 24.
【００２０】前記のように構成された弁本体１の内側に
はガス流入側本体２の大径部７とガス流出側本体３の大
径部１６との間で、ガス流入通路１１とガス流出通路２
０とに連通する空所（弁室）２５が形成されている。ガ
ス流入側本体２のガス流入通路１１の大径部１２の出口
側外周部において段差状の環状溝２６が形成され、この
環状溝２６における外周側の浅い部分にゴム製の弁座２
７の基部側が挿入され、環状溝２６における内周側の深
い部分にステンレス等から成る保持筒２８が圧入され、
保持筒２８の先端部が弁座２７に対してかしめられて弁
座２７はその先端部側が空所２５内に突出された状態で
固定されている。空所２５内には弁体（フラッパー）２
９が設けられる。この弁体２９はステンレス等により円
盤状に形成され、背面側中央部に筒状部３０が一体に設
けられている。筒状部３０には板ばね材、好ましくは、
耐食性、ばね性に優れたコバルト合金から成る押圧部材
３１の先端部がこの先端部に形成された穴３１ａにより
嵌合されている。筒状部３０の外側には押さえリング３
２が嵌合されて押圧部材３１の先端部が弁体２９に対し
て押さえられ、筒状部３０の先端部が押さえリング３２
に対してかしめられ、押さえリング３２が抜止めされた
状態で、押圧部材３１の先端部が弁体２９と押さえリン
グ３２とで挟持されて固定されている。Inside the valve body 1 constructed as described above, between the large diameter portion 7 of the gas inflow side body 2 and the large diameter portion 16 of the gas outflow side body 3, the gas inflow passage 11 and the gas outflow Passage 2
A space (valve chamber) 25 communicating with the valve 0 is formed. A step-shaped annular groove 26 is formed at the outer peripheral portion of the large-diameter portion 12 of the gas inflow passage 11 of the gas inflow side main body 2, and a rubber valve seat 2 is formed at a shallow outer peripheral portion of the annular groove 26.
7 is inserted, and a holding cylinder 28 made of stainless steel or the like is press-fitted into a deep portion on the inner peripheral side of the annular groove 26,
The distal end of the holding cylinder 28 is swaged against the valve seat 27, and the valve seat 27 is fixed with its distal end protruding into the cavity 25. A valve body (flapper) 2 in the empty space 25
9 are provided. The valve body 29 is formed in a disc shape with stainless steel or the like, and a tubular portion 30 is integrally provided at a central portion on the back side. The tubular portion 30 has a leaf spring material, preferably,
The distal end of a pressing member 31 made of a cobalt alloy having excellent corrosion resistance and spring properties is fitted by a hole 31a formed at the distal end. Pressing ring 3 on the outside of cylindrical portion 30
2 is fitted, the distal end of the pressing member 31 is pressed against the valve body 29, and the distal end of the tubular portion 30 is pressed against the pressing ring 32.
In a state where the pressing ring 32 is prevented from being pulled out, the distal end of the pressing member 31 is sandwiched and fixed between the valve body 29 and the pressing ring 32.
【００２１】押圧部材３１は弁体２９との固定部から離
隔するに従い、次第に弁体２９から離隔するように緩や
かに傾斜する緩傾斜部と、この緩傾斜部から離隔するに
従い、前記緩傾斜部よりも少し急な角度で次第に弁体２
９から離隔するように傾斜する急傾斜部とを有し、急傾
斜部がガス流出側本体３の傾斜面２１ａに当接されてス
ポット溶接３３により固定され、緩傾斜面が傾斜面２１
ａの角部２１ｂを支点として撓み得るようになってい
る。このような状態で弁体２９は板ばね材から成る押圧
部材３１により片持ち式に支持され、押圧部材３１によ
り弁座２７に当接されてガス流入通路１１が閉じられ、
ガス流入通路１１から流入するガスの圧力により押圧部
材３１の弾性に抗して弁座２７から離隔され、ガス流入
通路１１が空所２５に開放されるようになっている。そ
して、前記のように押圧部材３１は緩傾斜部と急傾斜部
との折曲げ部が傾斜面２１ａの角部２１ｂに位置され、
この角部２１ｂを支点として撓むようにしているので、
弁体２９が弁座２７から離角する際に無理なく撓み、ま
た比較的強い復元弾性により弁体２９を弁座２７に押圧
することができる。As the pressing member 31 is separated from the fixed portion with the valve body 29, the pressing member 31 is gradually inclined so as to be gradually separated from the valve body 29, and as the distance from the gentle inclined portion is reduced, Valve element 2 gradually at a slightly steeper angle than
9, a steeply inclined portion that is inclined so as to be separated from the inclined surface 21. The steeply inclined portion is brought into contact with the inclined surface 21a of the gas outflow side main body 3 and is fixed by spot welding 33.
a can be bent with the corner 21b of FIG. In this state, the valve body 29 is supported in a cantilever manner by a pressing member 31 made of a leaf spring material, and is brought into contact with the valve seat 27 by the pressing member 31 to close the gas inflow passage 11,
The pressure of the gas flowing from the gas inflow passage 11 causes the pressure member 31 to be separated from the valve seat 27 against the elasticity of the pressing member 31, and the gas inflow passage 11 is opened to the cavity 25. Then, as described above, the pressing member 31 has the bent portion between the gentle slope portion and the sharp slope portion located at the corner portion 21b of the slope surface 21a,
Since this corner portion 21b is made to bend as a fulcrum,
When the valve body 29 separates from the valve seat 27, the valve body 29 is flexibly bent, and the valve body 29 can be pressed against the valve seat 27 by relatively strong restoring elasticity.
【００２２】弁体２９の開放状態については、図示して
いないが、全体的には板ばねから成る片持ち式の押圧部
材３１によりスイング式の開閉動作を行うことになる
が、弁体２９が弁座２７から離れる際、若しくは弁座２
７に当接する直前において、軸心方向に短い距離で平行
移動させ、弁体２９が弁座２７を全くこすることなく離
隔し、また、弁体２９がその全周に亘って弁座２７の全
周に均等な圧力で当接し、更に、弁体２９の弁座２７に
対する適度な加圧力（クラッキング力）を得るようにす
るには、押圧部材３１の材質、板厚、緩傾斜部のセッテ
ィング角度等を適宜選択することにより達成することが
できる。Although the open state of the valve body 29 is not shown, a swing type opening / closing operation is performed by a cantilever-type pressing member 31 composed of a leaf spring as a whole. When leaving the valve seat 27 or valve seat 2
Immediately before contacting the valve seat 7, the valve body 29 is translated in a short distance in the axial direction, the valve body 29 is separated without rubbing the valve seat 27 at all, and the valve body 29 is moved around the entire circumference of the valve seat 27. In order to contact the entire circumference with an equal pressure and to obtain an appropriate pressing force (cracking force) of the valve body 29 against the valve seat 27, the material of the pressing member 31, the thickness of the pressing member, and the setting of the gentle slope portion are set. This can be achieved by appropriately selecting the angle and the like.
【００２３】前記のように構成された逆止弁は、高純度
ガス供給ラインの途中にねじ８、１７により接続して使
用する。そして、ガスがガス流入通路１１に流入して大
径部１２に至ると、そのガス圧力により弁体２９が板ば
ねから成る押圧部材３１の弾性に抗してスイング式に回
動され、ガス流入通路１１が空所２５に連通される。こ
れに伴い、ガスはガス流入通路１１から空所２５を経て
ガス流出通路２０へ流出する。ここで何らかのトラブル
でガスがガス流出通路２０、空所２５に逆流すると、こ
のガスの圧力と押圧部材３１の反撥弾性とにより弁体２
９がスイング式に回動されて弁座２７に押圧され、ガス
流入通路１１を空所２５に対して閉じる。これによりガ
ス流入通路１１へ逆流するのを防止することができる。The check valve constructed as described above is used by connecting it with screws 8 and 17 in the middle of the high-purity gas supply line. When the gas flows into the gas inflow passage 11 and reaches the large-diameter portion 12, the gas pressure causes the valve body 29 to swing in a swinging manner against the elasticity of the pressing member 31 formed of a leaf spring. The passage 11 communicates with the empty space 25. Accordingly, the gas flows out of the gas inflow passage 11 to the gas outflow passage 20 through the space 25. Here, when the gas flows back into the gas outflow passage 20 and the space 25 due to some trouble, the pressure of the gas and the rebound resilience of the pressing member 31 cause the valve body 2 to return.
9 is swung and pressed by the valve seat 27 to close the gas inflow passage 11 with respect to the cavity 25. Thereby, it is possible to prevent the gas from flowing back to the gas inflow passage 11.
【００２４】このように本実施形態に係る逆止弁によれ
ば、弁体２９を板ばねから成る片持ち式の押圧部材３１
により弁座２７に押圧するようにしているので、長期間
使用しても押圧部材３１がへたるおそれがなく、弁体２
９の押圧力を安定させることができ、耐久性および信頼
性を向上させることができる。特に、押圧部材３１の折
曲げ部をガス流出側本体３の傾斜面２１ａの角部２１ｂ
に位置させ、押圧部材３１の緩傾斜部を角部２１ｂを支
点として撓むようにすることにより、弁体２９を開く際
に押圧部材３１を無理なく撓ませ、弁体２９を閉じる際
に比較的強い反撥力によりを弁座２７に押圧することが
できる。また、押圧部材３１として、耐食性、ばね性の
高いコバルト合金を用いることにより、更に一層、弁体
２９の押圧力を安定させ、耐久性および信頼性を向上さ
せることができる。また、板ばねから成る片持ち式の押
圧部材３１により弁体２９スイング式に回動させるよう
にし、こすれる部分がほとんどなく、パーティクルの発
生を抑制することができるので、供給ガスの純度低下を
防止することができる。As described above, according to the check valve of this embodiment, the valve body 29 is a cantilever type pressing member 31 made of a leaf spring.
The pressure member 31 is pressed against the valve seat 27, so that the pressing member 31 is not likely to be slackened even when used for a long time.
9 can be stabilized, and the durability and reliability can be improved. In particular, the bent portion of the pressing member 31 is turned into the corner portion 21 b of the inclined surface 21 a of the gas outflow side main body 3.
, And the gentle slope portion of the pressing member 31 is bent with the corner 21b as a fulcrum, so that the pressing member 31 is bent without difficulty when the valve body 29 is opened, and relatively strong when the valve body 29 is closed. The repulsive force can press the valve seat 27. Further, by using a cobalt alloy having high corrosion resistance and high spring properties as the pressing member 31, the pressing force of the valve body 29 can be further stabilized, and the durability and reliability can be further improved. In addition, the cantilever-type pressing member 31 made of a leaf spring is used to rotate the valve body 29 in a swinging manner, so that there is almost no rubbing part and generation of particles can be suppressed, thereby preventing a decrease in purity of the supplied gas. can do.
【００２５】また、前記のように弁体２９が弁座２７か
ら離れる際、若しくは弁座２７に当接する直前におい
て、弁体２９を平行に移動させることにより、こする部
分が全くなくなる無摺動化を図ることができ、更に一
層、パーティクルの発生を抑制して供給ガスの純度低下
を防止することができ、しかも、確実にガス流入通路１
１を閉塞することができる。また、弁体２９を円盤状に
形成し、ガス流入通路１１の出口側を大径部１２に形成
して弁体２９における流入ガスの受圧面積が大きくなる
ように構成することにより、ガスの低流量時において
も、ガス流の影響をほとんど受けないようにしてチャタ
リングの発生を防止することができ、更に一層、パーテ
ィクルの発生を防止することができて供給ガスの純度低
下を防止することができ、しかも、ガス供給系の流量を
安定化させることができる。Further, as described above, when the valve body 29 is separated from the valve seat 27 or immediately before the valve body 27 comes into contact with the valve seat 27, the valve body 29 is moved in parallel, so that there is no rubbing part. And the generation of particles can be further suppressed to prevent a decrease in the purity of the supplied gas.
1 can be closed. Further, the valve body 29 is formed in a disk shape, and the outlet side of the gas inflow passage 11 is formed in the large-diameter portion 12 so that the pressure receiving area of the inflow gas in the valve body 29 is increased. Even at the time of the flow rate, the occurrence of chattering can be prevented by being hardly affected by the gas flow, and further, the generation of particles can be prevented, and the purity of the supplied gas can be prevented from lowering. Moreover, the flow rate of the gas supply system can be stabilized.
【００２６】次に、本発明の第２の実施形態について説
明する。図２は本発明の第２の実施形態に係る逆止弁を
示す要部の断面図である。Next, a second embodiment of the present invention will be described. FIG. 2 is a sectional view of a main part showing a check valve according to a second embodiment of the present invention.
【００２７】本実施例においては、図２に示すように、
押圧部材３１の基部がガス流入側本体２の大径部７の端
面とガスケット２４との間に挟持状態で固定されたもの
であり、その他の構成および作用については前記第１実
施形態と同様である。In this embodiment, as shown in FIG.
The base of the pressing member 31 is fixed between the end face of the large-diameter portion 7 of the gas inflow side main body 2 and the gasket 24 in a sandwiched state, and other configurations and operations are the same as those of the first embodiment. is there.
【００２８】次に、本発明の第３の実施形態について説
明する。図３は本発明の第３の実施形態に係る逆止弁を
示す要部の断面図である。Next, a third embodiment of the present invention will be described. FIG. 3 is a sectional view of a main part showing a check valve according to a third embodiment of the present invention.
【００２９】本実施例においては、図３に示すように、
押圧部材３１の基部がガス流出側本体３の傾斜面２１ａ
に挟持部材３４により挟まれ、押圧部材３１の基部が挟
持部材３４と共にねじ３５により傾斜面２１ａに螺着さ
れることにより、押圧部材３１の基部が固定されたもの
であり、その他の構成および作用については前記第１実
施形態と同様である。In this embodiment, as shown in FIG.
The base of the pressing member 31 is the inclined surface 21 a of the gas outflow side main body 3.
The base of the pressing member 31 is fixed by screwing the base of the pressing member 31 together with the holding member 34 to the inclined surface 21a with a screw 35. Is the same as in the first embodiment.
【００３０】次に、本発明の第４の実施形態について説
明する。図４（ａ）は本発明の第４の実施形態に係る逆
止弁を示す要部の断面図である。同図（ｂ）は同逆上弁
に用いる押圧部材を示す側面図である。Next, a fourth embodiment of the present invention will be described. FIG. 4A is a sectional view of a main part showing a check valve according to a fourth embodiment of the present invention. FIG. 2B is a side view showing a pressing member used for the reverse valve.
【００３１】本実施例においては、図４（ａ）、（ｂ）
に示すように、押圧部材３１がリング状に形成され、こ
のリング状の基部がガス流出側本体２の大径部７の端面
とガスケット２４との間に挟持状態で固定されたもので
あり、その他の構成および作用については前記第１の実
施形態と同様である。In this embodiment, FIGS. 4 (a) and 4 (b)
As shown in FIG. 5, the pressing member 31 is formed in a ring shape, and the ring-shaped base is fixed between the end face of the large diameter portion 7 of the gas outflow side main body 2 and the gasket 24 in a sandwiched state, Other configurations and operations are the same as those of the first embodiment.
【００３２】[0032]
【実施例】本発明の実施例として、図１の構成におい
て、弁体２９にＳＵＳ３１６Ｌを用い、押圧部材３１に
コバルト合金を用いた。そして、押圧部材３１の板厚を
約０．０８ｍｍに設定し、押圧部材３１の緩傾斜部を弁
体２９、すなわち、軸心と直角の面に対して約１０度と
なるように設定した。このように設定するとともに、弁
体２９のガス受圧面積が大きくなるように設定すること
により、弁体２９が弁座２７から離れ、若しくは当接す
る際に、弁体２９を１ｍｍ程度、平行移動させ、弁座２
７とは全くこすらないように、しかも、弁体２９をその
全周に亘って弁座２７の全周に均等に加圧した状態で閉
塞することができた。そして、図５に示すパーティクル
試験ラインのように、高純度ガス供給源４１から高純度
窒素ガスを圧力調整弁４２、空圧弁４３、マスフローメ
ータ４４、フィルタ４５を介して本発明実施例における
逆止弁４６のガス流入通路１１に流入させ、ガス流出通
路２０から流出する高純度窒素ガスをサンプリング管４
７に流入させ、ここでレーザパーティクルカウンタで高
純度窒素ガス中に含まれるパーティクル数を測定した。
レーザパーティクルカウンタの測定粒径は０．０５〜
１．００μｍである。なお、前記測定に際し、マスフロ
ーメータ４４の上流の空圧弁４３を全開したスタティッ
ク状態で測定した。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As an embodiment of the present invention, SUS316L was used for the valve body 29 and a cobalt alloy was used for the pressing member 31 in the configuration of FIG. The thickness of the pressing member 31 was set to about 0.08 mm, and the gentle slope of the pressing member 31 was set to be about 10 degrees with respect to the valve element 29, that is, the plane perpendicular to the axis. By setting as described above and setting the gas receiving pressure area of the valve body 29 to be large, when the valve body 29 separates from or comes into contact with the valve seat 27, the valve body 29 is translated by about 1 mm. , Valve seat 2
7 was not rubbed at all, and the valve body 29 could be closed in a state in which the entire circumference of the valve seat 27 was uniformly pressurized over the entire circumference. Then, as in the particle test line shown in FIG. 5, a high-purity nitrogen gas is supplied from a high-purity gas supply source 41 through a pressure regulating valve 42, a pneumatic valve 43, a mass flow meter 44, and a filter 45. The high-purity nitrogen gas flowing into the gas inflow passage 11 of the valve 46 and flowing out from the gas outflow passage 20 is supplied to the sampling pipe 4.
7, and the number of particles contained in the high-purity nitrogen gas was measured by a laser particle counter.
The measured particle size of the laser particle counter is 0.05 ~
1.00 μm. In the measurement, the measurement was performed in a static state in which the pneumatic valve 43 upstream of the mass flow meter 44 was fully opened.
【００３３】前記パーティクル試験における本発明実施
例の逆止弁４６の測定結果と、図５のパーティクル試験
ラインにおいて本発明実施例の逆止弁４６に替えて配管
を取付けたバックグラウンドの測定結果を図６のグラフ
に示す。図６から明らかなように、本発明実施例の逆止
弁４６を用いた場合には、初期のみパーティクルがＭＡ
Ｘで２７個／ｍｉｎ発生したが、その後、５個／ｍｉｎ
以下で、ほとんどは０〜１個／ｍｉｎであった。これに
対し、図７に示す従来例では、開閉時、０．１μｍ以上
のパーティクルが１００〜２００個／ｍｉｎ発生するこ
とが知られている。したがって、この試験結果からも本
発明実施例の逆止弁４６によれば、パーティクルの発生
が激減していることは明らかである。The measurement results of the check valve 46 of the embodiment of the present invention in the above-described particle test and the measurement results of the background in which the pipe is attached in place of the check valve 46 of the embodiment of the present invention in the particle test line of FIG. This is shown in the graph of FIG. As is clear from FIG. 6, when the check valve 46 of the embodiment of the present invention is used, particles
X generated 27 particles / min.
Below, most were 0-1 pieces / min. On the other hand, in the conventional example shown in FIG. 7, it is known that particles of 0.1 μm or more are generated at the time of opening and closing at 100 to 200 particles / min. Therefore, it is clear from the test results that the check valve 46 according to the embodiment of the present invention drastically reduces the generation of particles.
【００３４】なお、押圧部材３１の基部はこの基部に形
成した穴をガス流出側本体３の傾斜面２１ａに突設した
突出部に嵌合し、かしめ加工により押圧部材３１の基部
を突出部に対して固定するなど、種々の固定方式を採用
することができる。また、ガス流入側本体２の大径部７
とガス流出側本体３の大径部１６を締付けて接続する手
段も前記実施形態の構成に限定されるものではない。ま
た、ガス流入側本体２とガス流出側本体３とを溶接する
など、弁本体１も種々の構成を採用することができる。
このほか、本発明は、その基本的技術思想を逸脱しない
範囲で種々設計変更することができる。The base of the pressing member 31 has a hole formed in the base fitted into a protruding portion formed on the inclined surface 21a of the gas outflow side main body 3, and the base of the pressing member 31 is formed into a protruding portion by caulking. Various fixing methods, such as fixing with respect to, for example, can be adopted. Also, the large diameter portion 7 of the gas inflow side main body 2
The means for tightening and connecting the large diameter portion 16 of the gas outlet side main body 3 to the gas outlet side main body 3 is not limited to the configuration of the above embodiment. Further, the valve body 1 can also adopt various configurations, such as welding the gas inflow side body 2 and the gas outflow side body 3.
In addition, the present invention can be variously changed in design without departing from the basic technical idea.
【００３５】[0035]
【発明の効果】以上の説明したように本発明によれば、
弁体を片持ち式に支持し、弁体の開閉に用いる押圧部材
を板ばねにより形成し、しかも、この押圧部材は弁体を
開く際に撓み、弁体を閉じる際に弾性復元するだけであ
り、圧力を直接受けることがないので、圧力を直接受け
る従来例のダイヤフラムのように部分的に無理な力が加
わらないようにし、長期間に亘って確実に弁体を開閉す
ることができる。したがって、信頼性および耐久性を向
上させることができる。また、板ばねから成る押圧部材
により弁体を片持ち式に支持して弁体を全体としてスイ
ング式に回動させてガス流入通路を開閉するようにして
いるので、弁体開閉時のこすれを抑制してパーティクル
の発生を抑制することができる。したがって、供給ガス
の純度低下を防止することができる。As described above, according to the present invention,
The valve element is supported in a cantilever manner, and a pressing member used for opening and closing the valve element is formed by a leaf spring, and the pressing member bends when the valve element is opened and elastically restores when the valve element is closed. Since the pressure is not directly received, the valve body can be reliably opened and closed for a long period of time by preventing partial excessive force from being applied, unlike a conventional diaphragm that directly receives pressure. Therefore, reliability and durability can be improved. Further, since the valve element is supported in a cantilever manner by a pressing member formed of a leaf spring and the valve element is rotated in a swing manner as a whole to open and close the gas inflow passage, rubbing when opening and closing the valve element is prevented. The generation of particles can be suppressed by suppressing the generation. Therefore, it is possible to prevent a decrease in the purity of the supply gas.
【００３６】弁体を円盤状に形成し、ガス流入通路の出
口側を大径に形成して弁体の流入ガスによる受圧面積を
大きくなるように構成することにより、ガスの低流量時
においても弁体を安定状態で確実に開閉することができ
るので、チャタリングの発生を防止することができてパ
ーティクルの発生を抑制することができるとともに、圧
力変動を防止することができる。したがって、更に一
層、供給ガスの純度低下を防止することができるととも
に、ガス供給系の流量を安定させることができる。The valve body is formed in a disk shape, and the outlet side of the gas inflow passage is formed to have a large diameter so as to increase the pressure receiving area of the valve body due to the inflow gas. Since the valve element can be reliably opened and closed in a stable state, chattering can be prevented from occurring, particles can be suppressed from occurring, and pressure fluctuation can be prevented. Therefore, it is possible to further prevent the purity of the supply gas from lowering and to stabilize the flow rate of the gas supply system.
【００３７】押圧部材が、弁体との固定部から離隔する
に従い、次第に弁体から離隔するように緩やかに傾斜す
る緩傾斜部と、この緩傾斜部から離隔するに従い、前記
緩傾斜部よりも少し急な角度で次第に前記弁体から離隔
するように傾斜する急傾斜部とを有し、前記急傾斜部を
弁本体の傾斜面に当接させ、前記緩傾斜部を前記弁本体
の傾斜面の角部を支点として撓み得るように構成するこ
とにより、押圧部材を円滑に撓ませて弁体を開くことが
でき、押圧部材の比較的強い反撥弾性により弁座に対し
て押圧して確実に閉じることができる。そして、前記押
圧部材の材質、板厚、緩傾斜部の弁体（軸心と直角な
面）に対する傾斜角度を適宜選択することにより、弁体
が弁座から離れる際、若しくは弁座に当接する直前にお
いて弁体を平行に移動させ、弁体が弁座と全くこすらな
い無摺動化を図ってパーティクルの発生を防止すること
ができ、しかも、弁体をその全周に亘って弁座の周囲に
均等に当接させて確実にガス流入通路を閉塞することが
できる。このように弁体を平行移動させるには、押圧部
材として、例えば、コバルト合金に用いた場合、その板
厚を０．０８ｍｍに設定し、緩傾斜部を弁体に対して約
１０度の角度に設定することにより達成することができ
る。また、押圧部材として耐食性、ばね性に優れたコバ
ルト合金を用いることにより、更に一層、耐久性と信頼
性を向上させることができる。As the pressing member moves away from the fixed portion to the valve body, the gentle inclination portion gradually inclines so as to gradually move away from the valve body. A steeply inclined portion that is gradually inclined at a slightly steep angle so as to be separated from the valve body, the steeply inclined portion is brought into contact with an inclined surface of a valve body, and the gentle inclined portion is an inclined surface of the valve body. By being configured to be able to bend with the corner of the fulcrum as a fulcrum, the pressing member can be smoothly bent and the valve body can be opened, and the pressing member is pressed against the valve seat by the relatively strong repulsive resilience to reliably press the valve. Can be closed. The material of the pressing member, the plate thickness, and the inclination angle of the gently inclined portion with respect to the valve body (the plane perpendicular to the axis) are appropriately selected, so that the valve body comes into contact with the valve seat or separates from the valve seat. Immediately before, the valve body is moved in parallel, the valve body does not rub against the valve seat at all, and it is possible to prevent the generation of particles by making the valve body non-sliding. The gas inflow passage can be reliably closed by uniformly contacting the periphery. In order to translate the valve body in this way, for example, when a cobalt alloy is used as the pressing member, the plate thickness is set to 0.08 mm, and the gentle slope portion is set at an angle of about 10 degrees with respect to the valve body. Can be achieved. In addition, by using a cobalt alloy having excellent corrosion resistance and spring properties as the pressing member, the durability and reliability can be further improved.
【００３８】押圧部材の先端部をその穴により弁体の背
面側の筒状突出部に嵌合し、前記筒状突出部に押さえリ
ングを嵌合して前記押圧部材の先端部を前記弁体に対し
て押さえ、前記筒状突出部の先端部を前記押さえリング
にかしめて前記押さえリングを前記筒状突出部に対して
抜止めし、前記押圧部材の先端部を前記弁体に固定する
ことにより、製作時におけるパーティクルの発生の原因
を解消することができる。The distal end of the pressing member is fitted into the cylindrical projection on the back side of the valve body through the hole, and a pressing ring is fitted to the cylindrical projection, and the distal end of the pressing member is fitted to the valve body. And pressing the tip of the cylindrical protrusion to the holding ring to stop the holding ring from being removed from the cylindrical protrusion, and fixing the tip of the pressing member to the valve body. Thereby, the cause of the generation of particles at the time of manufacturing can be eliminated.
【００３９】押圧部材の基部を溶接により弁本体に固定
し、または押圧部材の基部を弁本体に挟持させて固定
し、または押圧部材の基部を弁本体に押さえ部材により
押さえた状態で、この押さえ部材と共に前記弁本体にね
じ止めにより固定することにより、製作時におけるパー
ティクルの発生の原因を解消することができる。The base of the pressing member is fixed to the valve body by welding, or the base of the pressing member is clamped and fixed to the valve body, or the base of the pressing member is pressed against the valve body by the pressing member. By fixing together with the member to the valve body by screwing, it is possible to eliminate the cause of the generation of particles at the time of manufacturing.
【図１】本発明の第１の実施形態に係る逆止弁を示し、
弁体を弁座に当接させてガス流入通路を閉じた状態の縦
断面図である。FIG. 1 shows a check valve according to a first embodiment of the present invention,
It is a longitudinal cross-sectional view in a state where a valve body is brought into contact with a valve seat to close a gas inflow passage.
【図２】本発明の第２の実施形態に係る逆止弁を示す要
部の断面図である。FIG. 2 is a sectional view of a main part showing a check valve according to a second embodiment of the present invention.
【図３】本発明の第３の実施形態に係る逆止弁を示す要
部の断面図である。FIG. 3 is a sectional view of a main part showing a check valve according to a third embodiment of the present invention.
【図４】（ａ）は本発明の第４の実施形態に係る逆止弁
を示す要部の断面図、（ｂ）は同逆止弁に用いる押圧部
材を示す平面図である。FIG. 4A is a sectional view of a main part showing a check valve according to a fourth embodiment of the present invention, and FIG. 4B is a plan view showing a pressing member used for the check valve.
【図５】本発明実施例に係る逆止弁のパーティクル試験
ラインを示す概略系統図である。FIG. 5 is a schematic system diagram showing a particle test line of the check valve according to the embodiment of the present invention.
【図６】同逆止弁のパーティクル試験の結果を示すグラ
フである。FIG. 6 is a graph showing a result of a particle test of the check valve.
【図７】従来の高純度ガス供給系に用いられる一般的な
逆止弁を示す縦断面図である。FIG. 7 is a longitudinal sectional view showing a general check valve used in a conventional high-purity gas supply system.
１ 弁本体 ２ ガス流入側本体 ３ ガス流出側本体 ４ 締付具 １１ ガス流入通路 １２ 大径部 ２０ ガス流出通路 ２１ａ 傾斜面 ２４ ガスケット ２５ 空所 ２７ 弁座 ２９ 弁体 ３１ 押圧部材 DESCRIPTION OF SYMBOLS 1 Valve main body 2 Gas inflow side main body 3 Gas outflow side main body 4 Fastener 11 Gas inflow passage 12 Large diameter portion 20 Gas outflow passage 21a Inclined surface 24 Gasket 25 Void 27 Valve seat 29 Valve body 31 Pressing member
Claims (8)
るとともに、これらガス流入通路、ガス流出通路間に空
所を有する弁本体と、前記空所における前記ガス流入通
路の出口側周縁部に設けられた弁座と、前記空所に前記
弁座と対向するように設けられた弁体と、前記弁本体と
前記弁体との間に設けられ、前記弁体を片持ち式で前記
弁座に押圧して前記ガス流入通路を開放可能に閉塞する
板ばね材から成る押圧部材とを備えた逆止弁。1. A valve body having a gas inflow passage and a gas outflow passage, having a space between the gas inflow passage and the gas outflow passage, and a valve body provided at an outlet side edge of the gas inflow passage in the space. A valve seat, a valve body provided in the space so as to face the valve seat, and provided between the valve body and the valve body, wherein the valve body is cantilevered to the valve seat. A check member comprising a leaf spring material for pressing the gas inflow passage to openably close the gas inflow passage.
の出口側が大径に形成されて前記弁体の流入ガスによる
受圧面積が大きくなるように構成された請求項１記載の
逆止弁。2. The non-return valve according to claim 1, wherein the valve body is formed in a disk shape, and an outlet side of the gas inflow passage is formed to have a large diameter so that a pressure receiving area of the valve body by the inflow gas is increased. valve.
るに従い、次第に弁体から離隔するように緩やかに傾斜
する緩傾斜部と、この緩傾斜部から離隔するに従い、前
記緩傾斜部よりも少し急な角度で次第に前記弁体から離
隔するように傾斜する急傾斜部とを有し、前記急傾斜部
が弁本体の傾斜面に当接され、前記緩傾斜部が前記弁本
体の傾斜面の角部を支点として撓み得るように構成され
た請求項１または２記載の逆止弁。3. A gently sloping portion that is gently inclined so as to be gradually separated from the valve body as the pressing member is separated from the fixed portion with the valve body, and the gently inclined portion is gradually separated from the gently inclined portion as the pressing member is separated from the valve body. A steeply inclined portion that is gradually inclined away from the valve body at a slightly steeper angle, wherein the steeply inclined portion is in contact with an inclined surface of the valve body, and the gentlely inclined portion is formed of the valve body. 3. The check valve according to claim 1, wherein the check valve is configured to be able to bend with a corner of the inclined surface as a fulcrum.
板厚が約０．０８ｍｍであり、緩傾斜部の弁体に対する
傾斜角度が約１０度に設定された請求項３記載の逆止
弁。4. The check valve according to claim 3, wherein the pressing member is made of a cobalt alloy, the plate thickness is about 0.08 mm, and the inclination angle of the gentle inclination part with respect to the valve body is set to about 10 degrees.
背面側の筒状突出部に嵌合され、前記筒状突出部に押さ
えリングが嵌合されて前記押圧部材の先端部が前記弁体
に対して押さえられ、前記筒状突出部の先端部が前記押
さえリングにかしめられて前記押さえリングが前記筒状
突出部に対して抜止めされ、前記押圧部材の先端部が前
記弁体に固定された請求項１ないし４のいずれかに記載
の逆止弁。5. The distal end of the pressing member is fitted into the cylindrical projection on the back side of the valve body by the hole, and a pressing ring is fitted to the cylindrical projection, and the distal end of the pressing member is The pressing member is pressed against the valve body, the distal end of the cylindrical protrusion is caulked to the pressing ring, the pressing ring is prevented from being removed from the cylindrical protrusion, and the distal end of the pressing member is the valve body. The check valve according to claim 1, wherein the check valve is fixed to the check valve.
定された請求項１ないし５のいずれかに記載の逆止弁。6. The check valve according to claim 1, wherein the base of the pressing member is fixed to the valve body by welding.
定された請求項１ないし５のいずれかに記載の逆止弁。7. The check valve according to claim 1, wherein the base of the pressing member is fixed by being sandwiched by the valve body.
より押さえられた状態で、この押さえ部材と共に前記弁
本体にねじ止めにより固定された請求項１ないし５のい
ずれかに記載の逆止弁。8. The check valve according to claim 1, wherein the base of the pressing member is fixed to the valve body together with the pressing member by screwing while the base of the pressing member is pressed by the pressing member. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11127468A JP2000320701A (en) | 1999-05-07 | 1999-05-07 | Check valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11127468A JP2000320701A (en) | 1999-05-07 | 1999-05-07 | Check valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000320701A true JP2000320701A (en) | 2000-11-24 |
Family
ID=14960685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11127468A Pending JP2000320701A (en) | 1999-05-07 | 1999-05-07 | Check valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000320701A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014190476A (en) * | 2013-03-28 | 2014-10-06 | Kitz Corp | Check valve and method for manufacturing valve body for check valve |
| CN107654714A (en) * | 2016-07-25 | 2018-02-02 | Ckd株式会社 | Electromagnetic actuators |
-
1999
- 1999-05-07 JP JP11127468A patent/JP2000320701A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014190476A (en) * | 2013-03-28 | 2014-10-06 | Kitz Corp | Check valve and method for manufacturing valve body for check valve |
| CN107654714A (en) * | 2016-07-25 | 2018-02-02 | Ckd株式会社 | Electromagnetic actuators |
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