JP2000094173A - Device and method for regulating focal position of laser beam in laser beam machine - Google Patents
Device and method for regulating focal position of laser beam in laser beam machineInfo
- Publication number
- JP2000094173A JP2000094173A JP10265231A JP26523198A JP2000094173A JP 2000094173 A JP2000094173 A JP 2000094173A JP 10265231 A JP10265231 A JP 10265231A JP 26523198 A JP26523198 A JP 26523198A JP 2000094173 A JP2000094173 A JP 2000094173A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- temperature
- laser beam
- temperature sensor
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、レーザ加工機に
おいて、熱レンズ効果によって生ずるレンズの焦点位置
の変動を調節するための装置およびその方法に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for adjusting a change in the focal position of a lens caused by a thermal lens effect in a laser beam machine.
【０００２】[0002]
【従来の技術】レーザ加工機は、レーザ発振器から発振
したレーザビームをレンズで集光してワーク上に照射す
ることにより切断や溶接を行う装置である。この場合、
レンズやそのレンズのホルダ等に蓄積された熱による、
いわゆる熱レンズ効果によってレンズの焦点距離が短く
なり、良好な加工ができなくなるという問題がある。2. Description of the Related Art A laser beam machine is a device for cutting and welding by condensing a laser beam oscillated from a laser oscillator with a lens and irradiating the laser beam on a work. in this case,
Due to the heat accumulated in the lens and its lens holder, etc.
There is a problem that the so-called thermal lens effect shortens the focal length of the lens and makes it impossible to perform good processing.
【０００３】この問題に対処するために、特開平１―６
６０８８号公報，特開平１―６６０８９号公報，特開平
７―５１８７５号公報等において各種の提案がなされて
いる。特開平１―６６０８８号公報及び特開平１―６６
０８９号公報においては、レーザビームの照射時間の長
短に応じてレンズの焦点位置を調節するものである。ま
た、特開平７―５１８７５号公報においては、レーザビ
ームの径を測定して焦点の変動を検出するものである。To address this problem, Japanese Patent Laid-Open Publication No.
Various proposals have been made in JP-A-6088, JP-A-1-66089, JP-A-7-51875, and the like. JP-A-1-66088 and JP-A-1-66
In Japanese Patent Publication No. 089, the focal position of a lens is adjusted according to the length of the laser beam irradiation time. Further, in Japanese Patent Application Laid-Open No. 7-51875, a change in focus is detected by measuring the diameter of a laser beam.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、レーザ
ビームの照射時間に応じてレンズの焦点位置を調節する
ようにした構成においては、熱レンズ効果による変動を
直接検出するものではなく、状況から類推する、いわば
類推検出である。従って、加工条件や外部環境が変化す
ると、正確な検出を行い得ないおそれがあった。また、
レーザビームの径を測定して焦点の変動を検出する構成
においては、その検出手段として、レーザビームのＸ，
Ｙ方向にスキャンしてレーザビームの断面を検出する回
転ニードル等が必要であり、構成が大がかりで複雑であ
った。However, in the configuration in which the focal position of the lens is adjusted in accordance with the irradiation time of the laser beam, the fluctuation due to the thermal lens effect is not directly detected, but is inferred from the situation. That is, analogy detection. Therefore, when the processing conditions and the external environment change, there is a possibility that accurate detection cannot be performed. Also,
In a configuration in which the change in the focal point is detected by measuring the diameter of the laser beam, the X,
A rotary needle or the like for scanning in the Y direction to detect the cross section of the laser beam is required, and the configuration is large and complicated.
【０００５】さらに、レンズマウントの周囲に冷却通路
を設け、この冷却通路にエアーや冷却水を通すことによ
ってレンズを冷却する構成も従来提案されている。しか
し、この構成においては、レーザ加工機に冷却通路を形
成する必要があるので、レーザ加工機を大型化せざるを
得ないとともに、エアー等を送り込む装置も必要とな
り、全体として大型で複雑化するいう問題がある。Further, a configuration has been proposed in which a cooling passage is provided around the lens mount and the lens is cooled by passing air or cooling water through the cooling passage. However, in this configuration, it is necessary to form a cooling passage in the laser beam machine, so that the laser beam machine must be increased in size, and a device for sending air or the like is also required. There is a problem.
【０００６】この発明の目的は、熱レンズ効果による焦
点位置の変動を確実に調節することができるととも共
に、大型化および複雑化を避けることのできるレーザビ
ームの焦点位置調節装置および調節方法を提供すること
にある。SUMMARY OF THE INVENTION It is an object of the present invention to provide a laser beam focal position adjusting device and an adjusting method which can surely adjust a change of a focal position due to a thermal lens effect and can avoid an increase in size and complexity. To provide.
【０００７】[0007]
【課題を解決するための手段及び効果】上記の目的を達
成するために、請求項１に記載の発明においては、ワー
ク加工中における熱レンズ効果の度合いを検出する検出
手段と、その検出結果に応じてレンズを光軸方向へ移動
させる移動手段とを備えたものである。また請求項５に
記載の発明においては、ワーク加工中のレンズの温度を
検出して、その温度に応じてレンズを光軸方向へ移動
し、熱レンズ効果によって変動するレンズの焦点位置を
調節するものである。In order to achieve the above object, according to the first aspect of the present invention, there is provided a detecting means for detecting a degree of a thermal lens effect during processing of a workpiece, and a detecting result for the degree of the thermal lens effect. Moving means for moving the lens in the optical axis direction accordingly. According to the fifth aspect of the present invention, the temperature of the lens during the processing of the workpiece is detected, the lens is moved in the optical axis direction according to the temperature, and the focal position of the lens that fluctuates due to the thermal lens effect is adjusted. Things.
【０００８】従って、検出手段によって検出されたレン
ズの温度に応じてレンズが光軸方向に移動される。すな
わち、レーザ加工にともなうレンズ温度の上昇により熱
レンズ効果により焦点距離が短くなるが、それに応じて
レンズが適切な位置に維持されるように調節することが
できる。従って、この調節装置を備えたレーザ加工機
は、ワークの切断や溶接等のレーザ加工を常に良好に行
うことができる。しかも、直接レンズの熱レンズ効果の
度合いを検出するので、類推検出の場合とは異なり、焦
点距離を正確に判別して、高精度加工を可能とする。加
えて、焦点位置を適切に調節できるため、冷却装置が不
要となり、装置の複雑化や大型化を避けることができ
る。Accordingly, the lens is moved in the optical axis direction according to the temperature of the lens detected by the detecting means. That is, although the focal length is shortened due to the thermal lens effect due to an increase in the lens temperature due to the laser processing, the lens can be adjusted so as to be maintained at an appropriate position accordingly. Therefore, the laser processing machine provided with this adjusting device can always perform laser processing such as cutting and welding of a work well. In addition, since the degree of the thermal lens effect of the lens is directly detected, unlike the case of analogy detection, the focal length can be accurately determined and high-precision processing can be performed. In addition, since the focal position can be appropriately adjusted, a cooling device is not required, and the device can be prevented from becoming complicated and large.
【０００９】請求項２に記載の発明では、請求項１にお
いて、検出手段は、レンズの温度を検出する温度センサ
よりなるもである。従って、前述したレーザビームをス
キャンするような複雑な構成とは異なり、構成を簡単な
ものとすることができる。According to a second aspect of the present invention, in the first aspect, the detecting means comprises a temperature sensor for detecting a temperature of the lens. Therefore, unlike the above-described complicated configuration for scanning a laser beam, the configuration can be simplified.
【００１０】請求項３に記載の発明では、請求項１また
は２において、温度センサは、レンズの外周面に設けら
れ、レンズの温度を直接検出する。従って、レンズの温
度が温度センサに直接伝わり、レンズの温度を正確に検
出して、焦点位置の調節を正確に行うことができ、高精
度加工に寄与できる。According to a third aspect of the present invention, in the first or second aspect, the temperature sensor is provided on the outer peripheral surface of the lens and directly detects the temperature of the lens. Therefore, the temperature of the lens is directly transmitted to the temperature sensor, the temperature of the lens is accurately detected, and the focal position can be adjusted accurately, which contributes to high-precision processing.
【００１１】請求項４に記載の発明では、請求項１〜３
のいずれかにおいて、移動手段は、モータと、そのモー
タの回転をレンズホルダの光軸方向への動きに変換する
変換機構とを備えるものである。According to the fourth aspect of the present invention, the first to third aspects are provided.
In any one of the above, the moving means includes a motor and a conversion mechanism for converting rotation of the motor into movement of the lens holder in the optical axis direction.
【００１２】従って、焦点位置の調節のために、レンズ
は光軸方向に沿って円滑に移動される。Therefore, the lens is smoothly moved along the optical axis for adjusting the focal position.
【００１３】[0013]
【発明の実施の形態】以下に、この発明を具体化した実
施の形態を、図面に基づいて説明する。ワーク１２を支
持する加工テーブル１１は、水平面内の一方向（例えば
Ｘ軸方向）に移動される。Embodiments of the present invention will be described below with reference to the drawings. The processing table 11 supporting the work 12 is moved in one direction (for example, the X-axis direction) in a horizontal plane.
【００１４】加工ヘッド１３は、加工テーブル１１の上
方に配置され、水平面内の他方向（例えばＹ方向）及び
垂直方向に移動される。そして、加工テーブル１１上に
セットされたワーク１２に対して加工ヘッド１３のノズ
ル１４からレーザビームがアシストガスとともに供給さ
れて、ワーク１２の切断等の加工が行われる。The processing head 13 is disposed above the processing table 11 and is moved in another direction (for example, Y direction) and a vertical direction in a horizontal plane. Then, a laser beam is supplied from the nozzle 14 of the processing head 13 to the work 12 set on the processing table 11 together with the assist gas, and processing such as cutting of the work 12 is performed.
【００１５】前記加工ヘッド１３の本体１５にはハウジ
ング１６が固定され、その下端には前記ノズル１４が取
り付けられている。ハウジング１６内の中心位置にはレ
ンズホルダ１７が上下移動のみ可能に支持され、その内
部にはレーザビームをワーク１２上に集光させるための
レンズ１８が支持固定されている。レンズホルダ１７の
外周には雄ねじ１９が刻設されている。A housing 16 is fixed to a main body 15 of the processing head 13, and the nozzle 14 is attached to a lower end thereof. A lens holder 17 is supported at a central position in the housing 16 so as to be able to move only up and down, and a lens 18 for condensing a laser beam on the work 12 is supported and fixed inside the lens holder 17. A male screw 19 is engraved on the outer periphery of the lens holder 17.
【００１６】前記ハウジング１６内の固定位置には大径
の被動歯車２１が回転可能に支持され、その内周面には
前記雄ねじ１９に螺合する雌ねじ２２が刻設されてい
る。ハウジング１６には正逆回転可能な駆動モータ２３
が固定され、その出力軸には小径の駆動歯車２４が取付
られており、その駆動歯車２４が前記被動歯車２１に噛
合している。従って、駆動モータ２３が正逆いずれかの
方向に回転すると、駆動歯車２４を介して被動歯車２１
が減速回転され、ねじ１９，２２の作用によりレンズホ
ルダ１７が光軸方向に沿って上方または下方に移動され
るように運動方向が変換されて、レンズ１８の焦点位置
が調節される。A large-diameter driven gear 21 is rotatably supported at a fixed position in the housing 16, and a female screw 22 screwed to the male screw 19 is formed on the inner peripheral surface thereof. The housing 16 has a drive motor 23 that can rotate forward and reverse.
Is fixed to the output shaft, and a small-diameter drive gear 24 is attached to the output shaft. The drive gear 24 meshes with the driven gear 21. Therefore, when the drive motor 23 rotates in either the forward or reverse direction, the driven gear 21
Is rotated at a reduced speed, the direction of movement is changed by the action of the screws 19 and 22 so that the lens holder 17 is moved upward or downward along the optical axis direction, and the focal position of the lens 18 is adjusted.
【００１７】前記レンズ１８の側面には温度センサ３１
が取付られ、その検出出力が制御装置３２に入力され
る。制御装置３２は温度センサの検出出力レベルに応じ
て、前記駆動モータ２３の回転方向及び回転量を決定
し、それに従って駆動モータ２３を回転させる。A temperature sensor 31 is provided on the side of the lens 18.
Is attached, and the detection output is input to the control device 32. The control device 32 determines the rotation direction and the rotation amount of the drive motor 23 according to the detection output level of the temperature sensor, and rotates the drive motor 23 accordingly.
【００１８】なお、この実施形態では、温度センサ３１
及び制御装置３２により検出手段が構成され、駆動モー
タ２３，駆動歯車２４，被動歯車１９，雌ねじ２２，雄
ねじ１９及び制御装置３２により移動手段が構成されて
いる。また、駆動歯車２４，被動歯車１９，雌ねじ２２
及び雄ねじ１９により変換機構が構成されている。In this embodiment, the temperature sensor 31
The control means 32 and the control device 32 constitute a detection means, and the drive motor 23, the drive gear 24, the driven gear 19, the female screw 22, the male screw 19 and the control device 32 constitute a moving means. The driving gear 24, the driven gear 19, the female screw 22
And the conversion mechanism is constituted by the male screw 19.
【００１９】さて、レーザ発振器（図示しない）からレ
ーザビームが発振されて、ワーク１２に対する加工が行
われている時には、制御装置３２は常時温度センサ３１
を介してレンズ１８の温度を監視する。そして、レンズ
１８の温度があらかじめ定められた範囲を逸脱すると、
その逸脱量に応じた回転方向及び回転量で駆動モータ２
３を回転させ、レンズホルダ１７を光軸方向へ移動させ
る。When a laser beam is oscillated from a laser oscillator (not shown) and the work 12 is being processed, the control device 32 constantly controls the temperature sensor 31.
The temperature of the lens 18 is monitored via. When the temperature of the lens 18 deviates from a predetermined range,
The drive motor 2 has a rotation direction and rotation amount corresponding to the deviation amount.
3 is rotated to move the lens holder 17 in the optical axis direction.
【００２０】このため、熱レンズ効果によりレンズの焦
点距離が変動しても、その変動分を補うようにレンズ１
８の位置が変更されて、焦点位置が調節される。従っ
て、常にワーク１２上の所定位置に焦点を合わせること
ができる。For this reason, even if the focal length of the lens fluctuates due to the thermal lens effect, the lens 1 is designed to compensate for the fluctuation.
The position of 8 is changed, and the focal position is adjusted. Therefore, it is possible to always focus on a predetermined position on the work 12.
【００２１】従って、この実施形態では以下のような効
果を発揮する。 （１）レーザ加工にともなうレンズ１８の温度の上昇に
基づく熱レンズ効果によりレンズ１８が膨張して焦点距
離が短くなる。この場合、温度センサ３１がレンズ１８
の温度を検出し、焦点距離の変動分を補うように、制御
装置３２が駆動モータ２３を駆動させる。この駆動に基
づき、レンズホルダ１７を光軸方向の下降方向へ移動さ
せ、レンズを適切な位置に配置させて、焦点位置をワー
ク１２の加工部と一致するように調節することができ
る。従って、この調節装置を備えたレーザ加工機は、ワ
ークの切断や溶接等のレーザ加工を常に良好に、かつ正
確に行うことができる。しかも、直接レンズ１８の温度
を検出するので、従来の類推検出の場合とは異なり、熱
レンズ効果の度合いを正確に検出して、高精度加工を可
能とする。加えて、熱レンズ効果を検出して焦点位置を
正確に調節するため、冷却装置が不要となり、装置の複
雑化や大型化を避けることができる。 （２）熱レンズ効果の度合いを検出する温度センサ３１
は、熱電対のような簡単な構成のものでよい。従って、
前述したレーザビームをスキャンするような複雑な従来
構成とは異なり、構成を簡単なものとすることができ
る。 （３）温度センサ３１をレンズ１８の側面に設けて、レ
ンズ１８の温度が温度センサ３１に直接伝わるように構
成したため、レンズ１８の温度を正確に、かつリアルタ
イムに検出して、焦点位置の調節を正確に行うことがで
き、高精度加工に寄与できる。 （４）温度センサ３１により検出されたレンズ温度に応
じて、駆動モータ２３が回転され、その回転が歯車２
４，２１により減速されるとともに、ねじ１９，２２に
よりさらに減速されてレンズホルダ１７の光軸方向の運
動となるように変換される。従って、レンズホルダ１７
は大きなトルクで円滑に移動され、焦点位置の調節を確
実かつ正確に行うことができる。Therefore, this embodiment has the following effects. (1) The lens 18 expands due to a thermal lens effect based on a rise in the temperature of the lens 18 due to the laser processing, and the focal length is reduced. In this case, the temperature sensor 31
The controller 32 drives the drive motor 23 so as to compensate for the change in the focal length. Based on this drive, the lens holder 17 is moved in the descending direction in the optical axis direction, the lens is arranged at an appropriate position, and the focal position can be adjusted so as to coincide with the processed portion of the work 12. Therefore, the laser processing machine provided with this adjusting device can always perform the laser processing such as cutting or welding of the work satisfactorily and accurately. Moreover, since the temperature of the lens 18 is directly detected, unlike the conventional analog detection, the degree of the thermal lens effect is accurately detected to enable high-precision processing. In addition, since the focus position is accurately adjusted by detecting the thermal lens effect, a cooling device is not required, and the device can be prevented from becoming complicated and large. (2) Temperature sensor 31 for detecting the degree of thermal lens effect
May have a simple configuration such as a thermocouple. Therefore,
Unlike a complicated conventional configuration in which a laser beam is scanned as described above, the configuration can be simplified. (3) Since the temperature sensor 31 is provided on the side surface of the lens 18 so that the temperature of the lens 18 is directly transmitted to the temperature sensor 31, the temperature of the lens 18 is detected accurately and in real time, and the focal position is adjusted. Can be performed accurately, which can contribute to high-precision processing. (4) The drive motor 23 is rotated according to the lens temperature detected by the temperature sensor 31, and the rotation is
The lens holder 17 is decelerated by the screws 4 and 21 and further decelerated by the screws 19 and 22 so that the lens holder 17 is moved in the optical axis direction. Therefore, the lens holder 17
Is smoothly moved with a large torque, and the focus position can be adjusted reliably and accurately.
【００２２】この発明は前記実施形態に限定されるもの
ではなく以下のように具体化することも可能である。 （１）駆動モータ２３とレンズホルダ１７との間の動力
を伝達する機構として、レンズホルダ１７の外周にウォ
ームを設け、そのウォームと噛合するウォームホイール
を駆動モータ２３の出力軸に連結すること。その他、各
種の機構を採用すること。 （２）温度センサ１７をレンズホルダ１７に取付けて、
レンズホルダ１７への伝導熱を検出すること。 （３）熱レンズ効果を検出する検出手段として、温度セ
ンサの代わりに、圧力センサや歪みセンサ等を設けるこ
と。圧力センサの場合は、レンズ１８の膨張圧力を検出
できるようにレンズ１８とレンズホルダ１７との間に設
けられ、歪みセンサは、レンズ１８の膨張歪みを検出で
きるように光軸外においてレンズ１８の表面に設けられ
る。The present invention is not limited to the above embodiment, but can be embodied as follows. (1) As a mechanism for transmitting power between the drive motor 23 and the lens holder 17, a worm is provided on the outer periphery of the lens holder 17, and a worm wheel meshing with the worm is connected to an output shaft of the drive motor 23. In addition, adopt various mechanisms. (2) Attach the temperature sensor 17 to the lens holder 17,
Detecting conduction heat to the lens holder 17; (3) A pressure sensor, a strain sensor, or the like is provided as a detecting means for detecting the thermal lens effect, instead of the temperature sensor. In the case of a pressure sensor, it is provided between the lens 18 and the lens holder 17 so as to detect the inflation pressure of the lens 18, and the distortion sensor is located outside the optical axis so as to detect the expansion distortion of the lens 18. Provided on the surface.
【図１】この発明の一実施形態を示す要部縦断面図であ
る。 １７…レンズホルダ、１８…レンズ、１９…雄ねじ、２
１…被動歯車、２２…雌ねじ、２３…駆動モータ、２４
…駆動歯車、３…１…温度センサ、３２…制御装置。温
度センサ３１及び制御装置３２により検出手段が構成さ
れ、雄ねじ１９、被動歯車２１、雌ねじ２２、駆動モー
タ２３、駆動歯車２４及び制御装置３２により移動手段
が構成され、雄ねじ１９、被動歯車２１、雌ねじ２２及
び駆動歯車２４により変換機構が構成されている。FIG. 1 is a vertical sectional view showing a main part of an embodiment of the present invention. 17: lens holder, 18: lens, 19: male screw, 2
Reference numeral 1: driven gear, 22: female screw, 23: drive motor, 24
... drive gear, 3 ... 1 temperature sensor, 32 ... control device. The temperature sensor 31 and the control device 32 constitute detecting means, and the male screw 19, the driven gear 21, the female screw 22, the drive motor 23, the driving gear 24 and the control device 32 constitute moving means, and the male screw 19, the driven gear 21, and the female screw The conversion mechanism is constituted by the drive gear 22 and the drive gear 24.
Claims (5)
に集光させてワークの加工を行うレーザ加工機におい
て、 ワーク加工中における熱レンズ効果の度合いを検出する
検出手段と、 その検出結果に応じてレンズを光軸方向へ移動させる移
動手段とを備えたレーザ加工機におけるレーザビームの
焦点位置調節装置。1. A laser processing machine for processing a work by condensing a laser beam on the work via a lens, a detecting means for detecting a degree of a thermal lens effect during the processing of the work, and And a moving means for moving the lens in the direction of the optical axis.
度センサよりなる請求項１に記載のレーザ加工機におけ
るレーザビームの焦点位置調節装置。2. The apparatus according to claim 1, wherein the detecting means comprises a temperature sensor for detecting a temperature of the lens.
れ、レンズの温度を直接検出する請求項１または２に記
載のレーザ加工機におけるレーザビームの焦点位置調節
装置。3. The apparatus according to claim 1, wherein the temperature sensor is provided on an outer peripheral surface of the lens and directly detects a temperature of the lens.
転をレンズホルダの光軸方向への動きに変換する変換機
構とを備える請求項１〜３のいずれかに記載のレーザ加
工機におけるレーザビームの焦点位置調節装置。4. The laser processing machine according to claim 1, wherein the moving unit includes a motor, and a conversion mechanism that converts rotation of the motor into movement of the lens holder in the optical axis direction. Beam focus position adjustment device.
を加工するレーザ加工機において、ワーク加工中のレン
ズの温度を検出して、その温度に応じてレンズを光軸方
向へ移動し、熱レンズ効果によって変動するレンズの焦
点位置を調節するレーザ加工機におけるレーザビームの
焦点位置調節方法。5. A laser beam machine for processing a workpiece by condensing a laser beam with a lens, detects a temperature of the lens during processing of the workpiece, and moves the lens in the optical axis direction in accordance with the detected temperature. A method for adjusting a focal position of a laser beam in a laser beam machine, which adjusts a focal position of a lens that varies according to a lens effect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10265231A JP2000094173A (en) | 1998-09-18 | 1998-09-18 | Device and method for regulating focal position of laser beam in laser beam machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10265231A JP2000094173A (en) | 1998-09-18 | 1998-09-18 | Device and method for regulating focal position of laser beam in laser beam machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000094173A true JP2000094173A (en) | 2000-04-04 |
Family
ID=17414350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10265231A Pending JP2000094173A (en) | 1998-09-18 | 1998-09-18 | Device and method for regulating focal position of laser beam in laser beam machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000094173A (en) |
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