IT201700075054A1 - Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage - Google Patents

Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage

Info

Publication number
IT201700075054A1
IT201700075054A1 IT102017000075054A IT201700075054A IT201700075054A1 IT 201700075054 A1 IT201700075054 A1 IT 201700075054A1 IT 102017000075054 A IT102017000075054 A IT 102017000075054A IT 201700075054 A IT201700075054 A IT 201700075054A IT 201700075054 A1 IT201700075054 A1 IT 201700075054A1
Authority
IT
Italy
Prior art keywords
vacuum pump
pumping stage
molecular pumping
molecular
stage
Prior art date
Application number
IT102017000075054A
Other languages
Italian (it)
Inventor
Gianluca Bianco
Christian Spada
Stefano Spagnolo
Original Assignee
Agilent Tech Inc A Delaware Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Tech Inc A Delaware Corporation filed Critical Agilent Tech Inc A Delaware Corporation
Priority to IT102017000075054A priority Critical patent/IT201700075054A1/en
Publication of IT201700075054A1 publication Critical patent/IT201700075054A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
IT102017000075054A 2017-07-04 2017-07-04 Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage IT201700075054A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT102017000075054A IT201700075054A1 (en) 2017-07-04 2017-07-04 Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000075054A IT201700075054A1 (en) 2017-07-04 2017-07-04 Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage

Publications (1)

Publication Number Publication Date
IT201700075054A1 true IT201700075054A1 (en) 2017-10-04

Family

ID=60294298

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000075054A IT201700075054A1 (en) 2017-07-04 2017-07-04 Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage

Country Status (1)

Country Link
IT (1) IT201700075054A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1975568A (en) * 1932-03-18 1934-10-02 Central Scientific Co Molecular vacuum pump
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5688106A (en) * 1995-11-10 1997-11-18 Varian Associates, Inc. Turbomolecular pump
US5695316A (en) * 1993-05-03 1997-12-09 Leybold Aktiengesellschaft Friction vacuum pump with pump sections of different designs
CN101852199B (en) * 2009-03-31 2011-11-09 储继国 Composite vacuum pump
US20120201696A1 (en) * 2009-10-19 2012-08-09 Edwards Limited Vacuum pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1975568A (en) * 1932-03-18 1934-10-02 Central Scientific Co Molecular vacuum pump
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5695316A (en) * 1993-05-03 1997-12-09 Leybold Aktiengesellschaft Friction vacuum pump with pump sections of different designs
US5688106A (en) * 1995-11-10 1997-11-18 Varian Associates, Inc. Turbomolecular pump
CN101852199B (en) * 2009-03-31 2011-11-09 储继国 Composite vacuum pump
US20120201696A1 (en) * 2009-10-19 2012-08-09 Edwards Limited Vacuum pump

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