JP2000241780A - Waveguide optical modulator - Google Patents
Waveguide optical modulatorInfo
- Publication number
- JP2000241780A JP2000241780A JP11045189A JP4518999A JP2000241780A JP 2000241780 A JP2000241780 A JP 2000241780A JP 11045189 A JP11045189 A JP 11045189A JP 4518999 A JP4518999 A JP 4518999A JP 2000241780 A JP2000241780 A JP 2000241780A
- Authority
- JP
- Japan
- Prior art keywords
- coaxial connector
- input
- signal electrode
- output coaxial
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、導波路光変調器に
関し、詳しくはコプレナー構造の電気光学的結晶基板と
入出力同軸コネクタとを中間接続部材であるフィードス
ルー基板により電気的に接続する導波路光変調器に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waveguide optical modulator and, more particularly, to a waveguide optical modulator for electrically connecting an electro-optic crystal substrate having a coplanar structure and an input / output coaxial connector by a feed-through substrate serving as an intermediate connecting member. The present invention relates to a waveguide optical modulator.
【０００２】[0002]
【従来の技術】導波路光変調器は、その正面図である図
３及びフィードスルー基板付近の部分平面図である図４
に示すように、LiNbO3の結晶基板にＴｉ拡散光導波路を
形成し、その光導波路の間に光導波路に沿った信号電極
１１を形成し、その信号電極１１の両側に接地電極１
２，１３を形成して、結晶基板の同一平面に配置したコ
プレナー構造のＬＮチップ１０と入出力同軸コネクタ２
０のピン２１等とを、中間接続部材であるフィードスル
ー基板３０により電気的に接続されている。そのフィー
ドスルー基板３０は、上面に直線状に形成された信号電
極３１と下面に接地電極３２とを備えるマイクロストリ
ップ形であり、フィードスルー基板３０の信号電極３１
はＬＮチップの信号電極１１と接続ワイヤ４１で連結さ
れ、フィードスルー基板３０の接地電極３２はＬＮチッ
プの接地電極１２，１３と、信号電極１１に使われた接
続ワイヤ４１より長い接続ワイヤ４２，４３で導体容器
３４を介してそれぞれ連結されている。2. Description of the Related Art FIG. 3 is a front view of a waveguide optical modulator, and FIG. 4 is a partial plan view near a feedthrough substrate.
As shown in FIG. 1, a Ti diffused optical waveguide is formed on a LiNbO 3 crystal substrate, a signal electrode 11 is formed along the optical waveguide between the optical waveguides, and ground electrodes 1 are provided on both sides of the signal electrode 11.
2 and 13 are formed, and the coplanar LN chip 10 and the input / output coaxial connector 2 are arranged on the same plane of the crystal substrate.
The 0 pins 21 and the like are electrically connected by a feed-through board 30 which is an intermediate connecting member. The feed-through substrate 30 is a microstrip having a signal electrode 31 formed linearly on the upper surface and a ground electrode 32 on the lower surface.
Is connected to the signal electrode 11 of the LN chip by a connection wire 41, and the ground electrode 32 of the feedthrough substrate 30 is connected to the ground electrodes 12 and 13 of the LN chip and the connection wires 42 longer than the connection wire 41 used for the signal electrode 11. At 43, they are connected via the conductor container 34, respectively.
【０００３】[0003]
【発明が解決しようとする課題】しかし、マイクロスト
リップ形のフィードスルー基板は、信号電極がその基板
端面から直交して等幅に形成されているために、高周波
コネクタの信号ピンとの位置合わせが難しく、正確な位
置で接続できないと高周波コネクタとの接続状態により
特性インピーダンスの値が大きく変わってしまうので調
整に手間取ることがある。また、信号電極に対する接地
電極の位置が異なるため電気信号がＬＮチップからフィ
ードスルー基板へ伝搬する際にモードの不連続性が生じ
て特性が不安定になることがある。However, in the microstrip type feed-through board, since the signal electrodes are formed to have the same width orthogonal to the end face of the board, it is difficult to align the signal electrodes with the signal pins of the high-frequency connector. If the connection cannot be made at an accurate position, the value of the characteristic impedance greatly changes depending on the connection state with the high-frequency connector. In addition, since the position of the ground electrode is different from the position of the signal electrode, when an electric signal propagates from the LN chip to the feedthrough substrate, mode discontinuity may occur and characteristics may become unstable.
【０００４】[0004]
【課題を解決するための手段】そこで、本発明者は、フ
ィードスルー基板をＬＮチップと同じコプレナー構造と
する導波路光変調器を提供するものである。本願の請求
項１に係る発明は、基板に光導波路とその光導波路に沿
った信号電極と接地電極とを形成したコプレナー構造の
電気光学的結晶基板に、入出力同軸コネクタを中間接続
部材により電気的に接続し、入射光を電気信号により変
調して出射光とする導波路光変調器において、前記中間
接続部材に、入出力同軸コネクタの中心導体に接続した
信号電極とその両側に隣接する接地電極とこの中間接続
部材内において電気的接続を有する下面接地電極とを持
つコプレナー構造を形成し、入出力同軸コネクタに接続
した前記信号電極を電気光学的結晶基板側から入出力同
軸コネクタ側に広がるテーパー形状としたことを特徴と
する導波路光変調器である。また、信号電極は、その特
性インピーダンスを所定の値、例えば５０オームに整合
させながらテーパー形状の太さ、長さ及び曲率を調整す
ることが望ましい。ここで、基板に光導波路とその光導
波路に沿った信号電極と接地電極とを形成した電気光学
的結晶基板には、光導波路の直上に電極を配置するＺカ
ット式及び光導波路の横に電極を配置し２つの電極で光
導波路を挟むようなＸカット式のものがある。また、テ
ーパー形状には、中間接続部材の上面における対向する
辺間を同一の割合で幅広になる形状の他、中間接続部材
の上面における対向する辺のうち電気光学的結晶基板側
辺に直行する定幅部分があり、その定幅部分の端部から
入出力同軸コネクタ側へ広がる幅広になる形状が形成さ
れる形状、例えばラッパ管形状も含んでいる。Accordingly, the present inventors provide a waveguide optical modulator having a feed-through substrate having the same coplanar structure as an LN chip. The invention according to claim 1 of the present application provides an electro-optic crystal substrate having a coplanar structure in which an optical waveguide and a signal electrode and a ground electrode along the optical waveguide are formed on a substrate, and an input / output coaxial connector is electrically connected by an intermediate connecting member. And a signal electrode connected to a center conductor of an input / output coaxial connector and a ground adjacent to both sides of the signal electrode connected to a center conductor of the input / output coaxial connector. A coplanar structure is formed having electrodes and a lower surface ground electrode having electrical connection within the intermediate connection member, and the signal electrodes connected to the input / output coaxial connector are spread from the electro-optic crystal substrate side to the input / output coaxial connector side. A waveguide optical modulator having a tapered shape. Further, it is desirable to adjust the thickness, length and curvature of the tapered shape while matching the characteristic impedance of the signal electrode to a predetermined value, for example, 50 ohms. Here, an electro-optic crystal substrate in which an optical waveguide and a signal electrode and a ground electrode along the optical waveguide are formed on a substrate has a Z-cut type in which electrodes are disposed immediately above the optical waveguide, and an electrode which is provided next to the optical waveguide. And an X-cut type in which an optical waveguide is sandwiched between two electrodes. In addition, in the tapered shape, in addition to the shape in which the distance between the opposing sides on the upper surface of the intermediate connecting member is widened at the same ratio, among the opposing sides on the upper surface of the intermediate connecting member, the taper shape is perpendicular to the side of the electro-optical crystal substrate. It also includes a shape having a constant width portion, and a shape that forms a widening shape extending from the end of the constant width portion to the input / output coaxial connector side, for example, a trumpet tube shape.
【０００５】[0005]
【発明の実施の形態】以下、本発明の実施の形態を詳細
に説明する。図１は、導波路光変調器の正面図であり、
図２はフィードスルー基板付近の部分平面図である。導
波路光変調器は、LiNbO3 の結晶基板１０にＴｉ拡散光
導波路１０ａを形成し、その光導波路１０ａの間に光導
波路１０ａに沿った信号電極１１を形成し、その信号電
極１１の両側に接地電極１２，１３を形成して、結晶基
板１０の同一平面に配置したコプレナー構造のＬＮチッ
プを構成し、このＬＮチップと入出力同軸コネクタ２０
のピン２１等とは、フィードスルー基板３０により電気
的に接続されている。Embodiments of the present invention will be described below in detail. FIG. 1 is a front view of a waveguide optical modulator,
FIG. 2 is a partial plan view near the feedthrough substrate. The waveguide optical modulator forms a Ti diffusion optical waveguide 10a on a LiNbO 3 crystal substrate 10, forms a signal electrode 11 between the optical waveguides 10a along the optical waveguide 10a, and forms a signal electrode 11 on both sides of the signal electrode 11. The ground electrodes 12 and 13 are formed to form a coplanar LN chip arranged on the same plane of the crystal substrate 10.
The pins 21 and the like are electrically connected by a feed-through board 30.
【０００６】そのフィードスルー基板３０は、その上面
に、入出力同軸コネクタ２０の中心導体に接続した信号
電極３１と入出力同軸コネクタの外側導体に接続した接
地電極３２，３３とが同一平面に位置させ、フィードス
ルー基板３０の部材内において電気的接続を有する下面
電極を持ったコプレナー構造を構成し、入出力同軸コネ
クタに接続した前記信号電極３１を電気光学的結晶基板
側から入出力同軸コネクタ側に広がるテーパー形状とし
ている。また、信号電極３１と接地電極３２，３３との
間のそれぞれのギャップもインピーダンスを５０オーム
に適応させるために電気光学的結晶基板側から入出力同
軸コネクタ側に広がるテーパー形状に形成されている。
フィードスルー基板３０の信号電極３１はＬＮチップの
信号電極１１と接続ワイヤ４１で連結され、フィードス
ルー基板３０の接地電極３２，３３はＬＮチップの変調
電極１２，１３と、信号電極１１に使われた接続ワイヤ
４１とほぼ同長の接続ワイヤ４２，４３でそれぞれ連結
されている。On the upper surface of the feedthrough substrate 30, a signal electrode 31 connected to the center conductor of the input / output coaxial connector 20 and ground electrodes 32, 33 connected to the outer conductor of the input / output coaxial connector are located on the same plane. A coplanar structure having a lower surface electrode having an electrical connection is formed in the member of the feedthrough substrate 30, and the signal electrode 31 connected to the input / output coaxial connector is connected from the electro-optical crystal substrate side to the input / output coaxial connector side. It has a tapered shape that spreads out. Each gap between the signal electrode 31 and the ground electrodes 32 and 33 is also formed in a tapered shape extending from the electro-optic crystal substrate side to the input / output coaxial connector side to adjust the impedance to 50 ohms.
The signal electrode 31 of the feedthrough substrate 30 is connected to the signal electrode 11 of the LN chip by a connection wire 41, and the ground electrodes 32 and 33 of the feedthrough substrate 30 are used for the modulation electrodes 12 and 13 and the signal electrode 11 of the LN chip. The connecting wires 41 are connected by connecting wires 42 and 43 having substantially the same length as the connecting wires 41.
【０００７】本願発明は上述した実施の形態に限られる
ものではなく種々の変更や変形が可能である。導波路光
変調器の用途は、位相変調、強度変調、光スィッチを始
め種々あり、基板材料としてはニオブ酸リチィウムの他
に種々の電気光学結晶材料を利用することができる。The present invention is not limited to the above-described embodiment, and various changes and modifications are possible. There are various uses of the waveguide optical modulator, including phase modulation, intensity modulation, and optical switch. As the substrate material, various electro-optic crystal materials can be used in addition to lithium niobate.
【０００８】[0008]
【発明の効果】以上説明した通り、本願発明によれば、
フィードスルー基板の上面に、入出力同軸コネクタに接
続したコプレナー構造を形成したことにより、接続ワイ
ヤを、フィードスルー基板の上面という近接した同一平
面で接続できるので、接続作業が容易になったばかりで
なく、従来のようにコプレナー形構造のＬＮチップから
マイクロストリップ形フィードスルー基板へ伝播モード
を大きく変換させることが無く伝播特性を良好にでき
る。また、フィードスルー基板の信号電極を、入出力同
軸コネクタ側で広がったテーパー形状としたことによ
り、同軸コネクタの信号ピンを接続する面積が広がり接
続が容易になり、信号ピントの位置ずれが無くなり接続
状態も確実となってインピーダンス変化が小さくなり特
性が安定する。As described above, according to the present invention,
By forming a coplanar structure connected to the input / output coaxial connector on the upper surface of the feedthrough substrate, the connecting wires can be connected on the same plane, which is the upper surface of the feedthrough substrate. In addition, the propagation characteristics can be improved without greatly changing the propagation mode from the coplanar type LN chip to the microstrip type feed-through substrate as in the related art. In addition, the signal electrode of the feedthrough board has a tapered shape that is widened on the input / output coaxial connector side, so that the area for connecting the signal pins of the coaxial connector is enlarged and the connection is easy, and there is no displacement of the signal focus and connection The state is assured, the impedance change is reduced, and the characteristics are stabilized.
【図１】導波路光変調器の正面図である。FIG. 1 is a front view of a waveguide optical modulator.
【図２】フィードスルー基板付近の部分平面図である。FIG. 2 is a partial plan view near a feed-through substrate.
【図３】従来の導波路光変調器の正面図である。FIG. 3 is a front view of a conventional waveguide light modulator.
【図４】従来のフィードスルー基板付近の部分平面図で
ある。FIG. 4 is a partial plan view near a conventional feedthrough substrate.
１０・・LiNbO3 結晶基板、１０ａ・・Ｔｉ拡散光導波
路、１１・・信号電極、１２，１３・・接地電極、２０
・・入出力同軸コネクタ、２１・・ピン、３０・・フィ
ードスルー基板、３１・・信号電極、３２，３３・・接
地電極、３４・・導体容器、４１，４２，４３・・接続
ワイヤ。10 ·· LiNbO 3 crystal substrate, 10a ·· Ti diffused optical waveguide, 11 ··· signal electrode, 12, 13 ·· ground electrode, 20
··· I / O coaxial connector, 21 ·· pin, 30 ·· feedthrough board, 31 ··· signal electrode, 32,33 ··· ground electrode, 34 ··· conductor container, 41,42,43 ··· connection wire.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 豊田 周平 愛知県名古屋市瑞穂区須田町２番56号 日 本碍子株式会社内 Ｆターム(参考） 2H079 AA02 AA12 BA01 CA05 DA03 DA22 EA05 EB28 HA11 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Shuhei Toyoda 2-56, Suda-cho, Mizuho-ku, Nagoya-shi, Aichi Japan F Co., Ltd. F-term (reference) 2H079 AA02 AA12 BA01 CA05 DA03 DA22 EA05 EB28 HA11
Claims (1)
信号電極と接地電極とを形成したコプレナー構造の電気
光学的結晶基板に、入出力同軸コネクタを中間接続部材
により電気的に接続し、入射光を電気信号により変調し
て出射光とする導波路光変調器において、 前記中間接続部材に、入出力同軸コネクタの中心導体に
接続した信号電極とその両側に隣接する接地電極とこの
中間接続部材内において電気的接続を有する下面接地電
極とを持つコプレナー構造を形成し、入出力同軸コネク
タに接続した前記信号電極を電気光学的結晶基板側から
入出力同軸コネクタ側に広がるテーパー形状としたこと
を特徴とする導波路光変調器。An input / output coaxial connector is electrically connected to an electro-optic crystal substrate having a coplanar structure in which an optical waveguide and a signal electrode and a ground electrode along the optical waveguide are formed on the substrate by an intermediate connecting member. A waveguide optical modulator that modulates incident light with an electric signal to output light, comprising: a signal electrode connected to a center conductor of an input / output coaxial connector and ground electrodes adjacent to both sides of the intermediate connection member; A coplanar structure having a lower surface ground electrode having electrical connection within the member is formed, and the signal electrode connected to the input / output coaxial connector has a tapered shape extending from the electro-optic crystal substrate side to the input / output coaxial connector side. A waveguide light modulator characterized by the above-mentioned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11045189A JP2000241780A (en) | 1999-02-23 | 1999-02-23 | Waveguide optical modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11045189A JP2000241780A (en) | 1999-02-23 | 1999-02-23 | Waveguide optical modulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000241780A true JP2000241780A (en) | 2000-09-08 |
Family
ID=12712332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11045189A Pending JP2000241780A (en) | 1999-02-23 | 1999-02-23 | Waveguide optical modulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000241780A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004082080A1 (en) * | 2003-03-13 | 2004-09-23 | Mitsubishi Denki Kabushiki Kaisha | Connection structure for coaxial connector and multilayer substrate |
| US6961494B2 (en) | 2002-06-27 | 2005-11-01 | Fujitsu Limited | Optical waveguide device |
| JP2008152206A (en) * | 2006-12-20 | 2008-07-03 | Anritsu Corp | Optical modulator |
| JP2011232583A (en) | 2010-04-28 | 2011-11-17 | Anritsu Corp | Optical modulator module |
| JP2012141632A (en) * | 2012-03-16 | 2012-07-26 | Sumitomo Osaka Cement Co Ltd | Optical waveguide element module |
| CN109417213A (en) * | 2016-06-06 | 2019-03-01 | 凯瑟琳欧洲股份公司 | For signal to be supplied to the circuit board assemblies of transmitter |
-
1999
- 1999-02-23 JP JP11045189A patent/JP2000241780A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6961494B2 (en) | 2002-06-27 | 2005-11-01 | Fujitsu Limited | Optical waveguide device |
| WO2004082080A1 (en) * | 2003-03-13 | 2004-09-23 | Mitsubishi Denki Kabushiki Kaisha | Connection structure for coaxial connector and multilayer substrate |
| US7471174B2 (en) | 2003-03-13 | 2008-12-30 | Mitsubishi Denki Kabushiki Kaisha | Connection structure for coaxial connector and multilayer substrate |
| JP2008152206A (en) * | 2006-12-20 | 2008-07-03 | Anritsu Corp | Optical modulator |
| JP2011232583A (en) | 2010-04-28 | 2011-11-17 | Anritsu Corp | Optical modulator module |
| JP2012141632A (en) * | 2012-03-16 | 2012-07-26 | Sumitomo Osaka Cement Co Ltd | Optical waveguide element module |
| CN109417213A (en) * | 2016-06-06 | 2019-03-01 | 凯瑟琳欧洲股份公司 | For signal to be supplied to the circuit board assemblies of transmitter |
| CN109417213B (en) * | 2016-06-06 | 2021-12-21 | 瑞典爱立信有限公司 | Circuit board assembly for supplying signals to a transmitter |
| US11289796B2 (en) | 2016-06-06 | 2022-03-29 | Telefonaktiebolaget Lm Ericsson (Publ) | Circuit board arrangement for signal supply to a radiator |
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