JP2000294851A - Laminated piezoelectric electronic device - Google Patents

Laminated piezoelectric electronic device

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Publication number
JP2000294851A
JP2000294851A JP11099367A JP9936799A JP2000294851A JP 2000294851 A JP2000294851 A JP 2000294851A JP 11099367 A JP11099367 A JP 11099367A JP 9936799 A JP9936799 A JP 9936799A JP 2000294851 A JP2000294851 A JP 2000294851A
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Japan
Prior art keywords
electrode
conductor
linear
piezoelectric
conductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP11099367A
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Japanese (ja)
Inventor
Mamoru Sakamoto
守 坂本
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Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
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Filing date
Publication date
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Priority to JP11099367A priority Critical patent/JP2000294851A/en
Publication of JP2000294851A publication Critical patent/JP2000294851A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain a laminated piezoelectric electronic device which utilizes the vibration caused by d33 piezoelectric constant and, at the same time, has an improved breakdown voltage. SOLUTION: A laminated piezoelectric electronic device is constituted by alternately stacking a plurality of first conductor layers each composed of a plurality of linear conductors 14a arranged in parallel, and a plurality of second conductor layers each composed of a plurality of linear conductors 15a arranged in parallel upon another with piezoelectric ceramic plates 13 in between, and connecting one ends of the linear conductors 14a of each first conductor layer to an external electrode 12a and one ends of the linear conductors 15a of each conductor layer to another external electrode 12b. In constituting the electronic device, the linear conductors 15a of the second conductor layers are arranged roughly correspondingly to the middle positions of the adjacent linear conductors 14a of the first conductor layer.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、圧電フィルタ、圧
電トランス、或いは圧電振動子に用いられる積層型圧電
体電子デバイスに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated piezoelectric electronic device used for a piezoelectric filter, a piezoelectric transformer, or a piezoelectric vibrator.

【０００２】[0002]

【従来の技術】近年の急速な電子機器の小型化に伴い電
子回路を構成する電子素子（電子デバイス）も小型化さ
れてきている。この種の電子素子の一例として、圧電体
を用いた圧電フィルタ、圧電トランス、及び圧電振動子
が注目されている。2. Description of the Related Art With the rapid miniaturization of electronic devices in recent years, electronic elements (electronic devices) constituting electronic circuits have also been miniaturized. As an example of this type of electronic element, a piezoelectric filter using a piezoelectric body, a piezoelectric transformer, and a piezoelectric vibrator have been attracting attention.

【０００３】例えば、従来の電磁トランスに代えて用い
られるようになった圧電トランスは、蓄電池駆動の電子
機器への商用電源からの充電回路又は商用電源から電力
を供給するための電源回路、或いは低電圧から高電圧へ
の変換回路等に用いられている。For example, a piezoelectric transformer that has been used in place of a conventional electromagnetic transformer is a charging circuit from a commercial power supply to a battery-driven electronic device, a power supply circuit for supplying power from the commercial power supply, or a low-power circuit. It is used in voltage-to-high voltage conversion circuits and the like.

【０００４】圧電トランスは、例えばチタン酸バリウム
やジルコン酸チタン酸鉛（ＰＺＴ）系の圧電セラミック
ス等の圧電材料を使用した変圧素子である。[0004] A piezoelectric transformer is a transformer element using a piezoelectric material such as barium titanate or lead zirconate titanate (PZT) based piezoelectric ceramics.

【０００５】この圧電トランスの基本構造は、圧電材料
の薄長板からなる圧電振動体、または圧電材料の薄長板
を積層した構造を有する圧電振動体の厚み方向に入力電
圧を印加して機械的振動を励起させる１次側電極を付設
した駆動部と、この機械的振動を電圧に変換して取り出
す２次側電極を付設した発電部とからなる。The basic structure of this piezoelectric transformer is such that a piezoelectric vibrator made of a thin plate of a piezoelectric material or a piezoelectric vibrator having a structure in which thin plates of a piezoelectric material are laminated is applied by applying an input voltage in the thickness direction to a machine. A drive unit provided with a primary electrode for exciting a mechanical vibration, and a power generation unit provided with a secondary electrode for converting the mechanical vibration into a voltage and extracting the voltage.

【０００６】前述したように圧電トランスは、従来の電
磁トランスに比べて小型であるため、高電圧発生素子或
いは電源用変圧素子として、液晶のバックライト電源、
空気清浄器、オゾン発生器やコピー機等に多用されてい
る。As described above, since the piezoelectric transformer is smaller than the conventional electromagnetic transformer, it is used as a high-voltage generating element or a power-supply transforming element as a liquid crystal backlight power supply.
It is widely used in air purifiers, ozone generators, copiers and the like.

【０００７】図３２は、圧電トランスの典型である所謂
ローゼン型圧電トランスを示す斜視図である。図におい
て、ローゼン型圧電トランス１は、圧電材料からなる薄
長板状のシートを積層した構造をなす圧電振動体２と、
圧電振動体２の厚み方向に対向して１次側電極３ａ，３
ｂを付設した駆動部４と、圧電振動体２の一端面に２次
側電極５を付設した発電部６とから構成されている。FIG. 32 is a perspective view showing a so-called Rosen type piezoelectric transformer which is a typical example of a piezoelectric transformer. In the figure, a Rosen-type piezoelectric transformer 1 includes a piezoelectric vibrating body 2 having a structure in which thin and long plate-shaped sheets made of a piezoelectric material are laminated;
The primary electrodes 3a and 3 are opposed to each other in the thickness direction of the piezoelectric vibrator 2.
The drive unit 4 includes a driving unit 4 provided with a “b” and a power generation unit 6 provided with a secondary electrode 5 provided on one end surface of the piezoelectric vibrating body 2.

【０００８】上記構成により、１次側電極３ａ，３ｂ間
に交流入力電圧Ｖinを印加して駆動部４に機械的振動を
励起させ、２次側電極６に交流出力電圧Ｖoutが得られ
る（Ｒoは負荷抵抗）。With the above configuration, an AC input voltage Vin is applied between the primary electrodes 3a and 3b to excite mechanical vibration in the drive unit 4 and an AC output voltage Vout is obtained at the secondary electrode 6 (Ro). Is the load resistance).

【０００９】尚、図中の矢印⇒は圧電振動体２における
分極方向を示す。即ち、一次側分極は圧電振動体２の厚
さ方向に発生し、二次側分極は圧電振動体２の長さ方向
に発生している。ここで、電圧の変換に使用する振動方
向は、圧電振動体２の長さ方向に発生する振動である。The arrow ⇒ in the drawing indicates the polarization direction in the piezoelectric vibrator 2. That is, the primary side polarization occurs in the thickness direction of the piezoelectric vibrator 2, and the secondary side polarization occurs in the length direction of the piezoelectric vibrator 2. Here, the vibration direction used for voltage conversion is vibration generated in the length direction of the piezoelectric vibrator 2.

【００１０】また、圧電トランス１は、その内部に等価
回路における抵抗成分、容量成分、誘導性分を有して共
振回路を形成しており、そのため圧電トランスの伝達効
率η（％）の周波数特性には、１次、２次、３次、・・
・の各共振周波数ｆ１、ｆ２、ｆ３、・・・にてピーク
が現れる。大きな共振ピークとして、１次共振振動（λ
／２モード）、２次共振振動（λモード）、３次共振振
動（３λ／２モード）が知られており、圧電トランス１
がこれらの共振周波数帯でのみ大きく電力を伝達する一
種のフィルタの作用を示す。Further, the piezoelectric transformer 1 forms a resonance circuit having a resistance component, a capacitance component, and an inductive component in an equivalent circuit therein. Therefore, the frequency characteristic of the transmission efficiency η (%) of the piezoelectric transformer 1 is obtained. , Primary, secondary, tertiary, ...
A peak appears at each of the resonance frequencies f1, f2, f3,. As a large resonance peak, the primary resonance vibration (λ
/ 2 mode), secondary resonance vibration (λ mode), and tertiary resonance vibration (3λ / 2 mode) are known.
Shows the operation of a kind of filter that transmits large power only in these resonance frequency bands.

【００１１】従って、高い出力電力（即ち、高い伝達効
率η）を得るためには、圧電トランス１の機械的振動に
おける基本共振周波数の波長λの１／２の整数倍（１次
共振振動（λ／２モード）、２次共振振動（λモー
ド）、３次共振振動（３λ／２モード）、・・・）で駆
動することが望ましい。Therefore, in order to obtain a high output power (ie, high transmission efficiency η), an integral multiple of １ ／ of the wavelength λ of the fundamental resonance frequency in the mechanical vibration of the piezoelectric transformer 1 (primary resonance vibration (λ / 2 mode), secondary resonance vibration (λ mode), tertiary resonance vibration (3λ / 2 mode,...).

【００１２】前述したように、一次側の駆動部４の役割
は入力された電気エネルギーを機械的エネルギー（振
動）に変換することであり、二次側の発電部６の役割は
圧電振動体２に発生した振動を電気エネルギーに変換す
ることである。As described above, the role of the primary-side drive unit 4 is to convert the input electric energy into mechanical energy (vibration), and the role of the secondary-side power generation unit 6 is to serve as the piezoelectric vibrator 2. Is to convert the generated vibration into electric energy.

【００１３】このため、一次側は与えられた電気エネル
ギーをいかに大きな振動にするか、つまり周波数が同じ
であれば使用する振動方向の変位量を大きく発生させれ
ば変換効率を高めることができる。また、二次側は、こ
の与えられた変位量によっていかに大きな電力を発生す
るかがポイントとなる。[0013] For this reason, the conversion efficiency can be increased by increasing the amount of applied electric energy to the primary side, that is, by generating a large amount of displacement in the vibration direction to be used if the frequency is the same. The point on the secondary side is how much power is generated by the given displacement amount.

【００１４】[0014]

【発明が解決しようとする課題】しかしながら、前述し
た従来のローゼン型圧電トランス１では、一次側は振動
に対して分極は垂直方向のため、圧電定数ｄ31を利用し
ている。However, in the above-mentioned conventional Rosen-type piezoelectric transformer 1, since the polarization on the primary side is perpendicular to the vibration, the piezoelectric constant d31 is used.

【００１５】ところが、圧電定数ｄ31は、振動方向に平
行な分極で用いられる圧電定数ｄ33と比べて、絶対値は
約１／３〜１／４程度であり（例、ｄ31≒−１４０に対
してｄ33≒３３０；単位は×１０-12[m/V]）、変位量の
大きな振動を発生させるには圧電定数ｄ33を使用するこ
とが好ましい。However, the absolute value of the piezoelectric constant d31 is about 1/3 to 1/4 of that of the piezoelectric constant d33 used for polarization parallel to the vibration direction (for example, d31 ≒ -140). d33 ≒ 330; the unit is × 10 −12 [m / V]), and it is preferable to use the piezoelectric constant d33 to generate a vibration with a large displacement.

【００１６】二次側については、発電量を表す電力出力
係数ｇを用いて比較すると、振動方向に垂直な分極の場
合をｇ31、振動方向に平行な分極の場合をｇ33とする
と、ｇ31とｇ33の比は約１／２〜１／３であり（例、ｇ
31≒−１０に対してｇ33≒２３；単位は×１０-3[V・m/
N]）、分極方向の振動を用いた方が好ましい。On the secondary side, a comparison is made using the power output coefficient g representing the amount of power generation. Assuming that g31 is a polarization perpendicular to the vibration direction and g33 is a polarization parallel to the vibration direction, g31 and g33 Is about 1/2 to 1/3 (eg, g
G33 ≒ 23 for 31 ≒ -10; unit is × 10 -3 [V · m /
N]), it is preferable to use vibration in the polarization direction.

【００１７】そこで、特開平１１−８４２０号公報に開
示される圧電トランスは、圧電定数ｄ33を使用して振動
を発生させるために、プラス側とマイナス側の線状電極
を交互に並べて積層している。Therefore, the piezoelectric transformer disclosed in Japanese Patent Application Laid-Open No. 11-8420 has a structure in which positive side and negative side linear electrodes are alternately arranged and stacked in order to generate vibration using the piezoelectric constant d33. I have.

【００１８】一方、電極の構造によって、特にプラス側
とマイナス側の電極が同じ層にある場合、耐圧が低下す
ることがあるという問題点があった。この理由として
は、第一に積層数が数十層から数百層と多い場合に、層
間のマイクロデラミネーションが生じるためである。第
二に、電極材料のマイグレーションが生じるためであ
る。On the other hand, depending on the structure of the electrodes, there is a problem that the withstand voltage may be reduced particularly when the plus side electrode and the minus side electrode are in the same layer. The reason is that firstly, when the number of layers is as large as several tens to several hundreds, microdelamination between layers occurs. Second, migration of the electrode material occurs.

【００１９】本発明の目的は上記の問題点に鑑み、圧電
定数ｄ33による振動を利用すると共に耐圧を向上させた
積層型圧電体電子デバイスを提供することにある。In view of the above problems, an object of the present invention is to provide a laminated piezoelectric electronic device which utilizes vibration caused by a piezoelectric constant d33 and has an improved withstand voltage.

【００２０】[0020]

【課題を解決するための手段】本発明は上記の目的を達
成するために請求項１では、第１導体層と第２導体層と
の間に圧電体層を挟むように、該第１導体層と第２導体
層と圧電体層とを交互に複数積層してなる積層型圧電体
電子デバイスにおいて、前記第１導体層は互いに平行な
複数の直線状導体からなる第１電極を有し、前記第２導
体層は互いに平行で且つ前記前記圧電体層に平行な方向
において前記第１電極の隣り合う直線状導体の間に第１
電極の直線状導体に対応して平行に配置された複数の直
線状導体からなる第２電極を有し、前記第１電極の直線
状導体同士を接続する第１接続導体と、前記第２電極の
直線状導体同士を接続する第２接続導体とを備えている
積層型圧電体電子デバイスを提案する。According to the present invention, in order to achieve the above object, according to the first aspect, the first conductor is sandwiched between the first conductor layer and the second conductor layer so as to sandwich the piezoelectric layer. In a laminated piezoelectric electronic device in which a plurality of layers, a second conductor layer, and a piezoelectric layer are alternately laminated, the first conductor layer has a first electrode composed of a plurality of linear conductors parallel to each other, The second conductor layer is disposed between the linear conductors adjacent to the first electrode in a direction parallel to each other and parallel to the piezoelectric layer.
A first connection conductor for connecting the linear conductors of the first electrode, the second connection electrode having a second electrode composed of a plurality of linear conductors arranged in parallel corresponding to the linear conductors of the electrode; and the second electrode And a second connection conductor for connecting the linear conductors to each other.

【００２１】該積層型圧電体デバイスによれば、前記第
１電極と第２電極間に交流電圧を印加すると、これら第
１電極と第２電極との間に存在する圧電体に分極が生ず
ると共に電圧印加方向の変化に同期して振動を生ずる。
また、前記第２電極の直線状導体は第１電極の隣り合う
直線状導体の間に第１電極の直線状導体に対応して平行
に配置されているので、前記圧電体の振動方向は圧電体
層とほぼ平行な方向となる。According to the laminated piezoelectric device, when an AC voltage is applied between the first electrode and the second electrode, polarization is generated in the piezoelectric material present between the first electrode and the second electrode, and Oscillation occurs in synchronization with a change in the voltage application direction.
In addition, since the linear conductor of the second electrode is disposed between the adjacent linear conductors of the first electrode in parallel corresponding to the linear conductor of the first electrode, the vibration direction of the piezoelectric body is piezoelectric. The direction is almost parallel to the body layer.

【００２２】また、請求項２では、請求項１記載の積層
型圧電体電子デバイスにおいて、前記第１電極及び第２
電極の直線状導体の一端はそれぞれデバイスの異なる表
面に露出し、前記第１接続導体は第１電極の直線状導体
が露出した面に形成された第１外部電極からなり、前記
第２接続導体は第２電極の直線状導体が露出した面に形
成された第２外部電極からなる積層型圧電体電子デバイ
スを提案する。According to a second aspect of the present invention, in the multilayer piezoelectric electronic device according to the first aspect, the first electrode and the second
One end of each of the linear conductors of the electrodes is exposed on a different surface of the device, and the first connection conductor comprises a first external electrode formed on the surface of the first electrode where the linear conductor is exposed, and the second connection conductor Proposes a laminated piezoelectric electronic device comprising a second external electrode formed on a surface of the second electrode where the linear conductor is exposed.

【００２３】該積層型圧電体デバイスによれば、各第１
電極の複数の直線状導体はその露出面に形成された第１
外部電極によって互いに接続され、各第２電極の複数の
直線状導体はその露出面に形成された第２外部電極によ
って互いに接続される。According to the laminated piezoelectric device, each of the first
The plurality of linear conductors of the electrode are formed on first exposed surfaces thereof.
The plurality of linear conductors of each second electrode are connected to each other by an external electrode, and the plurality of linear conductors of each second electrode are connected to each other by a second external electrode formed on the exposed surface.

【００２４】また、請求項３では、請求項１記載の積層
型圧電体電子デバイスにおいて、前記第１接続導体と第
２接続導体は少なくともその一部がデバイスの表面に露
出するように前記導体層に形成されていると共に、デバ
イス表面に形成され前記第１接続導体同士を接続する第
１外部電極と、デバイス表面に形成され前記第２接続導
体同士を接続する第２外部電極とを備えている積層型圧
電体電子デバイスを提案する。According to a third aspect of the present invention, in the multilayer piezoelectric electronic device according to the first aspect, the first connection conductor and the second connection conductor are so formed that at least a part thereof is exposed to the surface of the device. A first external electrode formed on the device surface and connecting the first connection conductors, and a second external electrode formed on the device surface and connecting the second connection conductors. A multilayer piezoelectric electronic device is proposed.

【００２５】該積層型圧電体デバイスによれば、各第１
導体層では第１電極の複数の直線状導体は第１接続導体
によって互いに接続され、各第２導体層では第２電極の
複数の直線状導体は第２接続導体によって互いに接続さ
れる。さらに、各第１接続導体はその露出面に形成され
た第１外部電極によって互いに接続され、各第２接続導
体はその露出面に形成された第２外部電極によって互い
に接続される。According to the laminated piezoelectric device, each of the first
In the conductor layer, the plurality of linear conductors of the first electrode are connected to each other by a first connection conductor, and in each second conductor layer, the plurality of linear conductors of the second electrode are connected to each other by a second connection conductor. Further, each first connection conductor is connected to each other by a first external electrode formed on the exposed surface, and each second connection conductor is connected to each other by a second external electrode formed on the exposed surface.

【００２６】また、請求項４では、請求項１乃至３の何
れかに記載の積層型圧電体電子デバイスにおいて、積層
方向に平行で且つ前記直線状導体に平行な異なる２つの
デバイス表面に前記直線状導体に対向するように第３の
外部電極と第４の外部電極が形成されている積層型圧電
体電子デバイスを提案する。According to a fourth aspect of the present invention, in the multilayer piezoelectric electronic device according to any one of the first to third aspects, the straight line is formed on two different device surfaces parallel to the stacking direction and parallel to the linear conductor. A multilayer piezoelectric electronic device is proposed in which a third external electrode and a fourth external electrode are formed so as to face the conductor.

【００２７】該積層型圧電体デバイスによれば、前記第
１電極及び第２電極の間に交流電圧が印加されると、こ
れら第１電極と第２電極との間に存在する圧電体に分極
が生ずると共に電圧印加方向の変化に同期して振動を生
ずる。また、前記第２電極の直線状導体は第１電極の隣
り合う直線状導体の間に第１電極の直線状導体に対応し
て平行に配置されているので、前記圧電体の振動方向は
圧電体層とほぼ平行な方向となる。さらに、第３の外部
電極と第４の外部電極が、積層方向に平行で且つ前記第
１電極及び第２電極の直線状導体に平行な位置に形成さ
れているので、前記圧電体の振動に伴い第３電極と第４
電極との間に分極が生じ、これら第３電極と第４電極と
の間に交流電圧が発生する。According to the laminated piezoelectric device, when an AC voltage is applied between the first electrode and the second electrode, the piezoelectric substance present between the first electrode and the second electrode is polarized. And vibration occurs in synchronization with the change in the voltage application direction. In addition, since the linear conductor of the second electrode is disposed between the adjacent linear conductors of the first electrode in parallel corresponding to the linear conductor of the first electrode, the vibration direction of the piezoelectric body is piezoelectric. The direction is almost parallel to the body layer. Furthermore, since the third external electrode and the fourth external electrode are formed at positions parallel to the laminating direction and parallel to the linear conductors of the first electrode and the second electrode, the third external electrode and the fourth external electrode are not affected by the vibration of the piezoelectric body. The third electrode and the fourth
Polarization occurs between the electrodes and an AC voltage is generated between the third electrode and the fourth electrode.

【００２８】また、請求項５では、第１導体層と第２導
体層との間に圧電体層を挟むように、該第１導体層と第
２導体層と圧電体層とを交互に複数積層してなる単位積
層体を２つ以上積層してなる積層型圧電体電子デバイス
であって、前記単位積層体において、前記第１導体層は
互いに平行な複数の直線状導体からなる第１電極を有
し、前記第２導体層は互いに平行で且つ前記前記圧電体
層に平行な方向において前記第１電極の隣り合う直線状
導体の間に第１電極の直線状導体に対応して平行に配置
された複数の直線状導体からなる第２電極を有し、前記
第１電極の直線状導体同士を接続する第１接続導体と、
前記第２電極の直線状導体同士を接続する第２接続導体
とを備え、異なる単位積層体の直線状導体が互いに平行
になるように前記単位積層体が積層されている積層型圧
電体電子デバイスを提案する。According to a fifth aspect of the present invention, the first conductor layer, the second conductor layer, and the piezoelectric layer are alternately arranged such that the piezoelectric layer is sandwiched between the first conductor layer and the second conductor layer. A laminated piezoelectric electronic device in which two or more unit laminates are laminated, wherein in the unit laminate, the first conductor layer is a first electrode made of a plurality of linear conductors parallel to each other. Wherein the second conductor layer is parallel to each other and parallel to the piezoelectric layer between the linear conductors adjacent to the first electrode in a direction parallel to the piezoelectric layer, corresponding to the linear conductor of the first electrode. A first connection conductor having a second electrode composed of a plurality of linear conductors arranged, and connecting the linear conductors of the first electrode to each other;
A stacked piezoelectric electronic device, comprising: a second connection conductor that connects the linear conductors of the second electrode to each other; wherein the unit laminates are stacked such that the linear conductors of different unit laminates are parallel to each other. Suggest.

【００２９】該積層型圧電体デバイスによれば、例え
ば、一の単位積層体における第１電極及び第２電極の間
に交流電圧が印加されると、これら第１電極と第２電極
との間に存在する圧電体に分極が生ずると共に電圧印加
方向の変化に同期して振動を生ずる。また、前記第２電
極の直線状導体は第１電極の隣り合う直線状導体の間に
第１電極の直線状導体に対応して平行に配置されている
ので、前記圧電体の振動方向は圧電体層とほぼ平行な方
向となる。さらに、この振動は積層された他の単位積層
体にも伝達され、他の単位積層体においては圧電体の振
動に伴い第１電極と第２電極との間に分極が生じ、これ
ら第１電極と第２電極との間に交流電圧が発生する。According to the multilayer piezoelectric device, for example, when an AC voltage is applied between the first electrode and the second electrode in one unit multilayer body, the voltage between the first electrode and the second electrode is increased. And a vibration is generated in synchronization with a change in the voltage application direction. In addition, since the linear conductor of the second electrode is disposed between the adjacent linear conductors of the first electrode in parallel corresponding to the linear conductor of the first electrode, the vibration direction of the piezoelectric body is piezoelectric. The direction is almost parallel to the body layer. Further, this vibration is also transmitted to other unit laminates that are stacked, and in other unit laminates, polarization occurs between the first electrode and the second electrode due to the vibration of the piezoelectric body, and these first electrode An AC voltage is generated between the first electrode and the second electrode.

【００３０】また、請求項６では、では、請求項５記載
の積層型圧電体電子デバイスにおいて、前記第１電極及
び第２電極の直線状導体の一端はそれぞれデバイスの異
なる表面に露出し、前記単位積層体において、前記第１
接続導体は第１電極の直線状導体が露出した面に形成さ
れた第１外部電極からなり、前記第２接続導体は第２電
極の直線状導体が露出した面に形成された第２外部電極
からなり、各単位積層体の第１外部電極及び第２外部電
極はそれぞれ異なる位置に形成されている積層型圧電体
電子デバイスを提案する。According to a sixth aspect of the present invention, in the multilayer piezoelectric electronic device according to the fifth aspect, one ends of the linear conductors of the first electrode and the second electrode are respectively exposed to different surfaces of the device. In the unit laminate, the first
The connection conductor comprises a first external electrode formed on the surface of the first electrode where the linear conductor is exposed, and the second connection conductor comprises a second external electrode formed on the surface of the second electrode where the linear conductor is exposed , And wherein the first external electrode and the second external electrode of each unit laminate are formed at different positions, respectively.

【００３１】該積層型圧電体デバイスによれば、各単位
積層体において、各第１電極の複数の直線状導体はその
露出面に形成された第１外部電極によって互いに接続さ
れ、各第２電極の複数の直線状導体はその露出面に形成
された第２外部電極によって互いに接続される。また、
異なる単位積層体の第１外部電極及び第２外部電極は互
いに絶縁されている。According to the multilayer piezoelectric device, in each unit multilayer body, the plurality of linear conductors of each first electrode are connected to each other by the first external electrode formed on the exposed surface, and each second electrode is connected to the second electrode. Are connected to each other by a second external electrode formed on the exposed surface. Also,
The first external electrodes and the second external electrodes of different unit laminates are insulated from each other.

【００３２】また、請求項７では、請求項５記載の積層
型圧電体電子デバイスにおいて、前記第１接続導体と第
２接続導体は少なくともその一部がデバイスの表面に露
出するように前記導体層に形成されていると共に、デバ
イス表面に形成され同一の単位積層体に含まれる前記第
１接続導体同士を接続する第１外部電極と、デバイス表
面に形成され同一の単位積層体に含まれる前記第２接続
導体同士を接続する第２外部電極とを備え、各単位積層
体の外部電極はそれぞれ異なる位置に形成されている積
層型圧電体電子デバイスを提案する。According to a seventh aspect of the present invention, in the multilayer piezoelectric electronic device according to the fifth aspect, the first connection conductor and the second connection conductor are formed such that at least a part thereof is exposed to the surface of the device. And a first external electrode formed on the device surface and connecting the first connection conductors included in the same unit laminate, and a first external electrode formed on the device surface and included in the same unit laminate. A multilayer piezoelectric electronic device including a second external electrode for connecting two connection conductors, wherein the external electrodes of each unit multilayer body are formed at different positions is proposed.

【００３３】該積層型圧電体デバイスによれば、各第１
導体層では第１電極の複数の直線状導体は第１接続導体
によって互いに接続され、各第２導体層では第２電極の
複数の直線状導体は第２接続導体によって互いに接続さ
れる。さらに、各単位積層体毎に各第１接続導体はその
露出面に形成された第１外部電極によって互いに接続さ
れ、各第２接続導体はその露出面に形成された第２外部
電極によって互いに接続される。また、異なる単位積層
体の第１外部電極及び第２外部電極は互いに絶縁されて
いる。According to the laminated piezoelectric device, each of the first
In the conductor layer, the plurality of linear conductors of the first electrode are connected to each other by a first connection conductor, and in each second conductor layer, the plurality of linear conductors of the second electrode are connected to each other by a second connection conductor. Furthermore, for each unit laminate, each first connection conductor is connected to each other by a first external electrode formed on the exposed surface, and each second connection conductor is connected to each other by a second external electrode formed on the exposed surface. Is done. In addition, the first external electrodes and the second external electrodes of different unit laminates are insulated from each other.

【００３４】また、請求項８では、２つの第１単位積層
体で第２単位積層体を挟むように該第１単位積層体と第
２単位積層体を積層してなる積層型圧電体電子デバイス
であって、前記第１単位積層体は、第１導体層と第２導
体層との間に圧電体層を挟むように該第１導体層と第２
導体層と圧電体層とを交互に複数積層してなり、前記第
１導体層は互いに平行な複数の直線状導体からなる第１
電極を有し、前記第２導体層は互いに平行で且つ前記前
記圧電体層に平行な方向において前記第１電極の隣り合
う直線状導体の間に第１電極の直線状導体に対応して平
行に配置された複数の直線状導体からなる第２電極を有
し、前記第２単位積層体は、第３導体層と圧電体層とを
交互に複数積層してなり、前記第３導体層は、互いに平
行で且つ前記第１電極の直線状導体と平行な位置に形成
された直線状導体からなる第３電極及び第４電極とを有
し、前記第１電極の直線状導体同士を接続する第１接続
導体と、前記第２電極の直線状導体同士を接続する第２
接続導体と、前記第３電極の直線状導体同士を接続する
第３接続導体と、前記第４電極の直線状導体同士を接続
する第４接続導体とを備えている積層型圧電体電子デバ
イスを提案する。According to another aspect of the present invention, there is provided a laminated piezoelectric electronic device in which the first unit laminated body and the second unit laminated body are laminated so as to sandwich the second unit laminated body between two first unit laminated bodies. Wherein the first unit laminate includes the first conductor layer and the second conductor layer sandwiching a piezoelectric layer between the first conductor layer and the second conductor layer.
A plurality of conductor layers and a plurality of piezoelectric layers are alternately laminated, and the first conductor layer is formed of a plurality of linear conductors parallel to each other.
An electrode, wherein the second conductor layers are parallel to each other and between the adjacent linear conductors of the first electrode in a direction parallel to the piezoelectric layer, corresponding to the linear conductors of the first electrode. And a second electrode composed of a plurality of linear conductors arranged in the second unit laminated body, wherein the second unit laminated body is formed by alternately laminating a plurality of third conductor layers and piezoelectric layers, and the third conductor layer is And a third electrode and a fourth electrode formed of linear conductors formed at positions parallel to each other and parallel to the linear conductor of the first electrode, and connecting the linear conductors of the first electrode to each other. A first connecting conductor and a second connecting conductor for connecting the linear conductors of the second electrode to each other;
A laminated piezoelectric electronic device comprising: a connection conductor; a third connection conductor that connects the linear conductors of the third electrode; and a fourth connection conductor that connects the linear conductors of the fourth electrode. suggest.

【００３５】該積層型圧電体デバイスによれば、例え
ば、２つの第１単位積層体における第１電極及び第２電
極の間に交流電圧が印加されると、これら第１電極と第
２電極との間に存在する圧電体に分極が生ずると共に電
圧印加方向の変化に同期して振動を生ずる。また、前記
第２電極の直線状導体は第１電極の隣り合う直線状導体
の間に第１電極の直線状導体に対応して平行に配置され
ているので、前記圧電体の振動方向は圧電体層とほぼ平
行な方向となる。さらに、この振動は２つの第１単位積
層体の間に積層された第２単位積層体にも伝達され、第
２単位積層体においては圧電体の振動に伴い第３電極と
第４電極との間に分極が生じ、これら第３電極と第４電
極との間に交流電圧が発生する。According to the laminated piezoelectric device, for example, when an AC voltage is applied between the first electrode and the second electrode in the two first unit laminated bodies, the first electrode and the second electrode are connected to each other. Polarization occurs in the piezoelectric body existing between the two, and vibration occurs in synchronization with a change in the voltage application direction. In addition, since the linear conductor of the second electrode is disposed between the adjacent linear conductors of the first electrode in parallel corresponding to the linear conductor of the first electrode, the vibration direction of the piezoelectric body is piezoelectric. The direction is almost parallel to the body layer. Further, this vibration is also transmitted to the second unit laminated body laminated between the two first unit laminated bodies. In the second unit laminated body, the vibration of the piezoelectric body causes the third electrode and the fourth electrode to move together. Polarization occurs between them, and an AC voltage is generated between the third electrode and the fourth electrode.

【００３６】また、請求項９では、請求項８記載の積層
型圧電体電子デバイスにおいて、前記第１電極及び第２
電極の直線状導体の一端がそれぞれデバイスの異なる表
面に露出すると共に前記第３電極及び第４電極は少なく
とも一部がデバイスの表面に露出し、前記第１接続導体
は第１電極の直線状導体が露出した面に形成された第１
外部電極からなり、前記第２接続導体は第２電極の直線
状導体が露出した面に形成された第２外部電極からな
り、前記第３接続導体は第３電極が露出した面に形成さ
れた第３外部電極からなり、前記第４接続導体は第４電
極が露出した面に形成された第４外部電極からなる積層
型圧電体電子デバイスを提案する。According to a ninth aspect, in the multilayer piezoelectric electronic device according to the eighth aspect, the first electrode and the second
One end of the linear conductor of the electrode is exposed to a different surface of the device, and the third electrode and the fourth electrode are at least partially exposed to the surface of the device, and the first connection conductor is a linear conductor of the first electrode. The first formed on the exposed surface
An external electrode, wherein the second connection conductor is a second external electrode formed on a surface of the second electrode where the linear conductor is exposed, and the third connection conductor is formed on a surface of the third electrode exposed. A multilayer piezoelectric electronic device including a third external electrode and the fourth connection conductor including a fourth external electrode formed on a surface where the fourth electrode is exposed is proposed.

【００３７】該積層型圧電体デバイスによれば、各第１
電極の複数の直線状導体はその露出面に形成された第１
外部電極によって互いに接続され、各第２電極の複数の
直線状導体はその露出面に形成された第２外部電極によ
って互いに接続される。さらに、各第３電極の複数の直
線状導体はその露出面に形成された第３外部電極によっ
て互いに接続され、各第４電極の複数の直線状導体はそ
の露出面に形成された第４外部電極によって互いに接続
される。According to the laminated piezoelectric device, each of the first
The plurality of linear conductors of the electrode are formed on first exposed surfaces thereof.
The plurality of linear conductors of each second electrode are connected to each other by an external electrode, and the plurality of linear conductors of each second electrode are connected to each other by a second external electrode formed on the exposed surface. Further, the plurality of linear conductors of each third electrode are connected to each other by a third external electrode formed on the exposed surface, and the plurality of linear conductors of each fourth electrode are connected to the fourth external electrode formed on the exposed surface. They are connected to each other by electrodes.

【００３８】また、請求項１０では、請求項８記載の積
層型圧電体電子デバイスにおいて、前記第１接続導体と
第２接続導体は少なくともその一部がデバイスの表面に
露出するように前記導体層に形成されていると共に前記
第３電極及び第４電極は少なくとも一部がデバイスの表
面に露出し、デバイス表面に形成され前記第１接続導体
同士を接続する第１外部電極と、デバイス表面に形成さ
れ前記第２接続導体同士を接続する第２外部電極とを備
え、前記第３接続導体は第３電極が露出した面に形成さ
れた第３外部電極からなり、前記第４接続導体は第４電
極が露出した面に形成された第４外部電極からなる積層
型圧電体電子デバイスを提案する。According to a tenth aspect of the present invention, in the multilayer piezoelectric electronic device according to the eighth aspect, the first connection conductor and the second connection conductor are formed such that at least a part thereof is exposed on the surface of the device. And a third external electrode formed on the device surface, at least a part of which is exposed on the surface of the device, and formed on the device surface and connects the first connection conductors to each other. A second external electrode for connecting the second connection conductors to each other, wherein the third connection conductor comprises a third external electrode formed on a surface where the third electrode is exposed, and wherein the fourth connection conductor comprises a fourth external electrode. A multilayer piezoelectric electronic device including a fourth external electrode formed on a surface where the electrode is exposed is proposed.

【００３９】該積層型圧電体デバイスによれば、各第１
導体層では第１電極の複数の直線状導体は第１接続導体
によって互いに接続され、各第２導体層では第２電極の
複数の直線状導体は第２接続導体によって互いに接続さ
れる。さらに、各第１接続導体はその露出面に形成され
た第１外部電極によって互いに接続され、各第２接続導
体はその露出面に形成された第２外部電極によって互い
に接続される。また、各第３電極の複数の直線状導体は
その露出面に形成された第３外部電極によって互いに接
続され、各第４電極の複数の直線状導体はその露出面に
形成された第４外部電極によって互いに接続される。According to the laminated piezoelectric device, each of the first
In the conductor layer, the plurality of linear conductors of the first electrode are connected to each other by a first connection conductor, and in each second conductor layer, the plurality of linear conductors of the second electrode are connected to each other by a second connection conductor. Further, each first connection conductor is connected to each other by a first external electrode formed on the exposed surface, and each second connection conductor is connected to each other by a second external electrode formed on the exposed surface. The plurality of linear conductors of each third electrode are connected to each other by third external electrodes formed on the exposed surface, and the plurality of linear conductors of each fourth electrode are connected to the fourth external electrode formed on the exposed surface. They are connected to each other by electrodes.

【００４０】また、請求項１１では、第１導体層と第２
導体層との間に圧電体層を挟むように、第１導体層と第
２導体層と圧電体層とを交互に複数積層してなる積層型
圧電体電子デバイスであって、前記第１導体層は、互い
に平行な複数の直線状導体からなる第１電極と、互いに
平行で且つ第１電極の直線状導体に平行な複数の直線状
導体からなる第３電極とを有し、前記第２導体層は、互
いに平行で且つ前記前記圧電体層に平行な方向において
前記第１電極の隣り合う直線状導体の間に第１電極の直
線状導体に対応して平行に配置された複数の直線状導体
からなる第２電極と、第２電極の直線状導体に平行で且
つ前記前記圧電体層に平行な方向において前記第３電極
の隣り合う直線状導体の間に第３電極の直線状導体に対
応して平行に配置された複数の直線状導体からなる第４
電極とを有し、前記第１電極の直線状導体同士を接続す
る第１接続導体と、前記第２電極の直線状導体同士を接
続する第２接続導体と、前記第３電極の直線状導体同士
を接続する第３接続導体と、前記第４電極の直線状導体
同士を接続する第４接続導体とを備えている積層型圧電
体電子デバイスを提案する。In the eleventh aspect, the first conductive layer and the second conductive layer
A laminated piezoelectric electronic device comprising a plurality of first conductor layers, a second conductor layer, and a piezoelectric layer alternately laminated so as to sandwich a piezoelectric layer between the first conductor layer and the first conductor layer. The layer has a first electrode composed of a plurality of linear conductors parallel to each other, and a third electrode composed of a plurality of linear conductors parallel to each other and parallel to the linear conductor of the first electrode. The conductor layer includes a plurality of straight lines arranged between the adjacent linear conductors of the first electrode in a direction parallel to the piezoelectric layer and in parallel with the linear conductor of the first electrode. A linear electrode of a third electrode between a second electrode made of a conductive electrode and a linear electrode adjacent to the third electrode in a direction parallel to the linear conductor of the second electrode and parallel to the piezoelectric layer. A fourth conductor composed of a plurality of linear conductors arranged in parallel corresponding to
And a first connection conductor connecting the linear conductors of the first electrode, a second connection conductor connecting the linear conductors of the second electrode, and a linear conductor of the third electrode. A multi-layer piezoelectric electronic device including a third connection conductor for connecting them and a fourth connection conductor for connecting the linear conductors of the fourth electrode is proposed.

【００４１】該積層型圧電体デバイスによれば、例え
ば、第１電極及び第２電極の間に交流電圧が印加される
と、これら第１電極と第２電極との間に存在する圧電体
に分極が生ずると共に電圧印加方向の変化に同期して振
動を生ずる。また、前記第２電極の直線状導体は第１電
極の隣り合う直線状導体の間に第１電極の直線状導体に
対応して平行に配置されているので、前記圧電体の振動
方向は圧電体層とほぼ平行な方向となる。さらに、この
振動は圧電体層を介して第３電極及び第４電極に伝達さ
れ、圧電体の振動に伴い第３電極と第４電極との間に分
極が生じ、これら第３電極と第４電極との間に交流電圧
が発生する。According to the multilayer piezoelectric device, for example, when an AC voltage is applied between the first electrode and the second electrode, the piezoelectric body existing between the first electrode and the second electrode is removed. Polarization occurs and oscillation occurs in synchronization with a change in the direction of voltage application. In addition, since the linear conductor of the second electrode is disposed between the adjacent linear conductors of the first electrode in parallel corresponding to the linear conductor of the first electrode, the vibration direction of the piezoelectric body is piezoelectric. The direction is almost parallel to the body layer. Further, this vibration is transmitted to the third electrode and the fourth electrode via the piezoelectric layer, and polarization occurs between the third electrode and the fourth electrode due to the vibration of the piezoelectric body. An AC voltage is generated between the electrodes.

【００４２】また、請求項１２では、請求項１１記載の
積層型圧電体電子デバイスにおいて、前記第１電極及び
第２電極の直線状導体の一端はそれぞれデバイスの異な
る表面に露出すると共に前記第１電極及び第２電極の直
線状導体の一端はそれぞれデバイスの異なる表面に露出
し、前記第１接続導体は第１電極の直線状導体が露出し
た面に形成された第１外部電極からなり、前記第２接続
導体は第２電極の直線状導体が露出した面に形成された
第２外部電極からなり、前記第３接続導体は第３電極の
直線状導体が露出した面に形成された第３外部電極から
なり、前記第４接続導体は第４電極の直線状導体が露出
した面に形成された第４外部電極からなる積層型圧電体
電子デバイスを提案する。According to a twelfth aspect of the present invention, in the multilayer piezoelectric electronic device according to the eleventh aspect, one ends of the linear conductors of the first electrode and the second electrode are respectively exposed to different surfaces of the device and the first electrode is connected to the first electrode. One end of each of the linear conductors of the electrode and the second electrode is exposed on a different surface of the device, and the first connection conductor comprises a first external electrode formed on a surface where the linear conductor of the first electrode is exposed, The second connection conductor includes a second external electrode formed on the surface of the second electrode where the linear conductor is exposed, and the third connection conductor includes the third external electrode formed on the surface of the third electrode where the linear conductor is exposed. The present invention proposes a multilayer piezoelectric electronic device including an external electrode, wherein the fourth connection conductor includes a fourth external electrode formed on a surface where the linear conductor of the fourth electrode is exposed.

【００４３】該積層型圧電体デバイスによれば、各第１
電極の複数の直線状導体はその露出面に形成された第１
外部電極によって互いに接続され、各第２電極の複数の
直線状導体はその露出面に形成された第２外部電極によ
って互いに接続される。各第３電極の複数の直線状導体
はその露出面に形成された第３外部電極によって互いに
接続され、各第４電極の複数の直線状導体はその露出面
に形成された第４外部電極によって互いに接続される。
さらに、第１外部電極乃至第４外部電極は互いに絶縁さ
れている。According to the laminated piezoelectric device, each of the first
The plurality of linear conductors of the electrode are formed on first exposed surfaces thereof.
The plurality of linear conductors of each second electrode are connected to each other by an external electrode, and the plurality of linear conductors of each second electrode are connected to each other by a second external electrode formed on the exposed surface. The plurality of linear conductors of each third electrode are connected to each other by a third external electrode formed on the exposed surface, and the plurality of linear conductors of each fourth electrode are connected by the fourth external electrode formed on the exposed surface. Connected to each other.
Further, the first to fourth external electrodes are insulated from each other.

【００４４】また、請求項１３では、請求項１１記載の
積層型圧電体電子デバイスにおいて、前記第１乃至第４
接続導体のそれぞれは少なくともその一部がデバイスの
表面に露出するように前記導体層に形成されていると共
に、デバイス表面に形成され前記第１接続導体同士を接
続する第１外部電極と、デバイス表面に形成され前記第
２接続導体同士を接続する第２外部電極と、デバイス表
面に形成され前記第３接続導体同士を接続する第３外部
電極と、デバイス表面に形成され前記第４接続導体同士
を接続する第４外部電極とを備えている積層型圧電体電
子デバイスを提案する。According to a thirteenth aspect, in the multilayer piezoelectric electronic device according to the eleventh aspect, the first to fourth piezoelectric electronic devices are provided.
A first external electrode formed on the conductor layer such that at least a portion of the connection conductor is exposed on the surface of the device, and a first external electrode formed on the device surface and connecting the first connection conductors to each other; A second external electrode formed on the device surface to connect the second connection conductors to each other; a third external electrode formed on the device surface to connect the third connection conductors to each other; A multilayer piezoelectric electronic device including a fourth external electrode to be connected is proposed.

【００４５】該積層型圧電体デバイスによれば、各第１
導体層では第１電極の複数の直線状導体が第１接続導体
によって互いに接続されると共に第３電極の複数の直線
状導体が第３接続導体によって互いに接続され、各第２
導体層では第２電極の複数の直線状導体は第２接続導体
によって互いに接続されると共に第４電極の複数の直線
状導体が第３４続導体によって互いに接続される。さら
に、各第１接続導体はその露出面に形成された第１外部
電極によって互いに接続され、各第２接続導体はその露
出面に形成された第２外部電極によって互いに接続され
る。各第３接続導体はその露出面に形成された第３外部
電極によって互いに接続され、各第４接続導体はその露
出面に形成された第４外部電極によって互いに接続され
る。さらに、異なる単位積層体の第１外部電極乃至第４
外部電極は互いに絶縁されている。According to the laminated piezoelectric device, each of the first
In the conductor layer, the plurality of linear conductors of the first electrode are connected to each other by the first connection conductor, and the plurality of linear conductors of the third electrode are connected to each other by the third connection conductor.
In the conductor layer, the plurality of linear conductors of the second electrode are connected to each other by a second connection conductor, and the plurality of linear conductors of the fourth electrode are connected to each other by a thirty-fourth continuous conductor. Further, each first connection conductor is connected to each other by a first external electrode formed on the exposed surface, and each second connection conductor is connected to each other by a second external electrode formed on the exposed surface. Each third connection conductor is connected to each other by a third external electrode formed on the exposed surface, and each fourth connection conductor is connected to each other by a fourth external electrode formed on the exposed surface. Furthermore, the first external electrodes to the fourth external electrodes
The external electrodes are insulated from each other.

【００４６】また、請求項１４では、請求項１１記載の
積層型圧電体電子デバイスにおいて、前記第１接続導体
と第２接続導体は前記導体層に形成され、各第１導体層
では第１電極の少なくとも一の直線状導体の一端及び第
３電極の少なくとも一の直線状導体の一端が一方のデバ
イス表面に露出し、各第２導体層では第２電極の少なく
とも一の直線状導体の一端及び第４電極の少なくとも一
の直線状導体の一端が他方のデバイス表面に露出し、デ
バイス表面に形成され前記第１電極の露出した直線線上
導体同士を接続する第１外部電極と、デバイス表面に形
成され前記第２電極の露出した直線線上導体同士を接続
する第２外部電極と、デバイス表面に形成され前記第３
電極の露出した直線線上導体同士を接続する第３外部電
極と、デバイス表面に形成され前記第４電極の露出した
直線線上導体同士を接続する第４外部電極とを備えてい
る積層型圧電体電子デバイスを提案する。According to a fourteenth aspect, in the multilayer piezoelectric electronic device according to the eleventh aspect, the first connection conductor and the second connection conductor are formed on the conductor layer, and the first electrode is provided on each of the first conductor layers. One end of at least one linear conductor and one end of at least one linear conductor of the third electrode are exposed on one device surface, and in each second conductor layer, one end of at least one linear conductor of the second electrode and One end of at least one linear conductor of the fourth electrode is exposed on the other device surface, a first external electrode formed on the device surface and connecting the exposed linear conductors of the first electrode, and formed on the device surface. A second external electrode connecting the exposed linear conductors of the second electrode to each other; and a third external electrode formed on a device surface.
A laminated piezoelectric element comprising: a third external electrode connecting the exposed linear conductors of the electrodes; and a fourth external electrode formed on the device surface and connecting the exposed linear conductors of the fourth electrode. Suggest a device.

【００４７】該積層型圧電体デバイスによれば、各第１
導体層では第１電極の複数の直線状導体が第１接続導体
によって互いに接続されると共に第３電極の複数の直線
状導体が第３接続導体によって互いに接続され、各第２
導体層では第２電極の複数の直線状導体は第２接続導体
によって互いに接続されると共に第４電極の複数の直線
状導体が第３４続導体によって互いに接続される。さら
に、各第１導体層における第１電極の少なくとも一の直
線状導体はその露出面に形成された第１外部電極によっ
て互いに接続され、第３電極の少なくとも一の直線状導
体はその露出面に形成された第３外部電極によって互い
に接続される。また、各第２導体層における第２電極の
少なくとも一の直線状導体はその露出面に形成された第
２外部電極によって互いに接続され、第４電極の少なく
とも一の直線状導体はその露出面に形成された第４外部
電極によって互いに接続される。According to the laminated piezoelectric device, each of the first
In the conductor layer, the plurality of linear conductors of the first electrode are connected to each other by the first connection conductor, and the plurality of linear conductors of the third electrode are connected to each other by the third connection conductor.
In the conductor layer, the plurality of linear conductors of the second electrode are connected to each other by a second connection conductor, and the plurality of linear conductors of the fourth electrode are connected to each other by a thirty-fourth continuous conductor. Further, at least one linear conductor of the first electrode in each first conductor layer is connected to each other by a first external electrode formed on the exposed surface, and at least one linear conductor of the third electrode is connected to the exposed surface. The third external electrodes are connected to each other. At least one linear conductor of the second electrode in each second conductor layer is connected to each other by a second external electrode formed on the exposed surface, and at least one linear conductor of the fourth electrode is connected to the exposed surface. The fourth external electrodes are connected to each other.

【００４８】また、請求項１５では、請求項１４記載の
積層型圧電体電子デバイスにおいて、前記直線状導体
は、前記第１電極と第２電極との間に交流電圧を印加し
たときに生じる振動のノード点近傍位置においてデバイ
ス表面に露出している積層型圧電体電子デバイスを提案
する。According to a fifteenth aspect, in the multilayer piezoelectric electronic device according to the fourteenth aspect, the linear conductor vibrates when an AC voltage is applied between the first electrode and the second electrode. We propose a laminated piezoelectric electronic device that is exposed on the device surface in the vicinity of the node point.

【００４９】該積層型圧電体デバイスによれば、直線状
導体が振動のノード点近傍位置においてデバイス表面に
露出しているので、露出した直線状導体にかかる前記振
動によって生ずる変位が最小となる。According to the laminated piezoelectric device, since the linear conductor is exposed on the device surface at a position near the node of the vibration, the displacement of the exposed linear conductor caused by the vibration is minimized.

【００５０】また、請求項１６では、請求項１１、１
３、１４または１５記載の積層型圧電体電子デバイスに
おいて、前記第１接続導体と第２接続導体は前記導体層
に形成され且つ第１接続導体と第２接続導体が積層方向
に重ならない位置に形成されている積層型圧電体電子デ
バイスを提案する。According to claim 16, claims 11 and 1
16. The multilayer piezoelectric electronic device according to 3, 14, or 15, wherein the first connection conductor and the second connection conductor are formed on the conductor layer and are located at positions where the first connection conductor and the second connection conductor do not overlap in the stacking direction. A laminated piezoelectric electronic device formed is proposed.

【００５１】該積層型圧電体デバイスによれば、第１接
続導体と第２接続導体が積層方向に重ならない位置に形
成されているので、これら第１接続導体と第２接続導体
の間において圧電体層の分極が生ずることがない。According to the laminated piezoelectric device, since the first connection conductor and the second connection conductor are formed at positions not overlapping in the laminating direction, the piezoelectric connection is provided between the first connection conductor and the second connection conductor. No polarization of the body layer occurs.

【００５２】また、請求項１７では、請求項１１、１
３、１４、１５または１６の何れかに記載の積層型圧電
体電子デバイスにおいて、前記第３接続導体と第４接続
導体は前記導体層に形成され且つ第３接続導体と第４接
続導体が積層方向に重ならない位置に形成されている積
層型圧電体電子デバイスを提案する。According to claim 17, claims 11 and 1
17. The multilayer piezoelectric electronic device according to any one of 3, 14, 15 and 16, wherein the third connection conductor and the fourth connection conductor are formed on the conductor layer, and the third connection conductor and the fourth connection conductor are stacked. A multilayer piezoelectric electronic device formed at a position that does not overlap in the direction is proposed.

【００５３】該積層型圧電体デバイスによれば、第３接
続導体と第４接続導体が積層方向に重ならない位置に形
成されているので、これら第３接続導体と第４接続導体
の間において圧電体層の分極が生ずることがない。According to the laminated piezoelectric device, since the third connection conductor and the fourth connection conductor are formed at positions not overlapping in the lamination direction, the piezoelectric connection is provided between the third connection conductor and the fourth connection conductor. No polarization of the body layer occurs.

【００５４】また、請求項１８では、請求項３、７、１
０または１３記載の積層型圧電体電子デバイスにおい
て、前記接続導体は、前記第１電極と第２電極との間に
交流電圧を印加したときに生じる振動のノード点近傍位
置においてデバイス表面に露出している積層型圧電体電
子デバイスを提案する。In claim 18, claims 3, 7, 1
14. The multilayer piezoelectric electronic device according to item 0 or 13, wherein the connection conductor is exposed to a device surface at a position near a node point of vibration generated when an AC voltage is applied between the first electrode and the second electrode. We propose a multi-layer piezoelectric electronic device.

【００５５】該積層型圧電体デバイスによれば、接続導
体が振動のノード点近傍位置においてデバイス表面に露
出しているので、露出した接続導体にかかる前記振動に
よって生ずる変位が最小となる。According to the laminated piezoelectric device, since the connection conductor is exposed on the device surface at a position near the node of the vibration, the displacement of the exposed connection conductor caused by the vibration is minimized.

【００５６】また、請求項１９では、請求項１乃至１８
の何れかに記載の積層型圧電体電子デバイスにおいて、
前記第１電極の直線状導体と前記第２電極の直線状導体
との間の前記圧電体層に平行な方向の距離が、前記第１
電極の隣接する直線状導体間の距離の約１／２に設定さ
れている積層型圧電体電子デバイスを提案する。Further, in claim 19, claims 1 to 18
The multilayer piezoelectric electronic device according to any one of the above,
The distance between the linear conductor of the first electrode and the linear conductor of the second electrode in a direction parallel to the piezoelectric layer is the first distance.
A multilayer piezoelectric electronic device in which the distance between adjacent linear conductors of an electrode is set to about の is proposed.

【００５７】該積層型圧電体デバイスによれば、第１電
極と第２電極との間の距離を、耐圧を下げずに短く設定
することができる。According to the laminated piezoelectric device, the distance between the first electrode and the second electrode can be set short without lowering the withstand voltage.

【００５８】また、請求項２０では、請求項１乃至１８
の何れかに記載の積層型圧電体電子デバイスにおいて、
前記第１電極及び前記第２電極の同一層内における隣接
する直線状導体間の距離が、前記圧電体層の厚み方向に
おける前記第１電極と第２電極との間の距離よりも大き
く設定されている積層型圧電体電子デバイスを提案す
る。Further, in claim 20, claims 1 to 18
The multilayer piezoelectric electronic device according to any one of the above,
A distance between adjacent linear conductors in the same layer of the first electrode and the second electrode is set to be larger than a distance between the first electrode and the second electrode in a thickness direction of the piezoelectric layer. We propose a multi-layer piezoelectric electronic device.

【００５９】該積層型圧電体デバイスによれば、分極方
向と振動方向が大きく異ならないので、圧電体における
ｄ３３振動が生じやすくなる。According to the laminated piezoelectric device, since the polarization direction and the vibration direction are not significantly different, d33 vibration in the piezoelectric body is easily generated.

【００６０】また、請求項２１では、請求項１乃至１８
の何れかに記載の積層型圧電体電子デバイスにおいて、
前記第１電極と第２電極との間に交流電圧を印加したと
きの前記圧電体層の分極方向と振動方向とのなす角度が
０度よりも大きく４５度よりも小さい角度になるように
前記第１電極及び第２電極が配置されている積層型圧電
体電子デバイスを提案する。Further, in claim 21, claims 1 to 18
The multilayer piezoelectric electronic device according to any one of the above,
The angle between the polarization direction and the vibration direction of the piezoelectric layer when an AC voltage is applied between the first electrode and the second electrode is set to an angle larger than 0 degree and smaller than 45 degrees. A multilayer piezoelectric electronic device in which a first electrode and a second electrode are arranged is proposed.

【００６１】該積層型圧電体デバイスによれば、分極方
向と振動方向が大きく異ならないので、圧電体における
ｄ３３振動が生じやすくなる。According to the laminated piezoelectric device, since the polarization direction and the vibration direction are not largely different, d33 vibration in the piezoelectric body is easily generated.

【００６２】また、請求項２２では、請求項１乃至１８
の何れかに記載の積層型圧電体電子デバイスにおいて、
前記第１電極の一の直線状導体と該直線状導体に最も近
い位置に形成されている第２電極の直線状導体の双方に
対して直角に交わる直線の方向と、前記第１電極と第２
電極との間に交流電圧を印加したときの前記圧電体層の
振動方向とのなす角度が、０度よりも大きく４５度より
も小さい角度になるように前記第１電極及び第２電極が
配置されている積層型圧電体電子デバイスを提案する。Further, in claim 22, claims 1 to 18
The multilayer piezoelectric electronic device according to any one of the above,
The direction of a straight line that intersects at right angles to both the one linear conductor of the first electrode and the linear conductor of the second electrode formed closest to the linear conductor; 2
The first electrode and the second electrode are arranged such that an angle between the piezoelectric layer and the vibration direction of the piezoelectric layer when an AC voltage is applied between the electrodes is greater than 0 degree and smaller than 45 degrees. The proposed multilayer piezoelectric electronic device is proposed.

【００６３】該積層型圧電体デバイスによれば、分極方
向と振動方向が大きく異ならないので、圧電体における
ｄ３３振動が生じやすくなる。According to the laminated piezoelectric device, since the polarization direction and the vibration direction do not greatly differ from each other, d33 vibration in the piezoelectric body is easily generated.

【００６４】[0064]

【発明の実施の形態】次に、本発明の一実施形態を図面
に基づいて説明する。Next, an embodiment of the present invention will be described with reference to the drawings.

【００６５】図１は、本発明の第１の実施形態における
積層型圧電体電子デバイス（以下、単に圧電体電子デバ
イスと称する）を示す外観斜視図、図２はその素体の分
解斜視図、図３は図２におけるＡ−Ａ線矢視方向略平断
面図、図４は図３におけるＢ−Ｂ線矢視方向略側断面図
である。尚、第１の実施形態は、本発明の積層型圧電体
電子デバイスの基本構造を示している。FIG. 1 is an external perspective view showing a laminated piezoelectric electronic device (hereinafter, simply referred to as a piezoelectric electronic device) according to a first embodiment of the present invention. FIG. 2 is an exploded perspective view of the element body. FIG. 3 is a schematic cross-sectional view taken along line AA in FIG. 2 and FIG. 4 is a schematic side cross-sectional view taken along line BB in FIG. Note that the first embodiment shows the basic structure of the multilayer piezoelectric electronic device of the present invention.

【００６６】図において、１０は圧電体電子デバイス
で、圧電材料を主体とした直方体形状の素体１１を有
し、この素体１１の１対の対向側面にはそれぞれ外部電
極１２ａ，１２ｂが形成されている。In the figure, reference numeral 10 denotes a piezoelectric electronic device having a rectangular parallelepiped element 11 mainly composed of a piezoelectric material, and external electrodes 12a and 12b formed on a pair of opposed side surfaces of the element 11, respectively. Have been.

【００６７】素体１１は、図２乃至図４に示すように、
圧電セラミック材料からなる圧電セラミック板１３と、
第１導体層１４、及び第２導体層１５から成り、第１導
体層１４と第２導体層１５との間に圧電セラミック板１
３が介在されるように、これらを交互に積層して構成さ
れている。The element body 11 is, as shown in FIGS.
A piezoelectric ceramic plate 13 made of a piezoelectric ceramic material;
The piezoelectric ceramic plate 1 includes a first conductor layer 14 and a second conductor layer 15, and is disposed between the first conductor layer 14 and the second conductor layer 15.
These layers are alternately laminated so that 3 is interposed.

【００６８】第１導体層１４は第１電極を構成する複数
の直線状導体１４ａからなり、第２導体層１５は第２電
極を構成する複数の直線状導体１５ａからなる。The first conductor layer 14 comprises a plurality of linear conductors 14a constituting a first electrode, and the second conductor layer 15 comprises a plurality of linear conductors 15a constituting a second electrode.

【００６９】第１及び第２導体層１４，１５の直線状導
体１４ａ，１５ａは、互いにほぼ平行になるように等間
隔をあけて配置されている。また、第２導体層１５の直
線状導体１５ａは、第１導体層１４の隣り合う２つの直
線状導体１４ａのほぼ中間位置に対応して配置されてい
る。The linear conductors 14a, 15a of the first and second conductor layers 14, 15 are arranged at regular intervals so as to be substantially parallel to each other. Further, the linear conductor 15a of the second conductor layer 15 is arranged corresponding to a substantially intermediate position between two adjacent linear conductors 14a of the first conductor layer 14.

【００７０】さらに、第１導体層１４の直線状導体１４
ａの一端は一方の外部電極１２ａが形成された素体１１
側面に露出し、この外部電極１２ａに導電接続されてい
る。また、第２導体層１５の直線状導体１５ａの一端は
一方の外部電極１２ｂが形成された素体１１側面に露出
し、この外部電極１２ｂに導電接続されている。Further, the linear conductor 14 of the first conductor layer 14
a of the element body 11 on which one external electrode 12a is formed.
It is exposed on the side and is conductively connected to the external electrode 12a. One end of the linear conductor 15a of the second conductor layer 15 is exposed on the side surface of the element body 11 on which the one external electrode 12b is formed, and is conductively connected to the external electrode 12b.

【００７１】また、第１導体層１４の直線状導体１４ａ
と、この直線状導体１４ａに最も近い第２導体層１５の
直線状導体１５ａとの間において、圧電セラミック板１
３の面に平行で直線状導体１４ａ，１５ａに直交する方
向の距離Ｌ１は、圧電セラミック板１３の面及び直線状
導体１４ａ，１５ａに直交する方向の距離Ｌ２の約３倍
に設定されている。The linear conductor 14a of the first conductor layer 14
And the linear conductor 15a of the second conductor layer 15 closest to the linear conductor 14a.
The distance L1 in the direction parallel to the surface 3 and orthogonal to the linear conductors 14a and 15a is set to be about three times the distance L2 in the direction orthogonal to the surface of the piezoelectric ceramic plate 13 and the linear conductors 14a and 15a. .

【００７２】上記構成の圧電体電子デバイスは次のよう
にして作製した。The piezoelectric electronic device having the above structure was manufactured as follows.

【００７３】まず、Ｐｂ（Ｍｎ，Ｎｂ）Ｏ3系のＰＺＴ
セラミックを形成するセラミックスラリーを用いてドク
ターブレード法によりセラミックグリーンシートを形成
した。First, Pb (Mn, Nb) O 3 -based PZT
Ceramic green sheets were formed by a doctor blade method using a ceramic slurry for forming a ceramic.

【００７４】次に、このグリーンシートの上面に第１導
体層１４及び第２導体層１５の直線状導体１４ａ，１５
ａを形成するＡｇ／Ｐｄを含む導体ペーストを印刷し
た。Next, the linear conductors 14a, 15a of the first conductor layer 14 and the second conductor layer 15 are formed on the upper surface of the green sheet.
The conductor paste containing Ag / Pd forming a was printed.

【００７５】この後、導体ペーストを印刷したグリーン
シートを積層し、さらに上下層に導体ペーストを印刷し
ていないグリーンシートを積層して、これらを圧着し
た。Thereafter, green sheets on which the conductor paste was printed were laminated, and green sheets on which the conductor paste was not printed were laminated on the upper and lower layers, and these were pressed.

【００７６】次いで、この積層体を焼成して素体１１得
た後、素体１１の所定側面にＡｇを蒸着して外部電極１
２ａ，１２ｂを形成することに圧電体電子デバイス１０
を得た。Next, after firing the laminated body to obtain the element body 11, Ag is deposited on a predetermined side surface of the element body 11 to form the external electrode 1.
Forming the piezoelectric electronic device 10
I got

【００７７】前述の構成よりなる圧電体電子デバイス１
０は、例えば、外部電極１２ａ，１２ｂ間に交流電圧を
印加すると、圧電効果により第１導体層１４の直線状導
体１４ａと第２導体層１５の直線状導体１５ａとの間に
存在する圧電セラミックに分極が生じて、電圧極性の変
化に同期して強い機械的な振動を生ずる。The piezoelectric electronic device 1 having the above configuration
Reference numeral 0 denotes a piezoelectric ceramic existing between the linear conductor 14a of the first conductor layer 14 and the linear conductor 15a of the second conductor layer 15 due to a piezoelectric effect when an AC voltage is applied between the external electrodes 12a and 12b, for example. Is polarized, and a strong mechanical vibration is generated in synchronization with the change in the voltage polarity.

【００７８】ここで、第２導体層１５の直線状導体１５
ａは第１導体層１４の隣り合う直線状導体１４ａのほぼ
中間に配置され、且つ上記距離Ｌ１が距離Ｌ２の約３倍
に設定されていると共に第１及び第２導体層１４，１５
が複数積層されているので、圧電セラミック板１３の振
動方向は、圧電セラミック板１３の面に平行で直線状導
体１４ａ，１５ａに直交する方向となる。即ち、圧電定
数ｄ33による振動を発生している。Here, the linear conductor 15 of the second conductor layer 15
a is disposed approximately at the center of the adjacent linear conductor 14a of the first conductor layer 14, the distance L1 is set to be about three times the distance L2, and the first and second conductor layers 14, 15 are arranged.
Are laminated, the vibration direction of the piezoelectric ceramic plate 13 is a direction parallel to the surface of the piezoelectric ceramic plate 13 and orthogonal to the linear conductors 14a and 15a. That is, vibration is generated by the piezoelectric constant d33.

【００７９】また、上記構成では、対になる第１電極を
構成する直線状導体１４ａと第２電極を構成する直線状
導体１５ａを圧電セラミック板１３を介在してそれぞれ
異なる導体層１４，１５に配置しているので、層間のマ
イクロデラミネーション或いは電極材料のマイグレーシ
ョンが生じ難く、常に耐圧を比較的高く保つことができ
る。さらに、電極密度を高く設定することができるた
め、電流容量を低下させずに、小型化が可能になる。Further, in the above configuration, the linear conductors 14a forming the first electrodes and the linear conductors 15a forming the second electrodes to be paired are formed on the different conductor layers 14 and 15 with the piezoelectric ceramic plate 13 interposed therebetween. Since they are arranged, microdelamination between layers or migration of electrode materials is unlikely to occur, and the breakdown voltage can always be kept relatively high. Furthermore, since the electrode density can be set high, the size can be reduced without reducing the current capacity.

【００８０】尚、本実施形態では、上記距離Ｌ１が距離
Ｌ２の約３倍になるように直線状導体１４ａ，１５ａを
配置したが、同一層内における隣接する直線状導体１４
ａ，１５ａ間の距離が、圧電セラミック板１３の厚み方
向における上記距離Ｌ２よりも大きく設定されていれば
ほぼ同様の効果が得られる。In this embodiment, the linear conductors 14a and 15a are arranged so that the distance L1 is about three times the distance L2. However, the adjacent linear conductors 14a and 15a in the same layer are arranged.
If the distance between a and 15a is set to be larger than the distance L2 in the thickness direction of the piezoelectric ceramic plate 13, substantially the same effect can be obtained.

【００８１】また、電気／機械の変換効率を高めるため
には、外部電極１２ａ，１２ｂ間に交流電圧を印加した
ときの圧電セラミックの分極方向と振動方向とのなす角
度が０度よりも大きく４５度よりも小さい角度になるよ
うに第１導体層１４及び第２導体層１５の直線状導体１
４ａ，１５ａを配置することが好ましい。In order to increase the electrical / mechanical conversion efficiency, the angle between the polarization direction and the vibration direction of the piezoelectric ceramic when an AC voltage is applied between the external electrodes 12a and 12b is larger than 0 degree. The linear conductors 1 of the first conductor layer 14 and the second conductor layer 15 have an angle smaller than the degree.
It is preferable to arrange 4a and 15a.

【００８２】また、上記圧電セラミックの分極方向は、
第１導体層１４の任意の直線状導体１４ａとこの直線状
導体１４ａに最も近い位置に形成されている第２導体層
１５の直線状導体１５ａの双方に対して直角に交わる直
線の方向とほぼ一致する。従って、電気／機械の変換効
率を高めるためには、この直線の方向と外部電極１２
ａ，１２ｂ間に交流電圧を印加したときの生じる圧電セ
ラミックの振動方向とのなす角度が、０度よりも大きく
４５度よりも小さい角度になるように第１導体層１４及
び第２導体層１５の直線状導体１４ａ，１５ａを配置す
ることが好ましい。The polarization direction of the piezoelectric ceramic is
The direction of a straight line intersecting at right angles to both the arbitrary linear conductor 14a of the first conductor layer 14 and the linear conductor 15a of the second conductor layer 15 formed closest to the linear conductor 14a Matches. Therefore, in order to increase the electric / mechanical conversion efficiency, the direction of this straight line and the external electrode 12
The first conductor layer 14 and the second conductor layer 15 are formed so that the angle between the piezoelectric ceramic and the vibration direction generated when an AC voltage is applied between the first and second conductor layers a and 12b is larger than 0 degree and smaller than 45 degrees. It is preferable to arrange the linear conductors 14a and 15a.

【００８３】次に、本発明の第２の実施形態を説明す
る。Next, a second embodiment of the present invention will be described.

【００８４】図５は第２の実施形態における圧電体電子
デバイス２０を示す外観斜視図、図６はその素体の分解
斜視図、図７は図６のＡ−Ａ線矢視方向略平断面図であ
る。図において、前述した第１の実施形態と同一構成部
分は同一符号をもって表しその説明を省略する。また、
第１の実施形態と第２の実施形態との相違点は、第１及
び第２の導体層１４，１５のそれぞれに接続導体２４
ｂ，２５ｂを設け、この接続導体２４ｂ，２５ｂによっ
て直線状導体２４ａ，２５ａと外部電極２２ａ，２２ｂ
を接続したことにある。FIG. 5 is an external perspective view showing a piezoelectric electronic device 20 according to the second embodiment, FIG. 6 is an exploded perspective view of the element body, and FIG. 7 is a substantially flat cross section taken along line AA of FIG. FIG. In the figure, the same components as those in the first embodiment described above are denoted by the same reference numerals, and description thereof will be omitted. Also,
The difference between the first embodiment and the second embodiment is that the connection conductor 24 is provided on each of the first and second conductor layers 14 and 15.
b, 25b, and the connecting conductors 24b, 25b are used to connect the linear conductors 24a, 25a to the external electrodes 22a, 22b.
Is connected.

【００８５】即ち、第１導体層１４は、第１電極を構成
する複数の直線状導体２４ａと１つの接続導体２４ｂと
からなり、第２導体層１５は第２電極を構成する複数の
直線状導体２５ａと１つの接続導体２５ｂとからなる。That is, the first conductor layer 14 is composed of a plurality of linear conductors 24a constituting one first electrode and one connecting conductor 24b, and the second conductor layer 15 is composed of a plurality of linear conductors constituting the second electrode. It comprises a conductor 25a and one connection conductor 25b.

【００８６】第１導体層１４の直線状導体２４ａは、互
いにほぼ平行になるように等間隔をあけて配置され、そ
の一端が接続導体２４ｂに接続されている。また、接続
導体２４ｂの一部が一方の外部電極２２ａが形成された
素体１１側面に露出し、この外部電極２２ａに導電接続
されている。The linear conductors 24a of the first conductor layer 14 are arranged at equal intervals so as to be substantially parallel to each other, and one end thereof is connected to the connection conductor 24b. A part of the connection conductor 24b is exposed on the side surface of the element body 11 on which the one external electrode 22a is formed, and is conductively connected to the external electrode 22a.

【００８７】また、第２導体層１５の直線状導体２５ａ
は、互いにほぼ平行になるように等間隔をあけて配置さ
れ、その一端が接続導体２５ｂに接続されている。ま
た、接続導体２５ｂの一部が一方の外部電極２２ｂが形
成された素体１１側面に露出し、この外部電極２２ｂに
導電接続されている。The linear conductor 25a of the second conductor layer 15
Are arranged at equal intervals so as to be substantially parallel to each other, and one end thereof is connected to the connection conductor 25b. A part of the connection conductor 25b is exposed on the side surface of the element body 11 on which the one external electrode 22b is formed, and is conductively connected to the external electrode 22b.

【００８８】ここで、接続導体２４ｂ，２５ｂの露出位
置を振動のノード点に設定し、外部電極２２ａ，２２ｂ
をノード点近傍にのみに形成することにより、素体１１
の機械的な振動によって生じる変位によって接続導体２
４ｂ，２５ｂと外部電極２２ａ，２２ｂとの間に生じや
すい接続不良の発生を低減することができる。Here, the exposed positions of the connection conductors 24b, 25b are set to the vibration node points, and the external electrodes 22a, 22b
Is formed only near the node point, so that the element
The connection conductor 2 is displaced by the mechanical vibration of
4B, 25b and external electrodes 22a, 22b can be less likely to be poorly connected.

【００８９】次に、本発明の第３の実施形態を説明す
る。Next, a third embodiment of the present invention will be described.

【００９０】図８は第３の実施形態の圧電体電子デバイ
ス３０を示す外観斜視図、図９はその略平断面図であ
る。図において、前述した第２の実施形態と同一構成部
分は同一符号をもって表しその説明を省略する。また、
第２の実施形態と第３の実施形態との相違点は、圧電セ
ラミック板１３の積層方向及び直線状導体２４ａ，２５
ａにほぼ平行で且つ外部電極形成面とは異なる素体１１
の１対の対向側面に第３及び第４の外部電極３１ａ，３
１ｂを形成したことである。FIG. 8 is an external perspective view showing a piezoelectric electronic device 30 of the third embodiment, and FIG. 9 is a schematic plan sectional view thereof. In the figure, the same components as those of the above-described second embodiment are denoted by the same reference numerals, and description thereof will be omitted. Also,
The differences between the second embodiment and the third embodiment are the lamination direction of the piezoelectric ceramic plate 13 and the linear conductors 24a, 25a.
a body 11 which is substantially parallel to a and is different from the external electrode forming surface
The third and fourth external electrodes 31a, 3
1b.

【００９１】このように第３及び第４の外部電極３１
ａ，３１ｂを設けることにより、これらの第３及び第４
の外部電極３１ａ，３１ｂから交流電圧を取り出すこと
ができるので、例えば周知の圧電トランスを構成するこ
とができる。As described above, the third and fourth external electrodes 31
a, 31b, these third and fourth
Since the AC voltage can be extracted from the external electrodes 31a and 31b, for example, a well-known piezoelectric transformer can be configured.

【００９２】即ち、第１及び第２の外部電極２２ａ，２
２ｂ間に交流電圧を印加すると、電歪効果によって第１
導体層１４の直線状導体２４ａと第２導体層１５の直線
状導体２５ａとの間に存在する圧電セラミックに分極が
生じて、電圧極性の変化に同期して強い機械的な振動を
生ずる。この振動は素体１１全体に広がるため、圧電効
果によって第３及び第４外部電極３１ａ，３１ｂに電荷
が発生し、第３及び第４外部電極３１ａ，３１ｂから交
流電圧を取り出すことができる。That is, the first and second external electrodes 22a, 22a
When an AC voltage is applied between 2b, the first
Polarization occurs in the piezoelectric ceramic existing between the linear conductor 24a of the conductor layer 14 and the linear conductor 25a of the second conductor layer 15, and strong mechanical vibration occurs in synchronization with the change in voltage polarity. Since this vibration spreads over the entire body 11, electric charges are generated in the third and fourth external electrodes 31a and 31b by the piezoelectric effect, and an AC voltage can be extracted from the third and fourth external electrodes 31a and 31b.

【００９３】また、本実施形態では、圧電定数ｄ33によ
る振動を利用しているため、変位量の大きな振動を発生
させることができるので、小型にして高電圧を出力する
ことができる。Further, in the present embodiment, since the vibration caused by the piezoelectric constant d33 is used, a vibration having a large displacement can be generated, so that a high voltage can be output with a small size.

【００９４】次に、本発明の第４の実施形態を説明す
る。Next, a fourth embodiment of the present invention will be described.

【００９５】図１０は第４の実施形態の積層型圧電体電
子デバイスを示す外観斜視図、図１１はその分解斜視
図、図１２は図１０におけるＡ−Ａ線矢視方向の略平断
面図であるである。図において、前述した第１の実施形
態と同一構成部分は同一符号をもって表しその説明を省
略する。また、第４の実施形態の圧電体電子デバイス４
０は、第１の実施形態の圧電体電子デバイス１０を２個
用いてこれらを積層一体化したものである。FIG. 10 is an external perspective view showing the multilayer piezoelectric electronic device of the fourth embodiment, FIG. 11 is an exploded perspective view thereof, and FIG. 12 is a schematic plan sectional view taken along the line AA in FIG. It is. In the figure, the same components as those in the first embodiment described above are denoted by the same reference numerals, and description thereof will be omitted. Further, the piezoelectric electronic device 4 of the fourth embodiment
Reference numeral 0 indicates that two piezoelectric electronic devices 10 according to the first embodiment are used and stacked and integrated.

【００９６】図において、４０は圧電体電子デバイス
で、第１の実施形態の圧電体電子デバイス１０とほぼ同
じ構成の素体からなる単位積層体４１，４２を積層した
素体４３を備え、素体４３の対向する１対の側面には各
単位積層体４１，４２毎に互いに絶縁された外部電極４
１ａ，４１ｂ，４２ａ，４２ｂが形成されている。In the figure, reference numeral 40 denotes a piezoelectric electronic device, which comprises an element body 43 in which unit laminates 41 and 42 composed of element bodies having substantially the same configuration as the piezoelectric electronic device 10 of the first embodiment are laminated. External electrodes 4 insulated from each other for each of the unit laminated bodies 41 and 42 are provided on a pair of opposed side surfaces of the body 43.
1a, 41b, 42a, and 42b are formed.

【００９７】また、単位積層体４１，４２はそれぞれに
形成されている直線状導体１４ａ，１５ａが平行になる
ように積層されて一体化されている。The unit laminates 41 and 42 are laminated and integrated such that the linear conductors 14a and 15a formed on the unit laminates 41 and 42 are parallel to each other.

【００９８】前述の構成よりなる圧電体電子デバイス４
０は、搭載対象となる親回路基板の面に対して圧電セラ
ミック板１３の面がほぼ垂直になるように親回路基板へ
搭載することにより、各外部電極４１ａ，４１ｂ，４２
ａ，４２ｂと親回路基板上の印刷配線とを容易に半田付
けすることができる。The piezoelectric electronic device 4 having the above configuration
0 indicates that the external electrodes 41a, 41b, and 42 are mounted on the parent circuit board such that the surface of the piezoelectric ceramic plate 13 is substantially perpendicular to the surface of the parent circuit board to be mounted.
a, 42b and the printed wiring on the parent circuit board can be easily soldered.

【００９９】また、上記の圧電体電子デバイス４０は、
例えば周知の圧電トランスとして用いることができる。
即ち、一方の単位積層体４１に形成されている外部電極
４１ａ，４１ｂ間に交流電圧を印加すると、電歪効果に
よって第１導体層１４の直線状導体１４ａと第２導体層
１５の直線状導体１５ａとの間に存在する圧電セラミッ
クに分極が生じて、印加電圧の極性変化に同期して強い
機械的な振動を生ずる。この振動は素体４３全体に広が
り、他方の単位積層体４２も振動するため、他方の単位
積層体４２では圧電効果によって外部電極４２ａ，４２
ｂに電荷が発生し、外部電極４２ａ，４２ｂから交流電
圧を取り出すことができる。Further, the above-mentioned piezoelectric electronic device 40 comprises:
For example, it can be used as a well-known piezoelectric transformer.
That is, when an AC voltage is applied between the external electrodes 41a and 41b formed on one of the unit laminates 41, the linear conductors 14a of the first conductor layer 14 and the linear conductors of the second conductor layer 15 are formed by the electrostrictive effect. Polarization occurs in the piezoelectric ceramic existing between the piezoelectric ceramic 15a and the piezoelectric ceramic 15a, and a strong mechanical vibration is generated in synchronization with the polarity change of the applied voltage. This vibration spreads over the entire element body 43 and the other unit laminated body 42 also vibrates. Therefore, in the other unit laminated body 42, the external electrodes 42a and 42
b generates an electric charge, and an AC voltage can be extracted from the external electrodes 42a and 42b.

【０１００】また、本実施形態では、双方の単位積層体
４１，４２において分極方向と振動方向がほぼ一致する
圧電定数ｄ33による振動を利用しているため、変位量の
大きな振動を発生させることができるので、小型にして
高電圧を出力することができる。Further, in the present embodiment, since the vibration by the piezoelectric constant d33 in which the polarization direction and the vibration direction are almost the same in both unit laminates 41 and 42 is used, it is possible to generate a vibration having a large displacement amount. Therefore, it is possible to reduce the size and output a high voltage.

【０１０１】また、上記構成では、対になる第１電極を
構成する直線状導体１４ａと第２電極を構成する直線状
導体１５ａを圧電セラミック板１３を介在してそれぞれ
異なる導体層１４，１５に配置しているので、層間のマ
イクロデラミネーション或いは電極材料のマイグレーシ
ョンが生じ難く、常に耐圧を比較的高く保つことができ
る。さらに、電極密度を高く設定することができるた
め、電流容量を低下させずに、小型化が可能になる。Further, in the above configuration, the linear conductor 14a forming the first electrode and the linear conductor 15a forming the second electrode, which form a pair, are formed on the different conductor layers 14, 15 with the piezoelectric ceramic plate 13 interposed therebetween. Since they are arranged, microdelamination between layers or migration of electrode materials is unlikely to occur, and the breakdown voltage can always be kept relatively high. Furthermore, since the electrode density can be set high, the size can be reduced without reducing the current capacity.

【０１０２】次に、本発明の第５の実施形態を説明す
る。Next, a fifth embodiment of the present invention will be described.

【０１０３】図１３は第５の実施形態の積層型圧電体電
子デバイスを示す外観斜視図、図１４はその素体の分解
斜視図、図１５は図１４におけるＡ−Ａ線矢視方向略平
断面図、図１６は図１４におけるＢ−Ｂ線矢視方向略平
断面図である。FIG. 13 is an external perspective view showing a laminated piezoelectric electronic device according to a fifth embodiment, FIG. 14 is an exploded perspective view of the element body, and FIG. 15 is a substantially flat view taken along line AA in FIG. FIG. 16 is a cross-sectional view taken along line BB in FIG.

【０１０４】また、第５の実施形態の主要構成は、第４
の実施形態とほぼ同じであり、これらの相違点は、第２
の実施形態の圧電体電子デバイス２０を組み合わせて一
体化することにより、態搭載対象となる親回路基板の面
に対して圧電セラミック板１３の面がほぼ平行になるよ
うに親回路基板へ搭載したときに、各外部電極と親回路
基板上の印刷配線とを容易に半田付けできるようにした
ことである。The main configuration of the fifth embodiment is similar to that of the fourth embodiment.
This embodiment is almost the same as the embodiment of FIG.
By combining and integrating the piezoelectric electronic devices 20 of the above embodiments, the piezoelectric electronic device 20 was mounted on the parent circuit board such that the surface of the piezoelectric ceramic plate 13 was substantially parallel to the surface of the parent circuit board to be mounted. Sometimes, the external electrodes and the printed wiring on the parent circuit board can be easily soldered.

【０１０５】図において、前述した第２の実施形態と同
一構成部分は同一符号をもって表しその説明を省略す
る。即ち、５０は圧電体電子デバイスで、第２の実施形
態の圧電体電子デバイス２０とほぼ同様に構成された素
体からなる単位積層体５１，５２を積層した素体５３を
備え、素体５３の対向する１対の側面には各単位積層体
５１，５２に形成された第１及び第２電極を、各単位積
層体５１，５２毎に接続し且つ互いに絶縁された外部電
極５１ａ，５１ｂ，５２ａ，５２ｂが形成されている。In the figure, the same components as those in the above-described second embodiment are denoted by the same reference numerals, and description thereof is omitted. That is, reference numeral 50 denotes a piezoelectric electronic device, which includes an element body 53 in which unit laminates 51 and 52 composed of element bodies substantially similar to the piezoelectric electronic device 20 of the second embodiment are stacked. The first and second electrodes formed on each of the unit laminates 51 and 52 are connected to the pair of opposing side surfaces of the unit laminates 51 and 52, and the external electrodes 51a, 51b, 52a and 52b are formed.

【０１０６】また、単位積層体５１，５２は、それぞれ
に形成されている直線状導体２４ａ，２５ａが平行にな
るように積層されて一体化されている。The unit laminates 51 and 52 are laminated and integrated so that the linear conductors 24a and 25a formed on the unit laminates 51 and 52 are parallel to each other.

【０１０７】さらに、各単位積層体５１，５２における
接続導体２４ｂ，２５ｂのデバイス表面への露出位置
は、積層方向に互いに重ならない位置に設定されてい
る。また、これらに接続される外部電極５１ａ，５１
ｂ，５２ａ，５２ｂは、所定間隔をあけて形成され互い
に絶縁されると共に、積層方向の上端から下端に亘って
形成されている。Further, the exposed positions of the connection conductors 24b and 25b on the device surface in each of the unit laminates 51 and 52 are set so as not to overlap each other in the lamination direction. Also, external electrodes 51a, 51 connected to these are provided.
b, 52a, and 52b are formed at predetermined intervals, are insulated from each other, and are formed from the upper end to the lower end in the stacking direction.

【０１０８】前述の構成よりなる圧電体電子デバイス５
０は、圧電セラミック板１３の面が親回路基板の面に対
してほぼ平行になるように親回路基板へ搭載することに
より、各外部電極５１ａ，５１ｂ，５２ａ，５２ｂと回
路基板上の印刷配線とを容易に半田付けすることができ
る。The piezoelectric electronic device 5 having the above configuration
No. 0 indicates that the external electrodes 51a, 51b, 52a, 52b and the printed wiring on the circuit board are mounted on the mother circuit board such that the surface of the piezoelectric ceramic plate 13 is substantially parallel to the surface of the mother circuit board. Can be easily soldered.

【０１０９】また、上記の圧電体電子デバイス５０も第
４の実施形態と同様に、例えば周知の圧電トランスとし
て用いることができる。即ち、一方の単位積層体５１に
形成されている外部電極５１ａ，５１ｂ間に交流電圧を
印加すると、電歪効果によって第１導体層２４の直線状
導体２４ａと第２導体層２５の直線状導体２５ａとの間
に存在する圧電セラミックに分極が生じて、印加電圧の
極性変化に同期して強い機械的な振動を生ずる。この振
動は素体５３全体に広がり、他方の単位積層体５２も振
動するため、他方の単位積層体５２では圧電効果によっ
て外部電極５２ａ，５２ｂに電荷が発生し、外部電極５
２ａ，５２ｂから交流電圧を取り出すことができる。The piezoelectric electronic device 50 can be used, for example, as a well-known piezoelectric transformer, similarly to the fourth embodiment. That is, when an AC voltage is applied between the external electrodes 51a and 51b formed on one of the unit laminated bodies 51, the linear conductors 24a of the first conductor layer 24 and the linear conductors of the second conductor layer 25 are formed by the electrostrictive effect. Polarization occurs in the piezoelectric ceramic existing between the piezoelectric ceramic 25a and the piezoelectric ceramic 25a, and a strong mechanical vibration is generated in synchronization with the polarity change of the applied voltage. This vibration spreads over the entire element body 53, and the other unit laminated body 52 also vibrates. Therefore, in the other unit laminated body 52, electric charges are generated in the external electrodes 52a and 52b by the piezoelectric effect, and
An AC voltage can be extracted from 2a and 52b.

【０１１０】また、本実施形態では、双方の単位積層体
５１，５２において分極方向と振動方向がほぼ一致する
圧電定数ｄ33による振動を利用しているため、変位量の
大きな振動を発生させることができるので、小型にして
高電圧を出力することができる。Further, in the present embodiment, since the vibration by the piezoelectric constant d33 in which the polarization direction and the vibration direction are substantially the same in both unit laminates 51 and 52 is used, a vibration having a large displacement can be generated. Therefore, it is possible to reduce the size and output a high voltage.

【０１１１】また、上記構成では、対になる第１電極を
構成する直線状導体２４ａと第２電極を構成する直線状
導体２５ａを圧電セラミック板１３を介在してそれぞれ
異なる導体層１４，１５に配置しているので、層間のマ
イクロデラミネーション或いは電極材料のマイグレーシ
ョンが生じても、常に耐圧を比較的高く保つことができ
る。さらに、電極密度を高く設定することができるた
め、電流容量を低下させずに、小型化が可能になる。Further, in the above configuration, the linear conductors 24a constituting the first electrodes and the linear conductors 25a constituting the second electrodes are formed on the conductor layers 14 and 15 which are different from each other with the piezoelectric ceramic plate 13 interposed therebetween. Because of the arrangement, even if microdelamination between layers or migration of electrode material occurs, the withstand voltage can always be kept relatively high. Furthermore, since the electrode density can be set high, the size can be reduced without reducing the current capacity.

【０１１２】次に、本発明の第６の実施形態を説明す
る。Next, a sixth embodiment of the present invention will be described.

【０１１３】図１７は第６の実施形態の積層型圧電体電
子デバイスを示す外観斜視図、図１８はその素体を示す
分解斜視図、図１９は図１８におけるＡ−Ａ線矢視方向
の略平断面図、図２０は図１９におけるＢ−Ｂ線矢視方
向の略側断面図である。図において、前述した第１の実
施形態と同一構成部分は同一符号をもって表しその説明
を省略する。即ち、６０は圧電体電子デバイスで、前述
した第１の実施形態の圧電体電子デバイス１０と同様の
構成をなす２つの単位積層体６１，６２の間に第３の単
位積層体６３を挟むように積層して一体化した直方体形
状の素体６４を有し、素体６４の４つの側面のそれぞれ
には互いに絶縁された外部電極６５ａ，６５ｂ，６６
ａ，６６ｂが形成されている。FIG. 17 is an external perspective view showing a multilayer piezoelectric electronic device according to the sixth embodiment, FIG. 18 is an exploded perspective view showing the element body, and FIG. 19 is a view taken along the line AA in FIG. FIG. 20 is a schematic side sectional view taken along line BB in FIG. In the figure, the same components as those in the first embodiment described above are denoted by the same reference numerals, and description thereof will be omitted. That is, reference numeral 60 denotes a piezoelectric electronic device which sandwiches a third unit laminated body 63 between two unit laminated bodies 61 and 62 having the same configuration as that of the piezoelectric electronic device 10 of the first embodiment described above. And a rectangular parallelepiped-shaped element body 64, which is laminated and integrated, and external electrodes 65a, 65b, 66 insulated from each other on each of four side surfaces of the element body 64.
a, 66b are formed.

【０１１４】上下層を構成する単位積層体６１，６２
は、それぞれに形成されている直線状導体１４ａ，１５
ａが平行になるように積層されて一体化されている。ま
た、中間層を構成する単位積層体６３は、上面に互いに
平行な２つの直線状導体６７ａ，６７ｂが形成された圧
電セラミック板１３を複数積層して構成されている。２
つの直線状導体６７ａ，６７ｂは、他の単位積層体６
１，６２に形成されている直線状導体１４ａ，１５ａと
平行になるように配置され且つ互いに異なる素体側面に
露出するように形成されている。Unit laminates 61 and 62 constituting upper and lower layers
Are the linear conductors 14a, 15 formed respectively.
a are stacked and integrated so as to be parallel. Further, the unit laminate 63 constituting the intermediate layer is constituted by laminating a plurality of piezoelectric ceramic plates 13 having two parallel linear conductors 67a and 67b formed on the upper surface. 2
The two linear conductors 67a and 67b are connected to the other unit laminate 6
The first and second linear conductors 14a and 15a are arranged so as to be parallel to each other, and are formed so as to be exposed to different side surfaces of the element body.

【０１１５】また、第１の外部電極６５ａは素体６４の
側面に露出した第１電極を構成する全ての直線状導体１
４ａに接続され、第２の外部電極６５ｂは素体６４の側
面に露出した第２電極を構成する全ての直線状導体１５
ａに接続されている。さらに、第３の外部電極６６ａは
素体６４の側面に露出した複数の直線状導体６７ａに接
続され、第４の外部電極６６ｂは素体６４の側面に露出
した複数の直線状導体６７ｂに接続されている。The first external electrodes 65a are all the linear conductors 1 constituting the first electrodes exposed on the side surfaces of the element body 64.
4a, the second external electrode 65b is connected to all the linear conductors 15 constituting the second electrode exposed on the side surface of the element body 64.
a. Further, the third external electrode 66a is connected to a plurality of linear conductors 67a exposed on the side surface of the element body 64, and the fourth external electrode 66b is connected to a plurality of linear conductors 67b exposed on the side surface of the element body 64. Have been.

【０１１６】前述の構成よりなる圧電体電子デバイス６
０は、例えば周知の圧電トランスとして用いることがで
きる。即ち、上下層を構成する単位積層体６１，６２の
直線状導体１４ａ，１５ａに接続されている外部電極６
５ａ，６５ｂ間に交流電圧を印加すると、電歪効果によ
って第１導体層１４の直線状導体１４ａと第２導体層１
５の直線状導体１５ａとの間に存在する圧電セラミック
に分極が生じて、印加電圧の極性変化に同期して強い機
械的な振動を生ずる。この振動は、２つの単位積層体６
１，６２に挟まれた第３の単位積層体６３に伝達し、こ
の第３の単位積層体６３も振動する。このため、第３の
単位積層体６３では圧電効果によって直線状導体６７
ａ，６７ｂに電荷が発生し、外部電極６６ａ，６６ｂか
ら交流電圧を取り出すことができる。The piezoelectric electronic device 6 having the above configuration
0 can be used, for example, as a well-known piezoelectric transformer. That is, the external electrodes 6 connected to the linear conductors 14a, 15a of the unit laminates 61, 62 constituting the upper and lower layers.
When an AC voltage is applied between 5a and 65b, the linear conductor 14a of the first conductor layer 14 and the second conductor layer 1
Polarization occurs in the piezoelectric ceramic existing between the piezoelectric ceramic and the fifth linear conductor 15a, and a strong mechanical vibration is generated in synchronization with a change in the polarity of the applied voltage. This vibration is caused by two unit laminates 6
The light is transmitted to the third unit laminate 63 sandwiched between the first and second units 62, and the third unit laminate 63 also vibrates. For this reason, in the third unit laminated body 63, the linear conductor 67
Electric charges are generated in the electrodes a and 67b, and an AC voltage can be extracted from the external electrodes 66a and 66b.

【０１１７】また、本実施形態では、各単位積層体６１
〜６３において分極方向と振動方向がほぼ一致する圧電
定数ｄ33による振動を利用しているため、変位量の大き
な振動を発生させることができるので、小型にして高電
圧を出力することができる。In the present embodiment, each unit laminated body 61
Since the vibration due to the piezoelectric constant d33 in which the polarization direction and the vibration direction almost coincide with each other is used in ~ to 63, vibration with a large displacement can be generated, so that it is possible to reduce the size and output a high voltage.

【０１１８】また、上記構成では、対になる第１電極を
構成する直線状導体１４ａと第２電極を構成する直線状
導体１５ａを圧電セラミック板１３を介在してそれぞれ
異なる導体層１４，１５に配置しているので、層間のマ
イクロデラミネーション或いは電極材料のマイグレーシ
ョンが生じ難く、常に耐圧を比較的高く保つことができ
る。さらに、電極密度を高く設定することができるた
め、電流容量を低下させずに、小型化が可能になる。Further, in the above configuration, the linear conductor 14a forming the first electrode and the linear conductor 15a forming the second electrode, which form a pair, are formed on the different conductor layers 14, 15 with the piezoelectric ceramic plate 13 interposed therebetween. Since they are arranged, microdelamination between layers or migration of electrode materials is unlikely to occur, and the breakdown voltage can always be kept relatively high. Furthermore, since the electrode density can be set high, the size can be reduced without reducing the current capacity.

【０１１９】次に、本発明の第７の実施形態を説明す
る。Next, a seventh embodiment of the present invention will be described.

【０１２０】図２１は第７の実施形態の積層型圧電体電
子デバイスを示す外観斜視図、図２２はその素体を示す
分解斜視図、図２３は図２２におけるＡ−Ａ線矢視方向
の略平断面図である。FIG. 21 is an external perspective view showing the multilayer piezoelectric electronic device of the seventh embodiment, FIG. 22 is an exploded perspective view showing the element body, and FIG. 23 is a view taken along the line AA in FIG. It is a substantially flat sectional view.

【０１２１】また、第７の実施形態の主要構成は、第６
の実施形態とほぼ同じであり、これらの相違点は、第２
の実施形態の圧電体電子デバイス２０を２つ用い、これ
らの間に第６の実施形態における第３の単位積層体６３
を配置して一体化したことである。The main structure of the seventh embodiment is the same as that of the sixth embodiment.
This embodiment is almost the same as the embodiment of FIG.
The two piezoelectric electronic devices 20 of the embodiment are used, and the third unit laminated body 63 of the sixth embodiment is interposed therebetween.
Are arranged and integrated.

【０１２２】図において、前述した第２及び第６の実施
形態と同一構成部分は同一符号をもって表しその説明を
省略する。即ち、７０は圧電体電子デバイスで、前述し
た第２の実施形態の圧電体電子デバイス２０と同様の構
成をなす２つの単位積層体７１，７２の間に第３の単位
積層体６３を挟むように積層して一体化した直方体形状
の素体７４を有し、素体７４の４つの側面のそれぞれに
は互いに絶縁された外部電極７５ａ，７５ｂ，７６ａ，
７６ｂが形成されている。In the figure, the same components as those of the above-described second and sixth embodiments are denoted by the same reference numerals, and description thereof will be omitted. That is, reference numeral 70 denotes a piezoelectric electronic device that sandwiches the third unit laminated body 63 between two unit laminated bodies 71 and 72 having the same configuration as the piezoelectric electronic device 20 of the second embodiment described above. And a rectangular parallelepiped element 74 which is laminated and integrated with each other, and external electrodes 75a, 75b, 76a,
76b is formed.

【０１２３】上下層を構成する単位積層体７１，７２
は、それぞれに形成されている直線状導体２４ａ，２５
ａが平行になるように積層されて一体化されている。ま
た、中間層を構成する単位積層体６３は、上面に互いに
平行な２つの直線状導体６７ａ，６７ｂが形成された圧
電セラミック板１３を複数積層して構成されている。２
つの直線状導体６７ａ，６７ｂは、他の単位積層体７
１，７２に形成されている直線状導体２４ａ，２５ａと
平行になるように配置され且つ互いに異なる素体側面に
露出するように形成されている。Unit laminates 71 and 72 constituting upper and lower layers
Are the linear conductors 24a, 25 formed respectively.
a are stacked and integrated so as to be parallel. Further, the unit laminate 63 constituting the intermediate layer is constituted by laminating a plurality of piezoelectric ceramic plates 13 having two parallel linear conductors 67a and 67b formed on the upper surface. 2
The two linear conductors 67a, 67b are
They are arranged so as to be parallel to the linear conductors 24a and 25a formed on the first and second linear conductors 1 and 72, and are formed so as to be exposed on different element body side surfaces.

【０１２４】また、第１の外部電極７５ａは素体７４の
側面に露出した第１電極を構成する全ての接続導体２４
ｂの露出部分に接続され、第２の外部電極７５ｂは素体
７４の側面に露出した第２電極を構成する全ての直線状
導体２５ａに接続されている。さらに、第３の外部電極
７６ａは素体７４の側面に露出した複数の直線状導体６
７ａに接続され、第４の外部電極７６ｂは素体７４の側
面に露出した複数の直線状導体６７ｂに接続されてい
る。The first external electrode 75a is connected to all the connecting conductors 24 constituting the first electrode exposed on the side surfaces of the element body 74.
b, and the second external electrode 75b is connected to all the linear conductors 25a constituting the second electrode exposed on the side surface of the element body 74. Further, the third external electrode 76a is formed of a plurality of linear conductors 6 exposed on the side surfaces of the element body 74.
7a, and the fourth external electrode 76b is connected to a plurality of linear conductors 67b exposed on the side surface of the element body 74.

【０１２５】前述の構成よりなる圧電体電子デバイス７
０は、例えば周知の圧電トランスとして用いることがで
きる。即ち、上下層を構成する単位積層体７１，７２の
直線状導体２４ａ，２５ａに接続されている外部電極７
６ａ，７６ｂ間に交流電圧を印加すると、電歪効果によ
って第１導体層１４の直線状導体２４ａと第２導体層１
５の直線状導体２５ａとの間に存在する圧電セラミック
に分極が生じて、印加電圧の極性変化に同期して強い機
械的な振動を生ずる。この振動は、２つの単位積層体７
１，７２に挟まれた第３の単位積層体６３に伝達し、こ
の第３の単位積層体６３も振動する。このため、第３の
単位積層体６３では圧電効果によって直線状導体６７
ａ，６７ｂに電荷が発生し、外部電極７６ａ，７６ｂか
ら交流電圧を取り出すことができる。The piezoelectric electronic device 7 having the above configuration
0 can be used, for example, as a well-known piezoelectric transformer. That is, the external electrodes 7 connected to the linear conductors 24a and 25a of the unit laminates 71 and 72 constituting the upper and lower layers, respectively.
When an AC voltage is applied between the first conductor layer 6a and the second conductor layer 1b due to the electrostriction effect.
Polarization occurs in the piezoelectric ceramic existing between the piezoelectric ceramic and the fifth linear conductor 25a, and a strong mechanical vibration is generated in synchronization with a change in the polarity of the applied voltage. This vibration is caused by two unit laminates 7
The light is transmitted to the third unit laminated body 63 sandwiched between the first and second units 72, and the third unit laminated body 63 also vibrates. For this reason, in the third unit laminated body 63, the linear conductor 67
Electric charges are generated in the electrodes a and 67b, and an AC voltage can be extracted from the external electrodes 76a and 76b.

【０１２６】また、本実施形態では、各単位積層体７
１，７２，６３において分極方向と振動方向がほぼ一致
する圧電定数ｄ33による振動を利用しているため、変位
量の大きな振動を発生させることができるので、小型に
して高電圧を出力することができる。In this embodiment, each unit laminated body 7
Since the vibration of the piezoelectric constant d33 in which the polarization direction and the vibration direction almost coincide with each other is used in 1, 72 and 63, a vibration having a large displacement can be generated. it can.

【０１２７】また、上記構成では、対になる第１電極を
構成する直線状導体２４ａと第２電極を構成する直線状
導体１２ａを圧電セラミック板１３を介在してそれぞれ
異なる導体層１４，１５に配置しているので、層間のマ
イクロデラミネーション或いは電極材料のマイグレーシ
ョンが生じ難く、常に耐圧を比較的高く保つことができ
る。さらに、電極密度を高く設定することができるた
め、電流容量を低下させずに、小型化が可能になる。In the above configuration, the linear conductor 24a forming the pair of the first electrode and the linear conductor 12a forming the second electrode are formed on the different conductor layers 14, 15 with the piezoelectric ceramic plate 13 interposed therebetween. Since they are arranged, microdelamination between layers or migration of electrode materials is unlikely to occur, and the breakdown voltage can always be kept relatively high. Furthermore, since the electrode density can be set high, the size can be reduced without reducing the current capacity.

【０１２８】また、本実施形態のように、接続導体２４
ｂ，２５ｂの露出位置を振動のノード点に設定し、外部
電極７５ａ，７５ｂをノード点近傍にのみに形成するこ
とにより、素体７４の機械的な振動によって生じる変位
によって接続導体２４ｂ，２５ｂと外部電極７５ａ，７
５ｂとの間に生じやすい接続不良の発生を低減すること
ができる。Further, as in the present embodiment, the connection conductor 24
By setting the exposed positions of b and 25b to the vibration node points and forming the external electrodes 75a and 75b only near the node points, the connection conductors 24b and 25b are connected to each other by the displacement caused by the mechanical vibration of the element body 74. External electrodes 75a, 7
5b can be reduced.

【０１２９】次に、本発明の第８の実施形態を説明す
る。Next, an eighth embodiment of the present invention will be described.

【０１３０】図２４は第８の実施形態の積層型圧電体電
子デバイスを示す外観斜視図、図２５はその素体を示す
分解斜視図、図２６は図２５におけるＡ−Ａ線矢視方向
の略平断面図である。本実施形態の基本構成は前述した
第１の実施形態と同様であり、第１の実施形態の圧電体
電子デバイス１０の構成を圧電セラミック板と平行な方
向に２つ並べて形成した構成をなしている。図におい
て、前述した第１の実施形態と同一構成部分は同一符号
をもって表しその説明を省略する。FIG. 24 is an external perspective view showing the multilayer piezoelectric electronic device of the eighth embodiment, FIG. 25 is an exploded perspective view showing the element body, and FIG. 26 is a view taken along the line AA in FIG. It is a substantially flat sectional view. The basic configuration of the present embodiment is the same as that of the above-described first embodiment. The configuration of the piezoelectric electronic device 10 of the first embodiment is formed by arranging two in the direction parallel to the piezoelectric ceramic plate. I have. In the figure, the same components as those in the first embodiment described above are denoted by the same reference numerals, and description thereof will be omitted.

【０１３１】第８の実施形態の圧電体電子デバイス８０
は、図２４乃至図２６に示すように、圧電材料を主体と
した直方体形状の素体８１を有し、この素体８１の１対
の対向側面にはそれぞれ外部電極８２ａ，８２ｂ，８３
ａ，８３ｂが形成されている。The Piezoelectric Electronic Device 80 of the Eighth Embodiment
24 to 26, as shown in FIGS. 24 to 26, has a rectangular parallelepiped element body 81 mainly composed of a piezoelectric material, and external electrodes 82a, 82b, 83
a, 83b are formed.

【０１３２】素体８１は、圧電セラミック材料からなる
圧電セラミック板１３と、第１導体層８４、及び第２導
体層８５から成り、第１導体層８４と第２導体層８５と
の間に圧電セラミック板１３が介在されるように、これ
らを交互に積層して構成されている。The element body 81 is composed of a piezoelectric ceramic plate 13 made of a piezoelectric ceramic material, a first conductor layer 84 and a second conductor layer 85, and a piezoelectric element is provided between the first conductor layer 84 and the second conductor layer 85. These are alternately laminated so that the ceramic plate 13 is interposed.

【０１３３】第１導体層８４は、第１電極を構成する複
数の直線状導体８４ａと、第３電極を構成する複数の直
線状導体８４ｂとから構成されている。また、第２導体
層８５は、第２電極を構成する複数の直線状導体８５ａ
と、第４電極を構成する複数の直線状導体８５ｂとから
構成されている。The first conductor layer 84 is composed of a plurality of linear conductors 84a constituting the first electrode and a plurality of linear conductors 84b constituting the third electrode. Further, the second conductor layer 85 includes a plurality of linear conductors 85a constituting the second electrode.
And a plurality of linear conductors 85b constituting the fourth electrode.

【０１３４】第１及び第２導体層８４，８５の直線状導
体８４ａ，８４ｂ，８５ａ，８５ｂは、互いにほぼ平行
になるように等間隔をあけて配置されている。さらに、
第１電極を構成する直線状導体８４ａと第３電極を構成
する直線状導体８４ｂとの間は、これらに接続される外
部電極８２ａ，８３ａ間を絶縁するために所定距離あけ
て配置されている。同様に、第２電極を構成する直線状
導体８５ａと第４電極を構成する直線状導体８５ｂとの
間は、これらに接続される外部電極８２ｂ，８３ｂ間を
絶縁するために所定距離あけて配置されている。The linear conductors 84a, 84b, 85a, 85b of the first and second conductor layers 84, 85 are arranged at equal intervals so as to be substantially parallel to each other. further,
The linear conductor 84a constituting the first electrode and the linear conductor 84b constituting the third electrode are arranged at a predetermined distance to insulate between the external electrodes 82a and 83a connected thereto. . Similarly, a predetermined distance is provided between the linear conductor 85a constituting the second electrode and the linear conductor 85b constituting the fourth electrode to insulate between the external electrodes 82b and 83b connected thereto. Have been.

【０１３５】また、第２導体層８５の直線状導体８５
ａ，８５ｂは、第１導体層８４の隣り合う２つの直線状
導体８４ａ，８４ｂのほぼ中間位置に対応して配置され
ている。In addition, the linear conductor 85 of the second conductor layer 85
a and 85b are arranged corresponding to almost the middle position between two adjacent linear conductors 84a and 84b of the first conductor layer 84.

【０１３６】さらに、第１導体層８４の直線状導体８４
ａ，８４ｂの一端は外部電極８２ａ，８３ａが形成され
ている素体側面に露出し、この外部電極８２ａ，８３ａ
に導電接続されている。また、第２導体層８５の直線状
導体８５ａ，８５ｂの一端は外部電極８２ｂ，８３ｂが
形成されている素体側面に露出し、この外部電極８２
ｂ，８３ｂに導電接続されている。Further, the linear conductor 84 of the first conductor layer 84
a and 84b are exposed on the side of the element body on which the external electrodes 82a and 83a are formed.
Are electrically conductively connected. One ends of the linear conductors 85a and 85b of the second conductor layer 85 are exposed on the side of the element body on which the external electrodes 82b and 83b are formed.
b and 83b.

【０１３７】また、第１導体層８４の直線状導体８４ａ
と、この直線状導体８４ａに最も近い第２導体層８５の
直線状導体８５ａとの間においては、第１の実施形態と
同様に、圧電セラミック板１３の面に平行で直線状導体
８４ａ，８５ａに直交する方向の距離Ｌ１は、圧電セラ
ミック板１３の面及び直線状導体８４ａ，８５ａに直交
する方向の距離Ｌ２の約３倍に設定されている。The linear conductor 84a of the first conductor layer 84
Similarly, between the linear conductor 85a of the second conductor layer 85 closest to the linear conductor 84a and the linear conductors 84a, 85a parallel to the surface of the piezoelectric ceramic plate 13 as in the first embodiment. Is set to be approximately three times the distance L2 in the direction perpendicular to the surface of the piezoelectric ceramic plate 13 and the linear conductors 84a and 85a.

【０１３８】前述の構成よりなる圧電体電子デバイス８
０は、例えば、周知の圧電トランスとして用いることが
できる。即ち、外部電極８２ａ，８２ｂ間に交流電圧を
印加すると、電歪効果により第１導体層８４の直線状導
体８４ａと第２導体層８５の直線状導体８５ａとの間に
存在する圧電セラミックに分極が生じて、電圧極性の変
化に同期して強い機械的な振動を生ずる。この振動は、
圧電セラミック板１３を伝達し、第３及び第４電極を構
成する直線状導体８４ｂ，８５ｂ近傍の圧電セラミック
板１３も振動する。このため、圧電効果によって第３及
び第４電極を構成する直線状導体８４ｂ，８５ｂに電荷
が発生し、外部電極８３ａ，８３ｂから交流電圧を取り
出すことができる。The piezoelectric electronic device 8 having the above configuration
0 can be used, for example, as a well-known piezoelectric transformer. That is, when an AC voltage is applied between the external electrodes 82a and 82b, the piezoelectric ceramics polarized between the linear conductor 84a of the first conductor layer 84 and the linear conductor 85a of the second conductor layer 85 due to the electrostriction effect. Occurs, and a strong mechanical vibration is generated in synchronization with the change in the voltage polarity. This vibration is
The piezoelectric ceramic plate 13 is transmitted, and the piezoelectric ceramic plate 13 near the linear conductors 84b and 85b constituting the third and fourth electrodes also vibrates. For this reason, electric charges are generated in the linear conductors 84b and 85b constituting the third and fourth electrodes by the piezoelectric effect, and an AC voltage can be extracted from the external electrodes 83a and 83b.

【０１３９】ここで、第２導体層８５の直線状導体８５
ａ，８５ｂは第１導体層８４の隣り合う直線状導体８４
ａ，８４ｃのほぼ中間に配置され、且つ上記距離Ｌ１が
距離Ｌ２の約３倍に設定されていると共に第１及び第２
導体層８４，８５が複数積層されているので、圧電セラ
ミック板１３の振動方向は、圧電セラミック板１３の面
に平行で直線状導体８４ａ，８４ｂ，８５ａ，８５ｂに
直交する方向となる。即ち、圧電定数ｄ33による振動を
発生している。Here, the linear conductor 85 of the second conductor layer 85
a and 85b are adjacent linear conductors 84 of the first conductor layer 84;
a, 84c, the distance L1 is set to be approximately three times the distance L2, and the first and second
Since the plurality of conductor layers 84 and 85 are laminated, the vibration direction of the piezoelectric ceramic plate 13 is a direction parallel to the surface of the piezoelectric ceramic plate 13 and orthogonal to the linear conductors 84a, 84b, 85a and 85b. That is, vibration is generated by the piezoelectric constant d33.

【０１４０】また、上記構成では、対になる第１電極を
構成する直線状導体８４ａと第２電極を構成する直線状
導体８５ａを圧電セラミック板１３を介在してそれぞれ
異なる導体層８４，８５に配置しているので、層間のマ
イクロデラミネーション或いは電極材料のマイグレーシ
ョンが生じ難く、常に耐圧を比較的高く保つことができ
る。さらに、電極密度を高く設定することができるた
め、電流容量を低下させずに、小型化が可能になる。Further, in the above configuration, the linear conductor 84a forming the first electrode and the linear conductor 85a forming the second electrode, which form a pair, are formed on the different conductor layers 84 and 85 with the piezoelectric ceramic plate 13 interposed therebetween. Since they are arranged, microdelamination between layers or migration of electrode materials is unlikely to occur, and the breakdown voltage can always be kept relatively high. Furthermore, since the electrode density can be set high, the size can be reduced without reducing the current capacity.

【０１４１】次に、本発明の第９の実施形態を説明す
る。Next, a ninth embodiment of the present invention will be described.

【０１４２】図２７は第９の実施形態の積層型圧電体電
子デバイスを示す外観斜視図、図２８はその略平断面図
である。FIG. 27 is an external perspective view showing a multilayer piezoelectric electronic device according to the ninth embodiment, and FIG. 28 is a schematic plan sectional view thereof.

【０１４３】また、第８の実施形態と第９の実施形態と
の相違点は、第８の実施形態では前述した第２の実施形
態と同様に、第１及び第２導体層の直線状導体と外部電
極との間に接続導体を介在させて接続したことである。The difference between the eighth embodiment and the ninth embodiment is that, in the eighth embodiment, the linear conductors of the first and second conductor layers are similar to the above-described second embodiment. And the external electrode is connected with a connecting conductor interposed therebetween.

【０１４４】図において、９０は積層型圧電体電子デバ
イスで、圧電材料を主体とした直方体形状の素体９１を
有し、この素体９１の１対の対向側面にはそれぞれ外部
電極９２ａ，９２ｂ，９３ａ，９３ｂが形成されてい
る。In the figure, reference numeral 90 denotes a laminated piezoelectric electronic device having a rectangular parallelepiped element body 91 mainly composed of a piezoelectric material, and external electrodes 92a and 92b on a pair of opposing side surfaces of the element body 91, respectively. , 93a, 93b are formed.

【０１４５】素体９１は、圧電セラミック材料からなる
圧電セラミック板１３と、第１導体層９４、及び第２導
体層９５から成り、第１導体層９４と第２導体層９５と
の間に圧電セラミック板１３が介在されるように、これ
らを交互に積層して構成されている。The element body 91 is composed of a piezoelectric ceramic plate 13 made of a piezoelectric ceramic material, a first conductor layer 94 and a second conductor layer 95, and a piezoelectric element is provided between the first conductor layer 94 and the second conductor layer 95. These are alternately laminated so that the ceramic plate 13 is interposed.

【０１４６】第１導体層９４は、第１電極を構成する複
数の直線状導体９４ａと、第３電極を構成する複数の直
線状導体９４ｂ、及び接続導体９４ｃ，９４ｄとから構
成されている。また、第２導体層９５は、第２電極を構
成する複数の直線状導体９５ａと、第４電極を構成する
複数の直線状導体９５ｂ、及び接続導体９５ｃ，９５ｄ
とから構成されている。The first conductor layer 94 is composed of a plurality of linear conductors 94a constituting a first electrode, a plurality of linear conductors 94b constituting a third electrode, and connection conductors 94c and 94d. The second conductor layer 95 includes a plurality of linear conductors 95a forming a second electrode, a plurality of linear conductors 95b forming a fourth electrode, and connection conductors 95c and 95d.
It is composed of

【０１４７】第１及び第２導体層９４，９５の直線状導
体９４ａ，９４ｂ，９５ａ，９５ｂは、互いにほぼ平行
になるように等間隔をあけて配置されている。さらに、
第１電極を構成する直線状導体９４ａと第３電極を構成
する直線状導体９４ｂとの間は、これらに接続される外
部電極９２ａ，９３ａ間を絶縁するために所定距離あけ
て配置されている。同様に、第２電極を構成する直線状
導体９５ａと第４電極を構成する直線状導体９５ｂとの
間は、これらに接続される外部電極９２ｂ，９３ｂ間を
絶縁するために所定距離あけて配置されている。The straight conductors 94a, 94b, 95a, 95b of the first and second conductor layers 94, 95 are arranged at equal intervals so as to be substantially parallel to each other. further,
The linear conductor 94a constituting the first electrode and the linear conductor 94b constituting the third electrode are arranged at a predetermined distance to insulate between the external electrodes 92a and 93a connected thereto. . Similarly, a predetermined distance is provided between the linear conductor 95a constituting the second electrode and the linear conductor 95b constituting the fourth electrode to insulate between the external electrodes 92b and 93b connected thereto. Have been.

【０１４８】また、第２導体層９５の直線状導体９５
ａ，９５ｂは、第１導体層９４の隣り合う２つの直線状
導体９４ａ，９４ｂのほぼ中間位置に対応して配置され
ている。The linear conductor 95 of the second conductor layer 95
“a” and “95b” are arranged corresponding to almost the middle positions between two adjacent linear conductors 94a and 94b of the first conductor layer 94.

【０１４９】さらに、第１導体層９４の直線状導体９４
ａの一端は接続導体９４ｃに接続され、接続導体９４ｃ
の一部が素体側面に露出して外部電極９２ａに導電接続
されている。同様に、第１導体層９４の直線状導体９４
ｂの一端は接続導体９４ｄに接続され、接続導体９４ｄ
の一部が素体側面に露出して外部電極９３ａに導電接続
されている。また、第２導体層９５の直線状導体９５ａ
の一端は接続導体９５ｃに接続され、接続導体９５ｃの
一部が素体側面に露出して外部電極９２ｂに導電接続さ
れている。同様に、第２導体層９５の直線状導体９５ｂ
の一端は接続導体９５ｄに接続され、接続導体９５ｄの
一部が素体側面に露出して外部電極９３ｂに導電接続さ
れている。Further, the linear conductor 94 of the first conductor layer 94
a is connected to the connection conductor 94c, and is connected to the connection conductor 94c.
Are exposed on the side surfaces of the element body and are conductively connected to the external electrodes 92a. Similarly, the linear conductor 94 of the first conductor layer 94
b is connected to the connection conductor 94d, and the connection conductor 94d
Are exposed to the side surfaces of the element body and are conductively connected to the external electrodes 93a. Also, the linear conductor 95a of the second conductor layer 95
Is connected to the connection conductor 95c, and a part of the connection conductor 95c is exposed to the side surface of the element body and is conductively connected to the external electrode 92b. Similarly, the linear conductor 95b of the second conductor layer 95
Is connected to the connection conductor 95d, and a part of the connection conductor 95d is exposed to the side surface of the element body and is conductively connected to the external electrode 93b.

【０１５０】また、第１導体層９４の直線状導体９４ａ
と、この直線状導体９４ａに最も近い第２導体層９５の
直線状導体９５ａとの間においては、第１の実施形態と
同様に、圧電セラミック板１３の面に平行で直線状導体
９４ａ，９５ａに直交する方向の距離Ｌ１は、圧電セラ
ミック板１３の面及び直線状導体９４ａ，９５ａに直交
する方向の距離Ｌ２の約３倍に設定されている。The linear conductor 94a of the first conductor layer 94
As in the first embodiment, between the linear conductor 94a and the linear conductor 95a of the second conductor layer 95 closest to the linear conductor 94a, the linear conductors 94a, 95a Is set to be about three times the distance L2 in the direction orthogonal to the surface of the piezoelectric ceramic plate 13 and the linear conductors 94a and 95a.

【０１５１】ここで、接続導体９４ｃ，９４ｄ，９５
ｃ，９５ｄの露出位置は振動のノード点に設定され、外
部電極９２ａ，９２ｂ、９３ａ，９３ｂはノード点近傍
にのみに形成されている。これにより、素体９１の機械
的な振動によって生じる変位によって接続導体９４ｃ，
９４ｄ，９５ｃ，９５ｄと外部電極９２ａ，９２ｂ、９
３ａ，９３ｂとの間に生じやすい接続不良の発生を低減
することができる。Here, the connection conductors 94c, 94d, 95
The exposure positions of c and 95d are set at the vibration node points, and the external electrodes 92a, 92b, 93a and 93b are formed only near the node points. Thus, the connection conductors 94c, 94c,
94d, 95c, 95d and external electrodes 92a, 92b, 9
It is possible to reduce the occurrence of a connection failure that easily occurs between the first and third terminals 3a and 93b.

【０１５２】尚、第９の実施形態では、第１及び第２導
体層９４，９５の直線状導体９４ａ，９４ｂ，９５ａ，
９５ｂと外部電極９２ａ，９２ｂ，９３ａ，９３ｂとの
間に接続導体９４ｃ，９４ｄ，９５ｃ，９５ｄを介在さ
せて接続したが、この構成に限定されることはない。例
えば、図２９及び図３０に示すように、振動のノード点
近傍に配置されている直線状導体９４ａ，９４ｂ，９５
ａ，９５ｂを素体側面に露出させて外部電極９２ａ，９
２ｂ，９３ａ，９３ｂと接続し、直線状導体９４ａ，９
４ｂ，９５ａ，９５ｂを直線状の接続導体９６ａ〜９６
ｄによって接続するようにしても良い。この際、第１導
体層９４の接続導体９６ａ，９６ｂと第２導体層９５の
接続導体９６ｃ，９６ｄとが積層方向に重ならないよう
に形成することが好ましい。第１導体層９４の接続導体
９６ａ，９６ｂと第２導体層９５の接続導体９６ｃ，９
６ｄとが積層方向に重なると、これらの間に存在する圧
電セラミックに圧電セラミック板１３に対して垂直な方
向に分極が生じて、同方向に機械的な振動を生ずるた
め、効率の低下を招くことになる。In the ninth embodiment, the linear conductors 94a, 94b, 95a, and 95a of the first and second conductor layers 94 and 95 are formed.
Although the connection conductors 94c, 94d, 95c, and 95d are connected between the external electrode 95b and the external electrodes 92a, 92b, 93a, and 93b, the present invention is not limited to this configuration. For example, as shown in FIGS. 29 and 30, the linear conductors 94a, 94b, 95
a, 95b are exposed on the side surfaces of the element body to form external electrodes 92a, 9b.
2b, 93a, 93b, and the linear conductors 94a, 94
4b, 95a and 95b are connected to linear connection conductors 96a to 96
The connection may be made by d. At this time, it is preferable that the connection conductors 96a and 96b of the first conductor layer 94 and the connection conductors 96c and 96d of the second conductor layer 95 are formed so as not to overlap in the stacking direction. The connection conductors 96a and 96b of the first conductor layer 94 and the connection conductors 96c and 9 of the second conductor layer 95
When 6d overlaps in the laminating direction, the piezoelectric ceramic present therebetween is polarized in a direction perpendicular to the piezoelectric ceramic plate 13, and mechanical vibration occurs in the same direction, thereby lowering the efficiency. Will be.

【０１５３】また、図３１に示すように、三角波形状の
接続導体９７ａ〜９７ｄによって接続するようにしても
良い。As shown in FIG. 31, the connection may be made by connection conductors 97a to 97d having a triangular wave shape.

【０１５４】また、前述した第３乃至第９の実施形態で
は、例として圧電トランスに適用した場合の動作を説明
したが、この他に圧電振動子、圧電フィルタ等に適用す
ることもできる。In the third to ninth embodiments described above, the operation when applied to a piezoelectric transformer has been described as an example. However, the present invention can also be applied to a piezoelectric vibrator, a piezoelectric filter, and the like.

【０１５５】また、前述した第１乃至第９の実施形態
は、本願発明の一具体例に過ぎず、本願発明がこれらの
みに限定されることはない。例えば、第１乃至第９の実
施形態の構成を任意に組み合わせた圧電体電子デバイス
を構成しても同様の効果を得ることができることは言う
までもないことである。The first to ninth embodiments described above are merely specific examples of the present invention, and the present invention is not limited to only these examples. For example, it goes without saying that the same effect can be obtained even if a piezoelectric electronic device in which the structures of the first to ninth embodiments are arbitrarily combined is obtained.

【０１５６】[0156]

【発明の効果】以上説明したように本発明の請求項１乃
至請求項２２記載の積層型圧電体電子デバイスによれ
ば、対になる第１電極と第２電極が圧電体層を介在して
それぞれ異なる導体層に配置されているので、層間のマ
イクロデラミネーション或いは電極材料のマイグレーシ
ョンが生じ難く、常に耐圧を比較的高く保つことができ
る。さらに、電極密度を高く設定することができるた
め、電流容量を低下させずに、小型化が可能になる。As described above, according to the multi-layer piezoelectric electronic device of the first to twenty-second aspects of the present invention, the first electrode and the second electrode forming a pair interpose the piezoelectric layer. Since they are arranged in different conductor layers, microdelamination between layers or migration of electrode material is unlikely to occur, and the withstand voltage can always be kept relatively high. Furthermore, since the electrode density can be set high, the size can be reduced without reducing the current capacity.

【０１５７】また、請求項３，７，１０，１３，１４記
載の積層型圧電体電子デバイスによれば、接続導体の一
部をデバイス表面に露出させ該露出部分に接続した外部
電極が形成されるので、異なる外部電極間の距離を大き
く設定することができるため、耐圧を向上させることが
できる。Further, according to the multilayer piezoelectric electronic device of the third, seventh, tenth, thirteenth, and fourteenth aspects, a part of the connection conductor is exposed on the device surface, and the external electrode connected to the exposed part is formed. Therefore, the distance between the different external electrodes can be set large, so that the withstand voltage can be improved.

【０１５８】また、請求項１５記載の積層型圧電体電子
デバイスによれば、上記の効果に加えて、直線状導体が
振動のノード点近傍位置においてデバイス表面に露出し
ているため、露出した直線状導体にかかる前記振動によ
って生ずる変位が最小になるので、前記振動による直線
状導体と外部電極との間の断線を生ずることがなく、高
い信頼性が得られる。According to the laminated piezoelectric electronic device of the fifteenth aspect, in addition to the effects described above, the linear conductor is exposed on the device surface at a position near the node point of the vibration. Since the displacement caused by the vibration applied to the conductor is minimized, there is no disconnection between the linear conductor and the external electrode due to the vibration, and high reliability can be obtained.

【０１５９】また、請求項１９記載の積層型圧電体電子
デバイスによれば、上記の効果に加えて、第１電極の直
線状導体と第２電極の直線状導体との間の圧電体層に平
行な方向の距離が、前記第１電極の隣接する直線状導体
間の距離の約１／２に設定されているため、第１電極と
第２電極との間の距離を、耐圧を下げずに短く設定する
ことができるので、電気／機械の変換効率を向上させる
ことができると共に、高周波に対応させることができ
る。According to the laminated piezoelectric electronic device of the nineteenth aspect, in addition to the above-described effects, the piezoelectric layer between the linear conductor of the first electrode and the linear conductor of the second electrode can be provided. Since the distance in the parallel direction is set to about 1/2 of the distance between the adjacent linear conductors of the first electrode, the distance between the first electrode and the second electrode is reduced without lowering the withstand voltage. , It is possible to improve the conversion efficiency of electric / mechanical and to cope with high frequencies.

【０１６０】また、請求項２０記載の積層型圧電体電子
デバイスによれば、上記の効果に加えて、第１電極及び
前記第２電極の同一層内における隣接する直線状導体間
の距離が、圧電体層の厚み方向における前記第１電極と
第２電極との間の距離よりも大きく設定されているた
め、分極方向と振動方向が大きく異ならないので、圧電
体におけるｄ３３振動が生じやすくなり、効率が劣化し
難くなる。According to the laminated piezoelectric electronic device of the twentieth aspect, in addition to the above-described effects, the distance between the adjacent linear conductors in the same layer of the first electrode and the second electrode can be reduced. Since the distance between the first electrode and the second electrode in the thickness direction of the piezoelectric layer is set to be larger, the polarization direction and the vibration direction do not greatly differ from each other. Efficiency is less likely to deteriorate.

【０１６１】また、請求項２１記載の積層型圧電体電子
デバイスによれば、上記の効果に加えて、第１電極と第
２電極との間に交流電圧を印加したときの圧電体層の分
極方向と振動方向とのなす角度が０度よりも大きく４５
度よりも小さい角度になるように前記第１電極及び第２
電極が配置されているため、分極方向と振動方向が大き
く異ならないので、圧電体におけるｄ３３振動が生じや
すくなり、効率が劣化し難くなる。According to the laminated piezoelectric electronic device of the twenty-first aspect, in addition to the above effects, the polarization of the piezoelectric layer when an AC voltage is applied between the first electrode and the second electrode. The angle between the direction and the vibration direction is larger than 0 degree and 45
The first electrode and the second electrode so that the angle is smaller than
Since the electrodes are arranged, the polarization direction and the vibration direction do not greatly differ from each other, so that d33 vibration in the piezoelectric body easily occurs, and the efficiency is hardly deteriorated.

【０１６２】また、請求項２２記載の積層型圧電体電子
デバイスによれば、上記の効果に加えて、第１電極の一
の直線状導体と該直線状導体に最も近い位置に形成され
ている第２電極の直線状導体の双方に対して直角に交わ
る直線の方向と、前記第１電極と第２電極との間に交流
電圧を印加したときの圧電体層の振動方向とのなす角度
が、０度よりも大きく４５度よりも小さい角度になるよ
うに前記第１電極及び第２電極が配置されているため、
分極方向と振動方向が大きく異ならないので、圧電体に
おけるｄ３３振動が生じやすくなり、効率が劣化し難く
なる。According to the multilayer piezoelectric electronic device of the twenty-second aspect, in addition to the above effects, the first electrode is formed at one of the linear conductors and at a position closest to the linear conductor. The angle between the direction of a straight line intersecting at right angles to both of the linear conductors of the second electrode and the vibration direction of the piezoelectric layer when an AC voltage is applied between the first electrode and the second electrode is formed. , Since the first electrode and the second electrode are arranged at an angle larger than 0 degree and smaller than 45 degrees,
Since the polarization direction and the vibration direction do not greatly differ, d33 vibration in the piezoelectric body is easily generated, and the efficiency is hardly deteriorated.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の第１の実施形態における積層型圧電体
電子デバイスを示す外観斜視図FIG. 1 is an external perspective view showing a multilayer piezoelectric electronic device according to a first embodiment of the present invention.

【図２】本発明の第１の実施形態における積層型圧電体
電子デバイスにおける素体を示す分解斜視図FIG. 2 is an exploded perspective view showing an element body in the multilayer piezoelectric electronic device according to the first embodiment of the present invention.

【図３】図２におけるＡ−Ａ線矢視方向略平断面図FIG. 3 is a schematic plan sectional view taken along the line AA in FIG. 2;

【図４】図３におけるＢ−Ｂ線矢視方向略側断面図FIG. 4 is a schematic side sectional view taken along line BB in FIG. 3;

【図５】本発明の第２の実施形態における積層型圧電体
電子デバイスを示す外観斜視図FIG. 5 is an external perspective view showing a multilayer piezoelectric electronic device according to a second embodiment of the present invention.

【図６】本発明の第２の実施形態における積層型圧電体
電子デバイスにおける素体を示す分解斜視図FIG. 6 is an exploded perspective view showing an element body in a multilayer piezoelectric electronic device according to a second embodiment of the present invention.

【図７】図６におけるＡ−Ａ線矢視方向略平断面図FIG. 7 is a schematic plan sectional view taken along the line AA in FIG. 6;

【図８】本発明の第３の実施形態における積層型圧電体
電子デバイスを示す外観斜視図FIG. 8 is an external perspective view showing a multilayer piezoelectric electronic device according to a third embodiment of the present invention.

【図９】本発明の第３の実施形態における積層型圧電体
電子デバイスを示す略平断面図FIG. 9 is a schematic plan cross-sectional view illustrating a multilayer piezoelectric electronic device according to a third embodiment of the present invention.

【図１０】本発明の第４の実施形態における積層型圧電
体電子デバイスを示す外観斜視図FIG. 10 is an external perspective view showing a multilayer piezoelectric electronic device according to a fourth embodiment of the present invention.

【図１１】本発明の第４の実施形態における積層型圧電
体電子デバイスを示す分解斜視図FIG. 11 is an exploded perspective view showing a multilayer piezoelectric electronic device according to a fourth embodiment of the present invention.

【図１２】図１０におけるＡ−Ａ線矢視方向略平断面図FIG. 12 is a schematic cross-sectional view taken along the line AA in FIG. 10;

【図１３】本発明の第５の実施形態における積層型圧電
体電子デバイスを示す外観斜視図FIG. 13 is an external perspective view showing a multilayer piezoelectric electronic device according to a fifth embodiment of the present invention.

【図１４】本発明の第５の実施形態における積層型圧電
体電子デバイスにおける素体を示す分解斜視図FIG. 14 is an exploded perspective view showing an element body in a multilayer piezoelectric electronic device according to a fifth embodiment of the present invention.

【図１５】図１４におけるＡ−Ａ線矢視方向略平断面図FIG. 15 is a schematic plan sectional view taken in the direction of arrows AA in FIG. 14;

【図１６】図１４におけるＢ−Ｂ線矢視方向略平断面図FIG. 16 is a schematic plan sectional view taken along line BB in FIG. 14;

【図１７】本発明の第６の実施形態における積層型圧電
体電子デバイスを示す外観斜視図FIG. 17 is an external perspective view showing a multilayer piezoelectric electronic device according to a sixth embodiment of the present invention.

【図１８】本発明の第６の実施形態における積層型圧電
体電子デバイスにおける素体を示す分解斜視図FIG. 18 is an exploded perspective view showing an element body in a multilayer piezoelectric electronic device according to a sixth embodiment of the present invention.

【図１９】図１８におけるＡ−Ａ線矢視方向略平断面図FIG. 19 is a schematic plan sectional view taken along the line AA in FIG. 18;

【図２０】図１９におけるＢ−Ｂ線矢視方向の略側断面
図20 is a schematic side sectional view taken along line BB in FIG. 19;

【図２１】本発明の第７の実施形態における積層型圧電
体電子デバイスを示す外観斜視図FIG. 21 is an external perspective view showing a multilayer piezoelectric electronic device according to a seventh embodiment of the present invention.

【図２２】本発明の第７の実施形態における積層型圧電
体電子デバイスにおける素体を示す分解斜視図FIG. 22 is an exploded perspective view showing an element body in a multilayer piezoelectric electronic device according to a seventh embodiment of the present invention.

【図２３】図２２におけるＡ−Ａ線矢視方向略平断面図23 is a schematic plan sectional view taken along the line AA in FIG. 22;

【図２４】本発明の第８の実施形態における積層型圧電
体電子デバイスを示す外観斜視図FIG. 24 is an external perspective view showing a multilayer piezoelectric electronic device according to an eighth embodiment of the present invention.

【図２５】本発明の第８の実施形態における積層型圧電
体電子デバイスにおける素体を示す分解斜視図FIG. 25 is an exploded perspective view showing an element body in the multilayer piezoelectric electronic device according to the eighth embodiment of the present invention.

【図２６】図２５におけるＡ−Ａ線矢視方向略平断面図26 is a schematic plan sectional view taken along the line AA in FIG. 25;

【図２７】本発明の第９の実施形態における積層型圧電
体電子デバイスを示す外観斜視図FIG. 27 is an external perspective view showing a multilayer piezoelectric electronic device according to a ninth embodiment of the present invention.

【図２８】本発明の第９の実施形態における積層型圧電
体電子デバイスを示す略平断面図FIG. 28 is a schematic plan sectional view showing a multilayer piezoelectric electronic device according to a ninth embodiment of the present invention.

【図２９】本発明の第９の実施形態に係る他の接続導体
の構成を示す略平断面図FIG. 29 is a schematic plan sectional view showing the configuration of another connection conductor according to the ninth embodiment of the present invention.

【図３０】本発明の第９の実施形態に係る他の接続導体
の構成を示す略平断面図FIG. 30 is a schematic plan sectional view showing the configuration of another connection conductor according to the ninth embodiment of the present invention.

【図３１】本発明の第９の実施形態に係る他の接続導体
の構成を示す略平断面図FIG. 31 is a schematic plan sectional view showing the configuration of another connection conductor according to the ninth embodiment of the present invention.

【図３２】従来例としての圧電トランスの典型であるロ
ーゼン型圧電トランスを示す斜視図FIG. 32 is a perspective view showing a Rosen type piezoelectric transformer which is a typical example of a conventional piezoelectric transformer.

【符号の説明】[Explanation of symbols]

１０，２０，３０，４０，５０，６０，７０，８０，９
０…積層型圧電体電子デバイス、１１，４３，５３，６
４，７４，８１，９１…素体、１２ａ，１２ｂ，２２
ａ，２２ｂ，３１ａ，３１ｂ，４１ａ，４１ｂ，４２
ａ，４２ｂ，５１ａ，５１ｂ，５２ａ，５２ｂ，６５
ａ，６５ｂ，６６ａ，６６ｂ，７５ａ，７５ｂ，７６
ａ，７６ｂ，８２ａ，８２ｂ，８３ａ，８３ｂ，９２
ａ，９２ｂ，９３ａ，９３ｂ…外部電極、１３…圧電セ
ラミック板、１４，８４，９４…第１導体層、１５，８
５，９５…第２導体層、１４ａ，１５ａ，２４ａ，２５
ａ，６７ａ，６７ｂ，８４ａ，８４ｂ，８５ａ，８５
ｂ，９４ａ，９４ｂ，９５ａ，９５ｂ…直線状導体、２
４ｂ，２５ｂ，９４ｃ，９４ｄ，９５ｃ，９５ｄ，９６
ａ〜９６ｄ，９７ａ〜９７ｄ…接続導体、４１，４２，
４３，５１，５２、６１，６２，６３，７１，７２…単
位積層体。10, 20, 30, 40, 50, 60, 70, 80, 9
0 ... Laminated piezoelectric electronic device, 11, 43, 53, 6
4, 74, 81, 91 ... prime field, 12a, 12b, 22
a, 22b, 31a, 31b, 41a, 41b, 42
a, 42b, 51a, 51b, 52a, 52b, 65
a, 65b, 66a, 66b, 75a, 75b, 76
a, 76b, 82a, 82b, 83a, 83b, 92
a, 92b, 93a, 93b: external electrodes, 13: piezoelectric ceramic plate, 14, 84, 94: first conductor layer, 15, 8
5,95... Second conductor layer, 14a, 15a, 24a, 25
a, 67a, 67b, 84a, 84b, 85a, 85
b, 94a, 94b, 95a, 95b ... linear conductor, 2
4b, 25b, 94c, 94d, 95c, 95d, 96
a to 96d, 97a to 97d ... connection conductors, 41, 42,
43, 51, 52, 61, 62, 63, 71, 72 ... unit laminate.

フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｈ０３Ｈ 9/205 Ｈ０１Ｌ 41/08 Ｓ Ｎ Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (reference) H03H 9/205 H01L 41/08 SN

Claims (22)

【特許請求の範囲】[Claims] 【請求項１】 第１導体層と第２導体層との間に圧電体
層を挟むように、該第１導体層と第２導体層と圧電体層
とを交互に複数積層してなる積層型圧電体電子デバイス
において、 前記第１導体層は互いに平行な複数の直線状導体からな
る第１電極を有し、 前記第２導体層は互いに平行で且つ前記前記圧電体層に
平行な方向において前記第１電極の隣り合う直線状導体
の間に第１電極の直線状導体に対応して平行に配置され
た複数の直線状導体からなる第２電極を有し、 前記第１電極の直線状導体同士を接続する第１接続導体
と、 前記第２電極の直線状導体同士を接続する第２接続導体
とを備えていることを特徴とする積層型圧電体電子デバ
イス。1. A laminated structure in which a plurality of first conductive layers, second conductive layers, and piezoelectric layers are alternately laminated so as to sandwich a piezoelectric layer between the first conductive layer and the second conductive layer. In the piezoelectric electronic device, the first conductor layer has a first electrode composed of a plurality of linear conductors parallel to each other, and the second conductor layer is parallel to each other and in a direction parallel to the piezoelectric layer. A second electrode composed of a plurality of linear conductors arranged in parallel between the adjacent linear conductors of the first electrode corresponding to the linear conductors of the first electrode; A multilayer piezoelectric electronic device comprising: a first connection conductor that connects conductors; and a second connection conductor that connects linear conductors of the second electrode. 【請求項２】 前記第１電極及び第２電極の直線状導体
の一端はそれぞれデバイスの異なる表面に露出し、 前記第１接続導体は第１電極の直線状導体が露出した面
に形成された第１外部電極からなり、 前記第２接続導体は第２電極の直線状導体が露出した面
に形成された第２外部電極からなることを特徴とする請
求項１記載の積層型圧電体電子デバイス。2. One end of each of the linear conductors of the first electrode and the second electrode is exposed on a different surface of the device, and the first connection conductor is formed on a surface where the linear conductor of the first electrode is exposed. 2. The multilayer piezoelectric electronic device according to claim 1, wherein the second connection conductor comprises a second external electrode formed on a surface where the linear conductor of the second electrode is exposed. 3. . 【請求項３】 前記第１接続導体と第２接続導体は少な
くともその一部がデバイスの表面に露出するように前記
導体層に形成されていると共に、 デバイス表面に形成され前記第１接続導体同士を接続す
る第１外部電極と、 デバイス表面に形成され前記第２接続導体同士を接続す
る第２外部電極とを備えていることを特徴とする請求項
１記載の積層型圧電体電子デバイス。3. The first connection conductor and the second connection conductor are formed on the conductor layer such that at least a part of the first connection conductor is exposed on a surface of the device, and the first connection conductors are formed on a device surface. 2. The multilayer piezoelectric electronic device according to claim 1, further comprising: a first external electrode connecting the first and second connection conductors; and a second external electrode formed on the device surface and connecting the second connection conductors. 【請求項４】 積層方向に平行で且つ前記直線状導体に
平行な異なる２つのデバイス表面に前記直線状導体に対
向するように第３の外部電極と第４の外部電極が形成さ
れていることを特徴とする請求項１乃至３の何れかに記
載の積層型圧電体電子デバイス。4. A third external electrode and a fourth external electrode are formed on two different device surfaces parallel to the laminating direction and parallel to the linear conductor so as to face the linear conductor. The multilayer piezoelectric electronic device according to claim 1, wherein: 【請求項５】 第１導体層と第２導体層との間に圧電体
層を挟むように、該第１導体層と第２導体層と圧電体層
とを交互に複数積層してなる単位積層体を２つ以上積層
してなる積層型圧電体電子デバイスであって、 前記単位積層体において、 前記第１導体層は互いに平行な複数の直線状導体からな
る第１電極を有し、 前記第２導体層は互いに平行で且つ前記前記圧電体層に
平行な方向において前記第１電極の隣り合う直線状導体
の間に第１電極の直線状導体に対応して平行に配置され
た複数の直線状導体からなる第２電極を有し、 前記第１電極の直線状導体同士を接続する第１接続導体
と、 前記第２電極の直線状導体同士を接続する第２接続導体
とを備え、 異なる単位積層体の直線状導体が互いに平行になるよう
に前記単位積層体が積層されていることを特徴とする積
層型圧電体電子デバイス。5. A unit formed by alternately stacking a plurality of first conductor layers, second conductor layers, and piezoelectric layers such that a piezoelectric layer is sandwiched between the first conductor layers and the second conductor layers. A multilayer piezoelectric electronic device in which two or more multilayer bodies are stacked, wherein in the unit multilayer body, the first conductor layer has a first electrode including a plurality of linear conductors parallel to each other; A plurality of second conductor layers are arranged between the linear conductors adjacent to the first electrode in a direction parallel to each other and in a direction parallel to the piezoelectric layer, corresponding to the linear conductor of the first electrode. It has a 2nd electrode which consists of a linear conductor, It has the 1st connection conductor which connects the linear conductors of the 1st electrode, and the 2nd connection conductor which connects the linear conductors of the 2nd electrode, The unit laminates are stacked such that the linear conductors of different unit laminates are parallel to each other. A laminated piezoelectric electronic device, comprising: 【請求項６】 前記第１電極及び第２電極の直線状導体
の一端はそれぞれデバイスの異なる表面に露出し、 前記単位積層体において、 前記第１接続導体は第１電極の直線状導体が露出した面
に形成された第１外部電極からなり、 前記第２接続導体は第２電極の直線状導体が露出した面
に形成された第２外部電極からなり、 各単位積層体の第１外部電極及び第２外部電極はそれぞ
れ異なる位置に形成されていることを特徴とする請求項
５記載の積層型圧電体電子デバイス。6. One end of each of the linear conductors of the first electrode and the second electrode is exposed to a different surface of the device, and in the unit laminate, the first connection conductor is an exposed linear conductor of the first electrode. A second external conductor formed on a surface where the linear conductor of the second electrode is exposed, and a first external electrode of each unit laminated body. 6. The multilayer piezoelectric electronic device according to claim 5, wherein the second external electrode and the second external electrode are formed at different positions. 【請求項７】 前記第１接続導体と第２接続導体は少な
くともその一部がデバイスの表面に露出するように前記
導体層に形成されていると共に、 デバイス表面に形成され同一の単位積層体に含まれる前
記第１接続導体同士を接続する第１外部電極と、 デバイス表面に形成され同一の単位積層体に含まれる前
記第２接続導体同士を接続する第２外部電極とを備え、 各単位積層体の外部電極はそれぞれ異なる位置に形成さ
れていることを特徴とする請求項５記載の積層型圧電体
電子デバイス。7. The first connection conductor and the second connection conductor are formed on the conductor layer so that at least a part thereof is exposed on the surface of the device, and are formed on the device surface to form the same unit laminate. A first external electrode for connecting the first connection conductors included therein, and a second external electrode for connecting the second connection conductors included in the same unit laminate formed on the device surface and connecting to each other; 6. The multilayer piezoelectric electronic device according to claim 5, wherein the external electrodes of the body are formed at different positions. 【請求項８】 ２つの第１単位積層体で第２単位積層体
を挟むように該第１単位積層体と第２単位積層体を積層
してなる積層型圧電体電子デバイスであって、 前記第１単位積層体は、第１導体層と第２導体層との間
に圧電体層を挟むように該第１導体層と第２導体層と圧
電体層とを交互に複数積層してなり、 前記第１導体層は互いに平行な複数の直線状導体からな
る第１電極を有し、 前記第２導体層は互いに平行で且つ前記前記圧電体層に
平行な方向において前記第１電極の隣り合う直線状導体
の間に第１電極の直線状導体に対応して平行に配置され
た複数の直線状導体からなる第２電極を有し、 前記第２単位積層体は、第３導体層と圧電体層とを交互
に複数積層してなり、 前記第３導体層は、互いに平行で且つ前記第１電極の直
線状導体と平行な位置に形成された直線状導体からなる
第３電極及び第４電極とを有し、 前記第１電極の直線状導体同士を接続する第１接続導体
と、 前記第２電極の直線状導体同士を接続する第２接続導体
と、 前記第３電極の直線状導体同士を接続する第３接続導体
と、 前記第４電極の直線状導体同士を接続する第４接続導体
とを備えていることを特徴とする積層型圧電体電子デバ
イス。8. A multi-layer piezoelectric electronic device comprising: a first unit laminate and a second unit laminate laminated to sandwich a second unit laminate between two first unit laminates; The first unit laminated body is formed by alternately laminating the first conductor layer, the second conductor layer, and the piezoelectric layer such that the piezoelectric layer is interposed between the first conductor layer and the second conductor layer. The first conductor layer has a first electrode formed of a plurality of linear conductors parallel to each other, and the second conductor layer is adjacent to the first electrode in a direction parallel to each other and parallel to the piezoelectric layer. A second electrode formed of a plurality of linear conductors disposed in parallel between the corresponding linear conductors corresponding to the linear conductors of the first electrode, wherein the second unit laminate includes a third conductor layer; A plurality of piezoelectric layers are alternately laminated, and the third conductor layers are parallel to each other and are linear conductors of the first electrode. A first connection conductor that connects the linear conductors of the first electrode to each other, and has a third electrode and a fourth electrode that are linear conductors formed at parallel positions, and a linear conductor of the second electrode A second connection conductor that connects them, a third connection conductor that connects the linear conductors of the third electrode, and a fourth connection conductor that connects the linear conductors of the fourth electrode. A multilayer piezoelectric electronic device comprising: 【請求項９】 前記第１電極及び第２電極の直線状導体
の一端がそれぞれデバイスの異なる表面に露出すると共
に前記第３電極及び第４電極は少なくとも一部がデバイ
スの表面に露出し、 前記第１接続導体は第１電極の直線状導体が露出した面
に形成された第１外部電極からなり、 前記第２接続導体は第２電極の直線状導体が露出した面
に形成された第２外部電極からなり、 前記第３接続導体は第３電極が露出した面に形成された
第３外部電極からなり、 前記第４接続導体は第４電極が露出した面に形成された
第４外部電極からなることを特徴とする請求項８記載の
積層型圧電体電子デバイス。9. One end of each of the linear conductors of the first electrode and the second electrode is exposed on a different surface of the device, and the third electrode and the fourth electrode are at least partially exposed on the surface of the device. The first connection conductor includes a first external electrode formed on a surface of the first electrode where the linear conductor is exposed, and the second connection conductor includes a second external electrode formed on a surface of the second electrode where the linear conductor is exposed. An external electrode; wherein the third connection conductor comprises a third external electrode formed on a surface where the third electrode is exposed; and wherein the fourth connection conductor comprises a fourth external electrode formed on a surface where the fourth electrode is exposed. 9. The multilayer piezoelectric electronic device according to claim 8, comprising: 【請求項１０】 前記第１接続導体と第２接続導体は少
なくともその一部がデバイスの表面に露出するように前
記導体層に形成されていると共に前記第３電極及び第４
電極は少なくとも一部がデバイスの表面に露出し、 デバイス表面に形成され前記第１接続導体同士を接続す
る第１外部電極と、 デバイス表面に形成され前記第２接続導体同士を接続す
る第２外部電極とを備え、 前記第３接続導体は第３電極が露出した面に形成された
第３外部電極からなり、 前記第４接続導体は第４電極が露出した面に形成された
第４外部電極からなることを特徴とする請求項８記載の
積層型圧電体電子デバイス。10. The first connection conductor and the second connection conductor are formed on the conductor layer such that at least a part thereof is exposed on the surface of the device, and the third electrode and the fourth connection conductor are formed.
At least a portion of the electrode is exposed on the surface of the device, and a first external electrode formed on the device surface and connecting the first connection conductors, and a second external electrode formed on the device surface and connecting the second connection conductors An electrode, wherein the third connection conductor comprises a third external electrode formed on the surface where the third electrode is exposed, and the fourth connection conductor is a fourth external electrode formed on the surface where the fourth electrode is exposed 9. The multilayer piezoelectric electronic device according to claim 8, comprising: 【請求項１１】 第１導体層と第２導体層との間に圧電
体層を挟むように、第１導体層と第２導体層と圧電体層
とを交互に複数積層してなる積層型圧電体電子デバイス
であって、 前記第１導体層は、互いに平行な複数の直線状導体から
なる第１電極と、互いに平行で且つ第１電極の直線状導
体に平行な複数の直線状導体からなる第３電極とを有
し、 前記第２導体層は、互いに平行で且つ前記前記圧電体層
に平行な方向において前記第１電極の隣り合う直線状導
体の間に第１電極の直線状導体に対応して平行に配置さ
れた複数の直線状導体からなる第２電極と、第２電極の
直線状導体に平行で且つ前記前記圧電体層に平行な方向
において前記第３電極の隣り合う直線状導体の間に第３
電極の直線状導体に対応して平行に配置された複数の直
線状導体からなる第４電極とを有し、 前記第１電極の直線状導体同士を接続する第１接続導体
と、 前記第２電極の直線状導体同士を接続する第２接続導体
と、 前記第３電極の直線状導体同士を接続する第３接続導体
と、 前記第４電極の直線状導体同士を接続する第４接続導体
とを備えていることを特徴とする積層型圧電体電子デバ
イス。11. A laminated type comprising a plurality of first conductor layers, second conductor layers, and piezoelectric layers alternately laminated such that a piezoelectric layer is sandwiched between the first conductor layers and the second conductor layers. In the piezoelectric electronic device, the first conductor layer includes a first electrode formed of a plurality of linear conductors parallel to each other and a plurality of linear conductors parallel to each other and parallel to the linear conductor of the first electrode. The second conductor layer is a linear conductor of the first electrode between linear conductors adjacent to the first electrode in a direction parallel to each other and in a direction parallel to the piezoelectric layer. A second electrode composed of a plurality of linear conductors arranged in parallel with each other, and a straight line adjacent to the third electrode in a direction parallel to the linear conductor of the second electrode and parallel to the piezoelectric layer. Third between conductors
A fourth electrode comprising a plurality of linear conductors arranged in parallel corresponding to the linear conductors of the electrodes, a first connection conductor connecting the linear conductors of the first electrode, and a second connection conductor; A second connection conductor that connects the linear conductors of the electrodes, a third connection conductor that connects the linear conductors of the third electrode, and a fourth connection conductor that connects the linear conductors of the fourth electrode A multilayer piezoelectric electronic device comprising: 【請求項１２】 前記第１電極及び第２電極の直線状導
体の一端はそれぞれデバイスの異なる表面に露出すると
共に前記第１電極及び第２電極の直線状導体の一端はそ
れぞれデバイスの異なる表面に露出し、 前記第１接続導体は第１電極の直線状導体が露出した面
に形成された第１外部電極からなり、 前記第２接続導体は第２電極の直線状導体が露出した面
に形成された第２外部電極からなり、 前記第３接続導体は第３電極の直線状導体が露出した面
に形成された第３外部電極からなり、 前記第４接続導体は第４電極の直線状導体が露出した面
に形成された第４外部電極からなることを特徴とする請
求項１１記載の積層型圧電体電子デバイス。12. One end of each of the linear conductors of the first electrode and the second electrode is exposed to a different surface of the device, and one end of the linear conductor of the first electrode and the second electrode is respectively connected to a different surface of the device. The first connection conductor is exposed, and the first connection conductor comprises a first external electrode formed on a surface of the first electrode where the linear conductor is exposed, and the second connection conductor is formed on a surface of the second electrode where the linear conductor is exposed. Wherein the third connection conductor comprises a third external electrode formed on a surface of the third electrode where the linear conductor is exposed, and wherein the fourth connection conductor comprises a fourth electrode linear conductor. 12. The multilayer piezoelectric electronic device according to claim 11, comprising a fourth external electrode formed on the exposed surface. 【請求項１３】 前記第１乃至第４接続導体のそれぞれ
は少なくともその一部がデバイスの表面に露出するよう
に前記導体層に形成されていると共に、 デバイス表面に形成され前記第１接続導体同士を接続す
る第１外部電極と、 デバイス表面に形成され前記第２接続導体同士を接続す
る第２外部電極と、 デバイス表面に形成され前記第３接続導体同士を接続す
る第３外部電極と、 デバイス表面に形成され前記第４接続導体同士を接続す
る第４外部電極とを備えていることを特徴とする請求項
１１記載の積層型圧電体電子デバイス。13. Each of the first to fourth connection conductors is formed on the conductor layer so that at least a part thereof is exposed on the surface of the device, and the first connection conductors formed on the device surface are separated from each other. A first external electrode formed on the device surface and connecting the second connection conductors to each other; a third external electrode formed on the device surface and connected to the third connection conductors; The multilayer piezoelectric electronic device according to claim 11, further comprising: a fourth external electrode formed on a surface and connecting the fourth connection conductors to each other. 【請求項１４】 前記第１接続導体と第２接続導体は前
記導体層に形成され、 各第１導体層では第１電極の少なくとも一の直線状導体
の一端及び第３電極の少なくとも一の直線状導体の一端
が一方のデバイス表面に露出し、 各第２導体層では第２電極の少なくとも一の直線状導体
の一端及び第４電極の少なくとも一の直線状導体の一端
が他方のデバイス表面に露出し、 デバイス表面に形成され前記第１電極の露出した直線線
上導体同士を接続する第１外部電極と、 デバイス表面に形成され前記第２電極の露出した直線線
上導体同士を接続する第２外部電極と、 デバイス表面に形成され前記第３電極の露出した直線線
上導体同士を接続する第３外部電極と、 デバイス表面に形成され前記第４電極の露出した直線線
上導体同士を接続する第４外部電極とを備えていること
を特徴とする請求項１１記載の積層型圧電体電子デバイ
ス。14. The first connection conductor and the second connection conductor are formed on the conductor layer, and each first conductor layer has one end of at least one straight conductor of the first electrode and at least one straight line of the third electrode. One end of the conductor is exposed on one device surface, and in each second conductor layer, one end of at least one linear conductor of the second electrode and one end of at least one linear conductor of the fourth electrode are on the other device surface. A first external electrode formed on the device surface and connecting the exposed linear conductors of the first electrode, and a second external electrode formed on the device surface and connecting the exposed linear conductors of the second electrode. An electrode, a third external electrode formed on the device surface and connecting the exposed linear conductors of the third electrode, and a fourth outer electrode formed on the device surface and connecting the exposed linear conductors of the fourth electrode. 12. The multilayer piezoelectric electronic device according to claim 11, further comprising: an external electrode. 【請求項１５】 前記直線状導体は、前記第１電極と第
２電極との間に交流電圧を印加したときに生じる振動の
ノード点近傍位置においてデバイス表面に露出している
ことを特徴とする請求項１４記載の積層型圧電体電子デ
バイス。15. The device according to claim 15, wherein the linear conductor is exposed on a device surface at a position near a node point of vibration generated when an AC voltage is applied between the first electrode and the second electrode. The multilayer piezoelectric electronic device according to claim 14. 【請求項１６】 前記第１接続導体と第２接続導体は前
記導体層に形成され且つ第１接続導体と第２接続導体が
積層方向に重ならない位置に形成されていることを特徴
とする請求項１１、１３、１４または１５記載の積層型
圧電体電子デバイス。16. The semiconductor device according to claim 16, wherein the first connection conductor and the second connection conductor are formed on the conductor layer, and are formed at positions where the first connection conductor and the second connection conductor do not overlap in the stacking direction. Item 18. The multilayer piezoelectric electronic device according to Item 11, 13, 14, or 15. 【請求項１７】 前記第３接続導体と第４接続導体は前
記導体層に形成され且つ第３接続導体と第４接続導体が
積層方向に重ならない位置に形成されていることを特徴
とする請求項１１、１３、１４、１５または１６記載の
積層型圧電体電子デバイス。17. The semiconductor device according to claim 17, wherein the third connection conductor and the fourth connection conductor are formed on the conductor layer, and are formed at positions where the third connection conductor and the fourth connection conductor do not overlap in the stacking direction. Item 13. The multilayer piezoelectric electronic device according to Item 11, 13, 14, 15, or 16. 【請求項１８】 前記接続導体は、前記第１電極と第２
電極との間に交流電圧を印加したときに生じる振動のノ
ード点近傍位置においてデバイス表面に露出しているこ
とを特徴とする請求項３、７、１０または１３記載の積
層型圧電体電子デバイス。18. The method according to claim 18, wherein the connection conductor comprises a first electrode and a second electrode.
14. The multilayer piezoelectric electronic device according to claim 3, 7, 10 or 13, wherein the device is exposed on the device surface at a position near a node point of vibration generated when an AC voltage is applied between the electrode and the electrode. 【請求項１９】 前記第１電極の直線状導体と前記第２
電極の直線状導体との間の前記圧電体層に平行な方向の
距離が、前記第１電極の隣接する直線状導体間の距離の
約１／２に設定されていることを特徴とする請求項１乃
至１８の何れかに記載の積層型圧電体電子デバイス。19. The linear conductor of the first electrode and the second conductor
The distance between the electrode and the linear conductor in the direction parallel to the piezoelectric layer is set to about １ ／ of the distance between the adjacent linear conductors of the first electrode. Item 19. The multilayer piezoelectric electronic device according to any one of Items 1 to 18. 【請求項２０】 前記第１電極及び前記第２電極の同一
層内における隣接する直線状導体間の距離が、前記圧電
体層の厚み方向における前記第１電極と第２電極との間
の距離よりも大きく設定されていることを特徴とする請
求項１乃至１８の何れかに記載の積層型圧電体電子デバ
イス。20. A distance between adjacent linear conductors in the same layer of the first electrode and the second electrode is a distance between the first electrode and the second electrode in a thickness direction of the piezoelectric layer. 19. The multi-layer piezoelectric electronic device according to claim 1, wherein the multi-layer piezoelectric electronic device is set to a larger value. 【請求項２１】 前記第１電極と第２電極との間に交流
電圧を印加したときの前記圧電体層の分極方向と振動方
向とのなす角度が０度よりも大きく４５度よりも小さい
角度になるように前記第１電極及び第２電極が配置され
ていることを特徴とする請求項１乃至１８の何れかに記
載の積層型圧電体電子デバイス。21. An angle between a polarization direction and a vibration direction of the piezoelectric layer when an AC voltage is applied between the first electrode and the second electrode is greater than 0 degree and smaller than 45 degrees. 19. The multilayer piezoelectric electronic device according to claim 1, wherein the first electrode and the second electrode are arranged such that: 【請求項２２】 前記第１電極の一の直線状導体と該直
線状導体に最も近い位置に形成されている第２電極の直
線状導体の双方に対して直角に交わる直線の方向と、前
記第１電極と第２電極との間に交流電圧を印加したとき
の前記圧電体層の振動方向とのなす角度が、０度よりも
大きく４５度よりも小さい角度になるように前記第１電
極及び第２電極が配置されていることを特徴とする請求
項１乃至１８の何れかに記載の積層型圧電体電子デバイ
ス。22. The direction of a straight line that intersects at right angles to both the one linear conductor of the first electrode and the linear conductor of the second electrode formed closest to the linear conductor; The first electrode is formed such that an angle between the piezoelectric layer and the vibration direction of the piezoelectric layer when an AC voltage is applied between the first electrode and the second electrode is larger than 0 degree and smaller than 45 degrees. 19. The multilayer piezoelectric electronic device according to claim 1, wherein a second electrode is disposed.
JP11099367A 1999-04-06 1999-04-06 Laminated piezoelectric electronic device Withdrawn JP2000294851A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014501038A (en) * 2010-11-15 2014-01-16 エプコス アクチエンゲゼルシャフト Piezoelectric element
KR20150032063A (en) * 2013-09-17 2015-03-25 삼성전자주식회사 Piezoelectric device and method of manufacturing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014501038A (en) * 2010-11-15 2014-01-16 エプコス アクチエンゲゼルシャフト Piezoelectric element
US9379308B2 (en) 2010-11-15 2016-06-28 Epcos Ag Piezoelectric component
KR20150032063A (en) * 2013-09-17 2015-03-25 삼성전자주식회사 Piezoelectric device and method of manufacturing the same

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