JP2000227436A - Scanning probe microscope, and method for observating sample - Google Patents

Scanning probe microscope, and method for observating sample

Info

Publication number
JP2000227436A
JP2000227436A JP11027461A JP2746199A JP2000227436A JP 2000227436 A JP2000227436 A JP 2000227436A JP 11027461 A JP11027461 A JP 11027461A JP 2746199 A JP2746199 A JP 2746199A JP 2000227436 A JP2000227436 A JP 2000227436A
Authority
JP
Japan
Prior art keywords
sample
scanning probe
probe
piezoelectric element
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11027461A
Other languages
Japanese (ja)
Inventor
Norio Okubo
紀雄 大久保
Seiji Yumoto
誠司 湯本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP11027461A priority Critical patent/JP2000227436A/en
Priority to DE19956725A priority patent/DE19956725A1/en
Publication of JP2000227436A publication Critical patent/JP2000227436A/en
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation

Abstract

PROBLEM TO BE SOLVED: To precisely observe a surface of a sample. SOLUTION: A piezo-element 9 of a piezoelectric element and a cantilever 2b having a probe 3b in its tip end are attached to a positioning part 1, and the probe 3b contacts with a surface of a movable substrate 4 attached to the piezo-element 9. A cantilever 2a having a probe 3a in its tip end is attached to the substrate 4, and the probe 3a contacts with a surface of an observed sample 8 mounted on an X-Y drive part 11 movable in a horizontal direction. A laser beam 10 emitted from a light source 6 is reflected by the cantilevers 2a, 2b, and the reflected laser beams 10 are received by split photodetectors 5a, 5b respectively to be detected as z-positions of height levels of the probes 3a, 3b. A difference between a signal output from the photodetector 5a and a reference signal is amplified by an amplifier 7 to be input to the piezo-element 9 as a feedback signal.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、試料表面と相互作
用する探針により試料表面を走査することで試料表面を
観察する走査探針顕微鏡および試料観察方法方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning probe microscope for observing a sample surface by scanning the sample surface with a probe interacting with the sample surface, and a method for observing the sample.

【０００２】[0002]

【従来の技術】走査探針顕微鏡（Scanning probe micro
scope：SPM）は微細な針先を持つ探針を試料表面に近接
させるなどして針先と表面とを相互作用させ、その相互
作用の程度を針先と表面との相対的な距離に帰還してそ
の相互作用を一定に保ち、帰還信号により表面の形状あ
るいは表面の物理的性質などに関わる量を画像として表
示するものである。2. Description of the Related Art Scanning probe microscopy
The scope (SPM) makes the tip and the surface interact with each other, for example, by bringing a probe with a fine tip close to the sample surface, and returns the degree of the interaction to the relative distance between the tip and the surface. Then, the interaction is kept constant, and the quantity related to the shape of the surface or the physical properties of the surface is displayed as an image by the feedback signal.

【０００３】そのひとつである原子間力顕微鏡（Atomic
force microscope：AFM）では、探針と試料表面との相
互作用を探針の位置として検出し、その位置信号を入力
としてピエゾ素子により表面−探針間の距離に帰還をか
けて表面−探針間の相互作用を定常に保ち、探針が表面
上を走査するとき、表面−探針間の距離を制御するピエ
ゾ素子の駆動信号を収集し、表面の形状を画像化する
（Scanning Force Microscopy With Applications to E
lectric, Magnetic and Atomic Forces, Dror Sarid, O
xford University Press, 1994）。One of them is an atomic force microscope (Atomic
In a force microscope (AFM), the interaction between the probe and the sample surface is detected as the position of the probe, and the position signal is input to the piezo element to feed back the distance between the surface and the probe, and the surface-probe is used. When the probe scans over the surface, the drive signal of the piezo element that controls the distance between the surface and the probe is collected, and the surface shape is imaged (Scanning Force Microscopy With Applications to E
lectric, Magnetic and Atomic Forces, Dror Sarid, O
xford University Press, 1994).

【０００４】従来のＡＦＭ法の１例のブロック図を図６
に示す。FIG. 6 is a block diagram showing an example of a conventional AFM method.
Shown in

【０００５】探針３０３はカンチレバー３０２の先端に
下向きに取り付けられている。ピエゾ素子３０９上に載
置された試料３０８の表面に探針３０３が接触（コンタ
クト）した状態で不図示のＸＹ駆動装置により、試料３
０８と探針３０３とが水平方向（Ｘ−Ｙ）に相対走査さ
れることにより生じる探針３０３の上下（ｚ）方向の変
位は、カンチレバー３０２の微少の振れ角として光テコ
により敏感に計測される。すなわち、光源３０６から放
射されたレーザ光３１０がカンチレバー３０２先端の上
面で反射し、その反射光は位置感応型の分割光ディテク
タ３０５により検出される。そして、ＰＤ回路３２１に
より探針のz変位に線形なｚ位置信号Ｖcに変換される。The probe 303 is attached to the tip of the cantilever 302 downward. In a state where the probe 303 is in contact with the surface of the sample 308 mounted on the piezo element 309, the sample 3 is moved by an XY driving device (not shown).
The displacement of the probe 303 in the vertical (z) direction caused by the relative scanning of the probe 08 and the probe 303 in the horizontal direction (X-Y) is more sensitively measured by the optical lever as a small deflection angle of the cantilever 302. You. That is, the laser light 310 emitted from the light source 306 is reflected on the upper surface of the tip of the cantilever 302, and the reflected light is detected by the position-sensitive split light detector 305. Then, the signal is converted by the PD circuit 321 into a z-position signal Vc linear to the z-displacement of the probe.

【０００６】ｚ位置信号Ｖcと比較信号との差分は、次
にフィルタ、微分、積分、比例回路あるいはこれらの回
路動作と同様の効果を与えるようにコンピュータソフト
により駆動されるＤＳＰ（digital signal processin
g）などを用いて、積分変換、比例変換などを含む演算
を施された後、ピエゾ素子をｚ変位に駆動する電圧信号
Ｖpとしてピエゾ素子３０９に与えられる。図６に示す
ように、通常、試料３０８はピエゾ素子３０９上に載置
され、帰還はピエゾ素子３０９のｚ変位が試料３０８の
表面と探針３０３との間の距離を一定にするようにかけ
られる。すなわち、探針３０３の位置は帰還信号で生じ
るピエゾ素子３０９の伸び縮みにより一定に保たれるこ
とから試料３０８の凹凸、すなわち表面形状はこの電圧
信号Ｖpのみを用いて画像化される。[0006] The difference between the z position signal Vc and the comparison signal is then filtered, differentiated, integrated, proportional circuit or a DSP (digital signal processin) driven by computer software to provide an effect similar to the operation of these circuits.
After performing calculations including integral conversion, proportional conversion, and the like using g) and the like, the signal is supplied to the piezo element 309 as a voltage signal Vp for driving the piezo element to z displacement. As shown in FIG. 6, the sample 308 is usually mounted on the piezo element 309, and the feedback is performed so that the z displacement of the piezo element 309 makes the distance between the surface of the sample 308 and the probe 303 constant. . That is, since the position of the probe 303 is kept constant by the expansion and contraction of the piezo element 309 generated by the feedback signal, the unevenness of the sample 308, that is, the surface shape is imaged using only this voltage signal Vp.

【０００７】また、ＡＦＭの別のモードとしてカンチレ
バーを共振周波数またはその近傍の周波数で振動させ、
振動の振幅または位相などを検出してｚ位置信号Ｖcと
して用いる方法が知られている。As another mode of the AFM, the cantilever is vibrated at a resonance frequency or a frequency near the resonance frequency,
There is known a method of detecting the amplitude or phase of vibration and using it as the z position signal Vc.

【０００８】さらに、他のモードのＡＦＭとして、あら
かじめｚ位置信号Ｖcとピエゾ素子を駆動する電圧信号
Ｖpとの間の量的関係を実験的に求めておき、探針の走
査とともにｚ位置信号Ｖcと電圧信号Ｖpの信号を同時に
計測、収集し、決定されている関係を用いてｚ位置信号
Ｖcと電圧信号Ｖpとの両信号からz変位を合成し、高速
に表面の凹凸を画像化する方法がある。Further, as an AFM in another mode, a quantitative relationship between a z-position signal Vc and a voltage signal Vp for driving a piezo element is experimentally obtained in advance, and the z-position signal Vc is determined together with the scanning of the probe. A method of simultaneously measuring and collecting signals of the voltage signal Vp and the voltage signal Vp, synthesizing the z displacement from both the z position signal Vc and the voltage signal Vp using the determined relationship, and rapidly imaging the surface irregularities. There is.

【０００９】[0009]

【発明が解決しようとする課題】上述のＡＦＭのピエゾ
素子を駆動する電圧信号Ｖpは、これとピエゾ素子のｚ
変位が線形関係にあり、また理想的な帰還であれば、走
査で決まる試料表面上の(ｘ、ｙ)位置とにより、試料表
面の形状（トポグラフィー）を表すこととなる。ここに
理想的な帰還とは、試料の表面を走査して時間域あるい
は周波数域に試料表面の形状の信号が変換されたとき、
電圧信号Ｖpを広帯域で測定するのに十分広い帰還帯
域、大きな帰還利得があり、かつ、ピエゾ素子の電圧−
変位応答に非線形性、履歴のない場合である。The voltage signal Vp for driving the piezo element of the above-mentioned AFM is equal to zp of the piezo element.
If the displacement has a linear relationship and is an ideal feedback, the shape (topography) of the sample surface is represented by the (x, y) position on the sample surface determined by scanning. Here, ideal feedback means that when the surface of the sample is scanned and the signal of the shape of the sample surface is converted into the time domain or frequency domain,
It has a feedback band wide enough to measure the voltage signal Vp in a wide band, a large feedback gain, and the voltage of the piezo element −
This is the case where the displacement response has no nonlinearity and history.

【００１０】しかしながら、電気−機械変換を行うピエ
ゾ素子には多かれ少なかれ非線形性、履歴などがあるた
め、これらが帰還系に含まれるとき、その系は理想から
大きく外れ、取得された表面形状の画像には誤差が含ま
れることとなる。実際、使用されるピエゾ素子は電気的
に微少変位を検出するのに適してはいるが、素子の使用
条件に依存して、入力である電界強度と出力である変位
の間には履歴現象、余効、クリープなどが介在する。こ
れらは、ＡＦＭにおけるピエゾ素子への印加電圧を取得
して得られる画像の、表面凹凸の高さ変位に含まれる誤
差の原因となる。However, since the piezo element for performing the electromechanical conversion has more or less non-linearity and history, when these elements are included in the feedback system, the system greatly deviates from the ideal, and the acquired image of the surface shape is obtained. Includes an error. In fact, the piezo elements used are suitable for electrically detecting minute displacements, but depending on the conditions of use of the elements, a hysteresis phenomenon occurs between the input electric field strength and the output displacement. There are aftereffects and creep. These cause errors included in the height displacement of the surface irregularities in the image obtained by acquiring the voltage applied to the piezo element in the AFM.

【００１１】そこで、本発明は、上述した誤差の原因を
排除し、高精度な試料表面の観察が可能な走査探針顕微
鏡および試料観察方法を提供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a scanning probe microscope and a sample observation method capable of observing a sample surface with high accuracy by eliminating the above-mentioned causes of the error.

【００１２】[0012]

【課題を解決するための手段】上記目的を達成するため
本発明の走査探針顕微鏡は、試料の表面に対向させてカ
ンチレバーの自由端に設けられた走査用探針と、前記走
査用探針と前記試料とを相対走査させる走査手段と、前
記カンチレバーの固定端を支持し、前記走査用探針を前
記試料の表面に対して略垂直な方向に移動させるように
伸縮する圧電素子と、前記走査用探針と前記試料との相
互作用力が一定となるように前記圧電素子を伸縮させる
帰還信号を与える制御手段と、前記圧電素子の伸縮量を
検知する伸縮量検知手段と、前記伸縮量検知手段により
検知された前記圧電素子の伸縮量を、前記走査用探針の
前記試料の表面に対して略垂直な方向への移動量として
出力する出力手段とを有する。In order to achieve the above object, a scanning probe microscope according to the present invention comprises: a scanning probe provided at a free end of a cantilever facing a surface of a sample; and the scanning probe. Scanning means for relatively scanning the sample and the sample, a piezoelectric element that supports a fixed end of the cantilever, and expands and contracts so as to move the scanning probe in a direction substantially perpendicular to the surface of the sample. Control means for providing a feedback signal for expanding and contracting the piezoelectric element so that the interaction force between the scanning probe and the sample becomes constant; expansion and contraction amount detecting means for detecting the expansion and contraction amount of the piezoelectric element; Output means for outputting the amount of expansion and contraction of the piezoelectric element detected by the detection means as the amount of movement of the scanning probe in a direction substantially perpendicular to the surface of the sample.

【００１３】上記のとおり構成された本発明の走査探針
顕微鏡では、走査用探針を試料表面に接触させながら、
走査手段により走査用探針と試料とが相対走査される。
このとき、試料の表面形状に応じて、走査用探針が試料
表面と略垂直な方向（ｚ方向）に移動するが、走査用探
針は、圧電素子によりその方向に移動可能に設けられて
おり、走査用探針と試料との相互作用力が一定となるよ
うに圧電素子が制御手段で伸縮される。圧電素子の伸縮
量は伸縮量検知手段で検知され、この圧電素子の伸縮量
が走査用探針のｚ方向への移動量として出力される。こ
れにより、試料表面の観察の際には、走査用探針と試料
との相互作用力が一定となるようにするために圧電素子
に与える信号ではなく、圧電素子の伸縮量そのものを利
用することができるので、圧電素子へ与えられる信号に
含まれる多値性が回避される。In the scanning probe microscope of the present invention configured as described above, while the scanning probe is in contact with the sample surface,
The scanning probe and the sample are relatively scanned by the scanning means.
At this time, the scanning probe moves in a direction (z direction) substantially perpendicular to the sample surface according to the surface shape of the sample. The scanning probe is provided by a piezoelectric element so as to be movable in that direction. The piezoelectric element is expanded and contracted by the control means so that the interaction force between the scanning probe and the sample becomes constant. The amount of expansion and contraction of the piezoelectric element is detected by the amount of expansion and contraction detection means, and the amount of expansion and contraction of the piezoelectric element is output as the amount of movement of the scanning probe in the z direction. Therefore, when observing the sample surface, use the amount of expansion and contraction of the piezoelectric element itself instead of the signal given to the piezoelectric element in order to keep the interaction force between the scanning probe and the sample constant. Therefore, the multi-value included in the signal supplied to the piezoelectric element is avoided.

【００１４】また、圧電素子の一端を支持部材に支持さ
せるとともに他端に可動基板を設け、上記伸縮量検知手
段として、圧電素子の伸縮に伴う可動基板の変位を検知
する、上記走査用探針と同様の構成を有する変位検知用
探針を用いることで、走査用探針のｚ方向の位置の検知
と同じ原理を用いて圧電素子の伸縮量を検知することが
できる。すなわち、圧電素子の伸縮量の検知には、走査
用探針のｚ方向への移動量を検知するための手段の一部
を共通に用いることが可能となり、その分だけ構成が簡
素化される。この場合特に、走査用探針を、走査用探針
が設けられたカンチレバーの略共振周波数で励振させる
発振手段を有することで、走査用探針と試料との相対走
査中の、走査用探針の試料への引っ掛かり、跳び、探針
の損傷等が防止される。さらに、上記出力手段からの出
力と、走査用探針のｚ方向への移動量を出力する変位量
出力手段からの出力とを合成させる合成手段を有するこ
とで、試料表面を短時間で観察することが可能となる。[0014] Further, one end of the piezoelectric element is supported by a supporting member and a movable substrate is provided at the other end, and the displacement probe detects the displacement of the movable substrate due to the extension and contraction of the piezoelectric element. By using the displacement detection probe having the same configuration as that described above, the amount of expansion and contraction of the piezoelectric element can be detected using the same principle as that for detecting the position of the scanning probe in the z direction. That is, in detecting the amount of expansion and contraction of the piezoelectric element, it is possible to commonly use a part of the means for detecting the amount of movement of the scanning probe in the z direction, and the configuration is simplified accordingly. . In this case, in particular, the scanning probe has an oscillating unit that excites the scanning probe at a substantially resonant frequency of the cantilever provided with the scanning probe, so that the scanning probe is relatively scanned between the scanning probe and the sample. Of the probe, jumping, damage to the probe, and the like are prevented. Furthermore, the sample surface is observed in a short time by having a synthesizing unit that synthesizes the output from the output unit and the output from the displacement output unit that outputs the amount of movement of the scanning probe in the z direction. It becomes possible.

【００１５】本発明の試料観察方法は、カンチレバーの
自由端に設けられた走査用探針と、一端が支持部材に支
持され他端に前記カンチレバーの固定端が支持された圧
電素子と、前記圧電素子の伸縮量を検知する伸縮量検知
手段とを有するヘッドを用意する工程と、試料を前記走
査用探針と接触させて対向配置する工程と、前記走査用
探針と前記試料とを相対走査する工程と、前記走査用探
針と前記試料との相互作用力が一定となるように前記圧
電素子を伸縮させる工程と、前記伸縮量検知手段により
検知された前記圧電素子の伸縮量を、前記走査用探針の
前記試料の表面に対して略垂直な方向への移動量として
出力する工程とを有する。The method for observing a sample according to the present invention comprises: a scanning probe provided at a free end of a cantilever; a piezoelectric element having one end supported by a support member and the other end supporting a fixed end of the cantilever; A step of preparing a head having expansion / contraction amount detecting means for detecting the amount of expansion / contraction of the element, a step of bringing a sample into contact with the scanning probe and arranging the sample to face each other, and relatively scanning the scanning probe and the sample. Performing the step of expanding and contracting the piezoelectric element so that the interaction force between the scanning probe and the sample becomes constant, and calculating the amount of expansion and contraction of the piezoelectric element detected by the expansion and contraction amount detecting means. Outputting the amount of movement of the scanning probe in a direction substantially perpendicular to the surface of the sample.

【００１６】上記のような本発明の試料観察方法によれ
ば、ヘッドの走査用探針を試料と接触させて対向配置
し、両者を相対走査させると、試料表面の形状に応じて
走査用探針が試料表面と略垂直な方向（ｚ方向）に移動
する。このとき、走査用探針と試料との相互作用力が一
定となるように、走査用探針を支持する圧電素子を伸縮
させ、その伸縮量を検出して走査用探針のｚ方向への移
動量として出力する。これにより、圧電素子の伸縮量
を、試料表面のｚ方向への位置として利用することがで
きるので、走査用探針と試料との相互作用力を一定とす
る際に圧電素子へ与えられる信号に含まれる多値性が回
避される。According to the sample observation method of the present invention as described above, the scanning probe of the head is brought into contact with the sample so as to face the sample, and when both are relatively scanned, the scanning probe according to the shape of the sample surface. The needle moves in a direction (z direction) substantially perpendicular to the sample surface. At this time, the piezoelectric element that supports the scanning probe is expanded and contracted so that the interaction force between the scanning probe and the sample becomes constant, and the amount of expansion and contraction is detected, and the scanning probe is moved in the z direction. Output as the movement amount. As a result, the amount of expansion and contraction of the piezoelectric element can be used as the position of the sample surface in the z direction, so that the signal given to the piezoelectric element when the interaction force between the scanning probe and the sample is constant is maintained. The multi-values involved are avoided.

【００１７】また、上記ヘッドを、カンチレバーが可動
基板を介して圧電素子に支持されるとともに、伸縮量検
知手段が、支持部材に支持されたカンチレバーの自由端
に設けられた変位検知用探針を有する構造とし、上記圧
電素子の伸縮量を走査用探針の移動量として出力する工
程では、圧電素子の伸縮による可動基板の変位に基づく
変位検知用探針の変位量を検知することで、圧電素子の
伸縮量が容易に検知される。この場合、走査用探針と試
料との相対走査の際の走査用探針の引っ掛かり、跳び、
損傷等を防止するために、走査用探針を走査用探針が設
けられたカンチレバーの略共振周波数で励振させる工程
を有することが好ましい。さらには、試料表面を短時間
で観察するために、走査用探針の変位量と変位検知用探
針の変位量とを合成する工程を有してもよい。The head is supported by a piezoelectric element via a movable substrate, and an expansion / contraction amount detecting means includes a displacement detecting probe provided at a free end of the cantilever supported by a support member. In the step of outputting the amount of expansion and contraction of the piezoelectric element as the amount of movement of the scanning probe, the amount of displacement of the displacement detection probe based on the displacement of the movable substrate due to the expansion and contraction of the piezoelectric element is detected. The amount of expansion and contraction of the element is easily detected. In this case, when the scanning probe is caught, jumped, and the like during relative scanning between the scanning probe and the sample,
In order to prevent damage or the like, it is preferable to include a step of exciting the scanning probe at substantially the resonance frequency of the cantilever provided with the scanning probe. Further, in order to observe the sample surface in a short time, the method may include a step of combining the displacement of the scanning probe and the displacement of the displacement detecting probe.

【００１８】[0018]

【発明の実施の形態】（第１の実施形態）図１に本実施
形態の走査探針顕微鏡の帰還ループに関わる部分のブロ
ック図を示す。(First Embodiment) FIG. 1 is a block diagram of a part related to a feedback loop of a scanning probe microscope according to the present embodiment.

【００１９】ｚ方向に移動可能な位置決め部１には、圧
電素子であるピエゾ素子９と、先端に探針３ｂを有する
カンチレバー２ｂとが取付けられている。ピエゾ素子９
は、ｚ方向に伸縮するように上端が位置決め部１に固定
されている。ピエゾ素子９の下端には可動基板４が取付
けられており、この可動基板４の上面には探針３ｂが接
触している。A piezo element 9, which is a piezoelectric element, and a cantilever 2b having a probe 3b at its tip are attached to the positioning portion 1 movable in the z direction. Piezo element 9
Has an upper end fixed to the positioning portion 1 so as to expand and contract in the z direction. The movable substrate 4 is attached to the lower end of the piezo element 9, and the probe 3 b is in contact with the upper surface of the movable substrate 4.

【００２０】可動基板４には先端に探針３ａを有するカ
ンチレバー２ａが取付けられている。試料８の観察時に
は、探針３ａは水平方向であるＸＹ方向に移動可能なＸ
Ｙ駆動部１１上に載置された観察用の試料８の表面に接
触される。The movable substrate 4 is provided with a cantilever 2a having a probe 3a at the tip. At the time of observation of the sample 8, the probe 3a is movable in X and Y directions which are horizontal directions.
The surface of the sample 8 for observation placed on the Y drive unit 11 is contacted.

【００２１】また、本実施形態の走査探針顕微鏡は、カ
ンチレバー２ｂ、３ｂにレーザ光１０を照射させる光源
６と、カンチレバー２ｂ、３ｂで反射されたレーザ光１
０をそれぞれ受光してカンチレバー２ｂ、３ｂの振れ、
すなわち探針３ａ、３ｂの高さ位置であるｚ位置として
検出する（光てこ）、位置感応型の光センサである分割
光ディテクタ５ａ、５ｂと、ローパスフィルタ１５と、
分割光ディテクタ５ａから出力されローパスフィルタ１
５を介した信号と比較信号との差に基づいた信号をピエ
ゾ素子９に入力する増幅器７ａと、分割光ディテクタ５
ｂから出力された信号が入力される増幅器７ｂと、ＸＹ
駆動部１１へ走査信号を出力し、かつ、増幅器７ｂから
出力された信号が入力され、この入力信号を基に、観測
した試料８の表面形状の画像処理を行うコンピュータ１
２とを有する。The scanning probe microscope of the present embodiment comprises a light source 6 for irradiating the cantilevers 2b and 3b with a laser beam 10, and a laser beam 1 reflected by the cantilevers 2b and 3b.
0, respectively, the deflection of the cantilevers 2b, 3b,
That is, the split optical detectors 5a and 5b, which are position-sensitive optical sensors, which are detected as the z position that is the height position of the probes 3a and 3b (optical lever), the low-pass filter 15,
Low-pass filter 1 output from split optical detector 5a
An amplifier 7a for inputting a signal based on a difference between the signal via the reference signal 5 and the comparison signal to the piezo element 9;
b, an amplifier 7b to which the signal output from the
A computer 1 that outputs a scanning signal to the driving unit 11 and receives a signal output from the amplifier 7b, and performs image processing of the observed surface shape of the sample 8 based on the input signal.
And 2.

【００２２】なお、上述の位置決め部１と、分割光ディ
テクタ５ａ、５ｂと、ＸＹ駆動部１１とは不図示の固定
部に搭載されているものであり、また、位置決め部１の
ｚ方向への移動は、試料８と探針３ｂとの初期位置を規
定する際になされるものである。The above-described positioning unit 1, the divided light detectors 5a and 5b, and the XY driving unit 11 are mounted on a fixed unit (not shown). The movement is performed when defining an initial position between the sample 8 and the probe 3b.

【００２３】次に、上記構成を有する本実施形態の走査
探針顕微鏡の動作に関して説明する。Next, the operation of the scanning probe microscope of the present embodiment having the above configuration will be described.

【００２４】探針３ａが試料８の表面に接触しながら相
対走査する際、探針３ａと試料８との間の相互作用を定
常に保つため、カンチレバー２ａで反射したレーザ光１
０を受光した分割光ディテクタ５ａは、探針３ａのｚ位
置信号ＶCをローパスフィルタ１５を介して増幅器７ａ
へと出力する。増幅器７ａには、ｚ位置信号ＶC以外
に、比較信号が入力され、これらを基にピエゾ素子９に
対して、ピエゾ素子９をｚ方向に駆動させるピエゾ素子
信号ＶPを負帰還させる。When the probe 3a performs relative scanning while contacting the surface of the sample 8, the laser beam 1 reflected by the cantilever 2a is used to keep the interaction between the probe 3a and the sample 8 steady.
Divided photodetector 5a which receives 0, the z position signal V C of the probe 3a through a low pass filter 15 amplifier 7a
Output to The amplifier 7a, in addition to z position signal V C, the input comparison signal, these against the piezoelectric element 9 based on, is negatively fed back to the piezoelectric element signals V P for driving the piezoelectric element 9 in the z-direction.

【００２５】このため、比較信号の設定値を種々変化さ
せることにより帰還が成立している状態で探針３ａのｚ
位置に関わるｚ位置信号Ｖcとピエゾ素子９の伸縮に関
わるピエゾ素子信号Ｖpの関係を従来のように決定可能
ではある。ちなみに、図２はその１例を示したグラフで
あるが、この場合、ｚ位置信号Ｖcとピエゾ素子信号Ｖp
との間に履歴に由来する２値性が存在する。この例では
約４０nmのｚ位置の変化に対し約２nmほどの履歴があ
る。そこで、本実施形態では、試料８の表面形状の決定
に、ｚ位置信号Ｖcとピエゾ素子信号Ｖpとの関係は用い
ない。For this reason, when the feedback is established by variously changing the set value of the comparison signal, the z
The relationship between the z position signal Vc relating to the position and the piezo element signal Vp relating to the expansion and contraction of the piezo element 9 can be determined as in the prior art. By the way, FIG. 2 is a graph showing one example. In this case, the z position signal Vc and the piezo element signal Vp
There exists a binary property derived from the history between. In this example, there is a history of about 2 nm for a change in the z position of about 40 nm. Therefore, in the present embodiment, the relationship between the z position signal Vc and the piezo element signal Vp is not used for determining the surface shape of the sample 8.

【００２６】一方、本実施形態の表面形状の決定のため
の基となる、比較信号入力の設定値を変えた探針３ａか
らのｚ位置信号Ｖcと、探針３ｂからのｚ位置信号ＶZと
の関係を示したグラフを図３に示す。この探針３ｂから
のｚ位置信号ＶZは、探針３ｂが可動基板４に接触する
ことで測定がなされる可動基板４のｚ位置、すなわち、
上述の負帰還により伸縮したピエゾ素子９の変位に関す
る信号である。図３に示すように、図２で見られた履歴
による２値性は存在せず、ｚ位置信号Ｖcとｚ位置信号
ＶZは互いに１値性を保っていることがわかる。On the other hand, the z-position signal Vc from the probe 3a and the z-position signal V Z from the probe 3b whose setting value of the comparison signal is changed are the basis for determining the surface shape in the present embodiment. FIG. 3 is a graph showing the relationship between the two. The z position signal V Z from the probe 3b is the z position of the movable substrate 4 at which the measurement is performed when the probe 3b contacts the movable substrate 4, that is,
This is a signal relating to the displacement of the piezo element 9 which has expanded and contracted due to the negative feedback described above. As shown in FIG. 3, 2 value due seen history in Figure 2 does not exist, z position signal Vc and the z position signal V Z It can be seen that is kept 1 values with each other.

【００２７】本実施形態では、試料８の表面形状の決定
に、試料８と探針３ａとの相互作用力である探針３ａが
試料８の表面を押す力を一定にさせるためのピエゾ素子
９への負帰還信号であるピエゾ素子信号Ｖpを用いず、
ピエゾ素子９の伸縮量を表す探針３ｂからのｚ位置信号
ＶZを用いている。In the present embodiment, in determining the surface shape of the sample 8, a piezo element 9 for maintaining a constant force of the probe 3a pressing the surface of the sample 8 as an interaction force between the sample 8 and the probe 3a is used. Without using the piezo element signal Vp which is a negative feedback signal to
It is used z position signal V Z from probe 3b representing the amount of expansion and contraction of the piezoelectric element 9.

【００２８】以上、本実施形態によれば、試料８の表面
を探針３ａにより走査して探針３ａからのｚ位置信号Ｖ
cを収集しながら、同時に探針３ｂからのｚ位置信号ＶZ
を収集することで試料８の表面形状を観察する。このた
め、ピエゾ素子９の伸縮の履歴によるピエゾ素子信号Ｖ
pの多値性を排除するとともに、多値性に由来する誤差
を回避でき、試料８の表面形状を高精度に観察できる。As described above, according to the present embodiment, the surface of the sample 8 is scanned by the probe 3a and the z position signal V from the probe 3a is scanned.
While collecting c, simultaneously the z position signal V Z from the probe 3b
To observe the surface shape of the sample 8. Therefore, the piezo element signal V based on the expansion and contraction history of the piezo element 9 is obtained.
In addition to eliminating the multi-value of p, errors due to the multi-value can be avoided, and the surface shape of the sample 8 can be observed with high accuracy.

【００２９】また、試料８に対する光てこの構成がカン
チレバー２ａ、探針３ａおよび分割光ディテクタ５ａで
構成され、可動基板４に対する光てこもカンチレバー２
ｂ、探針３ｂおよび分割光ディテクタ５ｂと、基本的に
同じ構造の部品で構成されるとともに、光源６を供用し
たことで装置の構成の簡略化を図ることができる。The optical lever for the sample 8 is composed of the cantilever 2a, the probe 3a and the split optical detector 5a.
b, the probe 3b, and the split light detector 5b are basically composed of the same components, and the use of the light source 6 simplifies the configuration of the device.

【００３０】（第２の実施形態）次に、図４に本実施形
態の走査探針顕微鏡の帰還ループに関わる部分のブロッ
ク図を示す。(Second Embodiment) Next, FIG. 4 shows a block diagram of a part related to a feedback loop of the scanning probe microscope of this embodiment.

【００３１】基本的な共振周波数が２ｋＨｚのピエゾ素
子１０９ａの下端に取付けられた可動基板１０４の下面
に、さらに、発振器１１６により３００ｋＨｚ程度の正
弦波電圧で駆動されるピエゾ素子１０９ｂが取付けられ
ている。このピエゾ素子１０９ｂには、先端に探針１０
３ａを有する共振周波数が３００ｋＨｚ程度のカンチレ
バー１０２ａが取付けられている。A piezo element 109b driven by an oscillator 116 at a sine wave voltage of about 300 kHz is further attached to the lower surface of the movable substrate 104 attached to the lower end of the piezo element 109a having a basic resonance frequency of 2 kHz. . This piezo element 109b has a probe 10 at its tip.
The cantilever 102a having the resonance frequency 3a and having a resonance frequency of about 300 kHz is mounted.

【００３２】また、回路系には、分割光ディテクタ１０
５ａからの正弦波電圧の信号を振幅信号に変換するロッ
クイン回路１１４を有する。The circuit system includes the split photodetector 10
It has a lock-in circuit 114 for converting the signal of the sine wave voltage from 5a into an amplitude signal.

【００３３】上述の構成以外は基本的に第１の実施形態
と同様であるため、詳細の説明は省略する。Since the configuration other than the above is basically the same as that of the first embodiment, detailed description will be omitted.

【００３４】本実施形態も、カンチレバー１０２ｂ、１
０３ｂで反射されたレーザ光１１０をそれぞれ分割光デ
ィテクタ１０５ａ、１０５ｂにより受光してカンチレバ
ー１０２ｂ、１０３ｂの振れ、すなわち探針１０３ａ、
１０３ｂの高さ位置であるｚ位置として検出する光てこ
を構成している。なお、本実施形態の場合、分割光ディ
テクタ１０５ａからは、３００ｋＨｚ程度の正弦波電圧
の信号が出力され、この信号はロックイン回路１１４に
より振幅信号に変換され、さらに、４００Ｈｚに遮断周
波数を持つ低域濾波器であるローパスフィルタ１１５を
経た信号をｚ位置信号Ｖcとして増幅器１０７ａに入力
される。In this embodiment, the cantilevers 102b, 1
The laser beam 110 reflected by the laser beam 03b is received by the split light detectors 105a and 105b, respectively, and the deflection of the cantilevers 102b and 103b, that is, the probe 103a,
An optical lever detected as a z position which is the height position of 103b is configured. In the case of the present embodiment, a signal of a sine wave voltage of about 300 kHz is output from the split photodetector 105a, this signal is converted into an amplitude signal by the lock-in circuit 114, and a low-frequency signal having a cutoff frequency of 400 Hz. The signal that has passed through the low-pass filter 115, which is a bandpass filter, is input to the amplifier 107a as the z position signal Vc.

【００３５】ピエゾ素子１０９ａへの負帰還信号は、第
１の実施形態と同様に、増幅器１０７へと入力された比
較信号とｚ位置信号Ｖcとの差を増幅したピエゾ素子信
号Ｖpが与えられる。As the negative feedback signal to the piezo element 109a, a piezo element signal Vp obtained by amplifying the difference between the comparison signal input to the amplifier 107 and the z position signal Vc is provided as in the first embodiment.

【００３６】また、試料１０８の表面形状の決定も、第
１の実施形態と同様に、ピエゾ素子信号Ｖpを用いず、
交流的に振動する探針１０３ａからの信号であるｚ位置
信号Ｖcと、ピエゾ素子１０９ａの伸縮量を表す探針１
０３ｂからのｚ位置信号ＶZとを用いている。In the same manner as in the first embodiment, the surface shape of the sample 108 is determined without using the piezo element signal Vp.
The z position signal Vc, which is a signal from the probe 103a vibrating in an alternating current, and the probe 1 indicating the amount of expansion and contraction of the piezo element 109a.
And using the z position signal V Z from 03b.

【００３７】以上により、本実施形態は、第１の実施形
態と同様に、ピエゾ素子１０９ａの伸縮の履歴によるピ
エゾ素子信号Ｖpの多値性を排除するとともに、多値性
に由来する誤差を回避でき、試料１０８の表面形状を高
精度に観察できる。As described above, in the present embodiment, as in the first embodiment, the multi-value of the piezo element signal Vp due to the expansion and contraction history of the piezo element 109a is eliminated, and the error due to the multi-value is avoided. Thus, the surface shape of the sample 108 can be observed with high precision.

【００３８】また、本実施形態は、第１の実施形態と同
様に、光てこに関する基本構成を同じとしたことで装置
の構成の簡略化が図れる。Further, in the present embodiment, as in the first embodiment, the basic configuration of the optical lever is the same, so that the configuration of the device can be simplified.

【００３９】さらに、本実施形態は探針１０３ａを振動
させることで、探針１０３ａの試料１０８への引っ掛
り、引っ掛かり後の探針１０３ａの跳びによる表面形状
再現の不正確さ、試料１０８に対する探針１０３ａの引
きずりによる試料１０８あるいは探針１０３ａの損傷等
を防ぐことができる。Further, in this embodiment, by vibrating the probe 103a, the probe 103a is caught on the sample 108, the inaccuracy of the surface shape reproduction due to the jump of the probe 103a after being caught, and the probe 108 Damage to the sample 108 or the probe 103a due to drag of the needle 103a can be prevented.

【００４０】（第３の実施形態）次に、図５に本実施形
態の走査探針顕微鏡の帰還ループに関わる部分のブロッ
ク図を示す。(Third Embodiment) Next, FIG. 5 is a block diagram of a part related to a feedback loop of the scanning probe microscope of the present embodiment.

【００４１】本実施形態の走査探針顕微鏡では、ロック
イン回路２１４からの出力が、８０Ｈｚに遮断周波数を
持つ低域濾波器である第１のローパスフィルタ２１５ａ
を介してｚ位置信号Ｖcとして出力される点、およびｚ
位置信号Ｖcと探針２０３ｂからのｚ位置信号ＶZとが合
成器２２０で合成されてから、コンピュータ２１２へと
入力される点が第２の実施形態と異なる。それ以外の構
成は、基本的に第２の実施形態と同様であるため詳細の
説明は省略する。In the scanning probe microscope of this embodiment, the output from the lock-in circuit 214 is the first low-pass filter 215a which is a low-pass filter having a cutoff frequency of 80 Hz.
Output as a z position signal Vc via
From the z position signal V Z from the position signal Vc and the probe 203b are combined in the combiner 220, the point to be inputted to the computer 212 is different from the second embodiment. The other configuration is basically the same as that of the second embodiment, and a detailed description thereof will be omitted.

【００４２】上述の構成により画像化された探針２０３
ｂからのピエゾ素子２０９ａの伸縮信号は、交流的に振
動する探針２０３ａと試料２０８の表面との相互作用に
関わる高さ情報の低周波数成分、すなわち探針２０３ａ
の走査にともないゆっくりと変化する表面の高さ情報で
ある。また探針２０３ａの振幅信号化されたｚ位置信号
Ｖcは主として高周波数成分からなり、ｚ位置信号Ｖcが
探針２０３ｂからの信号と関係づけられていることか
ら、走査にともない速く変化する試料２０８の表面の高
さ情報に変換できる。これらｚ位置信号Ｖcと探針２０
３ｂからの信号とを高さ情報として、合成器２２０で合
成することにより試料２０８の表面の凹凸像が画像化さ
れる。このため、本実施形態の走査探針顕微鏡は、一画
面（面積：約５μｍ×５μｍ）を１０秒程度の高速で取
得することが可能となる。The probe 203 imaged by the above configuration
The low-frequency component of the height information related to the interaction between the probe 203a and the surface of the sample 208 that vibrate in an alternating current, that is, the probe 203a
Is the height information of the surface that changes slowly with the scanning of. The z-position signal Vc, which is converted into an amplitude signal of the probe 203a, is mainly composed of high-frequency components. Can be converted into surface height information. The z position signal Vc and the probe 20
By combining the signal from 3b with the height information as the height information by the synthesizer 220, an uneven image of the surface of the sample 208 is imaged. Therefore, the scanning probe microscope of the present embodiment can acquire one screen (area: about 5 μm × 5 μm) at a high speed of about 10 seconds.

【００４３】以上、本実施形態も第１および第２の実施
形態と同様に、ピエゾ素子２０９ａの伸縮の履歴による
ピエゾ素子信号Ｖpの多値性を排除するとともに、多値
性に由来する誤差を回避でき、試料２０８の表面形状を
高精度に観察できる。As described above, in the present embodiment, similarly to the first and second embodiments, the multi-valued characteristic of the piezo element signal Vp due to the expansion and contraction history of the piezo element 209a is eliminated, and the error due to the multi-valued characteristic is eliminated. Thus, the surface shape of the sample 208 can be observed with high accuracy.

【００４４】また、本実施形態も第１および第２の実施
形態と同様に、光てこに関する基本構成を同じとしたこ
とで装置の構成の簡略化が図れる。Also, in this embodiment, as in the first and second embodiments, the basic configuration relating to the optical lever is the same, so that the configuration of the device can be simplified.

【００４５】さらに、高速性と、ピエゾ素子の履歴など
の問題を除いた高精度とを兼ね備えた高速ＡＦＭ法であ
る本実施形態の走査探針顕微鏡は、特に半導体素子の微
細化が、例えば10μｍ角ほどの領域においてサブミクロ
ンから数十ナノメートルの長さスケールの人工物である
急峻なトレンチ構造あるいは微細配線を問題とする段階
にあることから、試作デバイスの評価方法ないしは装置
生産ラインにおける抜き取り検査のような表面評価に関
わる要請に対し果たす役割は大きい。Furthermore, the scanning probe microscope according to the present embodiment, which is a high-speed AFM method having both high-speed performance and high accuracy excluding problems such as the history of the piezo element, has a semiconductor element of, for example, 10 μm At the stage where the problem is a steep trench structure or fine wiring, which is an artifact on the sub-micron to tens of nanometer length scale in a region of about a corner, an evaluation method of a prototype device or a sampling inspection in an equipment production line The role played by such requests for surface evaluation is significant.

【００４６】[0046]

【発明の効果】以上説明したように本発明によれば、試
料表面の観察の際には、走査用探針と試料との相互作用
力が一定となるようにするために圧電素子に与える信号
ではなく、圧電素子の伸縮量そのものを利用することが
できるので、圧電素子へ与えられる信号に含まれる多値
性を回避し、試料表面を高精度に観察することができ
る。As described above, according to the present invention, when observing the surface of a sample, a signal applied to the piezoelectric element to maintain a constant interaction force between the scanning probe and the sample is obtained. Instead, since the amount of expansion and contraction of the piezoelectric element itself can be used, it is possible to avoid multivaluedness included in a signal given to the piezoelectric element and observe the sample surface with high accuracy.

【００４７】また、伸縮量検知手段を、カンチレバーに
設けられた変位検知用探針を含むものとすることで、圧
電素子の伸縮量を簡単な構成でかつ容易に検知すること
ができる。この場合特に、走査用探針を、走査用探針が
設けられたカンチレバーの略共振周波数で励振させるこ
とで、走査用探針と試料との相対走査の際の走査用探針
の引っ掛かり、跳び、損傷等を防止することができる。
さらに、走査用探針の変位量と変位検知用探針の変位量
とを合成させることで、試料表面を短時間で観察するこ
とができる。In addition, since the expansion / contraction amount detecting means includes a displacement detection probe provided on the cantilever, the expansion / contraction amount of the piezoelectric element can be easily detected with a simple configuration. In this case, in particular, the scanning probe is excited at substantially the resonance frequency of the cantilever provided with the scanning probe, whereby the scanning probe is caught or jumped during relative scanning between the scanning probe and the sample. , Damage and the like can be prevented.
Further, by synthesizing the displacement amount of the scanning probe and the displacement amount of the displacement detecting probe, the sample surface can be observed in a short time.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の第１の実施形態の走査探針顕微鏡の帰
還ループに関わる部分のブロック図である。FIG. 1 is a block diagram of a part related to a feedback loop of a scanning probe microscope according to a first embodiment of the present invention.

【図２】本発明の第１の実施形態の走査探針顕微鏡にお
ける、探針３ａの信号ＶCとピエゾ信号ＶPとの関係を示
すグラフである。In the scanning probe microscope of the first embodiment of the present invention; FIG is a graph showing the relationship between the signal V C and the piezoelectric signal V P of the probe 3a.

【図３】本発明の第１の実施形態の走査探針顕微鏡にお
ける、探針３ａの信号ＶCとピエゾ信号ＶPとの関係を示
すグラフである。In the scanning probe microscope of the first embodiment of the present invention; FIG is a graph showing the relationship between the signal V C and the piezoelectric signal V P of the probe 3a.

【図４】本発明の第２の実施形態の走査探針顕微鏡の帰
還ループに関わる部分のブロック図である。FIG. 4 is a block diagram of a part related to a feedback loop of a scanning probe microscope according to a second embodiment of the present invention.

【図５】本発明の第３の実施形態の走査探針顕微鏡の帰
還ループに関わる部分のブロック図である。FIG. 5 is a block diagram of a part related to a feedback loop of a scanning probe microscope according to a third embodiment of the present invention.

【図６】従来のＡＦＭ法の帰還ループに関わる部分のブ
ロック図である。FIG. 6 is a block diagram of a part related to a feedback loop of a conventional AFM method.

【符号の説明】[Explanation of symbols]

１、２０１ 位置決め部 ２ａ、２ｂ、１０２ａ、１０２ｂ カンチレバー ３ａ、３ｂ、１０３ａ、１０３ｂ、２０３ａ、２０３ｂ
探針 ４、１０４、２０４ 可動基板 ５ａ、５ｂ、１０５ａ、１０５ｂ 分割光ディテクタ ６ 光源 ７、１０７ａ 増幅器 ８、１０８、２０８ 試料 ９、１０９ａ、１０９ｂ、２０９ａ、２０９ｂ ピエ
ゾ素子 １０ レーザ光 １１ ＸＹ駆動部 １２ コンピュータ １１４、２１４ ロックイン回路 １５、１１５ ローパスフィルタ ２１５ａ 第１のローパスフィルタ ２２０ 合成回路1, 201 Positioning part 2a, 2b, 102a, 102b Cantilever 3a, 3b, 103a, 103b, 203a, 203b
Probe 4, 104, 204 Movable substrate 5a, 5b, 105a, 105b Split light detector 6 Light source 7, 107a Amplifier 8, 108, 208 Sample 9, 109a, 109b, 209a, 209b Piezo element 10 Laser beam 11 XY drive unit 12 Computer 114, 214 Lock-in circuit 15, 115 Low-pass filter 215a First low-pass filter 220 Synthesis circuit

Claims (9)

【特許請求の範囲】[Claims] 【請求項１】 試料の表面に対向させてカンチレバーの
自由端に設けられた走査用探針と、 前記走査用探針と前記試料とを相対走査させる走査手段
と、 前記カンチレバーの固定端を支持し、前記走査用探針を
前記試料の表面に対して略垂直な方向に移動させるよう
に伸縮する圧電素子と、 前記走査用探針と前記試料との相互作用力が一定となる
ように前記圧電素子を伸縮させる帰還信号を与える制御
手段と、 前記圧電素子の伸縮量を検知する伸縮量検知手段と、 前記伸縮量検知手段により検知された前記圧電素子の伸
縮量を、前記走査用探針の前記試料の表面に対して略垂
直な方向への移動量として出力する出力手段とを有する
走査探針顕微鏡。1. A scanning probe provided at a free end of a cantilever so as to face a surface of a sample, scanning means for relatively scanning the scanning probe and the sample, and supporting a fixed end of the cantilever. A piezoelectric element that expands and contracts so as to move the scanning probe in a direction substantially perpendicular to the surface of the sample, and that the interaction force between the scanning probe and the sample is constant. Control means for providing a feedback signal for expanding and contracting the piezoelectric element, expansion and contraction amount detecting means for detecting the amount of expansion and contraction of the piezoelectric element, and the amount of expansion and contraction of the piezoelectric element detected by the expansion and contraction amount detecting means, Output means for outputting the amount of movement in a direction substantially perpendicular to the surface of the sample. 【請求項２】 前記圧電素子はその伸縮方向の一端が支
持部材によって支持されるとともに、他端に可動基板を
介して前記カンチレバーが支持され、 前記伸縮量検知手段は、前記圧電素子の伸縮による前記
可動基板の変位量を検知する、前記支持部材に支持され
たカンチレバーの自由端に設けられた変位検知用探針を
有する、請求項１に記載の走査探針顕微鏡。2. The piezoelectric element has one end in the direction of expansion and contraction supported by a support member, and the other end supported by the cantilever via a movable substrate, wherein the expansion and contraction amount detecting means is provided by the expansion and contraction of the piezoelectric element. The scanning probe microscope according to claim 1, further comprising: a displacement detection probe provided at a free end of a cantilever supported by the support member, for detecting a displacement amount of the movable substrate. 【請求項３】 前記走査用探針が設けられたカンチレバ
ー及び前記変位検知用探針が設けられたカンチレバーに
レーザ光を照射する光源と、 前記走査用探針が設けられたカンチレバーに照射されて
反射した前記レーザ光を受光し、前記走査用探針の前記
試料の表面に対して略垂直な方向への移動量として出力
する変位量出力手段とを有し、 前記制御手段は、前記変位量出力手段からの出力に基づ
いて前記圧電素子に前記帰還信号を与え、前記出力手段
は、前記変位検知用探針が設けられたカンチレバーに照
射されて反射した前記レーザ光を受光し、前記可動基板
の変位に基づく前記変位検知用探針の変位量を前記圧電
素子の伸縮量とする、請求項２に記載の走査探針顕微
鏡。3. A light source that irradiates a cantilever provided with the scanning probe and a cantilever provided with the displacement detection probe with laser light, and a light source that irradiates a cantilever provided with the scanning probe. Displacement amount output means for receiving the reflected laser light, and outputting as a movement amount of the scanning probe in a direction substantially perpendicular to the surface of the sample, the control means comprising: Giving the feedback signal to the piezoelectric element based on the output from the output unit, the output unit receives the laser beam irradiated and reflected on the cantilever provided with the displacement detection probe, and the movable substrate 3. The scanning probe microscope according to claim 2, wherein a displacement amount of the displacement detection probe based on the displacement of the piezoelectric element is defined as a displacement amount of the piezoelectric element. 4. 【請求項４】 前記走査用探針を前記走査用探針が設け
られたカンチレバーの略共振周波数で励振させる発振手
段を有する請求項２または３に記載の走査探針顕微鏡。4. The scanning probe microscope according to claim 2, further comprising an oscillating unit that excites the scanning probe at a substantially resonant frequency of a cantilever provided with the scanning probe. 【請求項５】 前記走査用探針を前記走査用探針が設け
られたカンチレバーの略共振周波数で励振させる発振手
段と、 前記出力手段からの出力と前記変位量出力手段からの出
力とを合成させる合成手段とを有する請求項３に記載の
走査探針顕微鏡。5. An oscillating means for exciting said scanning probe at a substantially resonant frequency of a cantilever provided with said scanning probe, and combining an output from said output means and an output from said displacement output means. The scanning probe microscope according to claim 3, further comprising a synthesizing unit for causing the scanning probe microscope to perform the synthesis. 【請求項６】 カンチレバーの自由端に設けられた走査
用探針と、一端が支持部材に支持され他端に前記カンチ
レバーの固定端が支持された圧電素子と、前記圧電素子
の伸縮量を検知する伸縮量検知手段とを有するヘッドを
用意する工程と、 試料を前記走査用探針と接触させて対向配置する工程
と、 前記走査用探針と前記試料とを相対走査する工程と、 前記走査用探針と前記試料との相互作用力が一定となる
ように前記圧電素子を伸縮させる工程と、 前記伸縮量検知手段により検知された前記圧電素子の伸
縮量を、前記走査用探針の前記試料の表面に対して略垂
直な方向への移動量として出力する工程とを有する、試
料観察方法。6. A scanning probe provided at a free end of a cantilever, a piezoelectric element having one end supported by a support member and a fixed end of the cantilever supported at the other end, and detecting an amount of expansion and contraction of the piezoelectric element. Preparing a head having expansion / contraction amount detecting means for performing the following steps: a step of bringing a sample into contact with the scanning probe and disposing the sample in opposition; a step of performing relative scanning between the scanning probe and the sample; Expanding and contracting the piezoelectric element so that the interaction force between the probe for use and the sample becomes constant, and the amount of expansion and contraction of the piezoelectric element detected by the expansion and contraction amount detecting means, Outputting the amount of movement in a direction substantially perpendicular to the surface of the sample. 【請求項７】 前記ヘッドは、前記カンチレバーが可動
基板を介して前記圧電素子に支持されるとともに、前記
伸縮量検知手段は、前記支持部材に支持されたカンチレ
バーの自由端に設けられた変位検知用探針を有し、 前記圧電素子の伸縮量を前記走査用探針の移動量として
出力する工程は、前記圧電素子の伸縮による前記可動基
板の変位に基づく前記変位検知用探針の変位量を検知す
る工程を有する、請求項６に記載の試料観察方法。7. The head, wherein the cantilever is supported by the piezoelectric element via a movable substrate, and the expansion / contraction amount detecting means is a displacement detection device provided at a free end of the cantilever supported by the support member. Outputting the amount of expansion and contraction of the piezoelectric element as the amount of movement of the scanning probe, the amount of displacement of the displacement detection probe based on the displacement of the movable substrate due to the expansion and contraction of the piezoelectric element. The method for observing a sample according to claim 6, further comprising: 【請求項８】 前記走査用探針を前記走査用探針が設け
られたカンチレバーの略共振周波数で励振させる工程を
有する、請求項７に記載の試料観察方法。8. The sample observation method according to claim 7, further comprising a step of exciting the scanning probe at a substantially resonant frequency of a cantilever provided with the scanning probe. 【請求項９】 前記走査用探針の変位量と前記変位検知
用探針の変位量とを合成する工程を有する請求項８に記
載の試料観察方法。9. The sample observation method according to claim 8, further comprising a step of combining the displacement of the scanning probe and the displacement of the displacement detecting probe.
JP11027461A 1998-11-27 1999-02-04 Scanning probe microscope, and method for observating sample Pending JP2000227436A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11027461A JP2000227436A (en) 1999-02-04 1999-02-04 Scanning probe microscope, and method for observating sample
DE19956725A DE19956725A1 (en) 1998-11-27 1999-11-25 Scanning probe microscope for imaging sample surface; has feedback loop to generate drive signal for controlling probe and imaging device that uses probe signal, drive signal and relation between two signals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11027461A JP2000227436A (en) 1999-02-04 1999-02-04 Scanning probe microscope, and method for observating sample

Publications (1)

Publication Number Publication Date
JP2000227436A true JP2000227436A (en) 2000-08-15

Family

ID=12221765

Family Applications (1)

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Country Status (1)

Country Link
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