IT1254004B - Manometro di ionizzazione a catodo caldo - Google Patents

Manometro di ionizzazione a catodo caldo

Info

Publication number
IT1254004B
IT1254004B ITRM920278A ITRM920278A IT1254004B IT 1254004 B IT1254004 B IT 1254004B IT RM920278 A ITRM920278 A IT RM920278A IT RM920278 A ITRM920278 A IT RM920278A IT 1254004 B IT1254004 B IT 1254004B
Authority
IT
Italy
Prior art keywords
electrode
flat
pressure gauge
hot cathode
cathode ionization
Prior art date
Application number
ITRM920278A
Other languages
English (en)
Inventor
Gunter Haas
Original Assignee
Max Planck Gesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft filed Critical Max Planck Gesellschaft
Publication of ITRM920278A0 publication Critical patent/ITRM920278A0/it
Publication of ITRM920278A1 publication Critical patent/ITRM920278A1/it
Application granted granted Critical
Publication of IT1254004B publication Critical patent/IT1254004B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

Oggetto dell'invenzione è un manometro di ionizzazione a catodo caldo con i seguenti elettrodi disposti a distanza reciproca nella sequenza indicata lungo un asse (A):a) un catodo termoionico (10) il quale presenta una parte intermedia attiva (10a) e parti di supporto laterali (10b, l0c);b) un elettrodo di controllo piano simile a diaframma (12),e) un elettrodo d'accelerazione piano (14) e d) un elettrodo collettore di ioni piano (16),e con una piastra di base (20), su cui sano montati l'elettrodo di controllo (12), l'elettrodo d'accelerazione (14) e l'elettrodo collettore di ioni (16) in ogni caso attraverso un mezzo di supporto che si estende perpendicolarmente alla parte principale dell'elettrodo in questione ed attraverso un bullone di raccordo (36, 30, 32) collegato al mezzo di supporto, in cui i bulloni di raccordo sono sempre supportati per mezzo di basi di materiale ceramico (22, 24, 26, 28) sulla piastra di base (20).
ITRM920278A 1991-04-16 1992-04-15 Manometro di ionizzazione a catodo caldo IT1254004B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4112407A DE4112407A1 (de) 1991-04-16 1991-04-16 Heisskathoden-ionisationsmanometer

Publications (3)

Publication Number Publication Date
ITRM920278A0 ITRM920278A0 (it) 1992-04-15
ITRM920278A1 ITRM920278A1 (it) 1993-10-15
IT1254004B true IT1254004B (it) 1995-09-05

Family

ID=6429706

Family Applications (1)

Application Number Title Priority Date Filing Date
ITRM920278A IT1254004B (it) 1991-04-16 1992-04-15 Manometro di ionizzazione a catodo caldo

Country Status (6)

Country Link
US (2) US5300890A (it)
JP (1) JP3177292B2 (it)
DE (2) DE9116476U1 (it)
FR (1) FR2685126B3 (it)
GB (1) GB2255442B (it)
IT (1) IT1254004B (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7418869B2 (en) * 2005-06-10 2008-09-02 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7207224B2 (en) * 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
KR100844513B1 (ko) 2006-04-14 2008-07-08 한국표준과학연구원 탄소나노튜브의 전계효과를 이용한 압력센서
JP6131113B2 (ja) * 2013-06-13 2017-05-17 キヤノンアネルバ株式会社 冷陰極電離真空計及び内壁保護部材
US10605687B2 (en) * 2016-02-29 2020-03-31 General Electric Company Spark gap device and method of measurement of X-ray tube vacuum pressure
CN112555113B (zh) * 2020-11-06 2022-06-14 兰州空间技术物理研究所 一种离子推力器栅极组件一体化绝缘结构

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743876A (en) * 1969-10-07 1973-07-03 Canadian Patents Dev Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode
US3839655A (en) * 1973-08-24 1974-10-01 Varian Associates Bayard-alpert vacuum ionization tube
US3891882A (en) * 1974-01-03 1975-06-24 Anthony J Barraco Ionization gauge
NL181763C (nl) * 1977-06-02 1987-10-16 Philips Nv Glimontladingslamp.
DE3628847C2 (de) * 1986-08-25 1995-12-14 Max Planck Gesellschaft Heißkathoden-Ionisationsmanometer
JPH03206934A (ja) * 1990-01-09 1991-09-10 Seiko Instr Inc 熱陰極電離真空計

Also Published As

Publication number Publication date
DE9116476U1 (de) 1992-12-24
JPH05288628A (ja) 1993-11-02
US5373240A (en) 1994-12-13
GB2255442A (en) 1992-11-04
GB9208344D0 (en) 1992-06-03
FR2685126B3 (fr) 1993-11-26
GB2255442B (en) 1995-03-08
JP3177292B2 (ja) 2001-06-18
DE4112407A1 (de) 1992-10-22
US5300890A (en) 1994-04-05
ITRM920278A1 (it) 1993-10-15
FR2685126A3 (fr) 1993-06-18
ITRM920278A0 (it) 1992-04-15

Similar Documents

Publication Publication Date Title
ATE132968T1 (de) Differenzdrucksensor mit membran mit freier randkonstruktion
CA2044267A1 (en) Plasma display panel and method of producing the same
MY111964A (en) Electrostatic loudspeaker system
IT8520101A0 (it) Procedimento per la fabbricazione di una unita' a piastre di intercettazione, per un cassetto di intercettazione.
IT1217152B (it) Vetro smerigliato,procedimento per produrre vetro smerigliato,cella fotovoltaica incorporante una lastra di vetro,e procedimento per la fabbricazione di tale cella
IT1254004B (it) Manometro di ionizzazione a catodo caldo
TW341615B (en) Vacuum double layer glass and its manufacturing method
DE3681202D1 (de) Abberrationsarmes spektrometer-objektiv hoher sekundaerelektronen-akzeptanz.
ES453662A1 (es) Conjunto de celulas de camara de ionizacion.
AU1563788A (en) Electromechanically triggered spark gap switch
MD960177A (en) Ozone generator
NO891488D0 (no) Elektrolysecelle av diafragmatypen.
EP0267593A3 (en) Improvements in or relating to lasers
USD321014S (en) Gauge face plate
FR2603103B3 (fr) Manometre a ionisation a cathode chaude
MY132973A (en) Electron gun for cathode ray tube
IT8822475A0 (it) Gioco di deflessione compensato per tubi a raggi catodici.
KR970070242A (ko) 플라즈마 에칭 전극
SU1771331A1 (ru) Проходная ионизационная камера
JPS6431335A (en) Electron beam generator
AR000229A1 (es) Conjunto de M x N espejos accionados de película delgada y método para la fabricación del mismo
MY113819A (en) Electron gun system for a color cathode-ray tube
JPH0374663U (it)
JP2555350B2 (ja) セラミツク製オゾン発生管用連結式水冷発生器
JPS6489135A (en) Multi-electrode deflector