JP2000219519A - Porous glass preform sintering device - Google Patents
Porous glass preform sintering deviceInfo
- Publication number
- JP2000219519A JP2000219519A JP1925999A JP1925999A JP2000219519A JP 2000219519 A JP2000219519 A JP 2000219519A JP 1925999 A JP1925999 A JP 1925999A JP 1925999 A JP1925999 A JP 1925999A JP 2000219519 A JP2000219519 A JP 2000219519A
- Authority
- JP
- Japan
- Prior art keywords
- porous glass
- sintering
- base material
- glass preform
- heat shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
- C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Thermal Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光ファイバの原材
となる多孔質ガラス母材を脱水および透明ガラス化する
ため焼結する際に用いられる装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus used for sintering a porous glass base material as a raw material of an optical fiber for dehydration and vitrification.
【０００２】[0002]
【従来の技術】光ファイバは、石英ガラスを主成分とす
る多孔質ガラス母材を原材としている。多孔質ガラス母
材を焼結し、脱水および透明ガラス化した光ファイバ母
材を所定径に延伸したものは、光ファイバプリフォーム
と呼ばれ、これを線引機で線引きすると光ファイバが得
られる。2. Description of the Related Art An optical fiber is made of a porous glass base material mainly composed of quartz glass. An optical fiber preform obtained by sintering a porous glass preform, dehydrating and vitrifying it to a predetermined diameter is called an optical fiber preform, and when this is drawn by a drawing machine, an optical fiber is obtained. .
【０００３】この多孔質ガラス母材は、円柱状の出発材
にガラス微粒子を堆積させたものであり、中央部が直胴
体で両端部がコーン体の形状である。焼結の際は、炉心
管の周囲に加熱炉を有する焼結装置を用いる。多孔質ガ
ラス母材を軸方向に回転しながら、炉心管に挿入し、加
熱炉の熱源により加熱して焼結する。このとき、従来の
焼結装置では、多孔質ガラス母材の両端のコーン体から
その上下方向に、輻射熱が大きく逃散していた。そのた
め両端近傍では焼結が不充分となったり、焼結にムラが
生じたりしていた。また、炉心管内に自然対流が発生し
て圧変動が制御できなくなり、水分が炉心管内に侵入し
て品質を低下させ、焼結工程の歩留まりが悪かった。さ
らに、多孔質ガラス母材の軸芯と炉心管の軸芯は通常一
致しないため、多孔質ガラス母材の外周と炉心管内壁と
の間隔に数ｍｍの広狭が生じて、輻射熱の逃散が均一に
ならず、焼結後の光ファイバ母材は両端付近で大きく偏
芯していた。このような光ファイバ母材から光ファイバ
を製造したとき、光伝送特性が悪い。The porous glass base material is obtained by depositing glass fine particles on a cylindrical starting material, and has a straight body at the center and a cone at both ends. At the time of sintering, a sintering apparatus having a heating furnace around the furnace tube is used. The porous glass base material is inserted into the furnace tube while rotating in the axial direction, and is heated and sintered by the heat source of the heating furnace. At this time, in the conventional sintering apparatus, radiant heat has largely escaped from the cone bodies at both ends of the porous glass base material in the vertical direction. As a result, sintering became insufficient or unevenness occurred in the vicinity of both ends. In addition, natural convection occurs in the furnace tube, and pressure fluctuations cannot be controlled, and water penetrates into the furnace tube to reduce the quality, and the yield of the sintering process is poor. Furthermore, since the axis of the porous glass preform and the axis of the furnace tube usually do not coincide, the gap between the outer periphery of the porous glass preform and the inner wall of the furnace tube is widened or narrowed by several mm, and the radiation of radiant heat is uniform. However, the optical fiber preform after sintering was largely eccentric near both ends. When an optical fiber is manufactured from such an optical fiber preform, the optical transmission characteristics are poor.
【０００４】[0004]
【発明が解決しようとする課題】本発明は前記の課題を
解決するためなされたもので、多孔質ガラス母材を焼結
する際、輻射熱の逃散が制御され、均質に焼結できる装
置を提供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and provides an apparatus capable of controlling the dissipation of radiant heat and sintering uniformly when sintering a porous glass base material. The purpose is to do.
【０００５】[0005]
【課題を解決するための手段】前記の目的を達成するた
めになされた本発明の多孔質ガラス母材焼結装置は、実
施例に対応する図面により説明すると以下のとおりであ
る。A porous glass preform sintering apparatus according to the present invention, which has been made to achieve the above object, will be described below with reference to the drawings corresponding to the embodiments.
【０００６】多孔質ガラス母材焼結装置１は、図１に示
すとおり、出発棒１２にガラス微粒子を堆積させた中央
部が直胴体で両端がコーン体の多孔質ガラス母材１１を
挿入した炉心管６と、多孔質ガラス母材１１が軸方向に
回転しつつ降下して焼結される加熱炉５とを有し、多孔
質ガラス母材１１の上方に出発棒１２の貫入した上部熱
遮蔽具７、および（または）炉心管６に固定され多孔質
ガラス母材１１の焼結完了部位１６の貫入した下部熱遮
蔽具３が設置されている。上部熱遮蔽具７および下部熱
遮蔽具３により、輻射熱の逃散が制御され、炉心管６の
温度ムラや自然対流が抑制される。As shown in FIG. 1, in a porous glass preform sintering apparatus 1, a porous glass preform 11 having a straight body at the center and a cone at both ends inserted with glass particles deposited on a starting rod 12 is inserted. A furnace core tube 6 and a heating furnace 5 in which a porous glass preform 11 descends while rotating in an axial direction and is sintered, and an upper heat in which a starting rod 12 penetrates above the porous glass preform 11 is provided. The lower heat shield 3 fixed to the shield 7 and / or the furnace tube 6 and penetrating the sintering completed portion 16 of the porous glass preform 11 is provided. The upper heat shield 7 and the lower heat shield 3 control the radiation of the radiant heat, thereby suppressing the temperature unevenness and natural convection of the furnace tube 6.
【０００７】上部熱遮蔽具７が、コーン体１３に乗って
いることで好適に実施される。[0007] It is preferable that the upper heat shield 7 is mounted on the cone body 13.
【０００８】図２に示すように、出発棒１２が肉厚の突
起１８を有し、上部熱遮蔽具７が突起１８に乗っていて
もよい。As shown in FIG. 2, the starting rod 12 may have a thick projection 18 and the upper heat shield 7 may ride on the projection 18.
【０００９】上部熱遮蔽具７および下部熱遮蔽具３は、
石英ガラスからなることが好ましい。The upper heat shield 7 and the lower heat shield 3 are
It is preferably made of quartz glass.
【００１０】上部熱遮蔽具７が図３、図４に、下部熱遮
蔽具３が図５に、それぞれ示されているように、多層構
造であってもよい。多層構造であると熱遮蔽効果が高
い。As shown in FIGS. 3 and 4 for the upper heat shield 7 and in FIG. 5, the lower heat shield 3 may have a multilayer structure. The multilayer structure has a high heat shielding effect.
【００１１】上部および下部熱遮蔽具の高さＬは、図
３、図５に示すように１０ｍｍ〜５０ｍｍであることが
好ましい。１０ｍｍより小さいと、炉心管６内の温度ム
ラや自然対流の抑制が不充分となってしまう。The height L of the upper and lower heat shields is preferably 10 mm to 50 mm as shown in FIGS. If the diameter is smaller than 10 mm, the suppression of temperature unevenness and natural convection in the core tube 6 becomes insufficient.
【００１２】多孔質ガラス母材焼結装置１は、炉心管６
の下端に不活性ガス導入管２を有していることが好まし
い。不活性ガスが導入されると、炉心管６内の内圧が外
圧よりも高くなるため、炉心管６内の圧変動が制御さ
れ、水分が炉心管６の外から侵入することを防止でき
る。不活性ガスはヘリウムガス、窒素ガス、アルゴンガ
スが挙げられる。The porous glass preform sintering apparatus 1 includes a furnace tube 6.
It is preferable to have an inert gas introduction pipe 2 at the lower end. When the inert gas is introduced, the internal pressure in the furnace tube 6 becomes higher than the external pressure, so that the pressure fluctuation in the furnace tube 6 is controlled, and water can be prevented from entering from outside the furnace tube 6. The inert gas includes helium gas, nitrogen gas, and argon gas.
【００１３】熱遮蔽具３や７と、炉心管６の内壁との間
隔が、０．１ｍｍ以上１０ｍｍ以下であることが好まし
い。この間隔が、０．１ｍｍ未満であると多孔質ガラス
母材を降下させる際、熱遮蔽具３や７と、炉心管６の内
壁とが接触して、炉心管６内の均一性を乱すので好まし
くない。一方、１０ｍｍより大きいと、輻射熱の逃散が
大きくなり、炉心管６内の均一性を乱してしまう。The distance between the heat shields 3 and 7 and the inner wall of the furnace tube 6 is preferably 0.1 mm or more and 10 mm or less. When the distance is less than 0.1 mm, when the porous glass base material is lowered, the heat shields 3 and 7 and the inner wall of the furnace tube 6 come into contact with each other, and the uniformity in the furnace tube 6 is disturbed. Not preferred. On the other hand, if it is larger than 10 mm, the dissipation of radiant heat becomes large, and the uniformity in the furnace tube 6 is disturbed.
【００１４】本発明の多孔質ガラス母材焼結装置１を用
い、多孔質ガラス母材１１を焼結すると、均質で高品質
な光ファイバ母材を製造することができる。By sintering the porous glass preform 11 using the porous glass preform sintering apparatus 1 of the present invention, a homogeneous and high-quality optical fiber preform can be manufactured.
【００１５】[0015]
【発明の実施の形態】以下、本発明の実施例を詳細に説
明する。図１には、本発明を適用する多孔質ガラス母材
焼結装置１の実施例の斜視図が示されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail. FIG. 1 is a perspective view of an embodiment of a porous glass preform sintering apparatus 1 to which the present invention is applied.
【００１６】多孔質ガラス母材焼結装置１は、蓋９を有
する炉心管６と、炉心管６の周囲に配置された加熱炉５
を有している。炉心管６は、石英製で、内径が２８０ｍ
ｍである。炉心管６内には、中央部が直径２５０ｍｍの
直胴体で両端部がコーン体の多孔質ガラス母材１１が挿
入されている。多孔質ガラス母材１１は、出発棒１２に
より吊り下げられ、出発棒１２に接続されたモータ（不
図示）により軸方向に回転しながら降下している。上部
熱遮蔽具７は、石英製からなる直径２６０ｍｍ、厚さ８
ｍｍの円板で、出発棒の径よりわずかに大きい孔を有
し、表面をサンドブラスト処理して不透明化している。
上部熱遮蔽具７は、出発棒１２が貫入して多孔質ガラス
母材１１の上部のコーン体１３に乗せられている。一
方、下部熱遮蔽具３は、石英製からなる直径２６０ｍ
ｍ、厚さ８ｍｍの円板で、多孔質ガラス母材１１の焼結
後の径よりわずかに大きい孔を有しており、表面をサン
ドブラスト処理している。下部熱遮蔽具３は、多孔質ガ
ラス母材１１の焼結が完了する位置に配置され、炉心管
６に固定されている。炉心管６上方には排気装置８、炉
心管下端には不活性ガス導入管２が配置されている。不
活性ガス導入管２から導入されたヘリウムガスにより、
炉心管内圧は外気圧より５〜２００ｍｍＡｑ高くなって
いる。The porous glass preform sintering apparatus 1 includes a furnace tube 6 having a lid 9 and a heating furnace 5 arranged around the furnace tube 6.
have. The furnace tube 6 is made of quartz and has an inner diameter of 280 m.
m. A porous glass base material 11 having a straight body having a diameter of 250 mm at the center and cones at both ends is inserted into the furnace tube 6. The porous glass base material 11 is suspended by a starting rod 12 and is lowered while rotating in the axial direction by a motor (not shown) connected to the starting rod 12. The upper heat shield 7 is made of quartz and has a diameter of 260 mm and a thickness of 8 mm.
mm disc, with holes slightly larger than the diameter of the starting rod, and sand blasted on the surface to make it opaque.
The upper heat shield 7 is placed on the cone body 13 above the porous glass base material 11 through which the starting rod 12 penetrates. On the other hand, the lower heat shield 3 has a diameter of 260 m made of quartz.
m, a disk having a thickness of 8 mm, having pores slightly larger than the diameter of the porous glass base material 11 after sintering, and sandblasting the surface. The lower heat shield 3 is arranged at a position where sintering of the porous glass base material 11 is completed, and is fixed to the furnace tube 6. An exhaust device 8 is arranged above the furnace tube 6, and an inert gas introduction tube 2 is arranged at the lower end of the furnace tube. By the helium gas introduced from the inert gas introduction pipe 2,
The furnace tube internal pressure is 5 to 200 mmAq higher than the external pressure.
【００１７】多孔質ガラス母材１１は、この焼結装置１
を用いて焼結される。The sintering apparatus 1 is used for the porous glass base material 11.
Sintered using
【００１８】加熱炉５の熱源４により、炉は１５００℃
に加熱される。１．７ｍｍ／分の速度で、多孔質ガラス
母材１１を降下させると、下端部から徐々に加熱炉を通
過する。焼結が完了した部分１６は下部熱遮蔽具３を貫
通して下方へ送り出される。多孔質ガラス母材１１の上
部コーン体１３まで焼結を行う。Due to the heat source 4 of the heating furnace 5, the temperature of the furnace is 1500 ° C.
Heated. When the porous glass base material 11 is lowered at a speed of 1.7 mm / min, the porous glass base material 11 gradually passes through the heating furnace from the lower end. The portion 16 where sintering is completed passes through the lower heat shield 3 and is sent downward. Sintering is performed up to the upper cone body 13 of the porous glass base material 11.
【００１９】上記実施例に従い、多孔質ガラス母材１１
を焼結した。焼結完了部分１６をルーペで拡大して観察
したところ、焼結のムラは認められなかった。According to the above embodiment, the porous glass base material 11
Was sintered. When the sintering completed portion 16 was magnified and observed with a loupe, no unevenness in sintering was observed.
【００２０】比較のため、熱遮蔽具を有しない焼結装置
とを用い、多孔質ガラス母材を焼結した。For comparison, a porous glass base material was sintered using a sintering apparatus having no heat shield.
【００２１】熱遮蔽具の有無による偏芯量の比較を図６
に、直胴部の上端１４から下端１５までの定位置におけ
る消費電力の比較を図７に示す。FIG. 6 shows a comparison of the amount of eccentricity with and without the heat shield.
FIG. 7 shows a comparison of power consumption at fixed positions from the upper end 14 to the lower end 15 of the straight body.
【００２２】図６は、横軸に直胴部の位置、縦軸に焼結
後の外径に対する偏芯量を示している。図６から明らか
なように、熱遮蔽具を有する焼結装置により焼結する
と、熱逃散が均一になるので、焼結後の偏芯量が０．５
％未満という高品質のものが安定して製造できた。これ
を用いて製造した光ファイバは、偏芯量が０．５％未満
であり、高品質かつ均質であった。熱遮蔽具を有しない
焼結装置により焼結した場合、偏芯量は両端ほどが大き
く０．５％以上であるため、品質がよくなかった。In FIG. 6, the horizontal axis indicates the position of the straight body, and the vertical axis indicates the amount of eccentricity with respect to the outer diameter after sintering. As is clear from FIG. 6, when sintering is performed by a sintering apparatus having a heat shield, the heat escape becomes uniform, and the eccentricity after sintering is 0.5
%, And a high-quality product having a quality of less than 10% was stably manufactured. The optical fiber manufactured using this had an eccentricity of less than 0.5%, and was high quality and homogeneous. In the case of sintering using a sintering apparatus without a heat shield, the quality was not good because the eccentricity was as large as 0.5% or more at both ends.
【００２３】図７は、横軸に直胴部の位置、縦軸に消費
電力を示している。図７から明らかなように、熱遮蔽具
を有する焼結装置により焼結した方が、熱逃散が少なく
なるので、消費電力が軽減している。FIG. 7 shows the position of the straight body on the horizontal axis and the power consumption on the vertical axis. As is clear from FIG. 7, when sintering is performed using a sintering apparatus having a heat shield, heat dissipation is reduced, and power consumption is reduced.
【００２４】[0024]
【発明の効果】以上、詳細に説明したように、本発明の
多孔質ガラス母材焼結装置を用いると、焼結の際に輻射
熱の逃散が制御されるので、炉心管内部の温度差が低減
され自然対流が抑制される。また、外部からの水の侵入
もない。そのため、多孔質ガラス母材を焼結して得られ
た光ファイバ母材は、焼結ムラがなく、偏芯が小さく、
均質で高品質である。さらに電力量を削減することがで
きる。As described in detail above, when the porous glass preform sintering apparatus of the present invention is used, the radiation of radiant heat is controlled during sintering, so that the temperature difference inside the furnace tube is reduced. It is reduced and natural convection is suppressed. Also, there is no water intrusion from outside. Therefore, the optical fiber preform obtained by sintering the porous glass preform has no sintering unevenness, small eccentricity,
Homogeneous and high quality. Further, the amount of power can be reduced.
【図１】本発明を適用する多孔質ガラス母材焼結装置の
実施例を示す概要図である。FIG. 1 is a schematic view showing an embodiment of a porous glass preform sintering apparatus to which the present invention is applied.
【図２】本発明を適用する多孔質ガラス母材焼結装置の
要部斜視図である。FIG. 2 is a perspective view of a main part of a porous glass preform sintering apparatus to which the present invention is applied.
【図３】本発明を適用する多孔質ガラス母材焼結装置の
別な要部斜視図である。FIG. 3 is another perspective view of a main part of a porous glass base material sintering apparatus to which the present invention is applied.
【図４】本発明を適用する多孔質ガラス母材焼結装置の
別な要部斜視図である。FIG. 4 is another perspective view of a main part of a porous glass base material sintering apparatus to which the present invention is applied.
【図５】本発明を適用する多孔質ガラス母材焼結装置の
別な要部斜視図である。FIG. 5 is another perspective view of a main part of a porous glass base material sintering apparatus to which the present invention is applied.
【図６】直胴部の位置において焼結後の外径に対する偏
芯量を示す図である。FIG. 6 is a diagram showing the amount of eccentricity with respect to the outer diameter after sintering at the position of a straight body.
【図７】直胴部の位置における消費電力を示す図であ
る。FIG. 7 is a diagram illustrating power consumption at a position of a straight body.
１は焼結装置、２は不活性ガス導入管、３は下部熱遮蔽
具、４は熱源、５は加熱炉、６は炉心管、７は上部熱遮
蔽具、８は排気装置、９は蓋、１１は多孔質ガラス母
材、１２は出発棒、１３はコーン体、１４は直胴部上
端、１５は直胴部下端、１６は焼結完了部、１８は突
起、Ｌは遮蔽具の高さである。1 is a sintering device, 2 is an inert gas inlet tube, 3 is a lower heat shield, 4 is a heat source, 5 is a heating furnace, 6 is a furnace tube, 7 is an upper heat shield, 8 is an exhaust device, and 9 is a lid. , 11 is a porous glass base material, 12 is a starting rod, 13 is a cone body, 14 is a straight body upper end, 15 is a straight body lower end, 16 is a sintered part, 18 is a protrusion, and L is a height of a shielding tool. That's it.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 神尾 剛 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社群馬事業所内 (72)発明者 島田 忠克 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 (72)発明者 平沢 秀夫 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 Ｆターム(参考） 4G014 AH06 4G021 CA12 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tsuyoshi Kamio 2-3-1-1, Isobe, Annaka-shi, Gunma Shin-Etsu Kagaku Kogyo Co., Ltd. Gunma Office (72) Inventor Tadakatsu Shimada 2-chome Isobe, Annaka-shi, Gunma 13-1 Shin-Etsu Kagaku Kogyo Co., Ltd. Precision Functional Materials Research Laboratory (72) Inventor Hideo Hirasawa 2-13-1 Isobe, Annaka-shi, Gunma Prefecture Shin-Etsu Kagaku Kogyo Co., Ltd. Precision Functional Materials Research Laboratory F-term (reference) 4G014 AH06 4G021 CA12
Claims (8)
央部が直胴体で両端がコーン体の多孔質ガラス母材を挿
入した炉心管と、該多孔質ガラス母材が軸方向に回転し
つつ降下して焼結される加熱炉とを有し、該多孔質ガラ
ス母材の上方に該出発棒の貫入した上部熱遮蔽具、およ
び／または炉心管に固定され該多孔質ガラス母材の焼結
完了部位の貫入した下部熱遮蔽具が設置されている多孔
質ガラス母材焼結装置。1. A furnace core tube in which a porous glass base material having a straight body at the center where both glass particles are deposited on a starting rod and cones at both ends is inserted, and the porous glass base material is rotated in the axial direction. A heating furnace which is lowered and sintered, the upper heat shield having the starting rod penetrating above the porous glass base material, and / or the firing of the porous glass base material fixed to a furnace tube. A porous glass preform sintering device in which a lower heat shield tool penetrating the sintering completed portion is installed.
ていることを特徴とする請求項１に記載の多孔質ガラス
母材焼結装置。2. The porous glass base material sintering apparatus according to claim 1, wherein the upper heat shield is mounted on a cone.
上部熱遮蔽具が該突起に乗っていることを特徴とする請
求項１に記載の多孔質ガラス母材焼結装置。3. The porous glass preform sintering apparatus according to claim 1, wherein the starting rod has a thick projection, and the upper heat shield is mounted on the projection.
ガラスからなることを特徴とする請求項１に記載の多孔
質ガラス母材焼結装置。4. The porous glass preform sintering apparatus according to claim 1, wherein the upper and lower heat shields are made of quartz glass.
構造であることを特徴とする請求項１に記載の多孔質ガ
ラス母材焼結装置。5. The porous glass preform sintering apparatus according to claim 1, wherein the upper and lower heat shields have a multilayer structure.
が、１０ｍｍ〜５０ｍｍであることを特徴とする請求項
１に記載の多孔質ガラス母材焼結装置。6. The porous glass preform sintering apparatus according to claim 1, wherein the height of the upper and lower heat shields is 10 mm to 50 mm.
管を有することを特徴とする請求項１に記載の多孔質ガ
ラス母材焼結装置。7. The porous glass preform sintering apparatus according to claim 1, wherein an inert gas introduction pipe is provided at a lower end of the furnace tube.
質ガラス母材焼結装置を用い、多孔質ガラス母材を焼結
する方法。8. A method for sintering a porous glass preform using the porous glass preform sintering apparatus according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1925999A JP3017990B1 (en) | 1999-01-28 | 1999-01-28 | Porous glass base material sintering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1925999A JP3017990B1 (en) | 1999-01-28 | 1999-01-28 | Porous glass base material sintering equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP3017990B1 JP3017990B1 (en) | 2000-03-13 |
| JP2000219519A true JP2000219519A (en) | 2000-08-08 |
Family
ID=11994448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1925999A Expired - Fee Related JP3017990B1 (en) | 1999-01-28 | 1999-01-28 | Porous glass base material sintering equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3017990B1 (en) |
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| US20090211302A1 (en) * | 2006-06-26 | 2009-08-27 | Shin-Etsu Chemical Co., Ltd. | Method of manufacturing optical fiber base material and apparatus of the same |
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| JP2013014468A (en) * | 2011-07-04 | 2013-01-24 | Sumitomo Electric Ind Ltd | Sintering apparatus and sintering method for glass preform |
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| US11225431B2 (en) * | 2018-03-20 | 2022-01-18 | Shin-Etsu Chemical Co., Ltd. | Method of sintering optical fiber porous glass base material |
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|---|---|
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