IT201600131865A1 - Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione - Google Patents

Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione

Info

Publication number
IT201600131865A1
IT201600131865A1 IT102016000131865A IT201600131865A IT201600131865A1 IT 201600131865 A1 IT201600131865 A1 IT 201600131865A1 IT 102016000131865 A IT102016000131865 A IT 102016000131865A IT 201600131865 A IT201600131865 A IT 201600131865A IT 201600131865 A1 IT201600131865 A1 IT 201600131865A1
Authority
IT
Italy
Prior art keywords
burial
electro
micro
mechanical device
device equipped
Prior art date
Application number
IT102016000131865A
Other languages
English (en)
Inventor
Sonia Costantini
Marta Carminati
Daniela Angela Luisa Gatti
Laura Maria Castoldi
Roberto Carminati
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102016000131865A priority Critical patent/IT201600131865A1/it
Priority to EP17172107.9A priority patent/EP3343266B1/en
Priority to US15/603,614 priority patent/US10197794B2/en
Priority to CN201720760087.1U priority patent/CN207390996U/zh
Priority to CN201710500966.5A priority patent/CN108249387B/zh
Publication of IT201600131865A1 publication Critical patent/IT201600131865A1/it
Priority to US16/225,881 priority patent/US10649202B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0083—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/00714—Treatment for improving the physical properties not provided for in groups B81C1/0065 - B81C1/00706
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/001—Bonding of two components
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/032—Gluing

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
IT102016000131865A 2016-12-28 2016-12-28 Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione IT201600131865A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102016000131865A IT201600131865A1 (it) 2016-12-28 2016-12-28 Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione
EP17172107.9A EP3343266B1 (en) 2016-12-28 2017-05-20 Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof
US15/603,614 US10197794B2 (en) 2016-12-28 2017-05-24 Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof
CN201720760087.1U CN207390996U (zh) 2016-12-28 2017-06-27 微机电设备
CN201710500966.5A CN108249387B (zh) 2016-12-28 2017-06-27 具有可移动结构的微机电设备及其制造工艺
US16/225,881 US10649202B2 (en) 2016-12-28 2018-12-19 Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102016000131865A IT201600131865A1 (it) 2016-12-28 2016-12-28 Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione

Publications (1)

Publication Number Publication Date
IT201600131865A1 true IT201600131865A1 (it) 2018-06-28

Family

ID=58609913

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102016000131865A IT201600131865A1 (it) 2016-12-28 2016-12-28 Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione

Country Status (4)

Country Link
US (2) US10197794B2 (it)
EP (1) EP3343266B1 (it)
CN (2) CN207390996U (it)
IT (1) IT201600131865A1 (it)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201600131865A1 (it) * 2016-12-28 2018-06-28 St Microelectronics Srl Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione
US10499021B2 (en) * 2017-04-11 2019-12-03 Microsoft Technology Licensing, Llc Foveated MEMS scanning display
IT201700091226A1 (it) * 2017-08-07 2019-02-07 St Microelectronics Srl Dispositivo mems comprendente una membrana ed un attuatore per controllare la curvatura della membrana e compensare deformazioni indesiderate della membrana
EP3666727A1 (en) 2018-12-14 2020-06-17 STMicroelectronics S.r.l. Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
JP7386625B2 (ja) * 2019-06-17 2023-11-27 スタンレー電気株式会社 光偏向器の製造方法及び光偏向器
IT201900024469A1 (it) * 2019-12-18 2021-06-18 St Microelectronics Srl Dispositivo microelettromeccanico di specchio ad attuazione piezoelettrica, con struttura migliorata
WO2021134676A1 (zh) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 一种mems驱动器及成像防抖装置
CN115210626B (zh) * 2020-03-12 2024-04-16 三菱电机株式会社 光扫描装置、测距装置以及光扫描装置的制造方法
DE102020114347B3 (de) * 2020-05-28 2021-10-28 Infineon Technologies Ag MEMS-Vorrichtungen mit Federelement und Kammantrieb sowie zugehörige Herstellungsverfahren
US11693233B2 (en) * 2020-06-19 2023-07-04 Microsoft Technology Licensing, Llc Microelectromechanical system (MEMS) scanner having actuator pairs cantilevered adjacent to opposite sides of a scanning mirror
WO2024116520A1 (ja) * 2022-11-30 2024-06-06 パナソニックＩｐマネジメント株式会社 光学反射素子

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014056211A (ja) * 2012-09-14 2014-03-27 Seiko Epson Corp アクチュエーター、光スキャナー、画像表示装置およびヘッドマウントディスプレイ
US20140285871A1 (en) * 2013-03-22 2014-09-25 Abdul Jaleel K. Moidu Hidden hinge mems with temporary gimbal anchor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008012826B4 (de) * 2007-04-02 2012-11-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Erzeugung einer dreidimensionalen mikromechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement
US8456724B2 (en) * 2010-06-17 2013-06-04 Touch Micro-System Technology Corp. Biaxial scanning mirror for image forming apparatus
JP5949345B2 (ja) * 2012-09-04 2016-07-06 セイコーエプソン株式会社 アクチュエーター、光スキャナー、画像表示装置およびヘッドマウントディスプレイ
JP2014191008A (ja) * 2013-03-26 2014-10-06 Seiko Epson Corp アクチュエーター、光スキャナーおよび画像表示装置
IT201600131865A1 (it) * 2016-12-28 2018-06-28 St Microelectronics Srl Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014056211A (ja) * 2012-09-14 2014-03-27 Seiko Epson Corp アクチュエーター、光スキャナー、画像表示装置およびヘッドマウントディスプレイ
US20140285871A1 (en) * 2013-03-22 2014-09-25 Abdul Jaleel K. Moidu Hidden hinge mems with temporary gimbal anchor

Also Published As

Publication number Publication date
CN108249387A (zh) 2018-07-06
EP3343266A1 (en) 2018-07-04
CN207390996U (zh) 2018-05-22
EP3343266B1 (en) 2022-04-27
US10649202B2 (en) 2020-05-12
US20190121122A1 (en) 2019-04-25
US20180180871A1 (en) 2018-06-28
US10197794B2 (en) 2019-02-05
CN108249387B (zh) 2023-04-11

Similar Documents

Publication Publication Date Title
IT201600131865A1 (it) Dispositivo micro-elettro-meccanico dotato di una struttura mobile, in particolare microspecchio, e relativo procedimento di fabbricazione
DK3595397T3 (da) Listen-before-talk-procedure i en trådløs indretning og trådløs indretning
ITUA20163520A1 (it) "Dispositivo automatizzato con una struttura mobile, particolarmente un robot"
CL2015003728A1 (es) Oligómeros antisentido y conjugados con objetivo en pcsk9
EP3306360A4 (en) REFLECTIVE STRUCTURE, DEVICE, AND METHOD FOR MANUFACTURING REFLECTIVE STRUCTURE
DK2853289T3 (da) Anordning, der kan implanteres under huden
EP2960930A4 (en) Connecting structure, and semiconductor device
DK3043784T3 (da) Arylethere og anvendelser deraf
ES1205836Y (es) Dispositivo de accionamiento para una parte de mueble móvil
EP3004826A4 (en) Mems-based calorimeter, fabrication, and use thereof
BR112016019633A2 (pt) Plano monolítico com contatos elétricos e métodos de fabricação do mesmo
JP2013188229A5 (it)
FI20135248L (fi) Mobiililaite transaktioinformaation kera
CL2015003223A1 (es) Procedimiento para proporcionar una caracteristica de seguridad a un documento de seguridad, y el documento de seguridad
EP3128548A4 (en) Semiconductor device, layered semiconductor device, sealed-then-layered semiconductor device, and manufacturing methods therefor
IT201700121883A1 (it) "Dispositivo automatizzato con una struttura mobile, in particolare un robot"
DK3087761T3 (da) Høreapparat som kan indsættes i øregangen og høreapparatsystem
EP3300832A4 (en) Metrhod for manufacturing microneedle and device for manufacturing microneedle
DK2962100T3 (da) Tuberkulosebiomarkører og anvendelser deraf
ITUB20159380A1 (it) Dispositivo di rilevamento pressione dotato di una cavita' e relativi metodi
DK3029038T3 (da) Tetrazolinonforbindelse og anvendelse deraf
ITUA20164571A1 (it) Dispositivo optoelettronico multibanda per applicazioni colorimetriche e relativo metodo di fabbricazione
DK3078851T3 (da) Vindmølledrivindretning og vindmølledrivindretningsenhed.
EP3128549A4 (en) Semiconductor device, layered semiconductor device, sealed-then-layered semiconductor device, and manufacturing methods therefor
EP2988009A4 (en) Magnetic bearing device, and vacuum pump provided with said magnetic bearing device