JP2000213533A - Dynamic pressure bearing device and motor using it - Google Patents
Dynamic pressure bearing device and motor using itInfo
- Publication number
- JP2000213533A JP2000213533A JP11017942A JP1794299A JP2000213533A JP 2000213533 A JP2000213533 A JP 2000213533A JP 11017942 A JP11017942 A JP 11017942A JP 1794299 A JP1794299 A JP 1794299A JP 2000213533 A JP2000213533 A JP 2000213533A
- Authority
- JP
- Japan
- Prior art keywords
- dynamic pressure
- bearing
- lubricating film
- shaft member
- amorphous carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000001050 lubricating effect Effects 0.000 claims abstract description 38
- 229910003481 amorphous carbon Inorganic materials 0.000 claims abstract description 35
- 239000000463 material Substances 0.000 claims abstract description 17
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 4
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 3
- 239000000956 alloy Substances 0.000 claims abstract description 3
- 230000003746 surface roughness Effects 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 abstract description 5
- 239000000428 dust Substances 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 3
- 230000007774 longterm Effects 0.000 abstract description 2
- 239000007769 metal material Substances 0.000 abstract description 2
- 238000005299 abrasion Methods 0.000 description 6
- 229910010293 ceramic material Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 235000019592 roughness Nutrition 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920002312 polyamide-imide Polymers 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Sliding-Contact Bearings (AREA)
- Lubricants (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、空気の動圧力によ
って軸部材と軸受部材とを相対回転可能に支承させるよ
うにした動圧軸受装置及びそれを用いたモータに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dynamic pressure bearing device for supporting a shaft member and a bearing member rotatably relative to each other by dynamic pressure of air, and a motor using the same.
【0002】[0002]
【従来の技術】従来より、軸受用の潤滑流体として空気
を用いた空気動圧軸受装置に関して、摩耗による粉塵の
発生や耐摩耗性を向上させるための提案が種々なされて
いる。例えば、特開平3−356622号明細書や、特
願平8−110072号明細書等においては、アルミ材
からなる軸基材に対してSiC複合メッキ又はNi−P
無電解メッキを施した軸部材と、同じくアルミ材からな
る軸受基材に対して潤滑性アルマイト処理又は高潤滑性
フッ素樹脂のコーティングを施した軸受部材とを組み合
わせている。また、特開平5−288214号公報に示
されているように、軸部材と軸受部材の双方に、炭化珪
素等のセラミック材料を採用したものもある。2. Description of the Related Art Various proposals have conventionally been made for an air dynamic pressure bearing device using air as a lubricating fluid for bearings to generate dust due to wear and improve wear resistance. For example, in Japanese Patent Application Laid-Open Nos. Hei 3-356622 and Japanese Patent Application No. Hei 8-110072, a shaft base made of aluminum is coated with SiC composite plating or Ni-P.
A shaft member subjected to electroless plating and a bearing member obtained by applying a lubricating alumite treatment or a highly lubricating fluororesin coating to a bearing base material also made of aluminum. Further, as disclosed in Japanese Patent Application Laid-Open No. 5-288214, there is a type in which a ceramic material such as silicon carbide is used for both a shaft member and a bearing member.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うに提案された空気動圧軸受装置においても、起動・停
止時等において僅かではあるが摩耗粉が発生することが
あり、使用環境の厳しいハードディスク駆動装置やポリ
ゴンミラー駆動装置等に用いた場合には、十分なクリー
ン度を得られないことから採用できないことも考えられ
る。また、特にセラミック材を用いた場には、材料が高
価なことから装置全体もコスト高になってしまうという
問題もある。However, even in the pneumatic pressure bearing device thus proposed, a small amount of abrasion powder may be generated at the time of starting and stopping, and the hard disk drive in a severe use environment may be generated. When used in a device or a polygon mirror driving device, it may not be possible to adopt it because a sufficient degree of cleanliness cannot be obtained. In addition, especially in a case where a ceramic material is used, there is a problem in that the cost of the material is high and the entire apparatus is also expensive.
【0004】そこで本発明は、簡易・安価な構成で、軸
部材と軸受部材との耐摩耗性を向上させることができる
ようにした動圧軸受装置及びそれを用いたモータを提供
することを目的とする。Accordingly, an object of the present invention is to provide a dynamic pressure bearing device and a motor using the same that can improve the wear resistance of the shaft member and the bearing member with a simple and inexpensive configuration. And
【0005】[0005]
【課題を解決するための手段】上記目的を達成するため
に請求項1記載の発明では、軸部材に形成した動圧軸受
面と軸受部材に形成した動圧軸受面とを周状に対向配置
するとともに、上記両動圧軸受面間に軸受流体として空
気を介在させ、上記両動圧軸受面の少なくとも一方側に
設けた動圧発生手段によって上記空気を加圧して得た動
圧力により、前記軸部材と軸受部材とを相対的に回転可
能に支承する動圧軸受装置において、上記軸部材及び軸
受部材の各動圧軸受面には、当該軸部材及び軸受部材の
基材に対して、アモルファスカーボンを含む潤滑膜が2
μm以上の膜厚に成膜されている。According to the first aspect of the present invention, a dynamic pressure bearing surface formed on a shaft member and a dynamic pressure bearing surface formed on a bearing member are circumferentially opposed to each other. In addition, air is interposed between the two dynamic pressure bearing surfaces as air as a bearing fluid, and the dynamic pressure obtained by pressurizing the air by the dynamic pressure generating means provided on at least one side of the two dynamic pressure bearing surfaces is used. In a hydrodynamic bearing device that rotatably supports a shaft member and a bearing member, each of the dynamic pressure bearing surfaces of the shaft member and the bearing member has an amorphous structure with respect to the base material of the shaft member and the bearing member. 2 lubricating films containing carbon
The film is formed to a thickness of at least μm.
【0006】また、請求項2記載の発明では、軸部材に
形成した動圧軸受面と軸受部材に形成した動圧軸受面と
を周状に対向配置するとともに、上記両動圧軸受面間に
軸受流体として空気を介在させ、上記両動圧軸受面の少
なくとも一方側に設けた動圧発生手段によって上記空気
を加圧して得た動圧力により、前記軸部材と軸受部材と
を相対的に回転可能に支承する動圧軸受装置を含み、上
記軸部材及び軸受部材のいずれか一方側に設けられたス
テータ部と、他方側に設けられたロータ部とを回転駆動
させるモータにおいて、前記軸部材及び軸受部材の各動
圧軸受面には、当該軸部材及び軸受部材の基材に対し
て、アモルファスカーボンを含む潤滑膜が2μm以上の
膜厚に成膜されている。According to the second aspect of the present invention, the dynamic pressure bearing surface formed on the shaft member and the dynamic pressure bearing surface formed on the bearing member are circumferentially opposed to each other, and between the two dynamic pressure bearing surfaces. Air is interposed as a bearing fluid, and the shaft member and the bearing member are relatively rotated by a dynamic pressure obtained by pressurizing the air by dynamic pressure generating means provided on at least one of the two dynamic pressure bearing surfaces. A motor for rotatably driving a stator portion provided on one of the shaft member and the bearing member and a rotor portion provided on the other side, wherein On each dynamic pressure bearing surface of the bearing member, a lubricating film containing amorphous carbon is formed to a thickness of 2 μm or more with respect to the shaft member and the base material of the bearing member.
【0007】さらに、請求項3記載の発明では、前記請
求項1又は2記載のアモルファスカーボンが、DLC
(ダイヤモンドライクカーボン)からなり、そのDLC
からなる潤滑膜の表面粗度が、Ra;0.7μm以下、
Rmax;1.1μm以下、Rz;0.8μm以下に設
定されている。Further, in the invention according to claim 3, the amorphous carbon according to claim 1 or 2 is DLC
(Diamond-like carbon) and its DLC
The surface roughness of the lubricating film made of Ra: 0.7 μm or less;
Rmax: 1.1 μm or less, Rz: 0.8 μm or less.
【0008】さらにまた、請求項4記載の発明では、前
記請求項1又は2記載の軸部材及び軸受部材の各基材
を、アルミニウム又はその合金により構成するととも
に、その基材と、前記アモルファスカーボンを含む潤滑
膜との間に、酸化珪素による下地処理膜が被着されてい
る。Further, in the invention according to claim 4, each of the base members of the shaft member and the bearing member according to claim 1 or 2 is made of aluminum or an alloy thereof, and the base material and the amorphous carbon are used. A base treatment film made of silicon oxide is provided between the substrate and the lubricating film.
【0009】また、請求項5記載の発明では、前記請求
項2記載のモータを、ハードディスク駆動装置又はポリ
ゴンミラー駆動装置に用いている。According to a fifth aspect of the present invention, the motor according to the second aspect is used in a hard disk drive or a polygon mirror drive.
【0010】このような構成を有する請求項1又は2記
載の発明によれば、動圧軸受装置の軸部材及び軸受部材
の各動圧軸受面の対向表面部分が、アモルファスカーボ
ンからなる潤滑膜によって良好な耐摩耗性を備え、その
アモルファスカーボンからなる潤滑膜を2μm以上の厚
さにわたって形成することによって初期の動圧特性が長
期にわたり維持される。According to the first or second aspect of the present invention having the above-described structure, the shaft member of the hydrodynamic bearing device and the opposing surface portions of the hydrodynamic bearing surfaces of the bearing member are formed by a lubricating film made of amorphous carbon. By forming a lubricating film made of amorphous carbon over a thickness of 2 μm or more with good wear resistance, the initial dynamic pressure characteristics can be maintained for a long time.
【0011】特に、請求項3記載の発明のようにアモル
ファスカーボン潤滑膜の面粗度を設定することによっ
て、上述した耐摩耗性は一層向上される。In particular, by setting the surface roughness of the amorphous carbon lubricating film as in the third aspect of the present invention, the above-described wear resistance is further improved.
【0012】このとき、請求項4記載の発明によれば、
アモルファスカーボン潤滑膜の耐久性が下地処理によっ
て向上される。At this time, according to the invention described in claim 4,
The durability of the amorphous carbon lubricating film is improved by the base treatment.
【0013】このような作用は、特に請求項5記載のよ
うな使用環境の厳しいハードディスク駆動装置又はポリ
ゴンミラー駆動装置等においてに特に顕著に得られる。Such an effect is particularly remarkably obtained in a hard disk drive or a polygon mirror drive having a severe use environment as described in claim 5.
【0014】[0014]
【発明の実施の形態】以下、本発明の実施の形態につい
て説明するが、それに先立って、本発明を適用する空気
動圧軸受を備えた軸回転型のポリゴンミラー駆動用モー
タの構造について図面に基づき説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below. Prior to that, the structure of a shaft-rotating polygon mirror driving motor having an air dynamic pressure bearing to which the present invention is applied will be described with reference to the drawings. It is explained based on.
【0015】図1に示されたポリゴンミラー駆動用モー
タは、デジタルコピー、レーザプリンタ等におけるレー
ザスキャナーを構成するものであって、10000〜3
0000RPM程度の高速回転をするため、軸受には非
接触で回転支持可能な空気動圧軸受等が用いられてい
る。The motor for driving the polygon mirror shown in FIG. 1 constitutes a laser scanner in a digital copy, a laser printer or the like.
In order to rotate at a high speed of about 0000 RPM, an air dynamic pressure bearing or the like which can support rotation in a non-contact manner is used as a bearing.
【0016】すなわち、図1において、ベース1にネジ
止め固定された中空円筒状の軸受部材(固定部材)2内
に、数μm〜十数μmの隙間を隔てて軸部材としてのロ
ータ(回転部材)3が挿入されており、当該ロータ3の
外周面側の動圧軸受面と、上記軸受部材2の内周面側の
動圧軸受面とで構成される空気動圧発生部4によって、
上記ロータ3が高速回転可能に支承される構成になされ
ている。上記ロータ3側の動圧軸受面5には、動圧発生
手段としての多数のラジアルヘリングボーン溝6が環状
に配列されている。これらのラジアルヘリングボーン溝
6は、軸方向に対称的に形成された傾斜溝からなり、上
記空気動圧発生部4の軸方向における略中央部分に最大
加圧部を形成するように構成されている。That is, in FIG. 1, a rotor (rotating member) as a shaft member is provided in a hollow cylindrical bearing member (fixing member) 2 fixedly screwed to a base 1 with a gap of several μm to several tens μm. 3) is inserted, and an air dynamic pressure generating portion 4 composed of a dynamic pressure bearing surface on the outer peripheral surface side of the rotor 3 and a dynamic pressure bearing surface on the inner peripheral surface side of the bearing member 2
The rotor 3 is supported so that it can rotate at high speed. A large number of radial herringbone grooves 6 as a dynamic pressure generating means are annularly arranged on the dynamic pressure bearing surface 5 on the rotor 3 side. These radial herringbone grooves 6 are composed of inclined grooves formed symmetrically in the axial direction, and are configured so as to form a maximum pressurizing portion substantially at the center of the air dynamic pressure generating portion 4 in the axial direction. I have.
【0017】また、上記ベース1に立設された中央柱状
部1aの外周には、ステータ部を構成する駆動コイル7
が嵌合固定されており、その駆動コイル7に周対向する
ようにして、ロータ部における駆動用磁気回路をつくる
環状マグネット8が配置されている。この環状マグネッ
ト8は、上記ロータ3の内部に鉄製のヨーク9を介して
配置されており、上記ステータ部を構成している駆動コ
イル7と共にモータ駆動部を構成している。A drive coil 7 constituting a stator portion is provided on the outer periphery of the central columnar portion 1a erected on the base 1.
The annular magnet 8 for forming a driving magnetic circuit in the rotor unit is disposed so as to face the driving coil 7 in a circumferential direction. The annular magnet 8 is disposed inside the rotor 3 via an iron yoke 9 and constitutes a motor driving unit together with the driving coil 7 constituting the stator unit.
【0018】さらに、上記ロータ3の先端部(図示上端
部)には環状凸部11が突設されており、この環状凸部
11に対してポリゴンミラー12が嵌着されている。こ
のポリゴンミラー12上には、波形ばね13を介してバ
ランスプレート14が同軸に載置されており、そのバラ
ンスプレート14側から差し込まれた固定ネジ15が上
記ロータ3の環状凸部11に螺着されることによってポ
リゴンミラー12の固定が行われている。Further, an annular convex portion 11 is protruded from a tip portion (an upper end portion in the figure) of the rotor 3, and a polygon mirror 12 is fitted to the annular convex portion 11. A balance plate 14 is coaxially mounted on the polygon mirror 12 via a wave spring 13, and a fixing screw 15 inserted from the balance plate 14 is screwed to the annular convex portion 11 of the rotor 3. As a result, the polygon mirror 12 is fixed.
【0019】さらに、上記ベース1の中央柱状部1aの
上部外周及びバランスプレート14の内周には、一対の
環状マグネット16,17が周対向するように取り付け
られている。これらの各環状マグネット16,17に
は、軸方向に極性を逆にして着磁が施されており、これ
によって磁気スラスト軸受が構成されている。Further, a pair of annular magnets 16 and 17 are attached to the upper outer periphery of the central columnar portion 1a of the base 1 and the inner periphery of the balance plate 14 so as to oppose each other. These annular magnets 16 and 17 are magnetized with their polarities reversed in the axial direction, thereby forming a magnetic thrust bearing.
【0020】このとき、上記ロータ(軸部材)3の基材
は、アルミニウムまたはアルミニウム合金等の金属材よ
り形成されているとともに、その基材の外周表面すなわ
ち上述した動圧軸受面に相当する外周表面に、アモルフ
ァスカーボンからなる潤滑膜を2μm以上の厚さにわた
って有している。このとき、上記ロータ3の基材の表面
には、酸化珪素(SiO2)による下地処理が施されて
おり、この下地処理層を介在させることによって、上記
アモルファスカーボンからなる潤滑膜の密着力が高めら
れている。At this time, the base material of the rotor (shaft member) 3 is formed of a metal material such as aluminum or an aluminum alloy, and the outer circumferential surface of the base material, that is, the outer circumferential surface corresponding to the above-described hydrodynamic bearing surface. The surface has a lubricating film made of amorphous carbon over a thickness of 2 μm or more. At this time, the surface of the base material of the rotor 3 is subjected to a base treatment with silicon oxide (SiO 2 ), and the adhesion of the lubricating film made of the amorphous carbon is reduced by interposing the base treatment layer. Has been enhanced.
【0021】本実施形態における前記アモルファスカー
ボンは、非結晶質のDLC(ダイヤモンドライクカーボ
ン)を含んでいる。このDLC含有のアモルファスカー
ボンからなる潤滑膜は、緻密なアモルファス構造を有す
るために結晶粒界がなく、非常になめらかな平滑表面を
備えているが、特に本実施形態では更に面仕上げを施し
ており、当該DLC含有のアモルファスカーボンからな
る潤滑膜の表面粗度を、中心線平均粗さRaが0.7μ
m以下、粗さの最大値Rmaxが1.1μm以下、粗さ
の平均値Rzが0.8μm以下となるように設定してい
る。The amorphous carbon in the present embodiment includes non-crystalline DLC (diamond-like carbon). The lubricating film made of the DLC-containing amorphous carbon has a dense amorphous structure, has no crystal grain boundaries, and has a very smooth and smooth surface. In particular, in this embodiment, the lubricating film is further surface-finished. The surface roughness of the lubricating film made of the DLC-containing amorphous carbon was determined by measuring the center line average roughness Ra to 0.7 μm.
m, the maximum roughness Rmax is 1.1 μm or less, and the average roughness Rz is 0.8 μm or less.
【0022】但し、上述した動圧発生手段としてのラジ
アルヘリングボーン溝6においては、上述した面粗度に
対して面仕上げ加工を施すことなく、後述するように蒸
着によって成膜したままの粗い状態になされている。こ
のラジアルヘリングボーン溝6における粗い面によっ
て、軸受流体としての空気が良好に加圧される効果を有
する。However, in the above-mentioned radial herringbone groove 6 as the dynamic pressure generating means, the surface roughness is not subjected to the above-mentioned surface roughness, and the rough state as it is formed by vapor deposition as will be described later. Has been made. The rough surface of the radial herringbone groove 6 has an effect that air as a bearing fluid is favorably pressurized.
【0023】一方、上記軸受部材2も、同じくアルミニ
ウムまたはアルミニウム合金等の金属より形成された基
材を備えているとともに、その基材の動圧軸受面に相当
する内周表面に、上述したロータ3と同様なDLC含有
のアモルファスカーボンからなる潤滑膜が、同様な下地
処理膜を介して2μm以上の厚さにわたって形成されて
いる。On the other hand, the bearing member 2 also has a base material also made of a metal such as aluminum or aluminum alloy, and has the above-described rotor on its inner peripheral surface corresponding to the dynamic pressure bearing surface of the base material. A lubricating film made of DLC-containing amorphous carbon similar to that of No. 3 is formed over a thickness of 2 μm or more via a similar undercoating film.
【0024】このようなDLC含有のアモルファスカー
ボンからなる潤滑膜は、例えば、図2に示されているよ
うなプラズマ蒸着装置(CVD)を用いて成膜される。
すなわち、このプラズマ蒸着装置(CVD)装置におい
ては、図2に示されているように、高真空中内に一端が
開放されたカップ状のリフレクタ21が配置されている
とともに、そのリフレクタ21内の閉塞側に、フィラメ
ント電源22に接続されたフィラメント23が配置され
ており、さらに、そのフィラメント23に近接させて上
記リフレクタ21の開放側に、アノード電源24に接続
されたアノード25が配置されている。さらにまた、上
記リフレクタ21の開放端から所定の距離を隔てて対向
するようにして、ワーク26が配置されており、このワ
ーク26と、上記リフレクタ21との間に、リフレクタ
電源27及びバイアス電源28によって所定の電圧が印
加されている。Such a lubricating film made of DLC-containing amorphous carbon is formed, for example, by using a plasma deposition apparatus (CVD) as shown in FIG.
That is, in this plasma deposition apparatus (CVD) apparatus, as shown in FIG. 2, a cup-shaped reflector 21 having one end opened in a high vacuum is arranged, and the inside of the reflector 21 is disposed. A filament 23 connected to a filament power supply 22 is disposed on the closed side, and an anode 25 connected to an anode power supply 24 is disposed on the open side of the reflector 21 close to the filament 23. . Further, a work 26 is arranged so as to face the open end of the reflector 21 at a predetermined distance, and a reflector power supply 27 and a bias power supply 28 are provided between the work 26 and the reflector 21. , A predetermined voltage is applied.
【0025】また、上記リフレクタ21内には、エチレ
ンガス等の炭化水素ガスが供給されており、当該リフレ
クタ21内における200℃〜500℃の加熱下でのア
ーク放電プラズマによって上記炭化水素ガスが分解さ
れ、それにより生成されたプラズマ中のイオンや励起分
子が、上記ワーク26の表面に対して所定の電気的加速
エネルギーをもって衝突し、その結果、アモルファスカ
ーボン膜が成形されるようになっている。A hydrocarbon gas such as ethylene gas is supplied into the reflector 21, and the hydrocarbon gas is decomposed by arc discharge plasma under heating at 200 ° C. to 500 ° C. in the reflector 21. The generated ions and excited molecules in the plasma collide with the surface of the work 26 with a predetermined electric acceleration energy, and as a result, an amorphous carbon film is formed.
【0026】このようにして成膜を行うDLC含有のア
モルファスカーボンからなる潤滑膜は、上述したように
2μm以上の厚さにわたって形成されているが、その根
拠となった耐摩耗試験について説明する。The lubricating film formed of DLC-containing amorphous carbon, which is formed as described above, is formed over a thickness of 2 μm or more as described above. A description will be given of a wear resistance test which is the basis of the lubricating film.
【0027】まず、耐摩耗試験には、図3に示されてい
るような耐摩耗試験装置31が用いられる。この耐摩耗
試験装置31では、上述したDLC含有のアモルファス
カーボン潤滑膜が所定の厚さにわたって蒸着された直径
約15mmの円筒状試料32と、同様なDLC含有のア
モルファスカーボン潤滑膜が所定の厚さにわたって蒸着
された板状試料33とが、互いに圧接状態にて配置され
る。すなわち、上記板状試料33は、支点34から略水
平に延びる板バネ35の先端部分に固定されているとと
もに、上記支点34の反対側からは、略水平にレバー3
6が延出しており、そのレバー36の先端部分には、固
定滑車37を介して錘38の重力が負荷されている。First, a wear resistance test apparatus 31 as shown in FIG. 3 is used for the wear resistance test. In this wear resistance test apparatus 31, a cylindrical sample 32 having a diameter of about 15 mm in which the above-mentioned amorphous carbon lubricating film containing DLC is deposited over a predetermined thickness, and a similar amorphous carbon lubricating film containing DLC having a predetermined thickness are formed. The plate-shaped sample 33 deposited over the entire surface is placed in a pressure-contact state with each other. That is, the plate-shaped sample 33 is fixed to the distal end portion of a leaf spring 35 extending substantially horizontally from the fulcrum 34, and the lever 3 is moved substantially horizontally from the opposite side of the fulcrum 34.
6 is extended, and the weight of the weight 38 is applied to the tip of the lever 36 via a fixed pulley 37.
【0028】そして、耐摩耗試験にあたっては、上記錘
38による板状試料33への荷重を40gとし、円筒状
試料32を7000rpmの速さで10分間回転駆動さ
せ、そのときの摩耗痕の深さを面粗度計により実測し
た。その結果、図4中の(j)に示されているように、
摩耗深さ(縦軸)は、平均で1μmとなった。In the wear resistance test, the load on the plate-shaped sample 33 by the weight 38 was set to 40 g, and the cylindrical sample 32 was driven to rotate at a speed of 7000 rpm for 10 minutes. Was actually measured with a surface roughness meter. As a result, as shown in (j) of FIG.
The wear depth (vertical axis) was 1 μm on average.
【0029】次に、同様な耐摩耗試験装置31を用い
て、板状試料33にアルミとチタンの化合物(AlxT
iyOz)をコーディングするとともに、相手方の円筒
状試料32として、(a)アルマイト、(b)Niメッ
キ、(c)アクリルメラミン塗装、(d)フッ素系ポリ
アミドイミド(PAI)塗装(従来品)、(e)フッ素
樹脂塗装(L6201CL)、(f)アルミとチタンの
化合物(AlxTiyOz)、(g)チタン酸カリウム
(セラミック)、(h)アルミナ、(i)工具鋼、をそ
れぞれ膜状又は層状に被着させて、同様な試験を行っ
た。Next, using a similar abrasion resistance test apparatus 31, a plate-like sample 33 was subjected to a compound of aluminum and titanium (Al x T).
i y O z ), and (a) alumite, (b) Ni plating, (c) acrylic melamine coating, (d) fluorine-based polyamideimide (PAI) coating (conventional product) ), (e) a fluorine resin coated (L6201CL), (f) a compound of aluminum and titanium (Al x Ti y O z) , (g) potassium titanate (ceramic), (h) alumina, (i) tool steel, Were applied in the form of a film or a layer, respectively, and a similar test was performed.
【0030】さらに、同様な耐摩耗試験装置31を用い
て、板状試料33に、従来品と同様なフッ素系ポリアミ
ドイミド(PAI)塗装を被着させるとともに、相手方
の円筒状試料32として、(k)アルマイト、及び
(m)Niメッキ、をそれぞれ膜状被着させて、同様な
試験を行った。Further, using a similar abrasion resistance tester 31, a plate-like sample 33 is coated with a fluorine-based polyamideimide (PAI) coating similar to that of a conventional product, and a cylindrical sample 32 as a mating member is formed as ( A similar test was performed by depositing k) anodized aluminum and (m) Ni plating, respectively.
【0031】このような試験結果が、図4中の同符号に
対応させて表されているが、上述した(a)〜(f)及
び(k),(m)の各場合には、本発明にかかる(j)
に比較して摩耗深さ(縦軸)は非常に大きくなった。ま
た、セラミック系材料による結果を表した(g)〜
(i)の場合は、本発明にかかる(j)と同程度の摩耗
深さとなった。すなわち、本実施形態のように、ロータ
(軸部材)3及び軸受部材2の各動圧軸受面に対して、
DLC含有のアモルファスカーボンからなる潤滑膜を形
成しておくことによって、従来品よりも摩耗深さが大幅
に減少することが判明するとともに、アルミナ等のセラ
ミック系材料とほぼ同等の耐摩耗性が得られることが判
明した。The test results are shown in correspondence with the same reference numerals in FIG. 4. In each of the above-mentioned cases (a) to (f) and (k) and (m), According to the invention (j)
, The wear depth (vertical axis) became very large. In addition, the results based on the ceramic materials are shown in (g) to (g).
In the case of (i), the wear depth was almost the same as that of (j) according to the present invention. That is, as in the present embodiment, with respect to each of the dynamic pressure bearing surfaces of the rotor (shaft member) 3 and the bearing member 2,
By forming a lubricating film composed of DLC-containing amorphous carbon, it has been found that the wear depth is significantly reduced as compared with the conventional product, and that the wear resistance is substantially the same as that of ceramic materials such as alumina. Turned out to be.
【0032】次に、上述した耐摩耗試験装置31におい
て、DLC含有のアモルファスカーボン潤滑膜が蒸着さ
れた円筒状試料32及び板状試料33の各表面を、ペー
パー研磨紙(#1000)により以下のように研磨して
試験を行った。Next, in the above-described abrasion resistance test apparatus 31, the surfaces of the cylindrical sample 32 and the plate-like sample 33 on which the amorphous carbon lubricating film containing DLC was deposited were polished with paper abrasive paper (# 1000) as follows. The test was performed by polishing as follows.
【0033】まず、研磨前の各試料の面粗度は、 Ra(μm) Rmax(μm) Rz(μm) 試料1. 0.08 1.86 0.81 試料2. 0.11 1.57 1.38 試料3. 0.22 2.89 1.84 となっていたが、上記研磨によって、 Ra(μm) Rmax(μm) Rz(μm) 試料1. 0.06 0.75 0.52 試料2. 0.07 1.04 0.77 試料3. 0.06 0.67 0.47 試料4. 0.22 2.89 1.84 とした。First, the surface roughness of each sample before polishing was Ra (μm) Rmax (μm) Rz (μm) 0.08 1.86 0.81 Sample 2. 0.11 1.57 1.38 Sample 3. Although it was 0.22 2.89 1.84, Ra (μm) Rmax (μm) Rz (μm) Sample 1. 0.06 0.75 0.52 Sample 2. 0.07 1.04 0.77 Sample 3. 0.06 0.67 0.47 Sample 4. 0.22 2.89 1.84.
【0034】そして、上述した耐摩耗試験装置31によ
る試験を行うにあたっては、前述した錘37による板状
試料32への荷重を40gから始めて、10gづつ増や
しながら100gまで行い、円筒状試料32を7000
rpmの速さで5分間回転駆動させ、そのときの摩耗痕
の深さを面粗度計により実測した。なお、このような条
件による耐摩耗試験は、実際の使用条件よりも大幅に厳
しい過負荷状態に設定されているものであり、この条件
下で得られた結果は、実機における通常の使用状態にお
ける結果とほぼ同じ状態を示すことが経験的に知られて
いるものである。When performing the test using the abrasion resistance test apparatus 31 described above, the load on the plate-like sample 32 by the weight 37 is started from 40 g, and is increased in increments of 10 g to 100 g.
It was driven to rotate at a speed of rpm for 5 minutes, and the depth of the wear mark at that time was actually measured by a surface roughness meter. In the wear resistance test under such conditions, the overload condition is set to be much severer than the actual use condition, and the result obtained under this condition is that in the normal use condition in the actual machine. It is empirically known to show almost the same state as the result.
【0035】図5には、上述した各面粗度に仕上げられ
たそれぞれの試料1,2,3に対する試験結果の平均値
を表している。本図から明らかなように、摩耗深さ(縦
軸)は、荷重が80g〜100gのときに最低の0.2
3μmとなっていることからしてみれば、DLC含有の
アモルファスカーボン潤滑膜は、セラミック材料と同等
かそれ以上の耐摩耗性があり、そのときの膜厚として
は、2μm程度あれば十分であることが判明した。FIG. 5 shows the average values of the test results for the samples 1, 2, and 3 finished to each of the surface roughnesses described above. As is clear from the figure, the wear depth (vertical axis) is the lowest 0.2 when the load is 80 g to 100 g.
Judging from the fact that the thickness is 3 μm, the amorphous carbon lubricating film containing DLC has abrasion resistance equal to or higher than that of the ceramic material, and a thickness of about 2 μm is sufficient. It has been found.
【0036】また、本実施形態にかかる動圧軸受装置
を、実際のモータに搭載して回転の起動・停止を繰り返
す試験を行ったところ、初期の動圧特性が長期にわたっ
て維持されるとともに、摩耗量は非常に少なく、良好な
使用状態が確認された。Further, when the dynamic pressure bearing device according to the present embodiment was mounted on an actual motor and subjected to a test of repeating start / stop of rotation, the initial dynamic pressure characteristics were maintained for a long time, and the wear was reduced. The amount was very small and good use was confirmed.
【0037】さらに、本実施形態では、動圧発生溝6に
おける面粗度が大きく設定されているために加圧機能が
高められることとなり、一層良好な動圧特性が得られる
ようになっている。Further, in the present embodiment, since the surface roughness of the dynamic pressure generating groove 6 is set to be large, the pressurizing function is enhanced, so that better dynamic pressure characteristics can be obtained. .
【0038】さらにまた、本実施形態では、アモルファ
スカーボン潤滑膜の密着性が下地処理層によって高めら
れているため、装置の耐久性が向上される。Furthermore, in the present embodiment, the durability of the device is improved because the adhesion of the amorphous carbon lubricating film is enhanced by the underlying treatment layer.
【0039】以上、本発明者によってなされた発明の実
施形態を具体的に説明したが、本発明は上記実施形態に
限定されるものではなく、その要旨を逸脱しない範囲で
種々変形可能であるというのはいうまでもない。Although the embodiments of the present invention made by the inventor have been specifically described above, the present invention is not limited to the above-described embodiments, and can be variously modified without departing from the gist thereof. Needless to say.
【0040】例えば、上記実施形態では、アモルファス
カーボンとしてDLCを用いているが、DLCに対して
他の物質を含有させたり、他のアモルファスカーボンを
採用することもできる。For example, in the above embodiment, DLC is used as the amorphous carbon. However, other materials may be contained in DLC, or other amorphous carbon may be used.
【0041】また、本発明は、上述した実施形態のよな
うポリゴンミラー駆動モータに限定されるものではな
く、同様にクリーン度を要求するハードディスク駆動装
置(HDD)用のモータの他、あらゆる種類の回転駆動
装置に対しても同様に適用することができるものであ
る。Further, the present invention is not limited to the polygon mirror driving motor according to the above-described embodiment. Similarly, the present invention is not limited to a motor for a hard disk drive (HDD) which requires a high degree of cleanliness. The present invention can be similarly applied to the rotary drive device.
【0042】[0042]
【発明の効果】以上述べたように請求項1又は2記載の
本発明は、動圧軸受装置の軸部材及び軸受部材の各軸受
面の対向表面部分に、アモルファスカーボンからなる潤
滑膜を2μm以上の厚さにわたって形成したものである
から、極めて優れた耐摩耗性を安価にて得ることがで
き、粉塵等の発生に関する使用環境が厳しい各種装置に
対しても長期にわたって良好に使用することができる。As described above, according to the first or second aspect of the present invention, the lubricating film made of amorphous carbon is formed on the shaft member of the hydrodynamic bearing device and the bearing surface of each bearing member to a thickness of 2 μm or more. It is possible to obtain extremely excellent wear resistance at low cost, and it can be favorably used for a long period of time even in various devices where the use environment related to generation of dust and the like is severe. .
【0043】特に、請求項3記載の発明のようにアモル
ファスカーボン潤滑膜の面粗度を設定することによっ
て、上述した効果を一層確実に得ることができる。In particular, by setting the surface roughness of the amorphous carbon lubricating film as in the third aspect of the present invention, the above-described effects can be more reliably obtained.
【0044】このとき、請求項4記載の発明は、アモル
ファスカーボン潤滑膜の密着性を向上させる下地処理を
施したものであるから、上述した効果に加えて、特に長
期使用時における信頼性を高めることができる。In this case, since the invention according to claim 4 has been subjected to a base treatment for improving the adhesion of the amorphous carbon lubricating film, in addition to the above-mentioned effects, it also enhances the reliability particularly during long-term use. be able to.
【0045】本発明は、特に請求項5記載のような使用
環境の厳しいハードディスク駆動装置又はポリゴンミラ
ー駆動装置等においてに特に良好な効果を得ることがで
きる。According to the present invention, a particularly good effect can be obtained particularly in a hard disk drive or a polygon mirror drive having a severe use environment.
【図1】本発明を適用した装置例としてのポリゴンミラ
ー駆動用モータの構造例を表した外横断面説明図であ
る。FIG. 1 is an outer cross-sectional explanatory view showing a structural example of a polygon mirror driving motor as an example of an apparatus to which the present invention is applied.
【図2】本発明にかかるアモルファスカーボンを成膜す
る装置例としてのプラズマ蒸着装置(CVD)の構造を
原理的に表した説明図である。FIG. 2 is an explanatory view showing in principle the structure of a plasma deposition apparatus (CVD) as an example of an apparatus for forming an amorphous carbon film according to the present invention.
【図3】耐摩耗試験機の一例を表した構造説明図であ
る。FIG. 3 is a structural explanatory view showing an example of a wear resistance tester.
【図4】図3に示された耐摩耗試験装置によって得られ
た試験結果の一例を表した線図である。FIG. 4 is a diagram showing an example of a test result obtained by the wear resistance test apparatus shown in FIG.
【図5】図3に示された耐摩耗試験装置によって得られ
た試験結果の他の例を表した線図である。FIG. 5 is a diagram showing another example of test results obtained by the wear resistance test apparatus shown in FIG.
2 軸受部材 3 軸部材(ロータ) 4 空気動圧発生部 6 動圧発生手段(ラジアルヘリングボーン溝) 7 駆動コイル(ステータ部) 8 環状マグネット(ロータ部) 12 ポリゴンミラー Reference Signs List 2 bearing member 3 shaft member (rotor) 4 air dynamic pressure generating section 6 dynamic pressure generating means (radial herringbone groove) 7 drive coil (stator section) 8 annular magnet (rotor section) 12 polygon mirror
───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 3J011 AA04 AA20 BA02 BA04 CA05 QA04 SB04 SD03 SE02 4H104 AA04A EA01A LA03 PA01 PA04 QA12 5H607 AA04 AA06 BB01 BB17 CC01 DD03 EE10 GG12 KK00 ────────────────────────────────────────────────── ─── Continued on the front page F term (reference) 3J011 AA04 AA20 BA02 BA04 CA05 QA04 SB04 SD03 SE02 4H104 AA04A EA01A LA03 PA01 PA04 QA12 5H607 AA04 AA06 BB01 BB17 CC01 DD03 EE10 GG12 KK00
Claims (5)
に形成した動圧軸受面とを周状に対向配置するととも
に、上記両動圧軸受面間に軸受流体として空気を介在さ
せ、上記両動圧軸受面の少なくとも一方側に設けた動圧
発生手段によって上記空気を加圧して得た動圧力によ
り、前記軸部材と軸受部材とを相対的に回転可能に支承
する動圧軸受装置において、 上記軸部材及び軸受部材の各動圧軸受面には、当該軸部
材及び軸受部材の基材に対して、アモルファスカーボン
を含む潤滑膜が2μm以上の膜厚に成膜されていること
を特徴とする動圧軸受装置。1. A dynamic pressure bearing surface formed on a shaft member and a dynamic pressure bearing surface formed on a bearing member are circumferentially opposed to each other, and air is interposed between the two dynamic pressure bearing surfaces as a bearing fluid, A dynamic pressure bearing device that supports the shaft member and the bearing member relatively rotatably by dynamic pressure obtained by pressurizing the air by dynamic pressure generating means provided on at least one of the two dynamic pressure bearing surfaces. In the above, the lubricating film containing amorphous carbon is formed on the hydrodynamic bearing surfaces of the shaft member and the bearing member to a thickness of 2 μm or more with respect to the base material of the shaft member and the bearing member. Characteristic hydrodynamic bearing device.
に形成した動圧軸受面とを周状に対向配置するととも
に、上記両動圧軸受面間に軸受流体として空気を介在さ
せ、上記両動圧軸受面の少なくとも一方側に設けた動圧
発生手段によって上記空気を加圧して得た動圧力によ
り、前記軸部材と軸受部材とを相対的に回転可能に支承
する動圧軸受装置を含み、 上記軸部材及び軸受部材のいずれか一方側に設けられた
ステータ部と、他方側に設けられたロータ部とを回転駆
動させるモータにおいて、 前記軸部材及び軸受部材の各動圧軸受面には、当該軸部
材及び軸受部材の基材に対して、アモルファスカーボン
を含む潤滑膜が2μm以上の膜厚に成膜されていること
を特徴とする動圧軸受装置を用いたモータ。2. A dynamic pressure bearing surface formed on a shaft member and a dynamic pressure bearing surface formed on a bearing member are circumferentially opposed to each other, and air is interposed between the two dynamic pressure bearing surfaces as a bearing fluid, A dynamic pressure bearing device that supports the shaft member and the bearing member relatively rotatably by dynamic pressure obtained by pressurizing the air by dynamic pressure generating means provided on at least one of the two dynamic pressure bearing surfaces. A motor that rotationally drives a stator portion provided on one of the shaft member and the bearing member and a rotor portion provided on the other side, wherein each of the dynamic pressure bearing surfaces of the shaft member and the bearing member is provided. Wherein a lubricating film containing amorphous carbon is formed in a thickness of 2 μm or more on the base material of the shaft member and the bearing member.
(ダイヤモンドライクカーボン)からなり、 そのDLCからなる潤滑膜の表面粗度が、Ra;0.7
μm以下、Rmax;1.1μm以下、Rz;0.8μ
m以下に設定されていることを特徴とする請求項1又は
2記載の動圧軸受装置又はそれを用いたモータ。3. The method according to claim 1, wherein the amorphous carbon is DLC.
(Diamond-like carbon), and the surface roughness of the lubricating film composed of DLC is Ra; 0.7
μm or less, Rmax; 1.1 μm or less, Rz; 0.8 μm
The dynamic bearing device according to claim 1 or 2, or a motor using the same.
ルミニウム又はその合金により構成するとともに、 その基材と、前記アモルファスカーボンを含む潤滑膜と
の間に、酸化珪素による下地処理膜が被着されているこ
とを特徴とする請求項1又は2記載の動圧軸受装置又は
それを用いたモータ。4. The base member of each of the shaft member and the bearing member is made of aluminum or an alloy thereof, and an undercoating film made of silicon oxide is provided between the base member and the lubricating film containing amorphous carbon. The hydrodynamic bearing device according to claim 1 or 2 or a motor using the hydrodynamic bearing device.
ク駆動装置又はポリゴンミラー駆動装置に用いたことを
特徴とする動圧軸受装置を用いたモータ。5. A motor using a hydrodynamic bearing device, wherein the motor according to claim 2 is used in a hard disk drive or a polygon mirror drive.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11017942A JP2000213533A (en) | 1999-01-27 | 1999-01-27 | Dynamic pressure bearing device and motor using it |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11017942A JP2000213533A (en) | 1999-01-27 | 1999-01-27 | Dynamic pressure bearing device and motor using it |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000213533A true JP2000213533A (en) | 2000-08-02 |
Family
ID=11957845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11017942A Withdrawn JP2000213533A (en) | 1999-01-27 | 1999-01-27 | Dynamic pressure bearing device and motor using it |
Country Status (1)
Country | Link |
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JP (1) | JP2000213533A (en) |
Cited By (3)
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---|---|---|---|---|
WO2003044790A1 (en) * | 2001-11-16 | 2003-05-30 | Seagate Technology, Llc | High adhesion, wear resistant coatings for spindle motors in disk drive/storage applications |
WO2004001744A2 (en) * | 2002-06-24 | 2003-12-31 | Seagate Technology Llc | Low friction, wear resistant coatings for high speed spindle motors in disc drive/storage applications |
US6736609B2 (en) * | 2001-03-19 | 2004-05-18 | Fukui Prefecture | Support apparatus for movable member and pump apparatus |
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JPH0893752A (en) * | 1994-09-29 | 1996-04-09 | Kyocera Corp | Dynamic pressure bearing |
JPH09189876A (en) * | 1995-12-27 | 1997-07-22 | Samsung Electron Co Ltd | Rotary polygon mirror driving motor |
JPH11311245A (en) * | 1998-04-24 | 1999-11-09 | Seiko Instruments Inc | Dynamic pressure bearing, spindle motor having the same and rotary body device |
JP2000027853A (en) * | 1998-07-15 | 2000-01-25 | Seiko Instruments Inc | Dynamic pressure bearing, manufacture of dynamic pressure bearing, motor and rotary body device |
JP2000064053A (en) * | 1998-08-14 | 2000-02-29 | Seiko Instruments Inc | Formation of hydrogenated amorphous thin film, device used therefor, gas dynamic pressure bearing in which the thin film is formed, spindle motor and rotor device |
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1999
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JPH07256820A (en) * | 1994-03-24 | 1995-10-09 | Olympus Optical Co Ltd | Slide member |
JPH0893752A (en) * | 1994-09-29 | 1996-04-09 | Kyocera Corp | Dynamic pressure bearing |
JPH09189876A (en) * | 1995-12-27 | 1997-07-22 | Samsung Electron Co Ltd | Rotary polygon mirror driving motor |
JPH11311245A (en) * | 1998-04-24 | 1999-11-09 | Seiko Instruments Inc | Dynamic pressure bearing, spindle motor having the same and rotary body device |
JP2000027853A (en) * | 1998-07-15 | 2000-01-25 | Seiko Instruments Inc | Dynamic pressure bearing, manufacture of dynamic pressure bearing, motor and rotary body device |
JP2000064053A (en) * | 1998-08-14 | 2000-02-29 | Seiko Instruments Inc | Formation of hydrogenated amorphous thin film, device used therefor, gas dynamic pressure bearing in which the thin film is formed, spindle motor and rotor device |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6736609B2 (en) * | 2001-03-19 | 2004-05-18 | Fukui Prefecture | Support apparatus for movable member and pump apparatus |
WO2003044790A1 (en) * | 2001-11-16 | 2003-05-30 | Seagate Technology, Llc | High adhesion, wear resistant coatings for spindle motors in disk drive/storage applications |
US6664685B2 (en) | 2001-11-16 | 2003-12-16 | Seagate Technology Llc | High adhesion, wear resistant coatings for spindle motors in disk drive/storage applications |
GB2397939A (en) * | 2001-11-16 | 2004-08-04 | Seagate Technology Llc | High adhesion, wear resistant coatings for spindle motors in disk drive/storage applications |
GB2397939B (en) * | 2001-11-16 | 2005-07-27 | Seagate Technology Llc | High adhesion, wear resistant coatings for spindle motors in disk drive/storage applications |
CN1315124C (en) * | 2001-11-16 | 2007-05-09 | 希捷科技有限公司 | High adhesion, wear resistant coatings for spindle motors in disk drive/storage applications |
JP2009138946A (en) * | 2001-11-16 | 2009-06-25 | Seagate Technology Llc | Device with hydrodynamic fluid bearing having coating |
WO2004001744A2 (en) * | 2002-06-24 | 2003-12-31 | Seagate Technology Llc | Low friction, wear resistant coatings for high speed spindle motors in disc drive/storage applications |
WO2004001744A3 (en) * | 2002-06-24 | 2004-05-06 | Seagate Technology Llc | Low friction, wear resistant coatings for high speed spindle motors in disc drive/storage applications |
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