IT1131610B - Metodo di incisione isotropica di trasuttori al silicio - Google Patents

Metodo di incisione isotropica di trasuttori al silicio

Info

Publication number
IT1131610B
IT1131610B IT22092/80A IT2209280A IT1131610B IT 1131610 B IT1131610 B IT 1131610B IT 22092/80 A IT22092/80 A IT 22092/80A IT 2209280 A IT2209280 A IT 2209280A IT 1131610 B IT1131610 B IT 1131610B
Authority
IT
Italy
Prior art keywords
transuctors
silicon
engraving method
isotropic engraving
isotropic
Prior art date
Application number
IT22092/80A
Other languages
English (en)
Other versions
IT8022092A0 (it
Inventor
Roger L Krechmry
Original Assignee
Babcock & Wilcox Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock & Wilcox Co filed Critical Babcock & Wilcox Co
Publication of IT8022092A0 publication Critical patent/IT8022092A0/it
Application granted granted Critical
Publication of IT1131610B publication Critical patent/IT1131610B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/977—Thinning or removal of substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
IT22092/80A 1979-06-04 1980-05-15 Metodo di incisione isotropica di trasuttori al silicio IT1131610B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/045,499 US4222815A (en) 1979-06-04 1979-06-04 Isotropic etching of silicon strain gages

Publications (2)

Publication Number Publication Date
IT8022092A0 IT8022092A0 (it) 1980-05-15
IT1131610B true IT1131610B (it) 1986-06-25

Family

ID=21938239

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22092/80A IT1131610B (it) 1979-06-04 1980-05-15 Metodo di incisione isotropica di trasuttori al silicio

Country Status (5)

Country Link
US (1) US4222815A (it)
JP (1) JPS55166969A (it)
AU (1) AU531055B2 (it)
CA (1) CA1126631A (it)
IT (1) IT1131610B (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4752505A (en) * 1987-01-13 1988-06-21 Hewlett-Packard Company Pre-metal deposition cleaning for bipolar semiconductors
GR872040B (en) * 1987-01-30 1988-04-05 Hughes Aircraft Co Methods for removing stringers appearing in plated through holes in copper containing multi layer printed wiring boards
US5177661A (en) * 1989-01-13 1993-01-05 Kopin Corporation SOI diaphgram sensor
US5490034A (en) * 1989-01-13 1996-02-06 Kopin Corporation SOI actuators and microsensors
US5095401A (en) * 1989-01-13 1992-03-10 Kopin Corporation SOI diaphragm sensor
US5478266A (en) * 1993-04-12 1995-12-26 Charged Injection Corporation Beam window devices and methods of making same
US5391958A (en) * 1993-04-12 1995-02-21 Charged Injection Corporation Electron beam window devices and methods of making same
US7204162B2 (en) * 2004-11-23 2007-04-17 Delphi Technologies, Inc. Capacitive strain gauge
CN110741248B (zh) * 2017-06-11 2023-05-30 亿皮米特瑞克斯公司 基于芯片的多通道电化学转换器及其使用方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3677848A (en) * 1970-07-15 1972-07-18 Rca Corp Method and material for etching semiconductor bodies
US3701705A (en) * 1971-06-07 1972-10-31 Western Electric Co Fluidic masking apparatus for etching
US3743842A (en) * 1972-01-14 1973-07-03 Massachusetts Inst Technology Soft x-ray lithographic apparatus and process
US4025942A (en) * 1974-03-18 1977-05-24 Kulite Semiconductor Products, Inc. Low pressure transducers employing large silicon diaphragms having non-critical electrical properties
US4019388A (en) * 1976-03-11 1977-04-26 Bailey Meter Company Glass to metal seal
US4170512A (en) * 1977-05-26 1979-10-09 Massachusetts Institute Of Technology Method of manufacture of a soft-X-ray mask

Also Published As

Publication number Publication date
AU531055B2 (en) 1983-08-11
CA1126631A (en) 1982-06-29
IT8022092A0 (it) 1980-05-15
US4222815A (en) 1980-09-16
JPS621272B2 (it) 1987-01-12
AU5820180A (en) 1980-12-11
JPS55166969A (en) 1980-12-26

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