IT1162748B - Struttura di raffreddamento di dispositivi semiconduttori - Google Patents

Struttura di raffreddamento di dispositivi semiconduttori

Info

Publication number
IT1162748B
IT1162748B IT23939/79A IT2393979A IT1162748B IT 1162748 B IT1162748 B IT 1162748B IT 23939/79 A IT23939/79 A IT 23939/79A IT 2393979 A IT2393979 A IT 2393979A IT 1162748 B IT1162748 B IT 1162748B
Authority
IT
Italy
Prior art keywords
tunnels
integrated circuit
circuit devices
cooling structure
semiconductive devices
Prior art date
Application number
IT23939/79A
Other languages
English (en)
Other versions
IT7923939A0 (it
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT7923939A0 publication Critical patent/IT7923939A0/it
Application granted granted Critical
Publication of IT1162748B publication Critical patent/IT1162748B/it

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01014Silicon [Si]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01019Potassium [K]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/0102Calcium [Ca]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • H01L2924/01322Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/10251Elemental semiconductors, i.e. Group IV
    • H01L2924/10253Silicon [Si]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12041LED
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15312Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S165/00Heat exchange
    • Y10S165/908Fluid jets

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
IT23939/79A 1978-07-11 1979-06-28 Struttura di raffreddamento di dispositivi semiconduttori IT1162748B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/923,592 US4203129A (en) 1978-07-11 1978-07-11 Bubble generating tunnels for cooling semiconductor devices

Publications (2)

Publication Number Publication Date
IT7923939A0 IT7923939A0 (it) 1979-06-28
IT1162748B true IT1162748B (it) 1987-04-01

Family

ID=25448933

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23939/79A IT1162748B (it) 1978-07-11 1979-06-28 Struttura di raffreddamento di dispositivi semiconduttori

Country Status (6)

Country Link
US (1) US4203129A (it)
EP (1) EP0007015B1 (it)
JP (1) JPS5512798A (it)
CA (1) CA1115822A (it)
DE (1) DE2966253D1 (it)
IT (1) IT1162748B (it)

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US4246597A (en) * 1979-06-29 1981-01-20 International Business Machines Corporation Air cooled multi-chip module having a heat conductive piston spring loaded against the chips
US4449580A (en) * 1981-06-30 1984-05-22 International Business Machines Corporation Vertical wall elevated pressure heat dissipation system
JPS58501648A (ja) * 1981-12-29 1983-09-29 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション 冷却手段を備えた半導体組立体
US4468717A (en) * 1982-06-09 1984-08-28 Sperry Corporation Apparatus for cooling integrated circuit chips
US4450505A (en) * 1982-06-09 1984-05-22 Sperry Corporation Apparatus for cooling integrated circuit chips
US4485429A (en) * 1982-06-09 1984-11-27 Sperry Corporation Apparatus for cooling integrated circuit chips
US4514746A (en) * 1983-12-01 1985-04-30 Flakt Aktiebolag Apparatus for cooling telecommunications equipment in a rack
JPS60136352A (ja) * 1983-12-26 1985-07-19 Hitachi Ltd 集積回路チップの冷却装置
JPS60229353A (ja) * 1984-04-27 1985-11-14 Hitachi Ltd 熱伝達装置
US4688150A (en) * 1984-06-15 1987-08-18 Texas Instruments Incorporated High pin count chip carrier package
US4694378A (en) * 1984-12-21 1987-09-15 Hitachi, Ltd. Apparatus for cooling integrated circuit chips
KR900001393B1 (en) * 1985-04-30 1990-03-09 Fujitsu Ltd Evaporation cooling module for semiconductor device
US4748495A (en) * 1985-08-08 1988-05-31 Dypax Systems Corporation High density multi-chip interconnection and cooling package
US4741385A (en) * 1986-02-18 1988-05-03 Iowa State University Research Foundation, Inc. Gas jet impingement means and method
US4833567A (en) * 1986-05-30 1989-05-23 Digital Equipment Corporation Integral heat pipe module
US4757370A (en) * 1987-01-12 1988-07-12 International Business Machines Corp. Circuit package cooling technique with liquid film spreading downward across package surface without separation
EP0298372B1 (en) * 1987-07-10 1993-01-13 Hitachi, Ltd. Semiconductor cooling apparatus
US4884169A (en) * 1989-01-23 1989-11-28 Technology Enterprises Company Bubble generation in condensation wells for cooling high density integrated circuit chips
US5004973A (en) * 1989-07-13 1991-04-02 Thermal Management, Inc. Method and apparatus for maintaining electrically operating device temperatures
JP2741255B2 (ja) * 1989-08-18 1998-04-15 株式会社日立製作所 沸騰冷却用伝熱体
NO894328L (no) * 1989-10-30 1991-05-02 Dolphin Server Technology As Fremgangsmaate og anordning for kjoeling av elektroniske komponenter.
US5097385A (en) * 1990-04-18 1992-03-17 International Business Machines Corporation Super-position cooling
US5198889A (en) * 1990-06-30 1993-03-30 Kabushiki Kaisha Toshiba Cooling apparatus
US5106451A (en) * 1990-11-15 1992-04-21 International Business Machines Corporation Heat sink and method of attachment
US5168348A (en) * 1991-07-15 1992-12-01 International Business Machines Corporation Impingment cooled compliant heat sink
JPH05136305A (ja) * 1991-11-08 1993-06-01 Hitachi Ltd 発熱体の冷却装置
WO1993024983A1 (de) * 1992-05-25 1993-12-09 Mannesmann Ag Elektrische maschine mit halbleiterventilen
US5339214A (en) * 1993-02-12 1994-08-16 Intel Corporation Multiple-fan microprocessor cooling through a finned heat pipe
US5323818A (en) * 1993-04-28 1994-06-28 International Business Machines Corporation Apparatus and process for dispensing thermal paste into a thermal conduction module cold plate
US5513070A (en) * 1994-12-16 1996-04-30 Intel Corporation Dissipation of heat through keyboard using a heat pipe
FR2738446B1 (fr) * 1995-08-30 1997-09-26 Gec Alsthom Transport Sa Procede et dispositif de filtrage d'un milieu liquide isolant electrique et caloriporteur et groupe d'electronique de puissance comportant un tel dispositif
US5665648A (en) * 1995-12-21 1997-09-09 Hughes Electronics Integrated circuit spring contact fabrication methods
US6167948B1 (en) 1996-11-18 2001-01-02 Novel Concepts, Inc. Thin, planar heat spreader
US5895972A (en) 1996-12-31 1999-04-20 Intel Corporation Method and apparatus for cooling the backside of a semiconductor device using an infrared transparent heat slug
US6570247B1 (en) 1997-12-30 2003-05-27 Intel Corporation Integrated circuit device having an embedded heat slug
US6214647B1 (en) 1998-09-23 2001-04-10 International Business Machines Corporation Method for bonding heatsink to multiple-height chip
US6352104B1 (en) 1999-10-19 2002-03-05 International Business Machines Corporation Heat sink with enhanced heat spreading and compliant interface for better heat transfer
US6448642B1 (en) * 2000-01-27 2002-09-10 William W. Bewley Pressure-bonded heat-sink system
KR100438404B1 (ko) * 2001-11-28 2004-07-02 동부전자 주식회사 반도체 패키지의 조립 공정 단축 및 접촉불량 방지방법
US7385821B1 (en) 2001-12-06 2008-06-10 Apple Inc. Cooling method for ICS
US7035104B2 (en) * 2002-08-06 2006-04-25 Mudawar Thermal Systems Inc. Apparatus for heat transfer and critical heat flux enhancement
US6822465B1 (en) * 2002-08-09 2004-11-23 Unisys Corporation Method of regulating the temperature of integrated circuit modules, using a heat exchanger with a face of a solid malleable metal and a release agent
US20060088746A1 (en) * 2004-10-25 2006-04-27 3M Innovative Properties Company Passive dual-phase cooling for fuel cell assemblies
US20060090881A1 (en) * 2004-10-29 2006-05-04 3M Innovative Properties Company Immersion cooling apparatus
US7581585B2 (en) 2004-10-29 2009-09-01 3M Innovative Properties Company Variable position cooling apparatus
US7394659B2 (en) * 2004-11-19 2008-07-01 International Business Machines Corporation Apparatus and methods for cooling semiconductor integrated circuit package structures
KR100736891B1 (ko) * 2006-01-13 2007-07-10 서울반도체 주식회사 Led 램프
US7492594B2 (en) * 2007-05-03 2009-02-17 Hamilton Sundstrand Corporation Electronic circuit modules cooling
US8369090B2 (en) 2009-05-12 2013-02-05 Iceotope Limited Cooled electronic system
GB2467805C (en) * 2009-05-12 2011-06-01 Iceotope Ltd Cooled electronic system
US11421921B2 (en) 2012-09-07 2022-08-23 David Lane Smith Cooling electronic devices installed in a subsurface environment
SG11201501690SA (en) 2012-09-07 2015-04-29 David Smith Apparatus and method for geothermally cooling electronic devices installed in a subsurface environment
US11191186B2 (en) 2014-06-24 2021-11-30 David Lane Smith System and method for fluid cooling of electronic devices installed in an enclosure
US9699939B2 (en) 2014-06-24 2017-07-04 David Lane Smith System and method for fluid cooling of electronic devices installed in a sealed enclosure
US9560789B2 (en) 2014-06-24 2017-01-31 David Lane Smith System and method for fluid cooling of electronic devices installed in a sealed enclosure
US9258926B2 (en) 2014-06-24 2016-02-09 David Lane Smith System and method for fluid cooling of electronic devices installed in a sealed enclosure
US11744041B2 (en) 2014-06-24 2023-08-29 David Lane Smith System and method for fluid cooling of electronic devices installed in an enclosure
US9408332B2 (en) 2014-06-24 2016-08-02 David Lane Smith System and method for fluid cooling of electronic devices installed in a sealed enclosure
US20160360639A1 (en) * 2015-06-08 2016-12-08 Advantech Co., Ltd. Dynamic heat conduction system
GB2543549B (en) * 2015-10-21 2020-04-15 Andor Tech Limited Thermoelectric Heat pump system
US10980151B2 (en) * 2018-07-31 2021-04-13 Hewlett Packard Enterprise Development Lp Flexible heat transfer mechanism configurations
US20220015262A1 (en) * 2020-07-09 2022-01-13 Intel Corporation Technologies for dynamic cooling in a multi-chip package with programmable impingement valves
JP7267494B1 (ja) * 2022-09-29 2023-05-01 Kddi株式会社 サーバシステム

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US3573569A (en) * 1969-08-12 1971-04-06 Gen Motors Corp Controlled rectifier mounting assembly
DE2107549A1 (de) * 1970-02-19 1971-09-02 Texas Instruments Inc Trager einer elektronischen Schaltung mit einem Sammelsystem mit Warmeleitungs eigenschaften fur alle Richtungen
US3852805A (en) * 1973-06-18 1974-12-03 Gen Electric Heat-pipe cooled power semiconductor device assembly having integral semiconductor device evaporating surface unit
US3972063A (en) * 1973-10-19 1976-07-27 Mitsubishi Denki Kabushiki Kaisha Vapor cooled semiconductor device enclosed in an envelope having a compression mechanism for holding said device within said envelope
JPS50108367U (it) * 1974-02-14 1975-09-04
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US4027728A (en) * 1975-03-31 1977-06-07 Mitsubishi Denki Kabushiki Kaisha Vapor cooling device for semiconductor device
US4045245A (en) * 1976-01-05 1977-08-30 Motorola, Inc. Solar cell package
US4138692A (en) * 1977-09-12 1979-02-06 International Business Machines Corporation Gas encapsulated cooling module

Also Published As

Publication number Publication date
DE2966253D1 (en) 1983-11-10
JPS6211509B2 (it) 1987-03-12
EP0007015A1 (de) 1980-01-23
JPS5512798A (en) 1980-01-29
CA1115822A (en) 1982-01-05
US4203129A (en) 1980-05-13
IT7923939A0 (it) 1979-06-28
EP0007015B1 (de) 1983-10-05

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