IT1393685B1 - Procedimento di deposizione di film su superfici da rivestire - Google Patents

Procedimento di deposizione di film su superfici da rivestire

Info

Publication number
IT1393685B1
IT1393685B1 ITMI2009A000531A ITMI20090531A IT1393685B1 IT 1393685 B1 IT1393685 B1 IT 1393685B1 IT MI2009A000531 A ITMI2009A000531 A IT MI2009A000531A IT MI20090531 A ITMI20090531 A IT MI20090531A IT 1393685 B1 IT1393685 B1 IT 1393685B1
Authority
IT
Italy
Prior art keywords
procedure
cover
depositing film
depositing
film
Prior art date
Application number
ITMI2009A000531A
Other languages
English (en)
Inventor
Michele Tosti
Fabrizio Pitacco
Original Assignee
Protec Surface Technologies S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Protec Surface Technologies S R L filed Critical Protec Surface Technologies S R L
Priority to ITMI2009A000531A priority Critical patent/IT1393685B1/it
Priority to EP10003407A priority patent/EP2236649A1/en
Publication of ITMI20090531A1 publication Critical patent/ITMI20090531A1/it
Application granted granted Critical
Publication of IT1393685B1 publication Critical patent/IT1393685B1/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Physical Vapour Deposition (AREA)
ITMI2009A000531A 2009-04-02 2009-04-02 Procedimento di deposizione di film su superfici da rivestire IT1393685B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITMI2009A000531A IT1393685B1 (it) 2009-04-02 2009-04-02 Procedimento di deposizione di film su superfici da rivestire
EP10003407A EP2236649A1 (en) 2009-04-02 2010-03-30 Deposition process of a nanocomposite film and apparatus therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI2009A000531A IT1393685B1 (it) 2009-04-02 2009-04-02 Procedimento di deposizione di film su superfici da rivestire

Publications (2)

Publication Number Publication Date
ITMI20090531A1 ITMI20090531A1 (it) 2010-10-03
IT1393685B1 true IT1393685B1 (it) 2012-05-08

Family

ID=41142293

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A000531A IT1393685B1 (it) 2009-04-02 2009-04-02 Procedimento di deposizione di film su superfici da rivestire

Country Status (2)

Country Link
EP (1) EP2236649A1 (it)
IT (1) IT1393685B1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL3878659T3 (pl) 2020-03-09 2024-04-22 Emea Inor Eood Powlekana płyta wklęsłodrukowa

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH691307A5 (de) * 1996-05-10 2001-06-29 Satis Vacuum Ind Vertriebs Ag Verfahren zum Aufdampfen von Vergütungsschichten auf optische Substrate.
WO2005056872A1 (en) * 2003-12-08 2005-06-23 Trex Enterprises Corp. Method of making chemical vapor composites
DE102004030523A1 (de) * 2004-06-18 2006-01-12 Siemens Ag Transportsystem für Nanopartikel und Verfahren zu dessen Betrieb

Also Published As

Publication number Publication date
EP2236649A1 (en) 2010-10-06
ITMI20090531A1 (it) 2010-10-03

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