JP2000035525A - Optical axis adjusting method of optical fiber - Google Patents
Optical axis adjusting method of optical fiberInfo
- Publication number
- JP2000035525A JP2000035525A JP10203245A JP20324598A JP2000035525A JP 2000035525 A JP2000035525 A JP 2000035525A JP 10203245 A JP10203245 A JP 10203245A JP 20324598 A JP20324598 A JP 20324598A JP 2000035525 A JP2000035525 A JP 2000035525A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- optical axis
- adjusting
- optical
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Couplings Of Light Guides (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、Nd:YAGレー
ザ加工機などに使用する光ファイバ光学系の光軸を調整
する方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for adjusting an optical axis of an optical fiber optical system used for an Nd: YAG laser beam machine or the like.
【0002】[0002]
【従来の技術】従来、光ファイバを用いた光学系の光軸
を調整する方法として、光ファイバにレーザ光を照射
し、光ファイバから出射されたレーザ光をパワーメータ
で受光し、その受光量をモニタしながら受光量が最大に
なるように光ファイバの光軸を調整する方法が知られて
いる。2. Description of the Related Art Conventionally, as a method of adjusting the optical axis of an optical system using an optical fiber, a laser beam is irradiated on the optical fiber, the laser beam emitted from the optical fiber is received by a power meter, and the amount of received light is measured. There is known a method of adjusting the optical axis of an optical fiber so that the amount of received light is maximized while monitoring the light intensity.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、従来の
光ファイバ光軸調整方法では、光ファイバを透過後のレ
ーザ光を全てパワーメータに受光させるものであるた
め、出射光の拡がり角が変ってもパワーメータの受光面
内にレーザ光があたっていれば、パワーメータが受光す
るレーザ光の受光量は変化しないために、出射光の拡が
り角の変化分について正確な調整ができないという問題
があった。However, in the conventional optical fiber optical axis adjustment method, since all the laser light transmitted through the optical fiber is received by the power meter, even if the spread angle of the emitted light changes. If the laser beam is incident on the light receiving surface of the power meter, the amount of the laser beam received by the power meter does not change, so that there is a problem that it is not possible to accurately adjust the change in the spread angle of the emitted light. .
【0004】本発明の目的は、光ファイバからの出射光
の拡がり角の変化分を含めて光ファイバの光軸調整を正
確に行う方法を提供することにある。An object of the present invention is to provide a method for accurately adjusting the optical axis of an optical fiber including a change in the spread angle of light emitted from the optical fiber.
【0005】[0005]
【課題を解決するための手段】上記目的を達成するた
め、本発明による光ファイバの光軸調整方法において
は、遮へい処理と調整処理とを有する光ファイバの光軸
調整方法であって、遮へい処理は、光ファイバのレーザ
光出射端より出射されたレーザ光の照射領域のうち、周
辺領域をマスクしてレーザ光透過を遮ぎる処理であり、
調整処理は、レーザ光の照射領域のうち、レーザ光が透
過する中心領域の透過光量が最大になるように光ファイ
バの入射光軸を調整する処理である。In order to achieve the above-mentioned object, a method for adjusting the optical axis of an optical fiber according to the present invention is a method for adjusting the optical axis of an optical fiber, comprising a shielding process and an adjusting process. Is a process of masking the peripheral area of the irradiation area of the laser light emitted from the laser light emission end of the optical fiber and blocking the transmission of the laser light,
The adjustment process is a process of adjusting the incident optical axis of the optical fiber so that the transmitted light amount in the central region through which the laser light is transmitted among the laser light irradiation regions is maximized.
【0006】また、調整処理は、光ファイバのレーザ出
射端より出射されたレーザ光の拡がり角の変化を調整す
る処理である。[0006] The adjustment process is a process for adjusting the change in the spread angle of the laser light emitted from the laser emission end of the optical fiber.
【0007】また、調整処理は、光ファイバを透過後の
レーザ光の拡がり角を小さくする方向に光ファイバの入
射光軸をずらせてゆく処理である。[0007] The adjustment process is a process of shifting the incident optical axis of the optical fiber in a direction to reduce the divergence angle of the laser beam after passing through the optical fiber.
【0008】また、光ファイバ光軸調整治具と、パワー
メータとを用いて光ファイバの光軸調整処理を行なう方
法であって、光ファイバ光軸調整治具は、光ファイバの
レーザ光出射端より出射したレーザ光の照射領域のうち
周辺領域を遮ぎり、中心領域に開口された光透過孔を通
してレーザ光を透過させるものであり、パワーメータ
は、光ファイバ光軸調整治具の光透過孔を透過したレー
ザ光量を測定するものであり、光ファイバ光軸調整処理
は、パワーメータで測定されるレーザ光量の測定値が最
も高い値になるように光ファイバ光軸を調整する処理で
ある。A method for adjusting the optical axis of an optical fiber using an optical fiber optical axis adjusting jig and a power meter, wherein the optical fiber optical axis adjusting jig comprises a laser light emitting end of the optical fiber. The laser beam is transmitted through a light transmission hole opened in the central region, blocking the peripheral region of the irradiation region of the laser light emitted from the laser beam. The power meter is provided with a light transmission hole of the optical fiber optical axis adjusting jig. The optical fiber optical axis adjustment process is a process of adjusting the optical fiber optical axis so that the measured value of the laser light amount measured by the power meter becomes the highest value.
【0009】また、光ファイバ光軸調整治具の光透過孔
の口径を光ファイバの種類によって変えるものである。Further, the diameter of the light transmission hole of the optical fiber optical axis adjusting jig is changed depending on the type of the optical fiber.
【0010】図1において、光ファイバにレーザ光が照
射され、光ファイバを透過したレーザ光の出射側の拡が
り角は、光ファイバへのレーザ光の入射角度や入射光軸
のずれ量によって変化する。光ファイバへのレーザ光の
入射角度が一定であれば、光ファイバの入射光軸のずれ
量が少ないほど出射側のレーザ光の拡がり角が小さくな
り、その最小値は光ファイバへの入射角度に一致する。In FIG. 1, an optical fiber is irradiated with laser light, and the divergence angle on the emission side of the laser light transmitted through the optical fiber changes depending on the angle of incidence of the laser light on the optical fiber and the amount of deviation of the incident optical axis. . If the angle of incidence of the laser beam on the optical fiber is constant, the smaller the deviation of the incident optical axis of the optical fiber, the smaller the divergence angle of the laser beam on the emission side, and the minimum value is the angle of incidence on the optical fiber. Matches.
【0011】レーザ光の出射側に、遮へい処理として光
透過孔を有する光ファイバ光軸調整治具を設置する。光
透過孔は、光ファイバ光軸調整治具の中心領域に照射さ
れたレーザ光のみを透過させるものであり、周辺領域に
照射されたレーザ光は光ファイバ光軸調整治具のマスク
面に遮ぎられる。光ファイバ光軸調整治具に照射された
レーザ光は、その拡がりが小さいほど、光透過孔を通過
するレーザ光量が多くなる。An optical fiber optical axis adjusting jig having a light transmitting hole is installed as a shielding process on the laser light emitting side. The light transmission holes allow only the laser light irradiated to the central area of the optical fiber optical axis adjusting jig to pass therethrough, and the laser light emitted to the peripheral area is blocked by the mask surface of the optical fiber optical axis adjusting jig. Can be cut off. The smaller the spread of the laser light applied to the optical fiber optical axis adjusting jig, the larger the amount of laser light passing through the light transmitting hole.
【0012】次に調整処理として、光透過孔内を通過し
たレーザ光をパワーメータで受光し、その光量を測定し
ながら、光ファイバ入射光軸をずらせてゆき、受光量が
最も高い価になるように入射光軸を調整する。受光量が
最も高い測定値になったところが、光ファイバ光軸が最
も良く合った位置である。このように光ファイバを透過
した後のレーザ光の拡がり角の変化がパワーメータによ
って測定されるため、光ファイバの光軸の調整を正確に
行うことができる。Next, as an adjustment process, the laser beam that has passed through the light transmitting hole is received by a power meter, and while measuring the amount of light, the optical axis of the optical fiber is shifted, and the amount of received light has the highest value. Adjust the incident optical axis as described above. The position where the amount of received light reaches the highest measured value is the position where the optical axis of the optical fiber best matches. Since the change in the divergence angle of the laser light after passing through the optical fiber is measured by the power meter, the optical axis of the optical fiber can be accurately adjusted.
【0013】[0013]
【発明の実施の形態】以下に本発明による光ファイバ光
軸調整方法の実施の形態を図によって説明する。図1に
おいて、光ファイバのレーザ光出射端2に向き合わせて
光ファイバ光軸調整治具3を設置する。光ファイバ光軸
調整治具3の周縁は、光ファイバ1から出射されたレー
ザ光のマスク4であり、中心には、レーザ光bを透過さ
せる光透過孔5を有している。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an optical fiber optical axis adjusting method according to the present invention will be described below with reference to the drawings. In FIG. 1, an optical fiber optical axis adjusting jig 3 is installed so as to face the laser light emitting end 2 of the optical fiber. The periphery of the optical fiber optical axis adjusting jig 3 is a mask 4 for the laser light emitted from the optical fiber 1, and has a light transmission hole 5 for transmitting the laser light b at the center.
【0014】したがって、光ファイバ光軸調整治具3に
照射されたレーザ光bの照射領域のうち周辺領域に照射
された光は、マスク4に遮ぎられ、中心領域に照射され
た光のみが治具3を透過し、治具3を透過したレーザ光
の光量はパワーメータ6で測定される。Therefore, of the irradiation area of the laser beam b applied to the optical fiber optical axis adjusting jig 3, the light applied to the peripheral area is blocked by the mask 4, and only the light applied to the central area is applied. The amount of laser light transmitted through the jig 3 and transmitted through the jig 3 is measured by the power meter 6.
【0015】本発明においては、光ファイバ光軸調整治
具3を用いて光ファイバ1から出射されたレーザ光bの
照射領域のうちの周辺領域をマスクする処理が遮へい処
理であり、光透過孔5を透過したレーザ光の光量をパワ
ーメータ6で測定し、その透過光が最大になるように調
整する処理が調整処理である。In the present invention, the process of masking the peripheral region of the irradiation region of the laser beam b emitted from the optical fiber 1 using the optical fiber optical axis adjusting jig 3 is a shielding process, The adjustment process is a process of measuring the amount of laser light transmitted through the light source 5 with the power meter 6 and adjusting the transmitted light to a maximum.
【0016】光ファイバ1に対するレーザ光bの入射角
度は、光ファイバの種類によって変える必要があるが、
入射角度の違いによって、調整の目標とする光ファイバ
透過後のレーザ光bの拡がり角が変化する。このために
は、光透過孔5の孔の内径を目標とするレーザ光bの拡
がり角にあわせて変えられるようにしておけば、様々な
種類のレーザ発振器や光ファイバに対応することができ
る。The incident angle of the laser beam b on the optical fiber 1 needs to be changed depending on the type of the optical fiber.
The divergence angle of the laser beam b after passing through the optical fiber, which is the target of adjustment, changes depending on the difference in the incident angle. To this end, various types of laser oscillators and optical fibers can be used by changing the inner diameter of the light transmitting hole 5 according to the target spread angle of the laser beam b.
【0017】図2(a)において、レーザ光bに対する
光ファイバ1の入射光軸の光軸のずれが少なくなる方向
に、光ファイバ入射光軸をずらせると、図2(b)のよ
うに光ファイバ1を透過後のレーザ光の拡がり角が小さ
くなる。In FIG. 2A, when the optical axis of the optical fiber is shifted in a direction in which the deviation of the optical axis of the incident optical axis of the optical fiber 1 with respect to the laser beam b is reduced, as shown in FIG. 2B. The spread angle of the laser light after passing through the optical fiber 1 is reduced.
【0018】レーザ光bの拡がり角が小さくなると、レ
ーザ光bが光ファイバ光軸調整治具3の光透過孔5を透
過する割合いが多くなり、したがって、パワーメータ6
に検知されるレーザ光量が多くなり、その測定値が高く
なる。When the divergence angle of the laser beam b decreases, the ratio of the laser beam b transmitting through the light transmitting hole 5 of the optical fiber optical axis adjusting jig 3 increases.
, The amount of laser light detected increases, and the measured value increases.
【0019】パワーメータ6の測定値が最大値を示した
ところが光を入射する側の光ファイバ光軸が最も適正に
調整された位置である。このように、本発明において
は、光ファイバ透過後のレーザ光の拡がり角の変化をパ
ワーメータ6で測定し、パワーメータ6に得られた測定
値に基づき、光軸のずれを矯正して正確に光ファイバの
光軸調整を行うことができる。The position where the measured value of the power meter 6 shows the maximum value is the position where the optical axis of the optical fiber on the light incident side is most appropriately adjusted. As described above, in the present invention, the change in the divergence angle of the laser beam after passing through the optical fiber is measured by the power meter 6, and based on the measured value obtained by the power meter 6, the deviation of the optical axis is corrected to correct the deviation. The optical axis of the optical fiber can be adjusted.
【0020】[0020]
【発明の効果】以上のように本発明によるときには、遮
へい処理と、調整処理とを行い、光ファイバから出射さ
れるレーザ光の拡がり角が小さくなる方向に、光軸のず
れを矯正するため、光ファイバ光軸の調整を正確に行う
ことができる。As described above, according to the present invention, the shielding process and the adjusting process are performed to correct the deviation of the optical axis in the direction in which the spread angle of the laser light emitted from the optical fiber is reduced. The optical axis of the optical fiber can be accurately adjusted.
【0021】また、本発明によれば、光透過孔を有する
光ファイバ光軸調整治具とパワーメータとの組合せを用
い、光ファイバから出射される光の強度分布の変化を測
定しつつ光ファイバの光軸の調整を実現したものであ
り、さらに、光ファイバ光軸調整治具に設けた光透過孔
の孔径を調整可能とすることによって、光ファイバの種
類によって決定される光ファイバから出射された後のレ
ーザ光の拡がり角の違いに対応することができる。Further, according to the present invention, a change in the intensity distribution of light emitted from an optical fiber is measured using a combination of an optical fiber optical axis adjusting jig having a light transmitting hole and a power meter. The optical axis of the optical fiber is adjusted, and the diameter of the light transmitting hole provided in the optical fiber optical axis adjusting jig can be adjusted so that the light emitted from the optical fiber is determined by the type of the optical fiber. It is possible to cope with the difference in the spread angle of the laser beam after the laser beam has spread.
【図1】本発明による光ファイバの光軸調整方法の調整
要領を示す図である。FIG. 1 is a diagram showing an adjustment procedure of an optical axis adjustment method for an optical fiber according to the present invention.
【図2】(a)は、光ファイバ入射光軸の光軸のずれが
大きい場合、(b)は光軸のずれが小さくなった場合を
示す図である。2A is a diagram illustrating a case where the shift of the optical axis of the optical fiber incident optical axis is large, and FIG. 2B is a diagram illustrating a case where the shift of the optical axis is small.
1 光ファイバ 2 レーザ光出射端 3 光ファイバ光軸調整治具 4 マスク 5 光透過孔 6 パワーメータ b レーザ光 Reference Signs List 1 optical fiber 2 laser light emitting end 3 optical fiber optical axis adjusting jig 4 mask 5 light transmitting hole 6 power meter b laser light
Claims (5)
イバの光軸調整方法であって、 遮へい処理は、光ファイバのレーザ光出射端より出射さ
れたレーザ光の照射領域のうち、周辺領域をマスクして
レーザ光透過を遮ぎる処理であり、 調整処理は、レーザ光の照射領域のうち、レーザ光が透
過する中心領域の透過光量が最大になるように光ファイ
バの入射光軸を調整する処理であることを特徴とする光
ファイバの光軸調整方法。1. A method for adjusting an optical axis of an optical fiber, comprising a shielding process and an adjusting process, wherein the shielding process is performed by irradiating a peripheral area of an irradiation area of a laser beam emitted from a laser beam emitting end of the optical fiber. The masking is a process to block the transmission of the laser light. The adjustment process adjusts the incident optical axis of the optical fiber so that the amount of transmitted light in the central region where the laser light is transmitted out of the irradiation region of the laser light is maximized. A method for adjusting the optical axis of an optical fiber, characterized by being processing.
より出射されたレーザ光の拡がり角の変化を調整する処
理であることを特徴とする請求項1に記載の光ファイバ
の光軸調整方法。2. The optical axis adjusting method according to claim 1, wherein the adjusting process is a process of adjusting a change in a divergence angle of a laser beam emitted from a laser emitting end of the optical fiber. .
ザ光の拡がり角を小さくする方向に光ファイバの入射光
軸をずらせてゆく処理であることを特徴とする請求項2
に記載の光ファイバの光軸調整方法。3. The adjusting process according to claim 2, wherein the incident optical axis of the optical fiber is shifted in a direction in which the divergence angle of the laser light transmitted through the optical fiber is reduced.
3. The method for adjusting an optical axis of an optical fiber according to claim 1.
タとを用いて光ファイバの光軸調整処理を行なう方法で
あって、 光ファイバ光軸調整治具は、光ファイバのレーザ光出射
端より出射したレーザ光の照射領域のうち周辺領域を遮
ぎり、中心領域に開口された光透過孔を通してレーザ光
を透過させるものであり、 パワーメータは、光ファイバ光軸調整治具の光透過孔を
透過したレーザ光量を測定するものであり、 光ファイバ光軸調整処理は、パワーメータで測定される
レーザ光量の測定値が最も高い値になるように光ファイ
バ光軸を調整する処理であることを特徴とする光ファイ
バ光軸調整方法。4. A method for performing optical axis adjustment processing of an optical fiber using an optical fiber optical axis adjusting jig and a power meter, wherein the optical fiber optical axis adjusting jig is a laser beam emitting end of the optical fiber. The peripheral area of the irradiation area of the laser light emitted from the laser beam is blocked, and the laser light is transmitted through the light transmission hole opened in the center area. The power meter is a light transmission hole of the optical fiber optical axis adjustment jig. The optical fiber optical axis adjustment processing is to adjust the optical fiber optical axis so that the measured value of the laser light quantity measured by the power meter becomes the highest value. A method for adjusting the optical axis of an optical fiber, comprising:
径を光ファイバの種類によって変えることを特徴とする
請求項4に記載の光ファイバの光軸調整方法。5. The method for adjusting the optical axis of an optical fiber according to claim 4, wherein the diameter of the light transmitting hole of the optical fiber optical axis adjusting jig is changed according to the type of the optical fiber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10203245A JP2000035525A (en) | 1998-07-17 | 1998-07-17 | Optical axis adjusting method of optical fiber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10203245A JP2000035525A (en) | 1998-07-17 | 1998-07-17 | Optical axis adjusting method of optical fiber |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000035525A true JP2000035525A (en) | 2000-02-02 |
Family
ID=16470847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10203245A Pending JP2000035525A (en) | 1998-07-17 | 1998-07-17 | Optical axis adjusting method of optical fiber |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000035525A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7593104B2 (en) | 2005-10-24 | 2009-09-22 | Seiko Epson Corporation | Method for manufacturing optical module, positioning apparatus, evaluation method and evaluation apparatus for evaluating optical module |
JP2010134338A (en) * | 2008-12-08 | 2010-06-17 | Jtekt Corp | Optical axis adjustment method of laser beam and optical fiber, and optical axis adjustment device of laser beam and optical fiber |
CN102189340A (en) * | 2010-02-23 | 2011-09-21 | 株式会社迪思科 | Laser processing device |
CN107470782A (en) * | 2016-06-08 | 2017-12-15 | 株式会社迪思科 | The inspection method of laser beam |
WO2018173844A1 (en) * | 2017-03-24 | 2018-09-27 | 株式会社フジクラ | Spread angle measurement device, spread angle measurement method, laser device, and laser system |
KR20180134180A (en) * | 2017-06-08 | 2018-12-18 | 주식회사 이오테크닉스 | Laser processing system and calibration for the same |
-
1998
- 1998-07-17 JP JP10203245A patent/JP2000035525A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7593104B2 (en) | 2005-10-24 | 2009-09-22 | Seiko Epson Corporation | Method for manufacturing optical module, positioning apparatus, evaluation method and evaluation apparatus for evaluating optical module |
JP2010134338A (en) * | 2008-12-08 | 2010-06-17 | Jtekt Corp | Optical axis adjustment method of laser beam and optical fiber, and optical axis adjustment device of laser beam and optical fiber |
CN102189340A (en) * | 2010-02-23 | 2011-09-21 | 株式会社迪思科 | Laser processing device |
CN107470782A (en) * | 2016-06-08 | 2017-12-15 | 株式会社迪思科 | The inspection method of laser beam |
WO2018173844A1 (en) * | 2017-03-24 | 2018-09-27 | 株式会社フジクラ | Spread angle measurement device, spread angle measurement method, laser device, and laser system |
JP2018163014A (en) * | 2017-03-24 | 2018-10-18 | 株式会社フジクラ | Spread angle measurement device, spread angle measurement method, laser device, and laser system |
KR20180134180A (en) * | 2017-06-08 | 2018-12-18 | 주식회사 이오테크닉스 | Laser processing system and calibration for the same |
KR102052102B1 (en) | 2017-06-08 | 2019-12-05 | 주식회사 이오테크닉스 | Laser processing system and calibration for the same |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR20010076231A (en) | Laser machine | |
JP2000035525A (en) | Optical axis adjusting method of optical fiber | |
JPH01286478A (en) | Beam uniformizing optical system and manufacture thereof | |
JP2004295066A (en) | Method for manufacturing optical waveguide | |
AU725154B2 (en) | Method and apparatus for laser imaging with multi-mode devices and optical diffusers | |
JP2003124552A (en) | Laser beam branching device and laser machining method | |
JP2000218386A (en) | Laser emitting device in laser processing device | |
US4145722A (en) | Image pickup tube devices | |
JP3429659B2 (en) | Photoelectron generation method and apparatus | |
JPH11284270A (en) | Semiconductor laser unit | |
JPH05167159A (en) | Laser power attenuation equipment | |
KR20170092171A (en) | Laser processing apparatus | |
JP2005161327A (en) | Method and apparatus for correcting optical axis of laser machine | |
KR20000032075A (en) | Method for regulating image and structure of aperture plate in semiconductor exposure equipment | |
KR200144264Y1 (en) | Shadow Mask of Color Brown Tube | |
KR19990071358A (en) | Method and device for fastening elements of mask frame of water pipe | |
KR100983756B1 (en) | Aperture of exposure apparatus | |
KR950010123Y1 (en) | Flyeyes lens type aperture of stepper | |
KR100376867B1 (en) | Scanner and illumination upgrade meathead | |
JP2004341125A (en) | Method of processing optical waveguide component, method of manufacturing grating and optical waveguide component | |
JP2005169478A (en) | Laser beam machining method | |
JPS60170938A (en) | Method for correction of defective part of pattern on optical mask | |
JPS63144888A (en) | Laser emitting optical device | |
JPS61286083A (en) | Laser beam shaping equipment | |
JPH05341144A (en) | Laser device |