JP2000294492A - Clean room, charged particle beam apparatus and method for installing the same in clean room - Google Patents
Clean room, charged particle beam apparatus and method for installing the same in clean roomInfo
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- JP2000294492A JP2000294492A JP11100011A JP10001199A JP2000294492A JP 2000294492 A JP2000294492 A JP 2000294492A JP 11100011 A JP11100011 A JP 11100011A JP 10001199 A JP10001199 A JP 10001199A JP 2000294492 A JP2000294492 A JP 2000294492A
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- partition
- sample
- charged particle
- particle beam
- clean room
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、クリーンルーム、
クリーンルームに設置される電子線描画装置、集束イオ
ンビーム装置、走査電子顕微鏡等、電子線やイオンビー
ム等の荷電粒子線を利用して描画、加工、観察、測定検
査等を行う荷電粒子線装置、及びクリーンルームへの荷
電粒子線装置設置方法に関する。TECHNICAL FIELD The present invention relates to a clean room,
Electron beam lithography system installed in clean room, focused ion beam system, scanning electron microscope, etc., charged particle beam system that performs drawing, processing, observation, measurement inspection, etc. using charged particle beam such as electron beam or ion beam, And a method of installing a charged particle beam device in a clean room.
【０００２】[0002]
【従来の技術】半導体ウエハに微細な回路パターンを形
成する半導体装置等の製造プロセスでは、歩留まり向上
のために塵埃の発生を防止すること及び半導体ウエハ等
への塵埃の付着を極力回避することが必須である。その
ために、電子線描画装置、集束イオンビーム装置、走査
電子顕微鏡など、半導体製造プロセスで使用される荷電
粒子線装置はクリーンルーム内に設置され、これらの荷
電粒子線装置を用いた処理や検査は清浄空間内で行われ
る。2. Description of the Related Art In a process of manufacturing a semiconductor device or the like for forming a fine circuit pattern on a semiconductor wafer, it is necessary to prevent the generation of dust in order to improve the yield and to minimize the attachment of dust to the semiconductor wafer or the like. Required. For this purpose, charged particle beam devices used in semiconductor manufacturing processes, such as electron beam lithography devices, focused ion beam devices, and scanning electron microscopes, are installed in clean rooms, and processing and inspection using these charged particle beam devices are clean. It takes place in space.
【０００３】図９は、従来のクリーンルームを示す平面
模式図である。クリーンルーム１００は隔壁１０１によ
って外界と区画され、クリーンルーム１００の内部には
空気清浄機１０７によって高度に清浄化され、また温度
及び湿度が一定に調整された空気が循環するようになっ
ている。また、クリーンルーム１００には、装置類の搬
入、搬出や作業員の出入りのために使用される出入り口
１０２，１０３が設けられている。出入り口１０２，１
０３はそれぞれ二重の扉１０２ａ，１０３ａを備えてい
る。クリーンルーム内に設置される荷電粒子線装置をは
じめとするプロセス処理装置１０５ａ〜１０５ｆはこの
出入り口１０２，１０３を通して搬入あるいは搬出され
る。FIG. 9 is a schematic plan view showing a conventional clean room. The clean room 100 is partitioned from the outside world by a partition 101, and inside the clean room 100, air which is highly purified by an air purifier 107 and whose temperature and humidity are adjusted to be constant is circulated. Further, the clean room 100 is provided with entrances 102 and 103 used for carrying in and carrying out devices and for entering and exiting workers. Doorway 102,1
03 has double doors 102a and 103a, respectively. Process processing devices 105a to 105f such as charged particle beam devices installed in the clean room are carried in or carried out through the entrances 102 and 103.
【０００４】[0004]
【発明が解決しようとする課題】上記のように従来は、
荷電粒子線装置をクリーンルームの清浄空間内に設置す
る場合、装置全体を清浄空間内に搬入するため、荷電粒
子線装置の搬入時に清浄空間が一時的に清浄空間外の大
気気にさらされることになる。また、大型の荷電粒子線
装置を搬入する場合、配置によっては時間がかかり、そ
の間は装置の移動により清浄空間内に塵埃が発生するた
め、その周囲では本来の清浄空間内作業を行うことがで
きない。荷電粒子線装置のメンテナンスのために大きな
部品の交換などを行う時も同様の不具合がある。また、
通常使用時も荷電粒子線装置から発生する塵埃が清浄空
間内に拡散する可能性がある。As described above, conventionally,
When the charged particle beam device is installed in the clean space of a clean room, the clean space is temporarily exposed to the atmosphere outside the clean space when the charged particle beam device is carried in because the entire device is carried into the clean space. Become. In addition, when a large charged particle beam device is carried in, it takes time depending on the arrangement, and during that time, the movement of the device generates dust in the clean space, so that the work in the original clean space cannot be performed around it. . A similar problem occurs when replacing a large part for maintenance of the charged particle beam apparatus. Also,
Even during normal use, dust generated from the charged particle beam device may diffuse into the clean space.
【０００５】本発明は、このような従来技術の問題点に
鑑み、クリーンルームへの設置時や装置のメンテナンス
時、あるいは装置動作時に清浄空間の汚染を抑制するこ
とのできるクリーンルーム、荷電粒子線装置、及びクリ
ーンルームへの荷電粒子線装置設置方法を提供すること
を目的とする。The present invention has been made in view of the above-mentioned problems of the prior art, and is directed to a clean room, a charged particle beam apparatus capable of suppressing contamination of a clean space during installation in a clean room, maintenance of the apparatus, or operation of the apparatus. Another object of the present invention is to provide a method for installing a charged particle beam device in a clean room.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明によるクリーンルームは、清浄空間を外部空
間から隔てる隔壁を備え、隔壁に、本体が外部空間側に
配設される荷電粒子線装置に対する試料出入り口となる
開口部が設けられていることを特徴とする。本発明によ
るクリーンルームは、また、清浄空間を外部空間から隔
てる隔壁を備え、隔壁の一部が取り外し可能な可動壁で
構成されたクリーンルームであって、可動壁を取り外し
てできる隔壁の開口部に、試料出入り口となる小開口部
を有し荷電粒子線装置と一体化された可動壁と同寸の装
置側隔壁を、荷電粒子線装置の本体が外部空間側に位置
するようにしてはめ込むことが可能なことを特徴とす
る。前記クリーンルームの隔壁は、隔壁の内外を電気的
に接続する電気連結部を備えることが望ましい。In order to achieve the above object, a clean room according to the present invention comprises a partition for separating a clean space from an external space, and the partition has a charged particle beam whose main body is disposed on the external space side. An opening which serves as a sample entrance / exit to the apparatus is provided. The clean room according to the present invention also includes a partition for separating the clean space from the external space, and is a clean room in which a part of the partition is constituted by a movable wall that can be removed. It is possible to fit a device-side partition that has a small opening serving as a sample entrance and exit and has the same dimensions as the movable wall integrated with the charged particle beam device so that the main body of the charged particle beam device is located in the external space side It is characterized by the following. It is preferable that the partition of the clean room includes an electrical connection part for electrically connecting the inside and the outside of the partition.
【０００７】このような構造を有するクリーンルームに
設置される本発明の荷電粒子線装置は、装置本体が清浄
空間外に置かれ、清浄空間を密閉する隔壁に対して、清
浄空間を保ったまま試料を受け渡しすることができるよ
う、試料搬送機構の入り口が隔壁に連結できる構造を有
する。 すなわち、本発明による荷電粒子線装置は、真
空排気される試料室と、試料室内に配置された試料に荷
電粒子線を照射する手段と、試料を搬送するための試料
搬送手段とを含む荷電粒子線装置において、試料搬送手
段による試料搬送経路のうち大気に露出している経路の
周囲を気密に包囲する包囲手段を備え、包囲手段の開放
部はクリーンルームの清浄空間を外部空間と隔てる隔壁
に設けられた開口部に連結可能であることを特徴とす
る。In the charged particle beam apparatus according to the present invention, which is installed in a clean room having such a structure, the main body of the apparatus is placed outside the clean space, and the sample is kept while keeping the clean space against the partition wall that seals the clean space. It has a structure that the entrance of the sample transport mechanism can be connected to the partition so that the sample can be transferred. That is, the charged particle beam apparatus according to the present invention is a charged particle beam including a sample chamber to be evacuated, means for irradiating the sample placed in the sample chamber with the charged particle beam, and sample transport means for transporting the sample. In the X-ray apparatus, there is provided a surrounding means for hermetically surrounding a path exposed to the atmosphere in a sample carrying path by the sample carrying means, and an open part of the surrounding means is provided on a partition separating a clean space of a clean room from an external space. It can be connected to the opening provided.
【０００８】本発明による荷電粒子線装置は、また、真
空排気される試料室と、試料室内に配置された試料に荷
電粒子線を照射する手段と、試料を搬送するための試料
搬送手段と、装置に対して手動操作を行うための入力手
段と、装置の状態を表示する出力手段とを含み、清浄空
間と外部空間とを隔離する隔壁を備えるクリーンルーム
に設置された荷電粒子線装置において、試料室、荷電粒
子線照射手段及び試料搬送手段は隔壁の外部空間側に配
置され、入力手段及び出力手段は隔壁の清浄空間側に配
置され、試料は隔壁に設けられた開口部を通して清浄空
間側から供給されることを特徴とする。[0008] The charged particle beam apparatus according to the present invention also includes a sample chamber to be evacuated, means for irradiating the sample placed in the sample chamber with a charged particle beam, sample transport means for transporting the sample, In a charged particle beam apparatus installed in a clean room including an input unit for performing a manual operation on the apparatus and an output unit for displaying a state of the apparatus, and having a partition for separating a clean space and an external space, The chamber, the charged particle beam irradiation means and the sample transport means are arranged on the outer space side of the partition, the input means and the output means are arranged on the clean space side of the partition, and the sample is passed from the clean space side through an opening provided in the partition. It is characterized by being supplied.
【０００９】本発明によるクリーンルームへの荷電粒子
線装置設置方法は、清浄空間を外部空間から隔てる隔壁
を備えるクリーンルームに、真空排気される試料室と、
試料室内に配置された試料に荷電粒子線を照射する手段
と、試料を搬送するための試料搬送手段とを備える荷電
粒子線装置を設置するための方法において、試料室、荷
電粒子線照射手段及び試料搬送手段を隔壁の外部空間側
に配置し、試料搬送手段による試料搬送経路のうち大気
に露出している経路の周囲を包囲手段によって気密に包
囲し、隔壁に試料を出し入れするための開口を設け、包
囲手段の開放部を隔壁に設けた開口部に連結することを
特徴とする。A method for installing a charged particle beam apparatus in a clean room according to the present invention includes the steps of: providing a sample room to be evacuated to a clean room having a partition separating a clean space from an external space;
Means for irradiating a charged particle beam to a sample disposed in the sample chamber, and a method for installing a charged particle beam apparatus including a sample transporting means for transporting the sample, the sample chamber, charged particle beam irradiating means and The sample transporting means is arranged on the outer space side of the partition, and the periphery of the sample transporting path of the sample transporting means, which is exposed to the atmosphere, is hermetically surrounded by the surrounding means, and an opening for taking a sample in and out of the partition is provided. And the opening of the surrounding means is connected to the opening provided in the partition.
【００１０】包囲手段の開放部と隔壁に設けた前記開口
部との連結は適度なばね弾性と粘性減衰性をもつ可撓性
部材によって行うことが好ましい。荷電粒子線装置が表
示手段を備えている場合には、隔壁に透明部を設け、荷
電粒子線装置の表示手段を隔壁の外部空間側に透明部に
正対して配置することができる。It is preferable that the connection between the opening of the surrounding means and the opening provided in the partition is made by a flexible member having appropriate spring elasticity and viscous damping. In the case where the charged particle beam device includes the display means, the partition may be provided with a transparent portion, and the display means of the charged particle beam device may be arranged on the outer space side of the partition so as to face the transparent portion.
【００１１】また、荷電粒子線装置が荷電粒子線装置に
対して手動操作を行うための入力手段及び／又は荷電粒
子線装置の状態を表示する出力手段を備えている場合に
は、その入力手段や出力手段を隔壁の清浄空間側に配置
することができる。これらの入力手段や出力手段は、隔
壁に設けられた電気接続部を介して外部空間側に配置さ
れた荷電粒子線装置と電気的に接続される。When the charged particle beam device is provided with input means for manually operating the charged particle beam device and / or output means for displaying the state of the charged particle beam device, the input means is provided. And the output means can be arranged on the clean space side of the partition. These input means and output means are electrically connected to a charged particle beam device arranged on the external space side via an electric connection portion provided on the partition.
【００１２】本発明によるクリーンルームへの荷電粒子
線装置設置方法は、また、清浄空間を外部空間から隔て
る隔壁を備えるクリーンルームに荷電粒子線装置を設置
するための方法において、隔壁の一部を取り外し可能な
可動壁で構成し、試料出入り口となる小開口部を有し可
動壁と同寸の装置側隔壁に荷電粒子線装置を固定し、可
動壁を取り外してできた隔壁の開口部に装置側隔壁を、
荷電粒子線装置の本体が外部空間側に位置するようにし
てはめ込むことで設置することを特徴とする。The method for installing a charged particle beam apparatus in a clean room according to the present invention is also directed to a method for installing a charged particle beam apparatus in a clean room having a partition separating a clean space from an external space, wherein a part of the partition can be removed. The charged particle beam device is fixed to the device-side partition having the same size as the movable wall, and the device-side partition is provided at the opening of the partition obtained by removing the movable wall. To
The charged particle beam device is installed by being fitted so that the main body of the device is located on the outer space side.
【００１３】[0013]
【発明の実施の形態】以下、図面を参照して本発明の実
施の形態を説明する。図１は、荷電粒子線装置の一例を
示す概略説明図である。電子源やイオン源等の荷電粒子
源１より放出された荷電粒子線２は、対物レンズ３によ
り集束されて可動な試料ステージ５に保持された試料４
上に照射される。荷電粒子線照射によって試料４から発
生した二次電子等の試料信号８は検出器９により検知さ
れ、その検出信号に基づいて表示装置１０の画面１１上
に試料像が表示される。真空排気された試料室６にはバ
ルブ１６を介して中間室７が接続されており、試料４は
搬送機構２６によって真空外から中間室７を介して試料
室６内に搬送される。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic explanatory view showing an example of a charged particle beam device. A charged particle beam 2 emitted from a charged particle source 1 such as an electron source or an ion source is focused by an objective lens 3 and held on a movable sample stage 5 by a sample 4.
Irradiated on top. A sample signal 8 such as secondary electrons generated from the sample 4 by the charged particle beam irradiation is detected by a detector 9, and a sample image is displayed on a screen 11 of a display device 10 based on the detected signal. An intermediate chamber 7 is connected to the evacuated sample chamber 6 via a valve 16, and the sample 4 is transported from outside the vacuum into the sample chamber 6 via the intermediate chamber 7 by a transport mechanism 26.
【００１４】図１には試料から発生した二次電子等の試
料信号による試料像を表示する荷電粒子線装置を示した
が、本発明の対象となる荷電粒子線装置には、試料信号
によって試料像を表示することなく、信号処理のみを行
う荷電粒子線装置もあるし、特に試料信号を検出しない
荷電粒子線装置もある。また、荷電粒子線装置を手動で
操作する必要がある場合には、つまみを備えたコンソー
ル１２、キーボード１３、マウス１４などの入力装置を
備えることがあるし、正常稼働状態、異常停止状態、待
機状態などの装置状態を表示する必要がある場合には表
示灯３１などの出力装置を備えることがある。FIG. 1 shows a charged particle beam apparatus for displaying a sample image based on a sample signal such as secondary electrons generated from the sample. The charged particle beam apparatus to which the present invention is applied includes a sample signal based on the sample signal. Some charged particle beam devices perform only signal processing without displaying an image, and some charged particle beam devices do not particularly detect a sample signal. When it is necessary to manually operate the charged particle beam device, an input device such as a console 12 having a knob, a keyboard 13, a mouse 14, and the like may be provided, and a normal operation state, an abnormal stop state, and a standby state may be provided. When it is necessary to display a device state such as a state, an output device such as an indicator light 31 may be provided.
【００１５】図２は、本発明によるクリーンルームの一
例の平面模式図である。このクリーンルーム５０は、隔
壁５１によって外部空間と区画され、クリーンルーム５
０の内部には空気清浄機５７によって高度に清浄化さ
れ、また温度及び湿度が一定に調整された清浄空気が循
環するようになっている。また、クリーンルーム５０に
は、装置類の搬入、搬出や作業員の出入りのために使用
される出入り口５２，５３が設けられている。出入り口
５２，５３はそれぞれ二重の扉５２ａ，５３ａを備えて
いる。そして、出入り口５２，５３や隔壁５１の隙間を
介して外部から塵埃を含んだ空気がクリーンルーム内に
流入することがないように、クリーンルーム５０内は外
部空間に対してわずかに高い圧力に維持されている。FIG. 2 is a schematic plan view of an example of the clean room according to the present invention. The clean room 50 is separated from the external space by a partition wall 51 and the clean room 5
Inside 0, clean air which is highly purified by an air purifier 57 and whose temperature and humidity are adjusted to be constant is circulated. Further, the clean room 50 is provided with entrances 52 and 53 used for carrying in and carrying out devices and for entering and leaving of workers. The entrances 52, 53 are provided with double doors 52a, 53a, respectively. Then, the inside of the clean room 50 is maintained at a slightly higher pressure than the external space so that air containing dust does not flow into the clean room from the outside through the openings 52, 53 and the gap between the partition walls 51. I have.
【００１６】本発明のクリーンルーム５０においては、
クリーンルームに設置される荷電粒子線装置５５ａ，５
５ｂ，５５ｃは、本体をクリーンルーム５０の外部に配
設し、試料受け入れ部のみが隔壁５１に設けられた開口
部（後述する）を介してクリーンルーム内部の清浄空間
と接続される。光露光装置、エッチング装置等、荷電粒
子線装置以外のプロセス処理装置５６ａ，５６ｂ，５６
ｃは、従来と同様に出入り口５２，５３を通して搬入さ
れ、クリーンルーム５０内の清浄空間に設置される。In the clean room 50 of the present invention,
Charged particle beam devices 55a, 5 installed in a clean room
In 5b and 55c, the main body is disposed outside the clean room 50, and only the sample receiving portion is connected to a clean space inside the clean room through an opening (described later) provided in the partition wall 51. Process processing devices 56a, 56b, 56 other than the charged particle beam device, such as a light exposure device and an etching device.
c is carried in through the entrances 52 and 53 in the same manner as in the related art, and is installed in a clean space in the clean room 50.
【００１７】図３は本発明によるクリーンルーム５０の
隔壁５１の構造を説明する概略図であり、図３（ａ）は
隔壁の一部の正面模式図、図３（ｂ）はそのＡＡ断面模
式図である。隔壁５１の一部には開口部６１ａ，６１
ｂ，…が設けられている。また、その開口部６１ａ，６
１ｂ，…と一定の位置関係をもって透明部６２ａ，６２
ｂ，…が設けられ、隔壁５１の内外を電気的に接続する
電気連結部６３ａ，６３ｂ，…が設けられている。開口
部６１ａ，６１ｂ，…は、荷電粒子線装置５５ａ，５５
ｂ，…の試料受け入れ部の位置に対応して設けられてい
る。透明部６２ａ，６２ｂ，…は、隔壁５１のその位置
に開口を設け、透明板をはめ込むことで形成することが
できる。透明部６２ａ，６２ｂ，…は荷電粒子線装置５
５ａ，５５ｂ，…の表示装置の位置に対応して設けら
れ、電気連結部６３ａ，６３ｂ，…は荷電粒子線装置５
５ａ，５５ｂ，…の電気的入出力部に対応して設けられ
ている。FIG. 3 is a schematic view for explaining the structure of the partition wall 51 of the clean room 50 according to the present invention. FIG. 3 (a) is a schematic front view of a part of the partition wall, and FIG. It is. Openings 61a, 61 are provided in a part of the partition wall 51.
b,... are provided. Also, the openings 61a, 6
1b,... With a fixed positional relationship with the transparent portions 62a, 62b.
are provided, and electrical connecting portions 63a, 63b,... for electrically connecting the inside and outside of the partition wall 51 are provided. The openings 61a, 61b, ... are charged particle beam devices 55a, 55
are provided corresponding to the positions of the sample receiving portions b,. The transparent portions 62a, 62b,... Can be formed by providing an opening at the position of the partition wall 51 and fitting a transparent plate. The transparent portions 62a, 62b,...
Are provided corresponding to the positions of the display devices 5a, 55b,..., And the electric connection portions 63a, 63b,.
Are provided corresponding to the electrical input / output units 5a, 55b,.
【００１８】開口部６１ａ，６１ｂ，…は、使用しない
場合、すなわちその外側に荷電粒子線装置を設置しない
場合には蓋をされて封止されている。透明部６２ａ，６
２ｂ，…は、隔壁５１のその位置に開口部を設け、その
外側に荷電粒子線装置を設置する場合には開口部に透明
板をはめ込み、荷電粒子線装置を設置しない場合には開
口部を不透明な板材で閉じるようにしてもよい。なお、
これらの開口部や透明部、電気連結部は必ずしもクリー
ンルーム５０の隔壁５１の全面に設ける必要はなく、隔
壁５１の一部分に設けるだけでもよい。The openings 61a, 61b,... Are closed and sealed when not used, that is, when the charged particle beam device is not installed outside thereof. Transparent parts 62a, 6
2b,... Are provided with an opening at that position of the partition wall 51, and when a charged particle beam device is installed outside the transparent plate, a transparent plate is fitted into the opening. When the charged particle beam device is not installed, the opening is formed. You may make it close with an opaque board material. In addition,
These openings, transparent portions, and electrical connection portions need not necessarily be provided on the entire surface of the partition wall 51 of the clean room 50, but may be provided only on a part of the partition wall 51.
【００１９】次に、図４と図５を用いてクリーンルーム
への荷電粒子線装置の設置方法の一例について説明す
る。図４は、クリーンルームへの荷電粒子線装置の設置
方法を説明する概略平面図、図５はクリーンルームに設
置された荷電粒子線装置をクリーンルームの内側から見
た概略図である。荷電粒子線装置５５は、試料カセット
置き台２０がクリーンルームの清浄空間内となるように
隔壁５１の開口部６１の位置に正対して置かれ、隔壁側
連結部１９と対応する位置に装置側連結部１７が位置す
る。装置正面から見れば、図５に示すように、隔壁開口
部６１の位置にカセット置き台２０と試料カセット２１
のみが見える構成となる。Next, an example of a method of installing a charged particle beam apparatus in a clean room will be described with reference to FIGS. FIG. 4 is a schematic plan view illustrating a method of installing the charged particle beam device in a clean room, and FIG. 5 is a schematic diagram of the charged particle beam device installed in the clean room as viewed from inside the clean room. The charged particle beam device 55 is placed directly opposite the position of the opening 61 of the partition wall 51 so that the sample cassette table 20 is in the clean space of the clean room, and is connected to the device side at a position corresponding to the partition side connection portion 19. The part 17 is located. When viewed from the front of the apparatus, as shown in FIG.
It becomes the composition which only sees.
【００２０】荷電粒子線装置５５の搬入時は、隔壁５１
の外側（クリーンルームの清浄空間外の空間）に装置５
５を搬入後、隔壁開口部６１を塞いでいる仮のふたを取
り外し、装置側連結部１７と隔壁側連結部１９を連結矢
印２５の方向に連結することにより、クリーンルーム内
の清浄空間をほとんど清浄空間外大気にさらすことなく
装置を設置することができる。このとき、荷電粒子線装
置５５と隔壁５１を連結するための明確に分割された装
置側連結部と隔壁側連結部をもたない構造も可能であ
る。またこのような構成により、通常動作時に荷電粒子
線装置５５から塵埃が発生することがあっても、装置５
５が発生する塵埃が清浄空間内に拡散することがない。When the charged particle beam device 55 is loaded, the partition 51
Outside of the clean room (space outside the clean space)
5 is carried in, the temporary lid closing the partition wall opening 61 is removed, and the apparatus-side connecting portion 17 and the partition-side connecting portion 19 are connected in the direction of the connecting arrow 25 to substantially clean the clean space in the clean room. The device can be installed without exposing it to outside air. At this time, a structure that does not have a clearly divided device-side connection portion and a partition-side connection portion for connecting the charged particle beam device 55 and the partition wall 51 is also possible. With such a configuration, even if dust is generated from the charged particle beam device 55 during normal operation, the device 5
The dust generated by No. 5 does not diffuse into the clean space.
【００２１】ここで、荷電粒子線装置５５の中間室７と
試料室６との間で試料の搬送を行う搬送機構２６（図１
参照）は、一般に真空内にあり隔離されているため、清
浄空間外大気にさらされることはないが、試料カセット
２１と中間室７との間において試料の搬送を行う搬送機
構２８は大気中に露出して設置されている。そのため、
試料カセット２１と中間室７との間における試料搬送中
に試料が清浄空間外大気にさらされる場合には、搬送機
構２８の搬送経路を遮蔽物３２で清浄空間外大気から遮
蔽することにより、試料の搬送機構２８を清浄空間内の
みに配置することが可能となる。Here, the transport mechanism 26 (FIG. 1) for transporting the sample between the intermediate chamber 7 and the sample chamber 6 of the charged particle beam apparatus 55.
Is not exposed to the atmosphere outside the clean space, but the transfer mechanism 28 for transferring the sample between the sample cassette 21 and the intermediate chamber 7 is kept in the atmosphere. It is installed exposed. for that reason,
When the sample is exposed to the atmosphere outside the clean space during the sample transfer between the sample cassette 21 and the intermediate chamber 7, the transfer path of the transfer mechanism 28 is shielded from the atmosphere outside the clean space by the shield 32 so that the sample is exposed. Can be arranged only in the clean space.
【００２２】また、荷電粒子線装置５５が隔壁５１と堅
固な部材で保持されると床振動などの外部振動が隔壁５
１を通して装置５５に伝達する。これを避けるため、連
結部が適当なばね定数と粘性減衰性をもつ可撓性の部
材、例えば蛇腹のようなばね連結部１８を備えることに
より、外部振動の影響を遮断することができる。また、
ばね連結部１８を設けると、装置側連結部１７と隔壁側
連結部１９とを連結する時、微妙な位置ずれがある場合
でも、この部分で位置ずれを吸収することができるとい
う２次的な効果もある。When the charged particle beam device 55 is held by the partition 51 and a rigid member, external vibration such as floor vibration is generated.
1 to the device 55. In order to avoid this, the influence of external vibration can be cut off by providing the connecting portion with a flexible member having an appropriate spring constant and viscous damping property, for example, a spring connecting portion 18 such as a bellows. Also,
When the spring connecting portion 18 is provided, when the device-side connecting portion 17 and the partition wall-side connecting portion 19 are connected, even if there is a slight displacement, the displacement can be absorbed by this portion. There is also an effect.
【００２３】荷電粒子線装置５５が試料像等を表示する
表示装置１０を有する場合、隔壁５１に設けられた隔壁
透明部６２と正対する位置に表示装置１０の画面１１を
配置することにより、クリーンルームの清浄空間内から
透明部６２を介して画面１１の情報を見ることができる
ようになる。さらに、荷電粒子線装置５５がコンソール
１２、キーボード１３、マウス１４、表示灯３１などの
入出力装置を備える場合、それらの入出力装置を隔壁５
１の清浄空間側に配置することにより、清浄空間内にい
る作業員は装置５５との情報交換を行うことができる。
この時、入出力装置の信号伝達経路の連結部を隔壁５１
のある定まった位置に設けた隔壁側電気連結部３０と容
易に連結できるように、荷電粒子線装置５５の特定の位
置に装置側電気連結部２９を設けることにより、より簡
単に連結が可能となる。When the charged particle beam device 55 has the display device 10 for displaying a sample image or the like, the screen 11 of the display device 10 is arranged at a position directly opposite to the partition wall transparent portion 62 provided on the partition wall 51, thereby providing a clean room. The information on the screen 11 can be viewed from within the clean space through the transparent portion 62. Further, when the charged particle beam device 55 includes input / output devices such as the console 12, the keyboard 13, the mouse 14, and the indicator light 31, the input / output devices are connected to the partition 5
By arranging it on the side of the clean space, a worker in the clean space can exchange information with the device 55.
At this time, the connecting portion of the signal transmission path of the input / output device is
By providing the device-side electric connection portion 29 at a specific position of the charged particle beam device 55 so that the connection can be easily performed with the partition-side electric connection portion 30 provided at a certain fixed position, Become.
【００２４】次に、図４を用いて、試料カセット２１と
試料室６の試料ステージ５の間で試料を搬送する試料搬
送機構の通常の構成例を説明する。試料搬送機構は、試
料カセット２１と中間室７との間で試料を搬送する搬送
機構２８と、中間室７と試料室６へ搬送する搬送機構２
６（図１参照）よりなる。試料４は試料カセット２１に
複数セットされた状態で、搬送機構の入り口である試料
カセット置き台２０に設置される。試料は搬送機構２８
の試料搬送アームで試料カセット２１より取り出され、
中間室７を大気解放後、バルブ１５を開けて中間室７へ
送られる。その後バルブ１５を閉め、中間室７内の真空
引きを行った後、試料室６に連通するバルブ１６を開け
る。次に、試料は搬送機構２６により中間室７から試料
室６の試料ステージ５に送られ、その後バルブ１６を閉
める。試料室６から試料４を搬出する場合は、以上と逆
の操作を行う。搬送機構の構成は、中間室を２室設ける
などの別の構成をとることができるが、それらの構成に
かかわらず搬送機構を持ちさえすれば、本発明の適用は
可能である。 図６は、本発明によるクリーンルームへ
の荷電粒子線装置の設置方法の他の例を説明する概略平
面図である。図６は図４に相当する図であり、図６にお
いて図４と同じ機能の部分には図４と同じ番号を付し、
重複する説明を省略する。なお、クリーンルーム及びそ
の隔壁は、図２及び図３にて説明したのと同様の構造を
有する。Next, with reference to FIG. 4, a description will be given of a typical configuration of a sample transport mechanism for transporting a sample between the sample cassette 21 and the sample stage 5 of the sample chamber 6. FIG. The sample transport mechanism includes a transport mechanism 28 that transports a sample between the sample cassette 21 and the intermediate chamber 7, and a transport mechanism 2 that transports the sample to the intermediate chamber 7 and the sample chamber 6.
6 (see FIG. 1). The sample 4 is set on the sample cassette table 20 which is an entrance of the transport mechanism in a state where a plurality of the samples 4 are set in the sample cassette 21. The sample is transferred by the transport mechanism 28
Is taken out of the sample cassette 21 by the sample transfer arm of
After the intermediate chamber 7 is released to the atmosphere, the valve 15 is opened and sent to the intermediate chamber 7. After that, the valve 15 is closed, the inside of the intermediate chamber 7 is evacuated, and then the valve 16 communicating with the sample chamber 6 is opened. Next, the sample is sent from the intermediate chamber 7 to the sample stage 5 of the sample chamber 6 by the transport mechanism 26, and then the valve 16 is closed. When carrying out the sample 4 from the sample chamber 6, the reverse operation is performed. The configuration of the transport mechanism may be another configuration such as providing two intermediate chambers, but the present invention is applicable as long as the transport mechanism is provided regardless of the configuration. FIG. 6 is a schematic plan view illustrating another example of a method for installing a charged particle beam device in a clean room according to the present invention. FIG. 6 is a diagram corresponding to FIG. 4. In FIG. 6, portions having the same functions as those in FIG.
A duplicate description will be omitted. Note that the clean room and its partition have the same structure as that described with reference to FIGS.
【００２５】この例においては、荷電粒子線装置５５は
装置側隔壁７１と一体の構造をとり、隔壁側隔壁７１の
装置側連結部１７ａ及び装置側電気連結部２９ａと隔壁
側連結部１９及び隔壁側電気連結部３０とを連結する。
装置側隔壁７１は、荷電粒子線装置５５に専用の装置一
台分の大きさの隔壁であり、クリーンルームの隔壁５１
と類似の構造を有する。すなわち、装置側隔壁７１は、
隔壁５１の開口部６１に相当する位置に開口部６１ａを
有し、隔壁５１の透明部６２に相当する位置に開口部６
２ａを有する。In this example, the charged particle beam device 55 has an integral structure with the device-side partition 71, and the device-side connecting portion 17a and the device-side electrical connecting portion 29a of the partition-side partition 71, the partition-side connecting portion 19, and the partition. The side electric connection part 30 is connected.
The device-side partition 71 is a partition of the size of one device dedicated to the charged particle beam device 55, and is a partition 51 of a clean room.
Has a similar structure to That is, the device-side partition 71 is
An opening 61a is provided at a position corresponding to the opening 61 of the partition 51, and an opening 6 is provided at a position corresponding to the transparent portion 62 of the partition 51.
2a.
【００２６】従って、荷電粒子線装置５５と装置側隔壁
７１を予め連結して組み立てておき、それを搬入して装
置側隔壁７１をクリーンルーム隔壁５１の外側に連結す
ることにより、短時間で荷電粒子線装置５５をクリーン
ルーム５０に設置することができる。試料はクリーンル
ーム５０の隔壁５１の開口部６１と装置側隔壁７１の開
口部６１ａを通して搬送機構２８，２６により試料室６
に搬送され、表示装置１０の画面１１は装置側隔壁７１
の開口部６２ａ及びクリーンルーム隔壁５１の透明部６
２を介してクリーンルーム内から見ることができる。ま
た、コンソール１２、キーボード１３、マウス１４、表
示灯３１などの入出力装置も、図４の例の場合と同様に
使用することができる。Therefore, the charged particle beam device 55 and the device-side partition 71 are connected and assembled in advance, and the charged particle beam device 55 is loaded and connected to the outside of the clean room partition 51 so that the charged particles can be charged in a short time. The wire device 55 can be installed in the clean room 50. The sample passes through the opening 61 of the partition 51 of the clean room 50 and the opening 61a of the partition 71 on the apparatus side, and is transported by the transport mechanisms 28 and 26 into the sample chamber 6.
The screen 11 of the display device 10 is moved to the device-side partition 71.
Opening 62a and the transparent portion 6 of the clean room partition 51
2 through the clean room. In addition, input / output devices such as the console 12, the keyboard 13, the mouse 14, and the indicator 31 can be used in the same manner as in the example of FIG.
【００２７】図７及び図８により、本発明の更に他の例
について説明する。図７は図２に示したクリーンルーム
５０の隔壁５１の構造の詳細を示し、図７（ａ）は隔壁
５１の一部の正面模式図、図７（ｂ）はそのＢＢ断面模
式図である。図７に示すように、クリーンルーム５０の
隔壁５１は、荷電粒子線装置の設置が予定される位置に
対応して、取り外し可能な可動壁５８ａ，５８ｂ，５８
ｃ，…を有する。Another example of the present invention will be described with reference to FIGS. 7 shows details of the structure of the partition wall 51 of the clean room 50 shown in FIG. 2, FIG. 7 (a) is a schematic front view of a part of the partition wall 51, and FIG. 7 (b) is a schematic BB cross-sectional view thereof. As shown in FIG. 7, the partition wall 51 of the clean room 50 has removable movable walls 58a, 58b, 58 corresponding to positions where the charged particle beam device is to be installed.
c,...
【００２８】図８は、クリーンルームへの荷電粒子線装
置の設置方法を説明する概略平面図である。図８は図４
及び図６に相当する図であり、図８において図４あるい
は図６と同じ機能の部分には図４と同じ番号を付し、重
複する説明を省略する。装置側隔壁８１は、図６に示し
た装置側隔壁７１とほぼ同様の構造を有し、荷電粒子線
装置５５は装置側隔壁８１と一体に予め組み立てられて
搬入される。装置側隔壁８１は、クリーンルーム５０の
隔壁５１に設けられた取り外し可能な可動壁５８ａ，５
８ｂ，５８ｃ，…と同じ寸法であり、開口部６１ｂと透
明部６２ｃを有する。開口部６１ｂは荷電粒子線装置の
試料出し入れ部に相当する位置に設けられ、試料カセッ
ト置き台２０が配置される。また、透明部６２ｃは荷電
粒子線装置５５が備える表示装置１０の画面１１に正対
している。試料側隔壁８１には、コンソール１２、キー
ボード１３、マウス１４、表示灯３１などの入出力装置
が予め接続されている。FIG. 8 is a schematic plan view for explaining a method of installing a charged particle beam apparatus in a clean room. FIG. 8 shows FIG.
8 and FIG. 8. In FIG. 8, portions having the same functions as those in FIG. 4 or FIG. 6 are denoted by the same reference numerals as in FIG. The device-side partition 81 has substantially the same structure as the device-side partition 71 shown in FIG. 6, and the charged particle beam device 55 is pre-assembled integrally with the device-side partition 81 and carried in. The device-side partition 81 is provided with removable movable walls 58 a and 5 provided on the partition 51 of the clean room 50.
8b, 58c,..., And has an opening 61b and a transparent portion 62c. The opening 61b is provided at a position corresponding to the sample loading / unloading section of the charged particle beam device, and the sample cassette table 20 is arranged. The transparent portion 62c faces the screen 11 of the display device 10 of the charged particle beam device 55. The input / output devices such as the console 12, the keyboard 13, the mouse 14, and the indicator 31 are connected to the sample-side partition 81 in advance.
【００２９】クリーンルームへの荷電粒子装置５５を設
置する際には、予め荷電粒子線装置５５と装置側隔壁８
１とを一体に組み立てたものを例えばクリーンルーム５
０の隔壁５１の可動壁５８ａの外側に接近して搬入し、
そののち可動壁５８ａを取り外し、装置側連結部１７ｂ
と隔壁側連結部１９ａとを連結することにより、可動壁
５８ａを取り外した後のクリーンルーム隔壁５１の開口
部に装置側隔壁８１を取り付ける。クリーンルームに設
置された荷電粒子装置５５をクリーンルームの内側から
見ると、図５に示すように見える。When the charged particle device 55 is installed in the clean room, the charged particle beam device 55 and the
For example, a clean room 5 is assembled from
0, approaching the outside of the movable wall 58a of the partition wall 51,
After that, the movable wall 58a is removed, and the device side connecting portion 17b is removed.
The apparatus-side partition 81 is attached to the opening of the clean room partition 51 from which the movable wall 58a has been removed by connecting the and the partition-side connecting portion 19a. When the charged particle device 55 installed in the clean room is viewed from the inside of the clean room, it looks as shown in FIG.
【００３０】この設置方法の場合、荷電粒子線装置の設
置時に一時的にクリーンルームの清浄空間が清浄空間外
大気にさらされるものの、その時間を最小にすることが
可能である。そして、この場合、装置５５と隔壁５１と
を一体化することにより、連結部を少なくすることがで
きる。図３及び図４あるいは図６で説明した設置方法の
場合には、予め定められた隔壁開口部、隔壁透明部、隔
壁側電気連結部等の位置により、装置の構成部分の配置
に制約が加わるが、図７及び図８に示した設置方法の場
合、装置側隔壁８１と装置側連結部１７ｂ以外の装置の
構成部分は比較的自由に配置できるというメリットがあ
る。In this installation method, the clean space of the clean room is temporarily exposed to the atmosphere outside the clean space when the charged particle beam device is installed, but the time can be minimized. In this case, the connecting portion can be reduced by integrating the device 55 and the partition wall 51. In the case of the installation method described with reference to FIG. 3, FIG. 4 or FIG. 6, the arrangement of the components of the device is restricted by the predetermined positions of the partition opening, the partition transparent part, the partition-side electric connection part, and the like. However, in the case of the installation method shown in FIGS. 7 and 8, there is an advantage that components of the device other than the device-side partition 81 and the device-side connecting portion 17b can be arranged relatively freely.
【００３１】[0031]
【発明の効果】本発明によると、試料搬送機構の入り口
をクリーンルームの清浄空間を密閉する隔壁に連結でき
る構造を有することで、荷電粒子線装置を清浄空間外に
置いたままで、清浄空間内で試料を受け渡しすることが
できるようになる。このことにより、従来の清浄空間内
に荷電粒子線装置を設置する場合に比べ、清浄空間を保
持したまま装置の搬入及びメンテナンスを行うことが可
能となる。According to the present invention, a structure in which the entrance of the sample transfer mechanism can be connected to the partition wall that seals the clean space of the clean room is provided, so that the charged particle beam apparatus can be placed inside the clean space while being kept outside the clean space. The sample can be delivered. This makes it possible to carry in and maintain the apparatus while maintaining the clean space, as compared with the case where the charged particle beam apparatus is installed in the conventional clean space.
【図面の簡単な説明】[Brief description of the drawings]
【図１】荷電粒子線装置の一例の概略説明図。FIG. 1 is a schematic explanatory view of an example of a charged particle beam device.
【図２】本発明によるクリーンルームの一例の平面模式
図。FIG. 2 is a schematic plan view of an example of a clean room according to the present invention.
【図３】クリーンルームの隔壁の構造を示す図。FIG. 3 is a diagram showing a structure of a partition of a clean room.
【図４】クリーンルームへの荷電粒子線装置の設置方法
を説明する概略平面図。FIG. 4 is a schematic plan view illustrating a method of installing a charged particle beam device in a clean room.
【図５】クリーンルームに設置された荷電粒子線装置を
内側から見た概略図。FIG. 5 is a schematic diagram of a charged particle beam device installed in a clean room as viewed from the inside.
【図６】クリーンルームへの荷電粒子線装置の設置方法
の他の例を説明する概略平面図。FIG. 6 is a schematic plan view illustrating another example of a method of installing a charged particle beam device in a clean room.
【図７】クリーンルームの隔壁の構造を示す図。FIG. 7 is a diagram showing a structure of a partition of a clean room.
【図８】クリーンルームへの荷電粒子線装置の設置方法
の他の例を説明する概略平面図。FIG. 8 is a schematic plan view illustrating another example of a method of installing a charged particle beam device in a clean room.
【図９】従来のクリーンルームを示す平面模式図。FIG. 9 is a schematic plan view showing a conventional clean room.
１…電子源、２…電子線、３…対物レンズ、４…試料、
５…試料ステージ、６…試料室、７…中間室、８…二次
電子、９…検出器、１０…表示装置、１１…画面、１２
…コンソール、１３…キーボード、１４…マウス、１５
…バルブ、１６…バルブ、１７…装置側連結部、１８…
ばね連結部、１９…隔壁側連結部、２０…試料カセット
置き台、２１…試料カセット、２５…連結矢印、２６…
搬送機構、２８…試料搬送機構、２９…装置側電気連結
部、３０…隔壁側電気連結部、３１…表示灯、３２…遮
蔽物、５０…クリーンルーム、５１…隔壁、５２，５３
…出入り口、５２ａ，５３ａ…二重の扉、５５…荷電粒
子線装置、５６…荷電粒子線装置以外のプロセス処理装
置、５７…空気清浄機、５８…可動壁、６１…開口部、
６２…隔壁透明部、７１，８１…装置側隔壁、１００…
クリーンルーム、１０１…隔壁、１０２，１０３…出入
り口、１０２ａ，１０３ａ…二重の扉、１０５ａ〜１０
５ｆ…プロセス処理装置、１０７…空気清浄機1: electron source, 2: electron beam, 3: objective lens, 4: sample,
5 sample stage, 6 sample room, 7 intermediate room, 8 secondary electrons, 9 detector, 10 display device, 11 screen, 12
... console, 13 ... keyboard, 14 ... mouse, 15
... Valve, 16 ... Valve, 17 ... Device side connection part, 18 ...
Spring connecting part, 19 ... partition-side connecting part, 20 ... sample cassette holder, 21 ... sample cassette, 25 ... connecting arrow, 26 ...
Transport mechanism, 28: sample transport mechanism, 29: electrical connection on device side, 30: electrical connection on partition side, 31: indicator light, 32: shield, 50: clean room, 51: partition, 52, 53
... doorway, 52a, 53a ... double door, 55 ... charged particle beam device, 56 ... process processing equipment other than charged particle beam device, 57 ... air cleaner, 58 ... movable wall, 61 ... opening,
62: partition transparent portion, 71, 81: device-side partition, 100:
Clean room, 101: partition wall, 102, 103 ... doorway, 102a, 103a ... double door, 105a-10
5f: Process equipment, 107: Air purifier
Claims (10)
え、該隔壁に、本体が外部空間側に配設される荷電粒子
線装置に対する試料出入り口となる開口部が設けられて
いることを特徴とするクリーンルーム。1. A partition for separating a clean space from an external space, wherein the partition is provided with an opening serving as a sample entrance / exit for a charged particle beam device whose main body is disposed on the external space side. Clean room to do.
え、該隔壁の一部が取り外し可能な可動壁で構成された
クリーンルームであって、前記可動壁を取り外してでき
る前記隔壁の開口部に、試料出入り口となる小開口部を
有し荷電粒子線装置と一体化された前記可動壁と同寸の
装置側隔壁を、前記荷電粒子線装置の本体が外部空間側
に位置するようにしてはめ込むことが可能なことを特徴
とするクリーンルーム。2. A clean room comprising a partition for separating a clean space from an external space, and a part of the partition is constituted by a removable wall, wherein an opening of the partition is formed by removing the movable wall. Fitting a device-side partition having a small opening serving as a sample entrance / exit and having the same size as the movable wall integrated with the charged particle beam device so that the main body of the charged particle beam device is located on the external space side. Clean room characterized by being able to do.
おいて、前記隔壁は該隔壁の内外を電気的に接続する電
気連結部を備えることを特徴とするクリーンルーム。3. The clean room according to claim 1, wherein the partition has an electrical connection portion for electrically connecting the inside and the outside of the partition.
に配置された試料に荷電粒子線を照射する手段と、試料
を搬送するための試料搬送手段とを含む荷電粒子線装置
において、 前記試料搬送手段による試料搬送経路のうち大気に露出
している経路の周囲を気密に包囲する包囲手段を備え、
前記包囲手段の開放部はクリーンルームの清浄空間を外
部空間と隔てる隔壁に設けられた開口部に連結可能であ
ることを特徴とする荷電粒子線装置。4. A charged particle beam apparatus comprising: a sample chamber to be evacuated; means for irradiating a sample placed in the sample chamber with a charged particle beam; and sample transport means for transporting the sample. Among the sample transporting paths by the sample transporting means, a surrounding means for hermetically surrounding a path exposed to the atmosphere is provided,
The charged particle beam apparatus according to claim 1, wherein an opening of said surrounding means is connectable to an opening provided in a partition separating a clean space of a clean room from an external space.
に配置された試料に荷電粒子線を照射する手段と、試料
を搬送するための試料搬送手段と、装置に対して手動操
作を行うための入力手段と、装置の状態を表示する出力
手段とを含み、清浄空間と外部空間とを隔離する隔壁を
備えるクリーンルームに設置された荷電粒子線装置にお
いて、 前記試料室、前記荷電粒子線照射手段及び前記試料搬送
手段は前記隔壁の外部空間側に配置され、前記入力手段
及び出力手段は前記隔壁の清浄空間側に配置され、試料
は前記隔壁に設けられた開口部を通して清浄空間側から
供給されることを特徴とする荷電粒子線装置。5. A sample chamber to be evacuated, means for irradiating the sample placed in the sample chamber with a charged particle beam, sample transport means for transporting the sample, and manual operation of the apparatus. A charged particle beam device installed in a clean room including a partition for separating a clean space and an external space, the device comprising: The means and the sample transport means are arranged on the outer space side of the partition, the input means and the output means are arranged on the clean space side of the partition, and the sample is supplied from the clean space side through an opening provided in the partition. A charged particle beam device characterized by being performed.
えるクリーンルームに、真空排気される試料室と、前記
試料室内に配置された試料に荷電粒子線を照射する手段
と、試料を搬送するための試料搬送手段とを備える荷電
粒子線装置を設置するための方法において、 前記試料室、前記荷電粒子線照射手段及び前記試料搬送
手段を前記隔壁の外部空間側に配置し、前記試料搬送手
段による試料搬送経路のうち大気に露出している経路の
周囲を包囲手段によって気密に包囲し、前記隔壁に試料
を出し入れするための開口を設け、前記包囲手段の開放
部を前記隔壁に設けた前記開口部に連結することを特徴
とする方法。6. A sample room to be evacuated, a means for irradiating a sample placed in the sample room with a charged particle beam in a clean room provided with a partition for separating a clean space from an external space, and A method for installing a charged particle beam apparatus including a sample transporting unit, wherein the sample chamber, the charged particle beam irradiation unit, and the sample transporting unit are arranged on an outer space side of the partition, and the sample transported by the sample transporting unit. The opening portion in which the periphery of the transfer route that is exposed to the atmosphere is hermetically surrounded by surrounding means, an opening for taking a sample in and out of the partition wall is provided, and an opening of the surrounding means is provided in the partition wall. The method characterized by connecting to.
手段の開放部と前記隔壁に設けた前記開口部との連結は
可撓性部材によって行うことを特徴とする方法。7. The method according to claim 6, wherein the connection between the opening of the surrounding means and the opening provided in the partition is made by a flexible member.
記隔壁に透明部を設け、荷電粒子線装置の表示手段を前
記隔壁の外部空間側に前記透明部に正対して配置するこ
とを特徴とする方法。8. The method according to claim 6, wherein a transparent portion is provided on the partition, and a display means of the charged particle beam device is arranged on the outer space side of the partition so as to face the transparent portion. And how.
て、荷電粒子線装置に対して手動操作を行うための入力
手段及び／又は荷電粒子線装置の状態を表示する出力手
段を前記隔壁の清浄空間側に配置することを特徴とする
方法。9. The method according to claim 6, wherein input means for manually operating the charged particle beam device and / or output means for displaying a state of the charged particle beam device are provided on the partition wall. A method characterized by being arranged on the clean space side.
備えるクリーンルームに荷電粒子線装置を設置するため
の方法において、 前記隔壁の一部を取り外し可能な可動壁で構成し、試料
出入り口となる小開口部を有し前記可動壁と同寸の装置
側隔壁に前記荷電粒子線装置を固定し、前記可動壁を取
り外してできた前記隔壁の開口部に前記装置側隔壁を、
前記荷電粒子線装置の本体が外部空間側に位置するよう
にしてはめ込むことを特徴とする方法。10. A method for installing a charged particle beam apparatus in a clean room provided with a partition for separating a clean space from an external space, wherein a part of the partition is constituted by a removable movable wall, and a small opening serving as a sample entrance / exit is provided. Fixing the charged particle beam device to the device-side partition having the same size as the movable wall, the device-side partition at the opening of the partition obtained by removing the movable wall,
The method according to claim 1, wherein the charged particle beam device is fitted so that a main body of the charged particle beam device is located on an outer space side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10001199A JP4049478B2 (en) | 1999-04-07 | 1999-04-07 | How to install charged particle beam equipment in a clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10001199A JP4049478B2 (en) | 1999-04-07 | 1999-04-07 | How to install charged particle beam equipment in a clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000294492A true JP2000294492A (en) | 2000-10-20 |
| JP4049478B2 JP4049478B2 (en) | 2008-02-20 |
Family
ID=14262628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10001199A Expired - Fee Related JP4049478B2 (en) | 1999-04-07 | 1999-04-07 | How to install charged particle beam equipment in a clean room |
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| Country | Link |
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| JP (1) | JP4049478B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013217805A (en) * | 2012-04-10 | 2013-10-24 | Azbil Corp | Position recording system of particle measuring apparatus and position recording method of particle measuring apparatus |
| JP2016006831A (en) * | 2014-06-20 | 2016-01-14 | 大日本印刷株式会社 | External processor and device manufacturing system |
-
1999
- 1999-04-07 JP JP10001199A patent/JP4049478B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013217805A (en) * | 2012-04-10 | 2013-10-24 | Azbil Corp | Position recording system of particle measuring apparatus and position recording method of particle measuring apparatus |
| JP2016006831A (en) * | 2014-06-20 | 2016-01-14 | 大日本印刷株式会社 | External processor and device manufacturing system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4049478B2 (en) | 2008-02-20 |
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