JP2000074965A - Electric resistance measuring device - Google Patents
Electric resistance measuring deviceInfo
- Publication number
- JP2000074965A JP2000074965A JP10247291A JP24729198A JP2000074965A JP 2000074965 A JP2000074965 A JP 2000074965A JP 10247291 A JP10247291 A JP 10247291A JP 24729198 A JP24729198 A JP 24729198A JP 2000074965 A JP2000074965 A JP 2000074965A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- circuit board
- electric resistance
- contact member
- current supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、電流供給用電極お
よび電圧測定用電極を有する電気抵抗測定装置に関し、
更に詳しくは回路基板における電極間の電気抵抗を測定
するために好適な電気抵抗測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric resistance measuring apparatus having a current supply electrode and a voltage measurement electrode.
More specifically, the present invention relates to an electric resistance measuring device suitable for measuring electric resistance between electrodes on a circuit board.
【０００２】[0002]
【従来の技術】一般に、回路基板の電気的検査において
は、被検査回路基板における電極間の電気抵抗を測定す
ることが行われている。かかる電気抵抗の測定において
は、図１１に示すように、被検査回路基板９０の測定対
象電極９１，９２の各々に対し、電流供給用プローブＰ
Ａ，ＰＤおよび電圧測定用プローブＰＣ，ＰＤを押圧し
て接触させ、この状態で、電流供給用プローブＰＡ，Ｐ
Ｄの間に電源装置９３から電流を供給し、電圧測定用プ
ローブＰＢ，ＰＣによって検出される電圧信号を電気信
号処理装置９４において処理することにより、当該測定
対象電極９１，９２間の電気抵抗の大きさを求める手段
が採用されている。2. Description of the Related Art In general, in an electrical inspection of a circuit board, an electrical resistance between electrodes on a circuit board to be inspected is measured. In the measurement of the electric resistance, as shown in FIG. 11, a current supply probe P
A, PD and the voltage measurement probes PC, PD are pressed and brought into contact, and in this state, the current supply probes PA, P
A current is supplied from the power supply device 93 during the period D, and a voltage signal detected by the voltage measurement probes PB and PC is processed in the electric signal processing device 94, so that the electric resistance between the measurement target electrodes 91 and 92 is reduced. Means for determining the size are employed.
【０００３】然るに、上記の手段においては、電流供給
用プローブＰＡ，ＰＤおよび電圧測定用プローブＰＣ，
ＰＤを測定対象電極９１，９２に相当に大きい押圧力で
接触させることが必要であるが、プローブは金属製であ
ってその先端は尖頭状とされているため、接触プローブ
が押圧されることによって測定対象電極９１，９２の表
面が損傷してしまい、当該回路基板は使用することが不
可能なものとなってしまう。このような事情から、電気
抵抗の測定は、製品のすべてについて行うことができ
ず、いわゆる抜き取り検査とならざるを得ず、結局、製
品の歩留りを大きくすることはできない。However, in the above means, the current supply probes PA and PD and the voltage measurement probe PC and
It is necessary to bring the PD into contact with the electrodes to be measured 91 and 92 with a considerably large pressing force. However, since the probe is made of metal and its tip is pointed, the contact probe is pressed. As a result, the surfaces of the electrodes to be measured 91 and 92 are damaged, and the circuit board cannot be used. Under such circumstances, the measurement of the electrical resistance cannot be performed for all the products, so that it must be a so-called sampling inspection, and as a result, the yield of the products cannot be increased.
【０００４】このような問題を解決するため、エラスト
マーにより導電性粒子が結着された導電ゴムよりなる接
触部材が、電流供給用電極および電圧供給用電極の各々
に互いに独立して配置された電気抵抗測定装置が提案さ
れている（特開平９−２６４４６号公報参照）。上記の
電気抵抗測定装置によれば、被検査回路基板における測
定対象電極に対する電流供給用電極および電圧供給用電
極の電気的接続が導電ゴムよりなる接触部材を介してな
されるため、当該測定対象電極が損傷することなく電気
抵抗を測定することができる。In order to solve such a problem, a contact member made of conductive rubber to which conductive particles are bonded by an elastomer is disposed on each of a current supply electrode and a voltage supply electrode independently of each other. A resistance measuring device has been proposed (see Japanese Patent Application Laid-Open No. 9-26446). According to the above-described electric resistance measuring device, the electric connection between the current supply electrode and the voltage supply electrode with respect to the measurement target electrode on the circuit board to be inspected is performed via the contact member made of conductive rubber. Can be measured without damage.
【０００５】しかしながら、上記の電気抵抗測定装置に
おいては、次のような問題がある。回路基板における電
極間の電気抵抗を測定するためには、当該回路基板にお
ける測定対象電極に、電流供給用電極に接続された接触
部材および電圧供給用電極に接続された接触部材の両方
を接触させることが必要となる。然るに、回路基板にお
いては、高い集積度を得るために電極サイズが小さくな
る傾向があり、このような測定対象電極に、互いに独立
した２つの接触部材を接触させるためには、当該測定対
象電極よりも更に小さいサイズの接触部材を、極めて小
さい距離で離間した状態で形成しなければならない。こ
のような理由から、小さいサイズの電極を有する回路基
板の電気抵抗を測定するための電気抵抗測定装置につい
ては、当該回路基板の測定対象電極に対応する接触部材
を形成することは極めて困難であり、従って、このよう
な電気抵抗測定装置を容易に製造することができない。[0005] However, the above-described electric resistance measuring apparatus has the following problems. In order to measure the electric resistance between the electrodes on the circuit board, both the contact member connected to the current supply electrode and the contact member connected to the voltage supply electrode are brought into contact with the measurement target electrode on the circuit board. It is necessary. However, in a circuit board, the electrode size tends to be small in order to obtain a high degree of integration, and in order to contact two contact members independent of each other with such a measurement target electrode, the electrode size needs to be larger than that of the measurement target electrode. Even smaller contact members must be formed at a very small distance apart. For this reason, it is extremely difficult to form a contact member corresponding to the electrode to be measured on the circuit board for the electric resistance measuring device for measuring the electric resistance of the circuit board having the small-sized electrodes. Therefore, such an electric resistance measuring device cannot be easily manufactured.
【０００６】[0006]
【発明が解決しようとする課題】本発明は、以上のよう
な事情に基づいてなされたものであって、その目的は、
測定対象個所を損傷させることがなく、測定対象個所の
サイズの小さいものであっても、製造が容易で、所要の
電気抵抗の測定を高い精度で行うことができる電気抵抗
測定装置を提供することにある。DISCLOSURE OF THE INVENTION The present invention has been made based on the above circumstances, and its object is to provide:
Provided is an electric resistance measuring device which is easy to manufacture and can measure required electric resistance with high accuracy even if the measured object is small in size without damaging the measured object. It is in.
【０００７】[0007]
【課題を解決するための手段】本発明の電気抵抗測定装
置は、同一の測定対象個所に電気的に接続される、互い
に離間して配置された電流供給用電極および電圧測定用
電極と、前記電流供給用電極および前記電圧測定用電極
の両方の表面に接するよう設けられた共通の接触部材と
を有してなり、前記接触部材は、弾性高分子物質中に導
電性粒子が充填されてなる異方導電性エラストマーによ
り構成され、当該接触部材が測定対象個所に圧接された
状態で電気抵抗の測定が実行されることを特徴とする。According to the present invention, there is provided an electric resistance measuring apparatus comprising: a current supply electrode and a voltage measurement electrode which are electrically connected to the same measurement target portion and which are spaced apart from each other; A common contact member provided so as to be in contact with both surfaces of the current supply electrode and the voltage measurement electrode, and the contact member is formed by filling conductive particles in an elastic polymer material. It is made of an anisotropic conductive elastomer, and the electric resistance is measured in a state where the contact member is pressed against a measurement target portion.
【０００８】[0008]
【作用】（１）測定対象電極に圧接される接触部材は、
異方導電性エラストマーにより構成されているため、当
該接触部材が測定対象個所に圧接されても当該測定対象
個所が損傷することがない。 （２）接触部材は、電流供給用電極および電圧測定用電
極の両方の表面に接するよう設けられているため、十分
に大きいサイズを有するものであり、その結果、測定対
象個所のサイズが小さくても、当該接触部材を容易に形
成することができる。 （３）接触部材は、厚み方向における電気抵抗が厚み方
向と垂直な方向における電気抵抗に比して極めて小さい
ものであるため、接触部材が電流供給用電極および電圧
測定用電極の両方の表面に接していても、当該接触部材
を介して電流供給用電極と電圧測定用電極との間に流れ
る電流は極めて小さく、その結果、測定誤差が小さくて
高い精度で電気抵抗を測定することができる。(1) The contact member pressed against the electrode to be measured is
Since the contact member is made of the anisotropic conductive elastomer, the measurement target portion is not damaged even if the contact member is pressed against the measurement target portion. (2) Since the contact member is provided so as to be in contact with both surfaces of the current supply electrode and the voltage measurement electrode, the contact member has a sufficiently large size. As a result, the size of the portion to be measured is small. Also, the contact member can be easily formed. (3) Since the electrical resistance in the thickness direction of the contact member is extremely smaller than the electrical resistance in the direction perpendicular to the thickness direction, the contact member is provided on both surfaces of the current supply electrode and the voltage measurement electrode. Even if they are in contact, the current flowing between the current supply electrode and the voltage measurement electrode via the contact member is extremely small, and as a result, the measurement error is small and the electrical resistance can be measured with high accuracy.
【０００９】[0009]
【発明の実施の形態】以下、本発明の実施の形態につい
て詳細に説明する。図１は、本発明の電気抵抗測定装置
の一例における構成を示す説明図である。この電気抵抗
測定装置は、回路基板における電極間の電気抵抗を測定
するものであり、検査用回路基板１１を有する上部側ア
ダプター１０と、検査用回路基板３１を有する下部側ア
ダプター３０とが上下に互いに対向するよう配置されて
いる。上部側アダプター１０における検査用回路基板１
１の上面には、例えば発泡ポリウレタン、発泡ゴムなど
よりなる弾性緩衝板２５を介して、当該上部側アダプタ
ー１０を下方に押圧して降下させるための押圧板２０が
配置されている。一方、下部側アダプター３０における
検査用回路基板３１の下面には、当該下部側アダプター
３０を上方に押圧して上昇させるための押圧板４０が配
置されている。Embodiments of the present invention will be described below in detail. FIG. 1 is an explanatory diagram showing the configuration of an example of the electric resistance measuring device of the present invention. This electric resistance measuring device measures the electric resistance between electrodes on a circuit board, and an upper adapter 10 having an inspection circuit board 11 and a lower adapter 30 having an inspection circuit board 31 are vertically arranged. They are arranged to face each other. Inspection circuit board 1 in upper adapter 10
A pressing plate 20 for pressing and lowering the upper adapter 10 downward via an elastic cushioning plate 25 made of, for example, foamed polyurethane, foamed rubber, or the like is disposed on the upper surface of 1. On the other hand, on the lower surface of the test circuit board 31 of the lower adapter 30, a pressing plate 40 for pressing the lower adapter 30 upward to raise the lower adapter 30 is arranged.
【００１０】上部側アダプター１０と下部側アダプター
３０との間には被検査回路基板１が配置されている。こ
の例における被検査回路基板１は、図２に示すように、
その上面に、当該被検査回路基板１の周縁の方向に沿っ
て並ぶよう配置された、複数の矩形のペリフェラール電
極２を有すると共に、これらのペリフェラール電極２の
外方に配置された複数のフォトビア電極３を有し、これ
らのフォトビア電極３の各々は、ペリフェラール電極２
の各々に電気的に接続されている。また、被検査回路基
板１は、図３に示すように、その下面に、格子点位置に
従って配置された複数のグリッド電極４を有し、これら
のグリッド電極４の各々は、フォトビア電極３の各々に
電気的に接続されている。The circuit board 1 to be inspected is disposed between the upper adapter 10 and the lower adapter 30. The circuit board 1 to be inspected in this example is, as shown in FIG.
On its upper surface, a plurality of rectangular peripheral electrodes 2 are arranged so as to be arranged along the direction of the peripheral edge of the circuit board 1 to be inspected, and a plurality of photo via electrodes arranged outside these peripheral electrodes 2 are arranged. 3 and each of these photo via electrodes 3 is a peripheral electrode 2
Are electrically connected to each other. As shown in FIG. 3, the circuit board 1 to be inspected has a plurality of grid electrodes 4 arranged on the lower surface thereof in accordance with the positions of the grid points. Is electrically connected to the
【００１１】図４にも拡大して示すように、上部側アダ
プター１０における検査回路基板１１の下面には、被検
査回路基板１の上面における測定対象電極（図示の例で
はペリフェラール電極２）の配置パターンに従って、電
流供給用電極１２および電圧測定用電極１３が互いに離
間して配置されており、電流供給用電極１２および電圧
測定用電極１３は、当該検査用回路基板１１の配線回路
１４およびコネクター１５を介してテスター５０に電気
的に接続されている。また、上部側アダプター１０に
は、検査用回路基板１１における電流供給用電極１２お
よび電圧測定用電極１３の両方の表面に接する共通の接
触部材１６が設けられており、この接触部材１６は、検
査用回路基板１１の下面に設けられたシート状の保持部
材１７によって、端面が当該保持部材１７の表面から突
出した状態で保持されている。この例においては、被検
査回路基板１における測定対象電極（ペリフェラール電
極２）毎に、これに対応する複数の接触部材１６が互い
に独立した状態で設けられている。As shown in FIG. 4 on an enlarged scale, on the lower surface of the test circuit board 11 in the upper adapter 10, an electrode to be measured (peripheral electrode 2 in the example shown) on the upper surface of the circuit board 1 to be tested is arranged. According to the pattern, the current supply electrode 12 and the voltage measurement electrode 13 are spaced apart from each other, and the current supply electrode 12 and the voltage measurement electrode 13 are connected to the wiring circuit 14 and the connector 15 of the inspection circuit board 11. Is electrically connected to the tester 50 via the. Further, the upper adapter 10 is provided with a common contact member 16 that is in contact with both surfaces of the current supply electrode 12 and the voltage measurement electrode 13 on the inspection circuit board 11. An end face is held by a sheet-shaped holding member 17 provided on the lower surface of the circuit board 11 for use in a state where the end face protrudes from the surface of the holding member 17. In this example, a plurality of contact members 16 corresponding to each of the electrodes to be measured (peripheral electrodes 2) on the circuit board 1 to be inspected are provided independently of each other.
【００１２】一方、下部側アダプター３０における検査
回路基板３１の上面には、被検査回路基板１の下面にお
ける測定対象電極（図示の例ではグリッド電極４）の配
置パターンに従って、電流供給用電極３２および電圧測
定用電極３３が互いに離間して配置されており、電流供
給用電極３２および電圧測定用電極３３は、当該検査用
回路基板３１の配線回路３４およびコネクター３５を介
してテスター５０に電気的に接続されている。検査用回
路基板３１における電流供給用電極３２と電圧測定用電
極３３との離間距離は、上部側アダプター１０と同様の
範囲である。また、下部側アダプター３０には、検査用
回路基板３１における電流供給用電極３２の表面および
電圧測定用電極３３の表面の両方に接する共通の接触部
材３６が設けられており、この接触部材３６は、検査用
回路基板３１の上面に設けられたシート状の保持部材３
７によって、端面が当該保持部材３７の表面から突出し
た状態で保持されている。この例においては、被検査回
路基板１における測定対象電極（グリッド電極４）毎
に、これに対応する複数の接触部材１６が互いに独立し
た状態で設けられている。On the other hand, on the upper surface of the test circuit board 31 in the lower adapter 30, the current supply electrodes 32 and the current supply electrodes 32 and The voltage measurement electrodes 33 are arranged apart from each other, and the current supply electrode 32 and the voltage measurement electrode 33 are electrically connected to the tester 50 via the wiring circuit 34 and the connector 35 of the test circuit board 31. It is connected. The distance between the current supply electrode 32 and the voltage measurement electrode 33 on the inspection circuit board 31 is in the same range as that of the upper adapter 10. The lower adapter 30 is provided with a common contact member 36 that is in contact with both the surface of the current supply electrode 32 and the surface of the voltage measurement electrode 33 on the inspection circuit board 31. Sheet-like holding member 3 provided on the upper surface of the inspection circuit board 31
7, the end surface is held in a state of protruding from the surface of the holding member 37. In this example, a plurality of contact members 16 corresponding to the electrodes to be measured (grid electrodes 4) on the circuit board 1 to be inspected are provided independently of each other.
【００１３】以上において、 検査用回路基板１１，３
１における電流供給用電極１２，３２と電圧測定用電極
１３，３３との離間距離は、１０〜５００μｍであるこ
とが好ましい。この離間距離が１０μｍ未満である場合
には、接触部材１６，３６を介して電流供給用電極１
２，３２と電圧測定用電極１３，３３との間に流れる電
流が大きくなるため、高い精度で電気抵抗を測定するこ
とが困難となることがある。一方、この離間距離が５０
０μｍを超える場合には、電極サイズの小さい測定対象
電極を有する被検査回路基板について、その電極間の電
気抵抗を測定することが困難となる。In the above, the inspection circuit boards 11, 3
The distance between the current supply electrodes 12 and 32 and the voltage measurement electrodes 13 and 33 in 1 is preferably 10 to 500 μm. When the distance is less than 10 μm, the current supply electrode 1
Since the current flowing between the voltage measurement electrodes 2 and 32 and the voltage measurement electrodes 13 and 33 increases, it may be difficult to measure the electric resistance with high accuracy. On the other hand, if this separation distance is 50
If the thickness exceeds 0 μm, it becomes difficult to measure the electrical resistance between the electrodes of a circuit board to be inspected having electrodes to be measured having a small electrode size.
【００１４】接触部材１６，３６の各々は異方導電性エ
ラストマーにより構成されている。この異方導電性エラ
ストマーは、絶縁性の弾性高分子物質中に導電性粒子が
厚み方向（図において上下方向）に並ぶよう配向した状
態で充填されてなり、これにより、厚み方向に高い導電
性を示すものであり、特に、厚み方向に加圧されて圧縮
されたときに抵抗値が減少して導電路が形成される、加
圧異方導電性エラストマーが好ましい。Each of the contact members 16 and 36 is made of an anisotropic conductive elastomer. This anisotropic conductive elastomer is filled with conductive particles oriented in a thickness direction (vertical direction in the figure) in an insulating elastic polymer material, thereby providing high conductivity in the thickness direction. In particular, a pressurized anisotropic conductive elastomer, which forms a conductive path by reducing the resistance value when pressed and compressed in the thickness direction, is preferable.
【００１５】導電性粒子としては、例えばニッケル、
鉄、コバルトなどの磁性を示す金属の粒子もしくはこれ
らの合金の粒子、またはこれらの粒子に金、銀、パラジ
ウム、ロジウムなどのメッキを施したもの、非磁性金属
粒子もしくはガラスビーズなどの無機質粒子またはポリ
マー粒子にニッケル、コバルトなどの導電性磁性体のメ
ッキを施したものなどを挙げることができる。As the conductive particles, for example, nickel,
Iron, particles of magnetic metals such as cobalt or particles of these alloys, or those particles plated with gold, silver, palladium, rhodium, etc., inorganic particles such as non-magnetic metal particles or glass beads or Examples thereof include polymer particles obtained by plating a conductive magnetic material such as nickel and cobalt on polymer particles.
【００１６】後述する接触部材の形成方法においては、
ニッケル、鉄、またはこれらの合金などよりなる導電性
磁性体粒子が用いられ、また接触抵抗が小さいなどの電
気的特性の点で金メッキされた粒子を好ましく用いるこ
とができる。また、磁気ヒステリシスを示さない点か
ら、導電性超常磁性体よりなる粒子も好ましく用いるこ
とができる。In a method of forming a contact member described later,
Conductive magnetic particles made of nickel, iron, or an alloy thereof are used, and gold-plated particles can be preferably used in terms of electrical characteristics such as low contact resistance. Further, particles composed of a conductive superparamagnetic material can be preferably used because they do not show magnetic hysteresis.
【００１７】導電性粒子の粒径は、接触部材１６，３６
の加圧変形を容易にし、かつ接触部材１６，３６におい
て導電性粒子間に十分な電気的な接触が得られるよう、
３〜２００μｍであることが好ましく、特に１０〜１０
０μｍであることが好ましい。The size of the conductive particles is determined by the contact members 16 and 36.
So that sufficient electrical contact between the conductive particles in the contact members 16 and 36 can be obtained.
It is preferably from 3 to 200 μm, particularly preferably from 10 to 10 μm.
It is preferably 0 μm.
【００１８】弾性高分子物質としては、架橋構造を有す
る高分子物質が好ましい。架橋高分子物質を得るために
用いることができる硬化性の高分子物質用材料として
は、例えばシリコーンゴム、ポリブタジエン、天然ゴ
ム、ポリイソプレン、スチレン−ブタジエン共重合体ゴ
ム、アクリロニトリル−ブタジエン共重合体ゴム、エチ
レン−プロピレン共重合体ゴム、ウレタンゴム、ポリエ
ステル系ゴム、クロロプレンゴム、エピクロルヒドリン
ゴム、軟質液状エポキシ樹脂などを挙げることができ
る。As the elastic high molecular substance, a high molecular substance having a crosslinked structure is preferable. Examples of curable polymer materials that can be used to obtain a cross-linked polymer include silicone rubber, polybutadiene, natural rubber, polyisoprene, styrene-butadiene copolymer rubber, and acrylonitrile-butadiene copolymer rubber. , Ethylene-propylene copolymer rubber, urethane rubber, polyester rubber, chloroprene rubber, epichlorohydrin rubber, and soft liquid epoxy resin.
【００１９】具体的には、硬化処理前には液状であっ
て、硬化処理後に検査用回路基板１１，３１と密着状態
または接着状態を保持して一体となる高分子物質用材料
が好ましい。このような観点から、本発明に好適な高分
子物質用材料としては、液状シリコーンゴム、液状ウレ
タンゴム、軟質液状エポキシ樹脂などを挙げることがで
きる。高分子物質用材料には、検査用回路基板１１，３
１に対する接着性を向上させるために、シランカップリ
ング剤、チタンカップリング剤などの添加剤を添加する
ことができる。Specifically, it is preferable to use a polymer material which is in a liquid state before the curing treatment and is integrated with the inspection circuit boards 11 and 31 while keeping the adhesion state or the adhesion state after the curing treatment. From such a viewpoint, examples of the material for a polymer substance suitable for the present invention include liquid silicone rubber, liquid urethane rubber, and soft liquid epoxy resin. Inspection circuit boards 11 and 3
In order to improve the adhesiveness to No. 1, additives such as a silane coupling agent and a titanium coupling agent can be added.
【００２０】接触部材１６，３６は、厚み方向の電気抵
抗に対する厚み方向と垂直な方向の電気抵抗の比が１以
下、特に０．５以下であることが好ましい。この比が１
を超える場合には、接触部材１６，３６を介して電流供
給用電極１２，３２と電圧測定用電極１３，３３との間
に流れる電流が大きくなるため、高い精度で電気抵抗を
測定することが困難となることがある。このような観点
から、接触部材１６，３６における導電性粒子の充填率
は５〜５０体積％であることが好ましい。The contact members 16, 36 preferably have a ratio of the electric resistance in the direction perpendicular to the thickness direction to the electric resistance in the thickness direction of 1 or less, particularly preferably 0.5 or less. This ratio is 1
In the case of exceeding, the current flowing between the current supply electrodes 12 and 32 and the voltage measurement electrodes 13 and 33 via the contact members 16 and 36 increases, so that the electrical resistance can be measured with high accuracy. It can be difficult. From such a viewpoint, the filling rate of the conductive particles in the contact members 16 and 36 is preferably 5 to 50% by volume.
【００２１】保持部材１７，３７を構成する材料として
は、弾性高分子物質が好ましく、接触部材１６，３６を
構成する弾性高分子物質と同一のものまたは異なるもの
を用いることができるが、同様に硬化処理後に検査用回
路基板１１，３１と密着状態または接着状態を保持して
一体となるものが用いられる。The material constituting the holding members 17 and 37 is preferably an elastic polymer material, and the same or different material as the elastic polymer material constituting the contact members 16 and 36 can be used. After the curing process, the one that is integrated with the inspection circuit boards 11 and 31 while maintaining a close contact state or an adhesion state is used.
【００２２】以上において、接触部材１６は、以下のよ
うにして検査用回路基板１１上に形成することができ
る。先ず、図５に示すように、検査用回路基板１１上
に、電流供給用電極１２および電圧測定用電極が形成さ
れた個所に対応して貫通孔１８が形成された保持部材１
７を形成する。このような保持部材１７は、検査用回路
基板１１上に、硬化されて絶縁性の弾性高分子物質とな
る高分子物質用材料を塗布し、これを硬化させることに
より、保持部材用シートを当該検査用回路基板１１に一
体的に形成し、その後、当該保持部材用シートに対して
レーザーなどにより所要の個所に貫通孔１８を形成する
ことにより得られる。In the above, the contact member 16 can be formed on the inspection circuit board 11 as follows. First, as shown in FIG. 5, a holding member 1 in which a through-hole 18 is formed on a circuit board 11 for inspection at a position where a current supply electrode 12 and a voltage measurement electrode are formed.
7 is formed. Such a holding member 17 applies a polymer material to be cured and becomes an insulating elastic polymer material on the inspection circuit board 11 and cures the material to form a holding member sheet. It is formed integrally with the circuit board 11 for inspection, and thereafter, it is obtained by forming a through hole 18 at a required place on the holding member sheet by a laser or the like.
【００２３】次いで、図６に示すように、保持部材１７
の貫通孔１８内に、硬化されて絶縁性の弾性高分子物質
となる高分子物質用材料中に導電性磁性体粒子が分散さ
れてなる接触部材用材料層１６Ａを形成する。その後、
電磁石などにより、接触部材用材料層１６Ａの厚さ方向
の平行磁場を作用させる。その結果、接触部材用材料層
１６Ａにおいては、導電性磁性体粒子が、磁力により厚
み方向に並ぶよう配向する。そして、平行磁場を作用さ
せたまま、あるいは平行磁場を除いた後、硬化処理を行
うことにより、検査用回路基板１１および保持部材１７
に一体的に設けられた接触部材が形成される。Next, as shown in FIG.
A contact member material layer 16A formed by dispersing conductive magnetic particles in a polymer material material that is cured to become an insulating elastic polymer material is formed in the through hole 18. afterwards,
A parallel magnetic field in the thickness direction of the contact member material layer 16A is applied by an electromagnet or the like. As a result, in the contact member material layer 16A, the conductive magnetic particles are oriented so as to be arranged in the thickness direction by the magnetic force. Then, a hardening process is performed while the parallel magnetic field is applied or after the parallel magnetic field is removed, so that the inspection circuit board 11 and the holding member 17 are subjected to a hardening process.
Is formed integrally with the contact member.
【００２４】接触部材用材料層１６Ａに作用される平行
磁場の強度は、平均で２００〜２０，０００ガウスとな
る大きさが好ましい。The strength of the parallel magnetic field applied to the contact member material layer 16A is preferably such that the average is 200 to 20,000 gauss.
【００２５】また、接触部材用材料層１６Ａの硬化処理
は、使用される材料によって適宜選定されるが、通常、
熱処理によって行われる。具体的な加熱温度および加熱
時間は、接触部材用材料層１６Ａの高分子物質用材料の
種類、導電性磁性体粒子の移動に要する時間などを考慮
して適宜選定される。例えば、高分子物質用材料が室温
硬化型シリコーンゴムである場合に、硬化処理は、室温
で２４時間程度、４０℃で２時間程度、８０℃で３０分
間程度で行われる。The curing treatment of the contact member material layer 16A is appropriately selected depending on the material to be used.
This is performed by heat treatment. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer material of the contact member material layer 16A, the time required for moving the conductive magnetic particles, and the like. For example, when the material for a polymer substance is a room-temperature-curable silicone rubber, the curing treatment is performed at room temperature for about 24 hours, at 40 ° C. for about 2 hours, and at 80 ° C. for about 30 minutes.
【００２６】以上のような電気抵抗測定装置において
は、次のようにして被検査回路基板１における測定対象
電極間の電気抵抗が測定される。被検査回路基板１を、
上部側アダプター１０および下部側アダプター３０の間
における所要の位置に配置し、この状態で、押圧板２０
により弾性緩衝板３１を介して上部側アダプター１０を
押圧して下降させると共に、押圧板４０により下部側ア
ダプター３０を押圧して上昇させることにより、上部側
アダプター１０の接触部材１６が、被検査回路基板１に
おける一方の測定対象電極であるペリフェラール電極２
に圧接されると共に、下部アダプター３０の接触部材３
６が、被検査回路基板１における他方の測定対象電極で
あるグリッド電極４に圧接される。これにより、上部側
アダプター１０の検査用回路基板１１における電流供給
用電極１２および電圧測定用電極１３が、接触部材１６
を介して被検査回路基板１のペリフェラール電極２に電
気的に接続されると共に、下部側アダプター３０の検査
用回路基板３１における電流供給用電極３２および電圧
測定用電極３３が、接触部材３６を介して被検査回路基
板１のグリッド電極４に電気的に接続される。そして、
テスター５０から電流供給用電極１２，３２間に電流を
供給する共に、テスター５０によって、電圧測定用電極
１３，３３間の電圧信号を検出して処理することによ
り、ペリフェラール電極２およびグリッド電極４間にお
ける電気抵抗の測定が達成される。In the electric resistance measuring device as described above, the electric resistance between the electrodes to be measured on the circuit board 1 to be inspected is measured as follows. The circuit board 1 to be inspected is
It is arranged at a required position between the upper adapter 10 and the lower adapter 30, and in this state, the pressing plate 20
By pressing the upper adapter 10 through the elastic buffer plate 31 to lower it, and by pressing the lower adapter 30 by the pressing plate 40 to raise it, the contact member 16 of the upper adapter 10 Peripheral electrode 2 which is one of the electrodes to be measured on substrate 1
And the contact member 3 of the lower adapter 30
6 is pressed against the grid electrode 4 which is the other electrode to be measured on the circuit board 1 to be inspected. As a result, the current supply electrode 12 and the voltage measurement electrode 13 on the test circuit board 11 of the upper adapter 10 are connected to the contact member 16.
Is electrically connected to the peripheral electrode 2 of the circuit board 1 to be inspected via the contact member 36, and the current supply electrode 32 and the voltage measurement electrode 33 on the inspection circuit board 31 of the lower adapter 30 are connected via the contact member 36. To be electrically connected to the grid electrode 4 of the circuit board 1 to be inspected. And
A current is supplied between the current supply electrodes 12 and 32 from the tester 50, and a voltage signal between the voltage measurement electrodes 13 and 33 is detected and processed by the tester 50, so that the voltage between the peripheral electrode 2 and the grid electrode 4 is increased. The measurement of the electrical resistance at is achieved.
【００２７】上記の電気抵抗測定装置によれば、被検査
回路基板１における測定対象電極であるペリフェラール
電極２およびグリッド電極４に圧接される接触部材１
６，３６は、異方導電性エラストマーにより構成されて
いるため、接触部材１６，３６がペリフェラール電極２
およびグリッド電極４に圧接されてもこれらが損傷する
ことがない。また、接触部材１６，３６は、電流供給用
電極１２，３２および電圧測定用電極１３，３３の両方
の表面に接するよう設けられているため、十分に大きい
サイズを有するものであり、その結果、ペリフェラール
電極２およびグリッド電極４の電極サイズが小さいもの
であっても、接触部材１６，３６を容易に形成すること
ができる。そして、接触部材１６，３６は、厚み方向に
おける電気抵抗が厚み方向と垂直な方向における電気抵
抗に比して極めて小さいものであるため、接触部材１
６，３６が電流供給用電極１２，３２および電圧測定用
電極１３，３３の両方の表面に接していても、接触部材
１６，３６を介して電流供給用電極１２，３２と電圧測
定用電極１３，３３との間に流れる電流は極めて小さ
く、その結果、測定誤差が小さくて高い精度で電気抵抗
を測定することができる。According to the above-described electric resistance measuring device, the contact member 1 pressed against the peripheral electrode 2 and the grid electrode 4 which are the electrodes to be measured on the circuit board 1 to be inspected.
6 and 36 are made of an anisotropic conductive elastomer, the contact members 16 and 36 are connected to the peripheral electrode 2.
Even if they are pressed against the grid electrode 4, they will not be damaged. Further, since the contact members 16 and 36 are provided so as to be in contact with both surfaces of the current supply electrodes 12 and 32 and the voltage measurement electrodes 13 and 33, the contact members 16 and 36 have a sufficiently large size. Even if the electrode size of the peripheral electrode 2 and the grid electrode 4 is small, the contact members 16 and 36 can be easily formed. The contact members 16 and 36 have an extremely small electric resistance in the thickness direction as compared with the electric resistance in a direction perpendicular to the thickness direction.
Even if 6 and 36 are in contact with both surfaces of the current supply electrodes 12 and 32 and the voltage measurement electrodes 13 and 33, the current supply electrodes 12 and 32 and the voltage measurement electrode 13 , 33 are extremely small, and as a result, the measurement error is small and the electric resistance can be measured with high accuracy.
【００２８】以上、本発明の実施の形態の一例を説明し
たが、本発明は上記の電気抵抗測定装置に限定されず、
以下のような種々の変更を加えることが可能である。 （１）図２および図３に示す被検査回路基板１におい
て、フォトビア電極３およびグリッド電極４間の電気抵
抗を測定する場合には、図７および図８に示す構成を採
用することができる。Although the embodiment of the present invention has been described above, the present invention is not limited to the above-described electric resistance measuring apparatus.
Various changes such as the following can be made. (1) When measuring the electrical resistance between the photo-via electrode 3 and the grid electrode 4 in the circuit board 1 to be inspected shown in FIGS. 2 and 3, the configuration shown in FIGS. 7 and 8 can be adopted.
【００２９】図７に示す電気抵抗測定装置ついて具体的
に説明すると、上部側アダプター１０における検査用回
路基板１１の下面には、被検査回路基板１におけるペリ
フェラール電極２の配置パターンに対応して電流供給用
電極１２が配置されると共に、フォトビア電極３の配置
パターンに対応して電圧測定用電極１３が配置されてい
る。そして、電流供給用電極１２の表面および電圧測定
用電極１３の表面の各々には、それぞれ独立の接触部材
１６が設けられており、この接触部材１６の各々は、検
査用回路基板１１の下面に設けられたシート状の保持部
材１７によって、端面が当該保持部材１７の表面から突
出した状態で保持されている。一方、下部側アダプター
３０は、図４に示すものと同様の構成である。The electric resistance measuring device shown in FIG. 7 will be described in detail. The electric current corresponding to the arrangement pattern of the peripheral electrodes 2 on the circuit board 1 to be inspected is provided on the lower surface of the circuit board 11 for inspection in the upper adapter 10. The supply electrode 12 is arranged, and the voltage measurement electrode 13 is arranged corresponding to the arrangement pattern of the photo-via electrodes 3. An independent contact member 16 is provided on each of the surface of the current supply electrode 12 and the surface of the voltage measurement electrode 13, and each of the contact members 16 is provided on the lower surface of the inspection circuit board 11. The end surface is held by the provided sheet-shaped holding member 17 in a state of protruding from the surface of the holding member 17. On the other hand, the lower adapter 30 has the same configuration as that shown in FIG.
【００３０】上記の電気抵抗測定装置においては、図１
に示す電気抵抗測定装置と同様にして、上部側アダプタ
ー１０の接触部材１６が、被検査回路基板１におけるペ
リフェラール電極２およびフォトビア電極３の各々に圧
接されると共に、下部アダプター３０の接触部材３６
が、被検査回路基板１におけるグリッド電極４に圧接さ
れ、これにより、上部側アダプター１０の検査用回路基
板１１における電流供給用電極１２が、接触部材１６を
介して被検査回路基板１のペリフェラール電極２に電気
的に接続されると共に、電圧測定用電極１３が、接触部
材１６を介して被検査回路基板１のフォトビア電極３に
電気的に接続され、一方、下部側アダプター３０の検査
用回路基板３１における電流供給用電極３２および電圧
測定用電極３３が、接触部材３６を介して被検査回路基
板１のグリッド電極４に電気的に接続される。そして、
テスター５０から電流供給用電極１２，３２間に電流を
供給する共に、テスター５０によって、電圧測定用電極
１３，３３間の電圧信号を検出して処理することによ
り、フォトビア電極３およびグリッド電極４間における
電気抵抗の測定が達成される。In the above electric resistance measuring apparatus, FIG.
The contact member 16 of the upper adapter 10 is pressed into contact with each of the peripheral electrode 2 and the photo-via electrode 3 on the circuit board 1 to be inspected, and the contact member 36 of the lower adapter 30 is formed.
Is pressed against the grid electrode 4 on the circuit board 1 to be inspected, whereby the current supply electrode 12 on the inspection circuit board 11 of the upper adapter 10 is connected to the peripheral electrode of the circuit board 1 via the contact member 16. 2 and the voltage measurement electrode 13 is electrically connected to the photo via electrode 3 of the circuit board 1 to be inspected via the contact member 16, while the inspection circuit board of the lower adapter 30 is electrically connected to the photo via electrode 3 of the circuit board 1 to be inspected. The current supply electrode 32 and the voltage measurement electrode 33 in 31 are electrically connected to the grid electrode 4 of the circuit board 1 to be inspected via the contact member 36. And
A current is supplied between the current supply electrodes 12 and 32 from the tester 50, and a voltage signal between the voltage measurement electrodes 13 and 33 is detected and processed by the tester 50, so that the voltage between the photovia electrode 3 and the grid electrode 4 is increased. The measurement of the electrical resistance at is achieved.
【００３１】図８に示す電気抵抗測定装置ついて具体的
に説明すると、上部側アダプター１０における検査用回
路基板１１の下面には、図９に示すように、被検査回路
基板１における全てのペリフェラール電極２をカバーす
る大きさの単独の電流供給用電極１２が配置されると共
に、フォトビア電極３の配置パターンに対応して電圧測
定用電極１３が配置されている。そして、電流供給用電
極１２の表面および電圧測定用電極１３の表面の各々に
は、それぞれ独立の接触部材１６が設けられており、こ
の接触部材１６の各々は、検査用回路基板１１の下面に
設けられたシート状の保持部材１７によって、端面が当
該保持部材１７の表面から突出した状態で保持されてい
る。一方、下部側アダプター３０は、図４に示すものと
同様の構成である。このような構成によれば、ペリフェ
ラール電極２に対応して複数の電流供給用電極１２を形
成することが不要となるため、検査用回路基板１０の製
造が容易となる。The electric resistance measuring device shown in FIG. 8 will be specifically described. As shown in FIG. 9, all the peripheral electrodes on the circuit board 1 to be inspected are provided on the lower surface of the inspection circuit board 11 in the upper adapter 10. 2 and a voltage measuring electrode 13 corresponding to the arrangement pattern of the photo-via electrodes 3. An independent contact member 16 is provided on each of the surface of the current supply electrode 12 and the surface of the voltage measurement electrode 13, and each of the contact members 16 is provided on the lower surface of the inspection circuit board 11. The end surface is held by the provided sheet-shaped holding member 17 in a state of protruding from the surface of the holding member 17. On the other hand, the lower adapter 30 has the same configuration as that shown in FIG. According to such a configuration, it is not necessary to form a plurality of current supply electrodes 12 corresponding to the peripheral electrodes 2, so that the production of the inspection circuit board 10 is facilitated.
【００３２】上記の電気抵抗測定装置においては、図１
に示す電気抵抗測定装置と同様にして、上部側アダプタ
ー１０における電流供給用電極１２の表面に設けられた
接触部材１６が、被検査回路基板１における全てのペリ
フェラール電極２に圧接されると共に、電圧測定用電極
１３の各々の表面に設けられた接触部材１６が、フォト
ビア電極３の各々に圧接され、一方、下部アダプター３
０の接触部材３６が、被検査回路基板１におけるグリッ
ド電極４に圧接され、これにより、上部側アダプター１
０の検査用回路基板１１における電流供給用電極１２
が、接触部材１６を介して被検査回路基板１の全てのペ
リフェラール電極２に電気的に接続されると共に、電圧
測定用電極１３の各々が、接触部材１６を介して被検査
回路基板１のフォトビア電極３の各々に電気的に接続さ
れ、一方、下部側アダプター３０の検査用回路基板３１
における電流供給用電極３２および電圧測定用電極３３
が、接触部材３６を介して被検査回路基板１のグリッド
電極４に電気的に接続される。そして、テスター５０か
ら電流供給用電極１２，３２間に電流を供給する共に、
テスター５０によって、電圧測定用電極１３，３３間の
電圧信号を検出して処理することにより、フォトビア電
極３およびグリッド電極４間における電気抵抗の測定が
達成される。In the above electric resistance measuring apparatus, FIG.
In the same manner as in the electric resistance measuring device shown in FIG. 1, the contact member 16 provided on the surface of the current supply electrode 12 in the upper adapter 10 is pressed against all the peripheral electrodes 2 on the circuit board 1 to be inspected, and A contact member 16 provided on each surface of the measurement electrode 13 is pressed against each of the photovia electrodes 3 while the lower adapter 3
No. 0 contact member 36 is pressed against the grid electrode 4 on the circuit board 1 to be inspected.
0 current supply electrode 12 on the inspection circuit board 11
Are electrically connected to all the peripheral electrodes 2 of the circuit board 1 to be inspected via the contact members 16, and each of the voltage measuring electrodes 13 is connected to the photo via of the circuit board 1 to be inspected via the contact members 16. The test circuit board 31 of the lower adapter 30 is electrically connected to each of the electrodes 3.
Current supply electrode 32 and voltage measurement electrode 33 in FIG.
Is electrically connected to the grid electrode 4 of the circuit board under test 1 via the contact member 36. A current is supplied between the current supply electrodes 12 and 32 from the tester 50,
By measuring and processing the voltage signal between the voltage measuring electrodes 13 and 33 by the tester 50, the measurement of the electric resistance between the photo via electrode 3 and the grid electrode 4 is achieved.
【００３３】（２）本発明の電気抵抗測定装置において
は、図１０に示すように、接触部材１６として、検査用
回路基板１０における電流供給用電極１２および電圧測
定用電極１３が形成された領域全体をカバーする寸法を
有する、全ての電流供給用電極１２および電圧測定用電
極１３に接続される異方導電性エラストマーシートを用
いることができる。 （３）本発明の電気抵抗測定装置は、回路基板における
電極間の電気抵抗の測定以外の用途にも適用することが
できる。(2) In the electric resistance measuring apparatus of the present invention, as shown in FIG. 10, as the contact member 16, the area where the current supply electrode 12 and the voltage measurement electrode 13 are formed on the inspection circuit board 10. An anisotropic conductive elastomer sheet connected to all the current supply electrodes 12 and the voltage measurement electrodes 13 having a dimension covering the whole can be used. (3) The electric resistance measuring device of the present invention can be applied to uses other than the measurement of electric resistance between electrodes on a circuit board.
【００３４】[0034]
電極サイズ：０．０６ｍｍ×１．０ｍｍ，配置ピッチ：
０．１ｍｍ、電極数：６４×４（２５６） 〔フォトビア電極〕 電極サイズ：直径０．２ｍｍ，電極数：２５６ 〔グリット電極〕 電極サイズ：直径０．３ｍｍ，配置ピッチ：０．５ｍ
ｍ，電極数：１６×１６（２５６）Electrode size: 0.06 mm x 1.0 mm, arrangement pitch:
0.1 mm, number of electrodes: 64 × 4 (256) [Photo via electrode] Electrode size: 0.2 mm in diameter, number of electrodes: 256 [grid electrode] Electrode size: 0.3 mm in diameter, arrangement pitch: 0.5 m
m, number of electrodes: 16 × 16 (256)
【００３５】〈実施例１〉図１の構成に従い、下記の条
件により電気抵抗測定装置を作製した。 （１）上部側アダプター 〔検査用回路基板〕 電流供給用電極の寸法：０．０６ｍｍ×０．４ｍｍ 電圧測定用電極の寸法：０．０６ｍｍ×０．４ｍｍ 電流供給用電極と電圧測定用電極との離間距離：１００
μｍ， 〔接触部材〕 寸法：０．０６×１．０ｍｍ，厚み０．２ｍｍ， 導電性粒子：材質；表面に金メッキが施されたニッケル
粒子，平均粒子径３０μｍ，充填率３０体積％， 弾性高分子物質：材質；シリコーンゴム， 〔保持部材〕 材質；シリコーンゴム，厚み０．２ｍｍExample 1 An electric resistance measuring device was manufactured according to the configuration shown in FIG. 1 under the following conditions. (1) Upper adapter [Inspection circuit board] Dimensions of current supply electrode: 0.06 mm x 0.4 mm Dimensions of voltage measurement electrode: 0.06 mm x 0.4 mm Current supply electrode and voltage measurement electrode Separation distance: 100
μm, [contact member] dimensions: 0.06 × 1.0 mm, thickness 0.2 mm, conductive particles: material; nickel particles with gold plating on the surface, average particle diameter 30 μm, filling rate 30 vol%, elasticity high Molecular substance: Material; silicone rubber, [holding member] Material: silicone rubber, thickness 0.2 mm
【００３６】（２）下部側アダプター 〔検査用回路基板〕 電流供給用電極の寸法：０．２ｍｍ×０．１ｍｍ 電圧測定用電極の寸法：０．２ｍｍ×０．１ｍｍ 電流供給用電極と電圧測定用電極との離間距離：７０μ
ｍ， 〔接触部材〕 寸法：直径３００μｍ，厚み０．２ｍｍ， 導電性粒子：材質；表面に金メッキが施されたニッケル
粒子，平均粒子径３０μｍ，充填率３０体積％， 弾性高分子物質：材質；シリコーンゴム， 〔保持部材〕 材質；シリコーンゴム，厚み０．２ｍｍ(2) Lower side adapter [Inspection circuit board] Size of current supply electrode: 0.2 mm × 0.1 mm Size of voltage measurement electrode: 0.2 mm × 0.1 mm Current supply electrode and voltage measurement Separation distance from electrode for use: 70μ
m, [Contact member] Dimensions: diameter 300 μm, thickness 0.2 mm, conductive particles: material; nickel particles with gold plating on the surface, average particle diameter 30 μm, filling rate 30 vol%, elastic polymer substance: material; Silicone rubber, [holding member] Material: Silicone rubber, thickness 0.2mm
【００３７】（３）テスター 「ＯＰＥＮ／ＬＥＡＫテスター Ｒ−５６００」（抵抗
測定範囲１０ｍΩ〜１００Ω，日本電産リード製）(3) Tester "OPEN / LEAK Tester R-5600" (resistance measurement range: 10 mΩ to 100 Ω, manufactured by Nidec Reed)
【００３８】上記の電気抵抗測定装置を用い、上部側ア
ダプターおよび下部側アダプターの接触部材を被検査回
路基板のペリフェラール電極およびグリッド電極に３ｋ
ｇｆの圧力で圧接させた状態で、当該被検査回路基板に
おけるペリフェラール電極とグリッド電極との間の電気
抵抗を測定した。結果を表１に示す。Using the above-described electric resistance measuring apparatus, the contact members of the upper adapter and the lower adapter are connected to the peripheral electrodes and grid electrodes of the circuit board to be inspected by 3 k.
In a state where the circuit boards were pressed against each other at a pressure of gf, the electric resistance between the peripheral electrodes and the grid electrodes on the circuit board to be inspected was measured. Table 1 shows the results.
【００３９】〈実施例２〉図７に示す構成に従い、下記
の条件により上部側コネクターを作製したこと以外は実
施例１と同様にして電気抵抗測定装置を作製した。 〔検査用回路基板〕 電流供給用電極の寸法：０．０６ｍｍ×１．０ｍｍ， 電圧測定用電極の寸法：直径０．２ｍｍ， 〔接触部材〕 電流供給用電極に接続されたものの寸法：０．０６ｍｍ
×１．０ｍｍ，厚み０．２ｍｍ， 電圧測定用電極に接続されたものの寸法：直径０．２ｍ
ｍ，厚み０．２ｍｍ，導電性粒子：材質；表面に金メッ
キが施されたニッケル粒子，平均粒子径３０μｍ，充填
率３０体積％， 弾性高分子物質：材質；シリコーンゴム<Example 2> An electrical resistance measuring device was manufactured in the same manner as in Example 1 except that an upper connector was manufactured under the following conditions according to the configuration shown in FIG. [Inspection circuit board] Dimensions of current supply electrodes: 0.06 mm x 1.0 mm, dimensions of voltage measurement electrodes: 0.2 mm in diameter, [contact member] Dimensions of components connected to current supply electrodes: 0. 06mm
× 1.0 mm, thickness 0.2 mm, dimensions connected to voltage measurement electrode: diameter 0.2 m
m, thickness: 0.2 mm, conductive particles: material; nickel particles with gold plating on the surface, average particle size: 30 μm, filling rate: 30% by volume, elastic polymer: material: silicone rubber
【００４０】上記の電気抵抗測定装置を用い、上部側ア
ダプターおよび下部側アダプターの接触部材を被検査回
路基板のペリフェラール電極およびフォトビア電極並び
にグリッド電極に３ｋｇｆの圧力で圧接させた状態で、
当該被検査回路基板におけるフォトビア電極とグリッド
電極との間の電気抵抗を測定した。結果を表１に示す。Using the above-described electric resistance measuring device, the contact members of the upper adapter and the lower adapter were pressed against the peripheral electrode, the photo via electrode, and the grid electrode of the circuit board to be inspected at a pressure of 3 kgf.
The electrical resistance between the photo via electrode and the grid electrode on the circuit board to be inspected was measured. Table 1 shows the results.
【００４１】〈実施例３〉図８に示す構成に従い、下記
の条件により上部側コネクターを作製したこと以外は実
施例１と同様にして電気抵抗測定装置を作製した。 〔検査用回路基板〕 電流供給用電極の寸法：外周６．５ｍｍ×６．５ｍｍ，
幅１．０ｍｍ， 電圧測定用電極の寸法：直径０．２ｍｍ， 〔接触部材〕 電流供給用電極に接続されたものの寸法：外周６．５ｍ
ｍ×６．５ｍｍ，幅０．８ｍｍ，厚み０．２ｍｍ， 電圧測定用電極に接続されたものの寸法：直径０．２ｍ
ｍ，厚み０．２ｍｍ，導電性粒子：材質；表面に金メッ
キが施されたニッケル粒子，平均粒子径３０μｍ，充填
率３０体積％， 弾性高分子物質：材質；シリコーンゴム<Example 3> An electric resistance measuring apparatus was manufactured in the same manner as in Example 1 except that an upper connector was manufactured under the following conditions according to the structure shown in FIG. [Circuit board for inspection] Dimensions of current supply electrode: Outer circumference 6.5 mm x 6.5 mm,
Width 1.0 mm, dimensions of voltage measurement electrode: diameter 0.2 mm, [contact member] dimensions of thing connected to current supply electrode: outer circumference 6.5 m
mx 6.5 mm, width 0.8 mm, thickness 0.2 mm, dimensions connected to voltage measuring electrode: diameter 0.2 m
m, thickness: 0.2 mm, conductive particles: material; nickel particles with gold plating on the surface, average particle size: 30 μm, filling rate: 30% by volume, elastic polymer: material: silicone rubber
【００４２】上記の電気抵抗測定装置を用い、上部側ア
ダプターおよび下部側アダプターの接触部材を被検査回
路基板のペリフェラール電極およびフォトビア電極並び
にグリッド電極に３ｋｇｆの圧力で圧接させた状態で、
当該被検査回路基板におけるフォトビア電極とグリッド
電極との間の電気抵抗を測定した。結果を表１に示す。Using the above-described electric resistance measuring device, the contact members of the upper adapter and the lower adapter were pressed against the peripheral electrode, the photo via electrode, and the grid electrode of the circuit board to be inspected at a pressure of 3 kgf.
The electrical resistance between the photo via electrode and the grid electrode on the circuit board to be inspected was measured. Table 1 shows the results.
【００４３】〈参考例１〉電気抵抗測定器「ＴＲ６１４
３」（アドバンテスト製）を用い、プローブピンによ
り、被検査回路基板におけるペリフェラール電極とグリ
ッド電極との間の電気抵抗を測定した。結果を表１に示
す。 〈参考例２〉高精度電気抵抗測定器「ＴＲ６１４３」
（アドバンテスト製）を用い、プローブピンにより、被
検査回路基板におけるフォトビア電極とグリッド電極と
の間の電気抵抗を測定した。結果を表１に示す。<Reference Example 1> Electric resistance measuring instrument "TR614"
Using "3" (manufactured by Advantest), the electrical resistance between the peripheral electrode and the grid electrode on the circuit board to be inspected was measured with a probe pin. Table 1 shows the results. <Reference Example 2> High-precision electric resistance measuring instrument "TR6143"
Using Advantest (produced by Advantest), the electrical resistance between the photovia electrode and the grid electrode on the circuit board to be inspected was measured with a probe pin. Table 1 shows the results.
【００４４】[0044]
【表１】 [Table 1]
【００４５】表１から明らかなように、実施例１〜３に
係る電気抵抗測定装置によれば、プローブピンによる電
気抵抗の測定値に対して５ｍΩ以下の誤差で電気抵抗を
測定することができ、高い精度を有するものであること
が確認された。As is clear from Table 1, according to the electric resistance measuring devices according to the first to third embodiments, the electric resistance can be measured with an error of 5 mΩ or less with respect to the electric resistance measured by the probe pin. It was confirmed that it had high accuracy.
【００４６】[0046]
【発明の効果】本発明の電気抵抗測定装置によれば、測
定対象個所に圧接される接触部材が異方導電性エラスト
マーにより構成されているため、当該接触部材が測定対
象個所に圧接されても当該測定対象個所が損傷すること
がない。また、接触部材は、電流供給用電極および電圧
測定用電極の両方の表面に接するよう設けられているた
め、十分に大きいサイズを有するものであり、その結
果、測定対象個所のサイズが小さくても、当該接触部材
の形成が容易であり、従って、当該電気抵抗測定装置を
容易に製造することができる。そして、接触部材は、厚
み方向における電気抵抗が厚み方向と垂直な方向におけ
る電気抵抗に比して極めて小さいものであるため、接触
部材が電流供給用電極および電圧測定用電極の両方の表
面に接していても、当該接触部材を介して電流供給用電
極と電圧測定用電極との間に流れる電流は極めて小さ
く、その結果、電気抵抗の測定を誤差が小さくて高い精
度で行うことができる。According to the electric resistance measuring apparatus of the present invention, since the contact member to be pressed against the measurement point is made of an anisotropic conductive elastomer, even if the contact member is pressed against the measurement point. The measurement target portion is not damaged. Further, since the contact member is provided so as to be in contact with both surfaces of the current supply electrode and the voltage measurement electrode, the contact member has a sufficiently large size, and as a result, even if the size of the measurement target portion is small. Therefore, the formation of the contact member is easy, and therefore, the electric resistance measuring device can be easily manufactured. Since the contact member has an extremely small electric resistance in the thickness direction as compared with the electric resistance in the direction perpendicular to the thickness direction, the contact member comes into contact with both surfaces of the current supply electrode and the voltage measurement electrode. Even so, the current flowing between the current supply electrode and the voltage measurement electrode via the contact member is extremely small, and as a result, the electrical resistance can be measured with a small error and high accuracy.
【図１】本発明に係る電気抵抗測定装置の一例における
構成の概略を示す説明図である。FIG. 1 is an explanatory diagram showing a schematic configuration of an example of an electric resistance measuring device according to the present invention.
【図２】被検査回路基板の上面における測定対象電極の
配置状態を示す説明図である。FIG. 2 is an explanatory diagram showing an arrangement state of electrodes to be measured on an upper surface of a circuit board to be inspected.
【図３】被検査回路基板の下面における測定対象電極の
配置状態を示す説明図である。FIG. 3 is an explanatory view showing an arrangement state of electrodes to be measured on a lower surface of a circuit board to be inspected.
【図４】上部側アダプターおよび下部側アダプターの一
部を拡大して示す説明図である。FIG. 4 is an explanatory diagram showing an enlarged part of an upper adapter and a lower adapter.
【図５】検査用回路基板上に貫通孔を有する保持部材が
形成された状態を示す説明図である。FIG. 5 is an explanatory view showing a state in which a holding member having a through hole is formed on the inspection circuit board.
【図６】保持部材の貫通孔内に接触部材用材料層が形成
された状態を示す説明図である。FIG. 6 is an explanatory view showing a state in which a material layer for a contact member is formed in a through hole of a holding member.
【図７】本発明に係る電気抵抗測定装置の他の例におけ
る上部側アダプターおよび下部側アダプターの一部を拡
大して示す説明図である。FIG. 7 is an enlarged explanatory view showing a part of an upper adapter and a lower adapter in another example of the electric resistance measuring device according to the present invention.
【図８】本発明に係る電気抵抗測定装置の更に他の例に
おける上部側アダプターおよび下部側アダプターの一部
を拡大して示す説明図である。FIG. 8 is an enlarged explanatory view showing a part of an upper adapter and a lower adapter in still another example of the electric resistance measuring device according to the present invention.
【図９】図８に示す電気抵抗測定装置における上部側ア
ダプターの電流供給用電極の形状を示す説明図である。FIG. 9 is an explanatory view showing a shape of a current supply electrode of an upper adapter in the electric resistance measuring device shown in FIG.
【図１０】本発明に係る電気抵抗測定装置の更に他の例
における上部側アダプターの一部を拡大して示す説明図
である。FIG. 10 is an explanatory view showing an enlarged part of an upper-side adapter in still another example of the electric resistance measuring device according to the present invention.
【図１１】電流供給用プローブおよび電圧測定用プロー
ブにより、回路基板における電極間の電気抵抗を測定す
る装置の模式図である。FIG. 11 is a schematic diagram of an apparatus for measuring an electric resistance between electrodes on a circuit board using a current supply probe and a voltage measurement probe.
１ 被検査回路基板 ２ ペリフェラール電極 ３ フォトビア電極 ４ グリッド電極 １０ 上部側アダプター １１ 検査用回路基板 １２ 電流供給用電極 １３ 電圧測定用電極 １４ 配線回路 １５ コネクター １６ 接触部材 １６Ａ 接触部材用材料層 １７ 保持部材 １８ 貫通孔 ２０ 押圧板 ２１ 弾性緩衝板 ３０ 下部側アダプター ３１ 検査用回路基板 ３２ 電流供給用電極 ３３ 電圧測定用電極 ３４ 配線回路 ３５ コネクター ３６ 接触部材 ３７ 保持部材 ４０ 押圧板 ５０ テスター ９０ 被検査回路基板 ９１，９２ 測定対象電極 ９３ 電源装置 ９４ 電気信号処理装置 ＰＡ ＰＤ 電流供給用プローブ ＰＢ ＰＣ 電圧測定用プローブ DESCRIPTION OF SYMBOLS 1 Inspection circuit board 2 Peripheral electrode 3 Photo via electrode 4 Grid electrode 10 Upper side adapter 11 Inspection circuit board 12 Current supply electrode 13 Voltage measurement electrode 14 Wiring circuit 15 Connector 16 Contact member 16A Contact member material layer 17 Holding member Reference Signs List 18 through hole 20 pressing plate 21 elastic buffer plate 30 lower adapter 31 test circuit board 32 current supply electrode 33 voltage measurement electrode 34 wiring circuit 35 connector 36 contact member 37 holding member 40 pressing plate 50 tester 90 circuit board to be tested 91, 92 Electrodes to be measured 93 Power supply device 94 Electric signal processing device PA PD Current supply probe PB PC Voltage measurement probe
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2G011 AA16 AB08 AC14 AE01 AF01 2G014 AA14 AB59 AC09 2G028 AA01 AA04 BC01 CG02 DH03 FK01 HN11 HN13 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G011 AA16 AB08 AC14 AE01 AF01 2G014 AA14 AB59 AC09 2G028 AA01 AA04 BC01 CG02 DH03 FK01 HN11 HN13
Claims (1)
る、互いに離間して配置された電流供給用電極および電
圧測定用電極と、 前記電流供給用電極および前記電圧測定用電極の両方の
表面に接するよう設けられた共通の接触部材とを有して
なり、 前記接触部材は、弾性高分子物質中に導電性粒子が充填
されてなる異方導電性エラストマーにより構成され、 当該接触部材が測定対象個所に圧接された状態で電気抵
抗の測定が実行されることを特徴とする電気抵抗測定装
置。1. A current supply electrode and a voltage measurement electrode, which are electrically connected to the same measurement target location and are spaced apart from each other, and both the current supply electrode and the voltage measurement electrode A common contact member provided so as to be in contact with the surface, the contact member is made of an anisotropic conductive elastomer obtained by filling conductive particles in an elastic polymer material, and the contact member is An electric resistance measuring device, wherein electric resistance is measured while being pressed against a measurement target portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10247291A JP2000074965A (en) | 1998-09-01 | 1998-09-01 | Electric resistance measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10247291A JP2000074965A (en) | 1998-09-01 | 1998-09-01 | Electric resistance measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000074965A true JP2000074965A (en) | 2000-03-14 |
Family
ID=17161260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10247291A Pending JP2000074965A (en) | 1998-09-01 | 1998-09-01 | Electric resistance measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000074965A (en) |
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| WO2002037616A1 (en) * | 2000-11-01 | 2002-05-10 | Jsr Corporation | Electric resistance measuring connector and measuring device and measuring method for circuit board electric resistance |
| WO2004077904A1 (en) * | 2003-01-17 | 2004-09-10 | Jsr Corporation | Circuit board checker and circuit board checking method |
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| WO2007007869A1 (en) | 2005-07-14 | 2007-01-18 | Jsr Corporation | Connector for measuring electrical resistance, and apparatus and method for measuring electrical resistance of circuit board |
| CN100356183C (en) * | 2002-07-23 | 2007-12-19 | 井上商事株式会社 | Checking tool for printed circuit-board |
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-
1998
- 1998-09-01 JP JP10247291A patent/JP2000074965A/en active Pending
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|---|---|---|---|---|
| WO2002037616A1 (en) * | 2000-11-01 | 2002-05-10 | Jsr Corporation | Electric resistance measuring connector and measuring device and measuring method for circuit board electric resistance |
| JP2002139529A (en) * | 2000-11-01 | 2002-05-17 | Jsr Corp | Electric resistance measuring connector, and electric resistance measuring device and measuring method for circuit board |
| JP4734706B2 (en) * | 2000-11-01 | 2011-07-27 | Ｊｓｒ株式会社 | Electrical resistance measuring connector, circuit board electrical resistance measuring device and measuring method |
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| CN100356183C (en) * | 2002-07-23 | 2007-12-19 | 井上商事株式会社 | Checking tool for printed circuit-board |
| KR100721478B1 (en) * | 2003-01-17 | 2007-05-23 | 제이에스알 가부시끼가이샤 | Circuit board checker and circuit board checking method |
| US7279914B2 (en) | 2003-01-17 | 2007-10-09 | Jsr Corporation | Circuit board checker and circuit board checking method |
| US7541823B2 (en) | 2003-01-17 | 2009-06-02 | Jsr Corporation | Circuit board checker and circuit board checking method |
| WO2004077904A1 (en) * | 2003-01-17 | 2004-09-10 | Jsr Corporation | Circuit board checker and circuit board checking method |
| WO2005083453A1 (en) * | 2004-03-02 | 2005-09-09 | Jsr Corporation | Circuit substrate inspection device and circuit substrate inspection method |
| WO2006001303A1 (en) * | 2004-06-23 | 2006-01-05 | Jsr Corporation | Inspection device for circuit board and inspection method for circuit board |
| WO2007007869A1 (en) | 2005-07-14 | 2007-01-18 | Jsr Corporation | Connector for measuring electrical resistance, and apparatus and method for measuring electrical resistance of circuit board |
| JP2015225039A (en) * | 2014-05-29 | 2015-12-14 | 日本電産リード株式会社 | Substrate inspection device and inspection jig |
| JP2015225040A (en) * | 2014-05-29 | 2015-12-14 | 日本電産リード株式会社 | Substrate inspection device and inspection jig |
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