IT1398433B1 - Apparato e procedimento per la lavorazione di un substrato - Google Patents

Apparato e procedimento per la lavorazione di un substrato

Info

Publication number
IT1398433B1
IT1398433B1 ITUD2009A000157A ITUD20090157A IT1398433B1 IT 1398433 B1 IT1398433 B1 IT 1398433B1 IT UD2009A000157 A ITUD2009A000157 A IT UD2009A000157A IT UD20090157 A ITUD20090157 A IT UD20090157A IT 1398433 B1 IT1398433 B1 IT 1398433B1
Authority
IT
Italy
Prior art keywords
procedure
substrate
processing
Prior art date
Application number
ITUD2009A000157A
Other languages
English (en)
Inventor
Gianfranco Pasqualin
Giorgio Cellere
Andrea Baccini
Marco Galiazzo
Tommaso Vercesi
Santi Luigi De
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to ITUD2009A000157A priority Critical patent/IT1398433B1/it
Priority to CN2010800395519A priority patent/CN102481776A/zh
Priority to PCT/EP2010/062850 priority patent/WO2011026885A1/en
Priority to US13/394,126 priority patent/US20120219725A1/en
Priority to EP10747868A priority patent/EP2473351A1/en
Priority to TW099129736A priority patent/TW201124325A/zh
Publication of ITUD20090157A1 publication Critical patent/ITUD20090157A1/it
Application granted granted Critical
Publication of IT1398433B1 publication Critical patent/IT1398433B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H01L21/67225—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one lithography chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/08—Machines
    • B41F15/0863—Machines with a plurality of flat screens mounted on a turntable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/14—Details
    • B41F15/16—Printing tables
    • B41F15/18—Supports for workpieces
    • B41F15/26—Supports for workpieces for articles with flat surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F33/00—Indicating, counting, warning, control or safety devices
    • B41F33/0081—Devices for scanning register marks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H01L21/6723—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one plating chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Screen Printers (AREA)
ITUD2009A000157A 2009-09-03 2009-09-03 Apparato e procedimento per la lavorazione di un substrato IT1398433B1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
ITUD2009A000157A IT1398433B1 (it) 2009-09-03 2009-09-03 Apparato e procedimento per la lavorazione di un substrato
CN2010800395519A CN102481776A (zh) 2009-09-03 2010-09-02 处理基板的设备及方法
PCT/EP2010/062850 WO2011026885A1 (en) 2009-09-03 2010-09-02 Substrate processing apparatus and method
US13/394,126 US20120219725A1 (en) 2009-09-03 2010-09-02 Substrate Processing Apparatus And Method
EP10747868A EP2473351A1 (en) 2009-09-03 2010-09-02 Substrate processing apparatus and method
TW099129736A TW201124325A (en) 2009-09-03 2010-09-02 Substrate processing apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUD2009A000157A IT1398433B1 (it) 2009-09-03 2009-09-03 Apparato e procedimento per la lavorazione di un substrato

Publications (2)

Publication Number Publication Date
ITUD20090157A1 ITUD20090157A1 (it) 2011-03-04
IT1398433B1 true IT1398433B1 (it) 2013-02-22

Family

ID=41694584

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUD2009A000157A IT1398433B1 (it) 2009-09-03 2009-09-03 Apparato e procedimento per la lavorazione di un substrato

Country Status (6)

Country Link
US (1) US20120219725A1 (it)
EP (1) EP2473351A1 (it)
CN (1) CN102481776A (it)
IT (1) IT1398433B1 (it)
TW (1) TW201124325A (it)
WO (1) WO2011026885A1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090308860A1 (en) * 2008-06-11 2009-12-17 Applied Materials, Inc. Short thermal profile oven useful for screen printing
WO2014106333A1 (zh) * 2013-01-05 2014-07-10 上海卓凯电子科技有限公司 电路板的去应力方法及电路板的去应力设备
CN103085447B (zh) * 2013-01-18 2015-01-21 景德镇陶瓷学院 高速旋转式印花机及其旋转式印花方法
DE102013205731A1 (de) * 2013-03-28 2014-10-02 JRT Photovoltaics GmbH & Co. KG Siebdruckanlage zum Bedrucken von flächigen Substraten, insbesondere Solarzellen und Verfahren zum Bedrucken von Substraten
DE102013103837A1 (de) 2013-04-16 2014-10-16 Teamtechnik Maschinen Und Anlagen Gmbh Aufbringen von Leitkleber auf Solarzellen
US9833802B2 (en) * 2014-06-27 2017-12-05 Pulse Finland Oy Methods and apparatus for conductive element deposition and formation
CN105882121B (zh) * 2016-06-30 2018-09-25 江苏美嘉包装有限公司 一种全自动丝印加工平台及其丝印工艺
CN107393850A (zh) * 2017-08-16 2017-11-24 君泰创新（北京）科技有限公司 太阳能电池浆料的干燥方法及***
PT3476600T (pt) * 2017-10-25 2021-07-12 Angelo Schiestl Dispositivo de impressão
JP7025992B2 (ja) * 2018-05-22 2022-02-25 日立Astemo株式会社 表面検査装置及び表面検査方法
CN108674010B (zh) * 2018-06-28 2024-06-28 无锡奥特维科技股份有限公司 丝网印刷设备、叠片机及丝网印刷方法
JP2020077804A (ja) * 2018-11-09 2020-05-21 Ｎｅｃプラットフォームズ株式会社 電子機器、基板保持部材、回路基板の出し入れ方法
JP7370233B2 (ja) 2019-11-29 2023-10-27 東京エレクトロン株式会社 基板搬送装置及び基板処理システム

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01229628A (ja) * 1988-03-11 1989-09-13 Sony Corp スクリーン印刷機
FR2689059B1 (fr) * 1992-03-26 1994-06-10 Dubuit Mach Machine a imprimer a tete d'impression interchangeable.
JP3157465B2 (ja) * 1996-08-02 2001-04-16 三洋電機株式会社 スクリーン印刷機及びその制御方法
JP2001062995A (ja) * 1999-08-30 2001-03-13 Minami Kk スクリーン印刷機
US7268503B2 (en) * 2002-04-04 2007-09-11 Matsushita Electric Industrial Co., Ltd. Vibration linear actuating device, method of driving the same device, and portable information apparatus using the same device
JP2004153061A (ja) * 2002-10-31 2004-05-27 Yokogawa Electric Corp 基板用印刷装置
DE102005032149A1 (de) * 2005-06-22 2006-12-28 Kba-Metronic Ag Druckmaschine
FR2899840B1 (fr) * 2006-04-12 2008-07-04 Mach Dubuit Soc Par Actions Si Machine d'impression par serigraphie
FR2936975B1 (fr) * 2008-10-13 2011-06-03 Dubuit Mach Machine d'impression par serigraphie et procede d'impression associe

Also Published As

Publication number Publication date
WO2011026885A1 (en) 2011-03-10
ITUD20090157A1 (it) 2011-03-04
EP2473351A1 (en) 2012-07-11
TW201124325A (en) 2011-07-16
CN102481776A (zh) 2012-05-30
US20120219725A1 (en) 2012-08-30

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