IT1318481B1 - Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy - Google Patents
Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloyInfo
- Publication number
- IT1318481B1 IT1318481B1 IT2000MI000892A ITMI20000892A IT1318481B1 IT 1318481 B1 IT1318481 B1 IT 1318481B1 IT 2000MI000892 A IT2000MI000892 A IT 2000MI000892A IT MI20000892 A ITMI20000892 A IT MI20000892A IT 1318481 B1 IT1318481 B1 IT 1318481B1
- Authority
- IT
- Italy
- Prior art keywords
- compound
- organometallic
- purification
- useful
- comprises contacting
- Prior art date
Links
- 239000000956 alloy Substances 0.000 title abstract 2
- 229910045601 alloy Inorganic materials 0.000 title abstract 2
- 125000002524 organometallic group Chemical group 0.000 title abstract 2
- 150000001875 compounds Chemical class 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000746 purification Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 150000002894 organic compounds Chemical class 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Abstract
Organometallic or heteroatomic organic compounds are purified from e.g. oxygen and water by contacting with a hydrogenated getter alloy.
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT2000MI000892A IT1318481B1 (en) | 2000-04-20 | 2000-04-20 | Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy |
| TW090108461A TW550307B (en) | 2000-04-19 | 2001-04-09 | A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
| AU52549/01A AU5254901A (en) | 2000-04-19 | 2001-04-13 | A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
| CA002404195A CA2404195A1 (en) | 2000-04-19 | 2001-04-13 | A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
| KR1020027014012A KR20030001435A (en) | 2000-04-19 | 2001-04-13 | A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
| CN018082920A CN1218065C (en) | 2000-04-19 | 2001-04-13 | Process for purification of organometallic compounds or heteroatomic getter alloys |
| EP01925877A EP1274879A1 (en) | 2000-04-19 | 2001-04-13 | A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
| CN01808355A CN1425078A (en) | 2000-04-19 | 2001-04-13 | Process for purification of organometallic compounds or heteroato mic organic compounds with a catalyst based on iron and manganese supported on zeolites |
| PCT/IT2001/000185 WO2001079587A1 (en) | 2000-04-19 | 2001-04-13 | A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
| JP2001576967A JP2003531151A (en) | 2000-04-19 | 2001-04-13 | Method for purifying organometallic compounds or heteroatom compounds with hydrogenated getter alloys |
| MYPI20011828A MY127172A (en) | 2000-04-19 | 2001-04-17 | A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
| US10/273,862 US6797182B2 (en) | 2000-04-19 | 2002-10-18 | Process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT2000MI000892A IT1318481B1 (en) | 2000-04-20 | 2000-04-20 | Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| ITMI20000892A0 ITMI20000892A0 (en) | 2000-04-20 |
| ITMI20000892A1 ITMI20000892A1 (en) | 2001-10-20 |
| IT1318481B1 true IT1318481B1 (en) | 2003-08-25 |
Family
ID=11444905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT2000MI000892A IT1318481B1 (en) | 2000-04-19 | 2000-04-20 | Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy |
Country Status (1)
| Country | Link |
|---|---|
| IT (1) | IT1318481B1 (en) |
-
2000
- 2000-04-20 IT IT2000MI000892A patent/IT1318481B1/en active
Also Published As
| Publication number | Publication date |
|---|---|
| ITMI20000892A1 (en) | 2001-10-20 |
| ITMI20000892A0 (en) | 2000-04-20 |
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