JP2000141656A - Ink-jet head and its manufacture - Google Patents
Ink-jet head and its manufactureInfo
- Publication number
- JP2000141656A JP2000141656A JP33500598A JP33500598A JP2000141656A JP 2000141656 A JP2000141656 A JP 2000141656A JP 33500598 A JP33500598 A JP 33500598A JP 33500598 A JP33500598 A JP 33500598A JP 2000141656 A JP2000141656 A JP 2000141656A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- liquid chamber
- pressurized liquid
- pressure generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14483—Separated pressure chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/18—Electrical connection established using vias
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、マイクロマシーニ
ング技術を利用して製造するオンディマンド式インクジ
ェットヘッドのアクチュエータ及びその製造方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator of an on-demand type ink jet head manufactured by utilizing micromachining technology and a method of manufacturing the same.
【０００２】[0002]
【従来の技術】インクジェットプリンタは、低価格かつ
小型のフルカラープリンタとして近年普及が著しい。こ
の理由として、専用紙の低価格化や写真画質を実現する
ための光沢紙の開発と共に、低価格機にも搭載可能な低
コストの高密度高性能インクジェットヘッドの開発があ
げられる。しかし、フルカラー印字の速度ではレーザプ
リンタのＡ４版で毎分数枚の印字速度に比較すると劣っ
ており、ヘッドのさらなる高密度化の需要が期待され
る。2. Description of the Related Art Ink-jet printers have become very popular in recent years as low-cost and compact full-color printers. The reasons for this include the development of low-cost, high-density, high-performance inkjet heads that can be mounted on low-cost machines, as well as the development of glossy paper for lowering the price of dedicated paper and achieving photographic image quality. However, the speed of full-color printing is inferior to the printing speed of several sheets per minute in the A4 size of a laser printer, and demand for higher density of the head is expected.
【０００３】静電方式のインクジェットヘッドについて
は、ウエハプロセスでの作製が可能であることから、高
密度化が容易で、かつ大量に特性の安定した素子を作製
でき、また、平面構造を基本とすることから、小型化が
容易である長所を持つことから、特開平２−２８９３５
１号公報，特開平５−５０６０１号公報，特開平６−７
１８８２号公報，特開平９−３１４８３７号公報等多く
の構造が開示されている。これらの静電方式ヘッドは、
液室の底面を構成する振動板の対向する位置に平行平板
電極が形成され、静電引力と振動板の剛性による振動で
インクを吸引，吐出するものであり、振動板を間接的に
駆動する構成例は報告されていない。[0003] Electrostatic inkjet heads can be manufactured in a wafer process, so that high-density elements can be easily manufactured with a large number of elements having stable characteristics. And the advantage that miniaturization is easy.
No. 1, JP-A-5-50601, JP-A-6-7
Many structures are disclosed, such as Japanese Patent No. 1882, Japanese Patent Application Laid-Open No. 9-314837, and the like. These electrostatic heads
Parallel plate electrodes are formed at opposing positions of the diaphragm that constitutes the bottom surface of the liquid chamber, and suck and discharge ink by vibration due to electrostatic attraction and the rigidity of the diaphragm, and indirectly drive the diaphragm. No configuration example has been reported.
【０００４】[0004]
【発明が解決しようとする課題】オンディマンド式イン
クジェットプリンタでは、６００ｄｐｉ以上の銀塩写真
に近い高画質で、しかも、３枚／分以上の高速印刷を行
うことが求められており、ヘッド密度が６本／ｍｍ以上
は当然必要になってきている。振動板と対向電極間に静
電力を発生させ、振動板を変形して該振動板の復元力に
より液を加圧して液を吐出する方式の静電型インクジェ
ットヘッドにおいて、インク吐出に必要な変位を発生さ
せる駆動電圧は、ノズル密度が上がるに従い振動板の短
辺長が短くなるために高くなる。駆動電圧が高くなる
と、ドライバーＩＣが高価になると共に、配線の耐圧等
の規格の変更の必要が生じることなど、実装コストの上
昇を招く。In an on-demand type ink jet printer, it is required to perform high-speed printing of 3 sheets / min or more with high image quality close to a silver halide photograph of 600 dpi or more, and a head density of 6 or more. Naturally, a value of at least book / mm is required. In an electrostatic ink jet head of a type in which an electrostatic force is generated between the diaphragm and the counter electrode to deform the diaphragm and pressurize the liquid by the restoring force of the diaphragm to discharge the liquid, the displacement required for ink discharge Is higher as the nozzle density increases, because the shorter side length of the diaphragm becomes shorter. When the drive voltage is increased, the driver IC becomes expensive, and it is necessary to change the standard such as the withstand voltage of the wiring.
【０００５】駆動電圧の上昇が、振動板の短辺長が短く
なることが原因であること、圧力の伝達手段があればイ
ンク吐出のための圧力の発生源とインク加圧液室を空間
的に分離することが可能であることに着目すると、両者
を分離することにより、圧力発生源とインク吐出のノズ
ルの位置関係は無関係になるため、設定した駆動電圧で
の圧力発生のための振動板短辺長，長辺長及び振動板膜
厚を取り得ることがわかる。本発明は、非圧縮性流体を
用いアクチュエータを間接駆動することで、より低電圧
で駆動可能な静電型インクジェットヘッドを提供するこ
とにある。[0005] The rise in the driving voltage is due to the short side length of the diaphragm being shortened. If there is a pressure transmitting means, the pressure source for ink ejection and the ink pressurized liquid chamber are spatially separated. When focusing on the fact that it is possible to separate the two, the positional relationship between the pressure generation source and the nozzles for ink ejection becomes irrelevant, so the diaphragm for generating pressure at the set driving voltage is used. It can be seen that the short side length, the long side length, and the diaphragm thickness can be taken. An object of the present invention is to provide an electrostatic inkjet head that can be driven at a lower voltage by indirectly driving an actuator using an incompressible fluid.
【０００６】[0006]
【課題を解決するための手段】請求項１の発明は、圧力
発生振動板と対向電極間に静電力を発生させ、圧力発生
振動板を変位させることにより生ずる圧力または圧力発
生振動板の復元力により生ずる圧力のいずれか一方もし
くは両方により、液を吐出する方式の静電型インクジェ
ットヘッドにおいて、圧力発生振動板の変位および復元
力により発生した圧力を非圧縮性流体により伝達し、間
接的に加圧液室に設けた加圧液室振動板を駆動し、圧力
を吐出液体に伝達するインクジェットヘッドに関する。According to a first aspect of the present invention, a pressure generated by generating an electrostatic force between a pressure generating diaphragm and a counter electrode and displacing the pressure generating diaphragm or a restoring force of the pressure generating diaphragm. The pressure generated by the displacement and restoring force of the pressure generating diaphragm is transmitted by an incompressible fluid in the electrostatic ink jet head of the type that discharges the liquid by one or both of the pressures generated by The present invention relates to an inkjet head that drives a pressurized liquid chamber diaphragm provided in a pressurized liquid chamber and transmits pressure to a discharge liquid.
【０００７】請求項２の発明は、請求項１の発明におい
て、圧力発生振動板の面積と加圧液室に設けた加圧液室
振動板の面積が異なることを特徴とするインクジェット
ヘッドに関する。A second aspect of the present invention relates to the ink jet head according to the first aspect, wherein the area of the pressure generating diaphragm is different from the area of the pressurized liquid chamber diaphragm provided in the pressurized liquid chamber.
【０００８】請求項３の発明は、請求項１または２の発
明において、対向電極の厚さを圧力発生振動板と同様に
薄くし、両者が共に変位することを特徴とするインクジ
ェットヘッドに関する。According to a third aspect of the present invention, there is provided an ink jet head according to the first or second aspect, wherein the thickness of the counter electrode is reduced similarly to the pressure generating diaphragm, and both are displaced.
【０００９】請求項４の発明は、請求項１，２または３
の発明における圧力発生振動板から加圧液室に設けられ
た加圧液室振動板までの圧力媒体となる非圧縮性流体の
流路を、シリコンの異方性エッチングにより作成するこ
とを特徴とするインクジェットヘッドの製造方法に関す
る。The invention of claim 4 is the invention of claim 1, 2, or 3.
The flow path of an incompressible fluid serving as a pressure medium from the pressure generating vibration plate to the pressurized liquid chamber vibration plate provided in the pressurized liquid chamber according to the invention is characterized by being formed by anisotropic etching of silicon. The present invention relates to a method for manufacturing an inkjet head.
【００１０】請求項５の発明は、請求項４の発明におい
て、圧力発生振動板から加圧液室に設けられた加圧液室
振動板までの圧力媒体となる非圧縮性流体を流路に封入
する際、真空中で封入することを特徴とするインクジェ
ットヘッドの製造方法に関する。According to a fifth aspect of the present invention, in the fourth aspect, an incompressible fluid serving as a pressure medium from the pressure generating diaphragm to the pressurized fluid chamber diaphragm provided in the pressurized fluid chamber is supplied to the flow path. The present invention relates to a method for manufacturing an ink-jet head, which is characterized in that sealing is performed in a vacuum when sealing.
【００１１】請求項６の発明は、請求項４または５の発
明において、圧力発生振動板から加圧液室に設けられた
加圧液室振動板までの圧力媒体となる非圧縮性流体を流
路中に封止する際、流路の一端に基板に貫通する穴を設
け樹脂により封止を行うことを特徴とするインクジェッ
トヘッドの製造方法に関する。According to a sixth aspect of the present invention, in accordance with the fourth or fifth aspect, an incompressible fluid as a pressure medium flows from the pressure generating diaphragm to the pressurized fluid chamber diaphragm provided in the pressurized fluid chamber. The present invention relates to a method for manufacturing an ink jet head, characterized in that when sealing in a road, a hole penetrating through a substrate is provided at one end of a flow path and sealing is performed with a resin.
【００１２】[0012]
【発明の実施の形態】実施例を用い本発明の構成及び製
造法を説明する。図１に本発明の静電型インクジェット
ヘッドの構成例を示した。アクチュエータは、図１に示
すように、ノズル１０６をアレイ状に配置したノズルプ
レート１０１、インク流路１０８およびノズルの一部１
０９を配置した上部流路プレート１０２、インク供給路
１１０およびノズルの一部１１１を配置した下部流路プ
レート１０３、加圧液室１１２、対向電極を兼ねる圧力
発生振動板１１６とその電極部１１３，１１４および加
圧液室振動板１１５を異方性エッチングにより一体形成
した（１１０）上部Ｓｉ基板１０４、圧力媒体流路１１
７および圧力発生振動板１１８とその電極部１１９，１
２０を異方性エッチングにより一体形成した（１１０）
下部Ｓｉ基板１０５より構成される。DESCRIPTION OF THE PREFERRED EMBODIMENTS The construction and manufacturing method of the present invention will be described with reference to examples. FIG. 1 shows a configuration example of the electrostatic inkjet head of the present invention. As shown in FIG. 1, the actuator includes a nozzle plate 101 in which nozzles 106 are arranged in an array, an ink flow path 108, and a part 1 of the nozzles.
09, an upper channel plate 102 in which the ink supply passage 110 and a part 111 of the nozzle are arranged, a pressurized liquid chamber 112, a pressure generating diaphragm 116 also serving as a counter electrode, and its electrode portion 113, (110) Upper Si substrate 104 integrally formed with anisotropic etching of 114 and pressurized liquid chamber diaphragm 115, pressure medium flow path 11
7 and pressure generating diaphragm 118 and its electrode portions 119 and 1
20 was integrally formed by anisotropic etching (110)
It is composed of a lower Si substrate 105.
【００１３】ノズルプレート１０１、上部流路プレート
１０２、下部流路プレート１０３は、ガラスプレートま
たはステンレスプレートを用いる。加工法としては、エ
ッチング，マスクを用いたサンドブラスト加工および放
電加工等を用いることができる。A glass plate or a stainless steel plate is used for the nozzle plate 101, the upper channel plate 102, and the lower channel plate 103. As a processing method, etching, sand blast processing using a mask, electric discharge processing, or the like can be used.
【００１４】加圧液室１１２、対向電極を兼ねる圧力発
生振動板１１６および加圧液室振動板１１５を異方性エ
ッチングにより一体形成した（１１０）上部Ｓｉ基板１
０４、圧力媒体流路１１７および圧力発生振動板１１８
とその電極部１１９，１２０を異方性エッチングにより
一体形成した（１１０）下部Ｓｉ基板１０５は、（１１
０）Ｓｉ基板のＫＯＨ水溶液、ＴＭＡＨ、ＥＰＷ、ヒド
ラジン等を用いたエッチングにより形成する。(110) Upper Si substrate 1 in which a pressurized liquid chamber 112, a pressure generating diaphragm 116 also serving as a counter electrode, and a pressurized liquid chamber diaphragm 115 are integrally formed by anisotropic etching.
04, pressure medium channel 117 and pressure generating diaphragm 118
And (110) lower Si substrate 105 in which electrodes 119 and 120 are integrally formed by anisotropic etching.
0) An Si substrate is formed by etching using a KOH aqueous solution, TMAH, EPW, hydrazine or the like.
【００１５】この方法では、加圧液室１１２および圧力
発生振動板の電極部１１３を異方性エッチングにより形
成した際、エッチングにより残った部分が加圧液室振動
板１１５，圧力発生振動板１１６となるため、加圧液室
１１２部分のエッチングの終点の制御がそのまま加圧液
室振動板１１５の厚さの制御に直結している。異方性エ
ッチングの終点の制御には、ボロンの高濃度拡散層によ
るエッチストップやリン拡散層の陽極酸化による電気化
学エッチストップを用いることが効果的である。In this method, when the pressurized liquid chamber 112 and the electrode portion 113 of the pressure generating vibration plate are formed by anisotropic etching, the portions left by the etching are the pressurized liquid chamber vibration plate 115 and the pressure generating vibration plate 116. Therefore, the control of the end point of the etching of the pressurized liquid chamber 112 is directly connected to the control of the thickness of the pressurized liquid chamber diaphragm 115 as it is. To control the end point of the anisotropic etching, it is effective to use an etch stop by a high concentration diffusion layer of boron or an electrochemical etch stop by anodic oxidation of a phosphorus diffusion layer.
【００１６】図２に振動板を一体形成した（１１０）Ｓ
ｉ基板のプロセスの一例を示す。まず、（１１０）ｎ−
型Ｓｉ基板を用意し（Ａ）、圧力発生振動板の圧力媒体
との接液面を、ネガレジストによりパターニング後
（Ｂ）、ドライエッチングによりエッチングし（Ｃ）、
ＳｉＮを両面に成膜し（Ｄ）、振動板を形成する部分を
ネガレジストによりパターニングし、ドライエッチング
によりＳｉＮ膜を除去し（Ｅ）、ボロン拡散の際のマス
クとする、両面からボロンを１０19ｃｍ-3以上の濃度に
なるよう目標振動板厚にあたる深さまで拡散する
（Ｆ）、加圧液室，圧力発生振動板の電極側および圧力
媒体流路など凹となる部分のＳｉＮ膜に対し、ネガレジ
ストにより加圧液室，インク流路などのパターンを施
し、ＳｉＮ膜をドライエッチングにより除去し（Ｇ）、
Ｓｉ基板異方性エッチングのためのマスクとする、ＫＯ
Ｈ水溶液を用い異方性エッチングを行い（Ｈ）、Ｓｉ基
板表面のＳｉＮ膜を熱燐酸により除去し（Ｉ）、Ｓｉ直
接接合面をネガレジストによりパターニングし（Ｊ），
（Ｋ）、直接接合面に露出したｐ−ｎ接合面をドライエ
ッチングによりエッチングして段差を設ける（Ｌ）、レ
ジスト除去後（Ｍ）、圧力発生振動板の電極側に電極用
メタルをマスクを用いスパッタ成膜する。FIG. 2 shows a case where the diaphragm is integrally formed (110) S
1 shows an example of an i-substrate process. First, (110) n-
A mold Si substrate is prepared (A), the liquid contact surface of the pressure generating diaphragm with the pressure medium is patterned by a negative resist (B), and then etched by dry etching (C).
A film of SiN is formed on both surfaces (D), a portion where a diaphragm is to be formed is patterned with a negative resist, the SiN film is removed by dry etching (E), and boron is used as a mask for boron diffusion. It is diffused to a depth corresponding to the target diaphragm thickness so that the concentration becomes 19 cm -3 or more (F), and is applied to the concave portion of the SiN film such as the pressurized liquid chamber, the electrode side of the pressure generating diaphragm and the pressure medium flow path. A pattern such as a pressurized liquid chamber and an ink flow path is formed by a negative resist, and the SiN film is removed by dry etching (G).
KO as a mask for anisotropic etching of Si substrate
Anisotropic etching is performed using an H solution (H), the SiN film on the surface of the Si substrate is removed with hot phosphoric acid (I), and the Si direct bonding surface is patterned with a negative resist (J).
(K), a step is formed by dry-etching the pn junction surface directly exposed on the junction surface (L), and after removing the resist (M), a metal mask for the electrode is formed on the electrode side of the pressure generating diaphragm. The film is formed by sputtering.
【００１７】以上の行程により作成したノズルプレート
１０１，上部流路プレート１０２，下部流路プレート１
０３，上部Ｓｉ基板１０４および下部Ｓｉ基板１０５を
組み立てる。まず、ノズルプレート１０１，インク流路
プレート１０２，１０３をアライナーによるアライメン
ト後接着剤にて相互に接着しノズル部を組み立てる。上
部Ｓｉ基板と下部Ｓｉ基板をＳｉ−Ｓｉ直接接合法によ
り接合する。The nozzle plate 101, the upper flow path plate 102, and the lower flow path plate 1 prepared by the above steps
03, the upper Si substrate 104 and the lower Si substrate 105 are assembled. First, the nozzle plate 101 and the ink flow path plates 102 and 103 are adhered to each other with an adhesive after alignment by an aligner to assemble a nozzle portion. The upper Si substrate and the lower Si substrate are joined by a Si-Si direct joining method.
【００１８】接合後圧力媒体流路１１７に真空容器中で
低粘度のシリコンオイルを注入し、樹脂により封止後大
気圧に戻し加圧固化する。ノズル部と基板Ｓｉを接着剤
により接着する。以上の工程により、本発明の静電型イ
ンクジェットヘッドが完成する。After joining, low-viscosity silicone oil is injected into the pressure medium flow path 117 in a vacuum vessel, sealed with a resin, returned to atmospheric pressure and solidified under pressure. The nozzle portion and the substrate Si are bonded with an adhesive. Through the above steps, the electrostatic inkjet head of the present invention is completed.
【００１９】図３に示す本発明のインクジェットヘッド
の模式断面図を用い、インクジェットヘッドの動作につ
いて説明する。従来の静電型インクジェットヘッドは、
対向電極と振動板の間に電圧を印加、両者の間に働く静
電引力により振動板を撓ませ、振動板の復元力により加
圧液室内のインクに圧力を加え、ノズルからインクを吐
出させている。The operation of the ink jet head will be described with reference to the schematic sectional view of the ink jet head of the present invention shown in FIG. Conventional electrostatic inkjet heads
A voltage is applied between the counter electrode and the diaphragm, the diaphragm is bent by electrostatic attraction acting between the two, and pressure is applied to the ink in the pressurized liquid chamber by the restoring force of the diaphragm to eject ink from the nozzle. .
【００２０】本発明では、インクの吐出圧は、圧力発生
振動板１１６および１１８上に形成された電極１１３お
よび１１９の間に電圧を印加し、ボロンドープされた圧
力発生振動板１１６および１１８の間に静電力を誘起
し、圧力発生振動板１１６，１１８のいずれか一方もし
くは両方を撓ませることにより、圧力媒体流路１１７に
封入した圧力媒体を排出し、加圧液室１１２側のボロン
ドープされた加圧液室振動板１１５を加圧液室１１２側
に撓ませることにより、ノズル１０６よりインクを吐出
させる。In the present invention, the discharge pressure of the ink is controlled by applying a voltage between the electrodes 113 and 119 formed on the pressure generating diaphragms 116 and 118, and applying a voltage between the boron-doped pressure generating diaphragms 116 and 118. By inducing an electrostatic force and bending one or both of the pressure generating diaphragms 116 and 118, the pressure medium sealed in the pressure medium flow path 117 is discharged, and the boron-doped pressure medium in the pressurized liquid chamber 112 side is discharged. The ink is ejected from the nozzle 106 by bending the pressure liquid chamber diaphragm 115 toward the pressure liquid chamber 112.
【００２１】駆動電圧は対向する圧力発生振動板１１６
および１１８間の間隔、圧力発生振動板１１６，１１８
の厚さと加圧液室側の加圧液室振動板１１５の厚さによ
り決まる。これらの振動板は、ボロンの高濃度拡散層に
よるエッチストップにより膜厚を制御しており、拡散行
程を複数回行うことで、振動板毎に最適な厚みを持たせ
ることができる。The driving voltage is applied to the opposing pressure generating diaphragm 116.
, 118, pressure generating diaphragms 116, 118
And the thickness of the pressurized liquid chamber diaphragm 115 on the pressurized liquid chamber side. The thickness of these diaphragms is controlled by an etch stop by a high-concentration diffusion layer of boron, and by performing the diffusion process a plurality of times, an optimal thickness can be provided for each diaphragm.
【００２２】また、圧力発生振動板１１６および１１８
はボロンドープであるのでｐ−型、基板はｎ−型である
ので、振動板−Ｓｉ基板間にはｐ−ｎ接合が形成され
る。圧力発生振動板１１６および１１８間に電圧を印加
すると、いずれか一方のｐ−ｎ接合は逆バイアス状態で
あり、基板表面に露出したｐ−ｎ界面にエッチングによ
り段差を設けることで、両者の間の短絡を防止し、結果
として１００Ｖ程度の耐圧が認められた。The pressure generating diaphragms 116 and 118
Is boron-doped, the substrate is p-type, and the substrate is n-type, so that a pn junction is formed between the diaphragm and the Si substrate. When a voltage is applied between the pressure generating diaphragms 116 and 118, one of the pn junctions is in a reverse bias state, and a step is formed at the pn interface exposed on the substrate surface by etching, thereby forming a step between the two. Was prevented, and as a result, a withstand voltage of about 100 V was recognized.
【００２３】加圧液室振動板１１５の面積と縦横比は、
インクジェットヘッドの設計上のノズル密度により制限
を受けるが、圧力発生振動板１１６および１１８はチッ
プ面積を増やすことにより任意の面積および縦横比をと
ることができる。圧力発生振動板１１６，１１８の面積
を加圧液室振動板１１５の２倍とすることで、面積比相
当の２倍の加圧液室振動板の変位を観測した。The area and aspect ratio of the pressurized liquid chamber diaphragm 115 are as follows:
Although limited by the nozzle density in the design of the ink jet head, the pressure generating diaphragms 116 and 118 can have any area and aspect ratio by increasing the chip area. By setting the area of the pressure generating diaphragms 116 and 118 to twice the area of the pressurized liquid chamber diaphragm 115, the displacement of the pressurized liquid chamber diaphragm twice as large as the area ratio was observed.
【００２４】また、圧力発生振動板１１６，１１８の厚
みを等しく薄くすることで、静電引力印加の際に両者を
共に撓ませ、片方のみを撓ませた場合の２倍の変位に相
当する圧力媒体の排出が可能である。このときには加圧
液室においても２倍の振動板の変位が観測された。Further, by making the thickness of the pressure generating diaphragms 116 and 118 equal and thin, both of them are bent when applying an electrostatic attractive force, and the pressure corresponding to twice the displacement when only one of the plates is bent. Ejection of media is possible. At this time, double displacement of the diaphragm was observed also in the pressurized liquid chamber.
【００２５】圧力媒体には、低粘度のシリコンオイルを
用い直接接合後にＳｉ基板へ真空チャンバー内で図３に
示す注入孔１２１および１２２より注入した。真空中で
注入することにより気泡の巻き込み無く、注入が完了し
た。エポキシ樹脂による封入前に、樹脂の硬化温度であ
る１００℃まで予備加熱し、注入孔１２１より注入し、
余分なシリコンオイルを追い出しながら基板の反対側注
入孔１２２に樹脂が到達するまで注入した。硬化時間は
約５分ほどで、注入口１２１および１２２はそれぞれＳ
ｉの異方性エッチングにより形成しているのでテーパを
持っており、内部からのシリコンオイルの浸出などは認
められなかった。As the pressure medium, low-viscosity silicon oil was used, and after direct bonding, it was injected into the Si substrate through injection holes 121 and 122 shown in FIG. 3 in a vacuum chamber. By injecting in a vacuum, the injection was completed without entrapment of air bubbles. Before encapsulation with epoxy resin, preheating to 100 ° C., which is the curing temperature of the resin, is injected through injection hole 121,
The excess silicon oil was injected until the resin reached the injection hole 122 on the opposite side of the substrate while driving out the excess silicon oil. The curing time is about 5 minutes, and the inlets 121 and 122 are S
Since it was formed by anisotropic etching of i, it had a taper, and no leaching of silicon oil from inside was observed.
【００２６】[0026]
【発明の効果】請求項１の発明の効果：インクジェット
ヘッドにおいて、ノズルの高密度配置に伴い振動板の短
辺長が減少し、駆動電圧が高くなる。しかし、非圧縮性
の圧力媒体を用い間接的に駆動することで、圧力を発生
させる振動板の短辺長、長辺長比を理想化できることか
ら、ノズルの高密度化と、駆動電圧の低減とを共に満足
することができる。According to the first aspect of the present invention, in the ink jet head, the short side length of the diaphragm is reduced and the driving voltage is increased with the high density arrangement of the nozzles. However, by indirectly driving using an incompressible pressure medium, the ratio of the short side length to the long side length of the diaphragm that generates pressure can be idealized, so that the nozzle density is increased and the driving voltage is reduced. Can be satisfied with both.
【００２７】請求項２の発明の効果：圧力媒体を用いて
間接的に駆動するインクジェットヘッドアクチュエータ
では、加圧液室側の振動板の面積：Ｓ１を圧力発生側の
振動板の面積：Ｓ２より小さくすることで、ボイルシャ
ルルの法則により、振動板の面積比の逆数倍：Ｓ２／Ｓ
１の振動変位が得られる。従って、振動板変位を大きく
とることで、加圧液室側の振動板面積が縮小でき、加圧
液室の小型化が可能である。According to the second aspect of the invention, in the ink jet head actuator driven indirectly using a pressure medium, the area of the diaphragm on the pressurized liquid chamber side: S1 is calculated from the area of the diaphragm on the pressure generation side: S2. By making it smaller, the reciprocal multiple of the area ratio of the diaphragm: S2 / S according to Boyle-Charles law
A vibration displacement of 1 is obtained. Therefore, by increasing the displacement of the diaphragm, the area of the diaphragm on the pressurized liquid chamber side can be reduced, and the size of the pressurized liquid chamber can be reduced.
【００２８】請求項３の発明の効果：静電型インクジェ
ットヘッドのアクチュエータは、一般的に振動板と対向
電極の間の静電引力により振動板を引き寄せ、振動板の
剛性により元に戻るときに、インク加圧液室から吐出し
ていたため、対向電極は全く変位しないときに最も効率
的に振動板にインク吐出の力が蓄えられた。本発明で
は、逆に振動板が引き寄せられるときに、インク吐出の
力が発生しており、振動板により押し出される圧力媒体
も対向電極により押し出される圧力媒体も等価であり、
両者が変位することにより駆動電圧に対する振動板変位
は約２倍となり、より低電圧での駆動が可能となる。According to the third aspect of the present invention, an actuator of an electrostatic ink jet head generally draws a diaphragm by electrostatic attraction between the diaphragm and a counter electrode, and returns to its original state due to the rigidity of the diaphragm. Since the ink was ejected from the ink pressurized liquid chamber, the ink ejection force was most efficiently stored on the diaphragm when the counter electrode was not displaced at all. In the present invention, conversely, when the diaphragm is pulled, an ink ejection force is generated, and the pressure medium extruded by the diaphragm and the pressure medium extruded by the counter electrode are equivalent,
Due to the displacement of the two, the displacement of the diaphragm with respect to the driving voltage is about twice, and the driving at a lower voltage becomes possible.
【００２９】請求項４の発明の効果：圧力媒体に流体を
用い、間接的に駆動するインクジェットヘッドのアクチ
ュエータでは、圧力媒体の流路の加工精度が加圧液室へ
の発生圧力の伝達効率へ影響を与える。また、流路抵抗
を下げる見知からも同じ断面積ならば、断面は正方形に
近いものが原理的に良く、エッチングにより深く彫り込
まなければならない。異方性エッチングにより加工すれ
ば、等方性エッチングにより加工した流路よりも断面の
加工精度の高いエッチング面が得られ、アクチュエータ
の動作のバラツキを抑えることができる。According to the fourth aspect of the present invention, in an ink jet head actuator that uses a fluid as a pressure medium and is indirectly driven, the processing accuracy of the flow path of the pressure medium increases the transmission efficiency of the generated pressure to the pressurized liquid chamber. Affect. In addition, from the viewpoint of lowering the flow path resistance, if the cross-sectional area is the same, a cross-section close to a square is good in principle, and it must be etched deeper by etching. If processing is performed by anisotropic etching, an etched surface having a higher processing accuracy of the cross section than the flow path processed by isotropic etching can be obtained, and variation in the operation of the actuator can be suppressed.
【００３０】請求項５の発明の効果：圧力媒体を用いて
間接的に駆動するインクジェットヘッドのアクチュエー
タでは、圧力媒体は非圧縮性の流体を用いることで、圧
力発生側の振動板で発生した圧力を加圧液室側の振動板
に高効率で伝達するが、流路中の圧力媒体に、気泡など
圧縮性の流体が混入すると、圧力の伝達効率は低下す
る。そこで、真空中で圧力媒体を封入することで、流路
中に気泡を巻き込まないこと、流路末端等に気泡が残ら
ないこと、および、圧力媒体の脱気を達成することがで
きる。According to the fifth aspect of the invention, in the actuator of the ink jet head which is indirectly driven by using a pressure medium, the pressure medium uses an incompressible fluid, so that the pressure generated by the vibration plate on the pressure generation side is obtained. Is efficiently transmitted to the diaphragm on the side of the pressurized liquid chamber, but if a compressive fluid such as air bubbles is mixed into the pressure medium in the flow path, the pressure transmission efficiency is reduced. Therefore, by enclosing the pressure medium in a vacuum, it is possible to achieve that air bubbles are not caught in the flow path, no air bubbles remain at the end of the flow path, and degassing of the pressure medium.
【００３１】請求項６の発明の効果：圧力媒体に流体を
用いた場合には、圧力媒体を導入後封止しなければなら
ない。しかも、各ビット毎に干渉の無いよう独立した封
止が必要であり、かつ、コストの面からはウエハ処理が
可能であることが望ましい。このような点を考慮する
と、樹脂による封止が有力であるが、封止の強度および
気泡の巻き込みなどの点を考慮する必要がある。基板に
貫通孔を設けることで、封止する位置を明確にできる、
樹脂の注入により圧力媒体の一部を置き換えることで気
泡の残留を防止できる。According to the sixth aspect of the invention, when a fluid is used as the pressure medium, the pressure medium must be sealed after being introduced. In addition, it is desirable that independent sealing be required for each bit so as not to cause interference, and it is desirable that wafer processing be possible in terms of cost. In consideration of such points, sealing with a resin is effective, but it is necessary to consider the strength of sealing, entrapment of air bubbles, and the like. By providing a through hole in the substrate, the sealing position can be clarified,
By replacing a part of the pressure medium by injecting the resin, it is possible to prevent bubbles from remaining.
【図１】 本発明の静電型インクジェットヘッドの分解
斜視図である。FIG. 1 is an exploded perspective view of an electrostatic inkjet head of the present invention.
【図２】 振動板を一体形成した上部Ｓｉ基板の製造工
程を示す図である。FIG. 2 is a diagram showing a manufacturing process of an upper Si substrate on which a diaphragm is integrally formed.
【図３】 静電型インクジェットヘッドの組立断面図で
ある。FIG. 3 is an assembly sectional view of the electrostatic inkjet head.
１０１…ノズルプレート、１０２…上部流路プレート、
１０３…下部流路プレート、１０４…上部Ｓｉ基板、１
０５…下部Ｓｉ基板、１０６…ノズル、１０７…インク
注入口、１０８…インク流路、１１２…加圧液室、１１
３，１１９…電極部、１１５…加圧液室振動板、１１
６，１１８…圧力発生振動板、１２１，１２２…注入
孔。101: nozzle plate, 102: upper channel plate,
103: lower channel plate, 104: upper Si substrate, 1
05: lower Si substrate, 106: nozzle, 107: ink inlet, 108: ink channel, 112: pressurized liquid chamber, 11
3, 119 ... electrode part, 115 ... pressurized liquid chamber diaphragm, 11
6, 118: pressure generating diaphragm, 121, 122: injection hole.
Claims (6)
発生させ、圧力発生振動板を変位させることにより生ず
る圧力または圧力発生振動板の復元力により生ずる圧力
のいずれか一方もしくは両方により、液を吐出する方式
の静電型インクジェットヘッドにおいて、圧力発生振動
板の変位および復元力により発生した圧力を非圧縮性流
体により伝達し、間接的に加圧液室に設けた加圧液室振
動板を駆動し、圧力を吐出液体に伝達するインクジェッ
トヘッド。An electrostatic force is generated between a pressure generating diaphragm and a counter electrode, and either one or both of a pressure generated by displacing the pressure generating diaphragm and a pressure generated by a restoring force of the pressure generating diaphragm are provided. In an electrostatic ink jet head that ejects liquid, the pressure generated by the displacement and restoring force of the pressure generating diaphragm is transmitted by an incompressible fluid, and the vibration of the pressurized liquid chamber provided indirectly to the pressurized liquid chamber An inkjet head that drives the plate and transmits pressure to the liquid to be ejected.
た加圧液室振動板の面積が異なることを特徴とする請求
項１のインクジェットヘッド。2. The ink jet head according to claim 1, wherein the area of the pressure generating diaphragm is different from the area of the pressurized liquid chamber diaphragm provided in the pressurized liquid chamber.
に薄くし、両者が共に変位することを特徴とする請求項
１または２に記載のインクジェットヘッド。3. The ink jet head according to claim 1, wherein the thickness of the opposing electrode is reduced as in the case of the pressure generating diaphragm, and both are displaced.
た加圧液室振動板までの圧力媒体となる非圧縮性流体の
流路を、シリコンの異方性エッチングにより作成するこ
とを特徴とする請求項１，２または３に記載のインクジ
ェットヘッドの製造方法。4. A flow path for an incompressible fluid serving as a pressure medium from a pressure generating diaphragm to a pressurized liquid chamber diaphragm provided in a pressurized liquid chamber is formed by anisotropic etching of silicon. The method for manufacturing an ink jet head according to claim 1, 2 or 3, wherein:
た加圧液室振動板までの圧力媒体となる非圧縮性流体を
流路に封入する際、真空中で封入することを特徴とする
請求項４に記載のインクジェットヘッドの製造方法。5. An incompressible fluid serving as a pressure medium from a pressure generating vibration plate to a pressurized liquid chamber vibration plate provided in a pressurized liquid chamber is sealed in a flow path in a vacuum. The method for manufacturing an ink jet head according to claim 4, wherein
た加圧液室振動板までの圧力媒体となる非圧縮性流体を
流路中に封止する際、流路の一端に基板に貫通する穴を
設け樹脂により封止を行うことを特徴とする請求項４ま
たは５に記載のインクジェットヘッドの製造方法。6. When sealing an incompressible fluid as a pressure medium from a pressure generating vibration plate to a pressurized liquid chamber vibration plate provided in a pressurized liquid chamber in a flow path, a substrate is provided at one end of the flow path. 6. The method for manufacturing an ink jet head according to claim 4, wherein a hole penetrating through is provided, and sealing is performed with a resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33500598A JP2000141656A (en) | 1998-11-09 | 1998-11-09 | Ink-jet head and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33500598A JP2000141656A (en) | 1998-11-09 | 1998-11-09 | Ink-jet head and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000141656A true JP2000141656A (en) | 2000-05-23 |
Family
ID=18283682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33500598A Pending JP2000141656A (en) | 1998-11-09 | 1998-11-09 | Ink-jet head and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000141656A (en) |
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| JP2007152621A (en) * | 2005-12-01 | 2007-06-21 | Seiko Epson Corp | Liquid droplet jet head and method for manufacturing the same |
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