JP2000258125A - Measuring instrument - Google Patents

Measuring instrument

Info

Publication number
JP2000258125A
JP2000258125A JP11057329A JP5732999A JP2000258125A JP 2000258125 A JP2000258125 A JP 2000258125A JP 11057329 A JP11057329 A JP 11057329A JP 5732999 A JP5732999 A JP 5732999A JP 2000258125 A JP2000258125 A JP 2000258125A
Authority
JP
Japan
Prior art keywords
camera
lower side
mover
head amplifier
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11057329A
Other languages
Japanese (ja)
Other versions
JP4034903B2 (en
Inventor
Shinichiro Tsuruno
真一郎 鶴野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sokkia Co Ltd
Original Assignee
Sokkia Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sokkia Co Ltd filed Critical Sokkia Co Ltd
Priority to JP05732999A priority Critical patent/JP4034903B2/en
Publication of JP2000258125A publication Critical patent/JP2000258125A/en
Application granted granted Critical
Publication of JP4034903B2 publication Critical patent/JP4034903B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To prevent the occurrence of measurement errors by eliminating the variation of the relative position between a head amplifier and a camera by installing a supporting plate to a mover so that the plate may not come into contact with a gate type frame and attaching the head amplifier to the supporting plate. SOLUTION: When a gate-type frame 4 is driven in the Y-axis direction (the longitudinal direction of guide rails 2), a strong driving force acts on the central part of the lower side 42 of the frame 4 through a nut holder 44 and the central part makes elastic deformation. When the central part is elastically deformed, the relative position between a CCD camera 51 attached to the upper side 41 of the frame 4 and a mover 3 does not change, because both end sections of the lower side 42 with which the mover 3 comes into contact are not deformed. Therefore, the relative position between a supporting plate 6 installed to the mover 3 in such a way that the plate 6 does not come into contact with the frame 4 and the camera 51 does not change. In addition, since no external force acts on the supporting plate 6 and the plate 6 is not deformed, the relative position between a head amplifier 71 attached to the plate 6 and the camera 51 also does not change.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、水平に保持された
被測定物をカメラで撮像し、該カメラの座標から被測定
物の寸法等を測定する測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring apparatus for measuring an object to be measured held horizontally by a camera and measuring dimensions and the like of the object from coordinates of the camera.

【0002】[0002]

【従来の技術】従来のこの種の測定装置として、例えば
水平なテーブル上にセットされた平板状の被測定物を上
方からカメラで撮像して被測定物にプリントされた電極
パターン等の寸法を測定する二次元測定装置が知られて
いる。該カメラはテーブルと平行なX−Y方向に移動自
在に保持されている。即ち、該二次元測定装置は、テー
ブルの上方に位置する水平な上辺と、テーブルの下方に
位置し該上辺に対して平行な下辺と、上辺及び下辺の各
両端を連結する1対の垂直な側辺とからなる門形フレー
ムを備えており、テーブルの下方にY方向に沿って相互
に平行な1対のガイドレールが敷設されている。そし
て、該ガイドレールに沿ってY方向に往復移動する可動
子に下辺の両端を各々保持させると共に、ガイドレール
に平行に送りねじを配設し、且つ門形フレームの下辺の
略中央部分に該送りねじに螺合するナットを固定してい
る。そして、ガイドレールに平行にリニアスケールを配
設し、門形フレームの下辺であってナットの近傍に取り
付けたヘッドアンプによりリニアスケールの目盛を読み
取ることにより門形フレームのY方向の座標を検出して
いる。
2. Description of the Related Art As a conventional measuring device of this type, for example, a flat plate-shaped object to be measured set on a horizontal table is imaged by a camera from above and the dimensions of an electrode pattern or the like printed on the object to be measured are measured. A two-dimensional measuring device for measuring is known. The camera is held movably in XY directions parallel to the table. That is, the two-dimensional measuring device includes a horizontal upper side located above the table, a lower side located below the table parallel to the upper side, and a pair of vertical sides connecting both ends of the upper side and the lower side. It has a gate-shaped frame composed of side edges, and a pair of mutually parallel guide rails is laid under the table along the Y direction. A mover reciprocating in the Y direction along the guide rail holds both ends of the lower side, and a feed screw is disposed in parallel with the guide rail, and the movable screw is disposed substantially at the center of the lower side of the portal frame. The nut screwed to the feed screw is fixed. Then, a linear scale is arranged parallel to the guide rail, and the scale of the linear scale is detected by reading the scale of the linear scale with a head amplifier attached to the lower side of the portal frame and near the nut to detect the Y-direction coordinate of the portal frame. ing.

【0003】尚、門形フレームの上辺にはX方向に沿っ
てガイドレールと送りねじとリニアスケールとが配設さ
れており、X方向に往復自在のカメラホルダを設けて該
カメラホルダにカメラを保持させている。
A guide rail, a feed screw, and a linear scale are provided on the upper side of the portal frame along the X direction, and a camera holder that can reciprocate in the X direction is provided, and the camera is mounted on the camera holder. I keep it.

【0004】[0004]

【発明が解決しようとする課題】カメラ及びカメラホル
ダを含めたX方向の移動質量は比較的小さいが、これら
X方向の移動質量やX方向の駆動モータ及びテーブルを
跨ぐ大きさの門形フレームを含むY方向の移動質量は極
めて大きくなる。Y方向への駆動力は駆動モータから送
りねじに伝えられ、全ての駆動力はナットを介して門形
フレームの下辺に作用する。Y方向の駆動力は全てナッ
トに集中するので、ナットが取り付けられている下辺は
移動方向に撓む。一方、Y方向の座標を検出するヘッド
アンプはナットの近傍に取り付けられているので下辺が
撓めばヘッドアンプの取付部分も撓むため、ヘッドアン
プとカメラとの相対位置が変化する。そのため、カメラ
を同じ位置に停止させても往方向から移動させて停止し
た場合と復方向から移動させて停止した場合とで検出さ
れるY座標が相違し、測定誤差が生じる。
Although the moving mass in the X direction including the camera and the camera holder is relatively small, the portal frame having a size that straddles the moving mass in the X direction and the drive motor and the table in the X direction is relatively small. The moving mass in the Y direction including the moving direction becomes extremely large. The driving force in the Y direction is transmitted from the driving motor to the feed screw, and all the driving force acts on the lower side of the portal frame via the nut. Since all the driving force in the Y direction is concentrated on the nut, the lower side where the nut is attached bends in the moving direction. On the other hand, since the head amplifier for detecting the coordinates in the Y direction is mounted near the nut, if the lower side bends, the mounting portion of the head amplifier also bends, so that the relative position between the head amplifier and the camera changes. Therefore, even if the camera is stopped at the same position, the detected Y coordinate differs between the case where the camera is moved from the forward direction and stopped, and the case where the camera is moved and stopped from the backward direction, causing a measurement error.

【0005】そこで本発明は、上記の問題点に鑑み、特
にY座標の検出値に誤差の生じることにない測定装置を
提供することを課題とする。
[0005] In view of the above problems, an object of the present invention is to provide a measuring apparatus which does not cause an error in the detected value of the Y coordinate.

【0006】[0006]

【課題を解決するための手段】上記課題を解決するため
に本発明は、被測定物が載置される平板状のテーブルを
有し、該テーブルの上方に位置し被測定物を撮像するカ
メラを保持する水平な上辺と、テーブルの下方に位置し
該上辺に対して平行な下辺と、上辺及び下辺の各両端を
連結する1対の垂直な側辺とからなる門形フレームと、
テーブルの下方に相互に平行に配設した1対のガイドレ
ールに沿って往復移動する可動子に下辺の両端を各々保
持させると共に、ガイドレールに平行に配設した送りね
じに螺合し門形フレームをガイドレールに沿って駆動す
るナットを下辺の略中央部分に取り付け、更にガイドレ
ールに平行に配設したリニアスケールの目盛を門形フレ
ームと共に移動するヘッドアンプで検出しカメラの座標
を求める測定装置において、上記両可動子に、門形フレ
ームに接触しないように支持部材を架設し、該支持部材
にヘッドアンプを取り付けたことを特徴とする。
According to the present invention, there is provided a camera having a flat plate-shaped table on which an object to be measured is mounted, the camera being positioned above the table and imaging the object to be measured. A gate-shaped frame consisting of a horizontal upper side that holds the lower side, a lower side positioned below the table and parallel to the upper side, and a pair of vertical sides connecting both ends of the upper side and the lower side,
A movable element reciprocating along a pair of guide rails disposed parallel to each other below the table holds both ends of the lower side, and is screwed into a feed screw disposed parallel to the guide rails. A nut that drives the frame along the guide rail is attached to the approximate center of the lower side, and the scale of the linear scale arranged parallel to the guide rail is detected by a head amplifier that moves with the portal frame and the coordinates of the camera are measured. The apparatus is characterized in that a support member is provided on both the movers so as not to contact the portal frame, and a head amplifier is attached to the support member.

【0007】ヘッドアンプを取り付ける支持部材を門形
フレームに接触しないように架設したので、門形フレー
ムが変形しても該変形の影響が支持部材に及ぶことがな
く、従って、ヘッドアンプとカメラとの相対位置が変化
しない。
[0007] Since the supporting member for mounting the head amplifier is installed so as not to contact the portal frame, even if the portal frame is deformed, the deformation does not affect the supporting member. The relative position of does not change.

【0008】[0008]

【発明の実施の形態】図1を参照して、1は二次元測定
装置の主要部を模式的に示したものであり、ベッド11
上には前後方向に長手の1対のガイドレール2が敷設さ
れている。両ガイドレール2は相互に平行であり、該ガ
イドレール2の長手方向が二次元測定装置1のY軸方向
になる。また、両ガイドレール2の間には送りねじであ
るボールねじ21が、ガイドレール2に平行に配設され
ている。両ガイドレール2には各々可動子3がガイドレ
ール2に沿ってY軸方向に往復自在に係合している。両
可動子3には門形フレーム4が架設されている。該門形
フレーム4はガラス板からなる水平なテーブルTを挟ん
で相互に水平な上辺41及び下辺42と上辺41及び下
辺42を左右両側で連結する1対の側辺43とで構成さ
れている。尚、例えば特願平11−41777号に示さ
れているように、テーブルTは図示しない構成部品を介
してベッド11に対して固定されている。上辺41は上
記Y軸方向に対して直角方向であるX軸方向に長手にな
るように形成されており、CCDカメラ51が取り付け
られた可動子5をX軸方向に往復自在に保持している。
また、下辺42の左右方向略中央部分にはナットホルダ
44が取り付けられており、上記ボールねじ21に螺合
している。従ってボールねじ21を図外のサーボモータ
により回転させると門形フレーム4はガイドレール2に
沿ってY軸方向に移動する。ところで、本発明では門形
フレーム4が架設された可動子3に、門形フレーム4に
接触しないように支持部材である支持板6を架設した。
両ガイドレール2の間にはY軸方向に長手のリニアスケ
ール7が配設されており、支持板6の下面には該リニア
スケール7の目盛を読み取るヘッドアンプ71を取り付
けた。従って、上記のごとく門形フレーム4がY軸方向
に移動するとヘッドアンプ71も共にY軸方向に移動
し、移動した先でのリニアスケール7の目盛を読み取る
ことによりCCDカメラ51のY座標を検出することが
できる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIG. 1, reference numeral 1 schematically shows a main part of a two-dimensional measuring apparatus.
A pair of longitudinal guide rails 2 are laid on the upper side in the front-rear direction. The two guide rails 2 are parallel to each other, and the longitudinal direction of the guide rails 2 is the Y-axis direction of the two-dimensional measuring device 1. A ball screw 21 serving as a feed screw is disposed between the two guide rails 2 in parallel with the guide rails 2. A mover 3 is engaged with both guide rails 2 so as to reciprocate in the Y-axis direction along the guide rails 2. A gate-shaped frame 4 is mounted on both movers 3. The gate-shaped frame 4 includes an upper side 41 and a lower side 42 that are mutually horizontal across a horizontal table T made of a glass plate, and a pair of side sides 43 that connect the upper side 41 and the lower side 42 on both left and right sides. . As shown in Japanese Patent Application No. 11-41777, for example, the table T is fixed to the bed 11 via components not shown. The upper side 41 is formed to be long in the X-axis direction, which is a direction perpendicular to the Y-axis direction, and holds the movable element 5 to which the CCD camera 51 is attached so as to be able to reciprocate in the X-axis direction. .
A nut holder 44 is attached to a substantially central portion of the lower side 42 in the left-right direction, and is screwed to the ball screw 21. Therefore, when the ball screw 21 is rotated by a servo motor (not shown), the portal frame 4 moves along the guide rail 2 in the Y-axis direction. By the way, in the present invention, the support plate 6 which is a support member is installed on the movable element 3 on which the portal frame 4 is installed so as not to contact the portal frame 4.
A linear scale 7 elongated in the Y-axis direction is provided between the two guide rails 2, and a head amplifier 71 for reading the scale of the linear scale 7 is attached to the lower surface of the support plate 6. Therefore, when the portal frame 4 moves in the Y-axis direction as described above, the head amplifier 71 also moves in the Y-axis direction, and the scale of the linear scale 7 at the moved position is read to detect the Y coordinate of the CCD camera 51. can do.

【0009】上述の二次元測定装置1ではCCDカメラ
51が振動しないように門形フレーム4の剛性を高める
必要があり、門形フレーム4を肉厚に形成している。そ
のため門形フレーム4の質量が大きくなり、門形フレー
ム4をY軸方向に駆動するために大きな駆動力を必要と
する。その大きな駆動力はナットホルダ44を介して下
辺42の略中央部分に作用する。すると若干ではあるが
下辺42は駆動力の作用した方向に弾性変形する。そし
て、門形フレーム4を停止させても摩擦等により下辺4
2の弾性変形は完全に回復しない。そのためナットホル
ダ44とCCDカメラ51との相対位置は門形フレーム
4の移動方向によって相違する。ところが、下辺42の
中央部分が弾性変形しても下辺42の両端部分、即ち可
動子3に当接している部分は弾性変形せず、そのためC
CDカメラ51と可動子3の相対位置は門形フレーム4
の移動方向によって相違することはない。従って、門形
フレーム4に接触することなく可動子3に架設した支持
板6とCCDカメラ51との相対位置は変化せず、更
に、支持板6には外力が作用せず変形しないので支持板
6に取り付けたヘッドアンプ71とCCDカメラ51と
の相対位置も同様に変化しない。
In the two-dimensional measuring device 1 described above, it is necessary to increase the rigidity of the portal frame 4 so that the CCD camera 51 does not vibrate, and the portal frame 4 is formed thick. Therefore, the mass of the gate-shaped frame 4 becomes large, and a large driving force is required to drive the gate-shaped frame 4 in the Y-axis direction. The large driving force acts on the substantially central portion of the lower side 42 via the nut holder 44. Then, although slightly, the lower side 42 is elastically deformed in the direction in which the driving force acts. Even if the portal frame 4 is stopped, the lower side 4
The elastic deformation of No. 2 does not completely recover. Therefore, the relative position between the nut holder 44 and the CCD camera 51 differs depending on the moving direction of the portal frame 4. However, even if the central portion of the lower side 42 is elastically deformed, both end portions of the lower side 42, that is, the portions in contact with the mover 3, are not elastically deformed.
The relative position between the CD camera 51 and the mover 3 is the portal frame 4.
There is no difference depending on the direction of movement. Accordingly, the relative position between the support plate 6 laid on the mover 3 and the CCD camera 51 does not change without contacting the gate-shaped frame 4, and furthermore, the support plate 6 is not deformed by an external force and does not deform. Similarly, the relative position between the head amplifier 71 attached to 6 and the CCD camera 51 does not change.

【0010】尚、図示しないがCCDカメラ51をX軸
方向に往復させるためのガイドレールやボールねじ及び
X座標を検出するためのリニアスケールは門形フレーム
4の上辺41上に配設されている。また、CCDカメラ
51の撮像方向が水平になるようにCCDカメラ51を
旋回できるように保持させ、かつCCDカメラ51を上
下方向であるZ軸方向に往復自在とした三次元測定装置
にも本発明を適用することができる。
Although not shown, a guide rail for reciprocating the CCD camera 51 in the X-axis direction, a ball screw, and a linear scale for detecting the X coordinate are disposed on the upper side 41 of the portal frame 4. . Further, the present invention is also applied to a three-dimensional measuring apparatus in which the CCD camera 51 is held so as to be able to turn so that the imaging direction of the CCD camera 51 is horizontal, and the CCD camera 51 can reciprocate in the vertical Z-axis direction. Can be applied.

【0011】[0011]

【発明の効果】以上の説明から明らかなように、本発明
は、門形フレームに接触しない支持部材を可動子に架設
し、該支持部材にヘッドアンプを取り付けたので、門形
フレームが弾性変形してもヘッドアンプとカメラとの相
対位置が変化せず、測定誤差が生じない。
As is apparent from the above description, according to the present invention, since the supporting member which does not contact the portal frame is mounted on the mover and the head amplifier is attached to the supporting member, the portal frame is elastically deformed. Even if this occurs, the relative position between the head amplifier and the camera does not change, and no measurement error occurs.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態の構成を示す図FIG. 1 is a diagram showing a configuration of an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 二次元測定装置の主要部 2 ガイドレール 3 可動子 4 門形フレーム 6 支持板 7 リニアスケール 51 CCDカメラ 71 ヘッドアンプ DESCRIPTION OF SYMBOLS 1 The main part of a two-dimensional measuring apparatus 2 Guide rail 3 Mover 4 Gate frame 6 Support plate 7 Linear scale 51 CCD camera 71 Head amplifier

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 被測定物が載置される平板状のテーブ
ルを有し、該テーブルの上方に位置し被測定物を撮像す
るカメラを保持する水平な上辺と、テーブルの下方に位
置し該上辺に対して平行な下辺と、上辺及び下辺の各両
端を連結する1対の垂直な側辺とからなる門形フレーム
と、テーブルの下方に相互に平行に配設した1対のガイ
ドレールに沿って往復移動する可動子に下辺の両端を各
々保持させると共に、ガイドレールに平行に配設した送
りねじに螺合し門形フレームをガイドレールに沿って駆
動するナットを下辺の略中央部分に取り付け、更にガイ
ドレールに平行に配設したリニアスケールの目盛を門形
フレームと共に移動するヘッドアンプで検出しカメラの
座標を求める測定装置において、上記両可動子に、門形
フレームに接触しないように支持部材を架設し、該支持
部材にヘッドアンプを取り付けたことを特徴とする測定
装置。
1. A flat plate-shaped table on which an object to be measured is placed. The table has a horizontal upper side which is located above the table and holds a camera for picking up an image of the object to be measured. A gate-shaped frame consisting of a lower side parallel to the upper side and a pair of vertical sides connecting both ends of the upper side and the lower side, and a pair of guide rails arranged parallel to each other below the table. The mover that reciprocates along the lower arm holds both ends of the lower side, and a nut that is screwed into the feed screw arranged in parallel with the guide rail and drives the gate-shaped frame along the guide rail is provided at the approximate center of the lower side. In the measuring device for detecting the coordinates of the camera by detecting the scale of the linear scale mounted in parallel with the guide rail and moving with the portal frame by the head amplifier, the two movable elements do not come into contact with the portal frame. A supporting member is mounted on the supporting member, and a head amplifier is attached to the supporting member.
JP05732999A 1999-03-04 1999-03-04 measuring device Expired - Fee Related JP4034903B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05732999A JP4034903B2 (en) 1999-03-04 1999-03-04 measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05732999A JP4034903B2 (en) 1999-03-04 1999-03-04 measuring device

Publications (2)

Publication Number Publication Date
JP2000258125A true JP2000258125A (en) 2000-09-22
JP4034903B2 JP4034903B2 (en) 2008-01-16

Family

ID=13052545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05732999A Expired - Fee Related JP4034903B2 (en) 1999-03-04 1999-03-04 measuring device

Country Status (1)

Country Link
JP (1) JP4034903B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010038808A (en) * 2008-08-07 2010-02-18 Sokkia Topcon Co Ltd Two-dimensional measuring instrument
CN102322797A (en) * 2011-08-15 2012-01-18 吉林大学 Three-freedom-degree automobile wheel positioning parameter three-dimensionalal visual flexible detection system
KR20150125561A (en) * 2014-04-30 2015-11-09 히라따기꼬오 가부시키가이샤 System for measuring shape of work and control method
CN110605216A (en) * 2019-11-04 2019-12-24 刘炳梅 High-efficient oily limit machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010038808A (en) * 2008-08-07 2010-02-18 Sokkia Topcon Co Ltd Two-dimensional measuring instrument
CN102322797A (en) * 2011-08-15 2012-01-18 吉林大学 Three-freedom-degree automobile wheel positioning parameter three-dimensionalal visual flexible detection system
KR20150125561A (en) * 2014-04-30 2015-11-09 히라따기꼬오 가부시키가이샤 System for measuring shape of work and control method
KR101631184B1 (en) 2014-04-30 2016-06-16 히라따기꼬오 가부시키가이샤 System for measuring shape of work and control method
CN110605216A (en) * 2019-11-04 2019-12-24 刘炳梅 High-efficient oily limit machine

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