JP2000110948A - Sealing device using magnetic fluid - Google Patents
Sealing device using magnetic fluidInfo
- Publication number
- JP2000110948A JP2000110948A JP11207413A JP20741399A JP2000110948A JP 2000110948 A JP2000110948 A JP 2000110948A JP 11207413 A JP11207413 A JP 11207413A JP 20741399 A JP20741399 A JP 20741399A JP 2000110948 A JP2000110948 A JP 2000110948A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic fluid
- convex portion
- annular convex
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、磁性流体を利用し
た密封装置に関し、相対往復運動に対しても使用可能と
する等のため、ぬれ防止処理を施すものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealing device using a magnetic fluid, and performs a wetting prevention process so that the sealing device can be used for relative reciprocating motion.
【０００２】[0002]
【従来の技術】従来、この種の磁性流体を利用した密封
装置は、外部磁場の磁力により、壁面活性剤等の流体中
に懸濁して存在する磁性対の粒子が磁気吸引され、その
位置を保持し得る特性を備えた磁性流体を利用してい
る。2. Description of the Related Art Conventionally, in a sealing device using a magnetic fluid of this type, particles of a magnetic pair suspended in a fluid such as a surface active agent are magnetically attracted by the magnetic force of an external magnetic field, and the position thereof is determined. Utilizes a magnetic fluid having characteristics that can be held.
【０００３】この磁性流体を利用した密封装置は、例え
ば圧力差のある高圧側及び低圧側の２領域間や、密封性
を必要とする２領域間にまたがる回転軸及び回転軸の軸
受部に備えられる。A sealing device using this magnetic fluid is provided, for example, on a rotating shaft and a bearing portion of the rotating shaft extending between two regions on a high pressure side and a low pressure side having a pressure difference, or between two regions requiring hermeticity. Can be
【０００４】また、軸受部と回転軸とはベアリングによ
り相対回転運動に対する動的な保持も必要に応じて行わ
れている。[0004] The bearing and the rotating shaft are dynamically held by a bearing against relative rotational motion as necessary.
【０００５】そして、２領域間の密封（分離）は、軸受
部の内側に備えられた環状の磁石により形成される磁気
回路に介在させた磁性流体により行われている。[0005] Sealing (separation) between the two regions is performed by a magnetic fluid interposed in a magnetic circuit formed by an annular magnet provided inside the bearing portion.
【０００６】磁性流体を利用した密封装置の構成をより
詳細に説明すると、磁石は軸方向に異極（ＮＳ極）が配
されており、軸方向両側には磁石の磁極となる磁極部材
が備えられている。The structure of a sealing device using a magnetic fluid will be described in more detail. The magnet has different poles (NS poles) in the axial direction, and magnetic pole members serving as magnetic poles of the magnet are provided on both sides in the axial direction. Have been.
【０００７】回転軸の磁極部材に対向する部位には、複
数本の周方向に連続する環状凹溝が形成され、磁極部材
内周面（環状凸部対向面）と各環状凹溝の間の環状凸部
の頂面との隙間に磁束が集中するように発生させてい
る。A plurality of circumferentially continuous annular grooves are formed at a portion of the rotating shaft facing the magnetic pole member, and a plurality of circumferentially continuous annular grooves are formed between the inner peripheral surface of the magnetic pole member (the surface facing the annular convex portion) and the respective annular grooves. The magnetic flux is generated so as to concentrate in the gap between the annular convex portion and the top surface.
【０００８】即ち、環状凸部の頂面で磁束密度が高まる
ようにして、これらの隙間に磁性流体が保持され磁性流
体シール部を形成するようにしている。That is, the magnetic flux density is increased on the top surface of the annular convex portion, and the magnetic fluid is held in these gaps to form a magnetic fluid seal portion.
【０００９】密封領域の両側で圧力差がある場合におい
ては、形成された磁性流体シール部に、低圧側と高圧側
との間に複数の室を形成し、各室の圧力が順次磁性流体
シール部の耐圧範囲内で変化することにより、効果的な
シール性を発揮し得るようになっている。In the case where there is a pressure difference between both sides of the sealed area, a plurality of chambers are formed between the low pressure side and the high pressure side in the formed magnetic fluid seal portion, and the pressure of each chamber is sequentially changed to the magnetic fluid seal. By changing the pressure within the pressure range of the portion, an effective sealing property can be exhibited.
【００１０】尚、この磁性流体を利用した密封装置は、
固体接触がなく、低摩擦で完全密封可能なシールとし
て、コンピュータ用磁気ディスク等に用いられるダスト
シール装置や、上述のように密封領域の両側で圧力差の
存在する真空装置等に用いられる真空シール装置に応用
される。[0010] The sealing device using the magnetic fluid is as follows.
As a seal capable of completely sealing with low friction without solid contact, a dust seal device used for a magnetic disk for a computer or a vacuum seal device used for a vacuum device having a pressure difference on both sides of a sealed area as described above. Applied to
【００１１】[0011]
【発明が解決しようとする課題】しかしながら、これら
に応用される磁性流体を利用した密封装置は、上記従来
技術のように回転運動のみをなす回転軸に適用されるも
のであって、軸方向の往復運動を行う軸には適用できな
いのが一般的である。However, the sealing device using a magnetic fluid applied to these is applied to a rotating shaft which makes only a rotating motion as in the above-mentioned prior art, and is not used in the axial direction. It is generally not applicable to reciprocating axes.
【００１２】これは、環状凸部と環状凸部対向面との隙
間に保持される磁性流体が軸の回転運動に関してはその
形状、保持量がほとんど変化しないのに対し、軸の往復
運動に関しては、軸の往復運動時に磁性流体が環状凸部
対向面に付着した状態で残留して、隙間に保持される磁
性流体量が減少し、シール耐圧が低下し、さらにはシー
ル機構そのものの消失を引き起こすことが懸念されてい
る。This is because the shape and holding amount of the magnetic fluid held in the gap between the annular convex portion and the opposed surface of the annular convex portion hardly change with respect to the rotational motion of the shaft, whereas the magnetic fluid held in the gap between the annular convex portion and the reciprocating motion of the shaft has During the reciprocating motion of the shaft, the magnetic fluid remains in a state of adhering to the surface facing the annular convex portion, the amount of the magnetic fluid held in the gap decreases, the seal withstand pressure decreases, and the seal mechanism itself disappears. It is a concern.
【００１３】従って、このような軸の往復運動に対して
シールする用途にも磁性流体を利用した密封装置が適し
ているにも関わらずその適用は回転軸用シールに限定さ
れていた。Accordingly, although the sealing device utilizing a magnetic fluid is suitable for the application for sealing against such reciprocating motion of the shaft, its application has been limited to the seal for the rotating shaft.
【００１４】ところで、従来から磁性流体を使った往復
動密封装置の試みはこれまでにいくつかなされた。Heretofore, several attempts have been made so far for a reciprocating sealing device using a magnetic fluid.
【００１５】その一つの方法としては磁性流体の補給機
構を付加するとこが挙げられる。この例は、Ｍ．Ｇｏｌ
ｄｏｗｓｋｙ，ＩＥＥＥ Ｔｒａｎｓ．Ｍａｇ．Ｖｏ
ｌ．Ｍａｇ−１６，Ｎｏ．２，３８２（１９８０）に記
載されている。往復運動によって軸表面に付着した磁性
流体がシール外へと漏れるがこの漏れ分を補給するもの
ある。One of the methods is to add a magnetic fluid replenishing mechanism. This example is described in M.E. Gol
dowsky, IEEE Trans. Mag. Vo
l. Mag-16, No. 2, 382 (1980). The magnetic fluid adhering to the shaft surface leaks out of the seal due to the reciprocating motion.
【００１６】この方法では、磁性流体が供給される期間
のみ、環状凸部と環状凸部対向面との隙間に磁性流体が
存在し、シール機構が保持される。従って、恒久的な方
法とはいえず、また漏れた磁性流体による密封対象装置
側の汚染も問題となる。According to this method, the magnetic fluid exists in the gap between the annular convex portion and the surface facing the annular convex portion only during the period in which the magnetic fluid is supplied, and the sealing mechanism is held. Therefore, it is not a permanent method, and contamination of the device to be sealed by the leaked magnetic fluid also poses a problem.
【００１７】また、磁性流体シール構造自体の改造を行
ったものもみられる。例えば特開平７−１７４２４０号
では、環状体と軸の両方の表面にピッチの異なる環状凸
部を形成し、往復運動時に少なくとも一対の環状凸部同
志が対向するようにし、この隙間に磁性流体を保持する
ようにしている。この方法では、シール耐圧を保持して
いる磁性流体の位置が、往復運動に伴って常に変動して
いるために耐圧の安定性を欠き、シール耐圧を保持する
段数が大幅に減少するので大きなシール耐圧が得られな
い欠点がある。In some cases, the magnetic fluid seal structure itself has been modified. For example, in JP-A-7-174240, annular convex portions having different pitches are formed on both surfaces of an annular body and a shaft so that at least a pair of annular convex portions face each other during reciprocating motion, and a magnetic fluid is filled in the gap. I keep it. In this method, since the position of the magnetic fluid holding the seal pressure is constantly fluctuating with the reciprocating motion, the stability of the pressure is lacking, and the number of steps for holding the seal pressure is greatly reduced, so that a large seal is required. There is a disadvantage that a withstand voltage cannot be obtained.
【００１８】一方、以上に述べた磁性流体を利用した密
封装置の寿命は、保持する磁性流体量によってほぼ決定
される。例えば、密封領域両側の圧力差の急激な変化
は、保持した磁性流体を飛散させ、磁性流体量を減少さ
せてしまうことになる。On the other hand, the life of the sealing device using the above-described magnetic fluid is almost determined by the amount of the magnetic fluid to be held. For example, an abrupt change in the pressure difference between the two sides of the sealed area causes the retained magnetic fluid to be scattered and the amount of the magnetic fluid to be reduced.
【００１９】そして、磁性流体量の減少は、直ちにシー
ル耐圧の低下を引き起こすため、更なる磁性流体量の減
少を加速することになる。Since the decrease in the amount of the magnetic fluid immediately causes a decrease in the pressure resistance of the seal, the decrease in the amount of the magnetic fluid is further accelerated.
【００２０】このため、磁性流体を利用した密封装置の
長寿命化を図るためには、磁性流体量の減少を防止す
る、即ち磁性流体の飛散防止を図る必要があった。Therefore, in order to extend the life of a sealing device using a magnetic fluid, it is necessary to prevent a decrease in the amount of the magnetic fluid, that is, to prevent scattering of the magnetic fluid.
【００２１】本発明は上記の従来技術の課題を解決する
ためになされたもので、その目的とするところは、相対
往復運動に対して磁性流体シール部における磁性流体の
保持を確実に行い、磁性流体の減少を防ぎ、シール耐圧
の安定性を図ると共に、長寿命化を図ることの可能な磁
性流体を利用した密封装置を提供することにある。The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to reliably hold a magnetic fluid in a magnetic fluid seal portion with respect to a relative reciprocating motion, and to provide a magnetic fluid. An object of the present invention is to provide a sealing device using a magnetic fluid capable of preventing a decrease in fluid, stabilizing the pressure resistance of a seal, and extending the life.
【００２２】[0022]
【課題を解決するための手段】上記目的を達成するため
に本発明にあっては、２部材間の環状隙間をシールする
もので、環状隙間を通過する磁界を形成する磁力発生手
段と、環状隙間の外側の第１の磁極部と、環状隙間の内
側の第２の磁極部と、第１の磁極部と第２の磁極部の内
いずれか一方に設けられた環状凸部と、他方の環状凸部
対向面と、の間で、磁力発生手段による磁界により保持
されて環状隙間を密封する磁性流体と、を備える磁性流
体を利用した密封装置において、環状凸部対向面に、磁
性流体の流体面と環状凸部対向面とのなす接触角を６０
°以上１８０°未満にして磁性流体の環状凸部対向面へ
の自発的なぬれを防止するためのぬれ防止処理を施した
ことを特徴とする。In order to achieve the above object, according to the present invention, a magnetic force generating means for forming a magnetic field passing through an annular gap, which seals an annular gap between two members, A first magnetic pole portion outside the gap, a second magnetic pole portion inside the annular gap, an annular convex portion provided on one of the first magnetic pole portion and the second magnetic pole portion, and A magnetic fluid that is held by a magnetic field generated by a magnetic force and seals an annular gap between the annular convex portion facing surface, and a magnetic fluid using the magnetic fluid. The contact angle between the fluid surface and the surface facing the annular convex portion is 60
In this case, the magnetic fluid is subjected to a wetting prevention process for preventing the magnetic fluid from spontaneously wetting the surface facing the annular convex portion by setting the angle to 180 ° or more and less than 180 °.
【００２３】従って、ぬれ防止処理によって、２部材間
の相対往復運動に対しても環状凸部対向面に磁性流体を
付着させず、磁性流体を環状凸部と環状凸部対向面との
環状隙間に、磁性流体量を減少させずに保持することが
できるので、シール耐圧の安定性を図ることができ、２
部材間の相対往復運動に対して磁性流体を利用した密封
装置を適用可能となる。Therefore, the magnetic fluid does not adhere to the surface facing the annular convex portion even in the case of relative reciprocating movement between the two members by the wetting prevention process, and the magnetic fluid is applied to the annular gap between the annular convex portion and the surface facing the annular convex portion. In addition, since the amount of the magnetic fluid can be held without decreasing, the stability of the pressure resistance of the seal can be improved.
A sealing device using a magnetic fluid can be applied to the relative reciprocating motion between members.
【００２４】前記ぬれ防止処理は、耐溶剤性、熱安定性
のある疎油性の被膜を形成する表面改質剤で環状凸部対
向面を被覆してなることが好ましい。It is preferable that the wetting prevention treatment is performed by coating the surface facing the annular convex portion with a surface modifier which forms a solvent-resistant, heat-stable and oleophobic film.
【００２５】これにより、磁性流体の流体面と環状凸部
対向面とのなす接触角を６０°以上１８０°未満にして
磁性流体の環状凸部対向面への自発的なぬれを防止する
ことができる。Thus, the contact angle between the fluid surface of the magnetic fluid and the surface facing the annular convex portion can be set to 60 ° or more and less than 180 ° to prevent spontaneous wetting of the magnetic fluid to the surface facing the annular convex portion. it can.
【００２６】前記ぬれ防止処理は、環状凸部対向面を研
磨した後に、前記表面改質剤で環状凸部対向面を被覆す
ることが好ましい。In the wetting prevention treatment, it is preferable that the surface facing the annular convex portion is coated with the surface modifier after polishing the surface facing the annular convex portion.
【００２７】これにより、より容易に磁性流体の流体面
と環状凸部対向面とのなす接触角を６０°以上１８０°
未満にして磁性流体の環状凸部対向面への自発的なぬれ
を防止することができる。 表面改質剤は、フッ素を有
するカップリング剤や、高分子量化が容易なフッ素鎖を
有するモノマーや、撥油剤であることが好ましい。Thus, the contact angle between the fluid surface of the magnetic fluid and the surface facing the annular convex portion can be more easily set to 60 ° or more and 180 °.
By setting it to less than the value, it is possible to prevent spontaneous wetting of the magnetic fluid on the surface facing the annular convex portion. The surface modifier is preferably a coupling agent having fluorine, a monomer having a fluorine chain that can be easily increased in molecular weight, or an oil repellent.
【００２８】これにより、耐溶剤性、熱安定性のある疎
油性の被膜を形成することができる。Thus, an oleophobic film having solvent resistance and heat stability can be formed.
【００２９】２部材間の環状隙間をシールするもので、
環状隙間を通過する磁界を形成する磁力発生手段と、環
状隙間の外側の第１の磁極部と、環状隙間の内側の第２
の磁極部と、第１の磁極部と第２の磁極部の内いずれか
一方に設けられた環状凸部と、他方の環状凸部対向面
と、の間で、磁力発生手段による磁界により保持されて
環状隙間を密封する磁性流体と、を備える磁性流体を利
用した密封装置において、環状凸部対向面に、磁性流体
の流体面と環状凸部対向面とのなす接触角を６０°以上
１８０°未満にして磁性流体の環状凸部対向面への自発
的なぬれを防止するためのぬれ防止処理を施したぬれ防
止部材を備えたことが好ましい。This seals the annular gap between the two members.
Magnetic force generating means for forming a magnetic field passing through the annular gap; a first magnetic pole portion outside the annular gap; and a second magnetic pole portion inside the annular gap.
Between the magnetic pole portion, the annular convex portion provided on one of the first magnetic pole portion and the second magnetic pole portion, and the other annular convex portion facing surface by the magnetic field generated by the magnetic force generating means. And a magnetic fluid that seals the annular gap by using a magnetic fluid, the contact angle between the fluid surface of the magnetic fluid and the annular convex portion facing surface being 60 ° or more and 180 °. It is preferable to provide a wetting prevention member that has been subjected to a wetting prevention process to prevent the magnetic fluid from spontaneously wetting the surface facing the annular convex portion by setting the temperature to less than 0 °.
【００３０】従って、ぬれ防止処理を施したぬれ防止部
材によって、２部材間の相対往復運動に対しても環状凸
部対向面に磁性流体を付着させず、磁性流体を環状凸部
と環状凸部対向面との環状隙間に、磁性流体量を減少さ
せずに保持することができるので、シール耐圧の安定性
を図ることができ、２部材間の相対往復運動に対して磁
性流体を利用した密封装置を適用可能となる。Therefore, the magnetic fluid is prevented from adhering to the surface facing the annular convex portion even when the two members are relatively reciprocated by the wetting preventing member subjected to the wetting preventing process, and the magnetic fluid is applied to the annular convex portion and the annular convex portion. Since the amount of the magnetic fluid can be held in the annular gap with the opposed surface without decreasing, the stability of the pressure resistance of the seal can be achieved, and the sealing using the magnetic fluid for the relative reciprocating motion between the two members can be achieved. The device becomes applicable.
【００３１】２部材間の環状隙間をシールするもので、
環状隙間を通過する磁界を形成する磁力発生手段と、環
状隙間の外側の第１の磁極部と、環状隙間の内側の第２
の磁極部と、第１の磁極部と第２の磁極部の内いずれか
一方に設けられた環状凸部と、他方の環状凸部対向面
と、の間で、磁力発生手段による磁界により保持されて
環状隙間を密封する磁性流体と、を備える磁性流体を利
用した密封装置において、環状凸部対向面の磁性流体が
保持された領域外に、磁性流体の自発的なぬれを防止す
るためのぬれ防止処理を施したことを特徴とする。This seals the annular gap between the two members.
Magnetic force generating means for forming a magnetic field passing through the annular gap, a first magnetic pole portion outside the annular gap, and a second magnetic pole portion inside the annular gap.
Between the magnetic pole portion, the annular convex portion provided on one of the first magnetic pole portion and the second magnetic pole portion, and the other annular convex portion facing surface by the magnetic field generated by the magnetic force generating means. And a magnetic fluid that seals the annular gap, wherein the magnetic fluid is provided with a magnetic fluid outside the region where the magnetic fluid is held on the opposed surface of the annular convex portion to prevent spontaneous wetting of the magnetic fluid. It is characterized by performing a wetting prevention process.
【００３２】従って、ぬれ防止処理によって、環状凸部
対向面の磁性流体が保持された領域外への磁性流体飛散
による磁性流体量の減少を防止することができるので、
装置の長寿命化を図ることができる。Therefore, by the wetting prevention processing, it is possible to prevent a decrease in the amount of the magnetic fluid due to the scattering of the magnetic fluid outside the region where the magnetic fluid is held on the surface facing the annular convex portion.
The life of the device can be extended.
【００３３】前記ぬれ防止処理は、耐溶剤性、熱安定性
のある疎油性の被膜を形成する表面改質剤で環状凸部対
向面の磁性流体が保持された領域外を被覆してなること
が好ましい。In the wetting prevention treatment, the outside of the region where the magnetic fluid is held on the surface facing the annular convex portion is coated with a surface modifier which forms a solvent-resistant, heat-stable, oleophobic film. Is preferred.
【００３４】これにより、磁性流体の環状凸部対向面の
磁性流体が保持された領域外への自発的なぬれを防止す
ることができる。Thus, it is possible to prevent spontaneous wetting of the magnetic fluid on the surface facing the annular convex portion outside the region where the magnetic fluid is held.
【００３５】前記表面改質剤は、フッ素を有するカップ
リング剤や、高分子量化が容易なフッ素鎖を有するモノ
マーや、撥油剤であることが好ましい。The surface modifier is preferably a coupling agent having fluorine, a monomer having a fluorine chain which can be easily increased in molecular weight, or an oil repellent.
【００３６】これにより、耐溶剤性、熱安定性のある疎
油性の被膜を形成することができる。Thus, an oleophobic film having solvent resistance and heat stability can be formed.
【００３７】２部材間の環状隙間をシールするもので、
環状隙間を通過する磁界を形成する磁力発生手段と、環
状隙間の外側の第１の磁極部と、環状隙間の内側の第２
の磁極部と、第１の磁極部と第２の磁極部の内いずれか
一方に設けられた環状凸部と、他方の環状凸部対向面
と、の間で、磁力発生手段による磁界により保持されて
環状隙間を密封する磁性流体と、を備える磁性流体を利
用した密封装置において、環状凸部対向面の磁性流体が
保持された領域外に、磁性流体の自発的なぬれを防止す
るためのぬれ防止処理を施したぬれ防止部材を備えたこ
とを特徴とする。This seals the annular gap between the two members.
Magnetic force generating means for forming a magnetic field passing through the annular gap, a first magnetic pole portion outside the annular gap, and a second magnetic pole portion inside the annular gap.
Between the magnetic pole portion, the annular convex portion provided on one of the first magnetic pole portion and the second magnetic pole portion, and the other annular convex portion facing surface by the magnetic field generated by the magnetic force generating means. And a magnetic fluid that seals the annular gap, wherein the magnetic fluid is provided with a magnetic fluid outside the region where the magnetic fluid is held on the opposed surface of the annular convex portion to prevent spontaneous wetting of the magnetic fluid. It is characterized by comprising a wetting prevention member subjected to a wetting prevention process.
【００３８】従って、ぬれ防止処理によって、環状凸部
対向面の磁性流体が保持された領域外への磁性流体飛散
による磁性流体量の減少を防止することができるので、
装置の長寿命化を図ることができる。Therefore, by the wetting prevention processing, it is possible to prevent the amount of the magnetic fluid from being reduced due to the scattering of the magnetic fluid outside the region where the magnetic fluid is held on the surface facing the annular convex portion.
The life of the device can be extended.
【００３９】[0039]
【発明の実施の形態】以下に図面を参照して、この発明
の好適な実施の形態を例示的に詳しく説明する。Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
【００４０】（第１の実施の形態）図１（ａ）は、本発
明の第１の実施の形態に係る磁性流体を利用した密封装
置を示す概略構成図であり、図１（ａ）において、この
密封装置１は、２領域間（Ａ，Ｂ）にまたがる往復運動
を行う第２の磁極部である軸２をハウジング３に挿通し
ている。(First Embodiment) FIG. 1A is a schematic configuration diagram showing a sealing device using a magnetic fluid according to a first embodiment of the present invention. In the sealing device 1, a shaft 2, which is a second magnetic pole portion performing a reciprocating motion over two regions (A, B), is inserted through the housing 3.
【００４１】ハウジング３は、軸２の保持及び密封を行
い、Ａ，Ｂ領域間を環状隙間を介して連通させている。
また、軸２とハウジング３とはリニアベアリング１０
ａ，１０ｂにより軸２の往復運動に対する動的な保持が
行われている。The housing 3 holds and seals the shaft 2, and connects the areas A and B through an annular gap.
The shaft 2 and the housing 3 are connected to a linear bearing 10.
a, 10b provides dynamic retention of the shaft 2 in reciprocating motion.
【００４２】そして、密封性に関しては、環状隙間の外
周側であるハウジング３内周に磁力発生手段である環状
の永久磁石４により形成される磁気回路（点線図示）に
介在させた磁性流体５により行われている。With respect to the sealing performance, the magnetic fluid 5 interposed in a magnetic circuit (shown by dotted lines) formed by an annular permanent magnet 4 serving as magnetic force generating means on the inner periphery of the housing 3 on the outer peripheral side of the annular gap. Is being done.
【００４３】永久磁石４は軸方向に異極（ＮＳと図示）
が配されており、軸方向両側には永久磁石４の第１の磁
極部となる環状体６，７が備えられている。The permanent magnet 4 has a different pole in the axial direction (shown as NS).
Are disposed on both sides in the axial direction, and annular bodies 6 and 7 serving as first magnetic pole portions of the permanent magnet 4 are provided.
【００４４】環状体６には、複数の周方向に連続する環
状凹溝を形成し、各環状凹溝の間の環状凸部８が備えら
れている。The annular body 6 is formed with a plurality of circumferentially extending annular concave grooves, and is provided with an annular convex portion 8 between the annular concave grooves.
【００４５】ここで、この環状凸部８に対向する軸２の
環状凸部対向面は、ぬれ防止処理として、軸２表面を研
磨して、環状凸部対向面を表面改質剤の被膜９で被覆す
る。Here, the surface of the shaft 2 facing the annular convex portion 8 facing the annular convex portion 8 is polished as a wetting preventing treatment, and the surface of the shaft 2 is polished to form a coating 9 Cover with.
【００４６】そして、この環状凸部８の表面と、軸２の
環状凸部対向面と、の隙間に磁束が集中するようにして
いる。即ち、環状凸部８の表面で磁束密度が高まるよう
にしている。そして、これらの環状凸部８と環状凸部対
向面との隙間に磁性流体５が保持されて磁性流体シール
部を形成するようにしている。The magnetic flux is concentrated in the gap between the surface of the annular projection 8 and the surface of the shaft 2 facing the annular projection. That is, the magnetic flux density is increased on the surface of the annular projection 8. The magnetic fluid 5 is held in the gap between the annular convex portion 8 and the surface facing the annular convex portion to form a magnetic fluid seal portion.
【００４７】また、形成された磁性流体シール部は、２
つのＡ，Ｂ領域との間に複数の室を形成し、各室の圧力
が順次磁性流体シール部の耐圧範囲内で変化することに
より、密封領域の両側Ａ，Ｂ領域で圧力差がある場合に
おいても効果的な密封性を発揮し得るようになってい
る。Further, the formed magnetic fluid seal portion has
When a plurality of chambers are formed between the two A and B areas, and the pressure in each chamber changes sequentially within the pressure resistance range of the magnetic fluid seal portion, there is a pressure difference between the A and B areas on both sides of the sealed area. In this case, an effective sealing property can be exhibited.
【００４８】次に、本実施の形態の特徴である軸２表面
に施されたぬれ防止処理について詳しく述べる。Next, the wetting prevention treatment performed on the surface of the shaft 2 which is a feature of the present embodiment will be described in detail.
【００４９】ぬれ防止処理として、軸２の環状凸部対向
面を耐溶剤性、熱安定性のある疎油性の被膜９を形成す
る表面改質剤で被覆する。As a wetting prevention treatment, the surface of the shaft 2 facing the annular convex portion is coated with a surface modifier for forming a lipophobic film 9 having solvent resistance and heat stability.
【００５０】この表面改質剤は、例えば、フッ素を有す
るチタン、アルミニウム等のカップリング剤や、加熱等
によって高分子量化が容易なフッ素鎖を有するモノマー
や、一般的な撥油剤を用いることができる。As the surface modifier, use may be made of, for example, a coupling agent such as titanium or aluminum having fluorine, a monomer having a fluorine chain whose molecular weight can be easily increased by heating or the like, or a general oil repellent. it can.
【００５１】被覆の方法は、表面改質剤を環状凸部対向
面に塗布した後、加熱等によって、表面改質剤の環状凸
部対向面へ強固に吸着させ、また、高分子量化を図り、
被膜９を形成させる。In the coating method, after the surface modifier is applied to the surface facing the annular convex portion, the surface modifier is firmly adsorbed to the surface facing the annular convex portion by heating or the like, and the molecular weight is increased. ,
A coating 9 is formed.
【００５２】これによって形成される被膜９の厚みは、
０．１〜２．０×１０μｍとする。望ましくは、０．５
〜１．０×１０μｍであることが好ましいが、環状凸部
８とその環状凸部対向面との距離より小さい範囲であれ
ばどの厚みでもよい。The thickness of the coating 9 thus formed is
0.1 to 2.0 × 10 μm. Preferably, 0.5
It is preferably about 1.0 × 10 μm, but any thickness may be used as long as the distance is smaller than the distance between the annular projection 8 and the surface facing the annular projection.
【００５３】また、表面改質剤で被覆する前に軸２の環
状凸部対向面の表面研磨を行うこともよい。この場合の
研磨面の表面粗さＲａ（中心線平均粗さ）が１．０×１
０-2〜１．０μｍ、望ましくは０．５μｍとなるように
する。Before coating with the surface modifier, the surface of the shaft 2 facing the annular convex portion may be polished. In this case, the surface roughness Ra (center line average roughness) of the polished surface is 1.0 × 1
0 -2 to 1.0 μm, preferably 0.5 μm.
【００５４】この表面研磨を行うことにより、軸２の環
状凸部対向面の凹凸（旋盤加工による周方向の微細な溝
等）をなくすことができ、より被膜９の形成を容易に行
うことができる。By performing this surface polishing, it is possible to eliminate irregularities (fine grooves in the circumferential direction due to lathe processing) on the surface facing the annular convex portion of the shaft 2, and the coating 9 can be formed more easily. it can.
【００５５】以上により、図１（ｂ）に拡大して示すよ
うに、磁性流体５の流体面と環状凸部対向面とのなす接
触角θを６０°以上１８０°未満、望ましくは８０°以
上となるようにして、磁性流体５の環状凸部対向面への
自発的なぬれを防止する。As described above, as shown in an enlarged manner in FIG. 1B, the contact angle θ between the fluid surface of the magnetic fluid 5 and the surface facing the annular convex portion is 60 ° or more and less than 180 °, preferably 80 ° or more. Thus, spontaneous wetting of the magnetic fluid 5 on the surface facing the annular convex portion is prevented.
【００５６】これにより、軸２の往復運動に対しても環
状凸部対向面に磁性流体５を付着させず、磁性流体５を
環状凸部８と環状凸部対向面との環状隙間に磁性流体量
を減少させずに保持することができるので、軸２の往復
運動に対して密封装置として適用可能となる。Thus, even when the shaft 2 reciprocates, the magnetic fluid 5 does not adhere to the annular convex portion facing surface, and the magnetic fluid 5 flows into the annular gap between the annular convex portion 8 and the annular convex portion facing surface. Since it can be held without reducing the amount, it can be applied as a sealing device to the reciprocating motion of the shaft 2.
【００５７】尚、本実施の形態では、軸２が往復運動を
行う場合について説明したが、軸２とハウジング３との
間が相対的な往復運動を行う場合や、ハウジング３が往
復運動を行う場合であっても適用することができる。In this embodiment, the case where the shaft 2 performs reciprocating motion has been described. However, the case where the shaft 2 and the housing 3 perform relative reciprocating motion, or the case where the housing 3 performs reciprocating motion. It can be applied even in the case.
【００５８】また、軸２の表面に、上記のようなぬれ防
止処理を施した例えばスリーブ状等のぬれ防止部材を嵌
合して備えることによっても、同様の効果を得ることが
できる。The same effect can also be obtained by fitting the surface of the shaft 2 with a wetting prevention member, such as a sleeve, which has been subjected to the above-described wetting prevention processing.
【００５９】（第１の実施例）以下に、第１の実施の形
態についての第１の実施例と、従来技術の比較例と、を
比較して示す。まず、第１の実施例について説明する。(First Example) Hereinafter, a first example of the first embodiment and a comparative example of the prior art will be compared and shown. First, a first embodiment will be described.
【００６０】材質ＳＵＳ６３０（ステンレス）、外径
１．０×１０ｍｍの軸表面を表面研磨により、表面粗さ
Ｒａを０．１μｍとした。表面改質剤として１，１−ジ
ヒドロペルフルオロアクリレートを用い、これをフッ素
溶媒ＣＦ3ＣＦ2ＣＨＣｌに溶解させ濃度を５ｗｔ％とし
た後、この溶液を研磨済の軸表面に塗布し、乾燥させ
た。A shaft surface having a material of SUS630 (stainless steel) and an outer diameter of 1.0 × 10 mm was polished to a surface roughness Ra of 0.1 μm. After using 1,1-dihydroperfluoroacrylate as a surface modifier and dissolving it in a fluorine solvent CF 3 CF 2 CHCl to a concentration of 5 wt%, this solution was applied to the polished shaft surface and dried. .
【００６１】その後、この塗布された軸を２００℃、１
時間の加熱を行い、高分子量化させて軸表面上に被膜を
形成する。被膜の厚みは約２．０μｍとなった。また、
飽和磁化５．０×１０2Ｇのアルキルナフタレンベース
磁性流体のこの被膜を形成した軸への接触角θは８８°
となった。Thereafter, the coated shaft was heated at 200 ° C. for 1 hour.
The coating is formed on the shaft surface by heating for a long time to increase the molecular weight. The thickness of the coating was about 2.0 μm. Also,
The contact angle θ of the alkylnaphthalene-based magnetic fluid having a saturation magnetization of 5.0 × 10 2 G to the axis on which this coating is formed is 88 °.
It became.
【００６２】軸に対向して幅０．２ｍｍ、高さ０．４ｍ
ｍの凸部を０．６ｍｍ間隔で１０段階形成した材質ＳＵ
Ｓ６３０（ステンレス）の一対の環状体で永久磁石を挟
み、これと軸とで磁性流体を利用した密封装置を構成す
る。0.2 mm wide and 0.4 m high facing the shaft
Material SU in which convex portions of m are formed in 10 stages at 0.6 mm intervals
A permanent magnet is sandwiched between a pair of S630 (stainless steel) annular members, and a sealing device using a magnetic fluid is formed between the ring and a shaft.
【００６３】軸表面と環状体の凸部表面との隙間は６．
０×１０μｍであり、永久磁石はＳｍＣｏ5焼結磁石を
用いる。また、軸表面と環状体の凸部表面との隙間１０
箇所それぞれに飽和磁化５．０×１０2Ｇのアルキルナ
フタレンベース磁性流体を３．２μｌずつ注入した。The gap between the surface of the shaft and the surface of the convex portion of the annular body is 6.
SmCo 5 sintered magnet is used as the permanent magnet. In addition, a gap 10 between the shaft surface and the convex surface of the annular body.
3.2 μl of an alkylnaphthalene-based magnetic fluid having a saturation magnetization of 5.0 × 10 2 G was injected into each part.
【００６４】この実施例の密封装置では、１気圧の差圧
下で軸を往復運動させた結果、磁性流体の軸表面への付
着及び装置外への漏れは観測されなかった。またこの間
シール性も維持された。In the sealing device of this embodiment, as a result of the shaft being reciprocated under a pressure difference of 1 atm, no adhesion of the magnetic fluid to the shaft surface and no leakage out of the device were observed. During this time, the sealing property was also maintained.
【００６５】次に、比較例について説明する。Next, a comparative example will be described.
【００６６】比較例は実施例と同形状・同寸法の密封装
置において、従来技術と同様に軸の表面研磨と軸表面の
表面改質剤の被覆を行わないものである。そして、実施
例と全く同一の磁性流体及び同一の動作条件での試験を
行った。In the comparative example, the shaft was not polished and the surface of the shaft was not coated with a surface modifying agent, as in the prior art, in a sealing device having the same shape and dimensions as the embodiment. Then, tests were performed under the exact same magnetic fluid and the same operating conditions as in the example.
【００６７】この比較例の密封装置では、磁性流体の軸
への接触角は２１°となり、軸の往復運動によって、磁
性流体の軸表面での付着が観測された。このため、シー
ル性が維持できず、１気圧の差圧の保持はできなかっ
た。In the sealing device of this comparative example, the contact angle of the magnetic fluid to the shaft was 21 °, and adhesion of the magnetic fluid on the shaft surface was observed by the reciprocating motion of the shaft. For this reason, the sealing property could not be maintained, and the differential pressure of 1 atm could not be maintained.
【００６８】以上を比較すると、実施例は比較例と異な
り、磁性流体の軸表面への付着及び装置外への漏れは観
測されないことから、磁性流体を軸表面と凸部表面との
隙間に磁性流体量を減少することなく保持することがで
きるので、軸の往復運動に対して密封装置として適用可
能となる。Comparing the above, the embodiment differs from the comparative example in that no adherence of the magnetic fluid to the shaft surface and no leakage to the outside of the device are observed, so that the magnetic fluid is applied to the gap between the shaft surface and the convex surface. Since the fluid amount can be held without decreasing, it can be applied as a sealing device to the reciprocating motion of the shaft.
【００６９】（第２の実施の形態）図２は、本発明の第
２の実施の形態に係る磁性流体を利用した密封装置を示
す概略構成図であり、図２において、この密封装置１
は、２領域間（Ａ，Ｂ）の間で回転運動を行う第２の磁
極部である軸２をハウジング３に挿通している。(Second Embodiment) FIG. 2 is a schematic structural view showing a sealing device using a magnetic fluid according to a second embodiment of the present invention. In FIG.
The shaft 2 which is a second magnetic pole portion that performs a rotary motion between two regions (A, B) is inserted through the housing 3.
【００７０】本実施の形態では、軸２表面に施されたぬ
れ防止処理を、形成された磁性流体シール部の領域外に
施している。In the present embodiment, the wetting prevention treatment applied to the surface of the shaft 2 is performed outside the region of the formed magnetic fluid seal portion.
【００７１】その他の構成は第１の実施の形態と同様で
あるので、同じ符号を付して説明を省略する。The other configuration is the same as that of the first embodiment, and the same reference numerals are given and the description is omitted.
【００７２】次に、本実施の形態の特徴である磁性流体
シール部の領域外の軸２表面に施されたぬれ防止処理に
ついて詳しく述べる。Next, the wetting prevention process performed on the surface of the shaft 2 outside the region of the magnetic fluid seal portion, which is a feature of the present embodiment, will be described in detail.
【００７３】ぬれ防止処理として、軸２の磁性流体が保
持される磁性流体シール部の領域外を耐溶剤性、熱安定
性のある疎油性の被膜９を形成する表面改質剤で被覆す
る。As a wetting prevention treatment, the outside of the magnetic fluid seal portion of the shaft 2 in which the magnetic fluid is held is coated with a surface modifier which forms a lipophobic film 9 having solvent resistance and heat stability.
【００７４】この表面改質剤は、例えば、フッ素を有す
るチタン、アルミニウム等のカップリング剤や、加熱等
によって高分子量化が容易なフッ素鎖を有するモノマー
や、一般的な撥油剤を用いることができる。As the surface modifier, use may be made of, for example, a coupling agent such as titanium or aluminum having fluorine, a monomer having a fluorine chain whose molecular weight can be easily increased by heating or the like, or a general oil repellent. it can.
【００７５】被覆の方法は、表面改質剤を軸２表面に塗
布した後、加熱等によって、表面改質剤の軸２表面へ強
固に吸着させ、また、高分子量化を図り、被膜９を形成
させる。The coating method is as follows. After the surface modifier is applied to the surface of the shaft 2, the surface modifier is firmly adsorbed to the surface of the shaft 2 by heating or the like, and a high molecular weight is obtained. Let it form.
【００７６】これによって形成される被膜９の厚みは、
０．１〜２．０×１０μｍとする。望ましくは、０．５
〜１．０×１０μｍであることが好ましい。The thickness of the coating 9 thus formed is
0.1 to 2.0 × 10 μm. Preferably, 0.5
It is preferably from 1.0 to 10 μm.
【００７７】以上により形成された被膜９は、磁性流体
５の自発的なぬれを防止する。その結果、飛散によって
被膜９上に生じた液滴状の磁性流体は、磁性流体シール
部の磁力によって、磁性流体シール部に引き戻されるた
め、磁性流体の飛散を防止し、磁性流体シール部では磁
性流体量の減少が防止される。これにより、装置の長寿
命化を図ることができる。The coating 9 formed as described above prevents spontaneous wetting of the magnetic fluid 5. As a result, the droplet-shaped magnetic fluid generated on the coating 9 by the scattering is drawn back to the magnetic fluid sealing portion by the magnetic force of the magnetic fluid sealing portion. Fluid volume reduction is prevented. Thereby, the life of the device can be extended.
【００７８】尚、本実施の形態では、軸２が回転運動を
行う場合について説明したが、軸２とハウジング３との
間で相対的な往復運動が行われる場合であっても適用す
ることができる。Although the embodiment has been described with reference to the case where the shaft 2 performs a rotational movement, the present invention can be applied to a case where a relative reciprocating movement is performed between the shaft 2 and the housing 3. it can.
【００７９】また、軸２の表面に、上記のようなぬれ防
止処理を施した例えばスリーブ状等のぬれ防止部材を嵌
合して備えることによっても、同様の効果を得ることが
できる。The same effect can also be obtained by fitting the surface of the shaft 2 with a wetting prevention member, such as a sleeve, which has been subjected to the above-described wetting prevention processing.
【００８０】（第２の実施例）以下に、第２の実施の形
態についての第２の実施例と、従来技術の比較例と、を
比較して示す。まず、第２の実施例について説明する。(Second Embodiment) Hereinafter, a second embodiment of the second embodiment and a comparative example of the prior art will be compared and shown. First, a second embodiment will be described.
【００８１】軸２として、材質ＳＵＳ６３０（ステンレ
ス）、外径１．０×１０ｍｍを用いた。表面改質剤とし
て１，１−ジヒドロペルフルオロアクリレートを用い、
これをフッ素溶媒ＣＦ3ＣＦ2ＣＨＣｌに溶解させ濃度を
５ｗｔ％とした後、この溶液を磁性流体シール部の領域
外の軸２表面に塗布し、乾燥させた。As the shaft 2, a material SUS630 (stainless steel) having an outer diameter of 1.0 × 10 mm was used. Using 1,1-dihydroperfluoroacrylate as a surface modifier,
After dissolving this in a fluorine solvent CF 3 CF 2 CHCl to a concentration of 5 wt%, this solution was applied to the surface of the shaft 2 outside the region of the magnetic fluid seal and dried.
【００８２】その後、この塗布された軸２を２００℃、
１時間の加熱を行い、高分子量化させて軸表面上に被膜
９を形成する。被膜９の厚みは約２．０μｍとなった。Then, the coated shaft 2 was heated at 200 ° C.
The coating 9 is formed on the shaft surface by heating for one hour to increase the molecular weight. The thickness of the coating 9 was about 2.0 μm.
【００８３】この軸２に対向して幅０．２ｍｍ、高さ
０．４ｍｍの凸部を０．６ｍｍ間隔で１０段階形成した
材質ＳＵＳ６３０（ステンレス）の一対の環状体６で永
久磁石４を挟み、これと先の表面処理を施した軸２とで
磁性流体５を利用した密封装置を構成する。The permanent magnet 4 is sandwiched between a pair of annular members 6 made of SUS630 (stainless steel) in which convex portions having a width of 0.2 mm and a height of 0.4 mm are formed opposite to the shaft 2 and formed in ten steps at intervals of 0.6 mm. , And the shaft 2 having been subjected to the above surface treatment constitute a sealing device utilizing the magnetic fluid 5.
【００８４】軸２表面と環状体６の凸部表面との隙間は
６．０×１０μｍであり、永久磁石４はＳｍＣｏ5焼結
磁石を用いる。また、軸２表面と環状体６の凸部表面と
の隙間１０箇所それぞれに飽和磁化５．０×１０2Ｇの
アルキルナフタレンベース磁性流体５を３．２μｌずつ
注入した。The gap between the surface of the shaft 2 and the surface of the convex portion of the annular body 6 is 6.0 × 10 μm, and the permanent magnet 4 is a sintered SmCo 5 magnet. 3.2 μl of an alkylnaphthalene-based magnetic fluid 5 having a saturation magnetization of 5.0 × 10 2 G was injected into each of 10 gaps between the surface of the shaft 2 and the surface of the convex portion of the annular body 6.
【００８５】この実施例の密封装置を用い、０気圧及び
１気圧の差圧を繰り返して行う耐久試験を行った。この
結果、１０００回までの繰り返しにおいて、磁性流体の
飛散を防止し、実施例の密封装置でシール性は確保さ
れ、磁性流体５の装置外への漏れは観測されなかった。Using the sealing device of this example, an endurance test was conducted in which a differential pressure of 0 atm and 1 atm was repeated. As a result, in the repetition up to 1000 times, the scattering of the magnetic fluid was prevented, the sealing performance was ensured by the sealing device of the example, and no leakage of the magnetic fluid 5 out of the device was observed.
【００８６】次に、比較例について説明する。Next, a comparative example will be described.
【００８７】比較例は実施例と同形状・同寸法の密封装
置において、従来技術と同様に軸表面の表面改質剤の被
覆を行わないものである。そして、実施例と全く同一の
磁性流体及び同一の条件での０気圧及び１気圧の差圧を
繰り返して行う耐久試験を行った。In the comparative example, a sealing device having the same shape and the same dimensions as those of the example is not coated with a surface modifier on the shaft surface as in the prior art. Then, an endurance test was performed in which the pressure difference between 0 atm and 1 atm was repeated under the same magnetic fluid and the same conditions as in the example.
【００８８】この比較例の密封装置では、この耐久試験
の結果、１００回程度の繰り返しで磁性流体の飛散によ
る軸２表面への顕著なぬれが観測され、５００回程度の
繰り返しでシール性が損なわれた。In the sealing device of this comparative example, as a result of the durability test, remarkable wetting of the surface of the shaft 2 due to scattering of the magnetic fluid was observed after about 100 repetitions, and the sealing property was impaired after about 500 repetitions. Was.
【００８９】以上を比較すると、実施例は比較例と異な
り、耐久が進んでも磁性流体の軸表面へのぬれ及び装置
外への漏れは観測されないことから、磁性流体の飛散を
防止し、磁性流体を軸表面と凸部表面との隙間に磁性流
体量を減少することなく保持することができるので、密
封装置の長寿命化を図ることができる。Comparing the above, the embodiment differs from the comparative example in that no wetting of the magnetic fluid onto the shaft surface and no leakage to the outside of the apparatus are observed even when the durability is advanced. Can be held in the gap between the surface of the shaft and the surface of the convex portion without reducing the amount of magnetic fluid, and the life of the sealing device can be extended.
【００９０】[0090]
【発明の効果】本発明は、環状凸部対向面に、磁性流体
の流体面と環状凸部対向面とのなす接触角を６０°以上
１８０°未満にして磁性流体の環状凸部対向面への自発
的なぬれを防止するためのぬれ防止処理を施したこと
で、ぬれ防止処理によって、２部材間の相対往復運動に
対しても環状凸部対向面に磁性流体を付着させず、磁性
流体を環状凸部と環状凸部対向面との環状隙間に、磁性
流体量を減少させずに保持することができるので、シー
ル耐圧の安定性を図ることができ、２部材間の相対往復
運動に対して磁性流体を利用した密封装置を適用可能と
なる。According to the present invention, the contact angle between the fluid surface of the magnetic fluid and the annular convex portion facing surface is set to 60 ° or more and less than 180 ° on the annular convex portion facing surface. Has been subjected to a wetting prevention process for preventing spontaneous wetting of the magnetic fluid, thereby preventing the magnetic fluid from adhering to the surface facing the annular convex portion even with respect to the relative reciprocating motion between the two members. Can be held in the annular gap between the annular convex portion and the opposed surface of the annular convex portion without reducing the amount of the magnetic fluid, so that the pressure resistance of the seal can be stabilized and the relative reciprocating motion between the two members can be improved. On the other hand, a sealing device using a magnetic fluid can be applied.
【００９１】ぬれ防止処理は、耐溶剤性、熱安定性のあ
る疎油性の被膜を形成する表面改質剤で環状凸部対向面
を被覆してなることで、磁性流体の流体面と環状凸部対
向面とのなす接触角を６０°以上１８０°未満にして磁
性流体の環状凸部対向面への自発的なぬれを防止するこ
とができる。The wetting prevention treatment is performed by coating the surface facing the annular convex portion with a surface modifier which forms a solvent-resistant, heat-stable, oleophobic film, so that the fluid surface of the magnetic fluid and the annular convex surface are covered. By making the contact angle with the portion facing surface not less than 60 ° and less than 180 °, spontaneous wetting of the magnetic fluid on the annular projecting portion facing surface can be prevented.
【００９２】ぬれ防止処理は、環状凸部対向面を研磨し
た後に、表面改質剤で環状凸部対向面を被覆すること
で、より容易に磁性流体の流体面と環状凸部対向面との
なす接触角を６０°以上１８０°未満にして磁性流体の
環状凸部対向面への自発的なぬれを防止することができ
る。In the wetting prevention processing, the surface of the annular convex portion facing surface is coated with a surface modifier after polishing the surface of the annular convex portion facing surface. By making the contact angle 60 ° or more and less than 180 °, spontaneous wetting of the magnetic fluid on the surface facing the annular convex portion can be prevented.
【００９３】表面改質剤は、フッ素を有するカップリン
グ剤や、高分子量化が容易なフッ素鎖を有するモノマー
や、撥油剤であることで、耐溶剤性、熱安定性のある疎
油性の被膜を形成することができる。The surface modifier is a coupling agent having fluorine, a monomer having a fluorine chain which can be easily made into a high molecular weight, or an oil repellent, so that a lipophobic film having solvent resistance and heat stability can be obtained. Can be formed.
【００９４】環状凸部対向面に、磁性流体の流体面と環
状凸部対向面とのなす接触角を６０°以上１８０°未満
にして磁性流体の環状凸部対向面への自発的なぬれを防
止するためのぬれ防止処理を施したぬれ防止部材を備え
たことで、ぬれ防止処理を施したぬれ防止部材によっ
て、２部材間の相対往復運動に対しても環状凸部対向面
に磁性流体を付着させず、磁性流体を環状凸部と環状凸
部対向面との環状隙間に、磁性流体量を減少させずに保
持することができるので、シール耐圧の安定性を図るこ
とができ、２部材間の相対往復運動に対して磁性流体を
利用した密封装置を適用可能となる。The spontaneous wetting of the magnetic fluid to the annular convex surface by making the contact angle between the fluid surface of the magnetic fluid and the annular convex surface opposite to the annular convex surface is set to 60 ° or more and less than 180 °. By providing a wetting prevention member that has been subjected to a wetting prevention process for preventing the magnetic fluid, the wetting prevention member that has been subjected to the wetting prevention process allows the magnetic fluid to flow to the annular convex portion opposing surface even with respect to the relative reciprocating motion between the two members. Since the magnetic fluid can be held in the annular gap between the annular convex portion and the surface facing the annular convex portion without reducing the amount of the magnetic fluid without reducing the amount, the stability of the seal withstand pressure can be achieved and the two members can be secured. A sealing device using a magnetic fluid can be applied to the relative reciprocating motion between the two.
【００９５】環状凸部対向面の磁性流体が保持された領
域外に、磁性流体の自発的なぬれを防止するためのぬれ
防止処理を施したことで、ぬれ防止処理によって、環状
凸部対向面の磁性流体が保持された領域外への磁性流体
飛散による磁性流体量の減少を防止することができるの
で、装置の長寿命化を図ることができる。Since the wetting prevention process for preventing spontaneous wetting of the magnetic fluid is performed outside the area where the magnetic fluid is held on the surface facing the annular convex portion, the wetting prevention process allows the wetting prevention process. Therefore, it is possible to prevent a decrease in the amount of the magnetic fluid due to the scattering of the magnetic fluid outside the region in which the magnetic fluid is held, so that the life of the device can be extended.
【００９６】ぬれ防止処理は、耐溶剤性、熱安定性のあ
る疎油性の被膜を形成する表面改質剤で環状凸部対向面
の磁性流体が保持された領域外を被覆してなることで、
磁性流体の環状凸部対向面の磁性流体が保持された領域
外への自発的なぬれを防止することができる。The wetting prevention treatment is performed by coating the outside of the region where the magnetic fluid is held on the surface facing the annular convex portion with a surface modifier which forms a solvent-resistant, heat-stable, oleophobic film. ,
It is possible to prevent spontaneous wetting of the magnetic fluid outside the region where the magnetic fluid is held on the surface facing the annular convex portion.
【００９７】表面改質剤は、フッ素を有するカップリン
グ剤や、高分子量化が容易なフッ素鎖を有するモノマー
や、撥油剤であることで、耐溶剤性、熱安定性のある疎
油性の被膜を形成することができる。The surface modifier is a coupling agent having fluorine, a monomer having a fluorine chain which can be easily made into a high molecular weight, or an oil repellent, so that an oleophobic film having solvent resistance and heat stability can be obtained. Can be formed.
【００９８】環状凸部対向面の磁性流体が保持された領
域外に、磁性流体の自発的なぬれを防止するためのぬれ
防止処理を施したぬれ防止部材を備えたことで、ぬれ防
止処理によって、環状凸部対向面の磁性流体が保持され
た領域外への磁性流体飛散による磁性流体量の減少を防
止することができるので、装置の長寿命化を図ることが
できる。By providing a wetting prevention member which has been subjected to a wetting prevention process for preventing spontaneous wetting of the magnetic fluid, outside the region where the magnetic fluid is held on the surface facing the annular convex portion, Since the amount of the magnetic fluid can be prevented from being reduced due to the scattering of the magnetic fluid outside the region where the magnetic fluid is held on the surface facing the annular convex portion, the life of the device can be extended.
【図１】図１（ａ）は第１の実施の形態に係る磁性流体
を利用した密封装置を示す概略構成図であり、図１
（ｂ）は磁性流体の軸表面に対する接触角を示す拡大図
である。FIG. 1A is a schematic configuration diagram showing a sealing device using a magnetic fluid according to a first embodiment, and FIG.
(B) is an enlarged view showing the contact angle of the magnetic fluid with respect to the shaft surface.
【図２】図２は第２の実施の形態に係る磁性流体を利用
した密封装置を示す概略構成図である。FIG. 2 is a schematic configuration diagram showing a sealing device using a magnetic fluid according to a second embodiment.
１ 密封装置 ２ 軸 ３ ハウジング ４ 永久磁石 ５ 磁性流体 ６，７ 環状体 ８ 環状凸部 ９ 被膜 １０ａ，１０ｂ リニアベアリング DESCRIPTION OF SYMBOLS 1 Sealing device 2 Axis 3 Housing 4 Permanent magnet 5 Magnetic fluid 6,7 Annular body 8 Annular convex part 9 Coating 10a, 10b Linear bearing
Claims (9)
で、環状隙間を通過する磁界を形成する磁力発生手段
と、 環状隙間の外側の第１の磁極部と、 環状隙間の内側の第２の磁極部と、 第１の磁極部と第２の磁極部の内いずれか一方に設けら
れた環状凸部と、他方の環状凸部対向面と、の間で、磁
力発生手段による磁界により保持されて環状隙間を密封
する磁性流体と、 を備える磁性流体を利用した密封装置において、 環状凸部対向面に、磁性流体の流体面と環状凸部対向面
とのなす接触角を６０°以上１８０°未満にして磁性流
体の環状凸部対向面への自発的なぬれを防止するための
ぬれ防止処理を施したことを特徴とする磁性流体を利用
した密封装置。A magnetic force generating means for forming a magnetic field passing through the annular gap; a first magnetic pole outside the annular gap; and a second magnetic pole inside the annular gap. Between the magnetic pole portion, the annular convex portion provided on one of the first magnetic pole portion and the second magnetic pole portion, and the other annular convex portion facing surface by the magnetic field generated by the magnetic force generating means. And a magnetic fluid that seals the annular gap by using a magnetic fluid comprising: a contact angle between the fluid surface of the magnetic fluid and the annular convex portion facing surface of the annular convex portion facing surface of at least 60 ° A sealing device using a magnetic fluid, which has been subjected to a wetting prevention process for preventing the magnetic fluid from spontaneously wetting the surface facing the annular convex portion at a temperature of less than 0 °.
性のある疎油性の被膜を形成する表面改質剤で環状凸部
対向面を被覆してなることを特徴とする請求項１に記載
の磁性流体を利用した密封装置。2. The anti-wetting treatment comprises coating the surface facing the annular convex portion with a surface modifier that forms a solvent-resistant, heat-stable, oleophobic film. A sealing device using the magnetic fluid according to 1.
研磨した後に、前記表面改質剤で環状凸部対向面を被覆
することを特徴とする請求項２に記載の磁性流体を利用
した密封装置。3. The magnetic fluid according to claim 2, wherein, in the wetting prevention treatment, the surface facing the annular convex portion is coated with the surface modifier after polishing the surface facing the annular convex portion. Sealing device.
プリング剤や、高分子量化が容易なフッ素鎖を有するモ
ノマーや、撥油剤であることを特徴とする請求項２又は
３に記載の磁性流体を利用した密封装置。4. The surface modifying agent according to claim 2, wherein the surface modifying agent is a coupling agent having fluorine, a monomer having a fluorine chain that can be easily increased in molecular weight, or an oil repellent. Sealing device using magnetic fluid.
で、環状隙間を通過する磁界を形成する磁力発生手段
と、 環状隙間の外側の第１の磁極部と、 環状隙間の内側の第２の磁極部と、 第１の磁極部と第２の磁極部の内いずれか一方に設けら
れた環状凸部と、他方の環状凸部対向面と、の間で、磁
力発生手段による磁界により保持されて環状隙間を密封
する磁性流体と、 を備える磁性流体を利用した密封装置において、 環状凸部対向面に、磁性流体の流体面と環状凸部対向面
とのなす接触角を６０°以上１８０°未満にして磁性流
体の環状凸部対向面への自発的なぬれを防止するための
ぬれ防止処理を施したぬれ防止部材を備えたことを特徴
とする磁性流体を利用した密封装置。5. A magnetic force generating means for forming a magnetic field passing through the annular gap, sealing the annular gap between the two members, a first magnetic pole portion outside the annular gap, and a second magnetic pole portion inside the annular gap. Between the magnetic pole portion, the annular convex portion provided on one of the first magnetic pole portion and the second magnetic pole portion, and the other annular convex portion facing surface by the magnetic field generated by the magnetic force generating means. And a magnetic fluid that seals the annular gap by using a magnetic fluid comprising: a contact angle between the fluid surface of the magnetic fluid and the annular convex portion facing surface of the annular convex portion facing surface of at least 60 ° A sealing device using a magnetic fluid, comprising: a wetting prevention member that has been subjected to a wetting prevention process to prevent the magnetic fluid from spontaneously wetting the surface facing the annular convex portion at a temperature of less than 0 °.
で、環状隙間を通過する磁界を形成する磁力発生手段
と、 環状隙間の外側の第１の磁極部と、 環状隙間の内側の第２の磁極部と、 第１の磁極部と第２の磁極部の内いずれか一方に設けら
れた環状凸部と、他方の環状凸部対向面と、の間で、磁
力発生手段による磁界により保持されて環状隙間を密封
する磁性流体と、 を備える磁性流体を利用した密封装置において、 環状凸部対向面の磁性流体が保持された領域外に、磁性
流体の自発的なぬれを防止するためのぬれ防止処理を施
したことを特徴とする磁性流体を利用した密封装置。6. A seal for sealing an annular gap between two members, a magnetic force generating means for forming a magnetic field passing through the annular gap, a first magnetic pole part outside the annular gap, and a second magnetic pole part inside the annular gap. Between the magnetic pole portion, the annular convex portion provided on one of the first magnetic pole portion and the second magnetic pole portion, and the other annular convex portion facing surface by the magnetic field generated by the magnetic force generating means. A magnetic fluid that seals the annular gap, and a magnetic fluid that includes: a magnetic fluid that prevents spontaneous wetting of the magnetic fluid outside the region where the magnetic fluid is held on the surface facing the annular convex portion. A sealing device using a magnetic fluid, which has been subjected to a wetting prevention process.
性のある疎油性の被膜を形成する表面改質剤で環状凸部
対向面の磁性流体が保持された領域外を被覆してなるこ
とを特徴とする請求項６に記載の磁性流体を利用した密
封装置。7. The wetting prevention treatment comprises coating the outside of the region where the magnetic fluid is held on the surface facing the annular convex portion with a surface modifier that forms a solvent-resistant, heat-stable, oleophobic film. The sealing device using a magnetic fluid according to claim 6.
プリング剤や、高分子量化が容易なフッ素鎖を有するモ
ノマーや、撥油剤であることを特徴とする請求項７に記
載の磁性流体を利用した密封装置。8. The magnetic fluid according to claim 7, wherein the surface modifying agent is a coupling agent having fluorine, a monomer having a fluorine chain which can be easily increased in molecular weight, or an oil repellent. Sealing device using.
で、環状隙間を通過する磁界を形成する磁力発生手段
と、 環状隙間の外側の第１の磁極部と、 環状隙間の内側の第２の磁極部と、 第１の磁極部と第２の磁極部の内いずれか一方に設けら
れた環状凸部と、他方の環状凸部対向面と、の間で、磁
力発生手段による磁界により保持されて環状隙間を密封
する磁性流体と、 を備える磁性流体を利用した密封装置において、 環状凸部対向面の磁性流体が保持された領域外に、磁性
流体の自発的なぬれを防止するためのぬれ防止処理を施
したぬれ防止部材を備えたことを特徴とする磁性流体を
利用した密封装置。9. A seal for sealing an annular gap between two members, a magnetic force generating means for forming a magnetic field passing through the annular gap, a first magnetic pole part outside the annular gap, and a second magnetic pole part inside the annular gap. Between the magnetic pole portion, the annular convex portion provided on one of the first magnetic pole portion and the second magnetic pole portion, and the other annular convex portion facing surface by the magnetic field generated by the magnetic force generating means. A magnetic fluid that seals the annular gap, and a magnetic fluid that includes: a magnetic fluid that prevents spontaneous wetting of the magnetic fluid outside the region where the magnetic fluid is held on the surface facing the annular convex portion. A sealing device using a magnetic fluid, comprising a wetting prevention member subjected to a wetting prevention process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11207413A JP2000110948A (en) | 1998-08-03 | 1999-07-22 | Sealing device using magnetic fluid |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10-231175 | 1998-08-03 | ||
| JP23117598 | 1998-08-03 | ||
| JP11207413A JP2000110948A (en) | 1998-08-03 | 1999-07-22 | Sealing device using magnetic fluid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000110948A true JP2000110948A (en) | 2000-04-18 |
Family
ID=26516238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11207413A Pending JP2000110948A (en) | 1998-08-03 | 1999-07-22 | Sealing device using magnetic fluid |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000110948A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6769694B2 (en) | 2000-10-12 | 2004-08-03 | Nok Corporation | Magnetic fluid seal device |
| WO2011118755A1 (en) * | 2010-03-25 | 2011-09-29 | 株式会社栗本鐵工所 | Rotation braking device using fluid with magnetic viscosity |
| WO2011118761A1 (en) * | 2010-03-25 | 2011-09-29 | 株式会社栗本鐵工所 | Rotation braking device using fluid with magnetic viscosity |
-
1999
- 1999-07-22 JP JP11207413A patent/JP2000110948A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6769694B2 (en) | 2000-10-12 | 2004-08-03 | Nok Corporation | Magnetic fluid seal device |
| WO2011118755A1 (en) * | 2010-03-25 | 2011-09-29 | 株式会社栗本鐵工所 | Rotation braking device using fluid with magnetic viscosity |
| WO2011118761A1 (en) * | 2010-03-25 | 2011-09-29 | 株式会社栗本鐵工所 | Rotation braking device using fluid with magnetic viscosity |
| JP2011202745A (en) * | 2010-03-25 | 2011-10-13 | Kurimoto Ltd | Rotation braking device using magnetic viscous fluid |
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