JP2000167618A - Method for drawing wire for wire saw and drawing device - Google Patents
Method for drawing wire for wire saw and drawing deviceInfo
- Publication number
- JP2000167618A JP2000167618A JP34516398A JP34516398A JP2000167618A JP 2000167618 A JP2000167618 A JP 2000167618A JP 34516398 A JP34516398 A JP 34516398A JP 34516398 A JP34516398 A JP 34516398A JP 2000167618 A JP2000167618 A JP 2000167618A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- tension
- saw
- cutting
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Winding, Rewinding, Material Storage Devices (AREA)
- Metal Extraction Processes (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体用ウエハー
の母材であるシリコン結晶、人工水晶、超硬合金、セラ
ミック等の硬質材料の被削材を切断するワイヤソー装置
に用いるワイヤソー用ワイヤ（以下、単にワイヤともい
う）の伸線技術に関し、特にワイヤ強度を検査しながら
伸線して巻取り可能になしたワイヤソー用ワイヤの伸線
方法及び伸線装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw wire (hereinafter referred to as a wire saw device) used for a wire saw device for cutting a work material of a hard material such as a silicon crystal, an artificial quartz, a cemented carbide or a ceramic which is a base material of a semiconductor wafer. In particular, the present invention relates to a wire drawing method and a wire drawing apparatus for a wire saw wire which can be wound and wound while inspecting wire strength.
【０００２】[0002]
【従来の技術】シリコン結晶や人工水晶を薄いウエハー
に切断する手段としてワイヤソー装置がある。これは、
極細のワイヤを被削材（例えば、シリコン結晶や人工水
晶）に圧接しながら連続走行させて、被削材を切削する
ものである。上記ワイヤには、切削時に高い張力をかけ
る必要があり、また、大きな切削抵抗や摩擦抵抗が生じ
るため、高炭素鋼線材やピアノ線材などの高抗張力材が
用いられる。上記高炭素鋼線材やピアノ線材には強度を
高めるために炭素が添加されるが、添加量が多すぎると
延靱性や伸線加工性の低下を招くため、その添加量にも
限度がある。通常の場合、炭素含有量が０．７５〜０．
８５重量％のもの、ＳＷＲＳ７７Ａ材、ＳＷＲＳ８２Ａ
材に相当するものが使われている。2. Description of the Related Art As a means for cutting silicon crystals or artificial quartz into thin wafers, there is a wire saw device. this is,
In this method, an extremely fine wire is continuously moved while being pressed against a work material (for example, silicon crystal or artificial quartz) to cut the work material. Since high tension must be applied to the wire during cutting, and high cutting resistance and frictional resistance are generated, a high tensile strength material such as a high carbon steel wire or a piano wire is used. Carbon is added to the high-carbon steel wire and the piano wire to increase the strength. However, if the amount is too large, the toughness and the drawability are reduced. Therefore, the amount of addition is limited. In the normal case, the carbon content is 0.75-0.
85% by weight, SWRS77A material, SWRS82A
The equivalent of wood is used.
【０００３】一般的なワイヤソー用ワイヤの製造方法
は、例えば５．５ｍｍのＳＷＲＳ８２Ａ材にパテンティ
ング−伸線前処理−伸線加工を繰り返し施し、線径１ｍ
ｍ前後まで細径化する。この線材に最終パテンティング
処理を施し、伸線前処理として銅や真鍮等のメッキを施
した後、減面率９４〜９９％の伸線加工を施して、所要
線径のワイヤソー用ワイヤを得るものであった。[0003] A general method of manufacturing a wire for a wire saw is, for example, repeatedly applying patenting-drawing pretreatment-drawing processing to 5.5 mm SWRS82A material to obtain a wire diameter of 1 m.
m. After applying a final patenting process to the wire material and plating it with copper or brass as a pre-drawing process, the wire is subjected to wire drawing with a reduction in area of 94 to 99% to obtain a wire for a wire saw having a required wire diameter. Was something.
【０００４】近年、精密電子機器の著しい高精度化、コ
ンパクト化に伴い、ワイヤソー用ワイヤも高精度で高効
率の切削を実現するために、高強度で極細のワイヤが要
求されている。すなわち、引張り強さが２９００ＭＰａ
以上で線径が５０〜２００μｍ程度のワイヤの需要が増
えている。このような極細のワイヤを使用した場合、切
削加工時のワイヤにかかる実際の張力はワイヤの破断荷
重の４０％以上で場合によっては７０％程度に達するこ
とがある。従って、ワイヤにキズ、横割れ、錆び等の表
面欠陥や内部割れ、異物混入、組織不良等の内部欠陥が
あった場合、断線事故の発生率が極度に高くなる。切削
加工途中での断線事故は、ウェハーの破断面の平滑性及
び切削精度を悪くし、また、作業性を大きく低下させる
ため、品質的にもコスト的にも重大な問題である。[0004] In recent years, with the remarkable increase in precision and miniaturization of precision electronic equipment, high-strength, ultra-fine wires have also been required for wire saw wires to realize high-precision and high-efficiency cutting. That is, the tensile strength is 2900 MPa
As described above, the demand for wires having a wire diameter of about 50 to 200 μm is increasing. When such an extra fine wire is used, the actual tension applied to the wire during the cutting process is 40% or more of the breaking load of the wire, and may reach about 70% in some cases. Therefore, if the wire has surface defects such as scratches, lateral cracks, and rust, and internal defects such as internal cracks, inclusion of foreign matter, and poor structure, the incidence of disconnection accidents becomes extremely high. The disconnection accident during the cutting process is a serious problem in terms of quality and cost because it deteriorates the smoothness and cutting accuracy of the fractured surface of the wafer and greatly reduces the workability.
【０００５】上記のワイヤ表面欠陥及び内部欠陥を防ぐ
ために、ワイヤ伸線条件を工夫したり、伸線時のガイド
ローラー類の整備をしたり、高清浄度の線材を用いる等
の対策は試みられているが、上記欠陥を完全には防ぎき
れていないのが現状である。[0005] In order to prevent the above-mentioned surface defects and internal defects of the wire, measures such as devising wire drawing conditions, maintaining guide rollers at the time of wire drawing, and using wires of high cleanliness have been attempted. However, at present, the above-mentioned defects have not been completely prevented.
【０００６】そこで、別の試みとして、切削加工時にお
けるワイヤの断線を防ぐ目的で、切削加工の前工程とし
て、センサーによるワイヤの全長検査が試行されてい
る。すなわち、この全長検査は、伸線加工してリールに
巻き取ったワイヤを、再度繰出して走行させながら、渦
流探傷器、磁気探傷器、超音波探傷器等のセンサーによ
りワイヤ欠陥を検出しようとするものである。Therefore, as another attempt, in order to prevent disconnection of the wire at the time of cutting, a full-length inspection of the wire using a sensor has been tried as a pre-process of cutting. In other words, this full length inspection attempts to detect a wire defect by a sensor such as an eddy current flaw detector, a magnetic flaw detector, an ultrasonic flaw detector, etc., while the wire drawn and wound on a reel is fed out and run again. Things.
【０００７】しかし、この全長検査によるときは、ワイ
ヤの表面欠陥（特にキズの大きなもの）は検出できて
も、微少なキズについて検出漏れが起こり易いばかり
か、非金属介在物、酸化物、不純物等の内部欠陥である
異物は検出できない。また、欠陥の検出率を上げるため
にセンサーの感度を上げると、ワイヤ表面に付着するほ
こりや潤滑剤まで検出してしまう、いわゆる誤作動が発
生し、ワイヤ欠陥の無い部分も不良箇所と判断してしま
うことになる。However, according to the full-length inspection, even if a wire surface defect (especially one having a large flaw) can be detected, detection of a small flaw easily occurs, and non-metallic inclusions, oxides, impurities, etc. Foreign matter, which is an internal defect such as, cannot be detected. In addition, if the sensitivity of the sensor is increased to increase the defect detection rate, dust or lubricant attached to the wire surface will be detected, causing a so-called malfunction. Would be.
【０００８】[0008]
【発明が解決しようとする課題】本発明は、上記従来技
術の種々の問題を解決し、ワイヤの表面欠陥及び内部欠
陥を確実に精度良く検出できる機能を有するワイヤソー
用ワイヤの伸線方法及び伸線装置を提供することを課題
とする。SUMMARY OF THE INVENTION The present invention solves the above-mentioned various problems of the prior art, and provides a wire-drawing method and a wire-drawing wire for a wire saw having a function of reliably and accurately detecting surface defects and internal defects of the wire. It is an object to provide a wire device.
【０００９】[0009]
【課題を解決するための手段】本発明者は、従来のセン
サーによるいわば光学的・電磁気的特性を利用する方法
では、ワイヤの確実な全長保証は到底できないと考え、
物理的・実測的な方法を鋭意研究し、本発明を成すに至
った。すなわち、本発明のワイヤソー用ワイヤの伸線方
法は、硬鋼線やピアノ線等の高抗張力線材を細径に伸線
加工するワイヤソー用ワイヤの伸線方法において、最終
ダイスを通過した線径５０〜２００μｍのワイヤに、ワ
イヤソー切削時の設定引張り張力以上でワイヤ破断荷重
の７０％以下の引張り張力をかけ、その後通常の巻取り
張力で巻き取ることを特徴とする。The inventor of the present invention believes that the conventional method utilizing the optical and electromagnetic characteristics of a sensor cannot guarantee a reliable overall length of a wire.
The present inventors have made intensive studies on physical and actual methods, and have accomplished the present invention. That is, the wire drawing method for a wire saw wire according to the present invention is a wire drawing method for a wire saw wire for drawing a high tensile strength wire such as a hard steel wire or a piano wire to a small diameter. It is characterized in that a wire of up to 200 μm is subjected to a tensile tension of 70% or less of the breaking load of the wire, which is higher than the set tensile tension at the time of cutting the wire saw, and then wound with a normal winding tension.
【００１０】また、本発明のワイヤソー用ワイヤの伸線
装置は、繰出し部、伸線部、巻取り部を連設してなるワ
イヤソー用ワイヤの伸線装置において、伸線部と巻取り
部の間に、ワイヤの引張り張力を変動調整できるダンサ
ーローラ１と、その前後に引取りキャプスタン２，３を
配置してなることを特徴とする。Further, the wire-saw wire drawing device of the present invention is a wire-saw wire drawing device comprising a feeding portion, a wire drawing portion, and a winding portion connected to each other. It is characterized in that a dancer roller 1 capable of variably adjusting the tensile tension of a wire and take-off capstans 2 and 3 are arranged before and after the dancer roller 1.
【００１１】本発明では、最終伸線したワイヤに物理的
に大きな引張り張力を負荷する手段を採用したので、ワ
イヤの引張り強度に関して確実な全長保証が可能とな
る。すなわち、ワイヤに内部欠陥や表面欠陥があると、
その部分のワイヤ破断張力が局部的に極端に低下してい
るから、負荷する引張り張力に耐え切れずワイヤは断線
する。この時点で断線しないワイヤは、実際のワイヤソ
ー装置での切削加工中に断線することがほとんど無くな
る。In the present invention, since a means for applying a physically large tensile tension to the finally drawn wire is employed, it is possible to reliably guarantee the overall length of the wire in terms of tensile strength. That is, if the wire has internal defects or surface defects,
Since the wire breaking tension at that portion is extremely reduced locally, the wire breaks because it cannot withstand the applied tensile tension. The wire that does not break at this point hardly breaks during cutting with an actual wire saw device.
【００１２】本発明において、線径５０〜２００μｍの
ワイヤにかける引張り張力を、ワイヤソー切削時の設定
引張り張力以上でワイヤ破断荷重の７０％以下の範囲に
したのは、線径５０〜２００μｍの範囲のワイヤには、
切削加工時に少なくともワイヤの破断荷重の４０％以上
の設定引張り張力が負荷されるが、この切削加工時の設
定引張り張力より伸線時の負荷張力が小さいと、伸線時
に断線しなかったワイヤが切削加工時において断線の発
生率が高くなるからである。切削加工途中での断線事故
の発生は、品質、作業性、コストを悪化させることにな
る。また、ワイヤ破断荷重の７０％を越えると、切削時
の設定張力範囲を越え更には弾性限度をも越えることに
なるので、ワイヤ欠陥がなくともワイヤが伸びたり、ひ
いては断線が発生するおそれがあるからである。In the present invention, the reason why the tensile tension applied to the wire having a wire diameter of 50 to 200 μm is set to be in a range of not less than a set tensile tension at the time of wire saw cutting and not more than 70% of a wire breaking load is in a range of a wire diameter of 50 to 200 μm. The wire has
At the time of cutting, a set tensile tension of at least 40% of the breaking load of the wire is applied, but if the applied tension at the time of drawing is smaller than the set tensile tension at the time of cutting, the wire that did not break at the time of drawing may be damaged. This is because the rate of occurrence of disconnection increases during cutting. The occurrence of a disconnection accident during the cutting process deteriorates the quality, workability and cost. On the other hand, if the wire breaking load exceeds 70%, the tension exceeds the set tension range at the time of cutting, and further exceeds the elastic limit. Therefore, even if there is no wire defect, the wire may be elongated, and eventually the wire may be broken. Because.
【００１３】また、本発明によれば、伸線加工とワイヤ
の強度検査が一工程でできるので、能率が格段に向上し
て、ワイヤのコストを下げることができる。Further, according to the present invention, since wire drawing and wire strength inspection can be performed in one step, efficiency can be remarkably improved and wire cost can be reduced.
【００１４】本発明において、ワイヤ径を細径の５０〜
２００μｍの範囲にしたのは、２００μｍを越えると、
ワイヤの内部欠陥や微少なキズの影響による断線の発生
率が極端に減少して、あらかじめワイヤに引張り張力を
かけて伸線する必要性が希薄となるからである。一例を
挙げると、ＳＷＲＳ８２Ａの高清浄度線材を使用した場
合、金属組織中に異物として存在する非金属介在物のサ
イズは最大幅１０μｍ程度のものであり、この介在物の
断線に及ぼす影響が微少となり、また、ワイヤの破断荷
重に対する切削時の張力の割合が４０％未満となるた
め、断線発生の危険が遠ざかるからである。In the present invention, the wire diameter is reduced to 50 to
The reason for setting the range to 200 μm is that when the thickness exceeds 200 μm,
This is because the rate of occurrence of disconnection due to the influence of internal defects or minute scratches on the wire is extremely reduced, and the necessity of drawing the wire with a tensile tension in advance is reduced. As an example, when a SWRS82A high cleanliness wire is used, the size of the nonmetallic inclusions present as foreign matter in the metal structure is about 10 μm in maximum width, and the influence of the inclusions on the disconnection is minimal. Also, since the ratio of the tension at the time of cutting to the breaking load of the wire is less than 40%, the danger of the occurrence of disconnection goes away.
【００１５】また、ワイヤ径が５０μｍに満たないと、
ワイヤソー用ワイヤとして限界に近い細さであり、実用
に耐えることができないからである。従って、本発明の
ワイヤ径の範囲としては、５０〜２００μｍ、より好ま
しくは５０〜１２０μｍである。When the wire diameter is less than 50 μm,
This is because the wire saw has a thinness near the limit as a wire for a wire saw and cannot withstand practical use. Therefore, the range of the wire diameter of the present invention is 50 to 200 μm, more preferably 50 to 120 μm.
【００１６】[0016]
【発明の実施の形態】本発明の伸線装置の基本的な構成
を図１に示す。繰出し機Ａには、パテンティング−伸線
前処理−伸線加工（乾式）を繰り返し行なって１ｍｍ前
後にまで細径化し、さらに、最終パテンティングを施し
た後に真鍮めっきを施した線材Ｗ0が巻回されている。
この線材Ｗ0を繰出し機Ａから繰出して伸線機Ｂに導入
し、ここで仕上り線径５０〜２００μｍのワイヤＷに伸
線して、次にワイヤＷを張力負荷部Ｃに導きここで所定
範囲の過大な張力を負荷した後に、巻取り機Ｄによって
通常の巻取り張力で巻き取るものである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a basic configuration of a wire drawing apparatus according to the present invention. The unwinder A, patenting - drawing pretreatment - repeatedly performed drawing (dry) was reduced in diameter to around 1 mm, furthermore, the wire W 0 subjected to brass plating after performing a final patenting It is wound.
The wire material W 0 Te fed from unwinder A was introduced into drawing machine B, where by drawing the wire W of the finished wire diameter 50 to 200 [mu] m, then guides the wire W to the tension load unit C given here After applying an excessive tension in the range, the winding machine D winds up with a normal winding tension.
【００１７】この場合において、伸線機Ｂは一般的に使
用される湿式のコーンタイプのものを使用するのが好適
である。すなわち、駆動コーンと従動コーンの間に配置
したダイスボックスに１０〜２０個程度のダイスをセッ
トし、このダイス群に順次ワイヤを通過させ駆動コーン
で引き抜くことにより所望の仕上り線径に仕上げるもの
である。In this case, it is preferable to use a commonly used wet cone type wire drawing machine B. That is, about 10 to 20 dies are set in a die box arranged between a driving cone and a driven cone, and a wire is sequentially passed through the dice group and pulled out with a driving cone to finish to a desired finished wire diameter. is there.
【００１８】また、張力負荷部Ｃは、ダンサーローラ１
の前後に駆動キャプスタン２，３を有して成る。ダンサ
ーローラ１には、固定ローラ４と移動ローラ５が設けて
ある。伸線機Ｂで仕上り線径まで伸線したワイヤＷを、
駆動キャプスタン２に複数回巻き回した後ダンサーロー
ラ１に送り、ダンサーローラ１の固定ローラ４と移動ロ
ーラ５に数回巻き回す。さらに、ワイヤＷを駆動キャプ
スタン３に複数回巻き回した後、巻取機Ｄにて巻き取る
ものである。Further, the tension load section C includes the dancer roller 1
And drive capstans 2 and 3 before and after. The dancer roller 1 has a fixed roller 4 and a moving roller 5. The wire W drawn by the wire drawing machine B to the finished wire diameter is
After being wound a plurality of times around the drive capstan 2, it is sent to the dancer roller 1 and wound around the fixed roller 4 and the moving roller 5 of the dancer roller 1 several times. Further, the wire W is wound around the drive capstan 3 a plurality of times, and then wound up by the winder D.
【００１９】図１において、ワイヤＷに過大な張力がか
かるのは、駆動キャプスタン２，３の間である。張力の
大きさの増減は、ダンサーローラ１に設けた移動ローラ
５の上下運動により制御できる。すなわち、移動ローラ
５が下がる（固定ローラ４と移動ローラ５間の距離大き
くなる）と張力が増大し、逆に移動ローラ５が上がる
（固定ローラ４と移動ローラ５間の距離が小さくなる）
と張力が減少する。ワイヤＷの張力値はロードセル等の
荷重測定機構によって測定する。そして、荷重測定機構
によって測定した実測値を電気信号に置き換え制御機器
にフィードバックし、この実測値とあらかじめ入力した
設定張力とを比較演算し、演算した修正値をダンサーロ
ーラ１に送って移動ローラ５を移動することにより、ワ
イヤに所望の設定張力を連続的に与えることができる。In FIG. 1, excessive tension is applied to the wire W between the driving capstans 2 and 3. The increase or decrease in the magnitude of the tension can be controlled by the vertical movement of the moving roller 5 provided on the dancer roller 1. That is, when the moving roller 5 is lowered (the distance between the fixed roller 4 and the moving roller 5 is increased), the tension is increased, and conversely, the moving roller 5 is raised (the distance between the fixed roller 4 and the moving roller 5 is reduced).
And the tension decreases. The tension value of the wire W is measured by a load measuring mechanism such as a load cell. Then, the measured value measured by the load measuring mechanism is replaced with an electric signal and fed back to the control device, the measured value is compared with a preset tension input, and the calculated correction value is sent to the dancer roller 1 to be transmitted to the moving roller 5. By moving the wire, a desired set tension can be continuously applied to the wire.
【００２０】ここで注意すべきことは、張力負荷部Ｃ−
巻取り機Ｄ間の巻取り張力は、ワイヤ欠陥検出用の張力
に比べて小さく抑える必要がある、ということである。
例えば、リールに巻き取る張力が大きすぎると、リール
の巻圧が異常に高くなり、リールが破損する事故が発生
する。この事故を防ぐために駆動キャプスタン３は必要
である。It should be noted here that the tension load portion C-
This means that the winding tension between the winding machines D needs to be suppressed smaller than the tension for detecting wire defects.
For example, if the tension wound around the reel is too large, the winding pressure of the reel becomes abnormally high, and an accident that the reel is broken occurs. The drive capstan 3 is necessary to prevent this accident.
【００２１】[0021]
【実施例】ＳＷＲＳ８２Ａ相当の硬鋼線材を１．０ｍｍ
迄伸線加工し、パテンティング後に真鍮めっきを施した
線材を、湿式連続伸線機により仕上り線径８０μｍに伸
線加工し、次いで張力負荷部においてワイヤに０．９ｋ
ｇｆの張力を負荷し、その後巻取り張力０．２ｋｇｆで
巻取りリールに巻き取った。なお、このワイヤの破断荷
重は１．８ｋｇｆである。また、この他にも伸線時の負
荷張力を様々に変えた他の実施例や比較例のワイヤを製
造し、これらのワイヤを実際のワイヤソー装置で切削テ
ストした結果をまとめて表１に示す。[Example] Hard steel wire rod equivalent to SWRS82A was 1.0 mm
The wire rod that has been subjected to wire drawing until it has been subjected to patenting and then subjected to brass plating is drawn to a finished wire diameter of 80 μm by a wet continuous wire drawing machine, and then 0.9 k is applied to the wire in the tension load section.
gf tension was applied, and then the film was wound around a take-up reel at a winding tension of 0.2 kgf. The breaking load of this wire is 1.8 kgf. Further, in addition to the above, wires of other examples and comparative examples in which the load tension at the time of drawing was variously changed were manufactured, and the results of cutting tests of these wires with an actual wire saw device are summarized in Table 1. .
【００２２】なお、各例の伸線量は、６０μｍ、８０μ
ｍのワイヤについては約１０ｋｇ、その他の線径のワイ
ヤについては約２０ｋｇとした。また、ワイヤの合否に
ついては、ワイヤソー装置での研削加工時に１回でも断
線すれば「否」、断線しなければ「合」とした。また、
表１において、Ｔ0は破断張力，Ｔは伸線時の負荷張力
である。The drawing amount in each case was 60 μm, 80 μm.
About 10 kg for the wire of m, and about 20 kg for wires of other wire diameters. The pass / fail of the wire was determined as “No” if the wire was broken even once at the time of grinding with a wire saw device, and “Pass” if the wire was not broken. Also,
In Table 1, T 0 is the breaking tension, T is a load tension during drawing.
【００２３】[0023]
【表１】 [Table 1]
【００２４】実験Ｎｏ１，３，４，７，９，１１の実施
例では、伸線時にワイヤ欠陥を検出でき、その後の切削
加工時における断線を防止することができた。これに対
し、実験Ｎｏ２，５，８，１２の比較例は、伸線時に負
荷する張力が切削加工時の負荷張力より小さい場合であ
る。この場合、実際の切削時に断線事故が発生してしま
い、被削材の品質劣化を誘引すると共に、大きな作業ロ
スが生じた。実験Ｎｏ６，１０の比較例は、伸線時の負
荷張力がワイヤ破断荷重の７０％を越える場合である。
この場合は伸線時（張力負荷時）に断線が頻発し、使い
物になるワイヤが得られなかったため、ワイヤソー装置
での切削加工は中止した。また、実験Ｎｏ１３の比較例
は、ワイヤ径が２００μｍを越え伸線時の負荷張力が切
削加工時の負荷張力より小さい場合がであるが、断線は
発生しないことを確認した。In Examples of Experiments Nos. 1, 3, 4, 7, 9, and 11, wire defects could be detected at the time of wire drawing, and breakage during subsequent cutting could be prevented. On the other hand, the comparative examples of Experiment Nos. 2, 5, 8, and 12 are cases where the tension applied during wire drawing is smaller than the applied tension during cutting. In this case, a disconnection accident occurred during actual cutting, leading to quality deterioration of the work material and a large work loss. The comparative examples of Experiment Nos. 6 and 10 are cases where the applied tension at the time of wire drawing exceeds 70% of the wire breaking load.
In this case, the wire was frequently broken at the time of drawing (at the time of tension load), and a usable wire could not be obtained. Therefore, the cutting with the wire saw device was stopped. In the comparative example of Experiment No. 13, it was confirmed that the wire diameter exceeded 200 μm and the load tension at the time of wire drawing was smaller than the load tension at the time of cutting, but no breakage occurred.
【００２５】[0025]
【発明の効果】本発明によれば、最終伸線時においてワ
イヤソー用ワイヤの表面欠陥及び内部欠陥を確実に検出
できるため、実際の研削時における断線事故を可及的に
減少したワイヤを得ることができる。よって、被削材の
切削精度や切削面の品質を高めることができ、高精度、
高効率の切削が可能となる。また、伸線加工とワイヤ欠
陥検出を一工程で出来るので、伸線、検査のトータルコ
ストを大きく低減できる。According to the present invention, since a surface defect and an internal defect of a wire saw wire can be reliably detected at the time of final drawing, it is possible to obtain a wire in which the number of disconnection accidents during actual grinding is reduced as much as possible. Can be. Therefore, it is possible to improve the cutting accuracy and the quality of the cut surface of the work material,
Highly efficient cutting becomes possible. In addition, since wire drawing and wire defect detection can be performed in one step, the total cost of wire drawing and inspection can be greatly reduced.
【図１】本発明の一実施例を示す伸線装置の概略全体図
である。FIG. 1 is a schematic overall view of a wire drawing apparatus showing one embodiment of the present invention.
１ ダンサーローラ ２，３ 駆動キャプスタン ４ 固定ローラ ５ 移動ローラ Ａ 繰出し機 Ｂ 伸線機 Ｃ 張力負荷部 Ｄ 巻取り機 DESCRIPTION OF SYMBOLS 1 Dancer roller 2, 3 Drive capstan 4 Fixed roller 5 Moving roller A Feeding machine B Wire drawing machine C Tension loading part D Winding machine
Claims (2)
径に伸線加工するワイヤソー用ワイヤの伸線方法におい
て、最終ダイスを通過した線径５０〜２００μｍのワイ
ヤに、ワイヤソー切削時の設定引張り張力以上でワイヤ
破断荷重の７０％以下の引張り張力をかけ、その後通常
の巻取り張力で巻き取ることを特徴とするワイヤソー用
ワイヤの伸線方法。1. A wire drawing method for a wire saw wire for drawing a high tensile strength wire such as a hard steel wire or a piano wire to a small diameter, wherein the wire having a wire diameter of 50 to 200 μm that has passed through a final die is cut. A wire drawing method for a wire saw, characterized in that a tensile tension of 70% or less of the wire breaking load is applied to the wire at a tension of not less than the set tension and then wound at a normal winding tension.
なるワイヤソー用ワイヤの伸線装置において、伸線部と
巻取り部の間に、ワイヤの引張り張力を変動調整できる
ダンサーローラ１と、その前後に駆動キャプスタン２，
３を配置してなることを特徴とするワイヤソー用ワイヤ
の伸線装置。2. In a wire drawing apparatus for a wire saw, comprising a pay-out portion, a wire drawing portion, and a winding portion connected in series, a dancer capable of variably adjusting the tension of the wire between the wire drawing portion and the winding portion. Roller 1 and drive capstans 2 before and after it
3. A wire drawing device for a wire saw, wherein 3 is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34516398A JP2000167618A (en) | 1998-12-04 | 1998-12-04 | Method for drawing wire for wire saw and drawing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34516398A JP2000167618A (en) | 1998-12-04 | 1998-12-04 | Method for drawing wire for wire saw and drawing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000167618A true JP2000167618A (en) | 2000-06-20 |
Family
ID=18374719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34516398A Pending JP2000167618A (en) | 1998-12-04 | 1998-12-04 | Method for drawing wire for wire saw and drawing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000167618A (en) |
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