IT1251281B - Componente ottico adattativo a film sottili elettroconduttivi basato sull'effetto joule - Google Patents
Componente ottico adattativo a film sottili elettroconduttivi basato sull'effetto jouleInfo
- Publication number
- IT1251281B IT1251281B ITMI911942A ITMI911942A IT1251281B IT 1251281 B IT1251281 B IT 1251281B IT MI911942 A ITMI911942 A IT MI911942A IT MI911942 A ITMI911942 A IT MI911942A IT 1251281 B IT1251281 B IT 1251281B
- Authority
- IT
- Italy
- Prior art keywords
- optical component
- optical
- phase modulation
- thin film
- joule effect
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 9
- 230000000694 effects Effects 0.000 title abstract 3
- 230000003044 adaptive effect Effects 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 230000004075 alteration Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/18—Function characteristic adaptive optics, e.g. wavefront correction
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
E' descritto un componente ottico adattativo, di tipo trasmissivo o riflessivo, in cui, per ottenere la modulazione di fase necessaria per svolgere la funzione di adattamento del fronte d'onda della radiazione ottica che attraversa il componente ottico, o che viene riflessa da esso, si eccita elettricamente un film sottile conduttivo depositato sul componente stesso. Il calore generato per effetto Joule dal film percorso da corrente induce una deformazione del substrato ottico ed una variazione dell'indice di rifrazione dell'aria che lambisce la superficie ottica. Questi due effetti generano la modulazione di fase suddetta. Viene descritto un procedimento per fabbricare un componente ottico del tipo sopra definito e vengono indicati vari metodi per ottenere la migliore approssimazione possibile ed una modulazione di fase prefissata. Il componente ottico dell'invenzione trova impiego, in particolare, in sistemi ottici che richiedono la correzione in tempo reale delle aberrazioni.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI911942A IT1251281B (it) | 1991-07-12 | 1991-07-12 | Componente ottico adattativo a film sottili elettroconduttivi basato sull'effetto joule |
| PCT/EP1992/001528 WO1993001513A1 (en) | 1991-07-12 | 1992-07-07 | A thin film adaptive optical component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI911942A IT1251281B (it) | 1991-07-12 | 1991-07-12 | Componente ottico adattativo a film sottili elettroconduttivi basato sull'effetto joule |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| ITMI911942A0 ITMI911942A0 (it) | 1991-07-12 |
| ITMI911942A1 ITMI911942A1 (it) | 1993-01-13 |
| IT1251281B true IT1251281B (it) | 1995-05-08 |
Family
ID=11360344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ITMI911942A IT1251281B (it) | 1991-07-12 | 1991-07-12 | Componente ottico adattativo a film sottili elettroconduttivi basato sull'effetto joule |
Country Status (2)
| Country | Link |
|---|---|
| IT (1) | IT1251281B (it) |
| WO (1) | WO1993001513A1 (it) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006045075A1 (de) | 2006-09-21 | 2008-04-03 | Carl Zeiss Smt Ag | Steuerbares optisches Element |
| WO2009026970A1 (en) | 2007-08-24 | 2009-03-05 | Carl Zeiss Smt Ag | Controllable optical element and method for operating an optical element with thermal actuators and projection exposure apparatus for semiconductor lithography |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT48480B (de) * | 1909-03-15 | 1911-06-10 | Lindgens & Soehne | Vorrichtung zur Herstellung von Bleioxyd durch Einwirkung eines Luft-Wasserdampfgemisches auf geschmolzenes Blei. |
| DE2434542A1 (de) * | 1974-07-18 | 1976-01-29 | Agfa Gevaert Ag | Verfahren und vorrichtung zur phasenmodulation |
| US4773748A (en) * | 1984-10-09 | 1988-09-27 | Hughes Aircraft Company | Dynamically controlled mirror for reduction of projected image distortion |
| GB2177225A (en) * | 1985-06-25 | 1987-01-14 | Itek Corp | Wavefront phase modulator |
-
1991
- 1991-07-12 IT ITMI911942A patent/IT1251281B/it active IP Right Grant
-
1992
- 1992-07-07 WO PCT/EP1992/001528 patent/WO1993001513A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| ITMI911942A1 (it) | 1993-01-13 |
| ITMI911942A0 (it) | 1991-07-12 |
| WO1993001513A1 (en) | 1993-01-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 0001 | Granted | ||
| TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19950731 |