IT8049624A0 - IMPROVEMENT IN LAPPING MACHINES SUITABLE IN PARTICULAR FOR THE PROCESSING OF SEMICONDUCTOR SLAB AND SIMILAR - Google Patents

IMPROVEMENT IN LAPPING MACHINES SUITABLE IN PARTICULAR FOR THE PROCESSING OF SEMICONDUCTOR SLAB AND SIMILAR

Info

Publication number
IT8049624A0
IT8049624A0 IT8049624A IT4962480A IT8049624A0 IT 8049624 A0 IT8049624 A0 IT 8049624A0 IT 8049624 A IT8049624 A IT 8049624A IT 4962480 A IT4962480 A IT 4962480A IT 8049624 A0 IT8049624 A0 IT 8049624A0
Authority
IT
Italy
Prior art keywords
improvement
similar
processing
machines suitable
lapping machines
Prior art date
Application number
IT8049624A
Other languages
Italian (it)
Other versions
IT1129028B (en
Inventor
Joseph V Cesna
Original Assignee
Speedfam Corp Societa Dellosta
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Corp Societa Dellosta filed Critical Speedfam Corp Societa Dellosta
Publication of IT8049624A0 publication Critical patent/IT8049624A0/en
Application granted granted Critical
Publication of IT1129028B publication Critical patent/IT1129028B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
IT49624/80A 1979-09-18 1980-09-05 IMPROVEMENT IN LAPPING MACHINES SUITABLE IN PARTICULAR FOR THE PROCESSING OF SEMICONDUCTOR SLABS AND SIMILAR IT1129028B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7667079A 1979-09-18 1979-09-18

Publications (2)

Publication Number Publication Date
IT8049624A0 true IT8049624A0 (en) 1980-09-05
IT1129028B IT1129028B (en) 1986-06-04

Family

ID=22133499

Family Applications (1)

Application Number Title Priority Date Filing Date
IT49624/80A IT1129028B (en) 1979-09-18 1980-09-05 IMPROVEMENT IN LAPPING MACHINES SUITABLE IN PARTICULAR FOR THE PROCESSING OF SEMICONDUCTOR SLABS AND SIMILAR

Country Status (5)

Country Link
JP (1) JPS6059113B2 (en)
DE (1) DE3033944C2 (en)
FR (1) FR2465563A1 (en)
GB (1) GB2058620B (en)
IT (1) IT1129028B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840356U (en) * 1981-09-10 1983-03-16 株式会社三興技研 Protective equipment for abrasive workpieces
JPS6074018U (en) * 1983-10-26 1985-05-24 新神戸電機株式会社 Storage battery liquid loss/temperature detection sensor
US4534536A (en) * 1984-06-08 1985-08-13 Buehler Ltd. Apparatus for mounting samples for polishing
JPS61192474A (en) * 1985-02-19 1986-08-27 Sanyo Electric Co Ltd Chip polishing jig
JPH0755497B2 (en) * 1985-06-07 1995-06-14 株式会社平林 Cutting method for hard and brittle materials
JPS6392439A (en) * 1986-10-07 1988-04-22 Toyoda Gosei Co Ltd Apparatus for controlling pitch of reinforcing threads
JPS6372517U (en) * 1986-10-29 1988-05-14
US5267418A (en) * 1992-05-27 1993-12-07 International Business Machines Corporation Confined water fixture for holding wafers undergoing chemical-mechanical polishing
EP0684105A4 (en) * 1993-02-12 1995-11-30 Vladimir Stepanovi Kondratenko Process for machining components made of brittle materials and a device for carrying out the same.
JP3042293B2 (en) * 1994-02-18 2000-05-15 信越半導体株式会社 Wafer polishing equipment
US5695392A (en) * 1995-08-09 1997-12-09 Speedfam Corporation Polishing device with improved handling of fluid polishing media

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2112636A (en) * 1936-09-02 1938-03-29 Brush Dev Co Method of making piezoelectric units
US3449870A (en) * 1967-01-24 1969-06-17 Geoscience Instr Corp Method and apparatus for mounting thin elements

Also Published As

Publication number Publication date
IT1129028B (en) 1986-06-04
FR2465563B3 (en) 1982-05-21
DE3033944A1 (en) 1981-04-02
FR2465563A1 (en) 1981-03-27
GB2058620B (en) 1982-11-17
JPS6059113B2 (en) 1985-12-23
DE3033944C2 (en) 1985-07-11
JPS5645367A (en) 1981-04-25
GB2058620A (en) 1981-04-15

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