JP1741174S - Susceptor - Google Patents
SusceptorInfo
- Publication number
- JP1741174S JP1741174S JP2022022684F JP2022022684F JP1741174S JP 1741174 S JP1741174 S JP 1741174S JP 2022022684 F JP2022022684 F JP 2022022684F JP 2022022684 F JP2022022684 F JP 2022022684F JP 1741174 S JP1741174 S JP 1741174S
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- constitutes
- article
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Abstract
本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットの基台となるサセプタ部品の外周を構成する部品である。This article is a part that constitutes the outer periphery of a susceptor part that serves as a base of a susceptor unit used to hold a wafer in a semiconductor manufacturing apparatus or the like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022684F JP1741174S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022684F JP1741174S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1741174S true JP1741174S (en) | 2023-04-06 |
Family
ID=85777535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022022684F Active JP1741174S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1741174S (en) |
-
2022
- 2022-10-20 JP JP2022022684F patent/JP1741174S/en active Active
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