ITBO20030614A1 - PROCEDURE ON LARGE AREA FOR LOCAL OXIDATION OF - Google Patents
PROCEDURE ON LARGE AREA FOR LOCAL OXIDATION OFInfo
- Publication number
- ITBO20030614A1 ITBO20030614A1 ITBO20030614A ITBO20030614A1 IT BO20030614 A1 ITBO20030614 A1 IT BO20030614A1 IT BO20030614 A ITBO20030614 A IT BO20030614A IT BO20030614 A1 ITBO20030614 A1 IT BO20030614A1
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- large area
- local oxidation
- oxidation
- local
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
- B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITBO20030614 ITBO20030614A1 (en) | 2003-10-20 | 2003-10-20 | PROCEDURE ON LARGE AREA FOR LOCAL OXIDATION OF |
| PCT/EP2004/011817 WO2005040037A1 (en) | 2003-10-20 | 2004-10-19 | Large area fabrication method based on the local oxidation of silicon and/or different materials on micro- and nano-scale |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITBO20030614 ITBO20030614A1 (en) | 2003-10-20 | 2003-10-20 | PROCEDURE ON LARGE AREA FOR LOCAL OXIDATION OF |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ITBO20030614A1 true ITBO20030614A1 (en) | 2005-04-21 |
Family
ID=34509415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ITBO20030614 ITBO20030614A1 (en) | 2003-10-20 | 2003-10-20 | PROCEDURE ON LARGE AREA FOR LOCAL OXIDATION OF |
Country Status (2)
| Country | Link |
|---|---|
| IT (1) | ITBO20030614A1 (en) |
| WO (1) | WO2005040037A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100243472A1 (en) * | 2009-03-27 | 2010-09-30 | Eui-Hyeok Yang | High-throughput local oxidation nanolithographic process |
| CN102328903B (en) * | 2011-09-29 | 2014-04-23 | 西安交通大学 | Large-area nano-seam electrode parallel manufacturing method |
| RU2624983C1 (en) * | 2016-04-27 | 2017-07-11 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") | Method of obtaining nanolithographic figures with fractal structure with a superstructured surface |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5900160A (en) * | 1993-10-04 | 1999-05-04 | President And Fellows Of Harvard College | Methods of etching articles via microcontact printing |
| WO2002003142A2 (en) * | 2000-06-30 | 2002-01-10 | President And Fellows Of Harvard College | Electric microcontact printing method and apparatus |
-
2003
- 2003-10-20 IT ITBO20030614 patent/ITBO20030614A1/en unknown
-
2004
- 2004-10-19 WO PCT/EP2004/011817 patent/WO2005040037A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2005040037A1 (en) | 2005-05-06 |
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