IT202200011279A1 - Trasduttore di pressione microlavorato piezoelettrico con elevata sensibilita' e relativo processo di fabbricazione - Google Patents

Trasduttore di pressione microlavorato piezoelettrico con elevata sensibilita' e relativo processo di fabbricazione Download PDF

Info

Publication number
IT202200011279A1
IT202200011279A1 IT102022000011279A IT202200011279A IT202200011279A1 IT 202200011279 A1 IT202200011279 A1 IT 202200011279A1 IT 102022000011279 A IT102022000011279 A IT 102022000011279A IT 202200011279 A IT202200011279 A IT 202200011279A IT 202200011279 A1 IT202200011279 A1 IT 202200011279A1
Authority
IT
Italy
Prior art keywords
manufacturing process
pressure transducer
high sensitivity
piezoelectric micro
related manufacturing
Prior art date
Application number
IT102022000011279A
Other languages
English (en)
Inventor
Domenico Giusti
Fabio Quaglia
Marco Ferrera
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102022000011279A priority Critical patent/IT202200011279A1/it
Priority to EP23172036.8A priority patent/EP4283272A1/en
Priority to US18/320,876 priority patent/US20230381816A1/en
Publication of IT202200011279A1 publication Critical patent/IT202200011279A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0045—Diaphragm associated with a buried cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/005—Non square semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
IT102022000011279A 2022-05-27 2022-05-27 Trasduttore di pressione microlavorato piezoelettrico con elevata sensibilita' e relativo processo di fabbricazione IT202200011279A1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT102022000011279A IT202200011279A1 (it) 2022-05-27 2022-05-27 Trasduttore di pressione microlavorato piezoelettrico con elevata sensibilita' e relativo processo di fabbricazione
EP23172036.8A EP4283272A1 (en) 2022-05-27 2023-05-08 Piezoelectric micromachined pressure transducer with high sensitivity and related manufacturing process
US18/320,876 US20230381816A1 (en) 2022-05-27 2023-05-19 Piezoelectric micromachined pressure transducer with high sensitivity and related manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102022000011279A IT202200011279A1 (it) 2022-05-27 2022-05-27 Trasduttore di pressione microlavorato piezoelettrico con elevata sensibilita' e relativo processo di fabbricazione

Publications (1)

Publication Number Publication Date
IT202200011279A1 true IT202200011279A1 (it) 2023-11-27

Family

ID=82694160

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102022000011279A IT202200011279A1 (it) 2022-05-27 2022-05-27 Trasduttore di pressione microlavorato piezoelettrico con elevata sensibilita' e relativo processo di fabbricazione

Country Status (3)

Country Link
US (1) US20230381816A1 (it)
EP (1) EP4283272A1 (it)
IT (1) IT202200011279A1 (it)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1577656A1 (en) 2004-03-19 2005-09-21 STMicroelectronics S.r.l. Method for manufacturing a semiconductor pressure sensor
US20130294201A1 (en) * 2012-05-01 2013-11-07 Arman HAJATI Ultra wide bandwidth transducer with dual electrode
WO2016106153A1 (en) * 2014-12-21 2016-06-30 Chirp Microsystems, Inc. Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication
US20170320093A1 (en) * 2016-05-03 2017-11-09 Globalfoundries Singapore Pte. Ltd. ELECTRODE ARRANGEMENT FOR A pMUT and pMUT TRANSDUCER ARRAY
WO2017218299A1 (en) * 2016-06-17 2017-12-21 Chirp Microsystems, Inc. Piezoelectric micromachined ultrasonic transducers having stress relief features
US20220119246A1 (en) * 2020-10-16 2022-04-21 Stmicroelectronics S.R.L. Piezoelectric micromachined ultrasonic transducer having reduced free oscillations

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1577656A1 (en) 2004-03-19 2005-09-21 STMicroelectronics S.r.l. Method for manufacturing a semiconductor pressure sensor
US20130294201A1 (en) * 2012-05-01 2013-11-07 Arman HAJATI Ultra wide bandwidth transducer with dual electrode
WO2016106153A1 (en) * 2014-12-21 2016-06-30 Chirp Microsystems, Inc. Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication
US20170320093A1 (en) * 2016-05-03 2017-11-09 Globalfoundries Singapore Pte. Ltd. ELECTRODE ARRANGEMENT FOR A pMUT and pMUT TRANSDUCER ARRAY
WO2017218299A1 (en) * 2016-06-17 2017-12-21 Chirp Microsystems, Inc. Piezoelectric micromachined ultrasonic transducers having stress relief features
US20220119246A1 (en) * 2020-10-16 2022-04-21 Stmicroelectronics S.R.L. Piezoelectric micromachined ultrasonic transducer having reduced free oscillations

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
WANG MINGJUN ET AL: "Enhancement of the Transmission of Piezoelectric Micromachined Ultrasonic Transducer With an Isolation Trench", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, US, vol. 25, no. 4, 1 August 2016 (2016-08-01), pages 691 - 700, XP011618147, ISSN: 1057-7157, [retrieved on 20160729], DOI: 10.1109/JMEMS.2016.2577038 *

Also Published As

Publication number Publication date
US20230381816A1 (en) 2023-11-30
EP4283272A1 (en) 2023-11-29

Similar Documents

Publication Publication Date Title
US9055372B2 (en) Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer
Dobrucki et al. Theory of piezoelectric axisymmetric bimorph
JP2009532691A5 (it)
IT202200011279A1 (it) Trasduttore di pressione microlavorato piezoelettrico con elevata sensibilita' e relativo processo di fabbricazione
KR20200083818A (ko) 공진기 및 그 제조방법과, 공진기를 포함하는 스트레인 센서 및 센서 어레이
Sammoura et al. Multiple electrode piezoelectric micromachined ultrasonic transducers
WO2016081915A1 (en) Pressure sensor using piezoelectric bending resonators
ITRM20030318A0 (it) Trasduttore ultracustico capacitivo microlavorato e relativo procedimento micromeccanico superficiale di fabbricazione.
Shi et al. Exact analysis of multi-layer piezoelectric/composite cantilevers
EP3601979B1 (en) Optical fibre pressure sensing apparatus employing longitudinal diaphragm
Prabhu et al. Design of piezo-resistive type acoustic vector sensor using graphene for underwater applications
EP1012554B1 (en) Pressure sensor
US6118733A (en) Interlink for spatially extended hydrophones
EA201692244A2 (ru) Ультразвуковой измерительный преобразователь и способ изготовления ультразвукового измерительного преобразователя
Wu et al. Low polarization voltage and high sensitivity CMOS condenser microphone using stress relaxation design
JP2021027538A (ja) 半導体チップ
Schalko et al. Improved load-deflection method for the extraction of elastomechanical properties of circularly shaped thin-film diaphragms
Benmoussa et al. Design and modeling of a three-axis piezoresistive microelectronic accelerometer
RU2778161C1 (ru) Способ увеличения пьезочувствительности биморфа изгибного типа
Liu et al. Ultrasensitive Acoustic Detection Using an Enlarged Fabry–Perot Cavity with a Graphene Diaphragm
RU2008109057A (ru) Ультразвуковой расходомер и преобразователь для него
RU202985U1 (ru) Зеркало с изменяемой кривизной
Tian et al. Micro-pressure sensor dynamic performance analysis
Yamashita et al. Buckling Control of Multilayered Diaphragm Structures for Highly Sensitive Piezoelectric Ultrasonic Microsensors
Yıldız Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response